阅读说明：本技术 一种x射线变焦透镜系统及其变焦方法 (X-ray zoom lens system and zooming method thereof ) 是由 汤善治 任中睿 张伟伟 盛伟繁 李明 于 2021-07-02 设计创作，主要内容包括：本发明公开了一种X射线变焦透镜系统及其变焦方法。本系统的特征在于包括基座,该基座一侧设有多个调节臂,顶部设置一驱动组件,底部设置有定位槽；其中,调节臂自上而下为依次连接的推杆、推-推棘轮机构、预紧弹簧及导向杆、二维柔性轴、透镜框；所述透镜框内设有CRLs；推-推棘轮机构包括拉簧、带棘轮槽滑块、带导向底板、C型拉杆,带棘轮槽滑块与带导向底板通过直线滑槽和导向结构配合形成直线导轨运动副,带棘轮槽滑块上端通过拉簧与带导向底板的上端连接,带棘轮槽滑块下端依次通过预紧弹簧及导向杆、二维柔性轴与透镜框连接,C型拉杆上端用于在所述带棘轮槽滑块的棘轮槽内滑动,下端通过弹性夹持连接在带导向底板的底端。(The invention discloses an X-ray zoom lens system and a zooming method thereof. The system is characterized by comprising a base, wherein one side of the base is provided with a plurality of adjusting arms, the top of the base is provided with a driving assembly, and the bottom of the base is provided with a positioning groove; the adjusting arm comprises a push rod, a push-push ratchet mechanism, a pre-tightening spring, a guide rod, a two-dimensional flexible shaft and a lens frame which are sequentially connected from top to bottom; CRLs are arranged in the lens frame; the push-push ratchet mechanism comprises a tension spring, a slide block with a ratchet groove, a guide bottom plate with a guide and a C-shaped pull rod, wherein the slide block with the ratchet groove and the guide bottom plate with the guide are matched through a linear chute and a guide structure to form a linear guide rail kinematic pair, the upper end of the slide block with the ratchet groove is connected with the upper end of the guide bottom plate with the guide through the tension spring, the lower end of the slide block with the ratchet groove sequentially passes through a pre-tightening spring and the guide rod, a two-dimensional flexible shaft is connected with a lens frame, the upper end of the C-shaped pull rod is used for sliding in the ratchet groove of the slide block with the ratchet groove, and the lower end of the C-shaped pull rod is connected with the bottom end of the guide bottom plate with the guide through elastic clamping.)

1. An X-ray zoom lens system is characterized by comprising a base, wherein one side of the base is provided with a plurality of adjusting arms arranged along the optical axis direction of the X-ray zoom lens system, the top of the base is provided with a driving assembly, and the bottom of the base is provided with a positioning groove; wherein the content of the first and second substances,

the adjusting arm is provided with a push rod, a push-push ratchet mechanism, a pre-tightening spring, a guide rod, a two-dimensional flexible shaft and a lens frame which are sequentially connected from top to bottom, and the guide rod is of a telescopic structure and is positioned in the pre-tightening spring; CRLs are arranged in the lens frame; the push-push ratchet mechanism comprises a tension spring, a slider with a ratchet groove, a guide bottom plate with a guide and a C-shaped pull rod, wherein the slider with the ratchet groove and the guide bottom plate with the ratchet groove are matched through a linear chute and a guide structure to form a linear guide rail kinematic pair;

the positioning groove is positioned under the adjusting arm, the opening of the positioning groove faces upwards, and the axis of the positioning groove is parallel to the optical axis;

the driving assembly comprises a displacement table and a motor positioned on the displacement table, and the displacement table is used for moving the motor to the position above the adjusting arm to be switched; the motor is used for applying thrust to the push rod of the adjusting arm to be switched and controlling the upper end of the corresponding C-shaped pull rod to slide in the ratchet groove of the slider with the ratchet groove, so that the slider with the ratchet groove is in a low-position state or a high-position state, and CRLs in the adjusting arm to be switched are switched into or out of an optical axis.

