阅读说明：本技术 接合装置 (Joining device ) 是由 奥田健 石田淳一 井冈英俊 于 2020-03-30 设计创作，主要内容包括：提供接合装置,其使一对金属板彼此接合。接合装置具备多个处理部。多个处理部中的一个处理部是加热加压处理部。加热加压处理部具有加热部、加压部以及隔热部。加热部对一对金属板进行加热。加压部对一对金属板进行加压。隔热部具有配置于加热部与加压部之间的中间部件。中间部件具有凹部和贯通孔中的至少任意一方。(A joining device is provided which joins a pair of metal plates to each other. The bonding apparatus includes a plurality of processing units. One of the plurality of processing units is a heat and pressure processing unit. The heating and pressurizing treatment section has a heating section, a pressurizing section, and a heat insulating section. The heating unit heats the pair of metal plates. The pressing section presses the pair of metal plates. The heat insulating section has an intermediate member disposed between the heating section and the pressurizing section. The intermediate member has at least one of a recess and a through hole.)

1. A bonding apparatus for bonding a pair of metal plates to each other, comprising a plurality of processing units,

one of the plurality of processing sections is a heat and pressure processing section,

the heat and pressure treatment section includes:

a heating unit that heats the pair of metal plates;

a pressurizing unit that pressurizes the pair of metal plates; and

a heat insulating section having an intermediate member disposed between the heating section and the pressure section,

the intermediate member has at least one of a recess and a through hole.

2. The joining device of claim 1,

the intermediate member has a plurality of the recesses,

at least a part of the recesses are formed on at least one of a surface of the intermediate member facing one side in a facing direction in which the pair of metal plates face each other and a surface of the intermediate member facing the other side in the facing direction in which the pair of metal plates face each other, and extend in parallel,

in the at least a part of the concave portions, a spacing of the concave portions extending adjacently and in parallel is larger than a depth of the concave portions in an opposing direction in which a pair of the metal plates are opposed.

3. The joining device according to claim 1 or 2,

the recess includes:

a first recess formed in a surface of the intermediate member facing the other side in the facing direction in which the pair of metal plates face each other, and extending in a first direction; and

a second recess formed in a surface of the intermediate member facing one side in a facing direction in which the pair of metal plates face each other and extending in a second direction,

the first direction intersects the second direction when viewed from opposing directions in which a pair of the metal plates face each other.

4. The joining device according to any one of claims 1 to 3,

the intermediate member has the through hole that penetrates the intermediate member in a direction that intersects an opposing direction in which the pair of metal plates face each other.

5. The joining device of claim 4,

the intermediate member has a plurality of the through-holes,

at least a part of the through holes are arranged in parallel,

in the at least a part of the through holes, an interval between the adjacent and parallel through holes is larger than a width of the through holes in an opposing direction in which the pair of metal plates face each other.

6. The joining device according to any one of claims 1 to 5,

the heating unit has a first heating unit disposed at a position closer to one side of the pair of metal plates in an opposing direction in which the pair of metal plates oppose each other,

the heat insulating section has a first heat insulating section disposed on one side of the first heating section in a facing direction in which the pair of metal plates face each other,

the heat and pressure treatment section further includes a connection section that detachably connects one end portion of the first heating section in the facing direction in which the pair of metal plates face each other and the other end portion of the first heat insulating section in the facing direction in which the pair of metal plates face each other.

7. The joining device according to any one of claims 1 to 6,

the material of the intermediate member of the heat insulating portion is stainless steel.

8. The joining device according to any one of claims 1 to 7,

the heating and pressurizing treatment section further includes a cooling section for cooling the pressurizing section.

9. The joining device of claim 8,

the cooling unit is disposed between the heat insulating unit and the pressure unit.

Technical Field

The present invention relates to a joining device.

Background

Conventionally, various apparatuses for joining metals have been known. For example, there are the following engagement devices: the metal members are brought into contact with each other, and the metal members are pressurized and heated by a heating pressurizing means, and are heated by applying a current thereto in a state where the resistance is increased by the heating, whereby both the metal members are joined. (see, for example, Japanese patent laid-open publication No. 2002-254175)

Patent document 1: japanese laid-open patent publication No. 2002-254175

However, in addition to heating by the metal member to which electricity is applied, when the pressurizing means is heated, heat loss that does not contribute to heating of the metal member increases. Therefore, the cost required for the temperature rise of the pressurizing unit may increase.

