阅读说明：本技术 振动元件 (Vibrating element ) 是由 藤田健一 种桥健治 田中史记 于 2021-05-26 设计创作，主要内容包括：本发明提供一种振动元件,既能抑制制造工序复杂化,又能抑制可动部产生摆动以外的位移。所述振动元件包括：可动部；金属制的基板,包含各自具有第一端部及第二端部的一对支撑梁部、支撑第一端部的支撑部、以及可摆动地支撑可动部的扭力梁部；驱动源；以及保持构件,保持基板,在一对支撑梁部各自的第二端部,设有被固定于保持构件的固定部,固定部通过调整相对于保持构件的倾斜,从而以一对支撑梁部各自在扭力梁部所延伸的第一方向上对扭力梁部朝远离可动部的方向施加有张力的状态而固定于保持构件。(The invention provides a vibration element which can restrain the complication of the manufacturing process and the displacement of a movable part except the swing. The vibration element includes: a movable part; a metal substrate including a pair of support beam portions each having a first end portion and a second end portion, a support portion supporting the first end portion, and a torsion beam portion swingably supporting the movable portion; a drive source; and a holding member that holds the substrate, wherein a fixing portion fixed to the holding member is provided at a second end portion of each of the pair of support beam portions, and the fixing portion is fixed to the holding member in a state in which tension is applied to the torsion beam portion in a direction away from the movable portion in a first direction in which the torsion beam portion extends, by adjusting an inclination with respect to the holding member.)

1. A vibratory element, comprising:

a movable part;

a metal substrate including a pair of support beam portions each having a first end portion and a second end portion, a support portion supporting the first end portion of each of the pair of support beam portions, and a torsion beam portion swingably supporting the movable portion;

a drive source provided in the support portion and generating a plate wave for swinging the movable portion; and

a holding member that holds the substrate,

a fixing portion fixed to the holding member is provided at the second end portion of each of the pair of support beam portions,

the fixing portion is fixed to the holding member in a state in which tension is applied to the torsion beam portion in a direction away from the movable portion in the first direction in which the pair of support beam portions each extend, by adjusting any one of an inclination with respect to the holding member, a fixing position with respect to the holding member in a fixing plane along the surface of the substrate, and a direction of fixing in the fixing plane.

2. Vibrating element according to claim 1,

the fixing portion is fixed in the following state: the state of inclination with respect to the holding member is adjusted by twisting in opposite directions to each other, or the state of the fixed position with respect to the holding member in the fixed surface is adjusted by bending the pair of support beam portions in opposite directions to each other.

3. Vibrating element according to claim 2,

the fixing portion is fixed to the holding member in a state in which:

a state in which a first portion of the fixed portion in the first direction on a side closer to the movable portion is twisted so as to rotate in a direction from a back surface side toward a front surface side of the movable portion, or a state in which a second portion of the fixed portion in the first direction on a side farther from the movable portion is twisted so as to rotate in a direction from the front surface side toward the back surface side of the movable portion, or

The pair of support beam portions is bent in a state in which a distance between the second ends of the pair of support beam portions is greater than a distance between the first ends of the pair of support beam portions.

4. Vibrating element according to claim 3,

in the case where the fixing portion is fixed to the holding member in a twisted state,

the holding member includes an abutting portion having an abutting surface abutting against the fixing portion,

the contact surface is inclined such that a first contact portion and a second contact portion are located at positions different from each other in a second direction orthogonal to a surface of the movable portion, the first contact portion is closer to a side of the movable portion in the first direction, and the second contact portion is farther from the side of the movable portion in the first direction.

5. Vibrating element according to claim 4,

the abutting portion includes an abutting member provided independently of the holding member,

the vibrating element further comprises a fixed angle adjusting mechanism, and the fixed angle adjusting mechanism can adjust the inclination angle of the abutting surface.

6. Vibrating element according to claim 3,

in the case where the fixing portion is fixed to the holding member in a twisted state,

the holding member includes an abutting portion having an abutting surface abutting against the fixing portion,

the vibrating element further includes a first partition member provided at a position between the fixed portion and the abutting surface in a second direction orthogonal to the surface of the movable portion,

the fixing portion is fixed to the holding member in a state in which the inclination with respect to the holding member is adjusted by the first partition member.

7. Vibrating element according to any one of claims 4 to 6,

the fixing portion is fixed to the holding member in a state where the support beam portion is twisted in a direction in which an end portion of the torsion beam portion connected to the movable portion protrudes to a surface side of the movable portion.

8. The vibrating element of any one of claims 4 to 7, further comprising:

a second partition member disposed between the abutting portion and the holding member in a direction in which the support beam portion extends,

the contact portion is configured such that a fixing position of the fixing portion in a direction in which the support beam portion extends can be adjusted by the second partitioning member.

9. Vibrating element according to claim 3,

in the case where the support beam portion is fixed to the holding member in a state where the support beam portion is bent,

the fixing portion has a fixing position adjusting portion that penetrates the fixing portion in a thickness direction of the fixing portion and extends along the first direction,

the fixing portion is fixed to the holding member in a state in which a position in the fixing surface is adjusted by a fixing member inserted through the fixing position adjusting portion.

10. Vibrating element according to claim 3,

the vibration element includes: a first screw member for fixing one of the pair of fixing portions and a second screw member for fixing the other of the pair of fixing portions,

the holding member is provided with a first screw hole for fastening the first screw member and a second screw hole for fastening the second screw member,

the first screw hole and the second screw hole are configured such that a force applied to one of the pair of support beam portions via the one fixing portion when the first screw member is fastened and a force applied to the other of the pair of support beam portions via the other fixing portion when the second screw member is fastened are each directed in a direction away from the movable portion in the first direction.

Technical Field

The present invention relates to a vibration element.

Background

Conventionally, a vibration element is known (for example, see patent document 1).

Patent document 1 discloses a micro mirror device (micro mirror device) including: a micromirror; a torsion bar (torsion bar) rotatably supporting the micromirror; and a driving electrode driving the micromirror.

Here, in the micromirror device disclosed in patent document 1, the torsion bar is configured to be flexible in order to increase the rotation angle of the mirror at a low voltage. However, the torsion bar is applied with not only a rotational torque generated when the micromirror is rotated (swung), but also a force in the vertical direction due to the weight of the micromirror and the like. Therefore, if the torsion bar is made soft, the torsion bar is deflected by a force in the vertical direction, and displacement other than mirror rotation (oscillation of the mirror portion) is likely to occur with respect to the micromirror. Although not explicitly described in patent document 1, it is considered that the torsion bar is bent by the influence of heat generated when the micromirror is oscillated, and the like, and thus displacement other than mirror rotation is generated in the micromirror.

Therefore, the micromirror device disclosed in patent document 1 discloses a configuration in which: in order to suppress displacement other than the oscillation of the mirror, the torsion bar is tensioned, thereby improving the rigidity in the vertical and horizontal directions as compared with the rotational direction. Specifically, the structure disclosed in patent document 1 discloses the following structure: the torsion bar is formed into a film so as to have tensile stress, thereby improving the rigidity in the vertical and horizontal directions as compared with the rotational direction. Therefore, in the structure disclosed in patent document 1, the rigidity of the torsion bar in the vertical and horizontal directions is improved by forming the oxide film on the torsion bar.

[ Prior art documents ]

[ patent document ]

Patent document 1: japanese patent laid-open No. 2005-321663

Disclosure of Invention

[ problems to be solved by the invention ]

However, in the micromirror element (oscillating element) described in patent document 1, a structure in which a torsion bar (torsion beam portion) is formed in order to suppress displacement other than the oscillation of the micromirror (movable portion) is adopted. The film formation step involves a plurality of steps such as mask formation, resist application, thin film formation, and resist removal, and therefore has a problem of complicated production steps.