2. The X-ray zoom lens system of claim 1, wherein the positioning groove is a V-shaped groove, and a common line of two inclined surfaces of the V-shaped groove is parallel to the optical axis.

3. The X-ray zoom lens system of claim 1, wherein the ratchet groove in the ratcheted slider is a Y-shaped ratchet groove having an upper recess and a bottom groove corresponding to the low position state or the high position state, respectively.

4. The X-ray zoom lens system as claimed in claim 1, 2 or 3, wherein when the slider with the ratchet groove is moved downwards by the push rod, the slider is pushed downwards by the sum of the tension spring and the pressure of the pre-tightening spring, so that the upper end of the C-shaped pull rod slides in the ratchet groove from bottom to top in a single direction, and when the slider with the ratchet groove moves from a high position to a low position, the slider with the ratchet groove is reversed after the upper end of the C-shaped pull rod slides from bottom to top along the ratchet groove, i.e. the slider with the ratchet groove is changed from the high position to the low position.

5. The X-ray zoom lens system according to claim 1, 2 or 3, wherein when the motor reaches the adjustment arm to be switched, if the corresponding CRLs are in an off-axis state, the push-down process comprises three stages: in the first stage, a push shaft of the motor moves downwards until contacting a push rod of the adjusting arm to be switched; in the second stage, the motor continuously pushes down the push rod to enable the adjusting arm to be switched to move downwards so that the CRLs reach the V-shaped groove at the bottom, and the cylindrical profiles of the CRLs are pressed tangentially with the two inner inclined planes of the V-shaped groove; in the third stage, the motor continues to push down, and the sliding block with the ratchet groove of the push-push ratchet mechanism kinematic pair in the adjusting arm to be switched is further moved downwards to the limit position under the action of the push rod; the motor then lifts until the push shaft is disconnected from the push rod.

6. An X-ray zooming method based on the X-ray zooming lens system of claim 1, comprising the steps of:

1) the displacement table sends the motor to the position of the target adjusting arm;

2) a push shaft of the motor firstly pushes a push rod of the target adjusting arm downwards so that the slide block with the ratchet groove of the target adjusting arm moves downwards to a limit position and then returns to move upwards; when CRLs in the target adjusting arm are out of the axis, the CRLs are pushed into the optical axis under the action of downward movement of a pushing shaft of a motor, namely the CRLs cut into the optical axis; when CRLs in the target adjusting arm are in the shaft, the CRLs in the target adjusting arm return and lift up along with the push shaft of the motor when the CRLs move back and up after the push shaft of the motor moves down to the extreme position, so that the CRLs cut out an optical axis;

3) every time the push shaft of the motor moves downwards to the limit position and returns once again, the CRLs complete the switching of the cutting-in/cutting-out state or the state conversion once, and the position or the state after the CRLs state switching is kept and self-locked by the switching of the high/low position of the slider with the ratchet groove and the position locking after the switching and acting on the lens frame through the pre-tightening spring.

7. A method for alignment of an X-ray zoom lens system according to claim 1, wherein when CRLs cut into the optical axis, the pushing shaft of the motor pushes the pushing rod of the target adjusting arm downward to move the slide block with ratchet groove of the push-push ratchet mechanism from high position to low position, so that the pre-tightening spring is compressed, and the pre-tightening spring directly applies the pushing force to the two-dimensional flexible shaft and the lens frame to make the cylindrical contour of CRLs in the lens frame tangent to and abut against the V-shaped groove, i.e. align the center.

Technical Field

The invention belongs to the technical field of synchrotron radiation, and particularly relates to a novel X-ray zoom lens system (Transfocator) and a zooming method thereof.

