阅读说明：本技术 一种大功率同轴陶瓷窗冷却装置 (High-power coaxial ceramic window cooling device ) 是由 陈根 毛玉周 赵燕平 程诚 兰彦 沈洁 王永胜 于 2020-11-16 设计创作，主要内容包括：本发明公开一种大功率同轴陶瓷窗冷却装置,包括陶瓷窗、方形冷却水管、聚四氟乙烯内支撑、同轴馈线内导体、同轴馈线外导体、铜接头、基石水冷管道、铜片、法兰、内插芯；同轴馈线内导与铜片一端连接；铜片弯折90度后与铜接头连接；铜接头另一端与陶瓷窗内导体连接；基石水冷管道经过法兰与铜接头内部水冷管道下端；铜接头内部水冷管道上端与陶瓷窗内导体水冷管道下端连接,陶瓷窗内导体水冷管道上端延伸至内导体顶端；陶瓷窗分离为上端真空侧和下端大气侧；陶瓷窗外导体缠绕方形冷却水管。本发明实现了大功率同轴陶瓷窗冷却,同时没有对陶瓷窗的传输性能造成影响,解决陶瓷窗因功率损耗发热造成破裂的问题。(The invention discloses a high-power coaxial ceramic window cooling device, which comprises a ceramic window, a square cooling water pipe, a polytetrafluoroethylene inner support, a coaxial feeder inner conductor, a coaxial feeder outer conductor, a copper joint, a kerbstone water-cooling pipeline, a copper sheet, a flange and an inner inserting core, wherein the ceramic window is provided with a rectangular cooling water pipe; the coaxial feeder line inner conductor is connected with one end of the copper sheet; the copper sheet is bent by 90 degrees and then is connected with the copper joint; the other end of the copper joint is connected with the inner conductor of the ceramic window; the kerbstone water-cooling pipeline passes through the flange and the lower end of the water-cooling pipeline inside the copper joint; the upper end of the water cooling pipeline of the inner conductor of the ceramic window is connected with the lower end of the water cooling pipeline of the inner conductor of the ceramic window, and the upper end of the water cooling pipeline of the inner conductor of the ceramic window extends to the top end of the inner conductor; the ceramic window is separated into an upper vacuum side and a lower atmospheric side; the ceramic window outer conductor is wound around the square cooling water pipe. The invention realizes the cooling of the high-power coaxial ceramic window, does not influence the transmission performance of the ceramic window, and solves the problem of cracking of the ceramic window caused by heating due to power loss.)

1. A high power coaxial ceramic window cooling apparatus, comprising: the feed line comprises a ceramic window (1), a cooling water pipe (2), a polytetrafluoroethylene inner support (3), a coaxial feed line inner conductor (4), a coaxial feed line outer conductor (5), a copper joint (6), a kerbstone water-cooling pipeline (7), copper sheets (8), a flange (9) and an inner insertion core (10);

the ceramic window (1) is used for power transmission and simultaneously plays a role in vacuum sealing and isolating the atmosphere; the upper section of the ceramic window (1) is connected with the vacuum cavity, and the lower end of the ceramic window is connected with the coaxial feed pipe; the ceramic window (1) comprises: the ceramic window water-cooling pipeline (11), the ceramic plate (12), the kovar (13), the ceramic window inner conductor (14) and the ceramic window outer conductor (15);

a water cooling pipeline for cooling is designed in the copper joint (6), and the lower end of the copper joint (6) is connected with the water cooling pipeline (7) of the foundation stone; the coaxial feeder line inner conductor (4) penetrates through the polytetrafluoroethylene inner support (3) and is clamped and fixed through the polytetrafluoroethylene inner support (3); one end of a copper sheet (8) is connected with a copper joint (6) after being bent by 90 degrees, the other end of the copper sheet (8) is connected with a coaxial feeder inner conductor (4), and the coaxial feeder inner conductor (4) is clamped and fixed through a tetrafluoroethylene inner support (3) and is connected with an inner insertion core (10) and then is connected with an external coaxial feeder tube; the kerbstone water-cooling pipeline (7) penetrates through the flange (9) to be connected with an external water-cooling system, and the flange (9) can be adjusted up and down to adjust matching power transmission; the kerbstone water-cooling pipeline (7) plays an insulating role, and the phenomenon of sparking at the site in high power is effectively avoided;

