阅读说明：本技术 一种铬靶材组件的焊接方法 (Welding method of chromium target material assembly ) 是由 姚力军 潘杰 边逸军 王学泽 俞佳烨 于 2021-09-03 设计创作，主要内容包括：本发明涉及一种铬靶材组件的焊接方法,所述焊接方法包括：在背板的焊接面依次进行设置铝镍层和设置螺纹,之后将背板和铬靶材进行热等静压焊接；所述铝镍层中铝元素和镍元素的摩尔比为1:(0.3-0.5)；所述铝镍层的厚度为所述螺纹深度的15-30％。本发明提供的技术方案,通过对现有技术中设置镀层的组成和厚度的特定设计同时与现有技术区别的采用先设置金属层后进行车削螺纹的方式,解决了焊接后铬靶材组件中背板变形的问题,焊接得到的铬靶材组件中背板形状良好,未出现任何变形,可以完全发挥铬靶材的使用性能。(The invention relates to a welding method of a chromium target assembly, which comprises the following steps: sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target; the molar ratio of the aluminum element to the nickel element in the aluminum-nickel layer is 1 (0.3-0.5); the thickness of the aluminum-nickel layer is 15-30% of the depth of the thread. According to the technical scheme provided by the invention, the problem of deformation of the back plate in the welded chromium target assembly is solved by specifically designing the composition and thickness of the plating layer in the prior art and adopting a mode of firstly arranging the metal layer and then turning the threads, and the back plate in the welded chromium target assembly has a good shape and does not deform at all, so that the service performance of the chromium target can be fully exerted.)

1. A welding method of a chromium target assembly is characterized by comprising the following steps:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

the molar ratio of the aluminum element to the nickel element in the aluminum-nickel layer is 1 (0.3-0.5); the thickness of the aluminum-nickel layer is 15-30% of the depth of the thread.

2. The welding method of claim 1, wherein the aluminum nickel layer is disposed in a manner comprising spraying.

3. The welding method according to claim 2, wherein the spraying is performed by mixing aluminum powder and nickel powder according to a formula and then spraying the mixture on the welding surface of the back plate.

4. A welding method according to claim 3, wherein the particle size of the aluminum powder is 30 to 50 μm;

preferably, the particle size of the nickel powder is 100-300 μm.

5. A welding method as claimed in any one of claims 2 to 4, wherein said spraying means comprises thermal spraying or cold spraying.

6. A welding method as claimed in any one of claims 1 to 5, wherein the pitch of the threads is 1 to 2 cm.

7. Welding method according to any one of claims 1-6, wherein the depth of the thread is 8-15 mm.

8. The welding method of any one of claims 1-7, wherein the temperature of said hot isostatic pressing is 1000-.

9. The welding method according to any one of claims 1-8, wherein the pressure of said hot isostatic pressing is 120-150 MPa.

10. Welding method according to any one of claims 1-9, characterized in that it comprises:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

setting the molar ratio of aluminum element to nickel element in the aluminum-nickel layer to be 1 (0.3-0.5); the thickness of the aluminum nickel layer is 15-30% of the depth of the thread;

the arrangement mode of the aluminum nickel layer comprises spraying; the spraying is to mix aluminum powder and nickel powder according to a formula and then arrange the mixture on the welding surface of the backboard in a spraying mode; the granularity of the aluminum powder is 30-50 mu m; the particle size of the nickel powder is 100-300 mu m; the spraying mode comprises thermal spraying or cold spraying; the distance between the threads is 1-2 cm; the depth of the thread is 8-15 mm; the temperature of the hot isostatic pressing is 1000-1200 ℃; the pressure of the hot isostatic pressing is 120-150 MPa.

Technical Field

The invention relates to the field of target welding, in particular to a welding method of a chromium target component.

Background

At present, the chromium target is widely applied to various aspects such as integrated circuits, product decoration and the like due to the unique performance of the chromium target. In the use process of the target material, the target material and the back plate are bound to be used.

