阅读说明：本技术 一种等离子刻蚀机用陶瓷介质窗加工方法 (Ceramic dielectric window processing method for plasma etcher ) 是由 林鑫 姚相民 马玉琦 李奇 周斌 占克文 于 2021-09-14 设计创作，主要内容包括：本发明公开了一种等离子刻蚀机用陶瓷介质窗加工方法,旨在解决陶瓷介质窗的加工效率低,生产成本高,烧结过程易变形的不足。该发明包括以下步骤：a、将陶瓷粉料装入冷等精压成型模具中；b、将装满陶瓷粉料的冷等精压成型模具放入冷等精压容器中,采用冷等静压缸对冷等静压成型模具加压,并保压；c、取出冷等精压成型模具,并脱模取出陶瓷介质窗生坯；d、对陶瓷介质窗生坯外轮廓进行磨削加工；e、将完成外轮廓磨削的陶瓷介质窗生坯放入烧结炉内进行烧结,烧结炉内设置支撑台,支撑台上设置若干支撑凸环,陶瓷介质窗生坯开口朝上支撑在支撑凸环上,烧结炉内装入烧结砂；f、烧结完成后取出烧结后的陶瓷介质窗。(The invention discloses a method for processing a ceramic dielectric window for a plasma etcher, and aims to overcome the defects that the ceramic dielectric window is low in processing efficiency, high in production cost and easy to deform in a sintering process. The invention comprises the following steps: a. ceramic powder is filled into a cold equal precision forming die; b. placing the cold isostatic pressing forming die filled with the ceramic powder into a cold isostatic pressing container, pressurizing the cold isostatic pressing forming die by using a cold isostatic pressing cylinder, and maintaining the pressure; c. taking out the cold coining forming die, demolding and taking out the ceramic dielectric window green body; d. grinding the outer contour of the ceramic dielectric window green body; e. placing the ceramic dielectric window green body subjected to outline grinding into a sintering furnace for sintering, wherein a supporting table is arranged in the sintering furnace, a plurality of supporting convex rings are arranged on the supporting table, the ceramic dielectric window green body is supported on the supporting convex rings with an upward opening, and sintering sand is filled in the sintering furnace; f. and taking out the sintered ceramic dielectric window after sintering.)

1. A ceramic dielectric window processing method for a plasma etching machine is characterized by comprising the following steps: a. ceramic powder is filled into a cold equal precision forming die; b. placing the cold isostatic pressing forming die filled with the ceramic powder into a cold isostatic pressing container, pressurizing the cold isostatic pressing forming die by using a cold isostatic pressing cylinder, and maintaining the pressure; c. taking out the cold coining forming die, demolding and taking out the ceramic dielectric window green body; d. grinding the outer contour of the ceramic dielectric window green body; e. placing the ceramic dielectric window green body subjected to outline grinding into a sintering furnace for sintering, wherein a supporting table is arranged in the sintering furnace, a plurality of supporting convex rings are arranged on the supporting table, the ceramic dielectric window green body is supported on the supporting convex rings with an upward opening, and sintering sand is filled in the sintering furnace; f. and taking out the sintered ceramic dielectric window after sintering.

2. The method as claimed in claim 1, wherein the ceramic dielectric window has a hemispherical shell structure, the top of the ceramic dielectric window is provided with a convex ring, and the convex ring is supported at the bottom of the sintering furnace in step e.

3. The method as claimed in claim 2, wherein the upper surface of the supporting protrusion ring has an arc-shaped curved surface and is adapted to the outer surface of the ceramic dielectric window, the supporting base has a through hole adapted to the protrusion ring, the protrusion ring is disposed in the through hole, and a heat storage ring groove is formed between adjacent supporting protrusion rings on the supporting base.

4. The method of claim 1, wherein the furnace includes a platen, a ring of sintering walls disposed on the platen, and the support table is disposed on the platen.

5. The method as claimed in any one of claims 1 to 4, wherein the cold isostatic pressing mold comprises a forming mandrel, a rubber jacket, a bottom plate, and a base, the lower end of the forming mandrel and the lower end of the rubber jacket are connected to the bottom plate, the bottom plate and the forming mandrel are fastened to the base, the rubber jacket is disposed outside the forming mandrel, a forming cavity is formed between the forming mandrel and the rubber jacket, a charging hole is formed at the upper end of the rubber jacket, the ceramic powder is charged into the forming cavity through the charging hole, and the charging hole is covered with a cap when step b is performed.

