阅读说明：本技术 存储容器及供应系统 (Storage container and supply system ) 是由 董佳仁 于 2020-03-25 设计创作，主要内容包括：本发明实施例提供一种存储容器及供应系统,存储容器包括：侧壁部、封口部和可移动部件；侧壁部、封口部以及可移动部件围成容纳空间；封口部适于密封侧壁部的顶部,且封口部上具有与容纳空间连通的孔洞,孔洞用于连接出液管道的进液端；可移动部件适于密封侧壁部的底部,且还适于沿平行于侧壁部的底部指向顶部的方向上下移动。可移动部件用于连接控制装置,控制装置控制可移动部件于侧壁部的底部指向顶部的方向上下移动,以将容纳空间内的光刻胶通过孔洞排出。通过可移动部件平行于侧壁部的底部指向顶部的方向上下移动,改变容纳空间的容积,进而使光刻胶从封口部中的孔洞被压出,避免可光刻胶与空气的接触,从而避免了有气体溶解在光刻胶中。(An embodiment of the present invention provides a storage container and a supply system, wherein the storage container includes: a side wall portion, a sealing portion, and a movable member; the side wall part, the sealing part and the movable part enclose an accommodating space; the sealing part is suitable for sealing the top of the side wall part, and is provided with a hole communicated with the accommodating space, and the hole is used for connecting the liquid inlet end of the liquid outlet pipeline; the movable member is adapted to seal the bottom of the side wall portion and is further adapted to move up and down in a direction parallel to the bottom of the side wall portion pointing towards the top. The movable component is used for being connected with a control device, and the control device controls the movable component to move up and down in the direction that the bottom of the side wall part points to the top so as to discharge the photoresist in the accommodating space through the hole. The movable component moves up and down in the direction parallel to the bottom of the side wall part and pointing to the top to change the volume of the accommodating space, so that the photoresist is pressed out from the hole in the sealing part, the contact between the photoresist and air is avoided, and gas is prevented from being dissolved in the photoresist.)

1. A storage container for receiving and removing a photoresist, comprising:

a side wall portion, a sealing portion, and a movable member enclosing an accommodation space;

the sealing part is suitable for sealing the top of the side wall part, a hole communicated with the accommodating space is formed in the sealing part, and the hole is used for being connected with a liquid inlet end of a liquid outlet pipeline;

the movable member is adapted to seal the bottom of the sidewall portion and is further adapted to move up and down in a direction parallel to the bottom of the sidewall portion pointing to the top;

the movable component is used for being connected with a control device, and the control device controls the movable component to move up and down in the direction that the bottom of the side wall part points to the top so as to discharge the photoresist in the accommodating space through the hole.

2. A storage container as claimed in claim 1, wherein the control means is integrated in the movable part.

3. The storage container as claimed in claim 1, wherein the movable member is connected to a control device for controlling the movable member to move up and down in a direction in which the bottom of the side wall portion points to the top, comprising:

the storage container also comprises a push rod which is used for connecting the control device;

the control device pushes the movable component to move up and down in the direction that the bottom of the side wall part points to the top by moving the push rod.

4. The storage container as claimed in claim 1, wherein the movable member is connected to a control device for controlling the movable member to move up and down in a direction in which the bottom of the side wall portion points to the top, comprising:

the movable member includes a sealing portion and a support rod;

the sealing part or the supporting rod is used for being connected with the control device, and the control device controls the sealing part to move up and down in the direction that the bottom of the side wall part points to the top.

5. The storage container of claim 4, wherein the sealing portion is fixed to the top of the support rod; the supporting rod is connected with the control device, and the control device is used for controlling the supporting rod to drive the sealing part to move up and down in the direction of the bottom of the side wall part pointing to the top.

6. A storage container as claimed in claim 5, comprising:

the support rod is provided with spiral threads or bayonets, and the control device is provided with spiral threads or bayonets matched with the support rod;

the control device controls the support rod to rotate through the spiral threads, so that the support rod moves up and down in the direction that the bottom of the side wall part points to the top;

or, the control device controls the support rod to move up and down in the direction that the bottom of the side wall part points to the top through the bayonet.

