阅读说明：本技术 光学麦克风组合件 (Optical microphone assembly ) 是由 马修·拉科莱 哈康·萨格柏格 雅各布·威纳勒德 于 2020-03-20 设计创作，主要内容包括：一种光学麦克风组合件(2)包含：微机电系统(MEMS)组件(4)；半导体芯片(6)；和外部外壳,其包括非MEMS支撑结构的至少部分且界定孔口(32)。所述MEMS组件包含干涉测量布置,其包含膜片(8)和与所述膜片(8)间隔开的至少一个光学元件(10)。所述半导体芯片(6)包含至少一个光检测器(14),且具有安装在其上或集成在其中的光源(16)。所述MEMS组件(4)安装在所述非MEMS支撑结构上且密封到所述外部外壳,使得所述MEMS组件(4)关闭所述孔口(32)。所述半导体芯片(6)以与所述MEMS组件(4)间隔开的关系与所述MEMS组件(4)分开地安装在所述MEMS支撑结构上,使得所述MEMS组件(4)在垂直于所述膜片(8)的反射表面的方向上相对于所述半导体芯片(6)移位。所述光源(16)布置成将光(38)提供到所述干涉测量布置,使得所述光的第一部分(40)经由所述干涉测量布置沿着第一光学路径传播,且所述光的第二部分(42)经由所述干涉测量布置沿着第二不同光学路径传播,使得所述膜片(8)的所述反射表面反射所述第一部分(40)和所述第二部分(42)中的至少一个,由此在所述第一光学路径与所述第二光学路径之间产生取决于所述膜片(8)与所述光学元件(10)之间的距离的光学路径差。所述至少一个光检测器(14)布置成取决于所述光学路径差检测由光的所述第一部分(40)和所述第二部分(42)产生的干涉图案的至少部分。(An optical microphone assembly (2) comprising: a micro-electro-mechanical system (MEMS) component (4); a semiconductor chip (6); and an outer housing comprising at least part of the non-MEMS support structure and defining an aperture (32). The MEMS component comprises an interferometric arrangement comprising a membrane (8) and at least one optical element (10) spaced apart from the membrane (8). The semiconductor chip (6) contains at least one light detector (14) and has a light source (16) mounted thereon or integrated therein. The MEMS component (4) is mounted on the non-MEMS support structure and sealed to the external housing such that the MEMS component (4) closes the aperture (32). The semiconductor chip (6) is mounted on the MEMS support structure separately from the MEMS component (4) in spaced relation to the MEMS component (4) such that the MEMS component (4) is displaced relative to the semiconductor chip (6) in a direction perpendicular to the reflective surface of the diaphragm (8). The light source (16) is arranged to provide light (38) to the interferometric arrangement such that a first portion (40) of the light propagates via the interferometric arrangement along a first optical path and a second portion (42) of the light propagates via the interferometric arrangement along a second, different optical path, such that the reflective surface of the membrane (8) reflects at least one of the first portion (40) and the second portion (42), thereby creating an optical path difference between the first optical path and the second optical path that is dependent on the distance between the membrane (8) and the optical element (10). The at least one light detector (14) is arranged to detect at least part of an interference pattern produced by the first and second portions (40, 42) of light in dependence on the optical path difference.)