阅读说明：本技术 垂直式探针卡及其悬臂式探针 (Vertical probe card and cantilever probe thereof ) 是由 李文聪 魏逊泰 谢开杰 苏伟志 于 2020-06-10 设计创作，主要内容包括：本发明公开一种垂直式探针卡及其悬臂式探针,所述悬臂式探针包含一主体段、分别自所述主体段的相反两侧延伸所形成的两个侧翼段及分别自所述主体段于高度方向上的两端延伸所形成的一针测段与一固定段。所述针测段包含呈悬空状的一抵接部以及连接所述抵接部与所述主体段的一针测悬臂。所述针测段在垂直所述高度方向的长度方向上具有一力臂长度,并且所述抵接部在所述高度方向上与所述主体段相距有小于所述力臂长度的一间距。据此,通过所述悬臂式探针的结构设计,以使得悬臂式探针可应用于垂直式探针卡中,据以利于悬臂式探针的植针与维护更换、并降低生产与维修成本。(The invention discloses a vertical probe card and a cantilever type probe thereof, wherein the cantilever type probe comprises a main body section, two side wing sections formed by respectively extending from two opposite sides of the main body section, and a needle measuring section and a fixing section formed by respectively extending from two ends of the main body section in the height direction. The needle measuring section comprises a suspended abutting part and a needle measuring cantilever connected with the abutting part and the main body section. The needle measuring section has a moment arm length in a length direction perpendicular to the height direction, and the abutting portion is spaced from the main body section in the height direction by a distance smaller than the moment arm length. Therefore, the cantilever type probe can be applied to a vertical probe card through the structural design of the cantilever type probe, so that the probe implanting, the maintenance and the replacement of the cantilever type probe are facilitated, and the production and maintenance cost is reduced.)

1. A vertical probe card, comprising:

a plurality of guide plates stacked one on another in a height direction; and

a plurality of cantilevered probes positioned at a plurality of the guide plates, and each of the cantilevered probes comprising:

the main body section is arranged in the guide plates in a penetrating way;

two side wing sections, which are formed by extending from two opposite sides of the main body section respectively, and are clamped between at least two guide plates in the plurality of guide plates; and

a needle measuring section and a fixing section which are respectively formed by extending from two ends of the main body section in the height direction; the needle measuring section comprises a suspended abutting part and a needle measuring cantilever connecting the abutting part and the main body section; the contact parts of the cantilever probes are used for separably abutting against an object to be detected;

the probe section has a moment arm length in a length direction perpendicular to the height direction, and the abutting portion is spaced from the main body section in the height direction by a distance smaller than the moment arm length.

2. The vertical probe card of claim 1 wherein one of said guide plates, remote from a plurality of said probing segments, is capable of passing through a plurality of said cantilevered probes along a height direction or along a width direction perpendicular to said height direction and said length direction to press against both of said side segments of each of said cantilevered probes.

3. The vertical probe card of claim 1, wherein in each of the cantilever probes, the fixed section comprises a connection portion in a floating shape and a buffer cantilever connecting the connection portion and the main body section; the vertical probe card comprises an adapter plate, and the connecting parts of the cantilever type probes are fixed on the adapter plate.

4. The vertical probe card of claim 3, wherein in at least one of the plurality of cantilever probes, the abutting portion and the connecting portion are not both located in the height direction, and the abutting portion and the connecting portion are separated by a displacement distance in the length direction that is greater than the spacing.

5. The vertical probe card of claim 3, wherein the abutting portion and the connecting portion are located in the height direction in at least one of the cantilever probes, and when the connecting portion abuts against the object to be tested, the probing cantilever and the buffering cantilever are elastically bent, so that the abutting portion and the connecting portion abut against the main body segment.

6. The vertical probe card of claim 3, wherein in two adjacent cantilever probes of the plurality of cantilever probes, the abutting portion and the connecting portion of one of the cantilever probes are not located in the height direction, and the abutting portion and the connecting portion of the other of the cantilever probes are located in the height direction.

7. The vertical probe card of claim 1, wherein in each of the cantilever probes, the probing cantilever is recessed with at least one slit along the length direction.

8. The vertical probe card of claim 1, wherein in each of the cantilever probes, the probing section and the fixing section are located within a projection area formed by orthographic projection of the main body section along the height direction.