6. The method as claimed in claim 5, wherein after the cavity of the cold isostatic pressing mold in step a is filled with the ceramic powder, the cold isostatic pressing mold is loaded on a vibrating device to compact the ceramic powder in the cold isostatic pressing mold; the vibrating device comprises a fixed seat and a lifting table, the lifting table is arranged on the fixed seat in a lifting way, a return spring is connected between the lifting table and the fixed seat, a pushing column is arranged on the lifting table, a rotary table driven to rotate by a motor is arranged on the fixed seat, a plurality of ejector rods are uniformly distributed on the rotary table, and the ejector rods rotate along with the rotary table to stir the pushing column to move upwards; a material supplementing frame is arranged on the lifting platform, and a material supplementing barrel is arranged on the material supplementing frame; the cold isostatic pressing forming die is arranged on a lifting platform to carry out vibration operation, a flexible sleeve is connected between the material supplementing cylinder and the charging hole, and ceramic powder is filled in the material supplementing cylinder; the turntable rotates, the ejector rod on the turntable pushes the lifting table to move upwards, the ejector rod is separated from the pushing column after the lifting table moves to the top, and the lifting table descends rapidly to enable the lifting table to vibrate.

7. The method as claimed in claim 6, wherein the forming core rod is provided with a groove with a downward opening to form an inverted U-shaped cross-section, the lifting platform is provided with a support, the support is provided with a gear and a swing rod, the swing rod is hinged to the support, the upper end of the swing rod is connected with a buffer spring, the buffer spring is connected with an impact ball, the swing rod is provided with an elongated pushing chute, the gear is provided with a sliding column, the sliding column is inserted into the pushing chute and can slide in the pushing chute, the fixing seat is provided with a rack, and the rack is in meshing transmission with the gear; and the gear rotates in the lifting process of the lifting platform to drive the swing rod to swing left and right to enable the impact ball to impact the forming core rod to vibrate the cold equal-precision press forming die.

8. The method as claimed in claim 6, wherein the lifter has a plurality of guide posts, the holder has insertion holes corresponding to the guide posts, the guide posts are inserted into the insertion holes, the guide posts are connected to upper and lower positioning blocks, the upper positioning block abuts against the upper surface of the holder, and the return springs abut against the lower surface of the holder and the lower positioning block.

Technical Field

The invention relates to the field of ceramic processing, in particular to a method for processing a ceramic dielectric window for a plasma etching machine.

Background

At present, plasma etcher equipment mainly comprises four parts, namely a pre-vacuum chamber, an etching chamber, an air supply system and a vacuum system. The etching cavity mainly comprises the following components: the plasma coupling coil, the ceramic dielectric window, the ICP radio frequency unit, the RF radio frequency unit, the lower electrode system, the temperature control system and the like. The ceramic dielectric window is positioned between the cavity and the plasma coupling coil, so that the vacuum can be sealed, and the plasma can penetrate into the cavity without being influenced.

The semiconductor industry has a complex industrial chain, from upstream to downstream, with industries such as materials and equipment, chip design, chip manufacturing, and chip product packaging and testing. In the actual manufacturing process of the chip, there are differences due to different materials and processes, and thus a photolithography machine and an etching machine are required. The etching is a very important step in microelectronic IC manufacturing process and micro-nano manufacturing process as semiconductor manufacturing process, and is a main process of graphic processing associated with photoetching. Etchers are the most critical devices besides lithography machines. The unit price is about $ 200 ten thousand, and 40-50 etchers are needed in one wafer factory. Therefore, ceramic dielectric windows have great demand in the semiconductor industry market.

Most ceramic dielectric windows are in large-size hemispheres, the traditional manufacturing process adopts ceramic green materials with more allowance left after sintering, and the ceramic dielectric window is subjected to finish machining after the materials are sintered, so that the processing method has the advantages of high production cost and low production efficiency.

Disclosure of Invention

In order to overcome the defects, the invention provides a method for processing a ceramic dielectric window for a plasma etching machine, which can improve the processing efficiency of the ceramic dielectric window, reduce the production cost and prevent the ceramic dielectric window from being deformed easily in the sintering process.

