阅读说明：本技术 离子生成装置、方法及程序 (Ion generation device, method, and program ) 是由 竹内猛 角谷晶子 于 2020-04-06 设计创作，主要内容包括：提供一种离子生成技术,使用一台离子源,使核子平均能量一致的不同种类离子在不同的定时输出。在离子生成装置(10)中,具备：离子生成能量设定部(32),使在真空腔(25)内电离生成的第一离子(21)及第二离子(22)保持混合状态不变地从开口(26)放出；电场电压调节部(33),将在该开口(26)与引出电极(28)之间形成的电位势(27)切换为第一电场电压(V-1)及第二电场电压(V-2)而进行施加,对第一离子(21)及第二离子(22)分别赋予预先确定的相同的核子平均能量；以及励磁电流调节部(35),切换第一励磁电流(I-1)及第二励磁电流(I-2)并向分离电磁铁(41)的线圈(省略图示)供给,使第一离子(21)及第二离子(22)在不同的定时输出。(An ion generation technique is provided in which different kinds of ions having the same nuclear average energy are output at different timings by using one ion source. An ion generation device (10) is provided with: an ion generation energy setting unit (32) that emits the first ions (21) and the second ions (22) ionized and generated in the vacuum chamber (25) from the opening (26) while maintaining a mixed state; electric fieldA voltage regulator (33) for switching the potential (27) formed between the opening (26) and the extraction electrode (28) to a first electric field voltage (V) 1 ) And a second electric field voltage (V) 2 ) Applying the first ions (21) and the second ions (22) with the same predetermined nuclear average energy; and an excitation current adjustment unit (35) for switching the first excitation current (I) 1 ) And a second excitation current (I) 2 ) And supplied to a coil (not shown) of the separation electromagnet (41) so that the first ions (21) and the second ions (22) are output at different timings.)

1. An ion generating device is provided with:

an ion generation energy setting unit configured to discharge the first ions and the second ions ionized and generated in the vacuum chamber from the opening while maintaining a mixed state;

an electric field voltage adjusting unit that switches a potential formed between the opening and the extraction electrode to a first electric field voltage and a second electric field voltage and applies the switched potential to the first and second ions, and that applies a predetermined same nuclear average energy to each of the first and second ions; and

and an excitation current adjusting unit that switches a first excitation current and a second excitation current to supply the switched currents to a coil of a separation electromagnet, and outputs the first ions and the second ions at different timings.

2. The ion generating apparatus according to claim 1,

the ion generation energy setting unit switches the output intensity of the ion generation energy supply unit in accordance with the timing.

3. The ion generating apparatus according to claim 1 or 2,

the linear accelerator control device is provided with a power setting unit that switches the intensity of the high-frequency power supplied to the linear accelerator in accordance with the timing.

4. The ion generating apparatus according to any one of claims 1 to 3,

and a zero magnetic field feedback circuit that applies a demagnetizing current to the coil when the first exciting current and the second exciting current are switched, thereby canceling a residual magnetic field of the core of the separation electromagnet.

5. The ion generating apparatus according to any one of claims 1 to 4,

a linear accelerator for accelerating the first ions and the second ions which are incident at different timings,

the same nuclear average energy corresponds to an incident energy specified as a specification of the linear accelerator.

6. The ion generating apparatus of claim 5,

the ion implantation apparatus is provided with a distributor which distributes the first ions and the second ions accelerated by the linear accelerator to different transport paths.

7. The ion generating apparatus according to any one of claims 1 to 6,

the extraction electrode is composed of a first electrode and a second electrode,

the ion generating device includes a switch that switches the potential to a first electric field voltage applied from the first electrode to the second electrode and a second electric field voltage applied from the first electrode to the vacuum chamber.