9. A cantilever probe of a vertical probe card, comprising:

a main body section;

two side wing sections formed by extending from two opposite sides of the main body section respectively; and

a needle measuring section and a fixing section which are respectively formed by extending from two ends of the main body section in a height direction; the needle measuring section comprises a suspended abutting part and a needle measuring cantilever connecting the abutting part and the main body section;

the probe section has a moment arm length in a length direction perpendicular to the height direction, and the abutting portion is spaced from the main body section in the height direction by a distance smaller than the moment arm length.

10. The cantilever probe of claim 9, wherein the probing section and the fixing section are located within a projection area formed by orthographic projection of the main body section along the height direction.

Technical Field

The present invention relates to a probe card, and more particularly, to a vertical probe card and a cantilever type probe thereof.

Background

The conventional cantilever probe is mainly applied to testing of peripheral chips, but the conventional cantilever probe is complicated in a pin mounting manner (e.g., manual soldering) and requires fan-out design (fan-out). Accordingly, the conventional cantilever-type probe is not easy to implant and maintain, and thus the production and maintenance cost is difficult to reduce.

The present inventors have considered that the above-mentioned drawbacks can be improved, and have made intensive studies and use of scientific principles, and finally have proposed the present invention which is designed reasonably and effectively to improve the above-mentioned drawbacks.

Disclosure of Invention

Embodiments of the present invention provide a vertical probe card and a cantilever probe thereof, which can effectively overcome the defects of the conventional cantilever probe.

The embodiment of the invention discloses a vertical probe card which comprises a plurality of guide plates and a plurality of cantilever type probes. The guide plates are stacked with each other along a height direction; the plurality of cantilever probes are positioned on the plurality of guide plates, and each cantilever probe comprises a main body section, two side wing sections, a needle measuring section and a fixed section. The main body section is arranged in the guide plates in a penetrating way; the two side wing sections are respectively formed by extending from two opposite sides of the main body section and clamped on at least two guide plates in the plurality of guide plates; a needle measuring section and a fixing section respectively formed by extending from the two ends of the main body section in the height direction; the needle measuring section comprises a suspended abutting part and a needle measuring cantilever connecting the abutting part and the main body section; the contact parts of the cantilever probes are used for separately contacting with an object to be detected; the probe section has a moment arm length in a length direction perpendicular to the height direction, and the abutting part has a distance smaller than the moment arm length from the main body section in the height direction.

Preferably, a guide plate, which is away from the plurality of probe segments, can pass through the plurality of cantilever-type probes along the height direction or along a width direction perpendicular to the height direction and the length direction, and press against both side segments of each cantilever-type probe.

Preferably, in each cantilever-type probe, the fixed section includes a connection portion in a suspended state and a buffer cantilever connecting the connection portion and the main body section; the vertical probe card comprises an adapter plate, and the connecting parts of a plurality of cantilever type probes are fixed on the adapter plate.

Preferably, in at least one of the plurality of cantilever-type probes, the abutting portion and the connecting portion are not both located in the height direction, and the abutting portion and the connecting portion are spaced apart by a misalignment distance greater than the spacing distance in the length direction.

Preferably, in at least one of the plurality of cantilever-type probes, the abutting portion and the connecting portion are both located in the height direction, and when the connecting portion abuts against the object to be tested, the probing cantilever and the buffer cantilever are both elastically bent, so that the abutting portion and the connecting portion abut against the main body section.

Preferably, in two adjacent cantilever probes of the plurality of cantilever probes, the abutting portion and the connecting portion of one of the cantilever probes are not located in the height direction, and the abutting portion and the connecting portion of the other of the cantilever probes are located in the height direction.

Preferably, in each cantilever-type probe, the probe cantilever is recessed along the length direction to form at least one slit.

Preferably, in each cantilever-type probe, the probe section and the fixed section are located within a projection area formed by orthographic projection of the main body section along the height direction.

The embodiment of the invention also discloses a cantilever type probe of the vertical probe card, which comprises a main body section, two side wing sections, a probe section and a fixed section. The two side wing sections are respectively formed by extending from two opposite sides of the main body section; a needle measuring section and a fixing section respectively formed by extending from two ends of the main body section in a height direction; the needle measuring section comprises a suspended abutting part and a needle measuring cantilever connecting the abutting part and the main body section; the probe section has a moment arm length in a length direction perpendicular to the height direction, and the abutting part has a distance smaller than the moment arm length from the main body section in the height direction.