the upper end of the conductor water-cooling pipeline (11) in the ceramic window is connected with the upper end of the water-cooling pipeline in the copper joint (6); the ceramic window outer conductor (15) is wound on the cooling water pipe (2) and welded together through vacuum brazing; the upper end of the ceramic window inner conductor water-cooling pipeline (11) is connected with the top end of the ceramic window inner conductor (14); the ceramic window inner conductor (14) is connected with the copper joint (6); the outer diameter of the ceramic plate (12) is brazed with the kovar (13) and the inner diameter of the ceramic plate is brazed with the inner conductor (14) in a vacuum mode, and the inner conductor (14) of the ceramic window penetrates through the polytetrafluoroethylene inner support (3) to ensure that the coaxial feeder inner conductor (4) and the coaxial feeder outer conductor (5) have good coaxiality.

2. The high power coaxial ceramic window cooling arrangement of claim 1, wherein: the ceramic window (1) is made of ceramic with the alumina content of 99%, impurities are few, and the surface of the ceramic is plated with high-frequency glaze, so that the transmission loss is reduced, and the acid pickling treatment of pollutants on the surface of the alumina ceramic is facilitated.

3. The high power coaxial ceramic window cooling arrangement of claim 1, wherein: the cooling water pipe (2) adopts a square water pipe, the contact area with the ceramic window outer conductor (15) is large, and the cooling effect is good.

4. The high power coaxial ceramic window cooling arrangement of claim 1, wherein: the ceramic window inner conductor water-cooling pipeline (11) upper end is trompil all around, and inside the cooling water got into and flowed out to ceramic window inner conductor (14) from hole all around from ceramic window water-cooling pipeline (11) inside, formed complete inner conductor cooling circuit, no water flow resistance stagnates the phenomenon, and the cooling effect is better.

5. The high power coaxial ceramic window cooling arrangement of claim 1, wherein: the coaxiality of the coaxial feeder inner conductor (4) and the coaxial feeder outer conductor (5) is within 0.1 mm.

Technical Field

The invention belongs to the field of high-power coaxial ceramic window cooling, does not influence the transmission performance of a ceramic window, solves the heating problem of the ceramic window caused by power loss, and prolongs the service life of the ceramic window. Since the power range of the high power is difficult to define, the ceramic window with the tentative power capacity larger than 10kW is the high-power ceramic window.

Background

Ceramic windows are widely used in microwave transmission systems such as various plasma heating devices and particle accelerators. The ceramic window is a vital device of a microwave transmission system, and mainly has the functions of separating a high vacuum environment and an atmospheric environment inside and outside a pipe, transmitting microwave power with low loss as much as possible and playing the roles of microwave energy transmission and gas sealing.

The ceramic window on the existing transmission feeder line is mainly divided into a coaxial ceramic window and a waveguide window, when high-power microwaves pass through, the ceramic chip is bombarded by high-energy electrons or ions to cause a secondary electron multiplication effect, strong discharge occurs on the surface of the ceramic chip to cause damage, meanwhile, the ceramic chip material has dielectric loss, and because the heat conduction coefficient of the ceramic chip is low, the microwave energy deposited cannot be quickly taken away when the microwave energy passes through, the temperature rise of the ceramic chip is too high, and the ceramic window is cracked because the strong stress caused by the thermal expansion of the material exceeds the bearing capacity of the ceramic window; the design of the ceramic window cooling device is particularly important to prevent critical problems when thermal stress damages the ceramic window. At present, for the cooling design of a high-power coaxial ceramic window at home and abroad, a cooling water pipe is wrapped outside the ceramic window, and the design can not effectively cool an inner conductor and a ceramic chip of the coaxial ceramic window, so that the ceramic is frequently broken and needs to be frequently replaced. Therefore, a need exists for a more efficient cooling device that quickly carries away microwave energy deposited by a coaxial ceramic window to prevent cracking of the ceramic window due to excessive temperatures.

