阅读说明：本技术 一种带材键合用楔形劈刀及其加工方法 (Wedge-shaped riving knife for bonding strips and machining method thereof ) 是由 谢兴铖 曹瑞军 林中坤 杨剑 梁秋实 史植广 刘皓 于 2020-12-30 设计创作，主要内容包括：本发明公开了一种带材键合用楔形劈刀及其加工方法。楔形劈刀为一体式结构,包括刀柄和刀头,刀柄为平缺口型圆柱,刀头为楔形结构,刀柄与刀头通过第一斜切面、第二斜切面、第三斜切面和平缺口面过渡；刀柄中心设有贯通的直引线圆孔,刀头设有贯通的斜引线方孔,刀头包括第一斜切面、平面、第三斜切面、第四斜切面和端面；端面包括前圆角面、键合面、后圆角面、沟槽和第一斜面,键合面开设有一个沟槽。本发明提供了一种带材键合用楔形劈刀及其加工方法,适用于窄间距、高密度、深腔多腔的带材的热超声楔形焊键合,满足带材穿孔顺利、超声传递无振动、键合强度符合使用要求、使用寿命长,为微波器件、微波芯片组装的引线键合提供了关键工具保障。(The invention discloses a wedge-shaped riving knife for bonding strips and a processing method thereof. The wedge-shaped cleaver is of an integrated structure and comprises a knife handle and a knife head, wherein the knife handle is a flat notch type cylinder, the knife head is of a wedge-shaped structure, and the knife handle and the knife head are in transition through a first oblique section, a second oblique section, a third oblique section and a flat notch plane; a through straight lead round hole is formed in the center of the cutter handle, a through inclined lead square hole is formed in the cutter head, and the cutter head comprises a first inclined plane, a third inclined plane, a fourth inclined plane and an end face; the end face comprises a front fillet face, a bonding face, a rear fillet face, a groove and a first inclined plane, and the groove is formed in the bonding face. The invention provides a wedge-shaped chopper for strip bonding and a processing method thereof, which are suitable for thermal ultrasonic wedge-shaped welding bonding of strips with narrow spacing, high density, deep cavity and multiple cavities, meet the requirements of smooth strip perforation, no vibration in ultrasonic transmission, high bonding strength meeting the use requirement and long service life, and provide a key tool guarantee for the wire bonding of microwave device and microwave chip assembly.)

1. A wedge-shaped riving knife for bonding strips is of an integrated structure, is 12-40mm long and comprises a knife handle (1) and a knife head (2), and is characterized in that the knife handle (1) is a flat notch type cylinder, the knife head (2) is of a wedge-shaped structure, and the knife handle (1) and the knife head (2) are in transition through a first inclined cutting surface (121), a second inclined cutting surface (122), a third inclined cutting surface (123) and a flat notch surface (124); a through straight lead round hole (11) is formed in the center of the cutter handle (1), and a through inclined lead square hole (24) is formed in the cutter head (2); the tool bit (2) comprises a first chamfer plane (121), a plane (23), a third chamfer plane (123), a fourth chamfer plane (21) and an end face (22), the end face (22) comprises a front round corner plane (221), a bonding plane (222), a rear round corner plane (223), a first groove (224) and a first inclined plane (225), and the bonding plane (222) is provided with a second groove (2221).

2. The wedge-shaped riving knife for bonding strips as claimed in claim 1, wherein the included angles of the first chamfer plane (121), the second chamfer plane (122) and the third chamfer plane (123) with the knife handle (1) are consistent, and the included angles are 2-30 degrees.

3. Wedge-shaped riving knife for strip bonding according to claim 1, characterized in that the diameter of the knife handle (1) is 1.5-2.5mm, the diameter tolerance is ≦ 5 μm, the radial length of the flat notch is 1.3-2.3mm, and the radial length tolerance of the flat notch is (-0.01, 0).

