阅读说明：本技术 一种终点检测装置、蚀刻设备以及检测方法 (End point detection device, etching equipment and detection method ) 是由 林帅 张彬彬 苟先华 伍凯义 苏财钰 于 2020-05-26 设计创作，主要内容包括：本发明涉及一种终点检测装置、蚀刻设备及检测方法。所述终点检测装置包括：石英件、第一滤光片、第二滤光片以及光检测模块,本发明提供的终点检测装置通过设置分别用于加工产生的光和检测光源发出的光通过的第一滤光片和第二滤光片,以及用于检测通过所述第一滤光片和所述第二滤光片的光的强度的光检测模块,能够实现加工过程中的终点检测功能,同时能够通过检测通过第二滤光片的光的强度是否与检测光源发出的光的强度一致来实现自检。(The invention relates to an end point detection device, etching equipment and a detection method. The end point detection device includes: the end point detection device provided by the invention can realize the end point detection function in the processing process by arranging the first optical filter and the second optical filter which are respectively used for the light generated by processing and the light emitted by the detection light source to pass through and the optical detection module which is used for detecting the intensity of the light passing through the first optical filter and the second optical filter, and can realize self-detection by detecting whether the intensity of the light passing through the second optical filter is consistent with the intensity of the light emitted by the detection light source.)

1. An end point detection apparatus, for use in an etching apparatus, the apparatus comprising:

the quartz piece is used for condensing the light with the first wavelength generated by processing and the light with the second wavelength emitted by the detection light source, and emitting the light with the first wavelength to the first optical filter and the light with the second wavelength to the second optical filter;

the first optical filter is used for filtering light except the first wavelength so as to transmit the light with the first wavelength to the light detection module;

the second optical filter is used for filtering light except the second wavelength so as to transmit the light with the second wavelength to the light detection module;

the light detection module is configured to detect an intensity of the light of the first wavelength transmitted through the first filter and an intensity of the light of the second wavelength transmitted through the second filter.

2. The endpoint detection apparatus of claim 1, wherein the quartz piece comprises a first optical channel and a second optical channel;

the first optical channel is connected with the first optical filter, and the first optical channel is used for emitting the light with the first wavelength to the first optical filter;

the second optical channel is connected with the second optical filter, and the second optical channel is used for emitting the light with the second wavelength to the second optical filter.

3. The endpoint detection apparatus of claim 1 or 2, wherein the etching device comprises an operating state, the light detection module comprising:

the charge coupling module is respectively connected with the first optical filter and the second optical filter; in the operating state, the charge coupling module is configured to convert a first optical signal of the light with the first wavelength transmitted to the charge coupling module through the first optical filter into a first electrical signal;

the light processing module is connected with the charge coupling module;

in the processing state, the optical processing module is configured to receive the first electrical signal transmitted by the charge coupling module, and screen the first electrical signal to obtain a target electrical signal; and determining the intensity of light corresponding to the electrical signal of interest.

4. The endpoint detection apparatus of claim 1 or 2, wherein the etching device comprises a detection state, the light detection module comprising:

the charge coupling module is respectively connected with the first optical filter and the second optical filter;

in the detection state, the charge coupling module is further configured to convert a second optical signal of the light with the second wavelength transmitted to the charge coupling module through the second optical filter into a second electrical signal;

the light processing module is connected with the charge coupling module;

in the detection state, the optical processing module is further configured to receive the second electrical signal transmitted by the charge coupling module, and screen the second electrical signal to obtain a target electrical signal; and determining the intensity of light corresponding to the electrical signal of interest.

5. An etching apparatus comprising an etching chamber and an end-point detection device as claimed in any one of claims 1 to 4.

6. The etching apparatus of claim 5, further comprising:

the digital-to-analog conversion circuit board is connected with the end point detection device and used for receiving the electric signal output by the end point detection device and converting the electric signal into a digital signal;

and the oscilloscope is connected with the digital-to-analog conversion circuit board and is used for displaying the light intensity curve corresponding to the electric signal.