Disclosure of Invention

The technical problem of the invention is solved: the defects of the prior art are overcome, the high-power coaxial ceramic window cooling device is provided, the high-power coaxial ceramic window cooling is realized under the condition that the transmission performance of the ceramic window is not influenced, the microwave energy deposited by the coaxial ceramic window is taken away quickly, and the problem that the ceramic window is cracked due to heating caused by power loss is solved.

The technical scheme adopted by the invention is as follows: a high power coaxial ceramic window cooling apparatus comprising: the coaxial feeder comprises a ceramic window, a cooling water pipe, a polytetrafluoroethylene inner support, a coaxial feeder inner conductor, a coaxial feeder outer conductor, a copper joint, a kerbstone water-cooling pipeline, a copper sheet, a flange and an inner inserting core;

the ceramic window is used for power transmission and simultaneously plays a role in vacuum sealing and isolating the atmosphere; the upper section of the ceramic window is connected with the vacuum cavity, and the lower end of the ceramic window is connected with the coaxial feed pipe; the ceramic includes: ceramic window water-cooling pipeline, ceramic plate, kovar, ceramic window internal guide and ceramic window external guide;

a water-cooling pipeline for cooling is designed in the copper joint, and the lower end of the copper joint is connected with the water-cooling pipeline of the foundation stone; the coaxial feeder line inner conductor penetrates through the polytetrafluoroethylene inner support and is clamped and fixed through the polytetrafluoroethylene inner support; one end of the copper sheet is connected with the copper after being bent by 90 degrees, the other end of the copper sheet is connected with the coaxial feeder inner conductor, the coaxial feeder inner conductor is clamped and fixed through the tetrafluoroethylene inner support and is connected with the inner insertion core, and then the coaxial feeder inner conductor is connected with the external coaxial feed tube; the foundation stone water-cooling pipeline penetrates through the flange external water-cooling system to be connected, and the flange can be adjusted up and down to be used for adjusting matching power transmission; the kerbstone water-cooling pipeline plays an insulating role, and effectively avoids the phenomenon of striking sparks at the place when the power is high.

The upper end of the conductor water-cooling pipeline in the ceramic window is connected with the upper end of the water-cooling pipeline in the copper joint; the ceramic window outer conductor is wound with a cooling water pipe and welded together through vacuum brazing; the lower end of the conductor water-cooling pipeline in the ceramic window is connected with the top end of the conductor in the ceramic window; the ceramic window inner conductor is connected with the copper joint, the outer diameter and the kovar of the ceramic plate and the inner diameter and the inner conductor are brazed together in a vacuum mode, and the structure effectively and quickly takes away the heat inside the coaxial ceramic; the ceramic window inner conductor penetrates through the polytetrafluoroethylene inner support and ensures that the coaxial feeder inner conductor and the coaxial feeder outer conductor have coaxiality.

The ceramic window is made of ceramic with the alumina content of 99%, impurities are few, and the surface of the ceramic is plated with the high-frequency glaze, so that the transmission loss is reduced, and the acid cleaning treatment of pollutants on the surface of the alumina ceramic is facilitated.

The cooling water pipe adopts a square water pipe, has large contact area with the outer conductor of the ceramic window and good cooling effect.

The ceramic window inner conductor water-cooling pipeline upper end is trompil all around, and inside cooling water got into and flowed out to ceramic window inner conductor from hole all around by ceramic window water-cooling pipeline is inside, formed complete inner conductor cooling circuit, no water flow hinders the phenomenon, and the cooling effect is better.

The coaxiality of the inner conductor of the coaxial feeder and the outer conductor of the coaxial feeder is within 0.1 mm.

Compared with the prior art, the invention has the advantages that:

(1) according to the coaxial feeder line, the inner conductor and the outer conductor are both designed with water cooling structures, and the cooling effect is good;

(2) according to the coaxial feeder line, the copper joint and the inner conductor of the coaxial feeder line are connected in a copper sheet mode, so that the coaxial feeder line is simple in structure, small in occupied space and capable of reserving enough space for a water cooling structure;

(3) the invention adopts the kerbstone water-cooling pipeline to play an insulating role, and can effectively avoid the phenomenon of sparking at the position with high power.