8. An ion generation method comprising the steps of:

a step of discharging the first ions and the second ions generated by ionization in the vacuum chamber from the opening while keeping the first ions and the second ions in a mixed state;

applying a potential formed between the opening and the extraction electrode while switching the potential to a first electric field voltage and a second electric field voltage, and applying a predetermined same nuclear average energy to each of the first ions and the second ions; and

and switching a first exciting current and a second exciting current to supply the switched currents to a coil of a separation electromagnet, and outputting the first ions and the second ions at different timings.

9. An ion generation program for causing a computer to execute the steps of:

a step of discharging the first ions and the second ions generated by ionization in the vacuum chamber from the opening while keeping the first ions and the second ions in a mixed state;

applying a potential formed between the opening and the extraction electrode while switching the potential to a first electric field voltage and a second electric field voltage, and applying a predetermined same nuclear average energy to each of the first ions and the second ions; and

the first exciting current and the second exciting current are switched and supplied to a coil of a separation electromagnet, so that the first ions and the second ions are output at different timings.

Technical Field

Embodiments of the present invention relate to a technique of generating ions to be supplied to an accelerator.

Background

In recent years, irradiation with ions supplied to an accelerator at high speed has been applied to a wide range of fields such as engineering and medicine. An accelerator system widely used at present is generally composed of an ion source (ion generating device), a linear accelerator, and a circular accelerator, and is configured to irradiate a high-energy ion beam by accelerating ions in stages in this order.

In the linear accelerator, a plurality of accelerating electric fields having potential components in opposite directions adjacent to each other are arranged in a linear shape, and the direction of the electric field is repeatedly inverted at a high frequency, so that ions passing through the accelerating electric field are always accelerated only in the traveling direction. The linear accelerator based on such a principle can accelerate and eject ions of different types having different masses and different charge amounts by using different input powers.

However, as a condition, the average kinetic energy of the nuclei of the incident ions needs to be in accordance with the specification of the incident energy (spec) of the linear accelerator. If this condition is satisfied, it is possible to accelerate different types of ions having different mass-to-charge ratios and eject the ions at an energy that matches the specification of the ejection energy of the linear accelerator.

Thus, a system can be constructed using one linear accelerator, as opposed to multiple ion sources and multiple circular accelerators. In this system, different kinds of ions generated by the respective ion sources are made to enter the linear accelerator with a timing shifted. The different types of ions emitted from the linear accelerator are distributed to different circular accelerators and accelerated. This makes it possible to obtain ion beams of different types at high energy and to efficiently supply ion beams for experiments and treatments.

Documents of the prior art

Non-patent document

Non-patent document 1: Y.Kageyama, et al, "" Present Status of HIMAC injector at NIRS "", Proceedings of the 7^th Annual Meeting of Particle Accelerator Society of Japan(2010)1135-1138.

Disclosure of Invention

Technical problem to be solved by the invention

However, the above-described known ion beam supply facility requires a plurality of ion sources for each required beam type, and if a plurality of beam transport paths from the respective ion sources to the linear accelerator and a transport path switching device are included, the entire system becomes large in scale. Further, the different-species ions generated by each of the plurality of ion sources are made to enter the linear accelerator at different timings, and a high-level control technique is also required.

Embodiments of the present invention have been made in view of such circumstances, and an object thereof is to provide an ion generation technique for outputting different kinds of ions having the same nuclear average energy at different timings using 1 ion source.

Drawings

Fig. 1 is a configuration diagram showing an ion generating apparatus according to a first embodiment of the present invention.

Fig. 2 is a mathematical expression illustrating the principle of ion separation in the ion generating apparatus according to each embodiment.

In fig. 3, (a) is a graph showing the operation timing of the request signal receiving unit, (B) is a graph showing the operation timing of the electric field voltage adjusting unit, (C) is a graph showing the operation timing of the exciting current adjusting unit, (D) is a graph showing the operation timing of the ion generation energy supplying unit, and (E) is a graph showing the timing of the high-frequency power input to the linear accelerator.

Fig. 4 (a) is a graph showing a process of canceling the residual magnetic field of the core by the zero magnetic field feedback circuit as an example, and (B) is a graph showing the residual magnetic field of the core generated when the separation electromagnet is excited without providing the zero magnetic field feedback circuit as a comparative example.