4. The wedge chopper for bonding strips as claimed in claim 1, wherein the diameter of the straight lead circular hole (11) is 0.20-0.55mm, the dimensional tolerance is less than or equal to ± 5 μm, the concentricity is less than or equal to ± 5 μm, and the surface roughness is less than or equal to 1.0 μm; the width of the inclined lead square hole (24) is 0.06-0.25mm, the thickness is 0.04-0.10mm, the included angle between the inclined lead square hole (24) and the cutter handle (1) is 25-60 degrees, the dimensional tolerance is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the entrance of the oblique lead square hole (24) is isosceles trapezoid, four sides of the oblique lead square hole are parallel to four sides of the plane (23), the included angle between the entrance surface where two sides of the entrance vertical to the axis of the tool holder (1) are located and the oblique lead square hole (24) is 10-70 degrees, and the included angle between the entrance surface where two sides of the entrance parallel to the intersecting line of the oblique planes are located and the oblique lead square hole (24) is 5-45 degrees.

5. The wedge-shaped riving knife for bonding strips according to claim 1, wherein the machined blank of the wedge-shaped riving knife is tungsten steel, titanium alloy, high-speed steel, hardened steel or a ceramic round bar with a central through hole with a bore diameter of 0.15-0.50 mm.

6. The wedge chopper for bonding strips of claim 1, wherein the fillet radius of the front fillet surface (221) is 1-50 μm and the fillet radius of the rear fillet surface (223) is 1-50 μm.

7. Wedge chopper for bonding strips according to claim 1, characterized in that the bonding surface (222) has a width dimension of 0.10-0.25mm, a length dimension of 0.05-0.25mm and a surface roughness of 0.8 μm or less.

8. The wedge chopper for bonding strips according to claim 1, wherein the second groove (2221) is a circular arc groove or a V-shaped groove, wherein the circular arc groove has a circular arc radius of 0.01-0.10mm and a width of 0.02-0.15 mm; the included angle of the grooves of the V-shaped grooves is 30-150 degrees, and the width of the grooves is 0.02-0.15 mm.

9. The wedge chopper of claim 1, wherein the first groove (224) comprises a second inclined surface (2241), a rounded surface (2242), and a third inclined surface (2243), wherein the second inclined surface (2241) and the third inclined surface (2243) are perpendicular to each other, and the angle between the second inclined surface (2241) and the bonding surface (222) is 30 ° -75 °; the fillet radius of the fillet surface (2242) is 0.02-0.10 mm.

10. The method of processing a wedge-shaped riving knife for strip bonding according to any of claims 1 to 9, comprising the steps of:

s1) carrying out fine grinding on the tungsten steel, titanium alloy, high-speed steel, hardened steel or ceramic round bar with a central through hole by using a centerless grinding machine;

s2) cutting a flat notch riving knife cylinder by adopting a five-axis numerical control machining center;

s3) grinding a first chamfer plane (121), a second chamfer plane (122), a plane (23), a third chamfer plane (123) and a fourth chamfer plane (21) by using a high-precision grinding machine;

s4) machining a front fillet surface (221), a bonding surface (222), a rear fillet surface (223), a first groove (224) and a first inclined surface (225) by adopting high-precision electric spark equipment or a picosecond laser;

s5) adopting high-precision electric spark equipment or picosecond laser to carry out center hole reaming and micropore machining, and machining a straight lead round hole (11) and an inclined lead square hole (24).

Technical Field

The invention belongs to the field of microelectronic tools, and particularly relates to a wedge-shaped riving knife for strip bonding and a processing method thereof.

Background

The wire bonding is to transmit ultrasonic energy by using a wedge-shaped chopper, so that a bonding wire penetrating through the wedge-shaped chopper generates pressure and friction between a tool bit of the chopper and a bonding pad metal, thereby being tightly welded with the bonding pad of the substrate, and realizing the electrical interconnection between the chip and the substrate and the information intercommunication between the chips. With the continuous reduction of the line width of the integrated circuit, the line width reaches from 0.057 μm in 2008 to 0.018 μm in 2018. In response, the pad pitch of wire bonding is reduced from 35 μm to 20 μm, which puts demands on fine pitch and high reliability on the wire bonding technology. Due to the characteristics of small lead area at the wedge-shaped welding point, small pad distance, low lead radian and the like, the method is more suitable for high-density chip interconnection. Therefore, wedge cleavers have become an important tool in wire bonding processes in various microwave device processing links.