Background

Compound Refractive Lenses (CRLs) are modern X-ray optical elements mainly used for optical modulation such as high-energy X-ray focusing, and their principle and structure are shown in fig. 1 (refer to p. snirev, v. kohn, i.snireva, and b.longler, a compound reflective lenses for focusing high-energy X-rays, Nature,384(7), 1996). The Transfocator is a modern optical instrument or device which cuts in and cuts out CRLs with different specifications and numbers on an optical axis to form various CRLs to realize a zooming function, and has wide application prospects in advanced light sources such as fourth generation synchrotron radiation and the like.

A typical conventional Transfocator structure and design scheme is shown in fig. 2 (refer to p. mark, Overview of engineering projects for the ESRF upper beams, MEDSI2012, SSRF, or Oral report), which arranges a plurality of arms (making the number of the arms N) in sequence along the optical axis direction, each arm is individually designed with a motor drive and a guide to move up and down, so that the CRLs disposed at the bottom end of the arm can be cut into and out of the optical axis (optical path), thereby forming different lens arrangement combinations to realize different focusing functions, i.e., zooming, etc.

The typical Transfocator architecture solution is for N arms tuning, which employs N motor drives and N flange vacuum motion feeds, each arm being large in size and the two arms being not well spaced due to the size limitations of the motors and flanges themselves. Therefore, the laser focusing device is complicated and not compact in mechanism, high in cost, large in occupied space, and capable of affecting the working distance (the distance from the rear edge of the device outline to the focus) of the whole focusing device, and finally the service performance of the laser focusing device is greatly limited, so that the laser focusing device is difficult to meet the technical requirements of advanced beam line design and layout optimization.

Disclosure of Invention

In view of the problems in the prior art, an object of the present invention is to provide a novel X-ray zoom lens system and a zooming method thereof. The invention provides an orthogonal motor driving scheme based on horizontal and vertical directions, namely only 2 motors are used and orthogonally arranged, the orthogonal motor driving scheme is simple in structure, small and compact, low in cost, long in working distance and easy to install, and a technical basis is provided for optimizing the light beam line design and realizing a high-performance target.

The technical scheme of the invention is as follows:

an X-ray zoom lens system is characterized by comprising a base, wherein one side of the base is provided with a plurality of adjusting arms arranged along the optical axis direction of the X-ray zoom lens system, the top of the base is provided with a driving assembly, and the bottom of the base is provided with a positioning groove; wherein the content of the first and second substances,

the adjusting arm is provided with a push rod, a push-push ratchet mechanism, a pre-tightening spring, a guide rod, a two-dimensional flexible shaft and a lens frame which are sequentially connected from top to bottom, and the guide rod is of a telescopic structure and is positioned in the pre-tightening spring; CRLs are arranged in the lens frame; the push-push ratchet mechanism comprises a tension spring, a slider with a ratchet groove, a guide bottom plate with a guide and a C-shaped pull rod, wherein the slider with the ratchet groove and the guide bottom plate with the ratchet groove are matched through a linear chute and a guide structure to form a linear guide rail kinematic pair;

the positioning groove is positioned under the adjusting arm, the opening of the positioning groove faces upwards, and the axis of the positioning groove is parallel to the optical axis;

the driving assembly comprises a displacement table and a motor positioned on the displacement table, and the displacement table is used for moving the motor to the position above the adjusting arm to be switched; the motor is used for applying thrust to the push rod of the adjusting arm to be switched and controlling the upper end of the corresponding C-shaped pull rod to slide in the ratchet groove of the slider with the ratchet groove, so that the slider with the ratchet groove is in a low-position state or a high-position state, and CRLs in the adjusting arm to be switched are switched into or out of an optical axis.

Furthermore, the positioning groove is a V-shaped groove, and a common line of two inclined planes of the V-shaped groove is parallel to the optical axis.

Furthermore, the ratchet groove in the slide block with the ratchet groove is a Y-shaped ratchet groove, and the upper groove and the bottom groove of the Y-shaped ratchet groove respectively correspond to a low position state or a high position state.