Fig. 5 is a flowchart showing the control of the demagnetizing current for demagnetizing the residual magnetic field generated in the core.

Fig. 6 is a configuration diagram showing an ion generating apparatus according to a second embodiment of the present invention.

Fig. 7 is a configuration diagram of an accelerator system to which an ion generating apparatus according to an embodiment is applied.

Detailed Description

(first embodiment)

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a configuration diagram showing an ion generating apparatus 10A according to a first embodiment of the present invention. In this way, the ion generating apparatus 10 includes: an ion generation energy setting unit 32 that discharges the first ions 21 and the second ions 22 ionized and generated in the vacuum chamber 25 from the opening 26 in a mixed state; an electric field voltage regulator 33 for switching the potential 27 formed between the opening 26 and the extraction electrode 28 to a first electric field voltage V₁And a second electric field voltage V₂And applying the first ions 21 and the second ions 22 with the same predetermined nuclear average energy; and an excitation current adjusting unit 35 for switching the first excitation current I₁And a coil (not shown) I of the second exciting current to the separating electromagnet 41₂The first ions 21 and the second ions 22 are supplied and output at different timings.

The first ions 21 and the second ions 22 ionized and generated by the ion generation energy supply unit 23 in the vacuum chamber 25 are emitted from the opening 26 in a mixed state from a potential 27 applied between the vacuum chamber 25 and the extraction electrode 28 by the variable power source 47.

The ion generation energy setting unit 32 can switch the output intensity of the ion generation energy supply unit 23 in accordance with the timing at which the first ions 21 and the second ions 22 are output.

Since the amounts and ratios of the first ions 21 and the second ions 22 to be generated are different depending on the magnitude of the output from the ion generation energy supply unit 23, it is effective to switch to an output set value for generating a large amount of selected ions. The output can be changed from the ion generation energy setting unit 32 to the ion generation energy supply unit 23 at each timing.

The ion generating apparatus 10 further includes a power setting unit 39, and the power setting unit 39 switches the intensity of the radio frequency power supplied to the linear accelerator 42 in accordance with the timing at which the first ions 21 and the second ions 22 are output.

Due to the difference in mass-to-charge ratio (A/Z) between the first ions 21 and the second ions 22, there is a high-frequency power P to the linear accelerator 42 that is optimized_rf1、P_rf2In different cases. In this case, the high-frequency power P is set by the power setting unit 39 based on the first ions 21 and the second ions 22 to be output_rf1、P_rf2。

The vacuum chamber 25 is provided with an ion generation energy supply unit 23 for converting the raw material 37 introduced from the outside into plasma. In the vacuum chamber 25, neutral particles, electrons, and positive ions (the first ions 21 and the second ions 22) are generated in a mixed state. The known ion generation energy supply unit 23 for making the raw material into a plasma includes a high-frequency (including microwave) irradiation type ion source such as an ecr (electron cycle resonance) ion source and a pig (pumping Ionization gauge) ion source, and a laser irradiation type ion source, but is not limited thereto.

The vacuum chamber 25 is applied with a positive potential by a variable power source 47, and a potential 27 is formed between the external and nearest extraction electrodes 28. The raw material 37 introduced into the vacuum chamber 25 may be any of a gas, a liquid, and a solid, and may be applied to not only a single element but also a molecular compound and a mixture of a plurality of these.

Then, the group of the first ions 21 and the second ions 22 is extracted from the plasma and accelerated by the potential 27 applied between the vacuum chamber 25 and the extraction electrode 28 by the variable power source 47, and is introduced into the separation electromagnet 41 while proceeding toward the extraction electrode 28.

Fig. 2 is a mathematical expression for explaining the principle of ion separation in the ion generating apparatus 10 according to the embodiment. As shown in equation (1) of fig. 2, the charge amount q_xIs introduced into the ion generating region by the electric field voltage V_xThe formed electric field 27 is given energy W_x. Further, energy W given to the ion_xFrom the mass number A of the ion_xAnd the nuclear mean energy w. In addition, the charge amount q of the ion_xFrom elementary charge (elementary charge) e and the valence Z of the ion_xExpressed as the product of the two.