Disclosure of Invention

The purpose of the present invention is to suppress the consumption of heat that does not contribute to the heating of a metal plate.

An exemplary joining device of the present invention joins a pair of metal plates to each other. The joining device includes a plurality of processing units. One of the plurality of processing units is a heat and pressure processing unit. The heating and pressurizing treatment section includes a heating section, a pressurizing section, and a heat insulating section. The heating unit heats the pair of metal plates. The pressing portion presses the pair of metal plates. The heat insulating section has an intermediate member disposed between the heating section and the pressing section. The intermediate member has at least one of a recess and a through hole.

According to the exemplary bonding apparatus of the present invention, it is possible to suppress the consumption of heat that does not contribute to the heating of the metal plates.

Drawings

Fig. 1 is a conceptual diagram illustrating an example of the internal structure of the joining device.

Fig. 2 is a perspective view of the engagement device.

Fig. 3A is a perspective view of the heat conductive member.

FIG. 3B is a sectional view taken along line A-A showing a structural example of the heat conductive member.

Fig. 3C is a cross-sectional view showing an example of a joining structure at a contact portion where a pair of metal plates contact each other.

Fig. 4 is a conceptual diagram illustrating a configuration example of the heat and pressure treatment unit.

Fig. 5 is a conceptual diagram illustrating a connection state between the heating unit and the heat insulating unit when the pressure is not applied.

Fig. 6 is a perspective view showing a structural example of an intermediate member of the heat insulating section.

Description of the reference symbols

100: an engaging device; 1: a processing unit; 11: a carrying-in processing part; 12: a heat and pressure treatment section; 121: a heating section; 121 a: an upper heating section; 121 b: a lower heating section; 122: a pressurization part; 122 a: an upper pressing portion; 122 b: a fixed part; 123: a heat insulating part; 123 a: an upper side heat insulating part; 123 b: a lower side heat insulating part; 1231: an intermediate member; 124: a cooling section; 124 a: an upper cooling part; 124 b: a lower cooling part; 125: a connecting portion; 125 a: a first connection portion; 125 b: a second connecting portion; 13: a pretreatment section; 14: a post-processing section; 15: a carrying-out processing part; 2: a working chamber; 21: a carrying-in port; 22: a carrying-out port; 5: a heat conductive member; 51: a pair of metal plates; 51 a: a heated portion; 51 b: a heat dissipating section; 510: a space; 511: a first metal plate; 512: a second metal plate; 513: a contact portion; 52: a working medium; 53: a core structure; 6: a heat generating source; cr: crystallizing; sd: a recess; h 1: depth; w 1: spacing; sd 1: a first recess; sd 2: a second recess; sh: a through hole; h 2: a width; w 2: spacing; sh 1: a first through hole; sh 2: a second through hole.

Detailed Description

The following describes exemplary embodiments with reference to the drawings.

In the present specification, the direction in which the first metal plate 511 and the second metal plate 512 face each other in the heat conduction member 5 and the joining device 100 is referred to as the "vertical direction". In the embodiment, the vertical direction is parallel to the vertical direction. The direction from the first metal plate 511 to the second metal plate 512 in the vertical direction is referred to as "upper", and the direction from the second metal plate 512 to the first metal plate 511 is referred to as "lower". In each component, an upper end is referred to as an "upper end", and a lower end is referred to as a "lower end". In addition, among the surfaces of the respective components, the surface facing upward is referred to as "upper surface", and the surface facing downward is referred to as "lower surface".

The matters described above are not strictly applied to the case of being incorporated into an actual apparatus.

< 1. embodiment >

< 1-1. coupling device

Fig. 1 is a conceptual diagram illustrating an example of the internal structure of the joining apparatus 100. Fig. 2 is a perspective view of the joining device 100. The joining device 100 joins the pair of metal plates 51 to each other. The details of the pair of metal plates 51 will be described later.

The bonding apparatus 100 includes a plurality of processing units 1 and a working chamber 2. The plurality of processing units 1 are disposed in a working chamber 2 filled with an inert gas such as nitrogen gas or argon gas.

