阅读说明：本技术 一种调平模块及包含该模块的七轴对位平台 (Leveling module and seven-axis alignment platform comprising same ) 是由 刘文锋 赵丽 于 2021-10-10 设计创作，主要内容包括：本申请涉及一种调平模块及包含该模块的七轴对位平台,一种调平模块包括工作安装板、多组高度调节机构及安装基座,高度调节机构包括高度固定座,高度固定座设置有高度滑移组件以及高度驱动组件,高度滑移组件的顶端设置有万向调节组件,万向调节组件将工作安装板与高度滑移组件连接。当需要调节工作安装板的倾仰角度时,多组高度驱动组件分别驱使对应的高度滑移组件运动,从而使得工作安装板发生倾斜,由于高度滑移组件顶端的万向调节组件与工作安装板连接,万向调节组件能够保证工作安装板在倾斜的过程中,高度滑移组件仍然处于正常工作的角度,从而改善高度滑移组件出现卡顿的情况,提高该调平机构的精度。(The utility model relates to a leveling module and contain seven of this module of counterpoint platforms, a leveling module includes work mounting panel, multiunit height control mechanism and mounting base, and height control mechanism includes high fixing base, and high fixing base is provided with high subassembly and the high drive assembly that slides, and the top of high subassembly that slides is provided with universal adjusting part, and universal adjusting part is connected work mounting panel and high subassembly that slides. When the inclination angle of the work mounting plate needs to be adjusted, the multiple groups of height driving assemblies respectively drive the corresponding height sliding assemblies to move, so that the work mounting plate is inclined, the universal adjusting assemblies at the top ends of the height sliding assemblies are connected with the work mounting plate, the universal adjusting assemblies can ensure that the work mounting plate is still at the angle of normal work in the inclined process, the clamping condition of the height sliding assemblies is improved, and the precision of the leveling mechanism is improved.)

1. A leveling module, comprising:

a working mounting plate (210) for mounting a workpiece to be tested;

the height adjusting mechanisms (220) are used for adjusting the inclination angle of the working mounting plate (210), and the height adjusting mechanisms (220) are mounted at the bottom of the working mounting plate (210); the height adjusting mechanism (220) comprises a height fixing seat (221), the height fixing seat (221) is provided with a height sliding assembly (222) and a height driving assembly (223) for driving the height sliding assembly (222) to run, the top end of the height sliding assembly (222) is provided with a universal adjusting assembly (224), and the universal adjusting assembly (224) connects the working mounting plate (210) with the height sliding assembly (222);

the mounting base (230) is used for bearing the height adjusting mechanism (220), and the mounting base (230) is detachably connected with the height fixing base (221).

2. A levelling module according to claim 1, characterized in that the height glide assembly (222) comprises:

the height mounting plate (2221) is mounted on the side edge of the height fixing seat (221);

the height nut seat (2222) is arranged on the side edge of the height fixing seat (221) in a sliding manner, a height adjusting screw rod (2223) is arranged on the height nut seat (2222), the height adjusting screw rod (2223) is in threaded fit with the height nut seat (2222), a height driven wheel (2224) is coaxially fixed at the bottom end of the height adjusting screw rod (2223), and the height driven wheel (2224) is driven to rotate by the height driving component (223);

the coaxial limiting part (2225) is used for limiting the position of the height adjusting screw rod (2223) and ensuring that the rotating central axis of the height adjusting screw rod (2223) is stabilized on the same straight line, and the coaxial limiting part (2225) is fixedly connected with the height fixing seat (221).

3. A levelling module according to claim 2, characterized in that the height drive assembly (223) comprises a height drive motor (2231), the output shaft of the height drive motor (2231) being coaxially provided with a height drive wheel (2232), the height drive motor (2231) being mounted to the height mounting plate (2221), the height drive wheel (2232) driving the rotation of the height driven wheel (2224).