Here, as shown in formula (2) of fig. 2, the mass-to-charge ratio a of the first ions 21 is defined₁/Z₁The mass-to-charge ratio A of the second ions 22₂/Z₂And the elementary charge e, it is necessary to apply the electric field voltage V to the first ions 21 by the variable power supply 47 in order to impart the predetermined nuclear average energy w₁And applying an electric field voltage V by a variable power supply 47 in the case of the second ions 22₂Resulting in a potential 27. The average nuclear energy w given by the potential 27 is predetermined in accordance with the incident energy defined as the specification of the linear accelerator 42 at the subsequent stage.

The description is continued with reference to fig. 1. By applying an electric field voltage V from a variable power supply 47_xSwitch to V₁And V₂Then, the first ions 21 and the second ions 22 to which the predetermined nuclear average energy w is applied are introduced into the separation electromagnet 41 at different timings. In addition, the voltage V is accompanied by the electric field_x(V₁、V₂) The second ions 22 at the timing when the electric field voltage V1 is applied and the first ions 21 at the timing when the electric field voltage V2 is applied are also supplied with energy different from the predetermined average nuclear energy w and introduced into the separation electromagnet 41.

The separation electromagnet 41 passes the exciting current I_xMagnetic field B generated by flowing to the coil_xThis acts to impart a lorentz force and bend the orbit of the passing ion. When a first exciting current I is supplied to the separation electromagnet 41₁Then the first excitation magnetic field B₁Excited, if a second excitation current I is supplied₂Then the second excitation magnetic field B₂Is excited.

Energy W is imparted thereto as shown in the formulas (3) and (4) of FIG. 2_xMass M of_xAt a velocity v_xIs incident on the separation electromagnet 41. Here, the mass M of the ions_xFrom the mass m of the nucleus to the mass number A of the ion_xExpressed as the product of the two.

Further, as shown in (5) of FIG. 2, the ions will be driven from the magnetic field B_xThe received lorentz force F describes a circular orbit with a radius R as a centripetal force. Therefore, the mass-to-charge ratio A is given by setting x shown in (6) of FIG. 2 to 1 or 2 and giving a predetermined nuclear average energy w_x/Z_xThe first ions 21 and the second ions 22 can be separated by adjusting the separation electromagnet 41 to the magnetic field B_xAnd selectively passes through the separation electromagnet 41 of the curvature radius R.

The description is continued with reference to fig. 1. By separating the magnetic field B by electromagnet 41_xSwitch to B₁And B₂The first ions 21 and the second ions 22 to which the predetermined nuclear average energy w is given are introduced into the linear accelerator 42 at different timings. Then, the second ions 22 and the first ions 21 to which energies different from the predetermined nuclear average energy w are given do not reach the linear accelerator 42 because they draw orbits different from the curvature radius R of the separation electromagnet 41.

Here, as an example, methane gas (CH) is used for the raw material 37₄) The conditions of (a) were investigated. Consider methane gas (CH) in vacuum chamber 25₄) Is converted into plasma to generate carbon ions¹²C⁴⁺And hydrogen molecule ion H₂ ⁺The case (1). Carbon ion¹²C⁴⁺The mass number A is 12 and the valence number Z is 4, so the mass-to-charge ratioA/Z is 3. On the other hand, hydrogen molecule ion H₂ ⁺Since the mass number A is 2 and the valence number Z is 1, the mass-to-charge ratio A/Z is 2.