Especially for high working frequency and high reliability microwave devices, the micro-assembly of high-density, multi-layer and multi-chip assembly needs to be realized through the strip, which provides a new challenge for the development of strip wedge-shaped welding cleavers with micro-nano square hole structures. How to provide a wedge cleaver that is applicable to the hot ultrasonic wedge bonding of the strip of narrow interval, high density, deep chamber multicavity, satisfies the strip and perforates smoothly, the supersound transmission does not have vibration, bonding strength accords with operation requirement and long service life's needs, provides key tool guarantee for the wire bonding of microwave device, microwave chip equipment, has become the problem that needs to solve urgently.

Disclosure of Invention

In order to overcome a series of defects in the prior art, the invention aims to solve the problems and provide a wedge-shaped riving knife for bonding strips, which is of an integrated structure and has a length of 12-40mm, and comprises a knife handle 1 and a knife head 2, wherein the knife handle 1 is a flat notch type cylinder, the knife head 2 is of a wedge-shaped structure, and the knife handle 1 and the knife head 2 are transited through a first inclined cut surface 121, a second inclined cut surface 122, a third inclined cut surface 123 and a flat notch surface 124; a through straight lead round hole 11 is formed in the center of the tool holder 1, and a through inclined lead square hole 24 is formed in the tool bit 2; the tool bit 2 comprises a first chamfer 121, a plane 23, a third chamfer 123, a fourth chamfer 21 and an end surface 22, wherein the end surface 22 comprises a front fillet 221, a bonding surface 222, a rear fillet 223, a first groove 224 and a first inclined surface 225, and the bonding surface 222 is provided with a second groove 2221.

Preferably, the included angles between the first chamfer surface 121, the second chamfer surface 122 and the third chamfer surface 123 and the tool shank 1 are consistent, and the included angles are 2-30 degrees.

Preferably, the diameter of the tool shank 1 is 1.5-2.5mm, the diameter tolerance is less than or equal to +/-5 mu m, the radial length of the flat notch is 1.3-2.3mm, and the radial length tolerance of the flat notch is (-0.01, 0).

Preferably, the diameter of the straight lead circular hole 11 is 0.20-0.55mm, the dimensional tolerance is less than or equal to +/-5 mu m, the concentricity is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the width of the inclined lead square hole 24 is 0.06-0.25mm, the thickness is 0.04-0.10mm, the included angle between the inclined lead square hole 24 and the cutter handle 1 is 25-60 degrees, the dimensional tolerance is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the entrance of the oblique lead square hole 24 is isosceles trapezoid, four sides of the entrance are parallel to four sides of the plane 23, the included angle between the entrance surface where two sides of the entrance perpendicular to the axis of the tool holder 1 are located and the oblique lead square hole 24 is 10-70 degrees, and the included angle between the entrance surface where two sides of the entrance parallel to the intersection line of the oblique planes and the oblique lead square hole 24 is 5-45 degrees.

Preferably, the processing blank of the wedge-shaped riving knife is tungsten steel, titanium alloy, high-speed steel, hardened steel or a ceramic round bar with a central through hole with the aperture of 0.15-0.50 mm.

Preferably, the fillet radius of the front fillet surface 221 is 1 to 50 μm, and the fillet radius of the rear fillet surface 223 is 1 to 50 μm.

Preferably, the bonding surface 222 has a width dimension of 0.10-0.25mm, a length dimension of 0.05-0.25mm, and a surface roughness of less than or equal to 0.8 μm.

Preferably, the second groove 2221 is an arc groove or a V-shaped groove, wherein the arc radius of the arc groove is 0.01-0.10mm, and the width is 0.02-0.15 mm; the included angle of the grooves of the V-shaped grooves is 30-150 degrees, and the width of the grooves is 0.02-0.15 mm.