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a vibration element capable of suppressing the generation of displacement other than oscillation of a movable portion while suppressing the complexity of a manufacturing process.

[ means for solving problems ]

The vibration element of the first aspect of the invention includes: a movable part; a metal substrate including a pair of support beam portions each having a first end and a second end, a support portion supporting the first end of each of the pair of support beam portions, and a torsion beam portion swingably supporting the movable portion; a drive source provided in the support portion and generating a plate wave for swinging the movable portion; and a holding member that holds the substrate, wherein a fixing portion fixed to the holding member is provided at a second end portion of each of the pair of support beam portions, and the fixing portion is fixed to the holding member in a state in which the pair of support beam portions each apply tension to the torsion beam portion in a direction away from the movable portion in the first direction in which the torsion beam portion extends, by adjusting any one of an inclination with respect to the holding member, a fixing position with respect to the holding member in a fixing plane along a surface of the substrate, and a direction of fixing in the fixing plane.

In the vibration element according to the aspect of the present invention, as described above, the fixing portion is fixed to the holding member in a state in which the pair of support beam portions each apply tension to the torsion beam portion in the first direction in which the torsion beam portion extends in the direction away from the movable portion by adjusting any one of the inclination with respect to the holding member, the fixing position with respect to the holding member in the fixing plane along the surface of the substrate, and the direction of fixing in the fixing plane. Thus, by adjusting the fixing manner of the fixing portion with respect to the holding member, it is possible to apply (impart) tension to the torsion beam portion in the first direction in a direction away from the movable portion without providing a member for applying tension to the torsion beam portion in the support beam portion by film formation. As a result, since tension can be applied to the torsion beam portion without forming a film on the torsion beam portion, it is possible to suppress the displacement of the movable portion while suppressing the complexity of the manufacturing process, compared with a structure in which a member for applying tension is formed on the torsion beam portion by forming a film that is complicated in the manufacturing process.

In the vibration element according to the one aspect, it is preferable that the fixing portion is fixed in a state in which: the state of inclination with respect to the holding member is adjusted by twisting in opposite directions to each other, or the state of the fixed position with respect to the holding member in the fixed plane is adjusted by bending the pair of support beam portions in opposite directions to each other. With this configuration, when the fixing portions are fixed in a state in which the inclination with respect to the holding member is adjusted by twisting the fixing portions in opposite directions, the support beam portions are twisted in opposite directions by twisting the fixing portions in opposite directions, and therefore, the torsion beam portion can be easily tensioned in a direction away from the movable portion via the support beam portions. In addition, when the fixing portion is fixed in a state in which the fixing position with respect to the holding member in the fixing surface is adjusted by bending the pair of support beam portions in opposite directions to each other, the pair of support beam portions are bent in opposite directions, whereby the torsion beam portion can be easily tensioned in a direction away from the movable portion via the support beam portions. As a result, since the torsion beam portion can be easily tensioned in the direction away from the movable portion via the support beam portion, it is possible to easily suppress the movable portion from being displaced other than by swinging while suppressing the complexity of the manufacturing process.

In this case, it is preferable that the fixing portion is fixed to the holding member in a state in which: the fixing portion is fixed to the holding member in a state in which a first portion of the portion in the first direction of the fixing portion on the side closer to the movable portion is twisted so as to rotate in a direction from the back surface side toward the front surface side of the movable portion, or in a state in which a second portion of the portion in the first direction of the fixing portion on the side farther from the movable portion is twisted so as to rotate in a direction from the front surface side toward the back surface side of the movable portion, or in a state in which the pair of support beam portions is bent so that a distance between the second end portions of the pair of support beam portions is larger than a distance between the first end portions of the pair of support beam portions. With this configuration, the first portion of the fixing portion is twisted in the direction from the back surface side to the front surface side of the movable portion, or the second portion is twisted in the direction from the front surface side to the back surface side of the movable portion, whereby the torsion beam portion can be easily and reliably tensioned in the first direction in the direction away from the movable portion. Further, by bending the pair of support beam portions such that the distance between the second end portions is larger than the distance between the first end portions, it is possible to easily and reliably apply a tension in a direction away from the movable portion to the torsion beam portion in the first direction. As a result, since the torsion beam portion can be easily and reliably tensioned in the direction away from the movable portion via the support beam portion, it is possible to more easily suppress the movable portion from being displaced other than by swinging while suppressing the complexity of the manufacturing process.

In the structure in which the fixed portion is fixed to the holding member in a twisted state or the fixed portion is fixed to the holding member in a state in which the pair of support beam portions are bent, it is preferable that, in a case in which the fixed portion is fixed to the holding member in a twisted state, the holding member includes an abutting portion having an abutting surface that abuts against the fixed portion, the abutting surface being inclined such that a first abutting portion and a second abutting portion are located at mutually different positions in a second direction orthogonal to a surface of the movable portion, the first abutting portion being closer to a side of the movable portion in the first direction, the second abutting portion being farther from the side of the movable portion in the first direction. In the above-described configuration, since the contact surface can be easily inclined, the fixing portion can be easily twisted in the opposite direction by fixing the fixing portion in contact with the contact surface. As a result, the fixing portion can be easily fixed to the holding member so that the torsion beam portion is tensioned in the first direction in a direction away from the movable portion by the pair of support beam portions.

In this case, it is preferable that the abutting portion includes an abutting member provided separately from the holding member, and the vibration element further includes a fixed angle adjusting mechanism capable of adjusting an inclination angle of the abutting surface. With this configuration, the inclination of the fixing portion with respect to the holding member can be easily adjusted by adjusting the inclination angle of the abutment surface. As a result, the magnitude of the tension applied to the torsion beam portion can be easily adjusted.

In the structure in which the fixing portion is fixed to the holding member in a twisted state or the fixing portion is fixed to the holding member in a state in which the pair of support beam portions are bent, it is preferable that, in a case in which the fixing portion is fixed to the holding member in a twisted state, the holding member includes an abutting portion having an abutting surface abutting against the fixing portion, the vibration element further includes a first partitioning member provided at a position between the fixing portion and the abutting surface in a second direction orthogonal to the surface of the movable portion, and the fixing portion is fixed to the holding member in a state in which an inclination with respect to the holding member is adjusted by the first partitioning member. With this configuration, the fixing portion can be inclined with respect to the holding member by the first partition member. As a result, the fixing portion can be easily inclined with respect to the holding member without inclining the abutment surface.

In the structure in which the fixing portion is fixed to the holding member in a twisted state, it is preferable that the fixing portion is fixed to the holding member in a state in which the support beam portion is twisted in a direction in which an end portion of the torsion beam portion connected to the movable portion protrudes to a surface side of the movable portion. With this configuration, tension can be applied to the front surface side of the movable portion in addition to the torsion beam portion in the first direction in the direction away from the movable portion. As a result, for example, when the surface of the movable portion is arranged in the vertical upward direction, the sinking of the movable portion due to the weight of the movable portion can be suppressed by the tension applied to the surface side of the movable portion, and therefore, displacement other than the swinging of the movable portion can be further suppressed.

In the structure in which the fixing portion is fixed to the holding member in a twisted state, it is preferable that the fixing portion further includes a second partitioning member disposed between the abutting portion and the holding member in a direction in which the support beam portion extends, and the abutting portion is configured so that a fixing position of the fixing portion in the direction in which the support beam portion extends can be adjusted by the second partitioning member. With this configuration, since the fixing position of the fixing portion can be adjusted in the direction in which the support beam portion extends, even when manufacturing tolerances occur in the substrate and the holding member, errors in the fixing position of the fixing portion during assembly can be reduced. As a result, the vibration element can be easily manufactured.