Preferably, the needle measuring section and the fixing section are located in a projection area formed by orthographic projection of the main body section along the height direction.

In summary, the vertical probe card disclosed in the embodiments of the present invention utilizes the structural design of the cantilever probe to make the cantilever probe applicable to the vertical probe card, thereby facilitating the implantation and maintenance of the cantilever probe and reducing the production and maintenance costs.

For a better understanding of the nature and technical content of the present invention, reference should be made to the following detailed description of the invention and the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the invention in any way.

Drawings

Fig. 1 is a schematic perspective view of a vertical probe card according to a first embodiment of the invention.

Fig. 2 is an exploded perspective view of a probe head according to a first embodiment of the invention.

Fig. 3 is a schematic cross-sectional view of a vertical probe card according to a first embodiment of the invention.

Fig. 4 is a schematic perspective view of a cantilever-type probe according to a first embodiment of the invention.

Fig. 5 is a schematic plan view of a first mode of the cantilever-type probe of fig. 4.

Fig. 6 is a schematic plan view of a second mode of the cantilever-type probe of fig. 4.

Fig. 7 is a schematic plan view of a third mode of the cantilever-type probe of fig. 4.

Fig. 8 is an exploded perspective view of a probe head according to a second embodiment of the invention.

Fig. 9 is a schematic cross-sectional view of a vertical probe card according to a third embodiment of the invention.

Fig. 10 is a schematic cross-sectional view of a vertical probe card according to a fourth embodiment of the invention.

Fig. 11 is a schematic view of the cantilever-type probe of fig. 10 with the needle-side section abutting against the object to be inspected.

Fig. 12 is a schematic cross-sectional view of another embodiment of the vertical probe card of fig. 10.

Fig. 13 is a schematic view of the cantilever-type probe of fig. 12 with the needle-side section abutting against the object to be inspected.

Fig. 14 is a schematic perspective view of a vertical probe card according to a fifth embodiment of the invention.

Fig. 15 is a schematic top view of the vertical probe card of fig. 14.

Fig. 16 is a perspective view of another cantilever-type probe according to the first embodiment of the present invention.

Detailed Description

The following is a description of the embodiments of the invention relating to a vertical probe card and its cantilever probe, with specific embodiments, and those skilled in the art will understand the advantages and effects of the invention from the disclosure of the present specification. The invention is capable of other and different embodiments and its several details are capable of modification and various other changes, which can be made in various details within the specification and without departing from the spirit and scope of the invention. The drawings of the present invention are for illustrative purposes only and are not intended to be drawn to scale. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. In addition, the term "or" as used herein should be taken to include any one or combination of more of the associated listed items as the case may be.

[ example one ]

Fig. 1 to 7 and fig. 16 show a first embodiment of the present invention. The embodiment discloses a vertical probe card 1000, which includes a probe head 100 and an adapter plate 200(space transformer) abutting against one side (e.g. the top side of the probe head 100 in fig. 1) of the probe head 100(probe head), and the other side (e.g. the bottom side of the probe head 100 in fig. 1) of the probe head 100 can be used to abut against a Device Under Test (DUT) (not shown), such as a semiconductor wafer.

It should be noted that, for the convenience of understanding the embodiment, the drawings only show a partial structure of the vertical probe card 1000 so as to clearly show the structure and connection relationship of the components of the vertical probe card 1000, but the invention is not limited by the drawings. The construction of each component of the probe head 100 and the connection relationship thereof will be described separately below.

The probe head 100 includes a plurality of guide plates 1 stacked one on another in a height direction H and a plurality of cantilever-type probes 2 positioned on the plurality of guide plates 1. In detail, for convenience of description, the plurality of guide plates 1 in the present embodiment are named as a first guide plate 1a, a second guide plate 1b, and a third guide plate 1c, respectively, and the plurality of guide plates 1 are stacked and disposed in the height direction H in order from bottom to top as the second guide plate 1b, the third guide plate 1c, and the first guide plate 1 a. In addition, for the convenience of the following components, a length direction L perpendicular to the height direction H and a width direction D perpendicular to the height direction H and the length direction L are further defined in the present embodiment.

