阅读说明：本技术 一种电子束对中装置及对中方法 (Electron beam centering device and method ) 是由 刘骏 王刘成 孔文文 张伟 仇小军 于 2021-08-06 设计创作，主要内容包括：本发明提供了一种电子束对中装置及对中方法,具体包括以下步骤：在真空状态下,产生电子束；对偏转线圈以一定步长施加偏转电流,并记录电流计的示数；计算机对扫描过程进行分析,得到电流计示数最小时所施加的偏转电流；重复上述步骤,得到电子束对中参数,解决了传统电子束对中装置结构复杂,调整起来费时费力的问题,通过扫描方式完成电子束的对中,大大提高了对中精度且可实现调整过程的智能化且对中装置结构简单,操作方便。(The invention provides an electron beam centering device and a centering method, which specifically comprise the following steps: generating an electron beam in a vacuum state; applying a deflection current to the deflection coil in a certain step length, and recording the indication of the ammeter; the computer analyzes the scanning process to obtain the deflection current applied when the number of readings of the current meter is minimum; the steps are repeated to obtain the electron beam centering parameters, the problems that the traditional electron beam centering device is complex in structure and time-consuming and labor-consuming to adjust are solved, the centering of the electron beam is completed in a scanning mode, the centering precision is greatly improved, the intellectualization of the adjusting process can be realized, the centering device is simple in structure, and the operation is convenient.)

1. An electron beam centering method, comprising the steps of:

generating an electron beam in a vacuum state;

applying a deflection current to the deflection coil in a certain step length, and recording the indication of the ammeter;

the computer analyzes the scanning process to obtain the deflection current applied when the number of readings of the current meter is minimum;

and repeating the steps to obtain the electron beam centering parameters.

2. A method as claimed in claim 1, wherein said deflection current is in the interval [ -I, + I ].

3. An electron beam centering device, comprising:

an electron gun for emitting a high-speed electron stream to form an electron beam;

the electron beam tube is used for providing a running channel of the electron beam;

the detection tube is arranged inside the electron beam tube, and a through hole is formed in the center of the detection tube and used for detecting the centering condition of the electron beam in real time;

a deflection yoke for adjusting a direction of the electron beam;

the current meter is electrically connected with the detection tube, is used for displaying the current value of the electron beam passing through the detection tube and transmits the current value to the computer;

and the computer is used for receiving and processing the current value of the electron beam passing through the detection tube detected by the galvanometer and controlling the deflection current in the deflection coil.

4. An electron beam centering device as claimed in claim 3, wherein said electron beam tube is made of a nonmagnetic metal or alloy.

5. An electron beam centering device as claimed in claim 3, wherein said deflection coils are two sets including a horizontal direction coil set and a vertical direction coil set, said horizontal direction coil set is used for adjusting the electron beam in the vertical direction, and said vertical direction coil set is used for adjusting the electron beam in the horizontal direction.

6. The apparatus of claim 3, wherein the detecting tube is a good conductor, and the detecting tube is welded to the inside of the electron beam tube via an insulating member.

7. An electron beam centering device as claimed in claim 6, wherein said insulating member is made of an insulating refractory material.

8. The apparatus of claim 3, wherein the detector tube is brazed with a refractory conductor and a refractory insulator.

Technical Field

The invention relates to the technical field of electron beam centering, in particular to an electron beam centering device and a centering method.

Background

The electron beam is an electron converging beam which has high energy density, and is accelerated to a very high speed (0.3-0.7 times of light speed) under the action of a high-voltage (25-300KV) accelerating electric field between a cathode and an anode in an electron gun to form dense high-speed electron flow after the action of lens convergence.

In recent years, electron beams are widely used in the fields of processing welding, detection imaging, X-ray production, biological sterilization and the like, and generally, these devices include an electron source, a focusing lens, a target or a sample holder and the like, and due to the existence of machining errors, the coaxiality of these components cannot be ensured, and further, the electron beams are easy to deviate from a predetermined target area.