4. The leveling module according to claim 2, wherein the universal adjusting component (224) comprises a universal mounting base (2241), a universal rotating seat (2242) and a supporting block (2243), the universal mounting base (2241) is provided with a universal mounting post (2244), the outer peripheral surface of the universal mounting post (2244) is provided with a universal ball center body (2245), the outer wall of the universal ball center body (2245) is provided with a universal ball sleeve (2246) in a sliding manner, the universal ball sleeve (2246) is installed in the universal rotating seat (2242), the supporting block (2243) is arranged on the top end surface of the universal rotating seat (2242), the supporting block (2243) is detachably connected with the working mounting plate (210), and the universal mounting base (2241) is installed on the top end surface of the nut seat (2222).

5. A levelling module according to claim 4, characterized in that the top face of the universal mounting post (2244) is provided with a stop cover plate (2247), the bottom end face of the stop cover plate (2247) abuts the top face of the universal sphere core (2245), the bottom end face of the universal sphere core (2245) abuts the top face of the universal mounting base (2241).

6. The leveling module according to claim 5, wherein, ball sleeve mounting groove (2242a) has in universal rotation seat (2242), install in ball sleeve mounting groove (2242a) and stabilize bush (2248), it locates to stabilize bush (2248) cover universal ball sleeve (2246) the outer peripheral face and with universal ball sleeve (2246) the outer peripheral face joint, stabilize bush (2248) the outer peripheral face with the lateral wall butt of ball sleeve mounting groove (2242a), the bottom face of universal rotation seat (2242) is provided with ball sleeve and supports tight ring (2249), ball sleeve supports tight ring (2249) will universal ball sleeve (2246) is spacing in ball sleeve mounting groove (2242 a).

7. A levelling module according to claim 1, characterized in that the top end face of the height fixing base (221) is provided with a height mounting block (2211), the bottom end face of the height mounting block (2211) abutting the top end face of the mounting base (230).

8. A seven-axis alignment platform comprising the leveling module according to any one of claims 1 to 7, further comprising a bottom plate (100) and a plurality of sets of XY θ alignment units (300), wherein the XY θ alignment units (300) are mounted on the top end surface of the bottom plate (100), the XY θ alignment units (300) are used for driving the mounting base (230) to perform translation and rotation in XY axes, the XY θ alignment units (300) have alignment rotating shafts (310), and the plurality of sets of alignment rotating shafts (310) are respectively connected with the mounting base (230) in a rotation manner.

Technical Field

The application relates to the technical field of alignment platforms, in particular to a leveling module and a seven-axis alignment platform comprising the same.

Background

The leveling module is a module which can make the horizontal tilting angle of the flat plate change correspondingly by adjusting the height of a supporting point below the flat plate. The method has wide application in the aspects of exposure machines, screen printing machines, laminating machines, pressing machines, PCB cutting and the like in the PCB manufacturing industry. In some high-precision manufacturing industries, such as wafer cutting and package inspection, the high-precision leveling module also has an irreplaceable function.

In the related technical means, the four-axis leveling structure mainly comprises a base, wherein a group of ball screw nut modules are correspondingly arranged at four corners of the base respectively, a workbench is arranged at the top end of a screw, the workbench is used for installing a workpiece to be tested, and the bottom end face of the workbench is fixedly connected with a screw rod. Four groups of driving assemblies are arranged in the base, the four groups of driving assemblies correspond to the four groups of ball screw nut modules one by one, and the driving assemblies can drive nuts of the ball screw nut modules to rotate, so that the heights of four corners of the workbench can be controlled independently by the four screws, and the leveling function is realized.

In the leveling process, the workbench inclines, and the top end of the screw rod is fixedly connected with the workbench, so that the screw rod can be bent by the workbench, the screw rod is slightly deformed, the ball screw nut module is clamped, and the leveling precision is reduced.

Disclosure of Invention

In order to improve the precision of a leveling structure, the application provides a leveling module and a seven-axis alignment platform comprising the leveling module.

The application provides a leveling module and contain seven of this module and counterpoint platform, adopts following technical scheme.