In the structure in which the fixing portion is fixed to the holding member in a twisted state or in a state in which the fixing portion is fixed to the holding member in a state in which the pair of support beam portions are bent, it is preferable that the fixing portion has a fixing position adjusting portion which penetrates the fixing portion in a thickness direction of the fixing portion and extends in the first direction, and the fixing portion is fixed to the holding member in a state in which a position in the fixing surface is adjusted by the fixing member inserted through the fixing position adjusting portion, in a case where the fixing portion is fixed to the holding member in a state in which the support beam portions are bent. With this configuration, since the fixed position adjusting portion extends in the first direction, the distance between the second end portions in the first direction when the fixed portion is fixed to the holding member can be easily adjusted. As a result, the magnitude of the tension applied to the torsion beam portion via the support beam portion can be easily adjusted.

In the above-described structure in which the fixing portion is fixed to the holding member in a twisted state or the fixing portion is fixed to the holding member in a state in which the pair of support beam portions are bent, the vibration element preferably includes: the holding member is provided with a first screw hole to which the first screw member is fastened and a second screw hole to which the second screw member is fastened, and the first screw hole and the second screw hole are configured such that a force applied to one of the pair of support beam portions via one of the fixing portions when the first screw member is fastened and a force applied to the other of the pair of support beam portions via the other of the fixing portions when the second screw member is fastened are each directed away from the movable portion in the first direction.

In the above-described configuration, since the pair of support beam portions are respectively urged in the first direction in a direction away from the movable portion by fixing each of the pair of fixing portions by the first screw member and the second screw member, the positions of the pair of support beam portions can be easily changed in the first direction toward the position away from the movable portion. As a result, the tensile force in the direction away from the movable portion in the first direction can be easily applied to the torsion beam portion via the support beam portion. Further, by adjusting the fastening state (angle of the screw member) of the first screw member and the second screw member, the direction in which the fixing portion in the fixing surface is fixed can be easily adjusted. As a result, the position of the pair of support beam portions in the fixing surface can be easily changed by adjusting the direction in which the fixing portion in the fixing surface is fixed, and therefore the tension applied to the torsion beam portion via the support beam portion can be easily adjusted.

[ Effect of the invention ]

According to the present invention, as described above, it is possible to provide a vibration element and an optical scanning device in which the occurrence of displacement other than oscillation of a movable portion can be suppressed while suppressing the complexity of the manufacturing process.

Drawings

Fig. 1 is a block diagram showing an overall configuration of an optical scanning device according to a first embodiment.

Fig. 2 is a perspective view of the vibration element of the first embodiment.

Fig. 3 is a plan view showing a pair of support beam portions, a torsion beam portion, and a mirror of the first embodiment.

Fig. 4 is a schematic view of the base plate as viewed from the direction in which the support beam portion of the first embodiment extends.

Fig. 5 is a plan view of the holding member of the first embodiment.

Fig. 6 is a schematic view of the holding member of the first embodiment as viewed from the direction in which the support beam portion extends.

Fig. 7 is a schematic diagram for explaining a structure of fixing the fixing portion to the abutting portion in the first embodiment.

Fig. 8 is a plan view for explaining the fixed angle adjustment mechanism and the holding member of the second embodiment.

Fig. 9 is a perspective view for explaining a structure of adjusting the inclination angle of the abutment surface by the fixed angle adjustment mechanism according to the second embodiment.

Fig. 10 is a schematic diagram for explaining a structure of fixing a fixing portion according to the third embodiment.

Fig. 11 is an enlarged schematic view of a part of fig. 10.

Fig. 12 is a schematic diagram for explaining the distance between the first end portions and the distance between the second end portions in the fourth embodiment.

Fig. 13 is a schematic diagram for explaining a first screw hole and a second screw hole provided in the holding member in the fifth embodiment.

Fig. 14 is a schematic diagram for explaining the fastening direction of the first screw member and the second screw member in the fifth embodiment.

Fig. 15 is a schematic diagram for explaining a mounting position of the second partitioning member according to a modification of the second embodiment.

Fig. 16 is a schematic diagram for explaining a second partition member according to a modification of the second embodiment.

Fig. 17 is a schematic diagram illustrating a fixed position adjusting unit according to a modification of the fourth embodiment.

Fig. 18 is a schematic diagram for explaining a configuration of fixing a fixing portion according to a modification of the fourth embodiment.

[ description of symbols ]

1. 101, 102, 201, 301, 302, 401: vibrating element

2: light source

11: substrate

11 a: a pair of supporting beam parts

11 b: supporting part

11 c: torsion beam part

11 d: fixing part

12: driving source

13. 130, 230, 330: holding member

14: movable part

14 a: surface of the movable part

14 b: back of movable part

15: abutting part

15a, 150a, 250 a: abutting surface

16: fixed angle adjusting mechanism

17: first partition member

21 a: first screw hole

21 b: second screw hole

22 a: first screw member

22 b: second screw member

23: second partition member

24: fixed position adjusting part

25. 150: abutment member

26: fixing member

110 a: the first part

110 b: the second part

111 a: first end part

111 b: second end portion

Detailed Description

Hereinafter, embodiments of the present invention will be described based on the drawings.

[ first embodiment ]

The structure of the vibration element 1 of the first embodiment and the structure of the optical scanning device 100 including the vibration element 1 will be described with reference to fig. 1 to 7.

(construction of optical scanning device)

As shown in fig. 1, the optical scanning device 100 of the present embodiment includes a vibration element 1, a light source 2, and a control unit 3. The optical scanning device 100 is configured to irradiate the projection surface 60 with light.

The vibration element 1 is configured to reflect light emitted from the light source 2 by the mirror 10 provided in the movable portion 14 and project the light onto the projection surface 60 while the movable portion 14 (see fig. 2) is oscillated by the plate wave generated by the drive source 12. The detailed structure of the vibration element 1 will be described later.

The light source 2 is configured to output light. Specifically, the light source 2 is configured to irradiate the mirror 10 included in the vibration element 1 via a lens or the like. The Light source 2 includes, for example, a Light Emitting Diode (LED) or a Laser Diode (LD). In the present embodiment, the light source 2 is an LED.

The control unit 3 is configured to control the light source 2 to irradiate light. The control unit 3 is configured to control the vibration element 1. The control Unit 3 includes a processor such as a Central Processing Unit (CPU).

(Structure of vibrating element)

As shown in fig. 2, the vibration element 1 includes a movable portion 14, a substrate 11, a drive source 12, and a holding member 13. In the present description, the direction perpendicular to the front surface 14a of the movable portion 14 is referred to as the Z direction, the upward direction is referred to as the Z1 direction, and the downward direction is referred to as the Z2 direction. Two directions orthogonal to each other in a plane orthogonal to the Z direction are referred to as an X direction and a Y direction, respectively. One side of the X direction is defined as an X1 direction, and the other side is defined as an X2 direction. One of the Y directions is a Y1 direction, and the other is a Y2 direction. The X direction is an example of the "first direction" in the claims. The Z direction is an example of the "second direction" in the claims.

The base plate 11 includes a pair of support beam portions 11a, a support portion 11b, and a torsion beam portion 11 c. The substrate 11 includes a movable portion 14 on which the mirror 10 is disposed. The substrate 11 is made of, for example, a flat stainless steel material.

The pair of support beam portions 11a each have a first end 111a and a second end 111 b. The first end portions 111a are supported by the support portions 11 b. In the first embodiment, the second end portions 111b of the pair of support beam portions 11a are provided with fixing portions 11d fixed to the holding member 13. The fixing portion 11d is a part of the pair of support beam portions 11 a.

In the example shown in fig. 2, the fixing portion 11d is formed by increasing the width of the pair of support beam portions 11a in the X direction on the second end portion 111b side. The fixing portion 11d is held by the holding member 13 by, for example, screwing. Therefore, the fixing portion 11d is provided with a through hole 30 penetrating in the Z direction.

