阅读说明：本技术 一种用于serf原子磁强计的无磁性电烤箱结构 (A nonmagnetic electric oven structure for SERF atomic magnetometer ) 是由 安宁 丁铭 张宁 郭强 李梓文 于 2020-12-22 设计创作，主要内容包括：本发明公开了一种用于SERF原子磁强计的无磁性电烤箱结构,该电烤箱是构成SERF原子磁强计的重要组成部分,原子磁强计是一种利用原子自旋效应实现精密磁场测量的量子仪器,其中无自旋交换弛豫原子磁强计是灵敏度最高的一种,在SERF原子磁强计中,电烤箱需要将碱金属原子气室加热到一定的温度使其达到SERF状态,电烤箱是SERF原子磁强计内部距离碱金属原子气室最近的部件,它对磁场噪声极其敏感；与此同时,电烤箱还需要有较高的加热功率,较高的温度控制精度,较小的体积,不同的方向上加热功率差别较小以保证碱金属原子气室受热均匀,气室内部碱金属浓度差较小,以保证在SERF原子磁强计具有较高的测量精度,测量稳定性和可靠性。(The invention discloses a nonmagnetic electric oven structure for an SERF atomic magnetometer, which is an important component of the SERF atomic magnetometer, wherein the atomic magnetometer is a quantum instrument for realizing precise magnetic field measurement by utilizing an atomic spin effect, a spin exchange-free relaxation atomic magnetometer is the most sensitive one, in the SERF atomic magnetometer, an alkali metal atom air chamber needs to be heated to a certain temperature by the electric oven so as to reach an SERF state, and the electric oven is a part which is closest to the alkali metal atom air chamber in the SERF atomic magnetometer and is extremely sensitive to magnetic field noise; meanwhile, the electric oven also needs higher heating power, higher temperature control precision and smaller volume, the heating power difference in different directions is smaller to ensure that the alkali metal atom air chamber is heated uniformly, and the alkali metal concentration difference in the air chamber is smaller to ensure that the SERF atom magnetometer has higher measurement precision, measurement stability and reliability.)

1. The utility model provides a nonmagnetic electric oven structure for SERF atomic magnetometer which characterized in that: fixing part (3) is connected including boron nitride oven subassembly (1), oven supporting subassembly (2) and boron nitride oven, be connected through boron nitride oven connecting fixing part (3) between boron nitride oven subassembly (1) and oven supporting subassembly (2), boron nitride oven subassembly (1) includes oven box, double-deck to winding resistance wire heating film (14), alkali metal air chamber (15) and alkali metal air chamber support stud (16), the inside of oven box is equipped with alkali metal air chamber (15), alkali metal air chamber (15) are connected with alkali metal air chamber support stud (16), the outside of oven box is equipped with double-deck to winding resistance wire heating film (14) on the surface.

2. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 1, wherein: the oven box body comprises 1 upper oven cover board (11), 1 lower oven cover board (13) and 2 side oven cover board (12), the appearance of side oven cover board (12) is "L" type structure, 2 side oven cover board (12) end to end splice into concentric square tubular construction, the upper and lower both sides of 2 side oven cover board (12) are equipped with upper oven cover board (11) and lower oven cover board (13) respectively.

3. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 2, wherein: fixing part is connected to boron nitride oven (3) includes double-screw bolt (31) and nut (32), be equipped with four supporting platforms on one side that supporting seat (21) are close to boron nitride oven subassembly (1), processing threaded hole on the terminal surface of supporting platform, be equipped with 4 through-holes on four angles of last oven apron (11) and lower oven apron (13), the side of every side oven apron (12) is equipped with 2 through-holes, the through-hole that passes in proper order on last oven apron (11), side oven apron (12) and lower oven apron (13) is passed to the one end of double-screw bolt (31) is connected with the threaded hole, the other end of double-screw bolt (31) adopts nut (32) fastening.

4. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 2, wherein: the upper oven cover plate (11), the lower oven cover plate (13) and the side oven cover plate (12) are made of ceramic plates with the same thickness.

5. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 2, wherein: the quantity of double-deck pair-wound resistance wire heating film (14) is 6, it has 1 respectively to paste on the outside surface of upper oven apron (11), lower oven apron (13), it has 2 to paste on side oven apron (12), is located two outside surfaces of "L" type structure of side oven apron (12) respectively, be equipped with a breach that is used for holding the output conductor joint of double-deck pair-wound resistance wire heating film (14) on upper oven apron (11), lower oven apron (13) and side oven apron (12).

6. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 3, wherein: and a heat insulation gasket (22) is arranged between the supporting seat (21) and the boron nitride oven assembly (1), and a through hole for the stud (31) to pass through is processed in the center of the heat insulation gasket (22).

7. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 1, wherein: the boron nitride oven component (1) and the oven supporting component (2) are distributed up and down or left and right.

8. A non-magnetic electric oven structure for SERF atomic magnetometers as claimed in claim 3, wherein: the supporting seat (21), the stud (31) and the nut (32) are all made of PEEK materials.

[ technical field ] A method for producing a semiconductor device

The invention belongs to the technical field of quantum precision measuring instruments, and particularly relates to a non-magnetic electric oven heated by an alkali metal air chamber.

[ background of the invention ]

With the development of quantum technology, various scientific instruments based on quantum effect are continuously breaking through the measurement limit of the traditional instrument. As a quantum instrument for realizing precise magnetic field measurement by utilizing the atomic spin effect, the atomic magnetometer has incomparable advantages in performance indexes compared with other types of magnetometers, and is an important development direction of a new generation of ultrahigh-sensitivity magnetometer. Wherein the non-spin exchange relaxation atom magnetometer is the one with the highest sensitivity, so that the sensitivity level of magnetic field measurement of human is from fT/Hz^1/2Stage entry sub-fT/Hz^1/2And (4) stages.

The nonmagnetic electric oven is an important component in the SERF atomic magnetometer, and an alkali metal gas chamber of the SERF atomic magnetometer needs to be heated by the electric oven, so that the SERF atomic magnetometer can normally work after entering an SERF state. Whether the structure of the electric oven is simple and reliable, whether the volume is small enough, whether the alkali metal air chamber heated by the electric oven is even can produce great influence on the measurement accuracy and the measurement stability of the SERF atomic magnetometer.

The invention discloses a non-magnetic electric oven structure for a SERF atomic magnetometer. Here, "non-magnetic" means that each of the parts constituting the electric oven is manufactured by processing a non-magnetic material.

The materials used for the non-magnetic electric oven parts mainly comprise boron nitride ceramics and polyetheretherketone Peek, and the boron nitride ceramics and the polyetheretherketone Peek are not magnetic. The PEEK has good machining performance and low thermal conductivity, and can be used for machining a complex mechanical structure on a machine tool and has high dimensional accuracy. Compared with the PEEK, the boron nitride ceramic has poor machining performance, is difficult to machine a complex mechanical structure, is easy to crack when being machined on a machine tool, and further causes part scrapping, particularly a thread structure, a boron nitride threaded hole with a small nominal size is extremely difficult to machine, threads are extremely easy to wear, and the connection reliability is very poor.

Therefore, the designed non-magnetic electric oven structure is small in size, simple in structure and reliable in connection among parts, and has important practical significance for improving the measurement accuracy, the measurement stability and the measurement reliability of the SERF atomic magnetometer.

[ summary of the invention ]

The invention aims to provide a nonmagnetic electric oven structure for a SERF atomic magnetometer, so as to overcome the defects in the prior art.

In order to achieve the purpose, the invention provides the following technical scheme:

the application discloses a nonmagnetic electric oven structure for SERF atomic magnetometer, connect the mounting including boron nitride oven subassembly, oven supporting component and boron nitride oven, be connected the mounting through the boron nitride oven between boron nitride oven subassembly and the oven supporting component, boron nitride oven subassembly includes oven box, double-deck to winding resistance wire heating film, alkali metal air chamber and alkali metal air chamber support double-screw bolt, the inside of oven box is equipped with the alkali metal air chamber, the alkali metal air chamber supports the double-screw bolt with the alkali metal air chamber and is connected, the outside of oven box is equipped with double-deck to winding resistance wire heating film on the surface.