In a first aspect, the present application provides a leveling module, which adopts the following technical solution,

a leveling module, comprising:

the working mounting plate is used for mounting a workpiece to be tested;

the height adjusting mechanisms are used for adjusting the inclination angle of the working mounting plate and are mounted at the bottom of the working mounting plate; the height adjusting mechanism comprises a height fixing seat, the height fixing seat is provided with a height sliding assembly and a height driving assembly for driving the height sliding assembly to run, the top end of the height sliding assembly is provided with a universal adjusting assembly, and the universal adjusting assembly connects the working mounting plate with the height sliding assembly;

and the mounting base is used for bearing the height adjusting mechanism and is detachably connected with the height fixing base.

Through adopting above-mentioned technical scheme, multiunit height control mechanism installs in the bottom position of work mounting panel, and height control mechanism's high fixing base detachable connection is on the mounting base, and when the angle of heeling of needs regulation work mounting panel, multiunit height drive assembly orders about the subassembly motion that slides of corresponding height respectively to make the work mounting panel take place to incline. In the process that the work mounting panel takes place the slope, because the universal adjusting part on high subassembly top that slides is connected with the work mounting panel, universal adjusting part can guarantee that the work mounting panel is at the in-process of slope, and high subassembly that slides is still in the angle of normal work to improve the high subassembly that slides and appear blocking the condition of pause, improve this leveling mechanism's precision.

Optionally, the height glide assembly comprises:

the height mounting plate is mounted on the side edge of the height fixing seat;

the height nut seat is arranged on the side edge of the height fixing seat in a sliding manner, a height adjusting screw rod is arranged on the height nut seat, the height adjusting screw rod is in threaded fit with the height nut seat, a height driven wheel is coaxially fixed at the bottom end of the height adjusting screw rod, and the height driven wheel is driven to rotate by the height driving assembly;

the coaxial locating part is used for limiting the position of the height adjusting screw rod and ensuring that the rotating central axis of the height adjusting screw rod is stabilized on the same straight line, and the coaxial locating part is fixedly connected with the height fixing seat.

Through adopting above-mentioned technical scheme, the high mounting panel is installed in the side of high fixing base, receives the high driven wheel of high drive assembly driven and takes place the rotation, highly takes place the rotation from the driving wheel and the coaxial fixed connection of high accommodate the lead screw to make high driven wheel drive high accommodate the lead screw and take place to rotate, high accommodate the lead screw drives high nut seat and slides at the side of high fixing base, thereby realizes the function of altitude mixture control.

Optionally, the height driving assembly comprises a height driving motor, a height driving wheel is coaxially arranged on an output shaft of the height driving motor, the height driving motor is mounted on the height mounting plate, and the height driving wheel drives the height driven wheel to rotate.

Through adopting above-mentioned technical scheme, install in the high driving motor of high mounting panel and can drive high drive wheel, high drive wheel drive highly takes place to rotate from the driving wheel, under the condition that can realize the altitude mixture control function, high driving motor installs on high mounting panel, and high mounting panel installs at high fixing base side to make this high drive assembly compact structure, improve the space utilization of this leveling module.

Optionally, the universal adjusting part includes universal installation base, universal rotation seat and supporting shoe, universal installation base is provided with universal erection column, the outer peripheral face of universal erection column is provided with the universal centre of sphere body, the outer wall of universal centre of sphere body slides and is provided with universal ball cover, universal ball cover install in the universal rotation seat, the supporting shoe set up in the top face of universal rotation seat, the supporting shoe with the connection can be dismantled to the work mounting panel, universal installation pedestal mounting in high nut seat top face.

Through adopting above-mentioned technical scheme, universal installation pedestal mounting is in the top face of high nut seat, universal installation pedestal is provided with universal erection column, universal centre of sphere body is installed in the outer peripheral face of universal erection column, universal ball cover slides and sets up on the outer wall of universal centre of sphere body, universal ball cover is installed in universal rotation seat, the top face of universal rotation seat is provided with the supporting shoe, the supporting shoe is connected universal rotation seat and high nut seat, so that high nut seat is at the in-process of altitude mixture control, universal rotation seat can guarantee the in-process of work mounting panel at the slope, the subassembly that highly slides still is in the angle of normal work, thereby improve the condition that highly slides the subassembly and appear blocking and dunng, improve the precision of this leveling mechanism.

