Equipment for manufacturing aspherical mirror and application thereof

文档序号:660864 发布日期:2021-04-27 浏览:34次 中文

阅读说明:本技术 用于制作非球面镜的设备及其应用 (Equipment for manufacturing aspherical mirror and application thereof ) 是由 徐相杰 乔文 张晨 陈林森 于 2019-10-25 设计创作,主要内容包括:本发明公开一种用于制作非球面镜的设备,包括本体、薄膜、容纳容器和压力控制器,本体设有第一空腔和通孔,薄膜覆盖通孔,压力控制器调节第一空腔的压力。本发明还公开一种非球面镜的制作方法,该方法包括:提供上述设备;获得所需的压力;调节第一空腔的压力;将固化胶倒入容纳容器;固化。本发明还公开了一种双面非球面镜的制作方法,采用上述方法制备两个非球面透镜;贴合二者。本发明还公开了一种非球面反射镜的制作方法,采用上述方法制作非球面镜;在其表面上制备金属膜。利用压力控制器调节第一空腔与外部的压力差,以控制薄膜发生所需形貌的形变,使倒入容纳容器内的固化胶发生相应的形变,实现固化后获得高精度任一表面形貌的非球面镜。(The invention discloses equipment for manufacturing an aspherical mirror, which comprises a body, a film, a containing container and a pressure controller, wherein the body is provided with a first cavity and a through hole, the film covers the through hole, and the pressure controller adjusts the pressure of the first cavity. The invention also discloses a method for manufacturing the aspherical mirror, which comprises the following steps: providing the above-described apparatus; obtaining the required pressure; adjusting the pressure of the first cavity; pouring the curing glue into a containing container; and (5) curing. The invention also discloses a method for manufacturing the double-sided aspherical mirror, which is used for preparing two aspherical lenses; and bonding the two. The invention also discloses a method for manufacturing the aspherical mirror, which is used for manufacturing the aspherical mirror; a metal film is prepared on the surface thereof. The pressure controller is used for adjusting the pressure difference between the first cavity and the outside to control the deformation of the film with the required shape, so that the curing glue poured into the containing container is correspondingly deformed, and the aspherical mirror with any surface shape and high precision can be obtained after curing.)

1. The utility model provides an equipment for making aspherical mirror, its characterized in that includes body, film, holds container and pressure controller, the inside first cavity that is equipped with of body, the body surface is equipped with the intercommunication first cavity and outside through-hole, the film covers the through-hole, it sets up to hold the container the body surface, it glues to hold the container and be used for holding solidification, it covers to hold the container bottom the film covers the part of through-hole, pressure controller is used for adjusting first cavity with outside pressure differential, in order to control the deformation of required appearance takes place for the film, makes to pour into hold in the container solidification is glued and is taken place corresponding deformation, realizes obtaining the aspherical mirror of required surface appearance after the solidification.

2. An apparatus for making an aspherical mirror as described in claim 1, wherein the first cavity contains a liquid, and wherein the pressure controller controls the amount of liquid in the first cavity.

3. An apparatus for making aspherical mirrors as defined by claim 1, wherein said containment vessel includes a baffle movably surrounding said aperture, said containment vessel having an opening at a top thereof.

4. An apparatus for making an aspherical mirror as defined in claim 1, wherein a second cavity is provided in the body in communication with the first cavity.

5. A method of making an aspherical mirror, the method comprising:

providing an apparatus for manufacturing an aspherical mirror, the apparatus for manufacturing a spherical mirror being the apparatus for manufacturing a spherical mirror according to any one of claims 1 to 4;

obtaining the required pressure according to the parameters of the surface appearance of the aspherical mirror;

adjusting the internal pressure of the first cavity according to the required pressure so as to control the deformation of the film with the required appearance;

pouring the curing glue into the containing container;

and taking out after curing to obtain the aspherical mirror with the required surface appearance.

6. The method of claim 5 wherein, in the step of obtaining the desired pressure based on the parameters of the surface topography of the aspherical mirror, the pressure is obtained based on a table/map of correspondence between the parameters of the surface topography of the aspherical mirror and the pressure inside the first cavity.

7. An aspherical mirror as claimed in claim 6 wherein said correspondence table/map is calculated from said parameters based on the characteristics of said liquid and the characteristics of said film.

8. The method of claim 5, wherein the surface topography of the aspherical mirror is represented by a conic equation, the conic equation being:wherein Z is the morphology, C is the curvature at the vertex of the cone, R is the distance from the vertex to the center of the lens, and K is the cone constant.

9. An aspherical mirror as claimed in claim 8 wherein said parameters are obtained by calculation using the following specific calculation method: providing optical properties of the aspherical mirror and properties of the material from which the aspherical mirror is made; and calculating according to the two characteristics to obtain the parameters.