It should be noted that the guide plates 1 are disposed corresponding to each other in the present embodiment, and the probe head 100 excludes a manner of including only a single guide plate 1. Moreover, the cantilever-type probe 2 is illustrated as being associated with the above-mentioned components (e.g., the plurality of guide plates 1) in the present embodiment, but in other embodiments not shown in the present invention, the cantilever-type probe 2 may be associated with other components or may be applied separately (e.g., sold).

Wherein the third guide plate 1c is sandwiched between the first guide plate 1a and the second guide plate 1 b. The first guide plate 1a is formed with a first elongated hole 10a, and the (major axis direction of the) first elongated hole 10a is formed perpendicular to the width direction D. In the embodiment, the first elongated hole 10a is substantially rectangular, but the invention is not limited thereto. For example, in another embodiment not shown in the present invention, a plurality of the first elongated holes 10a may be formed on the first guide plate 1a, and the plurality of the first elongated holes 10a are respectively recessed along the width direction D.

The second guide plate 1b is formed with a second elongated hole 10b, and the position of the second elongated hole 10b along the height direction H corresponds to the first elongated hole 10a (e.g., the second elongated hole 10b is located right below the first elongated hole 10a in this embodiment). However, in other embodiments not shown in the present disclosure, a plurality of the second elongated holes 10b may be formed on the second guide plate 1b, a plurality of the first elongated holes 10a may also be formed on the first guide plate 1a, and the plurality of the second elongated holes 10b correspond to the plurality of the first elongated holes 10a, respectively, but the present disclosure is not limited thereto.

The third guide plate 1c is formed with a plurality of third elongated holes 10c, and each (major axis direction of) the third elongated hole 10c is parallel to the length direction L and is formed by being recessed in the width direction D. More specifically, the third elongated holes 10c are respectively located between the first elongated hole 10a and the second elongated hole 10b along the height direction H, and the length of the third elongated hole 10c in the length direction L is greater than the length of the first elongated hole 10a and the second elongated hole 10b in the long axis direction thereof. In the present embodiment, any one of the third elongated holes 10c has a rectangular shape, but the present invention is not limited thereto.

For example, in another embodiment not shown in the present invention, the second guide plate 1b may be protruded on a side surface adjacent to the first guide plate 1a and abut against the first guide plate 1a, so as to replace the third guide plate 1 c. Accordingly, the third guide plate 1c of the probe head 100 may be omitted or replaced with another member, but the present invention is not limited thereto.

One ends of the plurality of cantilever-type probes 2 are respectively passed through the first elongated holes 10a of the first guide plate 1a, and the other ends of the plurality of cantilever-type probes 2 are respectively passed through the second elongated holes 10b of the second guide plate 1 b. Further, a part (e.g., a main body segment 21 described below) of each of the cantilever-type probes 2 is located inside the first guide plate 1a, the second guide plate 1b, and the third guide plate 1 c. In the embodiment, the cantilever probe 2 is a conductive and integrally formed single-piece structure, and the cantilever probe 2 can be manufactured by a micro-electro-mechanical system (MEMS) technology, but the invention is not limited thereto.

It should be noted that, in fig. 1 of the present embodiment, a plurality of the cantilever-type probes 2 are illustrated as being arranged in a row along one side of the probe head 100, but in a portion not shown in the present embodiment, a plurality of the cantilever-type probes 2 may be arranged along at least two sides of the probe head 100, and a plurality of the cantilever-type probes 2 arranged along any side of the probe head 100 may also be arranged in at least two rows. That is, the arrangement of the cantilever-type probes in the probe head 100 can be adjusted according to design requirements, and is not limited to this embodiment.

Since the plurality of cantilever-type probes 2 of the probe head 100 are substantially the same in the embodiment, the following description is given by taking a single cantilever-type probe 2 as an example, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the plurality of cantilever-type probes 2 of the probe head 100 may also have different configurations from each other. Further, to facilitate understanding of the cantilevered probe 2 configuration, the cantilevered probe 2 will be described below with the probe head 100 in a needle implantation position.