7. A storage container as claimed in claim 4, comprising:

the storage container also comprises a fixing part which is positioned at the bottom edge of the side wall part and is used for fixing the support rod in the storage container in a direction parallel to the top direction of the bottom of the side wall part;

the sealing part is movably arranged on the supporting rod; the sealing part is used for being connected with the control device, and the control device is used for controlling the sealing part to enable the sealing part to move up and down in the direction that the bottom of the side wall part points to the top.

8. The storage container of claim 7, comprising:

the supporting rod is provided with spiral threads or bayonets, and the sealing part is provided with spiral threads or bayonets matched with the supporting rod;

the control device controls the sealing part to rotate on the supporting rod through the spiral thread on the sealing part, so that the sealing part moves on the supporting rod;

or the control device controls the sealing part to move on the supporting rod through a bayonet on the sealing part.

9. The storage container as claimed in claim 7, wherein a surface of the sealing part is provided with a film layer covering the support rod in the receiving space.

10. The storage container of claim 7, further comprising a pin opening movably disposed on the support rod and located below the seal.

11. The storage container of claim 7, wherein a rod cap is fixed to the top of the support rod, the rod cap having a size larger than the support rod.

12. A storage container according to any of claims 4-11, wherein the sealing portion comprises a piston and a sealing ring, the sealing ring being located at the piston rim.

13. The storage container as claimed in claim 1, wherein the sealing part has a hole for connecting the inlet end of the liquid outlet pipe, comprising:

the sealing part is provided with N holes, wherein N is a natural number more than or equal to 2;

each hole in N holes all connects the feed liquor end of a subduct, and N the play liquid end of subduct is used for connecting the feed liquor end of play liquid pipeline.

14. The storage container as claimed in claim 13, wherein the liquid outlet ends of the N sub-pipes are connected to the liquid inlet ends of the liquid outlet pipes, and the storage container comprises:

the liquid outlet ends of the N sub-pipelines are used for being connected with the liquid inlet ends of the M liquid outlet pipelines, M is a natural number which is more than or equal to 2, and M is less than N;

each liquid outlet pipeline of the M liquid outlet pipelines is connected with at least one of the N sub-pipelines.

15. A storage vessel according to claim 13 or 14, further comprising a valve mounted in at least one of the subducting or the tapping duct.

16. A supply system, comprising:

control means, a liquid outlet conduit and a storage container as claimed in any one of claims 1 to 15;

the liquid inlet end of the liquid outlet pipeline is connected with a hole in the sealing part in the storage container;

the control device is connected with a movable component in the storage container and used for controlling the movable component to move up and down in the direction from the bottom to the top of the side wall part in the storage container so as to enable the photoresist contained in the storage container to enter the liquid outlet pipeline through the hole;

and the liquid outlet end of the liquid outlet pipeline is used for applying the photoresist taken out of the storage container.

Technical Field

The present invention relates to the field of semiconductor manufacturing processes, and more particularly, to a storage container and a supply system.

Background

The photoresist is a key material for processing fine patterns in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist. Currently, photoresist is used in semiconductor processing by forcing the photoresist out of a storage container with a gas.

However, the inventors have found that during the process of pressing the photoresist out of the storage container by the gas, the gas may be dissolved in the photoresist, so that bubbles are generated in the photoresist, and the bubbles may cause an abnormality in the photoresist during the coating process.

Disclosure of Invention

Embodiments of the present invention provide a storage container and a supply system, which prevent a photoresist from contacting air, thereby preventing a gas from dissolving in the photoresist.

To solve the above technical problem, an embodiment of the present invention provides a storage container for accommodating and taking out a photoresist, including: a side wall portion, a sealing portion, and a movable member; the side wall part, the sealing part and the movable part enclose an accommodating space; the sealing part is suitable for sealing the top of the side wall part, and is provided with a hole communicated with the accommodating space, and the hole is used for connecting the liquid inlet end of the liquid outlet pipeline; the movable member is adapted to seal the bottom of the side wall portion and is further adapted to move up and down in a direction parallel to the bottom of the side wall portion pointing towards the top. The movable component is used for being connected with a control device, and the control device controls the movable component to move up and down in the direction that the bottom of the side wall part points to the top so as to discharge the photoresist in the accommodating space through the hole.