Preferably, the first groove 224 includes a second inclined surface 2241, a rounded surface 2242 and a third inclined surface 2243, the second inclined surface 2241 is perpendicular to the third inclined surface 2243, and the angle between the second inclined surface 2241 and the bonding surface 222 is 30 ° to 75 °; the fillet radius of the fillet surface 2242 is 0.02-0.10 mm.

The invention also aims to provide a processing method of the wedge-shaped riving knife for bonding the strip, which is characterized by comprising the following steps:

s1) carrying out fine grinding on the tungsten steel, titanium alloy, high-speed steel, hardened steel or ceramic round bar with a central through hole by using a centerless grinding machine;

s2) cutting a flat notch riving knife cylinder by adopting a five-axis numerical control machining center;

s3) grinding the first chamfer 121, the second chamfer 122, the plane 23, the third chamfer 123 and the fourth chamfer 21 by using a high-precision grinder;

s4) processing the front fillet 221, the bonding surface 222, the rear fillet 223, the first groove 224 and the first inclined surface 225 by using high-precision electric discharge equipment or a picosecond laser;

s5) adopting high-precision electric spark equipment or picosecond laser to carry out center hole reaming and micropore machining, and machining a straight lead round hole 11 and an inclined lead square hole 24.

Compared with the prior art, the invention has the following beneficial effects:

1) the wedge-shaped cleaver provided by the invention is suitable for thermal ultrasonic wedge-shaped welding bonding of strips with narrow spacing, high density, deep cavity and multiple cavities and the width of 60-250 mu m, and simultaneously meets the requirements of smooth strip perforation, no vibration in ultrasonic transmission, bonding strength meeting the use requirement and long service life, thereby providing a key tool guarantee for the wire bonding of microwave device and microwave chip assembly;

2) according to the machining method provided by the invention, the end face of the cutter head, the straight lead round hole and the inclined lead square hole are machined by adopting high-precision electric spark equipment or a picosecond laser, so that the key technology of machining the micro-nano structure and the micro-nano square hole of metal or ceramic material is broken through, and the key machining technology guarantee is provided for the microelectronic tool with a complex and fine structure.

Drawings

FIG. 1 is a schematic view of the overall structure of a wedge-shaped riving knife for strip bonding according to the present invention;

FIG. 2 is a schematic cross-sectional view of a wedge-shaped riving knife for strip bonding in accordance with the present invention;

FIG. 3 is one of the schematic structural views of a tool tip of a wedge-shaped riving knife for strip bonding of the present invention;

FIG. 4 is a second schematic view of the structure of the tool bit of the wedge-shaped riving knife for strip bonding according to the present invention;

FIG. 5 is a third schematic view of the tool tip of a wedge-shaped riving knife for strip bonding in accordance with the present invention;

FIG. 6 is a fourth schematic view of the structure of the tool bit of the wedge-shaped riving knife for strip bonding of the present invention;

FIG. 7 is a fifth schematic view of the structure of the tool bit of the wedge-shaped riving knife for strip bonding of the present invention.

The reference numbers in the figures are:

1-knife handle, 11-straight lead wire round hole, 121-first chamfer plane, 122-second chamfer plane, 123-third chamfer plane, 124-flat notch plane, 2-knife head, 21-fourth chamfer plane, 22-end plane, 221-front fillet plane, 222-bonding plane, 2221-second groove, 223-back fillet plane, 224-first groove, 2241-second slope plane, 2242-fillet plane, 2243-third slope plane, 225-first slope plane, 23-plane and 24-inclined lead wire square hole.

Detailed Description

In order to make the implementation objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the embodiments of the present invention. In the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The described embodiments are only some, but not all embodiments of the invention.

All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The embodiments and the directional terms described below with reference to the drawings are exemplary and intended to be used in the explanation of the invention, and should not be construed as limiting the invention.

The wedge-shaped riving knife for bonding a strip and the processing method thereof according to the present invention will be described in detail with reference to the accompanying drawings.