For example, CN106695109A discloses a method for manufacturing a nickel-chromium target assembly, comprising: placing the solder on the welding surface of the back plate and the nickel-chromium target; heating to melt the solder; carrying out first ultrasonic treatment on the welding surface of the back plate and the nickel-chromium target material to soak the welding surface; putting solder on the welding surface of the back plate again, and carrying out second ultrasonic treatment on the welding surface of the back plate and the nickel-chromium target; the back plate is attached to the welding surface of the nickel-chromium target material for welding; and cooling after welding to form the target assembly. The welding is assisted by two ultrasonic treatment methods, the two ultrasonic treatment methods can enable the surface of the back plate and the nickel-chromium target to generate an alloy layer, and solder can be uniformly distributed on the welding surface of the back plate and the nickel-chromium target, so that the welding effects of high welding strength, high welding rate and low defect rate of the nickel-chromium target and the back plate are realized.

CN113231705A discloses a method for compounding a chromium target and a copper back plate for sputtering coating. The technical key points are as follows: laying a nickel-based amorphous strip between a chromium target and a copper back plate; putting the chromium target material and the copper back plate into a brazing furnace, and vacuumizing to 5 x 10^-3Pa, brazing; the melting point of the nickel-based amorphous ribbon is 950 ℃; the brazing step comprises the following steps: uniformly heating to 500 ℃ within 0.65h, introducing argon, uniformly heating to 800 ℃ within 0.35h, keeping the positive pressure, uniformly heating to 950 ℃ within 1h, keeping the temperature for 30min, then heating to 1062 ℃ within 30min, keeping the temperature for 2min, then cooling to 950 ℃ within 28min, and finally uniformly cooling to room temperature within 4 h. By adopting the composite binding method, the obtained target material assembly is not easy to miss, the binding rate is high, and the appearance defect is small.

However, the back plate in the target assembly is obviously deformed after welding by the current welding method for the Cr target, and cannot be efficiently utilized.

Disclosure of Invention

In view of the problems in the prior art, the invention aims to provide a welding method of a chromium target assembly, which solves the problem that a back plate in the assembly deforms after the chromium target is welded at present, realizes high-efficiency welding of the target and has no influence on the welding effect of the target.

In order to achieve the purpose, the invention adopts the following technical scheme:

the invention provides a welding method of a chromium target assembly, which comprises the following steps:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

the molar ratio of the aluminum element to the nickel element in the aluminum-nickel layer is 1 (0.3-0.5); the thickness of the aluminum-nickel layer is 15-30% of the depth of the thread.

According to the technical scheme provided by the invention, the problem of deformation of the back plate in the welded chromium target assembly is solved by specifically designing the composition and thickness of the plating layer in the prior art and adopting a mode of firstly arranging the metal layer and then turning the threads, and the back plate in the welded chromium target assembly has a good shape and does not deform at all, so that the service performance of the chromium target can be fully exerted.

In the present invention, the chromium target may be a planar target or a tubular target.

In the present invention, the material of the back plate may be stainless steel, copper alloy, aluminum or aluminum alloy.

In the present invention, the molar ratio of the aluminum element to the nickel element in the aluminum-nickel layer is 1 (0.3-0.5), and may be, for example, 1:0.3, 1:0.31, 1:0.32, 1:0.33, 1:0.34, 1:0.35, 1:0.36, 1:0.37, 1:0.38, 1:0.39, 1:0.4, 1:0.41, 1:0.42, 1:0.43, 1:0.44, 1:0.45, 1:0.46, 1:0.47, 1:0.48, 1:0.49 or 1:0.5, but is not limited to the above-mentioned values, and other values not mentioned in this range are also applicable.

In the present invention, the thickness of the alnico layer is 15 to 30% of the thread depth, and may be, for example, 15%, 15.5%, 16%, 16.5%, 17%, 17.5%, 18%, 18.5%, 19%, 19.5%, 20%, 20.5%, 21%, 21.5%, 22%, 22.5%, 23%, 23.5%, 24%, 24.5%, 25%, 25.5%, 26%, 26.5%, 27%, 27.5%, 28%, 28.5%, 29%, 29.5%, or 30%, but is not limited to the above-mentioned values, and other combinations not specifically mentioned in this range are also applicable.