Compared with the prior art, the embodiment of the invention provides a novel storage container for accommodating and taking out photoresist, and the movable component moves up and down in a direction parallel to the bottom of the side wall part and pointing to the top, so that the accommodating space enclosed by the side wall part, the sealing part and the movable component is reduced, the photoresist is pressed out from the hole in the sealing part, the contact between the photoresist and air is avoided, the phenomenon that gas is dissolved in the photoresist is avoided, and the problem that the photoresist is abnormal in the coating process due to bubbles dissolved in the photoresist in the prior art is solved.

In addition, the control device is integrated in the movable part.

In addition, the movable component is used for connecting a control device, the control device controls the movable component to move up and down in the direction that the bottom of the side wall part points to the top, and the control device comprises: the storage container also comprises a push rod, and the push rod is used for connecting the control device; the control device pushes the movable component to move up and down in the direction that the bottom of the side wall part points to the top by moving the push rod.

In addition, the movable component is used for connecting a control device, the control device controls the movable component to move up and down in the direction that the bottom of the side wall part points to the top, and the control device comprises: the movable part comprises a sealing part and a supporting rod; the sealing part or the supporting rod is used for being connected with a control device, and the control device controls the sealing part to move up and down in the direction that the bottom of the side wall part points to the top.

In addition, the sealing part is fixed on the top of the support rod; the supporting rod is connected with the control device, and the control device is used for controlling the supporting rod to drive the sealing part to move up and down in the direction of the bottom pointing to the top of the side wall part.

In addition, the support rod is provided with spiral threads or bayonets, and the control device is provided with spiral threads or bayonets matched with the support rod; the control device controls the support rod to rotate through the spiral threads, so that the support rod moves up and down in the direction that the bottom of the side wall part points to the top; or the control device controls the support rod to move up and down in the direction that the bottom of the side wall part points to the top through the bayonet.

In addition, the storage container also comprises a fixing part which is positioned at the bottom edge of the side wall part and is used for fixing the support rod in the storage container in a direction parallel to the bottom of the side wall part and pointing to the top; the sealing part is movably arranged on the supporting rod; the sealing part is used for being connected with a control device, and the control device is used for controlling the sealing part to enable the sealing part to move up and down in the direction that the bottom of the side wall part points to the top.

In addition, the support rod is provided with spiral threads or bayonets, and the sealing part is provided with spiral threads or bayonets matched with the support rod; the control device controls the sealing part to rotate on the supporting rod through the spiral threads on the sealing part, so that the sealing part moves on the supporting rod; or the control device controls the sealing part to move on the supporting rod through the bayonet on the sealing part.

In addition, the surface of the sealing part is provided with a thin film layer which covers the support rod in the accommodating space. The photoresist in the accommodating space is isolated from the support rod by the thin film layer on the surface of the sealing part.

In addition, the storage container further comprises a pin opening, the pin opening is movably arranged on the supporting rod, and the pin opening is located below the sealing portion. The sealing part is prevented from sliding downwards through the pin opening support positioned below the sealing part.

In addition, a rod cap is fixed at the top of the supporting rod, and the size of the rod cap is larger than that of the supporting rod. The sealing part is prevented from being separated from the supporting rod from the top by the rod cap at the top of the supporting rod.

In addition, the sealing portion includes a piston and a sealing ring, and the sealing ring is located on the edge of the piston. By the seal ring, the photoresist in the accommodation space is prevented from leaking through the seal portion.

In addition, have the hole on the sealing, the hole is used for connecting the feed liquor end of going out the liquid pipeline, includes: the sealing part is provided with N holes, wherein N is a natural number more than or equal to 2; each hole in the N holes is connected with the liquid inlet end of one sub-pipeline, and the liquid outlet ends of the N sub-pipelines are connected with the liquid inlet end of the liquid outlet pipeline. The photoresist in the accommodating space is discharged through the plurality of holes, so that the problem of overlarge pressure possibly generated by a single hole is avoided.

In addition, the play liquid end of N sub-pipelines is used for connecting the feed liquor end of play liquid pipeline, includes: the liquid outlet ends of the N sub-pipelines are used for being connected with the liquid inlet ends of the M liquid outlet pipelines, M is a natural number which is more than or equal to 2, and M is less than N; each of the M liquid outlet pipelines is connected with at least one of the N sub-pipelines. By arranging the liquid outlet pipes, one storage container can supply photoresist for the liquid outlet pipes, and the photoresist in one storage container can be simultaneously supplied to different semiconductor manufacturing processes.