Referring to the attached drawings 1-7, a wedge-shaped riving knife for strip bonding is of an integral structure, is 12-40mm long, and comprises a knife handle 1 and a knife head 2, and is characterized in that the knife handle 1 is a flat notch type cylinder, the knife head 2 is of a wedge-shaped structure, and the knife handle 1 and the knife head 2 are in transition through a first oblique plane 121, a second oblique plane 122, a third oblique plane 123 and a flat notch plane 124; a through straight lead round hole 11 is formed in the center of the tool holder 1, and a through inclined lead square hole 24 is formed in the tool bit 2; the tool bit 2 comprises a first chamfer 121, a plane 23, a third chamfer 123, a fourth chamfer 21 and an end surface 22, wherein the end surface 22 comprises a front fillet 221, a bonding surface 222, a rear fillet 223, a first groove 224 and a first inclined surface 225, and the bonding surface 222 is provided with a second groove 2221.

Preferably, the included angles between the first chamfer surface 121, the second chamfer surface 122 and the third chamfer surface 123 and the tool shank 1 are consistent, and the included angles are 2-30 degrees.

Preferably, the diameter of the tool shank 1 is 1.5-2.0mm, the diameter tolerance is less than or equal to +/-5 mu m, the radial length of the flat notch is 1.3-2.3mm, and the radial length tolerance of the flat notch is (-0.01, 0).

Preferably, the diameter of the straight lead circular hole 11 is 0.20-0.55mm, the dimensional tolerance is less than or equal to +/-5 mu m, the concentricity is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the width of the inclined lead square hole 24 is 0.06-0.25mm, the thickness is 0.04-0.10mm, the included angle between the inclined lead square hole 24 and the cutter handle 1 is 25-60 degrees, the dimensional tolerance is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the entrance of the oblique lead square hole 24 is isosceles trapezoid, four sides of the entrance are respectively parallel to four sides of the plane 23, the included angle between the entrance plane where two sides of the entrance vertical to the axis of the tool holder 1 are positioned and the oblique lead square hole 24 is 10-70 degrees, and the included angle between the entrance plane where two sides of the entrance parallel to the intersection line of the oblique planes and the oblique lead square hole 24 is 5-45 degrees

Preferably, the processing blank of the wedge-shaped riving knife is tungsten steel, titanium alloy, high-speed steel, hardened steel or a ceramic round bar with a central through hole with the aperture of 0.15-0.50 mm.

Preferably, the fillet radius of the front fillet surface 221 is 1 to 50 μm, and the fillet radius of the rear fillet surface 223 is 1 to 50 μm.

Preferably, the bonding surface 222 has a width dimension of 0.10-0.25mm, a length dimension of 0.05-0.25mm, and a surface roughness of less than or equal to 0.8 μm.

Preferably, the second groove 2221 is an arc groove or a V-shaped groove, wherein the arc radius of the arc groove is 0.01-0.10mm, and the width is 0.02-0.15 mm; the included angle of the grooves of the V-shaped grooves is 30-150 degrees, and the width of the grooves is 0.02-0.15 mm.

Preferably, the first groove 224 includes a second inclined surface 2241, a rounded surface 2242 and a third inclined surface 2243, the second inclined surface 2241 is perpendicular to the third inclined surface 2243, and the angle between the second inclined surface 2241 and the bonding surface 222 is 30 ° to 75 °; the fillet radius of the fillet surface 2242 is 0.02-0.10 mm.

The invention also aims to provide a processing method of the wedge-shaped riving knife for bonding the strip, which is characterized by comprising the following steps:

s1) carrying out fine grinding on the tungsten steel, titanium alloy, high-speed steel, hardened steel or ceramic round bar with a central through hole by using a centerless grinding machine;

s2) cutting a flat notch riving knife cylinder by adopting a five-axis numerical control machining center;

s3) grinding the first chamfer 121, the second chamfer 122, the plane 23, the third chamfer 123 and the fourth chamfer 21 by using a high-precision grinder;

s4) processing the front fillet 221, the bonding surface 222, the rear fillet 223, the first groove 224 and the first inclined surface 225 by using high-precision electric discharge equipment or a picosecond laser;

s5) adopting high-precision electric spark equipment or picosecond laser to carry out center hole reaming and micropore machining, and machining a straight lead round hole 11 and an inclined lead square hole 24.