Carbon ion¹²C⁴⁺The electric field voltage required by the potential 27 to obtain the mean energy w of the nuclei is based on a variable power supply 47, from V_C4+This is expressed as 3w/e (formula (2) in fig. 2). And, likewise, hydrogen molecular ion H₂ ⁺The electric field voltage needed for obtaining the average energy w of the nucleus is V_H2+2 w/e. Therefore, the electric field voltage V is selectively applied to the vacuum chamber 25 at each timing by the variable power supply 47 and by a request signal from the electric field voltage adjusting section 33_C4+And electric field voltage V_H2+。

In addition, the carbon ion of the nuclear average energy w¹²C⁴⁺The separation electromagnet 41 at radius R is denoted B by the required excitation field_C4+3 × √ (2mw)/eR (formula (6) in fig. 2). On the other hand, hydrogen molecular ion H of nuclear average energy w₂ ⁺The separation electromagnet 41 at radius R is denoted B by the required excitation field_C4+2 × √ (2mw)/eR (formula (6) in fig. 2).

The linear accelerator 42 linearly arranges a plurality of accelerating electric fields adjacent to each other and having potential components in opposite directions, and repeatedly inverts the electric field direction at a high frequency, so that ions passing through the accelerating electric field are always accelerated only in the traveling direction. Then, the first ions 21 and the second ions 22 having the average nuclear energy w in accordance with the specification of the incident energy (spec) are incident on the linear accelerator 42, and the first ions and the second ions are respectively supplied with the high-frequency power P required for ions having the mass-to-charge ratio a/Z_rf1、P_rf2When turned on, acceleration is performed.

Since the first ions 21 and the second ions 22 have different mass-to-charge ratios a/Z, there is a high-frequency power P that is optimized_rf1、P_rf2In different cases. In this case, the setting change signal is transmitted from the power setting unit 39 of the linear accelerator 42 to the high-frequency power supply unit 43 at each timing. The high-frequency power supply unit 43 supplies the high-frequency power P set for each timing_rf1、P_rf2And output to the linear accelerator 42. The first ions 21 and the second ions 22 accelerated by the linear accelerator 42 are increased to energies determined by a specification (spec) and then emitted.

The control unit 30 includes at least a request signal receiving unit 31, an ion generation energy setting unit 32, an electric field voltage adjusting unit 33, an excitation current adjusting unit 35, a zero magnetic field feedback circuit 36, and a linear accelerator power setting unit 39. The control unit 30 can realize the functions of the respective elements by a processor of a general computer, and can be operated by a computer program.

Fig. 3 (a) is a graph showing the operation timing of the request signal receiving unit 31. In this way, the request signal receiving unit 31 receives the request signal 38, which triggers the ion generation in the ion generating apparatus 10, from an external timing system (not shown).

Fig. 3 (B) is a graph showing the operation timing of the electric field voltage adjusting unit 33. Thus, the field voltage regulator 33 regulates the first field voltage V₁As the initial setting value, the request signal 38 is received, and the application to the vacuum chamber 25 is performed only for a predetermined period T1. After the predetermined period T1 has elapsed, the first electric field voltage V is applied₁Changed into a second electric field voltage V₂. Then, when the next request signal 38 is received, the second field voltage V is applied₂Application to vacuum chamber 25 is performed only for a predetermined period T1. About making the first electric field voltage V₁To a second electric field voltage V₂The transition of (2) and the opposite transition are illustrated in a manner of being changed obliquely, but do not depend on the changing method.

After the predetermined period T1 has elapsed, the second electric field voltage V is set to be the second electric field voltage V₂Increased to change to the first electric field voltage V₁. Thus, by switching the first electric field voltage V₁And a second electric field voltage V₂By applying the electric field 27 to the vacuum chamber 25, the same predetermined nuclear average energy w is given to each of the first ions 21 and the second ions 22 at different timings. About making the first electric field voltage V₁To a second electric field voltage V₂The transition of (2) and the opposite transition are illustrated in a manner of being changed obliquely, but do not depend on the changing method.

Fig. 3 (C) is a graph showing the operation timing of the excitation current adjusting unit 35. In this way, when the predetermined delay time D2 elapses in response to the reception of the request signal 38, the excitation current adjustment unit 35 sets the first excitation current I only for the predetermined period T2₁Is supplied to the separation electromagnet 41. After a predetermined period T2 has elapsed, the first excitation current I is set₁Is set to 0. Here, the delay time D2 and the period T2 are set to a time sufficient for the set current value to stabilize in a flat state.