As a preferable technical scheme of the invention, the arrangement mode of the aluminum-nickel layer comprises spraying.

As the preferable technical scheme of the invention, the spraying is to mix the aluminum powder and the nickel powder according to the formula and then arrange the mixture on the welding surface of the backboard in a spraying way.

As a preferable embodiment of the present invention, the powdery aluminum has a particle size of 30 to 50 μm, and may be, for example, 30 μm, 31 μm, 32 μm, 33 μm, 34 μm, 35 μm, 36 μm, 37 μm, 38 μm, 39 μm, 40 μm, 41 μm, 42 μm, 43 μm, 44 μm, 45 μm, 46 μm, 47 μm, 48 μm, 49 μm or 50 μm, but is not limited to the above-mentioned values, and other combinations not listed in this range are also applicable.

Preferably, the particle size of the nickel powder is 100-300 μm, and may be, for example, 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 160 μm, 170 μm, 180 μm, 190 μm, 200 μm, 210 μm, 220 μm, 230 μm, 240 μm, 250 μm, 260 μm, 270 μm, 280 μm, 290 μm, or 300 μm, but is not limited to the values listed, and other combinations not listed within this range are also applicable.

In the invention, the granularity of the aluminum powder and the nickel powder is required to be controlled within a specific range during spraying so as to further ensure the release of the internal stress of the welded chromium target assembly and ensure that the backboard is not deformed, and particularly, the invention finds that if the granularity of the metal powder during spraying does not adopt a specific combination mode, the deformation of the backboard after welding is small, but the welding bonding rate of the target assembly is low, which is not beneficial to the use of the backboard.

As a preferable technical solution of the present invention, the spraying manner includes thermal spraying or cold spraying.

In a preferred embodiment of the present invention, the pitch of the thread is 1 to 2cm, and may be, for example, 1cm, 1.1cm, 1.2cm, 1.3cm, 1.4cm, 1.5cm, 1.6cm, 1.7cm, 1.8cm, 1.9cm or 2cm, but is not limited to the above-mentioned values, and other combinations not mentioned in the above range are also applicable.

In a preferred embodiment of the present invention, the depth of the thread is 8 to 15mm, and may be, for example, 8mm, 8.2mm, 8.4mm, 8.6mm, 8.8mm, 9mm, 9.2mm, 9.4mm, 9.6mm, 9.8mm, 10mm, 10.2mm, 10.4mm, 10.6mm, 10.8mm, 11mm, 11.2mm, 11.4mm, 11.6mm, 11.8mm, 12mm, 12.2mm, 12.4mm, 12.6mm, 12.8mm, 13mm, 13.2mm, 13.4mm, 13.6mm, 13.8mm, 14mm, 14.2mm, 14.4mm, 14.6mm, 14.8mm or 15mm, but not limited to these values, and other combinations not listed in this range are also applicable.

In a preferred embodiment of the present invention, the hot isostatic pressing temperature is 1000-.

In a preferred embodiment of the present invention, the hot isostatic pressing pressure is 120-150MPa, and may be, for example, 120MPa, 122MPa, 124MPa, 126MPa, 128MPa, 130MPa, 132MPa, 134MPa, 136MPa, 138MPa, 140MPa, 142MPa, 144MPa, 146MPa, 148MPa or 150MPa, but is not limited to the values listed above, and other combinations not listed within this range are also applicable.

As a preferable aspect of the present invention, the welding method includes:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

setting the molar ratio of aluminum element to nickel element in the aluminum-nickel layer to be 1 (0.3-0.5); the thickness of the aluminum nickel layer is 15-30% of the depth of the thread;

the arrangement mode of the aluminum nickel layer comprises spraying; the spraying is to mix aluminum powder and nickel powder according to a formula and then arrange the mixture on the welding surface of the backboard in a spraying mode; the granularity of the aluminum powder is 30-50 mu m; the particle size of the nickel powder is 100-300 mu m; the spraying mode comprises thermal spraying or cold spraying; the distance between the threads is 1-2 cm; the depth of the thread is 8-15 mm; the temperature of the hot isostatic pressing is 1000-1200 ℃; the pressure of the hot isostatic pressing is 120-150 MPa.