The support portion 11b is configured to support the first end portion 111a of each of the pair of support beam portions 11 a. The support portion 11b is provided with a drive source 12. Specifically, the support portion 11b includes a drive source support portion 11e that supports the drive source 12, and the drive source 12 is disposed on the drive source support portion 11 e. The drive source support portion 11e has a semicircular shape, as with the drive source 12. The support portion 11b includes a holding portion 11f at an end portion on the side not supporting the pair of support beam portions 11a in the direction in which the support beam portions 11a extend (Y direction). The support portion 11b is held by the holding member 13 by, for example, screwing. For this purpose, the holding portion 11f is provided with a through hole 31 penetrating in the Z direction.

The torsion beam portion 11c swingably supports the movable portion 14. The torsion beam portion 11c extends in the first direction (X direction). The torsion beam portion 11c has a columnar shape. A pair of the torsion beam portions 11c is provided. One of the pair of twist beam portions 11c is connected to one of the pair of support beam portions 11a, and the other twist beam portion 11c is connected to the other support beam portion 11 a. The pair of torsion beam portions 11c are connected to the movable portion 14, respectively.

The movable portion 14 has a rectangular shape. The movable portion 14 is formed integrally with the substrate 11. The movable portion 14 is connected to the pair of support beam portions 11a via the torsion beam portion 11 c. In the present embodiment, the mirror 10 is provided on the front surface 14a side of the movable portion 14. In the example shown in fig. 2, the mirror 10 is shown in a hatched manner for convenience.

The drive source 12 is configured to generate a plate wave that oscillates the movable portion 14. The drive source 12 includes, for example, a piezoelectric element. The piezoelectric element includes, for example, Lead Zirconate Titanate (PZT) and an electrode for applying a voltage to the PZT. In the example shown in fig. 2, PZT having a semicircular shape is provided on the substrate 11 as the drive source 12.

The holding member 13 is configured to hold the support portion 11 b. As shown in fig. 2, the holding member 13 holds a holding portion 11f provided at an end portion of the support portion 11b on the side not supporting the pair of support beam portions 11a in the Y direction. The holding member 13 is configured to hold the pair of support beam portions 11a, respectively. As shown in fig. 2, the holding member 13 is configured to hold the fixing portion 11d of the pair of support beam portions 11 a. The structure of the holding member 13 holding the fixing portion 11d will be described in detail later.

(first and second parts)

As shown in fig. 3, the fixing portion 11d includes a first portion 110a and a second portion 110 b. A portion of the fixed portion 11d on the side closer to the movable portion 14 in the first direction (X direction) is a first portion 110 a. Further, a portion of the fixed portion 11d on the side away from the movable portion 14 in the first direction is a second portion 110 b.

The fixing portion 11d is fixed to the holding member 13 in a state in which the pair of support beam portions 11a each apply tension to the torsion beam portion 11c in the first direction in which the torsion beam portion 11c extends in a direction away from the movable portion 14 by adjusting any one of the inclination with respect to the holding member 13, the fixing position with respect to the holding member 13 in the fixing plane along the surface of the base plate 11, and the direction of fixing in the fixing plane. The direction of fixation in the fixation surface of the fixation section 11d is the direction of rotation of the fixation section 11d in the fixation surface. In the first embodiment, the fixing portion 11d is fixed to the holding member 13 by adjusting the inclination with respect to the holding member 13 in a state where the pair of support beam portions 11a apply tension to the torsion beam portion 11c in the first direction in which the torsion beam portion 11c extends in a direction away from the movable portion 14.

(inclination of fixed part)

As shown in fig. 4, the fixing portion 11d is fixed in a state where the inclination with respect to the holding member 13 is adjusted by twisting in opposite directions to each other. Specifically, the fixed portion 11d is fixed to the holding member 13 in a state in which a first portion 110a of the fixed portion 11d on the side closer to the movable portion 14 in the first direction (X direction) is twisted so as to rotate in a direction (Z1 direction) from the back surface 14b side toward the front surface 14a side of the movable portion 14, or in a state in which a second portion 110b of the fixed portion 11d on the side farther from the movable portion 14 in the first direction is twisted so as to rotate in a direction (Z2 direction) from the front surface 14a side toward the back surface 14b side of the movable portion 14. In the example shown in fig. 4, the fixing portion 11d is fixed to the holding member 13 in a state where the first portion 110a is twisted so as to rotate in a direction from the back surface 14b side toward the front surface 14a side of the movable portion 14. That is, the fixing portion 11d is fixed to the holding member 13 in a twisted state so as to rotate in the Y direction.

Specifically, the fixing portion 11d on the X1 direction side is fixed to the holding member 13 in a state where the first portion 110a on the X1 direction side is twisted in the direction along the arrow 40 a. Thereby, the support beam portion 11a on the X1 direction side (see fig. 3) is twisted in the direction along the arrow 40 a. Therefore, a force in the direction indicated by the arrow 41a is generated with respect to the support beam portion 11a on the X1 direction side, and therefore a tension is applied to the torsion beam portion 11c in the first direction in the direction (X1 direction) away from the movable portion 14.

The fixing portion 11d on the X2 direction side is fixed to the holding member 13 in a state where the first portion 110a on the X2 direction side is twisted in the direction along the arrow 40 b. Thereby, the support beam portion 11a on the X2 direction side (see fig. 3) is twisted in the direction along the arrow 40 b. Therefore, a force in the direction indicated by the arrow 41b is generated with respect to the support beam portion 11a on the X2 direction side, and therefore a tension is applied to the torsion beam portion 11c in the first direction in the direction (X2 direction) away from the movable portion 14.

In the first embodiment, the fixing portion 11d is fixed to the holding member 13 in a state in which the support beam portion 11a is twisted in a direction in which the end portion of the torsion beam portion 11c connected to the movable portion 14 protrudes toward the front surface 14a of the movable portion 14. In addition, in the example shown in fig. 4, the direction protruding to the surface 14a side is the Z1 direction.

(Structure of abutting part)

Next, the structure of the contact portion 15 according to the first embodiment will be described with reference to fig. 5 and 6.

As shown in fig. 5, the holding member 13 includes a base 13a and an abutting portion 15. The contact portion 15 is formed to protrude from the base 13a to the front surface 14a side (Z1 direction side) of the movable portion 14. The contact portion 15 is provided at the end of the holding member 13 on the Y2 direction side. The contact portions 15 are provided at two positions on the X1 direction side and the X2 direction side, out of the ends on the Y2 direction side of the holding member 13. In the example shown in fig. 5, the abutment portion 15 is integrally formed with the holding member 13. The contact portion 15 has a contact surface 15a that contacts the fixing portion 11 d. The contact surface 15a includes a first contact portion 15b and a second contact portion 15 c. A portion of the contact surface 15a on the side closer to the movable portion 14 in the first direction (X direction) is a first contact portion 15 b. Further, a portion of the contact surface 15a on the side away from the movable portion 14 in the first direction is a second contact portion 15 c.

As shown in fig. 6, the abutment surface 15a is inclined. Specifically, the contact surface 15a is inclined in such a manner that the first contact portion 15b and the second contact portion 15c are located at positions different from each other in a second direction (Z direction) orthogonal to the surface 14a of the movable portion 14. In the first embodiment, the abutment surface 15a is inclined such that the first abutment portion 15b is located on the Z1 direction side with respect to the second abutment portion 15 c. In the first embodiment, the contact surface 15a is inclined at an angle θ 1. The inclination angle is an angle between a surface along the surface 14a of the movable portion 14 and the contact surface 15 a.

(inclination of the fixing part with respect to the holding member)

As shown in fig. 7, the fixing portion 11d is fixed in a state of being inclined with respect to the base 13 a. Specifically, the fixing portion 11d is fixed in a state of being in contact with the contact surface 15 a.