Disclosure of Invention

The electron beam centering device and the electron beam centering method disclosed by the invention solve the problems that the traditional electron beam centering device is complex in structure and time-consuming and labor-consuming to adjust, complete the centering of the electron beam in a scanning mode, greatly improve the centering precision and realize the intellectualization of the adjusting process.

In order to achieve the purpose, the technical scheme of the invention is realized as follows:

the invention discloses an electron beam centering method on one hand, which comprises the following steps:

generating an electron beam in a vacuum state;

applying a deflection current to the deflection coil in a certain step length, and recording the indication of the ammeter;

the computer analyzes the scanning process to obtain the deflection current applied when the number of readings of the current meter is minimum;

and repeating the steps to obtain the electron beam centering parameters.

Further, the deflection current is within the interval [ -I, + I ].

The invention discloses an electron beam centering device on the other hand, which comprises an electron gun, an electron beam tube, a detection tube, a deflection coil, a current meter and a computer, wherein the electron gun is used for emitting high-speed electron current to form an electron beam; the electron beam tube is used for providing a running channel of the electron beam; the detection tube is arranged inside the electron beam tube, and a through hole is formed in the center of the detection tube and used for detecting the centering condition of the electron beam in real time; the deflection coil is used for adjusting the direction of the electron beam; the current meter is electrically connected with the detection tube and used for displaying the current value of the electron beam passing through the detection tube and transmitting the current value to the computer; the computer is used for receiving and processing the current value of the electron beam passing through the detection tube detected by the galvanometer and controlling the deflection current in the deflection coil.

Further, the electron beam tube is made of a non-magnetic metal or alloy.

Furthermore, the deflection coils are divided into two groups, including a horizontal direction coil group and a vertical direction coil group, the horizontal direction coil group is used for realizing adjustment of the electron beams in the horizontal and vertical directions, and the vertical direction coil group is used for realizing adjustment of the electron beams in the horizontal direction.

Further, the detection tube is a good conductor, and the detection tube is welded inside the electron beam tube through an insulating member.

Further, the insulating part is made of insulating high-temperature-resistant materials.

Furthermore, the detection tube is formed by brazing a high-temperature-resistant conductor and a high-temperature-resistant insulator.

The beneficial technical effects are as follows:

1. the invention discloses an electron beam centering method, which specifically comprises the following steps: generating an electron beam in a vacuum state; applying a deflection current with a certain step length to a deflection coil, and recording the indication of a current meter; the computer analyzes the scanning process to obtain the deflection current applied when the number of readings of the current meter is minimum; the steps are repeated to obtain the electron beam centering parameters, so that the problems that the traditional electron beam centering device is complex in structure and time-consuming and labor-consuming to adjust are solved, the centering of the electron beam is completed in a scanning mode, the centering precision is greatly improved, and the intellectualization of the adjusting process can be realized;

2. in the invention, the electron beam tube is made of nonmagnetic metal or alloy, so that the interference of the electron beam tube on the direction of an electron beam is reduced;

3. in the invention, the computer is used for receiving and processing the current value of the electron beam passing through the detection tube and detected by the galvanometer and controlling the deflection current in the deflection coil, so that the centering process of the electron beam can be intelligently controlled, and time and labor are saved;

4. in the invention, the deflection coils are divided into two groups, including a horizontal direction coil group and a vertical direction coil group, the horizontal direction coil group is used for realizing the adjustment of the electron beam in the horizontal and vertical directions, and the vertical direction coil group is used for realizing the adjustment of the electron beam in the horizontal direction and can realize the adjustment of the electron beam in two directions.

Drawings

In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiments will be briefly described below.

FIG. 1 is a flow chart illustrating the steps of an electron beam centering method according to the present invention;

FIG. 2 is a schematic diagram of an electron beam centering device according to the present invention;

FIG. 3 is a cross-sectional view of a deflection yoke of an electron beam centering device according to the present invention;

fig. 4 is a typical detection curve diagram of an electron beam centering device according to the present invention.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

In one aspect, the present invention discloses an electron beam centering method, which includes the following steps, referring to fig. 1:

s1: generating an electron beam in a vacuum state;

specifically, in a tube or an electron gun, a vacuum apparatus is used to pump the inside of the tube into a better vacuum state, a current is applied to generate a large number of electrons through a cathode filament, a strong electric field is formed between the filament and an anode through a high-voltage power supply, and the electrons are accelerated to fly out of the filament and enter the electron beam tube.