Preferably, the oven box body comprises 1 last oven apron, 1 oven apron and 2 side oven apron down, the appearance of side oven apron is "L" type structure, 2 side oven apron end to end splices into concentric square tubular construction, 2 the upper and lower both sides of side oven apron are equipped with oven apron and lower oven apron respectively.

Preferably, the mounting is connected to boron nitride oven includes double-screw bolt and nut, be equipped with four supporting platforms on one side that the oven supporting seat is close to boron nitride oven subassembly, processing threaded hole on the terminal surface of supporting platform, be equipped with 4 through-holes on four angles of last oven apron and lower oven apron, the side of every side oven apron is equipped with 2 through-holes, the one end of double-screw bolt is passed and is passed in proper order and pass through-hole on last oven apron, side oven apron and the lower oven apron and be connected with the threaded hole, the other end of double-screw bolt adopts the nut fastening.

Preferably, the upper oven cover plate, the lower oven cover plate and the side oven cover plate are made of ceramic plates with the same thickness.

Preferably, the number of the double-layer oppositely-wound resistance wire heating films is 6, 1 sheet is respectively pasted on the outer side surfaces of the upper oven cover plate and the lower oven cover plate, 2 sheets are pasted on the side oven cover plate and are respectively positioned on the two outer side surfaces of the L-shaped structure of the side oven cover plate, and notches for accommodating the output lead connectors of the double-layer oppositely-wound resistance wire heating films are arranged on the upper oven cover plate, the lower oven cover plate and the side oven cover plate.

Preferably, a heat insulation gasket is arranged between the supporting seat and the boron nitride oven assembly, and a through hole for a stud to pass through is processed in the center of the heat insulation gasket.

Preferably, the boron nitride oven assembly and the oven supporting assembly are distributed up and down or left and right.

Preferably, the supporting seat, the stud and the nut are all manufactured by using a polyetheretherketone Peek material.

The invention has the beneficial effects that:

(1) the thickness and the section size of the 6 ceramic plates on the oven box body of the boron nitride oven component are completely the same, when the double-layer oppositely-wound resistance wire heating film adhered on the outer surface works, the heat resistances of heat transfer paths in 6 directions are basically the same, and the heat transferred to the alkali metal air chamber is basically the same, so that the uniform heating of the alkali metal air chamber, the uniform temperature distribution and the small concentration difference of the alkali metal in the air chamber are proved, and the measurement precision, the measurement stability and the measurement reliability of the SERF atomic magnetometer are improved;

(2) the heat insulation gasket is arranged between the supporting seat and the boron nitride oven assembly and is used for reducing heat dissipated from the four supporting tables when the boron nitride oven assembly is heated, further reducing the nonuniformity of heat transfer and temperature distribution of the lower oven cover plate and other 5 boron nitride ceramic cover plates on the surfaces during the operation, enabling the alkali metal gas chamber to be heated uniformly, enabling the concentration difference of alkali metal in the gas chamber to be smaller, and further improving the measurement accuracy, the measurement stability and the measurement reliability of the SERF atomic magnetometer;

(3) the oven supporting seat, the stud and the nut are all made of PEEK materials with good machining manufacturability, thread features are machined on the oven supporting seat, the stud and the nut to be connected and fixed with the boron nitride oven component, and the thread features are transferred to the PEEK which is easy to machine from boron nitride ceramics which are difficult to machine, so that the machining manufacturability is improved, the cost is reduced, and the connection reliability is realized;

(4) through holes are processed on the upper oven cover plate, the side oven cover plate and the lower oven cover plate, and the upper oven cover plate, the side oven cover plate and the lower oven cover plate are connected into a whole by using a stud and a nut, so that the processing difficulty of the boron nitride electric oven cover plate is reduced, the reliability of the boron nitride electric oven cover plate is enhanced, the processing is easy, and the cost is lower;