Since the abutment surface 15a is inclined such that the first abutment portion 15b is located on the Z1 direction side with respect to the second abutment portion 15c, the fixing portion 11d is fixed in a state of abutting against the abutment surface 15a, and thus the fixing portion 11d is inclined such that the first portion 110a is located on the Z1 direction side with respect to the second portion 110 b. In the first embodiment, since the inclination angle of the contact surface 15a is inclined at the angle θ 1, the inclination angle of the fixing portion 11d is also inclined at the angle θ 1. The inclination angle of the fixed portion 11d is an angle between a plane along the surface 14a of the movable portion 14 and the surface 110c of the fixed portion 11 d.

(Effect of the first embodiment)

In the first embodiment, the following effects can be obtained.

In the first embodiment, as described above, the vibration element 1 includes: a movable section 14; a metal substrate 11 including a pair of support beam portions 11a each having a first end 111a and a second end 111b, a support portion 11b supporting the first end 111a of each of the pair of support beam portions 11a, and a torsion beam portion 11c swingably supporting the movable portion 14; a drive source 12 provided in the support portion 11b and generating a plate wave for swinging the movable portion 14; and a holding member 13 that holds the substrate 11, wherein a fixing portion 11d fixed to the holding member 13 is provided at the second end 111b of each of the pair of support beam portions 11a, and the fixing portion 11d is fixed to the holding member 13 in a state in which the pair of support beam portions 11a apply tension to the torsion beam portion 11c in a direction away from the movable portion 14 in the first direction in which the torsion beam portion 11c extends, by adjusting the inclination with respect to the holding member 13.

Thus, by adjusting the fixing manner of the fixing portion 11d with respect to the holding member 13, it is possible to apply (impart) tension to the torsion beam portion 11c in the first direction in a direction away from the movable portion 14 without providing a member for applying tension to the torsion beam portion 11c in the support beam portion 11a by film forming. As a result, since tension can be applied to the torsion beam portion without forming the torsion beam portion 11c, it is possible to suppress the occurrence of displacement other than oscillation of the movable portion 14 while suppressing the complexity of the manufacturing process, as compared with a structure in which a member for applying tension is formed on the torsion beam portion 11c by forming a film in which the manufacturing process is complicated.

In the first embodiment, as described above, the fixing portions 11d are fixed in a state where the inclination of the fixing member 13 is adjusted by twisting in opposite directions to each other, or in a state where the fixing position of the fixing member 13 in the fixing surface is adjusted by bending the pair of support beam portions 11a in opposite directions to each other. Accordingly, since the support beam portions 11a are twisted in opposite directions by twisting the fixing portions 11d in opposite directions to each other, the torsion beam portion 11c can be easily tensioned in a direction away from the movable portion 14 via the support beam portions 11 a. As a result, since the torsion beam portion 11c can be easily tensioned in the direction away from the movable portion 14 via the support beam portion 11a, it is possible to easily suppress the occurrence of displacement other than swinging of the movable portion 14 while suppressing the complication of the manufacturing process.

In the first embodiment, as described above, the fixed portion 11d is fixed to the holding member 13 in a state in which the first portion 110a of the fixed portion 11d on the side closer to the movable portion 14 in the first direction (X direction) is twisted so as to rotate in a direction (Z1 direction) from the back surface 14b side toward the front surface 14a side of the movable portion 14. Accordingly, the first portion 110a of the fixing portion 11d is twisted in the direction from the back surface 14b side to the front surface 14a side of the movable portion 14, so that the tensile force in the direction away from the movable portion 14 can be easily and reliably applied to the torsion beam portion 11c in the first direction. As a result, since the torsion beam portion 11c can be easily and reliably tensioned in the direction away from the movable portion 14 via the support beam portion 11a, it is possible to more easily suppress the occurrence of displacement other than swinging of the movable portion 14 while suppressing the complexity of the manufacturing process.

In the first embodiment, as described above, when the fixed portion 11d is fixed to the holding member 13 in a twisted state, the holding member 13 includes the abutting portion 15 having the abutting surface 15a abutting against the fixed portion 11d, and the abutting surface 15a is inclined such that the first abutting portion 15b on the side closer to the movable portion 14 in the first direction (X direction) and the second abutting portion 15c on the side farther from the movable portion 14 in the first direction are located at positions different from each other in the second direction (Z direction) orthogonal to the surface of the movable portion 14. Since the abutment surface 15a can be easily inclined, the fixing portion 11d can be easily twisted in the opposite direction by fixing the fixing portion 11d in abutment with the abutment surface 15 a. As a result, the fixing portion 11d can be easily fixed to the holding member 13 so that the torsion beam portion 11c is tensioned in the first direction in a direction away from the movable portion 14 by the pair of support beam portions 11 a.

In the first embodiment, as described above, the fixed portion 11d is fixed to the holding member 13 in a state in which the support beam portion 11a is twisted in a direction in which the end portion of the torsion beam portion 11c connected to the movable portion 14 protrudes toward the surface 14a of the movable portion 14. This makes it possible to apply tension to the torsion beam portion 11c in the first direction in a direction away from the movable portion 14, and also to apply tension to the front surface 14a side of the movable portion 14. As a result, for example, when the surface 14a of the movable portion 14 is arranged in the vertical direction, the sinking of the movable portion 14 due to the weight of the movable portion 14 can be suppressed by the tension applied to the surface 14a side of the movable portion 14, and therefore, displacement other than the swinging of the movable portion 14 can be further suppressed.

[ second embodiment ]

A second embodiment will be described with reference to fig. 8 and 9. The vibration element 101 (see fig. 8) of the second embodiment differs from the vibration element 1 of the first embodiment in that a holding member 130 is included instead of the holding member 13. In the drawings, the same reference numerals are given to the same components as those of the first embodiment.

As shown in fig. 8, the vibration element 101 of the second embodiment includes a holding member 130. The holding member 130 includes an abutment member 150 provided independently of the holding member 130, instead of the abutment portion 15 of the first embodiment. The abutment member 150 is a member made of metal or resin and having a columnar shape. In the second embodiment, the abutment member 150 is made of metal. The contact member 150 has a contact surface 150a that contacts the fixing portion 11 d.

In the second embodiment, the vibration element 101 includes the fixed angle adjustment mechanism 16 capable of adjusting the inclination angle of the abutting surface 150 a. As shown in fig. 8, in the second embodiment, the contact member 150 and the fixed angle adjustment mechanism 16 are provided in two in total on the Y2 direction side and the X1 direction side of the holding member 130, and on the X2 direction side.

The fixed angle adjusting mechanism 16 includes a screw member 16 a. The fixed angle adjustment mechanism 16 is configured to be able to rotate the abutment member 150 in the rotational direction about the axis Ax by loosening the screw member 16 a. The fixed angle adjusting mechanism 16 is configured to be able to fix the inclination angle of the abutment surface 150a by tightening the screw member 16a after rotating the abutment member 150 in the rotational direction about the axis Ax.

Fig. 9 is a schematic view of the abutment member 150 viewed from the Y2 direction side. As shown in fig. 9, in the second embodiment, the inclination angle of the abutment member 150 is fixed in a state of being inclined at an angle θ 2 by the fixed angle adjustment mechanism 16. Specifically, the abutment surface 150a is inclined such that the first abutment portion 150b is located on the Z1 direction side with respect to the second abutment portion 150 c. In the example shown in fig. 9, the abutment member 150 and the fixed angle adjustment mechanism 16 on the X2 direction side are shown, but the abutment member 150 and the fixed angle adjustment mechanism 16 on the X1 direction side have the same configuration.

The other structure of the vibration element 101 according to the second embodiment is the same as that of the first embodiment.