Then, the excitation current adjusting unit 35 sets the second excitation current I only for a predetermined period T2 after the delay time D2 elapses, when receiving the next request signal 38₂Is supplied to the separation electromagnet 41. After a predetermined period T2 has elapsed, the second excitation current I is set₂Is set to 0. In this way, the excitation current adjusting unit 35 switches the first excitation current I based on the intermittently received request signal 38₁And a second excitation current I₂And supplied to a coil (not shown) of the separation electromagnet 41.

Fig. 3 (D) is a graph showing the operation timing and output of the ion generation energy supply unit 23. In this way, the ion generation energy setting unit 32 transmits a timing signal for generating ions to the ion generation energy supply unit 23. After a lapse of a predetermined delay time D3, the ion generation energy setting unit 32 controls the ion generation energy supply unit 23 to operate at a set output time T3 and output intensity.

Energy is supplied from the ion generation energy supply unit 23 to the raw material 37 in the vacuum chamber 25, and the first ions 21 and the second ions 22 are generated at the output time T3 while being mixed. When the first ions 21 are selected, P is changed at each timing_MW1And P is changed at every timing when the second ions 22 are selected_MW2Thereby improving the respective ion generation efficiency.

Thus, the first switch is made based on the request signal 38 received intermittentlyElectric field voltage V₁And a second electric field voltage V₂And a first excitation current I₁And a second excitation current I₂Thus, the first ions 21 and the second ions 22 having the predetermined nuclear average energy w are output at different timings.

The first ions 21 or the second ions 22 thus output from the separation electromagnet 41 are incident on the linear accelerator 42 so as to have a predetermined nuclear average energy w. The electric power input to the linear accelerator 42 is the optimal high-frequency electric power P due to the difference in the mass-to-charge ratio a/Z between the first ions 21 and the second ions 22_rf1、P_rf2Different. Therefore, the power setting unit 39 of the linear accelerator 42 transmits a setting signal to the high-frequency power supply unit 43 at each timing.

Then, the high-frequency power supply unit 43 inputs the set high-frequency power P to the linear accelerator at each timing of the first ions 21 and the second ions 22_rf1、P_rf2(FIG. 3 (E)). Thus, in the linear accelerator 42, the first ions 21 and the second ions 22 having different mass-to-charge ratios a/Z are accelerated at each timing, and are emitted after being increased to an energy determined by a specification (spec).

Fig. 4 (a) shows a residual magnetic field B of the iron core based on the zero-field feedback circuit 36, the excitation power source 44, and the magnetic field detector 48 as an example of the operation of the separation electromagnet 41_rA diagram of the elimination process of (1). First exciting current I of zero field feedback circuit 36 in exciting current adjusting part 35₁And a second excitation current I₂At the time of switching, the residual magnetic field B is detected from the magnetic field detector 48_rThe excitation power source 44 is controlled so that the residual magnetic field B is generated_rTo zero, a degaussing current I is applied to the coil of the separation electromagnet 41_DA residual magnetic field B of an iron core (not shown) of the separation electromagnet 41 is set_rIs zero.

Fig. 4 (B) shows a residual magnetic field B of the iron core generated when the separation electromagnet 41 is excited in the case where the zero magnetic field feedback circuit 36 is not provided as a comparative example_rA graph of (a). The separating electromagnet 41 is excited with a first exciting current I₁After the magnetic field B1 is generated,even if the exciting current is restored to 0A, the residual magnetic field B due to hysteresis is generated_rAlso remains in the core, so the magnetic field B does not return to 0 tesla. After the residual magnetic field B_rWhen the separation electromagnet 41 is excited by directly switching to the second excitation current I2, the generated second magnetic field includes an error.