(5) the boron nitride oven component and the oven supporting component can be distributed vertically or horizontally according to the requirement of the environmental space, so that the applicability is improved;

the features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a schematic view of the overall structure of a non-magnetic electric oven structure for a SERF atomic magnetometer according to the present invention;

FIG. 2 is a general cross-sectional view of a non-magnetic electric oven configuration for a SERF atomic magnetometer of the present invention;

FIG. 3 is an overall exploded view of a non-magnetic electric oven configuration for a SERF atomic magnetometer of the present invention;

in the figure: the baking oven comprises a 1-boron nitride baking oven component, 11-an upper baking oven cover plate, 12-a side baking oven cover plate, 13-a lower baking oven cover plate, 14-a double-layer oppositely-wound resistance wire heating film, 15-an alkali metal air chamber, 16-an alkali metal air chamber supporting stud, 17-a notch, 2-a baking oven supporting component, 21-a supporting seat, 22-a heat insulation gasket, a 3-boron nitride baking oven connecting fixing piece, 31-a stud and 32-a nut.

[ detailed description ] embodiments

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood, however, that the description herein of specific embodiments is only intended to illustrate the invention and not to limit the scope of the invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.

Referring to fig. 1 to 3, the nonmagnetic electric oven structure for the SERF atomic magnetometer comprises a boron nitride oven assembly 1, an oven supporting assembly 2 and a boron nitride oven connecting fixing piece 3, wherein the boron nitride oven assembly 1 is connected with the oven supporting assembly 2 through the boron nitride oven connecting fixing piece 3, the boron nitride oven assembly 1 comprises an oven body, a double-layer oppositely-wound resistance wire heating film 14, an alkali metal air chamber 15 and an alkali metal air chamber supporting stud 16, the alkali metal air chamber 15 is arranged in the oven body, the alkali metal air chamber 15 is connected with the alkali metal air chamber supporting stud 16, and the double-layer oppositely-wound resistance wire heating film 14 is arranged on the outer side surface of the oven body. The oven box body comprises 1 upper oven cover plate 11, 1 lower oven cover plate 13 and 2 side oven cover plates 12, the appearance of side oven cover plate 12 is "L" type structure, 2 side oven cover plate 12 end to end splices into concentric square tubular construction, 2 the upper and lower both sides of side oven cover plate 12 are equipped with upper oven cover plate 11 and lower oven cover plate 13 respectively. Fixing piece 3 is connected to boron nitride oven includes double-screw bolt 31 and nut 32, be equipped with four supporting platforms on one side that supporting seat 21 is close to boron nitride oven subassembly 1, processing threaded hole on the terminal surface of supporting platform, it is equipped with 4 through-holes on four angles of oven cover board 13 down to go up oven cover board 11, every side oven cover board 12's side is equipped with 2 through-holes, the through-hole that passes on oven cover board 11, side oven cover board 12 and oven cover board 13 down in proper order is connected with the threaded hole, the other end of double-screw bolt 31 adopts nut 32 to fasten. The upper oven cover plate 11, the lower oven cover plate 13 and the side oven cover plate 12 are made of ceramic plates with the same thickness. The number of the double-layer oppositely-wound resistance wire heating films 14 is 6, 1 sheet is respectively pasted on the outer side surfaces of the upper oven cover plate 11 and the lower oven cover plate 13, 2 sheets are pasted on the side oven cover plate 12 and are respectively positioned on the two outer side surfaces of the L-shaped structure of the side oven cover plate 12, and notches used for accommodating the output lead connectors of the double-layer oppositely-wound resistance wire heating films 14 are arranged on the upper oven cover plate 11, the lower oven cover plate 13 and the side oven cover plate 12. A heat insulation gasket 22 is arranged between the supporting seat 21 and the boron nitride oven assembly 1, and a through hole for the stud 31 to pass through is processed in the center of the heat insulation gasket 22. The supporting seat 21, the stud 31 and the nut 32 are all made of polyetheretherketone Peek materials.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents or improvements made within the spirit and principle of the present invention should be included in the scope of the present invention.