(Effect of the second embodiment)

In the second embodiment, as described above, the abutting portion includes the abutting member 150 provided separately from the holding member 130, and the vibration element further includes the fixed angle adjustment mechanism 16 capable of adjusting the inclination angle of the abutting surface 150 a. Thus, by adjusting the inclination angle of the abutment surface 150a, the inclination of the fixing portion 11d with respect to the holding member 130 can be easily adjusted. As a result, the magnitude of the tension applied to the torsion beam portion 11c can be easily adjusted.

Other effects of the second embodiment are similar to those of the first embodiment.

[ third embodiment ]

A third embodiment will be described with reference to fig. 10 and 11. The vibrating element 201 of the third embodiment (see fig. 10) differs from the vibrating element 1 of the first embodiment in that a holding member 230 is included instead of the holding member 13, and a first partition member 17 is further included. In the drawings, the same reference numerals are given to the same components as those of the first embodiment.

As shown in fig. 10, the vibration element 201 includes a first partition member 17, an auxiliary partition member 18, a screw member 19, a washer member 20, and a holding member 230. The retaining member 230 includes an abutment 250. The abutment portion 250 has an abutment surface 250 a. Unlike the contact portion 15 of the first embodiment in which the contact surface 15a is inclined, the contact surface 250a of the third embodiment is not inclined.

Fig. 11 is an enlarged schematic view of the X2-direction side abutting portion 250 of the X1-direction side and the X2-direction side abutting portions 250. As shown in fig. 11, the first partition member 17 is provided between the fixed portion 11d and the abutment surface 250a in a second direction (Z direction) orthogonal to the surface 14a of the movable portion 14. In the example shown in fig. 11, the first partition member 17 is provided on the side (X1 direction side) closer to the movable portion 14 in the first direction (X direction).

The auxiliary partition member 18 is provided on the opposite side of the first partition member 17 in the first direction. The auxiliary partition member 18 abuts on the fixing portion 11d on the Z2 direction side and abuts on the washer member 20 on the Z1 direction side in the second direction (Z direction).

The screw member 19 is configured to be fastened to a screw hole (not shown) provided in the contact portion 250 to fix the fixing portion 11 d. Specifically, the screw member 19 fixes the fixing portion 11d to the holding member 230 in a state in which the fixing portion 11d is inclined by the washer member 20, the first partition member 17, and the auxiliary partition member 18.

The washer member 20 is provided between the auxiliary partition member 18 and the screw member 19 in the second direction (Z direction).

The example shown in fig. 11 is the fixing portion 11d fixed to the X2 direction side abutting portion 250 of the X1 direction side and the X2 direction side abutting portion 250, but the fixing portion 11d fixed to the X1 direction side abutting portion 250 has the same configuration as the fixing portion 11d fixed to the X2 direction side abutting portion 250. That is, the first partitioning member 17 on the X1 direction side is provided between the fixing portion 11d and the abutment surface 250a in the X2 direction side and the Z direction. Thus, the fixing portion 11d is fixed to the holding member 230 (abutting portion 250) in a state inclined so that the first portion 110a and the second portion 110b of the fixing portion 11d are at positions different from each other in the second direction (Z direction). In the third embodiment, similarly to the first embodiment, the fixing portion 11d is fixed to the holding member 230 in a state in which the first portion 110a is inclined to the Z1 direction side with respect to the second portion 110 b.

The other structure of the vibration element 201 of the third embodiment is the same as that of the first embodiment.

(Effect of the third embodiment)

In the third embodiment, as described above, in the case where the fixed portion 11d is fixed to the holding member 230 in a twisted state, the holding member 230 includes the abutting portion 250 having the abutting surface 250a abutting against the fixed portion 11d, the vibration element further includes the first partitioning member 17, the first partitioning member 17 is provided at a position between the fixed portion 11d and the abutting surface 250a in the second direction (Z direction) orthogonal to the surface 14a of the movable portion 14, and the fixed portion 11d is fixed to the holding member 230 in a state where the inclination with respect to the holding member 230 is adjusted by the first partitioning member 17. Thus, the fixing portion 11d can be inclined with respect to the holding member 230 by the first partition member 17. As a result, the fixing portion 11d can be easily tilted with respect to the holding member 230 without tilting the abutment surface 250 a.

Other effects of the third embodiment are similar to those of the first embodiment.

[ fourth embodiment ]

The fourth embodiment is explained with reference to fig. 12. Unlike the first embodiment in which the fixing portion 11d is fixed to the holding member 13 in a state in which the inclination of the fixing portion 11d with respect to the holding member 13 is adjusted, in the vibration element 301 of the fourth embodiment, the fixing portion 11d is fixed to the holding member 13 in a state in which the fixing position with respect to the holding member 13 within the fixing plane along the surface of the substrate 11 is adjusted. In the drawings, the same reference numerals are given to the same components as those of the first embodiment.

In the fourth embodiment, the fixing portion 11d is fixed to the holding member 13 in a state in which the pair of support beam portions 11a apply tension to the torsion beam portion 11c in the first direction in which the torsion beam portion 11c extends, in a direction away from the movable portion 14, by adjusting the fixing position with respect to the holding member 13 in the fixing plane along the surface of the base plate 11. Specifically, the fixing portion 11D is fixed to the holding member 13 in a state where the pair of support beam portions 11a are bent such that the distance D2 between the second end portions 111b of the pair of support beam portions 11a is greater than the distance D1 between the first end portions 111a of the pair of support beam portions 11 a.

As shown in fig. 12, in the fourth embodiment, the fixing portion 11D is fixed to the holding member 13 in a state in which the pair of support beam portions 11a are bent such that the distance D2 between the second end portions 111b of the pair of support beam portions 11a is greater than the distance D1 between the first end portions 111a of the pair of support beam portions 11a, and thus the pair of support beam portions 11a are each fixed in an outwardly expanded state. In the example shown in fig. 12, for convenience of explanation, the difference between the distance D1 and the distance D2 is emphasized and schematically illustrated.

Specifically, the support beam portion 11a on the X1 direction side opens in the direction indicated by the arrow 42 a. Therefore, a tensile force in the direction of the arrow 42a is applied to the torsion beam portion 11c via the support beam portion 11a on the X1 direction side. The support beam portion 11a on the X2 direction side is expanded in the direction indicated by the arrow 42 b. Therefore, a tensile force in the direction of the arrow 42b is applied to the torsion beam portion 11c via the support beam portion 11a on the X2 direction side.

The other structure of the vibration element 301 according to the fourth embodiment is the same as that of the first embodiment.

(Effect of the fourth embodiment)

In the fourth embodiment, as described above, the vibration element 301 includes: a movable section 14 that reflects light; a metal substrate 11 including a pair of support beam portions 11a each having a first end 111a and a second end 111b, a support portion 11b supporting the first end 111a of each of the pair of support beam portions 11a, and a torsion beam portion 11c swingably supporting the movable portion 14; a drive source 12 provided in the support portion 11b and generating a plate wave for swinging the movable portion 14; and a holding member 13 that holds the base plate 11, wherein a fixing portion 11d fixed to the holding member 13 is provided at the second end portion 111b of each of the pair of support beam portions 11a, and the fixing portion 11d is fixed to the holding member 13 in a state in which tension is applied to each of the pair of support beam portions 11a in the first direction in which the torsion beam portion 11c extends, in a direction away from the movable portion 14, by adjusting a fixing position of the fixing surface along the surface of the base plate 11 with respect to the holding member 13. Accordingly, the pair of support beam portions 11a are bent in opposite directions, and thus tension can be easily applied to the torsion beam portion 11c in a direction (first direction) away from the movable portion 14 via the support beam portions 11 a. As a result, the torsion beam portion 11c can be easily tensioned in the direction away from the movable portion 14 via the support beam portion 11a, and therefore, the movable portion 14 can be prevented from being displaced while the manufacturing process is prevented from becoming complicated.