The cantilever probe 2 includes a main body 21, two side portions 22 extending from opposite sides of the main body 21, a fixed portion 23 extending from a top edge of the main body 21, and a probing portion 24 extending from a bottom edge of the main body 21. In detail, the main body section 21 is disposed through the corresponding first elongated hole 10a, the second elongated hole 10b and the third elongated hole 10c, the fixing section 23 is exposed on the upper surface of the first guide plate 1a, the needle measuring section 24 is exposed on the lower surface of the second guide plate 1b, and the two side wing sections 22 are disposed on the third guide plate 1c correspondingly.

In other words, an end edge of the fixed section 23 facing the first guide plate 1a (e.g., a top edge of the fixed section 23 in fig. 3) is formed by extending the main body section 21, the two side sections 22 (e.g., left and right sides of the main body section 21 in fig. 3) and the needle measuring section 24 in sequence in this embodiment.

Further, the main body segment 21 is disposed through the plurality of guide plates 1 (e.g., the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c), and the two wing segments 22 are clamped between at least two of the plurality of guide plates 1 (e.g., clamped between the first guide plate 1a and the second guide plate 1b and fixed to the third guide plate 1 c). Accordingly, the plurality of guide plates 1 can stably fix the cantilever-type probe 2 by clamping the two side sections 22 corresponding to each other, so that the cantilever-type probe 2 is not easily dropped out when the probe head 100 is subjected to movement or overturning.

In the present embodiment, the main body segment 21 perpendicular to the width direction D is substantially trapezoidal in shape, and the main body segment 21 perpendicular to the height direction H is substantially rectangular in cross section, but the present invention is not limited thereto. For example, in other embodiments of the present invention, which are not shown, the main body segment 21 perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular) in shape.

The two side panels 22 extend from the main body panel 21 along opposite sides of the longitudinal direction L, and a cross section of any one of the side panels 22 perpendicular to the height direction H is substantially rectangular, and the two side panels 22 are connected to substantially the center of the main body panel 21 (left and right sides) in the height direction H. The length of any one of the side panels 22 in the longitudinal direction L is approximately 1/10-1/20 of the length of the main body panel 21 in the longitudinal direction L. The thicknesses of the two side panels 22 in the width direction D are substantially equal to the thickness of the main body panel 21, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the thickness of the wing segment 22 may not be equal to the thickness of the main segment 21.

It should be noted that the two side wings 22 of the cantilever probe 2 are formed according to their purposes, so that the cantilever probe 2 is relatively stably clamped in the plurality of guide plates 1, and therefore the cantilever probe 2 excludes the manner of only including a single side wing 22.

The fixing section 23 is formed to extend from the top edge of the main body section 21 in the height direction H in a direction away from the main body section 21. Wherein the fixing section 23 is exposed on the surface of a plurality of guide plates 1 (e.g. the first guide plate 1a in FIG. 3).

The fixed segment 23 includes a connection portion 231 in a suspension shape and a buffer suspension 232 connecting the connection portion 231 and the main segment 21. The shape of the connection portion 231 in the direction perpendicular to the width direction D is substantially trapezoidal, and the cross section of the connection portion 231 in the direction perpendicular to the height direction H is substantially rectangular, but the present invention is not limited thereto. For example, as shown in fig. 16, the fixing segment 23 may be formed with only the connection portion 231, and the connection portion 231 is directly formed on the main body segment 21; alternatively, in other embodiments of the present invention, which are not shown, the shape of the connection portion 231 in the direction perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular).

In the present embodiment, the shape of the buffer cantilever 232 perpendicular to the width direction D is substantially a straight-line structure (as shown in fig. 4), one end of the two ends of the buffer cantilever 232 is connected to (the top edge of) the main body segment 21, and the other end of the buffer cantilever 232 is connected to the connecting portion 231. In more detail, the buffer suspension arm 232 can deform under a force and continuously has a resilience, and the cross section of the buffer suspension arm 232 perpendicular to the height direction H is substantially rectangular, but the invention is not limited thereto. For example, in other embodiments of the present invention not shown, the bumper cantilever 232 may be of an arcuate configuration.

That is, the connecting portions 231 are spaced apart from each other by the buffer suspension 232 on the main body 21, so that the connecting portions 231 can be disposed on the top sides of the plurality of guide plates 1 (e.g., above the first guide plate 1a in fig. 3), and the top ends of the connecting portions 231 are fixed to the adapter plate 200.