Optionally, a limiting cover plate is arranged on the top end face of the universal mounting column, the bottom end face of the limiting cover plate is abutted to the top end face of the universal sphere core body, and the bottom end face of the universal sphere core body is abutted to the top end face of the universal mounting base.

Through adopting above-mentioned technical scheme, the bottom face of the universal centre of sphere body and the top face butt of universal installation base, the top face of the universal centre of sphere body and the bottom face butt of spacing apron, spacing apron can carry on spacingly with the universal centre of sphere body, can guarantee on the one hand that the universal centre of sphere body has stable position in the installation, on the other hand, dismantle from the top face of universal erection column through with spacing apron, can conveniently dismantle the universal centre of sphere body from universal installation base, thereby conveniently maintain and change the universal centre of sphere body and universal ball sleeve.

Optionally, the ball cover mounting groove has in the universal rotation seat, install the stable bush in the ball cover mounting groove, stable bush cover is located the outer peripheral face of universal ball cover and with the outer peripheral face joint of universal ball cover, the outer peripheral face of stable bush with the lateral wall butt of ball cover mounting groove, the bottom face of universal rotation seat is provided with the ball cover and supports the tight ring, the ball cover supports the tight ring will universal ball cover is spacing in the ball cover mounting groove.

Through adopting above-mentioned technical scheme, it sets up on the outer peripheral face of universal ball cover to stabilize the bush, and the inner wall of stabilizing the bush and the outer peripheral face joint of universal ball cover, the outer peripheral face of stabilizing the bush and the lateral wall butt of ball cover mounting groove, ball cover support the tighrening ring with universal ball cover spacing in ball cover mounting groove, thereby make universal ball cover fixed in universal rotating seat's position, when the work mounting panel takes place the slope, universal rotating seat drives universal ball cover and takes place to rotate on the universal centre of sphere body, thereby improve the condition that the card went up appears in the high subassembly that slides.

Optionally, a height mounting block is arranged on the top end face of the height fixing seat, and the bottom end face of the height mounting block abuts against the top end face of the mounting base.

By adopting the technical scheme, the height nut seat, the coaxial locating part and the height mounting plate are all mounted on the side edge of the height mounting block, the height mounting block is arranged at the top end of the height fixing seat, the bottom end face of the height mounting block is abutted against the top end face of the mounting base, and after the mounting base is mounted on the mounting base, the height nut seat, the coaxial locating part and the height mounting plate can repeatedly utilize the space in the height direction with the mounting base, so that the mounting height of the leveling module can be reduced, and the space utilization rate of the leveling module is improved.

In another aspect, the present application provides a seven-axis alignment platform, which adopts the following technical solution,

the seven-axis alignment platform comprises the leveling module, and further comprises a bottom plate and a plurality of groups of XY theta alignment units, wherein the XY theta alignment units are installed on the top end face of the bottom plate and used for driving the mounting base to realize translation and rotation of XY axes, each XY theta alignment unit is provided with an alignment rotating shaft, and the plurality of groups of alignment rotating shafts are respectively connected with the mounting base in a rotating mode.

By adopting the technical scheme, the XY theta alignment unit is arranged on the top end face of the bottom plate, and the height nut seat, the coaxial limiting part and the height mounting plate can repeatedly utilize the space with the XY theta alignment unit in the height direction, so that the mounting height of the seven-axis alignment platform can be made thinner. The multi-group alignment rotating shafts are respectively rotatably connected with the mounting base, the XY theta alignment unit drives the mounting base to realize the translation of XY axes, and when the multi-group XY theta alignment unit simultaneously drives the mounting base to translate, the mounting base can rotate due to torsional force, so that the alignment, inclination and elevation leveling functions of the seven-axis alignment platform are realized.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the universal adjusting assembly at the top end of the height sliding assembly is connected with the working mounting plate, and the universal adjusting assembly can ensure that the height sliding assembly is still at a normal working angle in the tilting process of the working mounting plate, so that the clamping condition of the height sliding assembly is improved, and the precision of the leveling mechanism is improved;