In addition, the storage container further comprises a valve, and the valve is arranged in at least one of the sub-pipeline or the liquid outlet pipeline. The number of sub-pipelines connected with one liquid outlet pipeline and the number of liquid outlet pipelines can be controlled through the valve, and the valve is closed to prevent the photoresist from contacting with air when the movable component does not work.

An embodiment of the present invention further provides a supply system, including: a control device, a liquid outlet pipeline and the storage container; the liquid inlet end of the liquid outlet pipeline is connected with a hole on the sealing part in the storage container; the control device is connected with the movable component in the storage container and used for controlling the movable component to move up and down in the direction from the bottom to the top of the side wall part in the storage container so as to enable the photoresist contained in the storage container to enter the liquid outlet pipeline through the hole; and the liquid outlet end of the liquid outlet pipeline is used for applying the photoresist taken out of the storage container.

Compared with the prior art, the supply system provided by the embodiment controls the movable component in the storage container to move up and down in the direction pointing to the top from the bottom of the side wall portion through the control device, so that the photoresist in the accommodating space is discharged through the hole, the discharged photoresist is applied through the liquid outlet pipeline, gas is prevented from being dissolved in the photoresist to generate bubbles, and the problem that the photoresist is abnormal in the coating process due to the bubbles dissolved in the photoresist in the prior art is solved.

Drawings

One or more embodiments are illustrated by corresponding figures in the drawings, which are not to be construed as limiting the embodiments, unless expressly stated otherwise, and the drawings are not to scale.

Fig. 1 is a schematic structural diagram of a storage container according to a first embodiment of the present invention;

FIG. 2 is a schematic diagram illustrating the layout and connection of holes in the sealing portion according to the first embodiment of the present invention;

fig. 3 is an implementation schematic diagram of a control device provided by a first embodiment of the invention, wherein the control device pushes a movable component through a pushing part;

fig. 4 and 5 are schematic structural diagrams of a movable part according to a first embodiment of the present invention;

fig. 6 is a schematic structural view of a seal portion according to a first embodiment of the present invention;

fig. 7 is a schematic structural diagram of a storage container according to a first embodiment of the present invention;

fig. 8 is a schematic structural diagram of a supply system according to a second embodiment of the present invention.

Detailed Description

Currently, during the process of pressing the photoresist out of the storage container by gas, the gas may be dissolved in the photoresist, so that bubbles are generated in the photoresist, and the bubbles may cause the photoresist to be abnormal during the coating process.

In order to solve the above problem, a first embodiment of the present invention provides a storage container for accommodating and removing a photoresist, wherein a movable member moves up and down parallel to a direction from a bottom of a side wall portion to a top of the side wall portion, so that an accommodating space enclosed by the side wall portion, a sealing portion and the movable member is reduced, the photoresist is pressed out from a hole in the sealing portion, contact between the photoresist and air is avoided, gas is prevented from being dissolved in the photoresist, and an abnormal condition of the photoresist in a coating process due to bubbles dissolved in the photoresist in the prior art is solved.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in various embodiments of the invention, numerous technical details are set forth in order to provide a better understanding of the present application. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments. The following embodiments are divided for convenience of description, and should not constitute any limitation to the specific implementation manner of the present invention, and the embodiments may be combined with each other and referred to each other without contradiction.

Referring to fig. 1, a storage container 100 for receiving and taking out photoresist includes: a side wall portion 101, a sealing portion 102, and a movable member 103; the side wall portion 101, the sealing portion 102, and the movable member 103 enclose an accommodating space 104, and the accommodating space 104 accommodates the photoresist; the sealing part 102 is suitable for sealing the top of the side wall part 101, the sealing part 102 is provided with a hole 112 communicated with the accommodating space 104, and the hole 112 is used for connecting a liquid inlet end of a liquid outlet pipeline (not shown); the movable member 103 is adapted to seal the bottom of the side wall portion 101 and is also adapted to move up and down in a direction pointing to the top parallel to the bottom of the side wall portion 101; the movable member 103 is connected to a control device (not shown), and the control device (not shown) controls the movable member 103 to move up and down in a direction from the bottom of the sidewall 101 to the top, so as to discharge the photoresist in the accommodating space 104 through the hole 112.

The storage container 100 provided in the present embodiment will be described in detail with reference to the accompanying drawings.