The needle measuring section 24 is formed along the height direction H and extends from the bottom edge of the main body section 21 to a direction away from the main body section 21, and the needle measuring section 24 is exposed on the surface of a plurality of guide plates 1 (for example, the second guide plate 1b in FIG. 3).

The probe section 24 includes a floating abutting portion 241 and a probe suspension arm 242 connecting the abutting portion 241 and the main body section 21. The abutting portion 241 has a substantially trapezoidal shape (as shown in fig. 4) or a convex shape (as shown in fig. 5) perpendicular to the width direction D, and the abutting portion 241 has a substantially rectangular cross section perpendicular to the height direction H, but the present invention is not limited thereto. For example, in other embodiments of the present invention, which are not shown, the shape of the abutting portion 241 perpendicular to the width direction D may be non-trapezoidal (e.g., rectangular).

In this embodiment, the probing cantilever 242 has a substantially linear configuration (as shown in fig. 4) or a stepped configuration (as shown in fig. 6) perpendicular to the width direction D, one end of the two ends of the probing cantilever 242 is connected to (the bottom edge of) the main body 21, and the other end of the probing cantilever 242 is connected to the abutting portion 241. In more detail, the probe cantilever 242 can be deformed by a force to continue to have a resilience, thereby providing a stroke required for the operation of the cantilever probe 2. The cross section of the stylus cantilever 242 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the stylus boom 242 may be of an arcuate configuration.

In addition, the probing cantilever 242 can be adjusted and changed according to the design requirement; for example, referring to fig. 7, on the surface of the probing cantilever 242 perpendicular to the width direction H, a slit 2421 may be concavely formed on the probing cantilever 242 along the length direction L, the slit 2421 is substantially rectangular in shape perpendicular to the width direction D, and the slit 2421 penetrates through two sides of the probing cantilever 242 along the width direction D. In addition, in another embodiment not shown in the present invention, the probing cantilever 242 may be concavely formed with a plurality of slits 2421 along the length direction L, but the present invention is not limited thereto.

Furthermore, the contact portion 241 is disposed on the main body segment 21 through the needle suspension 242, so that the contact portion 241 can be disposed at intervals on the bottom side of the plurality of guide plates 1 (e.g. below the second guide plate 1b in FIG. 3), and the contact portion 241 is used for detachably abutting against the object to be tested.

Wherein the needle measuring section 24 has a moment arm length L24 in the length direction L. That is, the length of the stylus boom 242 in the length direction L is substantially equal to the arm length L24, and the abutment 241 is spaced from (the bottom side of) the main body section 21 in the height direction H by a distance G that is less than the arm length L24. In the embodiment, the distance G is approximately 1/5 to 1/10 of the arm length L24, but the invention is not limited thereto.

The cantilever-type probes 2 are sequentially disposed on the first guide plate 1a, the third guide plate 1c, and the second guide plate 1 b. The main body segment 21 is fixed to the corresponding first elongated hole 10a and the second elongated hole 10b, and the two wing segments 22 are correspondingly disposed in the third elongated hole 10c, so that the two wing segments 22 are clamped between the first guide plate 1a and the second guide plate 1 b.

The fixing section 23 penetrates through the first elongated hole 10a, and the connecting portion 231 of the fixing section 23 is exposed on the surface of the first guide plate 1 a. The needle measuring section 24 penetrates through the second elongated hole 10b, and the abutting portion 241 of the needle measuring section 24 is exposed on the surface of the second guide plate 1 b.

In the present embodiment, the probing section 24 and the fixing section 23 of each of the cantilever probes 2 are located within a projection area formed by orthographic projection of the main body section 21 along the height direction H, so that each of the cantilever probes 2 is disposed on a plurality of the guide plates 1 along the height direction H.

When the abutting portion 241 of each cantilever type probe 2 abuts against the object to be tested, the needle measurement cantilever 242 provides elasticity, so that the abutting portion 241 is actually contacted with the object to be tested, and the connection between the abutting portion 241 and the object to be tested can be more stable.

It should be noted that in the present embodiment, one of the guide plates 1 (e.g., the first guide plate 1a) far from the plurality of probe measuring sections 24 can pass through the plurality of cantilever probes 2 along the height direction H and press against the two side sections 22 of each of the cantilever probes 2, so that (a side of) each of the main sections 21 of the first elongated hole 10a receiving portion is adjacent to the fixed section 23. In detail, the two side sections 22 of each of the cantilever-type probes 2 are pressed against the first guide plate 1a, so that the main section 21 of each of the cantilever-type probes 2 is fixed in the plurality of guide plates 1.