In the present embodiment, one of the plurality of processing units 1 is a loading processing unit 11. In the carry-in processing unit 11, the pair of metal plates 51 that are not joined are carried into the working chamber 2 through the carry-in opening 21 formed in the side surface of the working chamber 2.

One processing unit 1 of the plurality of processing units 1 is a heat and pressure processing unit 12. The heat and pressure processing unit 12 heats and pressurizes the pair of metal plates 51. Thus, the heat and pressure treatment section 12 can join the contact portions 513 where the pair of metal plates 51 contact each other without using a joining material such as solder. Hereinafter, the process of heating and pressing the pair of metal plates 51 is referred to as "heating and pressing process". The details of the heat and pressure treatment section 12 will be described later.

One of the plurality of processing units 1 is a preprocessing unit 13. The pretreatment unit 13 performs a pretreatment of heat-pressure treatment on the pair of metal plates 51. The treatment performed in the pretreatment is not particularly limited. In the pretreatment, for example, the pair of metal plates 51 may be aligned. Alternatively, in the pretreatment, the pair of metal plates 51 may be subjected to machining such as cutting.

One of the plurality of processing units 1 is a post-processing unit 14. The post-treatment unit 14 performs post-treatment of heat-pressing the pair of metal plates 51. The treatment to be carried out in the post-treatment is not particularly limited. In the post-processing, for example, burrs or the like of a joint portion where the pair of metal plates 51 are joined to each other may be removed, or the pair of metal plates 51 may be polished.

One of the plurality of processing units 1 is a carry-out processing unit 15. In the carry-out processing unit 15, the pair of joined metal plates 51 are taken out through a carry-out opening 22 formed in the side surface of the working chamber 2.

In this way, the plurality of processing units 1 include the loading processing unit 11, the heating/pressurizing processing unit 12, the pre-processing unit 13, the post-processing unit 14, and the unloading processing unit 15. In other words, the bonding apparatus 100 includes the loading processing unit 11, the heating/pressurizing processing unit 12, the pre-processing unit 13, the post-processing unit 14, and the unloading processing unit 15. The bonding apparatus 100 sequentially conveys the pair of metal plates 51 to the carry-in processing unit 11, the preheating processing unit 13, the heating and pressurizing processing unit 12, the post-processing unit 14, and the carry-out processing unit 15 by a conveying mechanism (not shown).

< 1-2 > A pair of metal plates

Next, a description will be given of a pair of metal plates 51 and a joining structure thereof with reference to fig. 3A to 3C. Fig. 3A is a perspective view of the heat conductive member 5. Fig. 3B is a sectional view taken along line a-a showing a structural example of the heat conductive member 5. Fig. 3C is a cross-sectional view showing an example of a joint structure in the contact portion 513 where the pair of metal plates 51 contact each other.

As shown in fig. 3A and 3B, the pair of metal plates 51 has a first metal plate 511 and a second metal plate 512. A contact portion 513 where the first metal plate 511 and the second metal plate 512 contact each other is bonded by the bonding apparatus 100. In the present embodiment, the pair of metal plates 51 after bonding is used as a casing of the heat conductive member 5 such as a steam chamber. That is, the bonding apparatus 100 according to the present embodiment may be at least a part of an apparatus for manufacturing the heat conductive member 5. However, this example does not limit the use of the joining device 100.

The heat conductive member 5 is used for heat dissipation of the heat generating source 6, for example. As shown in fig. 3B, in the heat conduction member 5, the working medium 52 and the core structure 53 are enclosed in a sealed space 510 inside the pair of metal plates 51. The working medium 52 is vaporized by heat transferred from the heat generating source 6 in the vicinity of the heated portion 51a of the pair of metal plates 51 in contact with the heat generating source 6, and is evaporated in the space 510. The working medium 52 is cooled and liquefied in the heat radiating portion 51b of the pair of metal plates 51 which is apart from the heated portion 51 a. The core structure 53 returns the liquefied working medium 52 to the vicinity of the heated portion 51 a.