Furthermore, when the slider with the ratchet groove is moved downwards by the push rod, the downward thrust is the sum of the tension spring and the pressure of the pre-tightening spring, so that the upper end of the C-shaped pull rod slides in the ratchet groove from bottom to top in a one-way manner, and after the slider with the ratchet groove moves from a high position to a low position, the upper end of the C-shaped pull rod reversely hooks the slider with the ratchet groove along the ratchet groove after sliding to the upper position from the lower position, namely the slider with the ratchet groove realizes the change from the high position state to the low position state.

Further, when the motor reaches the adjusting arm to be switched, if the corresponding CRLs are in an off-axis state, the push-down process includes three stages: in the first stage, a push shaft of the motor moves downwards until contacting a push rod of the adjusting arm to be switched; in the second stage, the motor continuously pushes down the push rod to enable the adjusting arm to be switched to move downwards so that the CRLs reach the V-shaped groove at the bottom, and the cylindrical profiles of the CRLs are pressed tangentially with the two inner inclined planes of the V-shaped groove; in the third stage, the motor continues to push down, and the sliding block with the ratchet groove of the push-push ratchet mechanism kinematic pair in the adjusting arm to be switched is further moved downwards to the limit position under the action of the push rod; the motor then lifts until the push shaft is disconnected from the push rod.

An X-ray zooming method based on an X-ray zooming lens system, comprising the steps of:

1) the displacement table sends the motor to the position of the target adjusting arm;

2) a push shaft of the motor firstly pushes a push rod of the target adjusting arm downwards so that the slide block with the ratchet groove of the target adjusting arm moves downwards to a limit position and then returns to move upwards; when CRLs in the target adjusting arm are out of the axis, the CRLs are pushed into the optical axis under the action of downward movement of a pushing shaft of a motor, namely the CRLs cut into the optical axis; when CRLs in the target adjusting arm are in the shaft, the CRLs in the target adjusting arm return and lift up along with the push shaft of the motor when the CRLs move back and up after the push shaft of the motor moves down to the extreme position, so that the CRLs cut out an optical axis;

3) every time the push shaft of the motor moves downwards to the limit position and returns for 1 time, the CRLs complete the switching of the cutting-in/cutting-out state or the state conversion for 1 time, and the position or the state after the CRLs state switching is kept and self-locked by the switching of the high/low position of the slider with the ratchet groove and the position locking after the switching and acting on the lens frame through the pre-tightening spring.

A collimation alignment method based on an X-ray zoom lens system is characterized in that when CRLs cut into an optical axis, a push shaft of a motor pushes a push rod of a target adjusting arm downwards, a slide block with a ratchet groove of a push-push ratchet mechanism moves downwards from a high position to a low position, a pre-tightening spring is compressed, the pre-tightening spring directly acts the thrust on a two-dimensional flexible shaft and a lens frame, and the cylindrical profile of the CRLs in the lens frame is tangent to and abutted against the V-shaped groove, namely the center of the CRLs is aligned.

The novel X-ray zoom lens system adopts a horizontal and vertical orthogonal layout driving scheme, a vertical displacement driving assembly is placed on a horizontal motor and a displacement table thereof, the horizontal displacement table moves to send the vertical displacement driving assembly to a target position, then the vertical displacement driving assembly vertically moves to switch (cut in or cut out) the states of adjusting arms (CRLs), and the switched states are kept and self-locked, so that different CRLs on an optical axis are flexibly arranged and combined to form a novel zoom design method, namely a novel Transfocator device.

The orthogonal layout driving scheme is that only 2 groups of motors are adopted for driving, so that the cut-in and cut-out (switching) of CRLs in N adjusting arms in an optical axis can be realized, and different CRLs are formed to be arranged and combined to realize zooming.