Thus, if the residual magnetic field B is reduced_rAs it is, the error of the small magnetic field generated after the large magnetic field is generated in the separation electromagnet 41 tends to increase. Therefore, when switching the excitation current, the residual magnetic field B is desired_rDisappears reliably.

Fig. 5 is a flowchart showing the control of the demagnetizing current by the zero-magnetic-field feedback circuit 36 that sets the residual magnetic field generated in the core to zero. When the supply of the excitation current is completed and the current value I becomes 0 ampere (S11), the residual magnetic field B of the iron core of the separation electromagnet 41 is measured by the magnetic field detector 48_r(S12). Then, a residual magnetic field B is obtained_rIs subjected to a residual magnetic field B_rComparison of the measured values of (A) to (B) (S13, S14). If the measured residual magnetic field B_rIf the absolute value of (b) exceeds the allowable threshold value P (yes at S14), it is determined as abnormal. The magnetic field detector 48 is gaussian distributed or the like.

Then, if the magnetic field B remains_rWhen the magnetic field in the positive direction exceeds the allowable threshold P (YES in S15), a demagnetizing current I is supplied to generate a magnetic field in the negative direction_D(S16), the residual magnetic field B is measured again_rAnd comparison with the allowable threshold value P is performed (S14). In addition, if the magnetic field B remains_rWhen the magnetic flux density exceeds the allowable threshold P in the negative direction (NO in S15, S17), a demagnetization current I is supplied to generate a magnetic field in the positive direction_D(S18), the residual magnetic field B is measured again_rAnd comparison with the allowable threshold value P is performed (S14). Then, the measured residual magnetic field B is measured_rIs within the range of the allowable threshold value P (no at S14), it is determined to be normal.

(second embodiment)

Next, a second embodiment of the present invention will be described with reference to fig. 6. Fig. 6 is a configuration diagram showing an ion generating apparatus 10B according to a second embodiment of the present invention. In fig. 6, portions having the same structure and function as those in fig. 1 are denoted by the same reference numerals, and redundant description thereof is omitted.

In the ion generating apparatus 10B according to the second embodiment, the extraction electrode 2 includes the first electrode 28a and the second electrode 28B. The first electrode 28a and the second electrode 28b are connected via a first fixed power supply 46 a. The second electrode 28b and the vacuum chamber 25 are connected via a second fixed power supply 46b and a switch 45.

The potential 27 is applied to a first electric field voltage V from the first electrode 28a to the second electrode 28b via a switch 45₁And a second electric field voltage V applied from the first electrode 28a to the vacuum chamber 25₂And performing switching operation.

The electric field voltage adjusting unit 33 can switch between a circuit via the second fixed power source 46b and a path not via the second fixed power source 46b by a switch 45 provided in a circuit connected from the second electrode 28b to the vacuum chamber 25. Thus, the electric field voltage adjusting unit 33 can switch the potential 27 to the first electric field voltage V by switching the switch 45₁And a second electric field voltage V₂Any one of them.

Fig. 7 is a configuration diagram of an accelerator system 40 to which the ion generating apparatus 10 of the embodiment is applied. In fig. 7, portions having the same structure and function as those in fig. 1 are denoted by the same reference numerals, and redundant description thereof is omitted. The accelerator system 40 includes a distributor 52 that distributes the first ions 21 and the second ions 22 accelerated by the linear accelerator 42 to different transport paths 53(53a, 53 b). An incidence device 54(54a, 54b) and a circular accelerator 51(51a, 51b) for accelerating ions are provided in front of the distributor 52, and are used by a utilization device 56(56a, 56b) via an emission device 55(55a, 55 b).

The first ions 21 and the second ions 22 are output from the linear accelerator 42 at different timings. The distributor 52 is guided to the first transport path 53a at the timing when the first ions 21 pass through, and is guided to the second transport path 53b at the timing when the second ions 22 pass through. The energy of the first ions 21 is further increased in the first circular accelerator 51a, and the energy of the second ions 22 is further increased in the second circular accelerator 51 b. Thus, a plurality of high-energy ion beams can be irradiated to the utilization devices 56(56a, 56b) by the 1 ion generating device 10.