10. An aspherical mirror as defined in claim 5 wherein a second cavity is provided in the body in communication with the first cavity, wherein both the first cavity and the second cavity are filled with a liquid, and wherein the pressure controller controls the amount of liquid in the first cavity; in the step of adjusting the pressure inside the first cavity according to the required pressure, the specific process of controlling the deformation of the film with the required shape is as follows: and adjusting the pressure in the first cavity to a required pressure, so that the liquid in the first cavity flows into the second cavity or the liquid in the second cavity enters the first cavity.

11. A method of making a double-sided aspherical mirror, the method comprising:

sequentially preparing a first aspherical mirror and a second aspherical mirror, wherein the first aspherical mirror and the second aspherical mirror are both prepared by adopting the method for preparing the aspherical mirror of any one of claims 5 to 10;

before the second aspherical mirror is not cured, the first aspherical mirror is placed on the second aspherical mirror, and a double-sided aspherical mirror is formed after curing, wherein the flat surface of the first aspherical mirror is attached to the flat surface of the second aspherical mirror.

12. A method for manufacturing an aspherical mirror, the method comprising:

providing an aspherical mirror, wherein the aspherical mirror is manufactured by adopting the manufacturing method of the aspherical mirror of any one of claims 5 to 10;

and preparing a metal film on the flat surface of the aspherical mirror to obtain the aspherical mirror.

Technical Field

The invention relates to the technical field of aspherical mirrors, in particular to equipment for manufacturing the aspherical mirror and application thereof.

Background

In the optical system, the aspheric surface can simplify the structural organization of the instrument, help to correct spherical aberration, improve the quality of images and the like. However, the aspheric lens has not been used in a large area so far, and the machining technology of the aspheric parts has not reached a mature stage.

The complex processing of the aspheric surface has a plurality of reasons, and the obvious reason is that most aspheric surfaces have only one symmetry axis, and meanwhile, the curvatures of all points of the aspheric surface curved surface are different; in addition, the existing manufacturing process is complex, and the problems of insufficient precision, cracking and bubbles of the lens in the manufacturing process and the like often occur. Therefore, it is difficult to manufacture aspherical mirrors having any surface topography and to mass produce them, which is limited in many ways.

The foregoing description is provided for general background information and is not admitted to be prior art.

Disclosure of Invention

The invention aims to provide equipment for manufacturing an aspherical mirror and application thereof, and the equipment can be used for manufacturing the aspherical mirror with any surface appearance at high precision.

The invention provides equipment for manufacturing an aspherical mirror, which comprises a body, a film, a containing container and a pressure controller, wherein a first cavity is arranged in the body, a through hole which is communicated with the first cavity and the outside is formed in the surface of the body, the film covers the through hole, the containing container is arranged on the surface of the body and is used for containing curing glue, the bottom of the containing container covers the part of the through hole covered by the film, and the pressure controller is used for adjusting the pressure difference between the first cavity and the outside so as to control the film to deform in a required shape, so that the curing glue poured into the containing container deforms correspondingly, and the aspherical mirror with the required surface shape is obtained after curing.

In one embodiment, the first cavity contains a liquid, and the pressure controller controls the amount of the liquid in the first cavity.

In one embodiment, the accommodating container comprises a baffle movably arranged around the through hole, and the top of the accommodating container is provided with an opening.

In one embodiment, a second cavity communicated with the first cavity is arranged in the body, liquid is filled in the first cavity and the second cavity, and the pressure controller controls the amount of the liquid in the first cavity; in the process of adjusting the internal pressure of the first cavity, the pressure in the first cavity is adjusted to a required pressure, so that the liquid in the first cavity flows into the second cavity or the liquid in the second cavity enters the first cavity.

The invention also provides a method for manufacturing the aspherical mirror, which comprises the following steps:

providing equipment for manufacturing an aspherical mirror, wherein the equipment for manufacturing the spherical mirror is the equipment for manufacturing the spherical mirror;

obtaining the required pressure according to the parameters of the surface appearance of the aspherical mirror;

adjusting the internal pressure of the first cavity according to the required pressure so as to control the deformation of the film with the required appearance;

pouring the curing glue into the containing container;

and taking out after curing to obtain the aspherical mirror with the required surface appearance.

In one embodiment, in the step of obtaining the required pressure according to the parameter of the surface topography of the aspherical mirror, the pressure is obtained according to a corresponding relation table/diagram of the parameter of the surface topography of the aspherical mirror and the pressure inside the first cavity.

In one embodiment, the correspondence table/map is obtained by calculation according to the parameters based on the characteristics of the liquid and the characteristics of the film.