Compared with the prior art, the invention at least has the following beneficial effects:

(1) according to the technical scheme provided by the invention, the problem of deformation of the back plate in the welded chromium target assembly is solved by specifically designing the composition and thickness of the plating layer in the prior art and adopting a mode of firstly arranging the metal layer and then turning the threads, and the back plate in the welded chromium target assembly has a good shape and does not deform at all, so that the service performance of the chromium target can be fully exerted.

(2) In the invention, the granularity of the aluminum powder and the nickel powder is required to be controlled within a specific range during spraying so as to further ensure the release of the internal stress of the welded chromium target assembly and ensure that the backboard is not deformed, and particularly, the invention finds that if the granularity of the metal powder during spraying does not adopt a specific combination mode, although the deformation of the backboard after welding is small, the welding bonding rate of the target assembly is low, which is not beneficial to the use of the backboard, and the welding bonding rate of the target can reach more than 99%.

Detailed Description

To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:

example 1

The embodiment provides a welding method of a chromium target assembly, which comprises the following steps:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

setting the molar ratio of an aluminum element to a nickel element in the aluminum-nickel layer to be 1: 0.4; the thickness of the aluminum-nickel layer is 22% of the depth of the thread;

the arrangement mode of the aluminum nickel layer comprises spraying; the spraying is to mix aluminum powder and nickel powder according to a formula and then arrange the mixture on the welding surface of the backboard in a spraying mode; the granularity of the aluminum powder is 37-42 mu m; the particle size of the nickel powder is 120-200 mu m; the spraying mode is cold spraying; the distance between the threads is 1.5 cm; the depth of the thread is 12 mm; the temperature of the hot isostatic pressing is 1100 ℃; the pressure of the hot isostatic pressing was 135 MPa.

The welding results of the obtained chromium target assembly are detailed in table 1.

Example 2

The embodiment provides a welding method of a chromium target assembly, which comprises the following steps:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

setting the molar ratio of aluminum element to nickel element in the aluminum-nickel layer to be 1: 0.3; the thickness of the aluminum-nickel layer is 15% of the depth of the thread;

the arrangement mode of the aluminum nickel layer comprises spraying; the spraying is to mix aluminum powder and nickel powder according to a formula and then arrange the mixture on the welding surface of the backboard in a spraying mode; the granularity of the aluminum powder is 40-50 mu m; the particle size of the nickel powder is 200-300 mu m; the spraying mode is thermal spraying; the distance between the threads is 2 cm; the depth of the thread is 8 mm; the temperature of the hot isostatic pressing is 1000 ℃; the pressure of the hot isostatic pressing is 150 MPa.

The welding results of the obtained chromium target assembly are detailed in table 1.

Example 3

The embodiment provides a welding method of a chromium target assembly, which comprises the following steps:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

setting the molar ratio of an aluminum element to a nickel element in the aluminum-nickel layer to be 1: 0.5; the thickness of the aluminum-nickel layer is 30% of the depth of the thread;

the arrangement mode of the aluminum nickel layer comprises spraying; the spraying is to mix aluminum powder and nickel powder according to a formula and then arrange the mixture on the welding surface of the backboard in a spraying mode; the granularity of the aluminum powder is 30-42 mu m; the particle size of the nickel powder is 100-150 mu m; the spraying mode is cold spraying; the distance between the threads is 1 cm; the depth of the thread is 15 mm; the temperature of the hot isostatic pressing is 1200 ℃; the pressure of the hot isostatic pressing is 120 MPa.

The welding results of the obtained chromium target assembly are detailed in table 1.