7. The etching apparatus according to claim 5, wherein the detection light source is provided on an inner wall of the etching chamber, and the quartz member is provided on an outer wall of the etching chamber on a side opposite to the detection light source.

8. A detection method is applied to an end point detection device, and the detection method comprises the following steps:

controlling the detection light source to emit light of a second wavelength;

determining an illumination intensity of the endpoint detection device based on the light output at the second wavelength.

9. The detection method of claim 8, wherein said determining the illumination intensity of the light output of the endpoint detection apparatus based on the second wavelength comprises:

and acquiring an intensity curve of light output by the endpoint detection device to the oscilloscope based on the light with the second wavelength.

10. The detection method according to claim 8 or 9, characterized in that the method further comprises:

determining whether the intensity curve is matched with a preset curve, wherein the preset curve is an intensity curve generated in advance according to the intensity of the light with the second wavelength emitted by the detection light source;

if not, an alarm signal is sent to the control center.

Technical Field

The invention relates to the field of semiconductor processing, in particular to an end point detection device, etching equipment and a detection method.

Background

In the field of semiconductor processing, an end point detection device is used for detecting an end point of processing and plays a very important role in processing precision, however, the end point detection device in the prior art cannot perform self detection, and the failure of the end point detection device can cause end point failure, so that product scrapping is generated.

Therefore, how to make the endpoint detection apparatus self-check is an urgent problem to be solved.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention provides an endpoint detection device, an etching apparatus and a detection method, which are intended to solve the problem that the endpoint detection device in the prior art cannot perform self-detection.

The present invention provides an end point detection apparatus, wherein the end point detection apparatus is applied to an etching apparatus, the end point detection apparatus comprising:

the quartz piece is used for condensing the light with the first wavelength generated by processing and the light with the second wavelength emitted by the detection light source, and emitting the light with the first wavelength to the first optical filter and the light with the second wavelength to the second optical filter;

the first optical filter is used for filtering light except the first wavelength so as to transmit the light with the first wavelength to the light detection module;

the second optical filter is used for filtering light except the second wavelength so as to transmit the light with the second wavelength to the light detection module;

the light detection module is configured to detect an intensity of the light of the first wavelength transmitted through the first filter and an intensity of the light of the second wavelength transmitted through the second filter.

According to the end point detection device, the first optical filter and the second optical filter which are respectively used for transmitting the light with the first wavelength generated by machining and the light with the second wavelength emitted by the detection light source are arranged, and the optical detection module which is used for detecting the intensity of the light transmitted through the first optical filter and the second optical filter is arranged, so that the end point detection function in the machining process can be realized, and meanwhile, the self-detection can be realized by detecting whether the intensity of the light transmitted through the second optical filter is consistent with the intensity of the light emitted by the detection light source or not.

Optionally, the endpoint detection apparatus, wherein the quartz piece comprises a first optical channel and a second optical channel;

the first optical channel is connected with the first optical filter, and the first optical channel is used for emitting the light with the first wavelength to the first optical filter;

the second optical channel is connected with the second optical filter, and the second optical channel is used for emitting the light with the second wavelength to the second optical filter.

Optionally, the endpoint detection apparatus, wherein the etching device includes an operating state, and the light detection module includes:

the charge coupling module is respectively connected with the first optical filter and the second optical filter;

in the operating state, the charge coupling module is configured to convert a first optical signal of the light with the first wavelength transmitted to the charge coupling module through the first optical filter into a first electrical signal;

the light processing module is connected with the charge coupling module;

in the processing state, the optical processing module is configured to receive the first electrical signal transmitted by the charge coupling module, and screen the first electrical signal to obtain a target electrical signal; and determining the intensity of light corresponding to the electrical signal of interest.