In order to solve the technical problems, the invention adopts the following technical scheme: a method for processing a ceramic dielectric window for a plasma etcher comprises the following steps: a. ceramic powder is filled into a cold equal precision forming die; b. placing the cold isostatic pressing forming die filled with the ceramic powder into a cold isostatic pressing container, pressurizing the cold isostatic pressing forming die by using a cold isostatic pressing cylinder, and maintaining the pressure; c. taking out the cold coining forming die, demolding and taking out the ceramic dielectric window green body; d. grinding the outer contour of the ceramic dielectric window green body; e. placing the ceramic dielectric window green body subjected to outline grinding into a sintering furnace for sintering, wherein a supporting table is arranged in the sintering furnace, a plurality of supporting convex rings are arranged on the supporting table, the ceramic dielectric window green body is supported on the supporting convex rings with an upward opening, and sintering sand is filled in the sintering furnace; f. and taking out the sintered ceramic dielectric window after sintering.

And processing a ceramic dielectric window green body by adopting a cold isostatic pressing forming mode, directly forming the inner contour of the ceramic dielectric window green body in place, and grinding the outer contour of the ceramic dielectric window green body. Is beneficial to improving the processing efficiency. When ceramic dielectric window green compacts are put into a sintering furnace for sintering, the ceramic dielectric window green compacts are supported through the supporting table, the supporting convex rings provide supporting points for the ceramic dielectric window green compacts, and in addition, the sintering sand supports the ceramic dielectric window green compacts, so that the phenomenon of large deformation is not easy to occur in the sintering process of the ceramic dielectric window green compacts. The processing method of the ceramic dielectric window for the plasma etcher can improve the processing efficiency of the ceramic dielectric window, reduce the production cost and ensure that the sintering process is not easy to deform.

Preferably, the ceramic dielectric window is of a hemispherical shell structure, the top of the ceramic dielectric window is provided with a convex ring, and in the step e, the convex ring is supported at the bottom of the sintering furnace.

Preferably, the upper surfaces of the supporting convex rings are of arc-shaped curved surface structures and are matched with the outer surface of the ceramic dielectric window, through holes matched with the convex rings are formed in the supporting table, the convex rings are arranged in the through holes, and heat storage ring grooves are formed between adjacent supporting convex rings on the supporting table. The through holes facilitate the support of the convex ring, and the heat storage ring cavity is convenient for uniform heating in the sintering process.

Preferably, the sintering furnace comprises a platen, a ring of sintering walls arranged on the platen, and the support table is placed on the platen. The sintering furnace has simple structure and good sintering effect.

Preferably, the cold isostatic pressing forming die comprises a forming core rod, a rubber outer sleeve, a bottom plate and a base, wherein the lower end of the forming core rod and the lower end of the rubber outer sleeve are both connected with the bottom plate, the bottom plate and the forming core rod are both tightly connected on the base, the rubber outer sleeve is arranged outside the forming core rod, a forming cavity is formed between the forming core rod and the rubber outer sleeve, a charging hole is formed in the upper end of the rubber outer sleeve, ceramic powder is charged into the forming cavity through the charging hole, and a cover is covered on the charging hole when the step b is carried out.

The forming core rod and the rubber jacket jointly play a shaping role in the ceramic dielectric window green body. The charging hole is convenient for ceramic powder to be charged into the forming cavity.

Preferably, after the forming cavity of the cold isostatic pressing forming die in the step a is filled with the ceramic powder, the cold isostatic pressing forming die is loaded on a vibrating device to compact the ceramic powder in the cold isostatic pressing forming die; the vibrating device comprises a fixed seat and a lifting table, the lifting table is arranged on the fixed seat in a lifting way, a return spring is connected between the lifting table and the fixed seat, a pushing column is arranged on the lifting table, a rotary table driven to rotate by a motor is arranged on the fixed seat, a plurality of ejector rods are uniformly distributed on the rotary table, and the ejector rods rotate along with the rotary table to stir the pushing column to move upwards; a material supplementing frame is arranged on the lifting platform, and a material supplementing barrel is arranged on the material supplementing frame; the cold isostatic pressing forming die is arranged on a lifting platform to carry out vibration operation, a flexible sleeve is connected between the material supplementing cylinder and the charging hole, and ceramic powder is filled in the material supplementing cylinder; the turntable rotates, the ejector rod on the turntable pushes the lifting table to move upwards, the ejector rod is separated from the pushing column after the lifting table moves to the top, and the lifting table descends rapidly to enable the lifting table to vibrate.

After the ceramic powder is filled in the forming cavity of the cold equal precision forming die, the vibration device vibrates the ceramic powder in the cold equal precision forming die, which is beneficial to improving the strength of the sintered ceramic dielectric window and improving the quality of the product.