According to the ion generating apparatus of at least one embodiment described above, by generating different types of ions, switching the application of the electric field voltage applied to the accelerating electric field, and switching the supply of the excitation current to the separating electromagnet, it is possible to output different types of ions having the same nuclear average energy at different timings using 1 ion source.

Several embodiments of the present invention have been described, but these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in other various manners, and various omissions, substitutions, changes, and combinations can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the invention described in the claims and the equivalent scope thereof.

The claims (modification according to treaty clause 19)

[ modified ] an ion generating device comprising:

an ion generation energy setting unit configured to discharge the first ions and the second ions generated by ionization in the vacuum chamber while switching the output intensity of the ion generation energy supply unit, from the opening while maintaining a mixed state;

an electric field voltage adjusting unit that switches a potential formed between the opening and the extraction electrode to a first electric field voltage and a second electric field voltage in accordance with the switching of the output intensity, and applies the first electric field voltage and the second electric field voltage to each of the first ions and the second ions with a predetermined same nuclear average energy; and

and an excitation current adjusting unit configured to switch a first excitation current and a second excitation current in accordance with the switching of the output intensity, supply the switched first excitation current and second excitation current to a coil of a separation electromagnet, and output the first ions and the second ions at different timings.

[ deletion ]

[ modified ] the ion generating apparatus according to claim 1 or 2, wherein,

a linear accelerator for accelerating the first ions and the second ions which are incident at different timings;

the ion generating device includes a power setting unit that switches the intensity of the radio-frequency power supplied to the linear accelerator in accordance with the timing.

4. The ion generating apparatus according to any one of claims 1 to 3,

and a zero magnetic field feedback circuit that applies a demagnetizing current to the coil when the first exciting current and the second exciting current are switched, thereby canceling a residual magnetic field of the core of the separation electromagnet.

5. The ion generating apparatus according to any one of claims 1 to 4,

a linear accelerator for accelerating the first ions and the second ions which are incident at different timings,

the same nuclear average energy corresponds to an incident energy specified as a specification of the linear accelerator.

[ modified ] the ion generation device according to any one of claims 1 to 5, wherein,

a linear accelerator for accelerating the first ions and the second ions which are incident at different timings,

the ion generating apparatus includes a distributor that distributes the first ions and the second ions accelerated by the linear accelerator to different transport paths.

7. The ion generating apparatus according to any one of claims 1 to 6,

the extraction electrode is composed of a first electrode and a second electrode,

the ion generating device includes a switch that switches the potential to a first electric field voltage applied from the first electrode to the second electrode and a second electric field voltage applied from the first electrode to the vacuum chamber.

[ modified ] an ion generating method comprising the steps of:

a step of discharging the first ions and the second ions generated by ionization in the vacuum chamber while switching the output intensity of the ion generation energy supply unit from the opening while maintaining a mixed state;

applying a potential formed between the opening and the extraction electrode by switching the potential to a first electric field voltage and a second electric field voltage in accordance with the switching of the output intensity, and applying a predetermined same nuclear average energy to each of the first ions and the second ions; and

and switching a first exciting current and a second exciting current according to the switching of the output intensity, and supplying the switched currents to a coil of a separation electromagnet, so that the first ions and the second ions are output at different timings.

[ modified ] an ion generation program for causing a computer to execute the steps of:

a step of discharging the first ions and the second ions generated by ionization in the vacuum chamber while switching the output intensity of the ion generation energy supply unit from the opening while maintaining a mixed state;

applying a potential formed between the opening and the extraction electrode by switching the potential to a first electric field voltage and a second electric field voltage in accordance with the switching of the output intensity, and applying a predetermined same nuclear average energy to each of the first ions and the second ions; and

switching a first exciting current and a second exciting current according to the switching of the output intensity, and supplying the switched currents to a coil of a separation electromagnet, so that the first ions and the second ions are output at different timings.