As described above, the cantilever probe 2 of the vertical probe card 1000 can be positioned between the first guide plate 1a and the second guide plate 1b by the two side wing sections 22, and the probe section 24 can provide a stroke required by the cantilever probe 2 to detect a stress without dislocation, thereby providing a vertical probe card and a cantilever probe thereof different from the conventional one. Moreover, since the plurality of guide plates 1 (e.g., the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c) do not need to position the cantilever-type probe 2 in a staggered arrangement, the length of the cantilever-type probe 2 can be effectively shortened, so that the cantilever-type probe 2 effectively improves the testing performance result, and is helpful to improve the probe-implanting efficiency or facilitate the maintenance and replacement of the cantilever-type probe 2.

[ example two ]

Please refer to fig. 8, which is a diagram of a second embodiment of the present invention, since this embodiment is similar to the first embodiment, the same parts of the two embodiments are not repeated, and the differences between this embodiment and the first embodiment are roughly described as follows:

in the vertical probe card 1000 of this embodiment, the first elongated hole 10a is recessed along the width direction D, and the first guide plate 1a passes through the plurality of cantilever probes 2 along the width direction D, so that the first elongated hole 10a can pass through the plurality of cantilever probes 2 along the width direction D, and the first elongated hole 10a receives (a side of) each main body segment 21 (adjacent to the fixed segment 23) of the portion, and the first guide plate 1a presses against two side wing segments 22 of each cantilever probe 2.

In detail, the two side sections 22 of each of the cantilever-type probes 2 are pressed against by the first guide plate 1a, so that the main section 21 of each of the cantilever-type probes 2 is fixed among the plurality of guide plates 1.

As described above, when the cantilever type probes 2 of the vertical probe card 1000 are disposed on the second guide plate 1b and the third guide plate 1c, the first guide plate 1a can pass through a plurality of the cantilever type probes 2 along the width direction D. The arrangement of the first guide plate 1a can be adjusted according to design requirements, so that the cantilever-type probe 2 is beneficial to improving the needle implanting efficiency or facilitating maintenance and replacement of the cantilever-type probe 2.

[ third example ]

Please refer to fig. 9, which is a third embodiment of the present invention, and since this embodiment is similar to the first embodiment, the same parts of the two embodiments are not repeated, and the differences between this embodiment and the first embodiment are roughly described as follows:

in the vertical probe card 1000 of the present embodiment, the abutting portion 241 and the connecting portion 231 of the cantilever type probe 2 are not both located in the height direction H. In other words, the probe cantilever 242 of the probe section 24 and the buffer cantilever 232 of the fixed section 23 extend in different directions in the length direction L, and the abutting portion 241 and the connecting portion 231 are separated by a displacement distance L100 greater than the gap G in the length direction L, but the invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, the offset distance L100 is spaced in the length direction L by a distance not greater than the distance G, but the present disclosure is not limited thereto.

As described above, in the vertical probe card 1000, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 are not both located in the height direction H, so that the connecting portion 231 of the cantilever probe 2 can be matched with different adapter plates 200, thereby increasing the application range of the cantilever probe 2.

[ example four ]

Please refer to fig. 10 to fig. 13, which are fourth embodiment of the present invention, since this embodiment is similar to the first embodiment, the same parts of the two embodiments are not repeated, and the differences between this embodiment and the first embodiment are roughly described as follows:

as shown in fig. 10 and 11, in the vertical probe card 1000 of the present embodiment, the contacting portion 241 and the connecting portion 231 of the cantilever-type probe 2 are both located in the height direction H, and the connecting portion 231 of the buffer cantilever 232 contacts the main body segment 21. Furthermore, when the abutting portion 241 abuts against the object to be tested, the probing cantilever 242 is elastically bent, so that the abutting portion 241 abuts against two sides of the main body section 21.