Preferably, the forming core rod is provided with a groove with a downward opening, so that the cross section of the forming core rod is of an inverted U-shaped structure, a support is arranged on the lifting platform, a gear and a swing rod are arranged on the support, the swing rod is hinged on the support, the upper end of the swing rod is connected with a buffer spring, an impact ball is connected onto the buffer spring, a long strip-shaped pushing chute is arranged on the swing rod, a sliding column is arranged on the gear, the sliding column is inserted into the pushing chute and can slide in the pushing chute, a rack is arranged on the fixed seat, and the rack is in meshing transmission with the gear; and the gear rotates in the lifting process of the lifting platform to drive the swing rod to swing left and right to enable the impact ball to impact the forming core rod to vibrate the cold equal-precision press forming die.

When the lifting platform moves up and down to vibrate the cold isostatic pressing forming die, the rack is in meshing transmission with the gear, the gear rotates to drive the swing rod to swing, so that the impact ball continuously impacts the forming core rod to vibrate the cold isostatic pressing forming die, and further compact the ceramic powder.

Preferably, the lifting platform is provided with a plurality of guide columns, the fixing base and the guide columns are correspondingly provided with insertion holes, the guide columns and the insertion holes are inserted together, the guide columns are connected with upper positioning blocks and lower positioning blocks, the upper positioning blocks are abutted to the upper surface of the fixing base, and the return springs are abutted to the lower surface of the fixing base and the lower positioning blocks. In the lifting process of the lifting platform, the guide pillar plays a good role in guiding and positioning.

Compared with the prior art, the invention has the beneficial effects that: (1) the ceramic dielectric window processing method for the plasma etcher can improve the processing efficiency of the ceramic dielectric window, reduce the production cost and ensure that the sintering process is not easy to deform; (2) the ceramic dielectric window processing method for the plasma etcher can improve the processing efficiency of the ceramic dielectric window, reduce the production cost and ensure that the sintering process is not easy to deform.

Drawings

FIG. 1 is a schematic view of the configuration of the cold isostatic press molding die of the present invention loaded onto a vibratory apparatus;

FIG. 2 is a schematic illustration of a cold isocoining die post-cold isocoining formed ceramic dielectric window green body of the invention;

FIG. 3 is a schematic view of the outer contour machining of a green ceramic dielectric window of the present invention;

FIG. 4 is a schematic view of the ceramic dielectric window green body of the present invention installed prior to sintering;

FIG. 5 is a schematic view of the ceramic dielectric window green body of the present invention installed after sintering;

in the figure: 1. cold equal coining forming die, 2, ceramic dielectric window green body, 3, sintering furnace, 4, supporting table, 5, supporting convex ring, 6, ceramic dielectric window, 7, convex ring, 8, through hole, 9, heat storage ring groove, 10, table plate, 11, sintering wall, 12, forming core rod, 13, rubber jacket, 14, bottom plate, 15, base, 16, charging hole, 17, sealing cover, 18, fixing seat, 19, lifting platform, 20, return spring, 21, pushing column, 22, rotary table, 23, ejector rod, 24, material supplementing frame, 25, material supplementing cylinder, 26, flexible sleeve, 27, support seat, 28, gear, 29, swing rod, 30, buffer spring, 31, impact ball, 32, pushing chute, 33, sliding column, 34, rack, 35, guide column, 36, upper positioning block, 37, lower positioning block, 38, through groove, 39, extending column.

Detailed Description

The technical scheme of the invention is further described in detail by the following specific embodiments in combination with the attached drawings:

example (b): a method for processing a ceramic dielectric window for a plasma etcher (see the attached figures 1 to 5) comprises the following steps: a. ceramic powder is filled into a cold equal precision forming die 1; b. placing the cold isostatic pressing forming die filled with the ceramic powder into a cold isostatic pressing container, pressurizing the cold isostatic pressing forming die by using a cold isostatic pressing cylinder, and maintaining the pressure; c. taking out the cold coining forming die, demolding and taking out the ceramic dielectric window green body 2; d. grinding the outer contour of the ceramic dielectric window green body; e. placing the ceramic dielectric window green body subjected to outline grinding into a sintering furnace 3 for sintering, wherein a support table 4 is arranged in the sintering furnace, a plurality of support convex rings 5 are arranged on the support table, the ceramic dielectric window green body is supported on the support convex rings with an upward opening, and sintering sand is filled in the sintering furnace; f. and taking out the sintered ceramic dielectric window 6 after sintering.