When the pair of metal plates 51 are joined, the metal structure of the pair of metal plates 51 at the contact portion 513 is gradually reconfigured by the heat and pressure treatment at the heat and pressure treatment portion 12. Here, it is assumed that the heat and pressure treatment is performed at a predetermined temperature and pressure for several hours or more, for example, the metal atoms of the first metal plate 511 diffuse into the metal structure of the second metal plate 512, and the metal atoms of the second metal plate 512 diffuse into the metal structure of the first metal plate 511. Further, the interface between the first metal plate 511 and the second metal plate 512 at the contact portion 513 is completely eliminated, and the two are joined.

In contrast, in the present embodiment, by adjusting the heat and pressure treatment conditions in the heat and pressure treatment unit 12, as shown in fig. 3C, the interface portion between the first metal plate 511 and the second metal plate 512 at the contact portion 513 disappears. As a result, a junction structure having the first region a1 and the second region a2 is formed in the contact portion 513. In the first region a1, the metal structure of the pair of metal plates 51 is reconstructed to generate crystal grains Cr. The crystal grains Cr are present so as to cross the metal structure of the first metal plate 511 and the metal structure of the second metal plate 512. On the other hand, in the second region a2, the metal structure is not reformed, and a contact surface where the first metal plate 511 and the second metal plate 512 contact each other remains. Such a bonding structure can be formed by more relaxed processing conditions, in particular, at lower temperature conditions and in a shorter processing time, as compared with the case where the interface at the contact portion 513 is completely disappeared.

The contact portion 513 having such a bonding structure has high shielding property. For example, in the first region a1, the interface between the first metal plate 511 and the second metal plate 512 disappears, and both are joined by strong metal bonding, and therefore permeation of a fluid such as the liquefied or vaporized working medium 52 is highly suppressed. In the second region a2, the first metal plate 511 and the second metal plate 512 are not completely separated but bonded by a weak metal bond, and therefore have a sufficient permeation suppression effect on liquid and high-temperature gas. Therefore, the space 510 sealed by the above-described joint structure has high sealing performance against a fluid such as the liquefied or vaporized working medium 52.

< 1-3 > heating and pressurizing treatment part

Next, the heat and pressure treatment section 12 will be described with reference to fig. 4. Fig. 4 is a conceptual diagram illustrating a configuration example of the heat and pressure treatment unit 12. Fig. 4 illustrates a state in which the heat and pressure processing unit 12 performs heat and pressure processing on the pair of metal plates 51.

As shown in fig. 4, the heat and pressure treatment section 12 includes a heating section 121, a pressure section 122, a heat insulating section 123, a cooling section 124, and a connecting section 125. In other words, the bonding apparatus 100 includes a heating unit 121, a pressurizing unit 122, a heat insulating unit 123, a cooling unit 124, and a connecting unit 125.

The heating unit 121 is disposed between the pair of metal plates 51 and the pressing unit 122. The heating unit 121 heats the pair of metal plates 51. The heating part 121 has an upper heating part 121a and a lower heating part 121 b. The upper heating section 121a is an example of the "first heating section" of the present invention. The upper heating portion 121a is disposed at a position closer to one side of the pair of metal plates 51 in the facing direction in which the pair of metal plates 51 face each other, and in the present embodiment, is disposed at a position higher than the pair of metal plates 51. The lower heating portion 121b is disposed below the pair of metal plates 51.

The pressing section 122 presses the pair of metal plates 51. The pressing section 122 particularly presses a contact section 513 where the pair of metal plates 51 contact each other. In the present embodiment, the pressing portion 122 includes an upper pressing portion 122a and a fixing portion 122 b. The upper pressing portion 122a is disposed above the upper heating portion 121a, and is vertically movable together with the upper heating portion 121 a. The fixing portion 122b is fixed below the lower heating portion 121 b.

The heat insulating portion 123 suppresses heat transfer from the heating portion 121 to the pressurizing portion 122. The heat insulating unit 123 includes an intermediate member 1231 disposed between the heating unit 121 and the pressurizing unit 122. As described later, the intermediate member 1231 has at least one of the recess Sd and the through-hole Sh. In this way, the cross-sectional area of the heat flow path from the heating unit 121 to the pressurizing unit 122 can be further reduced. Therefore, since a temperature increase of the pressurizing unit 122 due to heat transfer from the heating unit 121 to the pressurizing unit 122 can be suppressed, for example, an influence of heat on the pressurizing unit 122 and a sensor or the like disposed in the vicinity thereof can be reduced. This can improve the durability and life of the joining device 100. Further, since the thermal resistance of the heat insulating portion 123 can be increased, the consumption of heat that does not contribute to heating of the pair of metal plates 51 can be suppressed. Therefore, the cost required for raising the temperature of the heating portion 121 can be reduced, and therefore, the productivity of the bonding apparatus 100 can be improved. The intermediate member 1231 will be described in detail later.