The sidewall 101 is illustrated by taking a columnar shape as an example of the sidewall 101 in the present embodiment, and does not limit the present embodiment; in other embodiments, the sidewall portion may be square. In a particular application, the shape of the sidewall portion can be configured according to actual requirements as understood by those skilled in the art.

Specifically, referring to fig. 7, the sidewall portion 101 is columnar, and the thickness of the sidewall portion 101 is 1mm to 2.5mm, for example, 1.3mm, 1.7mm, 2.0mm, or 2.3 mm. Note that, in this embodiment, the material of the side wall portion 101 may be glass. The side wall portion 101 includes a neck portion 111 and a body portion 121, the height of the neck portion 111 is 8cm, and the height of the body portion 121 is 24 cm. The diameter of the inner surface of the body portion 121 is 15cm, and the diameter of the inner surface of the neck portion 111 is 3 cm.

Referring to fig. 2, the sealing portion 102 has N holes 112, where N is a natural number equal to or greater than 2. In the present embodiment, 5(N ═ 5) holes 112 are taken as an example for description, and the present embodiment is not limited to this, and the number of holes 112 may be further set in accordance with the size of the storage container 100 or the specific use of the storage container 100 in a specific use process.

Specifically, referring to FIG. 7, the diameter of the sealing portion 102 is 4cm, and the diameter of the hole 112 is 1 cm.

With continued reference to fig. 2, each of the N holes 112 is connected to the inlet end of one of the sub-pipes 105, and the outlet ends of the N sub-pipes 105 are connected to the outlet pipe 300. The photoresist in the accommodating space 104 is discharged through the plurality of holes 112, thereby avoiding the problem of excessive pressure that may be generated due to a single hole 112.

Specifically, the liquid outlet ends of the N sub-pipelines 105 are used for connecting the liquid inlet ends of the M liquid outlet pipelines 300, M is a natural number greater than or equal to 2, and M is smaller than N. In the present embodiment, 2(M is 2) liquid outlet pipes 300 are taken as an example for description, and the number of liquid outlet pipes 300 may be further set according to the size of the storage container 100 or the specific use condition of the storage container 100 in the specific use process, without limiting the present embodiment.

Each outlet pipe 300 of the M outlet pipes 300 is connected to at least one of the N sub-pipes 105, and the embodiment takes 5 sub-pipes 105 connected to 2 outlet pipes 300 as an example for illustration. By arranging a plurality of liquid outlet pipes 300, one storage container 100 can supply photoresist to a plurality of liquid outlet pipes 300, so that the photoresist in one storage container 100 can be simultaneously supplied to different semiconductor processes.

In addition, the storage container 100 further includes a valve 601, and the valve 601 is installed in at least one of the sub pipe 105 or the outlet pipe 300. In this embodiment, the valve 601 is installed in the sub-pipe 105 and the outlet pipe 300. The number of sub-pipes 105 connected to one liquid outlet pipe 300 and the number of liquid outlet pipes 300 can be controlled by the valve 601, and the valve 601 is closed to prevent the photoresist from contacting with air when the movable part 103 does not work.

With continued reference to fig. 1, with respect to the movable member 103, as the movable member 103 moves up and down, the volume of the accommodating space 104 also becomes larger or smaller, and when the accommodating space 104 becomes smaller, the photoresist contained in the accommodating space 104 is discharged through the hole 112 in the sealing portion 102.

The movable member 103 is connected to a control device (not shown), and the control device (not shown) controls the movable member 103 to move up and down in a direction from the bottom of the sidewall 101 to the top, so as to discharge the photoresist in the accommodating space 104 through the hole 112. It should be noted that a control device (not shown) may be integrated in the movable part 103.

Referring to fig. 3, the storage container 100 further includes a push rod 201, the push rod 201 is used for connecting the control device 200, and the control device 200 pushes the movable member 103 to move up and down in a direction in which the bottom of the side wall portion 101 points to the top by moving the push rod 201.

Specifically, a part of the rod portion of the push rod 201 is located in the control device 200, and the control device 200 controls the extension length of the push rod 201, so as to push the bottom of the side wall portion 101 of the movable member 103 to move up and down in a direction pointing to the top. In addition, the top area of the push rod 201 is larger than that of the rod part, so that the contact area of the push rod 201 and the movable part 103 is increased, and the push rod 201 is prevented from pushing through the movable part 103 due to excessive pressure.