The ceramic dielectric window is of a hemispherical shell structure, the top of the ceramic dielectric window is provided with a convex ring 7, the inner hole of the convex ring penetrates through the ceramic dielectric window, and in the step e, the convex ring is supported at the bottom of the sintering furnace. The upper surface of the supporting convex ring is of an arc-shaped curved surface structure and is matched with the outer surface of the ceramic dielectric window, the supporting table is provided with a through hole 8 matched with the convex ring, the convex ring is arranged in the through hole, and a heat storage ring groove 9 is formed between the adjacent supporting convex rings on the supporting table. The sintering furnace comprises a platen 10, a ring of sintering walls 11 arranged on the platen, on which a support table is placed. And d, grinding the outer contour of the ceramic dielectric window green body by using a high-precision numerical control machine, and simultaneously processing a convex ring on the ceramic dielectric window.

The cold isostatic pressing forming die comprises a forming core rod 12, a rubber outer sleeve 13, a bottom plate 14 and a base 15, wherein the lower end of the forming core rod and the lower end of the rubber outer sleeve are connected with the bottom plate, the bottom plate and the forming core rod are fixedly connected on the base, the rubber outer sleeve is arranged outside the forming core rod, a forming cavity is formed between the forming core rod and the rubber outer sleeve, a charging hole 16 is formed in the upper end of the rubber outer sleeve, ceramic powder is loaded into the forming cavity through the charging hole, and a sealing cover 17 is covered on the charging hole when the step b is carried out.

A, after ceramic powder is filled in a forming cavity of a cold equal-precision forming die in the step a, loading the cold equal-precision forming die on a vibrating device to compact the ceramic powder in the cold equal-precision forming die; the vibrating device comprises a fixed seat 18 and a lifting table 19, the lifting table is arranged on the fixed seat in a lifting way, a return spring 20 is connected between the lifting table and the fixed seat, a pushing column 21 is arranged on the lifting table, a rotary table 22 driven by a motor to rotate is arranged on the fixed seat, a plurality of ejector rods 23 are uniformly distributed on the rotary table, and the ejector rods rotate along with the rotary table to stir the pushing column to move upwards; a material supplementing frame 24 is arranged on the lifting platform, and a material supplementing barrel 25 is arranged on the material supplementing frame; the cold equal-pressure forming die is arranged on a lifting platform to carry out vibration operation, a flexible sleeve 26 is connected between the material supplementing cylinder and the charging hole, and ceramic powder is filled in the material supplementing cylinder; the turntable rotates, the ejector rod on the turntable pushes the lifting table to move upwards, the ejector rod is separated from the pushing column after the lifting table moves to the top, and the lifting table descends rapidly to enable the lifting table to vibrate. The forming core rod is provided with a groove with a downward opening, so that the cross section of the forming core rod is in an inverted U-shaped structure, a support 27 is arranged on a lifting platform, a gear 28 and a swing rod 29 are arranged on the support, the swing rod is hinged on the support, the upper end of the swing rod is connected with a buffer spring 30, the buffer spring is connected with an impact ball 31, the swing rod is provided with a long strip-shaped pushing chute 32, the gear is provided with a sliding column 33, the sliding column is inserted in the pushing chute and can slide in the pushing chute, a fixed seat is provided with a rack 34, and the rack is in meshing transmission with the gear; and the gear rotates in the lifting process of the lifting platform to drive the swing rod to swing left and right to enable the impact ball to impact the forming core rod to vibrate the cold equal-precision press forming die. The lifting platform is provided with a plurality of guide pillars 35, the fixing base is correspondingly provided with insertion holes, the guide pillars and the insertion holes are inserted together, the guide pillars are connected with upper positioning blocks 36 and lower positioning blocks 37, the upper positioning blocks are abutted to the upper surface of the fixing base, and the return springs are abutted to the lower surface of the fixing base and the lower positioning blocks. The base is provided with a through groove 38, the support and the rack both penetrate through the through groove, and the rack movably penetrates through the lifting platform. The lifting platform is provided with an extension column 39 extending downwards, and the pushing column is arranged on the extension column.

The above-described embodiments are merely preferred embodiments of the present invention, which is not intended to be limiting in any way, and other variations and modifications are possible without departing from the scope of the invention as set forth in the appended claims.