In one embodiment, the surface topography of the aspherical mirror is represented by a conic equation, where the conic equation is:wherein Z is the morphology, C is the curvature at the vertex of the cone, R is the distance from the vertex to the center of the lens, and K is the cone constant.

In one embodiment, the parameters are obtained by calculation, and the specific calculation method is as follows: providing optical properties of the aspherical mirror and properties of the material from which the aspherical mirror is made; and calculating according to the two characteristics to obtain the parameters.

In one embodiment, a second cavity communicated with the first cavity is arranged in the body, liquid is filled in the first cavity and the second cavity, and the pressure controller controls the amount of the liquid in the first cavity; in the step of adjusting the pressure inside the first cavity according to the required pressure, the specific process of controlling the deformation of the film with the required shape is as follows: adjusting the pressure in the first cavity to a desired pressure to cause the liquid in the first cavity to flow into the second cavity or the liquid in the second cavity to enter the first cavity

The invention also provides a method for manufacturing the double-sided aspherical mirror, which comprises the following steps:

sequentially preparing a first aspherical mirror and a second aspherical mirror, wherein the first aspherical mirror and the second aspherical mirror are both prepared by adopting the preparation method of the aspherical mirror;

before the second aspherical mirror is not cured, the first aspherical mirror is placed on the second aspherical mirror, and a double-sided aspherical mirror is formed after curing, wherein the flat surface of the first aspherical mirror is attached to the flat surface of the second aspherical mirror.

The invention also provides a method for manufacturing the aspheric reflector, which comprises the following steps:

providing an aspherical mirror, wherein the aspherical mirror is manufactured by adopting the manufacturing method of the aspherical mirror;

and preparing a metal film on the flat surface of the aspherical mirror to obtain the aspherical mirror.

According to the equipment for manufacturing the aspherical mirror, the bottom of the accommodating container covers the part of the film covering the through hole, the pressure difference between the inside and the outside of the first cavity is adjusted by the pressure controller, so that the deformation of the required shape of the film is controlled, the curing glue poured into the accommodating container is correspondingly deformed, and the aspherical mirror with any surface shape and high precision is obtained after curing.

Drawings

FIG. 1 is a block diagram of an apparatus for making an aspherical mirror in accordance with an embodiment of the present invention;

FIG. 2 is a flowchart illustrating steps in a method for manufacturing an aspherical mirror in accordance with an embodiment of the present invention;

FIG. 3 is a process flow diagram of a method of making an aspherical mirror in accordance with an embodiment of the invention;

FIG. 4 is a flowchart illustrating steps in a method of manufacturing a double-sided aspherical mirror in accordance with an embodiment of the present invention;

FIG. 5 is a flowchart illustrating a method for manufacturing an aspherical mirror according to an embodiment of the present invention.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

Referring to fig. 1, an apparatus for manufacturing an aspherical mirror according to an embodiment of the present invention includes a body 1, a film 3, a container 7, and a pressure controller 5. A first cavity 13 is arranged in the body 1, and a through hole 11 for communicating the first cavity 13 with the outside is arranged on the surface of the body; the film 3 covers the through hole 11; the accommodating container 7 is arranged on the surface of the body 1, the accommodating container 7 is used for accommodating curing glue, and the bottom of the accommodating container 7 covers the part of the film 3 covering the through hole 11; the pressure controller 5 is used for adjusting the pressure difference between the first cavity 13 and the outside to control the deformation of the film 3 with the required shape. The curing glue poured into the container 7 is correspondingly deformed, and the aspherical mirror with the required surface appearance is obtained after curing.

The first cavity 13 is filled with liquid, and the pressure controller 5 controls the amount of the liquid in the first cavity 13.

The body 1 is also internally provided with a second cavity 15 communicated with the first cavity 13, and the first cavity 13 and the second cavity 1 are arranged in the body 1 side by side. The second cavity 15 is filled with the same liquid as in the first cavity 13.

The pressure controller 5 is arranged in the second cavity 15 to control the liquid in the first cavity 13 to flow into the second cavity 15 or the liquid in the second cavity 15 enters the first cavity 13, so that the pressure controller 5 controls the pressure difference between the first cavity 13 and the outside.

The average thickness of the film 3 is between 1um and 1 mm. Specifically, the film 3 is a uniform film, and the radius of the film 3 is 3mm and the thickness is 0.1 mm.

In other embodiments, the film 3 is a plano-convex film having a radius of 3mm, a center thickness of 0.2mm, and an edge thickness of 0.1mm, or the film 3 is a plano-concave film having a radius of 3mm, a center thickness of 0.1mm, and an edge thickness of 0.2 mm.

The accommodating container 7 includes a baffle 71 movably surrounding the through hole, and an opening is provided at the top of the accommodating container 7.

In the present embodiment, the body 1, the membrane 3 and the pressure controller 5 form a liquid lens.