The heat insulating portion 123 includes an upper heat insulating portion 123a and a lower heat insulating portion 123 b. The upper heat insulating portion 123a is an example of the "first heat insulating portion" of the present invention. The upper heat insulating portion 123a is disposed at a position on one side of the upper heating portion 121a in the opposing direction in which the pair of metal plates 51 oppose each other, and in the present embodiment, is disposed at a position above the upper heating portion 121 a. More specifically, the upper heat insulating portion 123a is disposed between the upper heating portion 121a and the upper pressing portion 122 a. The lower heat insulating portion 123b is disposed below the lower heating portion 121b, and more specifically, between the lower heating portion 121b and the fixing portion 122 b.

The cooling unit 124 cools the pressurization unit 122. This can more reliably suppress the temperature rise of the pressurization unit 122. In the present embodiment, the cooling unit 124 is a cooling jacket in which a cooling pipe through which a coolant flows inside a metal block such as stainless steel is disposed. The refrigerant may be a liquid other than water or a gas. The structure of the cooling unit 124 is not limited to the above example. For example, the cooling unit 124 may have a radiator in contact with the pressurizing unit 122, or may be an air blower for blowing air to the pressurizing unit 122.

As shown in fig. 4, the cooling unit 124 is preferably disposed between the pressurization unit 122 and the heat insulation unit 123. For example, one end of the cooling unit 124 is connected to the pressurizing unit 122 and the other end of the cooling unit 124 is connected to the heat insulating unit 123 in the vertical direction. The cooling unit 124 cools the surface of the pressurizing unit 122 facing the heating unit 121. More specifically, in fig. 4, the cooling portion 124 includes an upper cooling portion 124a and a lower cooling portion 124 b. The upper cooling part 124a is disposed between the upper pressing part 122a and the upper heat insulating part 123a, and cools the lower surface of the upper pressing part 122 a. The lower cooling portion 124b is disposed between the fixing portion 122b and the lower heat insulating portion 123b, and cools the upper surface of the fixing portion 122 b. The lower cooling portion 124b may be omitted. By disposing the cooling portion 124 between the pressing portion 122 and the heat insulating portion 123, the temperature rise of the pressing portion 122 can be more effectively and reliably suppressed or prevented, and therefore the durability and the life of the bonding apparatus 100 can be further improved. However, the arrangement of the cooling unit 124 is not limited to the example of fig. 4. For example, the cooling unit 124 may not be disposed between the pressurizing unit 122 and the heat insulating unit 123, and may cool a portion other than the surface of the pressurizing unit 122 facing the heating unit 121.

The connection portion 125 connects an upper end portion of the upper heating portion 121a on one side in the facing direction in which the pair of metal plates 51 face each other and an end portion of the upper heat insulating portion 123a on the other side in the facing direction in which the pair of metal plates 51 face each other so as to be separable. In the present embodiment, the connection portion 125 detachably connects the upper end portion of the upper heating unit 121a and the lower end portion of the upper heat insulating unit 123 a. For example, the connection portion 125 has a first connection portion 125a and a second connection portion 125 b. The upper end of the first connection portion 125a is connected to the upper heat insulating portion 123 a. The lower end of the first connecting portion 125a is connected to the second connecting portion 125b and is movable in the vertical direction with respect to the second connecting portion 125 b. The lower end of the second connecting portion 125b is connected to the upper heating portion 121 a.