The present invention will be described in further detail below with reference to the accompanying drawings, which illustrate preferred embodiments of the present invention.

Example 1:

the wedge-shaped riving knife with the integral structure for the strip bonding is 12mm in length and comprises a knife handle 1 and a knife head 2, wherein the knife handle 1 and the knife head 2 are in transition through a first chamfer plane 121, a second chamfer plane 122, a third chamfer plane 123 and a plane notch plane 124, the included angles of the first chamfer plane 121, the second chamfer plane 122 and the third chamfer plane 123 and the knife handle 1 are consistent, and the included angle is 2 degrees; the knife handle 1 is a flat notch type cylinder, the diameter of the knife handle is 1.5mm, the diameter tolerance of the knife handle is less than or equal to +/-5 mu m, the radial length of the flat notch is 1.3mm, and the radial length tolerance of the flat notch is (-0.01, 0); a through straight lead round hole 11 is arranged in the center of the knife handle 1, the diameter of the through straight lead round hole is 0.20mm, the dimensional tolerance is less than or equal to +/-5 mu m, the concentricity is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the tool bit 2 is of a wedge-shaped structure and consists of a first inclined plane 121, a plane 23, a third inclined plane 123, a fourth inclined plane 21 and an end face 22; the end surface 22 is composed of a front fillet surface 221, a bonding surface 222, a rear fillet surface 223, a first groove 224 and a first inclined surface 225, wherein the bonding surface 222 comprises a second groove 2221; the tool bit 2 is provided with a through inclined lead square hole 24, the size (width multiplied by thickness) of the through inclined lead square hole is 0.06mm multiplied by 0.04mm, the included angle between the tool bit and the tool holder 1 is 60 degrees, the size precision is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the entrance of the oblique lead square hole is isosceles trapezoid, the four sides of the isosceles trapezoid are respectively parallel to the four sides of the plane 23, the included angle between the entrance plane where the two sides of the entrance perpendicular to the axis of the knife handle 1 are positioned and the oblique lead square hole 24 is 10 degrees, and the included angle between the entrance plane where the two sides of the entrance parallel to the intersection line of the inclined planes and the oblique lead square hole 24 is 5 degrees

The processing blank of the wedge-shaped riving knife is a tungsten steel round bar with a central through hole, and the aperture of the central through hole is 0.15 mm; the fillet radius of the front fillet surface 221 is 1 μm, and the fillet radius of the rear fillet surface 223 is 1 μm; the bonding surface 222 has a width (parallel to the second groove 2221) of 0.10mm, a length (perpendicular to the second groove 2221) of 0.05mm, and a surface roughness of 0.8 μm or less; the second groove 2221 is an arc groove, the arc radius of which is 0.01mm, and the width of which is 0.02 mm; the first groove 224 is composed of a second inclined surface 2241, a round corner surface 2242 and a third inclined surface 2243, the second inclined surface 2241 and the third inclined surface 2243 are perpendicular to each other, and an included angle between the second inclined surface 2241 and the bonding surface 222 is 30 degrees; the fillet radius of the fillet surface 2242 is 0.02 mm.

The processing method of the wedge-shaped riving knife comprises the following steps of 1) carrying out accurate grinding on the outer circle of tungsten steel with a central hole by adopting a centerless grinder; 2) cutting a flat notch riving knife cylinder by adopting a five-axis numerical control machining center; 3) grinding a first chamfer 121, a second chamfer 122, a plane 23, a third chamfer 123 and a fourth chamfer 21 by using a high-precision grinding machine; 4) processing a front fillet surface 221, a bonding surface 222, a rear fillet surface 223, a first groove 224 and a first inclined surface 225 by adopting high-precision electric spark equipment or a picosecond laser; 5) and (3) carrying out center hole reaming and micropore machining by adopting high-precision electric spark equipment or picosecond laser to machine a straight lead round hole 11 and an inclined lead square hole 24.