S2: applying a deflection current to the deflection coil in a certain step length, and recording the indication of the ammeter;

specifically, when the electron beam is centered, the high-speed electron beam passes through the detection tube, the current meter reads the current, the computer applies the deflection current to the deflection coil in a certain step length in the range of [ -I, + I ], and records the current reading I displayed on the current meter connected with the detection tube.

S3: the computer analyzes the scanning process to obtain the deflection current applied when the number of readings of the current meter is minimum;

specifically, as the electron beam passing through the detection tube increases, the indication of the galvanometer decreases, and as the electron beam passing through the detection tube decreases, the indication of the galvanometer increases, i.e., the electron beam deviates; when the indication number of the current meter is the minimum, the electron beam passing through the detecting tube is the most at the moment, namely the optimal centering state is achieved, and the computer analyzes the scanning process to obtain the deflection current when the indication number of the current meter is the minimum.

S4: and repeating the steps to obtain the electron beam centering parameters.

Specifically, the other deflection coils are scanned in the same process, and the electron beam centering parameters are finally obtained.

The invention discloses an electron beam centering device on the other hand, which comprises an electron gun, an electron beam tube, a detection tube, a deflection coil, a current meter and a computer, wherein the electron gun is used for emitting high-speed electron current to form an electron beam; the electron beam tube is used for providing a running channel of an electron beam, and is preferably made of nonmagnetic metal or alloy, so that the interference on the direction of the electron beam is reduced; the detection tube is arranged inside the electron beam tube, a through hole is formed in the center of the detection tube and used for detecting the centering condition of the electron beam in real time, preferably, the detection tube is brazed by a high-temperature-resistant conductor and a high-temperature-resistant insulator, and the thermal expansion coefficients of the two materials are well matched; the deflection coils are used for adjusting the direction of the electron beam, and preferably, referring to fig. 3, the deflection coils are divided into two groups, including a horizontal direction coil group and a vertical direction coil group, the horizontal direction coil group is used for adjusting the electron beam in the horizontal and vertical directions, and the vertical direction coil group is used for adjusting the electron beam in the horizontal direction; the current meter is electrically connected with the detection tube and used for displaying the current value of the electron beam passing through the detection tube and transmitting the current value to the computer; the computer is used for receiving and processing the current value of the electron beam passing through the detection tube and detected by the galvanometer and controlling the deflection current in the deflection coil.

The working principle of the electron beam centering device disclosed by the invention is shown in figure 2, specifically, an electron gun emits high-speed electron current to form an electron beam, a computer controls a deflection coil to apply deflection current in a certain step length, the direction of the electron beam is adjusted, the electron beam advances along an electron beam tube, the electron beam flows through a detection tube, a current meter connected with the monitoring tube detects the electron beam flowing through the detection tube in real time, current reading is displayed, reading is transmitted to the computer, the computer controls the current applied to the deflection coil, the current is sequentially applied in intervals of [ -I, + I ] in a certain step length, the computer analyzes the scanning process, when the reading of the current meter is the minimum, the current is proper deflection current, and the computer sequentially scans other groups of deflection coils in the same step to obtain centering parameters; the detection curve is shown in fig. 4, when the electron beam passing through the detection tube increases, the reading of the galvanometer decreases, and when the reading of the galvanometer is the minimum, the passing electron beam is the most, namely the best centering state.

It can be understood that, in the conventional laboratory test current, a device such as a picometer is used, and the current meter in the invention can be replaced by a circuit or a sensor which is easy to integrate in practice, so that the electron beam centering can be realized by programming a PLC (programmable logic controller), and the full-automatic centering of the electron beam is realized.

As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.

The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above examples are only for describing the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.