As shown in fig. 4, since the upper end portion of the upper heating unit 121a and the lower end portion of the upper heat insulating unit 123a are separably connected by the connecting unit 125, when the pressing unit 122 presses the pair of metal plates 51, the upper end portion of the upper heating unit 121a and the lower end portion of the upper heat insulating unit 123a come into contact with each other, for example, by the first connecting unit 125a moving downward with respect to the second connecting unit 125 b. Thus, the heat and pressure treatment unit 12 can heat and press the pair of metal plates 51. On the other hand, when the pair of metal plates 51 are not pressurized by the pressurizing unit 122, for example, the first connection unit 125a moves upward relative to the second connection unit 125b, and as shown in fig. 5, the upper end portion of the upper heating unit 121a is separated downward from the lower end portion of the upper heat insulating unit 123 a. The upper heating unit 121a and the upper heat insulating unit 123a are separated from each other, so that heat transfer from the upper heating unit 121a to the pressurizing unit 122 via the upper heat insulating unit 123a can be prevented. Therefore, the temperature rise of the pressurizing portion 122 can be further suppressed.

< 1-4. intermediate part of heat insulating part >

Next, the structure of the intermediate member 1231 of the heat insulating part 123 will be described with reference to fig. 6. Fig. 6 is a perspective view showing a structural example of the intermediate member 1231 of the heat insulating part 123.

In the present embodiment, the material of the intermediate member 1231 of the heat insulating part 123 is stainless steel. Stainless steel has high-temperature strength and is inexpensive compared to ceramic materials for heat insulation such as zirconia. Therefore, by using stainless steel for the intermediate member 1231 of the heat insulating part 123, the high-temperature strength of the intermediate member 1231 in which the recess Sd and the through hole Sh are formed can be maintained, and the cost required for manufacturing the heat insulating part 123 can be reduced. The material of the intermediate member 1231 is not limited to the above example. For example, the intermediate member 1231 may be made of a material having high-temperature strength, and may be made of a metal other than stainless steel, a ceramic material for heat insulation such as zirconia, or the like.

< 1-4-1. concave part >

As shown in fig. 6, the intermediate member 1231 has a plurality of concave portions Sd. The concave portion Sd is disposed on the surface of the intermediate member 1231. In fig. 6, the number of the concave portions Sd is plural, but the number may be single. In fig. 6, the concave portions Sd are disposed only on the upper and lower surfaces of the intermediate member 1231, but may be disposed on the side surfaces of the intermediate member 1231.

At least a part of the concave portions Sd is formed on at least one of a surface of the intermediate member 1231 facing one side of the facing direction in which the pair of metal plates 51 face each other and a surface of the intermediate member 1231 facing the other side of the facing direction in which the pair of metal plates 51 face each other, and extends in parallel. For example, the surface of the intermediate member 1231 facing one side in the facing direction in which the pair of metal plates 51 face each other is the upper surface of the intermediate member 1231. The surface of the intermediate member 1231 facing the other side in the facing direction in which the pair of metal plates 51 face each other is the lower surface of the intermediate member 1231. In fig. 6, recess Sd includes first recess Sd1 and second recess Sd 2. The first recess Sd1 is formed on the other surface of the intermediate member 1231 facing the opposing direction in which the pair of metal plates 51 face each other, and extends in the first direction D1. The second recess Sd2 is formed on one surface of the intermediate member 1231 facing the opposing direction in which the pair of metal plates 51 oppose each other, and extends in the second direction D2. In fig. 6, a plurality of first recesses Sd1 extend in parallel in the first direction D1. The plurality of second recesses Sd2 extend in parallel in the second direction D2. However, the recess Sd is not limited to the example of fig. 6. Recess Sd may include only one of first recess Sd1 and second recess Sd 2. At least one of first recess Sd1 and second recess Sd2 may be single.

In at least a part of the recesses Sd, a distance w1 between the adjacent and parallel recesses Sd is larger than a depth h1 of the recesses Sd in the facing direction in which the pair of metal plates 51 face each other. In the present embodiment, the facing direction is the vertical direction. For example, the interval w1 of the adjacent and parallel extending first recesses Sd1 is larger than the depth h1 of the first recesses Sd1 in the up-down direction. The same applies to second recess Sd 2. By making the interval w1 between the adjacent and parallel extending recesses Sd larger than the depth h1 of the recesses Sd in the vertical direction, the portion between the parallel recesses Sd in the intermediate member 1231 is less likely to be deformed when the pair of metal plates 51 is pressurized by the pressurizing section 122. Therefore, the strength of the intermediate member 1231 can be suppressed from being reduced, and the thermal resistance of the heat insulating portion 123 can be improved.