Example 4

The embodiment provides a welding method of a chromium target assembly, which comprises the following steps:

sequentially arranging an aluminum nickel layer and threads on the welding surface of the back plate, and then carrying out hot isostatic pressing welding on the back plate and the chromium target;

setting the molar ratio of aluminum element to nickel element in the aluminum-nickel layer to be 1: 0.44; the thickness of the aluminum-nickel layer is 25% of the depth of the thread;

the arrangement mode of the aluminum nickel layer comprises spraying; the spraying is to mix aluminum powder and nickel powder according to a formula and then arrange the mixture on the welding surface of the backboard in a spraying mode; the granularity of the aluminum powder is 32-44 mu m; the particle size of the nickel powder is 120-220 mu m; the spraying mode is cold spraying; the distance between the threads is 1.8 cm; the depth of the thread is 10 mm; the temperature of the hot isostatic pressing is 1150 ℃; the pressure of the hot isostatic pressing was 127 MPa.

The welding results of the obtained chromium target assembly are detailed in table 1.

Comparative example 1

The only difference from example 1 is that the thread was first provided and then the alnico layer was provided, and the welding results of the obtained chromium target assembly are detailed in table 1.

Comparative example 2

Only the difference from example 1 was that the provided alnico layer was replaced with a nickel layer, and the welding results of the obtained chromium target assembly are detailed in table 1.

Comparative example 3

Only the difference from example 1 was that the provided alnico layer was replaced with an al layer, and the welding results of the obtained chromium target assembly are detailed in table 1.

Comparative example 4

Only the difference from example 1 is that the molar ratio of the aluminum element to the nickel element in the aluminum nickel layer is 0.4:1, and the welding results of the obtained chromium target assembly are detailed in table 1.

Comparative example 5

Only the difference from example 1 was that the thickness of the alnico layer was set to 50% of the thread depth, and the welding results of the obtained chromium target assembly are specified in table 1.

Comparative example 6

Only the difference from example 1 was that the thickness of the alnico layer was set to 5% of the thread depth, and the welding results of the obtained chromium target assembly are specified in table 1.

Comparative example 7

The difference from example 1 is only that the particle size of the aluminum powder in the spraying is 200-300 μm, and the welding results of the obtained chromium target assembly are detailed in Table 1.

Comparative example 8

The only difference from example 1 is that the particle size of the nickel powder in the spray coating is 40-50 μm, and the welding results of the obtained chromium target assembly are detailed in table 1.

Comparative example 9

The difference from the example 1 is only that the particle size of the aluminum powder is 200-300 μm and the particle size of the nickel powder is 40-50 μm in the spraying, and the welding results of the obtained chromium target assembly are detailed in Table 1.

TABLE 1

	Grade of deformation of the back plate	Welding bonding rate
			Example 1	0	99.4％
Example 2	0	99.6％
			Example 3	0	99.7％
Example 4	0	99.1％
			Comparative example 1	3	95.3％
Comparative example 2	2	93.5％
			Comparative example 3	4	92.6％
Comparative example 4	4	92.1％
			Comparative example 5	2	94.8％
Comparative example 6	4	93.2％
			Comparative example 7	3	87.3％
Comparative example 8	1	85.6％
			Comparative example 9	2	86.4％

In the present invention, the deformation grade of the back plate is:

level 0, no deformation of the backplate;

level 1, the part with the area of (0, 3%) in the back plate is deformed;

level 2, the part with the area of [ 3%, 8%) in the back plate is deformed;

grade 3, the part with the area of [ 8%, 20% ] in the back plate is deformed;

level 4, the part with the area (20%, 35%) in the back plate is deformed;

grade 5, the part with the area of [ 35%, 50% ] in the back plate is deformed;

grade 6, the part of the back plate with area (50%, 100%) is deformed.

According to the results of the above examples and comparative examples, the problem of deformation of the backing plate in the existing welding is solved by adjusting the composition and the setting process of the coating in the welding of the chromium target, and the invention also finds that the welding bonding rate of the target is improved to a certain extent by changing the coating and the setting process thereof.

The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.

The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.

It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.

In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.