2. the limiting cover plate can ensure that the universal sphere core body has a stable position in the installation process, and the universal sphere core body can be conveniently detached from the universal installation base by detaching the limiting cover plate from the top end face of the universal installation column, so that the universal sphere core body and the universal sphere sleeve can be conveniently maintained and replaced;

3. the height nut seat, the coaxial limiting piece and the height mounting plate can repeatedly utilize space with the XY theta alignment unit in the height direction, so that the mounting height of the seven-axis alignment platform can be made thinner;

4. the multi-group alignment rotating shafts are respectively rotatably connected with the mounting base, the XY theta alignment unit drives the mounting base to realize the translation of XY axes, and when the multi-group XY theta alignment unit simultaneously drives the mounting base to translate, the mounting base can rotate due to torsional force, so that the alignment, inclination and elevation leveling functions of the seven-axis alignment platform are realized.

Drawings

FIG. 1 is a schematic overall structure diagram of a seven-axis alignment stage according to an embodiment of the present disclosure;

FIG. 2 is a schematic structural diagram showing a positional relationship among the base plate, the leveling module, and the XY θ aligning unit in the embodiment of the present application;

FIG. 3 is an enlarged schematic view of portion A of FIG. 2;

FIG. 4 is a schematic structural diagram of a gimbal adjustment assembly in an embodiment of the present application.

Description of reference numerals:

100. a base plate;

200. a leveling module;

210. a working mounting plate;

220. a height adjustment mechanism; 221. a height fixing seat; 2211. a height mounting block; 222. a height glide assembly; 2221. a height mounting plate; 2222. a height nut seat; 2223. a height adjusting screw rod; 2224. a highly driven wheel; 2225. a coaxial stopper; 223. a height drive assembly; 2231. a height drive motor; 2232. a height drive wheel; 224. a universal adjustment assembly; 2241. a universal mounting base; 2242. a universal rotating seat; 2242a, a ball sleeve mounting groove; 2243. a support block; 2244. a universal mounting post; 2245. a universal sphere core body; 2246. a universal ball sleeve; 2247. a limiting cover plate; 2248. a stabilizing bushing; 2249. the ball sleeve is abutted against the ring;

230. mounting a base;

300. an XY theta alignment unit; 310. aligning the rotating shaft; 320. an X-axis motion module; 330. a Y-axis motion module; 340. the motor is driven horizontally.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses a leveling module and a seven-axis alignment platform comprising the same. Referring to fig. 1, the seven-axis aligning platform includes a base plate 100, a plurality of sets of XY θ aligning units 300 for translational and rotational alignment, and a leveling module 200 for adjusting a tilting angle. The base plate 100 is substantially a flat rectangular parallelepiped, and in the present embodiment, the XY θ alignment units 300 are provided in three groups, and the three groups of XY θ alignment units 300 are mounted on three edges of the upper surface of the base plate 100. The leveling module 200 is installed at the top end of the three groups of XY θ alignment units 300, so as to realize the alignment, tilting and leveling functions of the seven-axis alignment platform.

Referring to fig. 2, the XY θ alignment unit 300 includes a horizontal driving motor 340, an X-axis motion module 320, a Y-axis motion module 330, and an alignment rotation shaft 310, wherein the horizontal driving motor 340 and the X-axis motion module 320 are mounted on the upper surface of the base plate 100, and the horizontal driving motor 340 drives the X-axis motion module 320 to move in the X-axis direction. The Y-axis motion module 330 is installed on the top surface of the X-axis motion module 320, and the alignment rotating shaft 310 is installed on the upper surface of the Y-axis motion module 330. When the three sets of horizontal driving motors 340 respectively drive the X-axis motion module 320 to operate at different speeds, the three sets of horizontal driving motors 340 can control the leveling module 200 mounted at the top end of the three sets of XY θ alignment units 300 to rotate in the θ -axis direction and move in the XY-axis direction, thereby achieving the alignment function.