Example 2:

the wedge-shaped riving knife with the integral structure for the strip bonding is 40mm in length and comprises a knife handle 1 and a knife head 2, wherein the knife handle 1 and the knife head 2 are in transition through a first chamfer plane 121, a second chamfer plane 122, a third chamfer plane 123 and a plane notch plane 124, the included angles of the first chamfer plane 121, the second chamfer plane 122 and the third chamfer plane 123 and the knife handle 1 are the same, and the included angle is 30 degrees; the knife handle 1 is a flat notch type cylinder, the diameter of the knife handle is 2.5mm, the diameter tolerance of the knife handle is less than or equal to +/-5 mu m, the radial length of the flat notch is 2.3mm, and the radial length tolerance of the flat notch is (-0.01, 0); a through straight lead round hole 11 is arranged in the center of the knife handle 1, the diameter of the through straight lead round hole is 0.55mm, the dimensional tolerance is less than or equal to +/-5 mu m, the concentricity is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the tool bit 2 is of a wedge-shaped structure and consists of a first inclined plane 121, a plane 23, a third inclined plane 123, a fourth inclined plane 21 and an end face 22; the end surface 22 is composed of a front fillet surface 221, a bonding surface 222, a rear fillet surface 223, a first groove 224 and a first inclined surface 225, wherein the bonding surface 222 comprises a second groove 2221; the tool bit 2 is provided with a through inclined lead square hole 24, the size (width multiplied by thickness) of the through inclined lead square hole is 0.25mm multiplied by 0.10mm, the included angle between the tool bit and the tool holder 1 is 25 degrees, the size precision is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the entrance of the oblique lead square hole is isosceles trapezoid, the four sides of the isosceles trapezoid are parallel to the four sides of the plane 23, the included angle between the entrance plane where the two sides of the entrance perpendicular to the axis of the tool holder 1 are positioned and the oblique lead square hole 24 is 70 degrees, and the included angle between the entrance plane where the two sides of the entrance parallel to the intersection line of the inclined planes and the oblique lead square hole 24 is 45 degrees

The processing blank of the wedge-shaped riving knife is a hardened steel round bar with a central through hole, and the aperture of the central through hole is 0.50 mm; the fillet radius of the front fillet surface 221 is 50 μm, and the fillet radius of the rear fillet surface 223 is 50 μm; the bonding surface 222 has a width (parallel to the second groove 2221) of 0.25mm, a length (perpendicular to the second groove 2221) of 0.25mm, and a surface roughness of 0.8 μm or less; the second grooves 2221 are V-shaped grooves, the included angle of the grooves of the V-shaped grooves is 150 °, and the width is 0.15 mm; the first groove 224 is formed by a second inclined surface 2241, a round corner surface 2242 and a third inclined surface 2243, the second inclined surface 2241 and the third inclined surface 2243 are perpendicular to each other, and an included angle between the second inclined surface 2241 and the bonding surface 222 is 75 degrees; the fillet radius of the fillet surface 2242 is 0.10 mm.

The processing method adopted by the wedge-shaped riving knife comprises the following steps of 1) carrying out accurate grinding on an excircle of titanium alloy with a central hole by adopting a centerless grinder; 2) cutting a flat notch riving knife cylinder by adopting a five-axis numerical control machining center; 3) grinding a first chamfer 121, a second chamfer 122, a plane 23, a third chamfer 123 and a fourth chamfer 21 by using a high-precision grinding machine; 4) processing a front fillet surface 221, a bonding surface 222, a rear fillet surface 223, a first groove 224 and a first inclined surface 225 by adopting high-precision electric spark equipment or a picosecond laser; 5) and (3) carrying out center hole reaming and micropore machining by adopting high-precision electric spark equipment or picosecond laser to machine a straight lead round hole 11 and an inclined lead square hole 24.