The movable member 103 includes a sealing portion and a support rod. The sealing portion or the support rod is connected to the control device 200, and the control device 200 controls the sealing portion to move up and down in a direction in which the bottom of the sidewall portion 101 points to the top. The present embodiment provides two specific implementations of the sealing portion and the supporting rod, and the following describes the implementations of the sealing portion and the supporting rod in detail with reference to the accompanying drawings.

The first method is as follows: referring to fig. 4, the sealing portion 301 is fixed on the top end of the supporting rod 302, the supporting rod 302 is connected to the control device 200, and the control device 200 is used for controlling the supporting rod 302 to move the sealing portion 301 and the bottom of the sidewall portion 101 up and down in a direction pointing to the top.

Specifically, a part of the rod portion of the supporting rod 302 is disposed in the control device 200, and the control device 200 controls the extending length of the supporting rod 302, so as to push the bottom of the side wall portion 101 of the movable member 103 to move up and down in a direction pointing to the top.

It should be noted that the connection between the supporting rod 302 and the control device 200 can be achieved by a spiral thread or a bayonet. Specifically, the supporting rod 302 has spiral threads or bayonets, and the control device 200 has spiral threads or bayonets matching with the supporting rod 302; the control device 200 controls the support rod 302 to rotate through the spiral thread, so that the support rod 302 moves up and down in the direction that the bottom of the side wall part 101 points to the top; alternatively, the control device 200 controls the supporting rod 302 to move up and down in a direction from the bottom of the sidewall 101 to the top thereof through the bayonet.

Specifically, referring to FIG. 7, the diameter of the support rod 602 is 3cm and the length of the support rod 602 is 26 cm. The length of the support rod 602 is slightly greater than the height of the bottle body 121, so that the photoresist contained in the bottle body 121 can be completely extruded out, and the diameter of the support rod is smaller than that of the bottle body 121, so that the bottle neck 111 can prevent the movable component from slipping. The seal portion includes a piston 601 and a seal ring 603. Wherein the diameter of the sealing part is 15cm which is the same as the diameter of the inner surface of the body part 121. Wherein, the diameter of the piston 601 is 11 cm-14 cm. The thickness of the sealing ring is 0.5 cm-2 cm. Specifically, the sum of the piston diameter and twice the thickness of the seal ring is the same as the diameter of the seal portion. The photoresist in the accommodating space 104 is prevented from leaking through the sealing portion by the sealing ring 603. The piston 601 is fixed on the top of the support rod 602, and the sealing ring 603 is fixed on the edge of the piston 601. The control device 200 controls the piston 601 to move up and down in a direction in which the bottom of the sidewall 101 points to the top, so as to discharge the photoresist in the accommodating space 104 through the hole 112.

The second method comprises the following steps: referring to fig. 5, the storage container 100 further includes a fixing portion 403, the fixing portion 403 is located at a bottom edge of the side wall portion 101, and the fixing portion 403 is used for fixing the support rod 402 in the storage container 100 in a top direction parallel to the bottom of the side wall portion 101.

The sealing part 401 is movably disposed on the support rod 402; the sealing part 401 is connected to the control device 200, and the control device 200 is used for controlling the sealing part 401 to move the sealing part 401 up and down in a direction that the bottom of the side wall part 101 points to the top.

It should be noted that the connection between the sealing portion 401 and the supporting rod 402 can be realized by a spiral thread or a bayonet. Specifically, the support rod 402 has spiral threads or bayonets, and the sealing part 401 has spiral threads or bayonets matched with the support rod 402; the control device 200 controls the sealing part 401 to rotate on the supporting rod 402 through the spiral thread on the sealing part 401, so that the sealing part 401 moves on the supporting rod 402; alternatively, the control device 200 controls the movement of the sealing portion 401 on the support rod 402 by means of the bayonet on the sealing portion 401.

In this embodiment, the surface of the sealing portion 401 is provided with a thin film layer 406 covering the support rod 402 in the housing space 104. The photoresist in the receiving space 104 is isolated from the support rods 402 by the thin film layer 406.

In this aspect, the storage container 100 further includes a pin 404, the pin 404 is movably disposed on the support rod 402, and the pin 404 is located below the sealing part 401. The seal 401 is prevented from sliding down by being supported by a pin opening 404 located below the seal 401.