Optionally, the endpoint detection apparatus, wherein the etching device includes a detection state, and the optical detection module includes:

the charge coupling module is respectively connected with the first optical filter and the second optical filter;

in the detection state, the charge coupling module is further configured to convert a second optical signal of the light with the second wavelength transmitted to the charge coupling module through the second optical filter into a second electrical signal;

the light processing module is connected with the charge coupling module;

in the detection state, the optical processing module is further configured to receive the second electrical signal transmitted by the charge coupling module, and screen the second electrical signal to obtain a target electrical signal; and determining the intensity of light corresponding to the electrical signal of interest.

Based on the same inventive concept, the invention also provides etching equipment, which comprises an etching cavity and the end point detection device.

Optionally, the etching apparatus further includes:

the digital-to-analog conversion circuit board is connected with the end point detection device and used for receiving the electric signal output by the end point detection device and converting the electric signal into a digital signal;

and the oscilloscope is connected with the digital-to-analog conversion circuit board and is used for displaying an intensity curve of the light intensity corresponding to the electric signal.

Optionally, the etching apparatus, wherein the detection light source is disposed on an inner wall of the etching chamber, and the quartz piece is disposed on an outer wall of a side of the etching chamber opposite to the detection light source.

Based on the same inventive concept, the invention also provides a detection method, wherein the detection method is applied to an end point detection device, and the detection method comprises the following steps:

controlling the detection light source to emit light;

determining an illumination intensity of the endpoint detection device based on the light output at the second wavelength.

Optionally, the method of detecting, wherein the determining the illumination intensity of the endpoint detection apparatus based on the light output at the second wavelength comprises:

and acquiring an intensity curve of light output by the endpoint detection device to the oscilloscope based on the light with the second wavelength.

Optionally, the detection method further includes:

determining whether the intensity curve is matched with a preset curve, wherein the preset curve is an intensity curve generated in advance according to the intensity of the light with the second wavelength emitted by the detection light source;

if not, an alarm signal is sent to the control center.

Drawings

FIG. 1 is a schematic structural diagram of an end-point detection apparatus according to an embodiment of the present invention;

FIG. 2 is a first schematic structural diagram of a quartz component in an embodiment of an endpoint detection apparatus provided in the present invention;

FIG. 3 is a second schematic structural diagram of a quartz piece in an embodiment of an endpoint detection apparatus provided in the present invention;

FIG. 4 is a schematic structural diagram of an etching apparatus according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of an etching apparatus according to the present invention;

fig. 6 is a flowchart of an embodiment of a detection method provided by the present invention.

Detailed Description

To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

The inventors have found that in the field of semiconductor processing, an end point detection device is used for detecting the end point of processing and plays a very important role in processing accuracy, but the end point detection device in the prior art cannot perform self detection, and the failure of the end point detection device can cause the end point to fail, thereby generating product scrap.

Based on this, the present invention intends to provide a solution to the above technical problem, the details of which will be explained in the following embodiments.

The present invention provides an endpoint detection apparatus, as shown in fig. 1, which in one embodiment comprises:

the quartz component 100 is configured to condense light with a first wavelength generated by processing and light with a second wavelength emitted by a detection light source, and emit the light with the first wavelength to a first optical filter 210 and emit the light with the second wavelength to a second optical filter 220, the first optical filter 210 is configured to filter light with the first wavelength to transmit the light with the first wavelength to a light detection module 300, and the second optical filter 220 is configured to filter light with the second wavelength to transmit the light with the second wavelength to the light detection module 300.

Specifically, the end point detection device is a device for detecting a processing end point, and the end point detection device provided by the present invention realizes end point detection based on an emission spectroscopy, specifically, the emission spectroscopy is an analysis method for identifying what kind of substance is contained in a substance by comparing a spectrum formed by radiation emitted from excited atoms with a standard spectrum, and a reactant or a product to be processed emits light of a specific wavelength during processing such as etching, and the amount of the reactant or the product can be known by detecting the intensity of the light of the specific wavelength, thereby determining the degree of progress of the processing and realizing the purpose of detecting whether the processing has reached the end point.