The invention provides a design method and a structure of a CRLs adjusting arm with a state locking or state keeping function, which sequentially comprise a Push-Push (Push-Push) ratchet self-locking mechanism, a lower connecting rod thereof, a pre-tightening spring, a guide rod, a two-dimensional flexible shaft, a lens frame and the like, wherein the guide rod is of a telescopic sleeve structure and is positioned in the pre-tightening spring, the upper end of the guide rod is connected with the lower end of a sliding block with a ratchet groove, and the lower end of the guide rod is connected with the two-dimensional flexible shaft.

The invention provides a design method and a structure for CRLs misalignment compensation based on a two-dimensional (2D) flexible shaft, wherein the 2D flexible shaft is connected with a lens frame, the CRLs are arranged in the lens frame, when a moving shaft of an adjusting arm is misaligned with the center of a V-shaped positioning groove at the bottom, when the adjusting arm moves downwards for switching, the CRLs are compensated by a two-dimensional inclination angle of the 2D flexible shaft under the action of a spring pre-tightening force to ensure that the center of a cylindrical profile of the CRLs is superposed with the center of the V-shaped groove, so that the alignment of the centers of all arms, namely all groups of CRLs is ensured.

The invention provides a Push-Push (Push-Push) ratchet self-locking mechanism, which consists of a tension spring, a slide block with a ratchet groove, a guide bottom plate, a C-shaped pull rod, an elastic clamp (such as a disc spring) and the like; the slide block with the ratchet groove is characterized in that the slide block is provided with the ratchet groove. The slider with the ratchet groove and the guide bottom plate are matched through the linear sliding groove and the guide structure to form a linear guide pair, and meanwhile, the upper edge of the slider with the ratchet groove is provided with a tension spring to be connected with the upper end of the guide bottom plate, so that the slider with the ratchet groove always keeps the upward movement trend. The slider with the ratchet groove is connected with the lower end of the guide bottom plate through the C-shaped pull rod, the upper end of the C-shaped pull rod is in contact with the inner side surface and the inner bottom surface of the ratchet groove of the slider with the ratchet groove (namely the upper end of the C-shaped pull rod moves in the ratchet groove of the slider with the ratchet groove), the lower end of the C-shaped pull rod is connected to the guide bottom plate through elastic clamping (such as a disc spring and the like), so that the C-shaped pull rod can swing and slightly change a pitch angle, therefore, the C-shaped pull rod can be subjected to unidirectional sliding movement and has a barb effect in a preset track in the ratchet groove, and the slider with the ratchet groove can be switched between two characteristic positions (high position and low position) and self-locked.

The invention has the following advantages:

the existing traditional scheme adopts N motor drives and N flange vacuum motion feed-ins for N arms, and the size of each arm is large and the distance between the two arms is not suitable to be too small due to the size limitation of the motors and the flanges. Therefore, the laser focusing device is complicated and not compact in mechanism, high in cost, large in occupied space, and capable of affecting the working distance (the distance from the rear edge of the device outline to the focus) of the whole focusing device, and finally the service performance of the laser focusing device is greatly limited, so that the laser focusing device is difficult to meet the technical requirements of advanced beam line design and layout optimization.

In order to overcome the problems, the invention mainly aims to provide an orthogonal motor driving scheme based on horizontal and vertical directions, namely, 2 motors are used, the orthogonal layout is realized, a small and exquisite adjusting arm mechanism with the functions of auto-collimation, auto-locking and position switching is designed, and a novel Transfocator design method and a novel Transfocator design device are formed. The zoom lens has the advantages of simple and compact structure, low cost and small size, so that the zoom lens not only has larger working distance or can realize a zoom function in a wider range, and a technical basis is provided for high-performance/advanced beam line design and optimization.

Drawings

FIG. 1 is a schematic view of the focusing principle and structure of CRLs on X-ray.

FIG. 2 is a diagram of a typical Transfocator design.

Fig. 3 is a view showing the structure of the overall embodiment of the present invention.

Fig. 4 is a structural diagram of an adjusting arm with a push-push self-locking function according to the present invention.