In detail, the main body segment 21 may be formed with a trapezoidal structure 211 protruding from a portion thereof adjacent to the abutting portion 241 and the connecting portion 231 in the height direction H. Accordingly, when the cantilever probe 2 abuts against the object to be tested by the abutting portion 241, the abutting portion 241 abuts against the adjacent trapezoid structure 211. For example, in another embodiment not shown in the present invention, one of the abutting portion 241 and the connecting portion 231 may be the trapezoid structure 211 that does not abut against the main body segment 21, but the present invention is not limited thereto.

In addition, as shown in fig. 12 and fig. 13, one of the two trapezoid-shaped structures 211 may also be formed on the side of the abutting portion 241 adjacent to (the bottom side of) the main body segment 21, and the other trapezoid-shaped structure 211 may be formed on the side of the connecting portion 231 adjacent to (the top side of) the main body segment 21, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, one of the two trapezoid-shaped structures 211 may be formed adjacent to the abutting portion 241 or the connecting portion 231 of the main body segment 21, and the other trapezoid-shaped structure 211 is formed on the main body segment 21, but the present invention is not limited thereto.

As described above, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 of the vertical probe card 1000 abut against two sides of the main body segment 21, respectively, so that the cantilever probe 2 can shorten a transmission path, and the cantilever probe 2 is helpful to improve a transmission effect.

[ example five ]

Please refer to fig. 14 and fig. 15, which are a fifth embodiment of the present invention, and since this embodiment is similar to the first embodiment, the same parts of the two embodiments are not repeated, and the differences between this embodiment and the first embodiment are roughly described as follows:

in the vertical probe card 1000 of the present embodiment, in two adjacent cantilever probes 2 of the plurality of cantilever probes 2 along the width direction D, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 are not both located in the height direction H, and the abutting portion 241 and the connecting portion 231 of the other cantilever probe 2 are both located in the height direction H.

Accordingly, the plurality of cantilever probes 2 of the vertical probe card 1000 are distributed, so that the connection portion 231 can be matched with different interposer 200, thereby increasing the application range of the cantilever probes 2. Furthermore, the probe head 100 can effectively enlarge the distance between two adjacent connecting parts 231 by arranging a plurality of connecting parts 231 (as shown in FIG. 14), thereby influencing the distance setting of the adapter plate 200. For example, as shown in fig. 14, the probe head 100 only needs to be further matched with a circuit board, so as to improve the electrical quality and reduce the manufacturing cost.

[ technical effects of embodiments of the present invention ]

In summary, the vertical probe card disclosed in the embodiments of the present invention utilizes the structural design of the cantilever probe to make the cantilever probe applicable to the vertical probe card, thereby facilitating the implantation and maintenance of the cantilever probe and reducing the production and maintenance costs.

In addition, the vertical probe card disclosed in the embodiment of the invention can move and fix the cantilever type probe along the height direction or the width direction by opening a hole or a groove in a guide plate (such as a first guide plate), so that the cantilever type probe can provide a stroke required by a probe section when a force is applied without dislocation, and the length of the cantilever type probe can be effectively shortened, thereby effectively improving the testing efficiency. In addition, each cantilever type probe can be vertically upwards and downwards along the height direction, so that the vertical probe card is favorable for needle implantation, maintenance and replacement of the cantilever type probe, and the production and maintenance cost is reduced.

In the vertical probe card disclosed in the embodiment of the present invention, the abutting portion and the connecting portion of the cantilever type probe may not be both located in the height direction, so that the connecting portion of the cantilever type probe can be matched with different adapter plates, thereby increasing the application range of the cantilever type probe.

In addition, in the process of detecting the vertical probe card disclosed by the embodiment of the invention, the abutting part and the connecting part of the cantilever type probe can abut against two sides of the main body section respectively, so that the transmission path of the cantilever type probe can be shortened, and the cantilever type probe is favorable for improving the transmission effect.

In addition, the vertical probe card disclosed in the embodiment of the invention is clamped in two adjacent cantilever type probes along the width direction, wherein the abutting part and the connecting part of one of the cantilever type probes are not both positioned in the height direction, and the abutting part and the connecting part of the other of the cantilever type probes are both positioned in the height direction, so that the connecting parts can achieve a cross arrangement effect, and further, the fixing section can be matched with different adapter plates, and the interval between the connecting parts of the two cantilever type probes can be enlarged.

The disclosure is only a preferred embodiment of the invention and is not intended to limit the scope of the invention, so that all equivalent technical changes made by using the contents of the specification and the drawings are included in the scope of the invention.