In this embodiment, the endpoint detection apparatus includes two filters, namely the first filter 210 and the second filter 220, the first filter 210 is used to filter light except the first wavelength, which is the wavelength of the light generated by the processing, that is, only the light with the specific wavelength generated by the processing (for example, the light with the specific wavelength is emitted by the atom or molecular group in the excited state in the plasma in the etching device) can pass through the first filter 210, and the first wavelength may be the wavelength of the light emitted by the reactant and/or the product of the processing. The second optical filter 220 is configured to filter light other than the light with the second wavelength, where the second wavelength is the wavelength of the light emitted by the detection light source, that is, only the light with the wavelength emitted by the detection light source can pass through the second optical filter 220, and the detection light source is a light source for detecting whether the endpoint detection apparatus has a fault.

In order to enable the light generated by the processing and the light emitted from the detection light source to reach the first filter and the second filter, the quartz member 100 is used for condensing the light generated by the processing and the light emitted from the detection light source so that the light generated by the processing and the light emitted from the detection light source reach the first filter 210 and the second filter 220.

As shown in fig. 2-3, fig. 2 is a front view of the quartz component 100, and fig. 3 is a top view of the quartz component 100, wherein the quartz component 100 includes a first light channel 110 and a second light channel 120, the first light channel 110 is connected to the first optical filter 210, and the second light channel 120 is connected to the second optical filter. The first optical channel 110 is configured to emit the light with the first wavelength to the first optical filter 210, and the second optical channel 120 is configured to emit the light with the second wavelength to the second optical filter 220.

Referring to fig. 1 again, the endpoint detection apparatus further includes a light detection module 300, wherein the light detection module 300 is configured to detect the intensity of the light with the first wavelength transmitted by the first filter 210 and the intensity of the light with the second wavelength transmitted by the second filter 220.

Specifically, the light detecting module 300 includes a charge-Coupled Device (CCD) and a light processing module, the charge-Coupled Device is connected to the first optical filter 210 and the second optical filter 220, and the light processing module is connected to the charge-Coupled Device.

The endpoint detection device provided by the embodiment is applied to etching equipment, the etching equipment comprises a working state, when plasma reaction is carried out in the etching equipment, the etching equipment is in the working state, when the working state is carried out, the charge coupling module is used for converting a first optical signal of light with a first wavelength transmitted to the charge coupling module through the first optical filter into a first electrical signal, specifically, under the working state, the light with the first wavelength transmitted by a reactant or a product processed by the etching equipment can be transmitted through the first optical filter 210, other light can be filtered out, and the charge coupling module converts the first optical signal of the light with the first wavelength transmitted to the charge coupling module into the first electrical signal through the first optical filter 210.

The light processing module is used for receiving the first electric signal transmitted by the charge coupling module, screening the first electric signal to obtain a target electric signal, and determining the intensity of light corresponding to the target electric signal. Specifically, in the operating state, because there may be interference in the transmission process of the first optical signal and the first electrical signal, after the optical processing module receives the first electrical signal, the optical processing module screens the first electrical signal to remove the interference signal, so as to obtain the target electrical signal, which is not difficult to see, and the intensity of light corresponding to the target electrical signal corresponds to the intensity of light with the first wavelength that penetrates through the first filter 210, that is, the amount of the product or reactant to be processed can be determined by detecting the intensity of light corresponding to the target electrical signal, so as to further achieve the detection of the end point of processing.

In one possible implementation, the optical processing module includes: MCA (Multi-Channel Analyzer), controller (controller). Of course, those skilled in the art can select other devices to implement the corresponding functions of the optical processing module through the above description.

Further, the etching equipment includes the detection state, works as when the detection light source is luminous, the etching equipment is in the detection state, when the detection state, the charge coupling module is used for will permeating the second light filter passes to the charge coupling module the second light signal of the light of second wavelength converts the second signal of telecommunication into, specifically under the operating condition, the light of second wavelength that the detection light source sent can permeate second light filter 220, and other light can be filtered out, the charge coupling module will permeate second light filter 220 pass to the charge coupling module the second light signal of the light of second wavelength converts the second signal of telecommunication into the second signal of telecommunication.