FIG. 5 is a diagram of a push-push ratchet mechanism.

Fig. 6 is an assembly structure view of the lens frame and CRLs.

Fig. 7 is a flow chart of the operation of the present invention.

Detailed Description

The invention will be described in further detail with reference to the following drawings, which are given by way of example only for the purpose of illustrating the invention and are not intended to limit the scope of the invention.

As shown in figure 3, 2 motor driving assemblies which are in orthogonal layout are arranged right above an adjusting arm to be switched, each motor driving assembly consists of a (vacuum) horizontal motor and a displacement table and a vertical linear motor which are formed by the (vacuum) horizontal motor, and the vertical linear motor is arranged on the horizontal displacement table and can perform horizontal motion along with the displacement table. An adjusting arm to be switched is arranged below the vertical motor push rod (at a certain height difference), and N same adjusting arms to be switched are sequentially and compactly arranged along the direction of the optical axis (horizontally arranged and parallel to the direction of the horizontal displacement table). A long V-shaped groove is arranged under the N adjusting arms, the common line of two inclined planes of the V-shaped groove is parallel to the optical axis, and the opening of the V-shaped groove faces upwards. The orthogonal motor driving assembly, the N regulating arms to be switched, the V-shaped groove and the like are all arranged on the same base. The overall structure and scheme is shown in fig. 3.

The above mentioned adjusting arm to be cut-in and cut-out is composed of parts sequentially provided with a push rod, a push-push ratchet mechanism, a pre-tightening spring and a guide rod, a two-dimensional flexible shaft, a lens frame, CRLs and the like from top to bottom, as shown in fig. 4. The upper end of the push rod is connected with the adjusting arm, and the lower end of the push rod is connected with the push-push ratchet mechanism; the lower end of the push-push ratchet mechanism is connected with the lens frame through a pre-tightening spring, a guide rod and a two-dimensional flexible shaft.

The above mentioned push-push ratchet mechanism is composed of a tension spring, a slider with ratchet groove, a bottom plate with guide, a C-shaped pull rod, an elastic clamp (such as a disc spring), and the like, as shown in fig. 5. The slider with the ratchet groove and the guide bottom plate form a linear guide rail kinematic pair through the matching of a linear sliding groove and a guide structure, and meanwhile, a tension spring is arranged on the slider with the ratchet groove and connected with the upper end of the guide bottom plate, so that the slider with the ratchet groove always keeps the upward movement trend. The upper end of the C-shaped pull rod is in contact with the inner side surface and the inner bottom surface of the ratchet groove of the slider with the ratchet groove, and the lower end of the C-shaped pull rod is fixedly arranged on the guide bottom plate with the ratchet groove through elastic clamping (such as a disc spring) so as to ensure that the C-shaped pull rod can swing and slightly change a pitch angle, so that the upper end of the C-shaped pull rod can perform unidirectional sliding motion in a preset track in the ratchet groove, as shown in fig. 5.

The above-mentioned assembling structure of lens frame and CRLs mainly comprises a lens frame body, an inverted V-shaped groove, a baffle, a sheet pressing plate and CRLs, as shown in fig. 6, the CRLs are installed in the lens frame.

II, working principle and process:

1) when a certain group of lens frames and CRLs need to cut in or cut out an optical axis, a horizontal motor and a displacement table in an orthogonal motor driving assembly move horizontally to change the position of a vertical linear motor along the direction of the optical axis, so that a push shaft of the vertical linear motor is aligned with an arm and a push rod thereof corresponding to the CRLs needing to cut in or cut out the optical axis. If the forearm and the CRLs are outside the optical axis, performing a plunge function to push the CRLs into the optical axis, referred to as plunge; conversely, moving CRLs out of the optical axis in the optical axis is called cutting.