In the fourth embodiment, as described above, the fixing portion 11d is fixed in a state in which the fixing position with respect to the holding member 13 in the fixing surface is adjusted by bending the pair of support beam portions 11a in opposite directions. Accordingly, as in the case of the vibration element 1 of the first embodiment, since the torsion beam portion 11c can be easily tensioned in the direction away from the movable portion 14 via the support beam portion 11a, it is possible to suppress the movable portion 14 from being displaced while suppressing the complexity of the manufacturing process.

In the fourth embodiment, as described above, the fixing portion 11D is fixed to the holding member 13 in a state in which the pair of support beam portions 11a are bent such that the distance D2 between the second end portions 111b of the pair of support beam portions 11a is greater than the distance D1 between the first end portions 111a of the pair of support beam portions 11 a. Accordingly, as in the case of the vibration element 1 of the first embodiment, since the torsion beam portion 11c can be easily and reliably tensioned in the direction away from the movable portion 14 via the support beam portion 11a, it is possible to more easily suppress the displacement of the movable portion 14 while suppressing the complexity of the manufacturing process.

Other effects of the fourth embodiment are similar to those of the first embodiment.

[ fifth embodiment ]

The fifth embodiment will be described with reference to fig. 13 and 14. The vibration element 401 (see fig. 13) of the fifth embodiment differs from the vibration element 1 of the first embodiment in that a holding member 330 is included instead of the holding member 13. In the drawings, the same reference numerals are given to the same components as those of the first embodiment.

In the fifth embodiment, the vibration element 401 includes the holding member 330. In the fifth embodiment, the fixing portion 11d is fixed to the holding member 13 in a state in which the pair of support beam portions 11a apply tension to the torsion beam portion 11c in the first direction in which the torsion beam portion 11c extends, in a direction away from the movable portion 14, by adjusting the direction of fixing within the fixing surface. In addition, the fifth embodiment includes a first screw member 22a that fixes one of the pair of fixing portions 11d and a second screw member 22b that fixes the other of the pair of fixing portions 11 d.

As shown in fig. 13, the holding member 330 is provided with a first screw hole 21a to which the first screw member 22a is fastened and a second screw hole 21b to which the second screw member 22b is fastened. The first screw hole 21a and the second screw hole 21b are configured such that a force applied to one of the pair of support beam portions 11a via one of the fixing portions 11d when the first screw member 22a is fastened and a force applied to the other of the pair of support beam portions 11a via the other fixing portion 11d when the second screw member 22b is fastened are each directed away from the movable portion 14 in the first direction (X direction). In the example shown in fig. 13, the first screw hole 21a and the second screw hole 21b are configured such that the fastening direction of the first screw member 22a and the fastening direction of the second screw member 22b are different from each other. Specifically, a screw hole is formed in the first screw hole 21a in the direction indicated by the arrow 43 a. The direction indicated by the arrow 43a is clockwise when viewed from the front surface 14a (see fig. 2) side (Z1 direction side) of the movable portion 14. Further, a screw hole is formed in the second screw hole 21b in the direction indicated by the arrow 43 b. The direction indicated by the arrow 43b is counterclockwise when viewed from the front face 14a (see fig. 2) side (Z1 side) of the movable portion 14 in the Z2 direction.

As shown in fig. 14, the fixing portions 11d are fixed to the holding member 330 by the first screw member 22a and the second screw member 22b, respectively. The first screw member 22a is fastened to the first screw hole 21 a. Therefore, the fastening direction of the first screw member 22a (the direction in which the fastening torque acts) is the direction indicated by the arrow 43 a. Therefore, the fixing portion 11d on the X1 direction side is fixed to the holding member 330 in the direction of rotation indicated by the arrow 43 a. In other words, the fixing portion 11d on the X1 direction side is rotated in the direction indicated by the arrow 43a and fixed to the holding member 13 as the first screw member 22a is tightened. Since the fixing portion 11d on the X1 direction side is rotated in the direction indicated by the arrow 43a and fixed to the holding member 330, the position of the support beam portion 11a on the X1 direction side is shifted toward the X1 direction side. Thereby, in the support beam portion 11a on the X1 direction side, a force is generated in the direction indicated by the arrow 44 a. Therefore, a tensile force is applied to the torsion beam portion 11c on the X1 direction side in the direction indicated by the arrow 44 a.

Also, the second screw member 22b is fastened to the second screw hole 21 b. Therefore, the fastening direction of the second screw member 22b becomes the direction indicated by the arrow 43 b. Therefore, the fixing portion 11d on the X2 direction side is fixed to the holding member 330 in the direction of rotation indicated by the arrow 43 b. In other words, the fixing portion 11d on the X2 direction side is rotated in the direction indicated by the arrow 43b and fixed to the holding member 330 as the second screw member 22b is tightened. Since the fixing portion 11d on the X2 direction side is rotated in the direction indicated by the arrow 43b and fixed to the holding member 330, the position of the support beam portion 11a on the X2 direction side is shifted toward the X2 direction side. Thereby, a force is generated in the direction indicated by the arrow 44b in the support beam portion 11a on the X2 direction side. Therefore, a tensile force is applied to the torsion beam portion 11c on the X2 direction side in the direction indicated by the arrow 44 b.

The other structure of the vibration element 401 according to the fifth embodiment is the same as that of the first embodiment.

(Effect of the fifth embodiment)

In the fifth embodiment, as described above, the vibration element 401 includes: a movable section 14 that reflects light; a metal substrate 11 including a pair of support beam portions 11a each having a first end 111a and a second end 111b, a support portion 11b supporting the first end 111a of each of the pair of support beam portions 11a, and a torsion beam portion 11c swingably supporting the movable portion 14; a drive source 12 provided in the support portion 11b and generating a plate wave for swinging the movable portion 14; and a holding member 330 that holds the substrate 11, wherein a fixing portion 11d fixed to the holding member 330 is provided at the second end portion 111b of each of the pair of support beam portions 11a, and the fixing portion 11d is fixed to the holding member 330 in a state in which the pair of support beam portions 11a apply tension to the torsion beam portion 11c in a direction away from the movable portion 14 in the first direction in which the torsion beam portion 11c extends, by adjusting the direction of fixing in the fixing surface. As a result, in the vibration element 401 of the fifth embodiment, as in the vibration element 1 of the first embodiment, displacement of the movable portion 14 can be suppressed while the manufacturing process is suppressed from being complicated.

In the fifth embodiment, as described above, the first screw member 22a that fixes one of the pair of fixing portions 11d and the second screw member 22b that fixes the other of the pair of fixing portions 11d are included, the holding member 330 is provided with the first screw hole 21a to which the first screw member 22a is fastened and the second screw hole 21b to which the second screw member 22b is fastened, and the first screw hole 21a and the second screw hole 21b are configured such that a force applied to one of the pair of support beam portions 11a via one of the fixing portions 11d when the first screw member 22a is fastened and a force applied to the other of the pair of support beam portions 11a via the other fixing portion 11d when the second screw member 22b is fastened become directions away from the movable portion 14 in the first direction (X direction).

Accordingly, since the first screw member 22a and the second screw member 22b fix the pair of fixing portions 11d, respectively, and a force in a direction away from the movable portion 14 is applied to the pair of support beam portions 11a in the first direction (X direction), respectively, the positions of the pair of support beam portions 11a can be easily changed in the first direction (X direction) toward a position away from the movable portion 14. As a result, the tensile force in the direction away from the movable portion 14 in the first direction can be easily applied to the torsion beam portion 11c via the support beam portion 11 a. Further, by adjusting the fastening state (the angle of the screw member) of the first screw member 22a and the second screw member 22b, the direction in which the fixing portion 11d is fixed in the fixing surface can be easily adjusted. As a result, since the positions of the pair of support beam portions 11a in the fixing surface can be easily changed by adjusting the direction in which the fixing portion 11d is fixed, the tension applied to the torsion beam portion 11c via the support beam portions 11a can be easily adjusted.