Drawings

In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.

FIG. 1 is a front cross-sectional view of a high power coaxial ceramic window cooling arrangement of the present invention;

FIG. 2 is a left side cross-sectional view of the high power coaxial ceramic window cooling arrangement of the present invention;

FIG. 3 is a top cross-sectional view of a high power coaxial ceramic window cooling arrangement according to the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

As shown in fig. 1, the high-power coaxial ceramic window cooling device of the invention comprises a ceramic window 1, a cooling water pipe 2, a polytetrafluoroethylene inner support 3, a coaxial feeder inner conductor 4, a coaxial feeder outer conductor 5, a copper joint 6, a keystone water-cooling pipeline 7, a copper sheet 8 and a flange 9; the ceramic window 1 comprises a ceramic window water cooling pipeline 11, a ceramic plate 12, a kovar 13, a ceramic window inner conductor 14 and a ceramic window outer conductor 15. The ceramic window 1 plays a role of vacuum sealing and is separated into an upper end vacuum side and a lower end atmosphere side; the ceramic window outer conductor is wound with a cooling water pipe 2 (adopting a square shape) and welded together through vacuum brazing; holes are formed in the periphery of the upper end of the ceramic window 1 inner conductor water-cooling pipeline 11, cooling water enters from the interior of the ceramic window water-cooling pipeline 11 and flows out of the holes in the periphery to the interior of the ceramic window inner conductor 14, and therefore a complete inner conductor cooling loop is formed; the ceramic window inner conductor is connected with the copper joint 6, and the structure can effectively and quickly coaxial heat inside the ceramic window. The copper joint 6 is welded with the copper sheet 8 bent by 90 degrees; the other end of the copper sheet 8 is welded with the coaxial feeder inner conductor 4, the coaxial feeder inner conductor 4 penetrates through the polytetrafluoroethylene inner support 3 to be clamped and fixed, is connected with the inner insertion core 10, and is then connected with an external coaxial feeder tube. The coaxiality of the coaxial feeder inner conductor 4 and the coaxial feeder outer conductor 5 is ensured to be within 0.1mm by a clamping and fixing mode of the tetrafluoroethylene inner support 3.

As shown in fig. 2, the lower end of the water-cooling pipeline of the conductor in the ceramic window 1 is welded with the upper end of the water-cooling pipeline in the copper joint 6 by vacuum brazing; the kerbstone water-cooling pipeline 7 mainly comprises three sections, copper pipes at two ends and a kerbstone pipe in the middle, wherein the copper pipe parts at two ends of the kerbstone water-cooling pipeline 7 are respectively welded with a copper joint 6 and a flange 9, the copper pipe penetrating through the flange 9 is connected with an external water-cooling system, and the flange 9 can be adjusted up and down for adjusting matching power transmission. The adoption of the base stone water-cooling pipeline 7 plays an insulating role, so that the phenomenon of sparking at the position when the power is high can be effectively avoided.

As shown in fig. 3, the upper end of the water-cooling pipeline 11 of the conductor in the ceramic window is connected with the upper end of the water-cooling pipeline in the copper joint 6; the ceramic window outer conductor 15 is wound around the cooling water pipe 2 and welded together through vacuum brazing; the outer diameter of the ceramic plate 12 is welded with the kovar 13, and the inner diameter of the ceramic plate is welded with the inner conductor 14 in a vacuum manner; the upper end of the ceramic window inner conductor water cooling pipeline 11 is welded with the top end of the ceramic window inner conductor 14, holes are formed in the periphery of the upper end of the ceramic window inner conductor water cooling pipeline 11, cooling water enters the ceramic window water cooling pipeline 11 and flows out of the holes around to the inside of the ceramic window inner conductor 14, a complete inner conductor cooling loop is formed, the phenomenon of water flow retardation does not exist, and the cooling effect is good.

The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.