In the present embodiment, a rod cap 405 is fixed on the top of the support rod 402, and the size of the rod cap 405 is larger than that of the support rod 402. The seal 401 is prevented from being detached from the top of the support rod 402 by a rod cap 405 at the top of the support rod 402.

It should be noted that, referring to fig. 6, the sealing portion includes a piston 501 and a sealing ring 502, and the sealing ring 502 is located at the edge of the piston 501. The photoresist in the accommodating space 104 is prevented from leaking through the sealing portion by the sealing ring 502. If the second method is applied, the piston has a piston hole 503 in the middle, and the size of the piston hole 503 is the same as that of the support rod 402.

Compared with the prior art, the embodiment of the invention provides a novel storage container 100 for accommodating and taking out photoresist, and the movable part 103 moves up and down parallel to the direction from the bottom of the side wall part 101 to the top, so that the accommodating space 104 enclosed by the side wall part 101, the sealing part 102 and the movable part 103 becomes smaller, the photoresist is pressed out from the hole 112 in the sealing part 102, the contact between the photoresist and air is avoided, gas is prevented from dissolving in the photoresist, and the problem that the photoresist is abnormal in the coating process due to bubbles dissolved in the photoresist in the prior art is solved.

A second embodiment of the present invention relates to a supply system, and with reference to fig. 8, the supply system includes: a control device 200, a liquid outlet pipe 300 and the storage container 100. The liquid inlet end of the liquid outlet pipeline 300 is connected with the hole 112 on the sealing part 102 in the storage container 100; the control device 200 is connected with the movable component 103 in the storage container 100 and is used for controlling the movable component 103 to move up and down in the direction that the bottom of the side wall part 101 in the storage container 100 points to the top, so that the photoresist contained in the storage container 100 enters the liquid outlet pipeline 300 through the hole 112; the outlet end of the outlet pipe 300 is used for applying the photoresist taken out of the storage container 100.

The supply system of the present embodiment will be specifically described below with reference to the drawings.

Specifically, the storage container 100 includes: a side wall portion 101, a sealing portion 102, and a movable member 103. The side wall 101, the sealing portion 102, and the movable member 103 enclose an accommodating space 104, and the accommodating space 104 accommodates the photoresist. The sealing portion 102 is adapted to seal the top of the sidewall portion 101, and the sealing portion 102 has a hole 112, and the hole 112 is used for connecting to the liquid inlet end of the liquid outlet pipe 300.

As the movable member 103 moves up and down, the volume of the accommodating space 104 increases or decreases, and when the accommodating space 104 decreases, the photoresist contained in the accommodating space 104 is discharged through the hole 112 in the sealing part 102.

The discharge rate of the photoresist is controlled by controlling the upward movement rate of the movable member 103 by the control device 200. Specifically, the volume of the resist discharged per unit time can be known by controlling the cross-sectional area of the velocity set side wall portion 101 at which the movable member 103 moves up and down by the control device 200.

Compared with the prior art, the supply system provided by the embodiment controls the movable component 103 in the storage container 100 to move up and down in the direction that the bottom of the sidewall 101 points to the top through the control device 200, so as to discharge the photoresist in the accommodating space 104 through the hole 112, and apply the discharged photoresist through the liquid outlet pipe 300, so as to prevent the gas from dissolving in the photoresist to generate bubbles, thereby avoiding the problem of abnormal photoresist coating process caused by the bubbles dissolved in the photoresist in the prior art.

It should be noted that, in this embodiment, all units are logic units, and in practical application, one logic unit may be one physical unit, may also be a part of one physical unit, and may also be implemented by a combination of multiple physical units. In addition, in order to highlight the innovative part of the present invention, a unit which is not so closely related to solve the technical problem proposed by the present invention is not introduced in the present embodiment, but this does not indicate that there is no other unit in the present embodiment.

Since the first embodiment corresponds to the present embodiment, the present embodiment can be implemented in cooperation with the first embodiment. The related technical details mentioned in the first embodiment are still valid in this embodiment, and the technical effects that can be achieved in the first embodiment can also be achieved in this embodiment, and are not described herein again in order to reduce repetition. Accordingly, the related-art details mentioned in the present embodiment can also be applied to the first embodiment.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific embodiments for practicing the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.