Other effects of the fifth embodiment are similar to those of the first embodiment.

[ modified examples ]

The embodiments disclosed herein are to be considered in all respects only as illustrative and not restrictive. The scope of the present invention is shown by the claims rather than the description of the embodiments, and includes meanings equivalent to the claims and all modifications (variations) within the scope.

For example, in the second embodiment, the abutting member 150 is directly provided to the holding member 130 by the fixed angle adjusting mechanism 16, but the present invention is not limited to this. For example, like the vibration element 102 of the modification of the second embodiment shown in fig. 15, the second partition member 23 may be further included.

In the modification of the second embodiment, the abutment member 150 is configured such that the fixing position of the fixing portion 11d in the direction (Y direction) in which the support beam portion 11a extends can be adjusted by the second partitioning member 23.

As shown in fig. 16, the second partition member 23 has a flat plate shape. The second partitioning member 23 is provided with a slit 23a extending in the X direction. Since the second partitioning member 23 shown in fig. 16 is provided between the abutting member 150 and the holding member 130 on the X2 direction side, the slit 23a is provided on the X1 direction side. Further, although not shown, a notch 23a is provided on the X2 side of the second partitioning member 23 provided on the X1 side. The slit 23a is fitted to the screw member 16a so as to be provided between the abutment member 150 and the holding member 130.

In the modification of the second embodiment, as described above, the second partitioning member 23 is further provided, and the second partitioning member 23 is disposed between the contact portion (the contact member 150) and the holding member 130 in the direction in which the support beam portion 11a extends, and the contact portion is configured so that the fixed position of the fixing portion 11d in the direction (Y direction) in which the support beam portion 11a extends can be adjusted by the second partitioning member 23. Accordingly, since the fixing position of the fixing portion 11d can be adjusted in the direction in which the support beam portion 11a extends, even when a manufacturing tolerance occurs in the substrate 11 and the holding member 130, an error in the fixing position of the fixing portion 11d during assembly can be reduced. As a result, the vibration element 102 can be easily manufactured.

In the fourth embodiment, the through-hole 30 is provided in the fixing portion 11d, but the present invention is not limited thereto. For example, as in the vibration element 302 of the modification of the fourth embodiment shown in fig. 17, the fixed position adjusting portion 24 may be provided in the fixed portion 11d instead of the through-hole 30.

As shown in fig. 17, the fixed position adjusting portion 24 is configured to penetrate the fixed portion 11d in the thickness direction (Z direction) of the fixed portion 11d and extend along the first direction (X direction). As shown in fig. 18, the fixing portion 11d is fixed to the holding member 13 in a state in which the position in the fixing surface is adjusted by inserting the fixing member 26 of the fixing position adjusting portion 24. The fixing member 26 includes, for example, a screw member.

In the modification of the fourth embodiment, when the support beam portion 11a is fixed to the holding member 13 in a bent state as described above, the fixing portion 11d includes the fixing position adjusting portion 24, the fixing position adjusting portion 24 penetrates the fixing portion 11d in the thickness direction (Z direction) of the fixing portion 11d and extends along the first direction (X direction), and the fixing portion 11d is fixed to the holding member 13 in a state in which the position in the fixing surface is adjusted by inserting the fixing member 26 of the fixing position adjusting portion 24. Accordingly, since the fixed position adjusting portion 24 extends in the first direction, the distance D2 (see fig. 12) between the second end portions 111b in the first direction when the fixed portion 11D is fixed to the holding member 13 can be easily adjusted. As a result, the magnitude of the tension applied to the torsion beam portion 11c via the support beam portion 11a can be easily adjusted.

In the first embodiment, the fixed portion 11d is fixed in a twisted state in which the first portion 110a on the side closer to the movable portion 14 in the first direction (X direction) is rotated in a direction (Z1 direction) from the back surface 14b side toward the front surface 14a side of the movable portion 14, but the present invention is not limited to this. For example, the fixed portion 11d may be fixed to the holding member 13 in a state in which the second portion 110b of the fixed portion 11d on the side away from the movable portion 14 in the first direction is twisted so as to rotate in a direction (Z2 direction) from the front surface 14a side toward the back surface 14b side of the movable portion 14.

In the first to fifth embodiments, the support beam portion 11a is fixed to the holding member 13 in a twisted state in a direction in which the end portion of the torsion beam portion 11c connected to the movable portion 14 protrudes toward the surface 14a of the movable portion 14, but the present invention is not limited thereto. For example, the support beam portion 11a may not be twisted in a direction in which the end portion connected to the movable portion 14 protrudes toward the front surface 14a of the movable portion 14.

In the first to fifth embodiments, the example in which the plurality of abutting portions 15 or the abutting members 150 are provided is shown, but the present invention is not limited to this. For example, the contact portion 15 or the contact member 150 may be integrally formed, and may have contact surfaces on the X1 direction side and the X2 direction side of the holding member.

In the first to fifth embodiments, the fixing portion 11d is fixed to the holding member 13 by a screw member, but the present invention is not limited thereto. For example, the fixing portion 11d may be fixed to the holding member 13 with an adhesive or the like. The fixing portion 11d may be fixed to the holding member 13 in a state where the pair of support beam portions 11a apply tension to the torsion beam portion 11c in the first direction in which the torsion beam portion 11c extends in a direction away from the movable portion 14 by adjusting any one of the inclination with respect to the holding member 13, the fixing position with respect to the holding member 13 in the fixing surface along the surface of the substrate 11, and the direction of fixing in the fixing surface, and the fixing method of the fixing portion 11d may be any method.

In the first to third embodiments, the first portion 110a of the fixing portion 11d is disposed on the Z1 direction side with respect to the second portion 110b, but the present invention is not limited to this. For example, the first portion 110a may be arranged on the Z2 direction side with respect to the second portion 110 b.

In the third embodiment, the first partition member 17 is disposed closer to the movable portion 14 than the auxiliary partition member 18 in the first direction (X direction) in the third embodiment, but the present invention is not limited to this. For example, the first partition member 17 may be disposed on the side farther from the movable portion 14 than the auxiliary partition member 18 in the first direction.

In the third embodiment, the example of the structure including the first partition member 17 and the auxiliary partition member 18 is shown, but the present invention is not limited to this. For example, the auxiliary partition member 18 may not be included. However, in the case of a configuration in which the auxiliary partition member 18 is not provided, if the fixing portion 11d is fixed by a screw member, stable fixing cannot be performed. Therefore, when the fixing portion 11d is fixed by a screw member, the auxiliary partition member 18 is preferably provided. Alternatively, in the case of a structure in which the auxiliary partition member 18 is not provided, the fixing portion 11d is preferably fixed by an adhesive or the like.

In the first to fifth embodiments, the mirror 10 is used as the member disposed in the movable portion 14, but the present invention is not limited to this. For example, a lens may be disposed in the movable portion 14.

In the first to fifth embodiments, the mirror 10 is used as the member disposed in the movable portion 14, but the present invention is not limited to this. For example, a light emitting element may be disposed in the movable portion 14.

In the first to fifth embodiments, the mirror 10 is used as the member disposed in the movable portion 14, but the present invention is not limited to this. For example, a light receiving element may be disposed in the movable portion 14. In addition, both the light emitting element and the light receiving element may be disposed in the movable portion 14.

In the first to fifth embodiments, the mirror 10 is used as the member disposed in the movable portion 14, but the present invention is not limited to this. For example, a gas or an enzyme that reacts with a gas may be disposed in the movable portion 14.