Referring to fig. 1 to fig. 3, a method for manufacturing an aspherical mirror provided in an embodiment of the present invention includes:

s1: providing equipment for manufacturing an aspherical mirror, wherein the equipment for manufacturing the spherical mirror is the equipment for manufacturing the spherical mirror;

s2: obtaining the required pressure according to the parameters of the surface appearance of the aspherical mirror;

s3: adjusting the internal pressure of the first cavity 13 according to the required pressure to control the deformation of the film 3 with the required shape;

s4: pouring the curing glue into a containing container;

s5: and taking out after curing to obtain the aspherical mirror with the required surface appearance.

In this embodiment, the film used in the apparatus for making the aspherical mirror is a uniform film.

In actual operation, the sequence of S3 and S4 can be changed, that is, the curing glue can be poured into the container 7, and then the internal pressure of the liquid lens is adjusted to control the film 3 to form a shape opposite to the surface shape of the desired aspherical mirror.

In step S2, the pressure is obtained from a table/map of correspondence between the parameters of the aspherical mirror surface topography and the pressure inside the first cavity 13. Wherein the parameters comprise one or more of curvature at the vertex of the cone, distance from the vertex to the center of the lens, and cone constant.

Specifically, the correspondence table/map is obtained by calculation according to the parameters, based on the characteristics of the liquid in the first cavity 13 and the characteristics of the membrane 3. Wherein the liquid property comprises a property of a liquid material; the film 3 properties include material properties including young's modulus, density and nonlinear deformation parameters, and structural properties.

In this embodiment, the surface topography of the aspherical mirror is represented by a conic equation, which is:wherein Z is the morphology, C is the curvature at the vertex of the cone, R is the distance from the vertex to the center of the lens, and K is the cone constant.

The parameters are obtained by calculation, and the specific calculation method comprises the following steps: providing optical characteristics of the aspherical mirror and characteristics of the material from which the aspherical mirror is made; and calculating according to the two characteristics to obtain the parameters. In particular, the optical properties of the aspherical mirror include the focal length and the properties of the material include the refractive index. The focal length is in direct proportion to the refractive index, the focal length can be preset, and the refractive index can be obtained by a light ray chasing method.

In other embodiments, when the film is a non-uniform film, controlling the pressure alone does not result in the desired lens surface topography. It is also desirable to obtain a change in the thickness of the film, or a change in the arrangement of the microstructures on the film, or a change in the Young's modulus of the film. So that the deformation of the center and the edge of the film generated when the film is pressed is controllable and adjustable. And then the required shape is obtained by applying pressure.

In step S3, the specific process of controlling the film 3 to deform to the desired shape is as follows: the pressure in the first cavity 13 is adjusted to the desired pressure so that the liquid in the first cavity 13 flows into the second cavity 15 or the liquid in the second cavity 15 enters the first cavity 13. Whereby the amount of liquid in the first cavity 13 is controlled to achieve deformation of the membrane 3.

In step S5, the curing glue is a photosensitive or thermosensitive glue.

Referring to fig. 2 to 4, the present invention further provides a method for manufacturing a double-sided aspherical mirror, the method comprising:

s6: sequentially preparing a first aspherical mirror and a second aspherical mirror, wherein the first aspherical mirror and the second aspherical mirror are both prepared by adopting the preparation method of the aspherical mirror;

s7: before the second aspherical mirror is not cured, the first aspherical mirror is placed on the second aspherical mirror, and a double-sided aspherical mirror is formed after curing. The flat surface of the first aspherical mirror is attached to the flat surface of the second aspherical mirror.

Referring to fig. 2, fig. 3 and fig. 5, the present invention further provides a method for manufacturing an aspheric mirror, the method comprising:

s8: providing an aspherical mirror, wherein the aspherical mirror is manufactured by adopting the manufacturing method of the aspherical mirror;

s9: and preparing a metal film on the flat surface of the aspherical mirror, and curing to obtain the aspherical mirror.

The metal film is prepared by vacuum evaporation or chemical vapor deposition or mutual sol-gel coating. Specifically, the metal film is prepared by adopting an mutual sol-gel coating mode.

In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. It will be understood that when an element such as a layer, region or substrate is referred to as being "formed on," "disposed on" or "located on" another element, it can be directly on the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly formed on" or "directly disposed on" another element, there are no intervening elements present.

In this document, the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the purpose of clarity and convenience of description of the technical solutions, and thus, should not be construed as limiting the present invention.

As used herein, the ordinal adjectives "first", "second", etc., used to describe an element are merely to distinguish between similar elements and do not imply that the elements so described must be in a given sequence, either temporally, spatially, in ranking, or in any other manner.

As used herein, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, including not only those elements listed, but also other elements not expressly listed.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

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