Referring to fig. 2, the leveling module 200 includes a working mounting plate 210, a plurality of sets of height adjusting mechanisms 220, and a mounting base 230 in sequence from top to bottom, and in this embodiment, the height adjusting mechanisms 220 are arranged in four sets. The working mounting plate 210 is used for mounting a workpiece to be tested, the height adjusting mechanism 220 is used for adjusting the tilting angle of the working mounting plate 210, the mounting base 230 is used for bearing the height adjusting mechanism 220, and the lower end surface of the mounting base 230 is rotatably connected with the alignment rotating shafts 310 of the three groups of XY theta alignment units 300.

Referring to fig. 3, the height adjustment mechanism 220 includes a height fixing base 221, a height sliding assembly 222, a height driving assembly 223 and a universal adjustment assembly 224, the height sliding assembly 222 is disposed at a side of the height fixing base 221, the height driving assembly 223 is located at a side of the height sliding assembly 222 far away from the height fixing base 221, the universal adjustment assembly 224 is mounted above the height sliding assembly 222, and the universal adjustment assembly 224 connects the working mounting plate 210 with the height sliding assembly 222.

Referring to fig. 3, the height sliding assembly 222 includes a height mounting plate 2221, a height nut seat 2222, a height adjusting screw 2223, a height driven wheel 2224 and a coaxial position-limiting member 2225, wherein the height mounting plate 2221 is substantially rectangular plate-shaped, the side edge of the height mounting plate 2221 is fixed to the side edge of the height fixing seat 221, the height nut seat 2222 is vertically slidably mounted to the side edge of the height fixing seat 221 through a guide rail, the height adjusting screw 2223 is fittingly mounted to the height nut seat 2222, the height driven wheel 2224 is coaxially and fixedly mounted to the bottom of the height adjusting screw 2223, and the height driven wheel 2224 is driven by the height driving assembly 223 to rotate, so that the height nut seat 2222 can perform vertical sliding movement on the side edge of the height mounting plate 2221.

Referring to fig. 3, in order to limit the swing of the height adjustment screw 2223 during the operation process and ensure that the rotation central axis of the height adjustment screw 2223 is stabilized on the same straight line, the coaxial position-limiting part 2225 is fixedly connected to the height fixing base 221, the height adjustment screw 2223 passes through the coaxial position-limiting part 2225, the height adjustment screw 2223 is rotatably matched with the coaxial position-limiting part 2225, and the coaxial position-limiting part 2225 limits the height adjustment screw 2223, so that the operation of the height adjustment screw 2223 is more stabilized.

Referring to fig. 3, the height driving assembly 223 includes a height driving motor 2231 and a height driving wheel 2232, the height driving motor 2231 is mounted on an upper surface of the height mounting plate 2221, the height driving motor 2231 has an output shaft, the output shaft passes through the height mounting plate 2221, the output shaft is coaxially and fixedly provided with the height driving wheel 2232, and the height driving wheel 2232 and the height driven wheel 2224 are in transmission connection through a timing belt.

Referring to fig. 3, the top end surface of the height fixing base 221 is provided with a height mounting block 2211, and in the present embodiment, the height fixing base 221 is integrally formed with the height fixing base 221. The bottom end surface of the height mounting block 2211 abuts against the top end surface of the mounting base 230, the height nut seat 2222, the coaxial stopper 2225 and the height mounting plate 2221 are all mounted on the side of the height mounting block 2211, and after the XY θ alignment unit 300 of the mounting base 230, the height nut seat 2222, the coaxial stopper 2225, the height mounting plate 2221 and the XY θ alignment unit 300 repeatedly use space in the height direction, so that the mounting height of the leveling module 200 can be reduced, the overall thickness of the alignment platform can be reduced, and the space utilization rate of the leveling module 200 can be improved.