The light processing module is used for receiving the second electric signal transmitted by the charge coupling module, screening the second electric signal to obtain a target electric signal, and determining the intensity of light corresponding to the target electric signal. Specifically, in the detection state, since there may be interference in the transmission process of the second optical signal and the second electrical signal, after the optical processing module receives the second electrical signal, the optical processing module screens the second electrical signal to remove an interference signal, so as to obtain the target electrical signal, and it is easy to see that the intensity of the light corresponding to the target electrical signal corresponds to the intensity of the light with the second wavelength transmitted through the second filter 220 and emitted by the detection light source, so that it is possible to determine whether the end point detection device has a fault by comparing the intensity of the light corresponding to the target electrical signal (i.e., the intensity of the light of the detection light source detected by the end point detection device) with the intensity of the light actually emitted by the detection light source, that is, to implement self-detection of the end point detection device.

In summary, the end point detection apparatus provided by the present invention is provided with the first optical filter and the second optical filter for passing light generated by processing and light emitted by the detection light source, respectively, and the optical detection module for detecting the intensity of light passing through the first optical filter and the second optical filter, so that it is possible to achieve an end point detection function during processing, and at the same time, it is possible to achieve self-detection by detecting whether the intensity of light passing through the second optical filter is consistent with the intensity of light emitted by the detection light source.

Based on the above-mentioned endpoint detection device, the present invention further provides an etching apparatus, one embodiment of which is shown in fig. 4, the etching apparatus comprises an etching chamber 20 and the above-mentioned endpoint detection device. The first optical filter 210, the second optical filter 220 (not shown in fig. 4) and the light detection module 300 are disposed outside the etching chamber 20, an upper electrode 21 and a lower electrode 22 for etching are disposed in the etching chamber 20, the detection light source 30 for performing self-test on the endpoint detection apparatus is disposed on an inner wall of the etching chamber 20, and in order to facilitate that light emitted by the detection light source 30 can be condensed by the quartz piece 100, as shown in fig. 4, the quartz piece 100 is disposed on the etching chamber 20 at a side opposite to the detection light source 30, and the quartz piece 100 may be disposed on an outer wall of the etching chamber 20 at a side opposite to the detection light source 30, or disposed on an inner wall of the etching chamber 20 at a side opposite to the detection light source 30. Light generated by the etching process performed in the etching chamber 20 can reach the first optical filter (not shown in fig. 4) through the quartz member 100, and light emitted from the detection light source 30 on the inner wall of the etching chamber 20 can also reach the second optical filter (not shown in fig. 4) through the quartz member 100.

The etching apparatus further includes:

and the digital-to-analog conversion circuit board is connected with the end point detection device and is used for receiving the electric signal output by the end point detection device and converting the electric signal into a digital signal.

As shown in fig. 5, when the endpoint detection device works normally, the detection light source does not emit light, the target electrical signal corresponding to the light with the first wavelength output by the endpoint detection device is input to the digital-to-analog conversion circuit board, the digital-to-analog conversion circuit board converts the target electrical signal corresponding to the light with the first wavelength into a digital signal, the digital-to-analog conversion circuit board is connected with a main system, the main system can control the processing progress, and when the digital signal output by the digital-to-analog conversion circuit board is consistent with a signal corresponding to a processing endpoint, the main system can control the processing to stop. When the end point detection device performs self-detection, the detection light source emits light with the second wavelength, the target electrical signal corresponding to the light with the second wavelength output by the end point detection device is input to the digital-to-analog conversion circuit board, the digital-to-analog conversion circuit board converts the electrical signal into a digital signal, the digital-to-analog conversion circuit board is connected with a main system, the main system can control a feeding machine, when the digital signal output by the digital-to-analog conversion circuit board is consistent with a preset signal corresponding to the light emitted by the detection light source, the end point detection device has no fault, the processing can be normally performed, when the digital signal output by the digital-to-analog conversion circuit board is inconsistent with the signal corresponding to the light emitted by the detection light source, the end point detection device has a fault, and at the moment, the main system controls the feeding machine to stop transmission, i.e., no more feed, prevents product rejection due to inaccurate endpoint detection.