Preferably, when viewed from the opposing direction in which the pair of metal plates 51 face each other, the first direction D1 in which the first recesses Sd1 extend intersects the second direction D2 in which the second recesses Sd2 extend. More preferably, as shown in fig. 6, the first direction D1 is perpendicular to the second direction D2 when viewed from the top-bottom direction. For example, when the first direction D1 is parallel to the second direction D2 when viewed from the top-bottom direction, the strength of the intermediate member 1231 in a specific direction such as the top-bottom direction perpendicular to both the first direction D1 and the second direction D2 may be reduced. Therefore, as described above, when viewed in the vertical direction, the first direction D1 intersects the second direction D2, and thus a decrease in strength of the intermediate member 1231 in a specific direction such as the vertical direction can be suppressed.

< 1-4-2. through hole >

Next, as shown in fig. 6, the intermediate member 1231 has a through hole Sh. The through hole Sh penetrates the intermediate member 1231 in a direction intersecting the facing direction in which the pair of metal plates 51 face each other, and penetrates the intermediate member 1231 in a direction perpendicular to the vertical direction in fig. 6. The through-holes Sh can reduce the cross-sectional area of the heat flow path in the vertical direction of the heat insulating portion 123 between the upper end portion and the lower end portion of the heat insulating portion 123, and therefore the thermal resistance of the heat insulating portion 123 can be further improved. In fig. 6, the through-hole Sh is provided in plural, but may be provided in a single form.

As described above, in fig. 6, the intermediate member 1231 has the plurality of through holes Sh, and at least some of the through holes Sh are arranged in parallel. For example, in fig. 6, the through holes Sh include a first through hole Sh1 and a second through hole Sh 2. The first through-hole Sh1 and the second through-hole Sh2 are formed in the side surface of the intermediate member 1231. The plurality of first through holes Sh1 extend in parallel in the first direction D1. The plurality of second through holes Sh2 extend in parallel in the second direction D2. However, the structure of the through-hole Sh is not limited to the example of fig. 6. The through-holes Sh may include only one of the first through-holes Sh1 and the second through-holes Sh 2. At least one of the first through-hole Sh1 and the second through-hole Sh2 may be a single through-hole.

In at least some of the through holes Sh, the interval w2 between adjacent through holes Sh extending in parallel is larger than the width h2 of the through holes Sh in the facing direction in which the pair of metal plates 51 face each other. For example, the interval w2 of the first through holes Sh1 extending adjacently and in parallel is larger than the width h2 of the first through holes Sh1 in the up-down direction. The same applies to the second through holes Sh 2. By making the interval w2 of the through holes Sh extending adjacently and in parallel larger than the vertical width h2 of the through holes Sh, the portion between the parallel through holes Sh in the intermediate member 1231 is less likely to be deformed when the pair of metal plates 51 is pressed by the pressing portion 122. Therefore, the strength of the heat insulating portion 123 can be suppressed from being reduced, and the thermal resistance of the heat insulating portion 123 can be improved.

The direction in which the first through holes Sh1 extend preferably intersects the direction in which the second through holes Sh2 extend when viewed in the vertical direction, and is more preferably perpendicular as shown in fig. 6. In this way, a decrease in strength of the intermediate member 1231 in a specific direction such as the vertical direction can be suppressed.

In fig. 6, the intermediate member 1231 has both the recess Sd and the through-hole Sh. However, the intermediate member 1231 is not limited to this example, and may have only the concave portion Sd or only the through hole Sh. The recess Sd and the through hole Sh may be disposed in the intermediate member 1231 to such an extent that the strength of the intermediate member 1231 can be maintained. More specifically, when the pressing portion 122 presses the pair of metal plates 51, the intermediate member 1231 may not be plastically deformed and the pressure applied to the pair of metal plates 51 may not be reduced.

< 2. other >)

The embodiments of the present invention have been described above. Further, those skilled in the art will appreciate that the above embodiments are illustrative, and various modifications can be made to the respective components and combinations of the respective processes, and the present invention is within the scope of the present invention.

Industrial applicability

The present invention can be used, for example, in an apparatus for heating and pressurizing a plurality of metals.