Referring to fig. 4, the universal adjusting assembly 224 includes a universal mounting base 2241, a universal rotating seat 2242 and a supporting block 2243, the universal mounting base 2241 is mounted on the upper end surface of the height nut seat 2222, the universal rotating seat 2242 is mounted on the universal mounting base 2241, the supporting block 2243 is mounted on the upper end surface of the universal rotating seat 2242, and the supporting block 2243 connects the universal rotating seat 2242 with the work mounting plate 210. Universal installation base 2241 up end is provided with universal erection column 2244, and in this embodiment, universal erection column 2244 and universal installation base 2241 integrated into one piece. The universal mounting posts 2244 are generally arranged in a cylindrical shape, and a universal spherical center 2245 is mounted on the outer peripheral surface of the universal mounting posts 2244. The outer wall of universal centre of sphere body 2245 is globular setting, and universal centre of sphere body 2245's outer wall is provided with universal ball cover 2246, and universal ball cover 2246's inner wall sets up to spherical cavity, universal ball cover 2246's inner wall and universal centre of sphere body 2245's outer peripheral face sliding fit.

Referring to fig. 4, in order to prevent the universal sphere center body 2245 from being detached from the universal mounting columns 2244, a limiting cover plate 2247 is provided on the top end surface of the universal mounting columns 2244, and the limiting cover plate 2247 is detachably connected to the universal mounting columns 2244 through bolts. The bottom face of spacing apron 2247 and universal centre of sphere body 2245's top face butt, universal centre of sphere body 2245's bottom face and universal installation base 2241's top face butt, spacing apron 2247 can be spacing with universal centre of sphere body 2245, can guarantee on the one hand that universal centre of sphere body 2245 has stable position in the installation, on the other hand, dismantle from the top face of universal erection column 2244 through with spacing apron 2247, can conveniently maintain and change universal centre of sphere body 2245 and universal ball cover 2246.

Referring to fig. 4, universal rotating seat 2242's bottom surface is provided with ball sleeve mounting groove 2242a, ball sleeve mounting groove 2242a is cylindric setting roughly, install in ball sleeve mounting groove 2242a and stabilize bush 2248, it is the setting of ring form to stabilize bush 2248, the outer peripheral face of stabilizing bush 2248 and the lateral wall butt of ball sleeve mounting groove 2242a, the inner wall of stabilizing bush 2248 and the outer wall butt of universal ball sleeve 2246, so that universal ball sleeve 2246 is by spacing fixed in the radial of ball sleeve mounting groove 2242 a. In order to prevent the universal ball sleeve 2246 from being separated from the bottom end of the universal rotating seat 2242, a ball sleeve abutting ring 2249 is arranged at the bottom end of the universal rotating seat 2242, the ball sleeve abutting ring 2249 is arranged in a circular ring shape, and the ball sleeve abutting ring 2249 is detachably connected with the universal rotating seat 2242. The upper surface of ball cover support ring 2249 and universal ball cover 2246's bottom surface butt, ball cover support ring 2249 is spacing in ball cover mounting groove 2242a with universal ball cover 2246, thereby make universal ball cover 2246 fixed at the position of universal rotation seat 2242, when work mounting panel 210 takes place the slope, universal rotation seat 2242 drives universal ball cover 2246 and takes place to rotate on the universal centre of sphere body 2245, thereby improve the condition that the card pause appears in the subassembly 222 that highly slides.

The implementation principle of the seven-axis alignment platform in the embodiment of the application is as follows: three groups of XY theta alignment units 300 arranged on the bottom plate 100 drive the leveling module 200 to perform translation and angle alignment, and the height adjusting mechanism 220 in the leveling module 200 performs tilt angle adjustment on the working mounting plate 210. Four sets of height driving motors 2231 respectively drive the height adjusting screw 2223 to rotate correspondingly, so that the height of the corresponding height nut seat 2222 can be changed up and down. When the tilting angle of the working mounting plate 210 changes, the universal rotating seat 2242 can ensure that the height sliding assembly 222 is still at the normal working angle in the tilting process of the working mounting plate 210, so that the situation that the height sliding assembly 222 is stuck is improved, and the accuracy of the leveling mechanism is improved.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereby. Wherein like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component. Therefore, the method comprises the following steps: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.