In a possible implementation manner, since the signals for comparing with the digital signals output by the digital-to-analog conversion circuit board during normal processing and self-testing are different and need to be set respectively during normal processing and self-testing, which may cause inconvenience in the process, in a possible implementation manner, the optical detection module further includes an oscilloscope, the oscilloscope is connected to the digital-to-analog conversion circuit board and is configured to display an intensity curve of light corresponding to an electrical signal output by the endpoint detection apparatus, specifically, the digital-to-analog conversion circuit board outputs a digital signal corresponding to light of the second wavelength passing through the second optical filter 220, the oscilloscope receives the digital signal and converts the digital signal into a visual curve for display, and meanwhile, a preset curve is stored in the oscilloscope, and the preset curve is an intensity curve generated in advance according to the light of the second wavelength emitted by the detection light source, as shown in fig. 5, the oscilloscope is in communication connection with the main system, and when the intensity curve of the light with the second wavelength, which penetrates through the second optical filter 220, is not consistent with the preset curve, it indicates that the end point detection device has a fault, and the oscilloscope sends a signal to the main system, so that the main system controls the feeding machine to stop transmitting. The etching equipment further comprises a feeding machine table, wherein the feeding machine table is used for conveying the wafer to be etched into the etching cavity, and the feeding machine table is in communication connection with the light detection module, so that when the light detection module detects that the intensity of light passing through the second optical filter is inconsistent with the intensity of light emitted by the detection light source, the feeding machine table can be controlled to stop conveying, and the wafer is prevented from being conveyed into the etching cavity for etching when the end point detection device has a fault.

Based on the above endpoint detection device, the present invention further provides a detection method, which is applied to the endpoint detection device, as shown in fig. 6, and the detection method includes the steps of:

s100, controlling the detection light source to emit light with a second wavelength;

s200, determining the illumination intensity of the light output of the endpoint detection device based on the second wavelength.

When the endpoint detection device is detected, the detection light source is controlled to emit light with the second wavelength, and then the illumination intensity of the light output of the endpoint detection device based on the light with the second wavelength is determined, specifically, the determining the illumination intensity of the light output of the endpoint detection device based on the light with the second wavelength includes:

and acquiring an intensity curve of light output by the endpoint detection device to the oscilloscope based on the light with the second wavelength.

The endpoint detection device may receive the light with the second wavelength emitted by the detection light source, convert the received light with the second wavelength into an electrical signal, output the electrical signal to an oscilloscope, and display an intensity curve of the light with the second wavelength detected by the endpoint detection device on the oscilloscope, as described above.

The detection method further comprises the following steps:

determining whether the intensity curve is matched with a preset curve;

if not, an alarm signal is sent to the control center.

The preset curve is an intensity curve generated in advance according to the intensity of the light with the second wavelength emitted by the detection light source, the intensity curve displayed by the oscilloscope is compared with the preset curve, whether the intensity curve is matched with the preset curve or not is determined, if the intensity curve is matched with the preset curve, the end point detection device is normal is reflected, if the intensity curve is not matched with the preset curve, the end point detection device is indicated to be in fault, at the moment, an alarm signal is sent to the control center, the control center can control processing to stop, and products are prevented from being scrapped due to inaccurate end point detection.

In summary, the present invention provides an end point detecting device, an etching apparatus, and a detecting method, in which the end point detecting device is provided with a first optical filter and a second optical filter for passing light generated by processing and light emitted by a detecting light source, respectively, and a light detecting module for detecting intensities of the light passing through the first optical filter and the second optical filter, so that an end point detecting function during processing can be achieved, and a self-check can be achieved by detecting whether the intensity of the light passing through the second optical filter is consistent with the intensity of the light emitted by the detecting light source.

It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.