Example 3:

the wedge-shaped riving knife with the integral structure for the strip bonding is 19.05mm in length and comprises a knife handle 1 and a knife head 2, wherein the knife handle 1 and the knife head 2 are in transition through a first chamfer plane 121, a second chamfer plane 122, a third chamfer plane 123 and a plane notch plane 124, the included angles of the first chamfer plane 121, the second chamfer plane 122 and the third chamfer plane 123 and the knife handle 1 are consistent, and the included angle is 10 degrees; the knife handle 1 is a flat notch type cylinder, the diameter of the knife handle is 1.586mm, the diameter tolerance of the knife handle is less than or equal to +/-5 mu m, the radial length of the flat notch is 1.5mm, and the radial length tolerance of the flat notch is (-0.01, 0); a through straight lead round hole 11 is arranged in the center of the knife handle 1, the diameter of the through straight lead round hole is 0.45mm, the dimensional tolerance is less than or equal to +/-5 mu m, the concentricity is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the tool bit 2 is of a wedge-shaped structure and consists of a first inclined plane 121, a plane 23, a third inclined plane 123, a fourth inclined plane 21 and an end face 22; the end surface 22 is composed of a front fillet surface 221, a bonding surface 222, a rear fillet surface 223, a first groove 224 and a first inclined surface 225, wherein the bonding surface 222 comprises a second groove 2221; the tool bit 2 is provided with a through inclined lead square hole 24, the size (width multiplied by thickness) of the through inclined lead square hole is 0.1mm multiplied by 0.05mm, the included angle between the tool bit and the tool holder 1 is 45 degrees, the size precision is less than or equal to +/-5 mu m, and the surface roughness is less than or equal to 1.0 mu m; the entrance of the oblique lead square hole is isosceles trapezoid, the four sides of the isosceles trapezoid are respectively parallel to the four sides of the plane 23, the included angle between the entrance plane where the two sides of the entrance perpendicular to the axis of the tool holder 1 are positioned and the oblique lead square hole 24 is 30 degrees, and the included angle between the entrance plane where the two sides of the entrance parallel to the intersection line of the inclined planes and the oblique lead square hole 24 is 15 degrees

The processing blank of the wedge-shaped riving knife is a ceramic round bar, and the aperture of the central through hole is 0.35 mm; the fillet radius of the front fillet surface 221 is 25 μm, and the fillet radius of the rear front fillet surface 224 is 15 μm; the bonding surface 222 has a width (parallel to the second groove 2221) of 0.20mm, a length (perpendicular to the second groove 2221) of 0.15mm, and a surface roughness of 0.8 μm or less; the second groove 2221 is an arc groove, and has an arc radius of 0.15mm and a width of 0.03 mm; the first groove 224 is composed of a second inclined surface 2241, a round corner surface 2242 and a third inclined surface 2243, the second inclined surface 2241 and the third inclined surface 2243 are perpendicular to each other, and an included angle between the second inclined surface 2241 and the bonding surface 222 is 60 degrees; the fillet radius of the fillet surface 2242 is 0.05 mm.

The processing method adopted by the wedge-shaped riving knife comprises the following steps of 1) carrying out accurate grinding on an excircle of a ceramic round bar with a central hole by using a centerless grinding machine; 2) cutting a flat notch riving knife cylinder by adopting a five-axis numerical control machining center; 3) grinding a first chamfer 121, a second chamfer 122, a plane 23, a third chamfer 123 and a fourth chamfer 21 by using a high-precision grinding machine; 4) processing a front fillet surface 221, a bonding surface 222, a rear fillet surface 223, a first groove 224 and a first inclined surface 225 by adopting high-precision electric spark equipment or a picosecond laser; 5) and (3) carrying out center hole reaming and micropore machining by adopting high-precision electric spark equipment or picosecond laser to machine a straight lead round hole 11 and an inclined lead square hole 24.

Finally, it should be pointed out that: the above examples are only for illustrating the technical solutions of the present invention, and are not limited thereto. Although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.