2) After the vertical linear motor reaches the target position, the vertical downward movement, namely the push-down is executed, and if the current CRLs are in an off-axis state, the push-down process can respectively comprise three stages: in the first stage, the motor push shaft moves downwards until the push rod of the adjusting arm needing to perform cut-in or cut-out is contacted, namely a clearance eliminating process from disconnection to contact between the linear motor push shaft and the push rod of the adjusting arm needing to perform cut-in or cut-out; in the second stage, the vertical linear motor pushes the push rod downwards to enable the arm to move downwards so that CRLs reach the V-shaped groove at the bottom, the cylindrical profile of the CRLs is sufficiently tangent and in pressing contact with the two inner inclined surfaces of the V-shaped groove, the process is the process of CRLs cutting into the optical axis, and the process is called as a cutting-in stage; in the third stage, the vertical linear motor continues to push downwards, the sliding block with the ratchet groove of the push-push ratchet mechanism movement pair in the arm is further moved downwards to the limit position under the action of the push rod, and the sliding block continues to move to the limit position from the state of meeting the CRLs in position and pretension, namely the overtravel stage.

3) When the slide block with the ratchet groove reaches the limit, the vertical linear motor performs reverse motion, namely lifts up until the push shaft of the vertical linear motor is disconnected from the push rod of the adjusting arm which needs to perform cut-in or cut-out and keeps a certain distance, namely the push shaft of the vertical linear motor returns to the initial position (vertical direction).

4) And 2) in the pushing-down process, the CRLs cylindrical profile is in full tangency with the two inner inclined planes of the V-shaped groove and in pressing contact with the two inner inclined planes, the CRLs are in an optical axis cutting state, the centers of the CRLs are positioned on an optical axis, and the CRLs are kept in the lifting process of 3) in the state, namely in-axis self-locking.

5) And 4) CRLs (in-shaft) state self-locking is completed by the cooperation of a push-push ratchet mechanism in the adjusting arm, a pre-tightening spring, a guide rod and a two-dimensional (2D) flexible shaft. In the 2) pushing-down process and the 3) lifting process, the slider with the ratchet groove in the pushing-pushing ratchet mechanism is changed from a high position state to a low position state and can be self-locked in the high position state and the low position state, and when the slider with the ratchet groove is in the low position state, the slider with the ratchet groove exerts force on the 2D flexible shaft, the lens frame and the CRLs through a pre-tightening spring and a guide rod, so that the CRLs are ensured to be still kept in the 3) lifting process, and the self-locking in the (in-shaft) state is realized. The 2D flexible shaft allows two-dimensional angular fine adjustment of the CRLs cylindrical center axis to ensure alignment with the center of the V-groove.

6) 5) the push-push ratchet mechanism can realize the conversion from the high position state to the low position state, because when the slide block with the ratchet groove is moved downwards by the push rod, the slide block overcomes the tension force of a tension spring between the slide block with the ratchet groove and the bottom plate with the guide by the downward push force, and the pressure sum of a pre-tightening spring between the slide block with the ratchet groove and the lens frame moves from the high position to the low position along the vertical guide, meanwhile, the upper end of the C-shaped pull rod and the slide block with the ratchet groove move relatively, namely the upper end slides from bottom to top in the ratchet groove in the slide block with the ratchet groove, because the lower end of the C-shaped pull rod is fixed on the bottom plate with the guide (highly fixed), after the slide block with the ratchet groove goes from the high position to the low position, the upper end of the C-shaped pull rod reversely hooks the slide block with the ratchet groove immediately after the slide block with the ratchet groove goes from the lower position to the upper position along the ratchet groove, namely, the slide block with the ratchet groove realizes the conversion from the high position state to the low position state, due to the unidirectional sliding characteristic of the ratchet groove, the C-shaped pull rod can be reversely hooked and self-locked in the current low-position state.

7) And 6) the push-push ratchet self-locking mechanism is based on the principle of a ratchet mechanism, and realizes the relative motion of one direction and a preset track, so that the C-shaped pull rod can perform barb and self-locking on two positions (high and low positions) which move up and down under the action of the vertical linear motor.

8) If the forearm and CRLs state in 2) is in-axis, the cutting-out is performed, and the push-down process is changed from the three stages in 2) to two stages, namely, the first stage of clearance elimination and the third stage of overtravel. The push down process does not include the second phase of plunge because the CRLs are already in the in-axis state. But in the 3) mentioned above, a stage is added in the lifting process, namely the CRLs are cut out, namely the slide block with the ratchet groove in the push-push ratchet mechanism is changed from a low position to a high position, so that the CRLs move upwards together with the slide block with the ratchet groove under the action of the tension spring until the CRLs completely move out of the optical axis, and the state is self-locked by the push-push ratchet mechanism in a high position state so as to be kept in a CRLs (off-axis) state, namely self-locking in an (off-axis) state. Then, the vertical linear motor moves upwards continuously until the vertical linear motor is disconnected from the push rod of the adjusting arm and keeps a little distance, namely the push shaft of the vertical linear motor returns to the initial position (vertical direction).

9) When the cut-in and cut-out of other arms need to be adjusted, the positions of the horizontal motor and the displacement table are adjusted, so that different adjusting arms, namely different target positions, are selected, the steps 2) to 8) are repeated, state switching (cut-in or cut-out) and state self-locking can be realized for any adjusting arm and CRLs, and finally, the arrangement and combination of CRLs with different specifications in the optical axis direction can be realized, so that the purpose of changing the focal length of the lens system, namely zooming, is achieved.

The technical scheme and the work flow chart of the invention are shown in figure 7.

The first step, the vacuum horizontal motor and the displacement table move, and the vertical linear motor is conveyed to the position of a target adjusting arm;

secondly, a pushing shaft of the vacuum vertical linear motor moves downwards (moves downwards) firstly, and returns to move upwards (lifts) after reaching a limit position;

thirdly, when the CRLs are out of the shaft, the CRLs are pushed into the optical axis under the action of downward movement of a pushing shaft of the linear motor, namely the arms and the CRLs are cut in, and the state is not changed along with the withdrawing and upward lifting of the pushing shaft of the linear motor, namely the state locking (self-locking) of the CRLs (in-shaft) is realized; when CRLs are in the shaft, the pushing shaft of the linear motor moves downwards to a limit position and then returns to move upwards (lift up), the arm and the CRLs return to lift up along with the pushing shaft of the linear motor, so that the CRLs are cut out, and the CRLs are in an (off-shaft) state and are kept and locked (self-locking);

fourthly, from the third aspect, every time the linear motor push shaft completes a complete motion process of 'moving down-extreme position-lifting up', the state of the corresponding adjusting arm is changed once, namely, the state is switched once, and the self-locking of the switched state can be maintained: after the CRLs are cut in, the CRLs cylindrical profile and the central line of the CRLs achieve the aim of aligning with the center of the V-shaped groove under the combined action of the pretightening force of the pretightening spring and the compensation of the 2D flexible shaft.

Fifthly, the in-axis and out-axis state switching and state self-locking of all the adjusting arms and CRLs group which are sequentially and compactly arranged along the optical axis direction can be realized by repeating the steps, so that a plurality of new CRLs combinations are formed in the optical axis to change the focal length of the lens system, namely, the zoom adjustment (Transfocator) is realized.

In the orthogonal motor driving layout scheme, a horizontal motor in vacuum and a vertical linear motor in vacuum are adopted, which is only a typical application or an example application, and the motors or drivers or displacement actuators can be various motors or drivers in a vacuum external environment; further, the horizontal and vertical directions are also only examples, and they may be any two orthogonal directions, but one of the directions is parallel to the optical axis.

Although specific embodiments of the invention have been disclosed for purposes of illustration, and for purposes of aiding in the understanding of the contents of the invention and its implementation, those skilled in the art will appreciate that: various substitutions, changes and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims.