Method for treating ceramic and ceramic member

文档序号：689446 发布日期：2021-04-30 浏览：25次中文

阅读说明：本技术 陶瓷的处理方法及陶瓷构件 (Method for treating ceramic and ceramic member ) 是由小山原嗣仓瀬雅弘堀田敏夫西田房俊山本英辅筱崎彰浩沓名宗春于 2019-09-27 设计创作，主要内容包括：本发明对激光处理作为陶瓷基材的表面处理的预处理时,通过在陶瓷基材的表面上形成几乎可以均匀地填充表面处理材料的沟槽,以制备能够以高强度与填充在沟槽中的表面处理材料紧密附着的陶瓷构件。通过用激光照射陶瓷基材C1的表面,在所述表面上设置凹面沿至少一个方向延伸而形成的多个沟槽,将所述表面上相邻的所述沟槽彼此之间设为平面。所述相邻的沟槽彼此的间距设为0.05mm以上且0.30mm以下。一个所述沟槽随着深度的增加而宽度变窄,在与所述一个方向正交的截面中最大宽度处朝所述一个沟槽的深度方向上的一侧开口。在所述一个沟槽中长径比为0.5以上且1.3以下,开口率为70％以上。(The present invention is to prepare a ceramic member capable of adhering closely with a surface treatment material filled in a groove with high strength by forming the groove on the surface of a ceramic substrate, which can be filled with the surface treatment material almost uniformly, upon laser treatment as a pretreatment for surface treatment of the ceramic substrate. By irradiating the surface of the ceramic substrate C1 with laser light, a plurality of grooves formed with a concave surface extending in at least one direction are provided on the surface, and the grooves adjacent to each other on the surface are set to be flat surfaces. The distance between the adjacent grooves is set to be more than 0.05mm and less than 0.30 mm. One of the grooves becomes narrower in width as the depth increases, and is opened to one side in the depth direction of the one groove at a maximum width in a cross section orthogonal to the one direction. The aspect ratio of the one trench is 0.5 or more and 1.3 or less, and the aperture ratio is 70% or more.)

1. A laser processing method for ceramics, comprising irradiating a surface of a ceramic substrate with a laser beam, wherein a plurality of grooves are formed on the surface so that a concave surface extends in at least one direction, adjacent grooves on the surface are formed to be flat, and a pitch between adjacent grooves is set to be 0.05mm to 0.30mm, wherein,

one of the trenches has a width that becomes narrower as a depth increases, and is open to one side in a depth direction of the one trench at a maximum width in a cross section orthogonal to the one direction, and a ratio of the depth to the maximum width (aspect ratio) is 0.5 or more and 1.3 or less,

when the grooves are formed with the ridges protruding from the recessed surface and/or the flat surface in a direction inclined to the depth direction and the grooves are closed with the ridges forming a space between the grooves and the recessed surface in the depth direction, a ratio (opening ratio) of a value obtained by subtracting a length of the grooves closed in the width direction in the cross section from the maximum width to the maximum width is 70% or more.

2. The method for laser processing of ceramics according to claim 1,

melting and/or evaporating a portion of the ceramic substrate as the grooves are formed to deposit a cloud of adjacent grooves on the surface between each other, thereby roughening a portion or all of the grooves on the surface between each other,

when the portion of the cloud-like deposit forming the space is the trench closing portion, the ratio (aperture ratio) is 70% or more.

3. The method for laser processing a ceramic according to claim 1 or 2,

the grooves provided in plurality are formed in a linear, curved or circumferential processing pattern, or in a form intersecting each other.

4. A thermal spray treatment method for ceramics which comprises subjecting a ceramic substrate to a thermal spray pretreatment by the laser treatment method according to any one of claims 1 to 3 and subjecting a laser-treated ceramic member obtained by the thermal spray pretreatment to a thermal spray treatment,

the thermal spraying treatment is a treatment of closely adhering the thermal spraying material to the laser-processed ceramic member by filling the thermal spraying material in the groove formed on the laser-processed ceramic member,

the void area ratio in one of the trenches is 20% or less,

the void area ratio is a ratio of a cavity volume in the one groove with respect to a volume of the one groove in a state where the thermal spray material is filled into the groove.

5. A ceramic member comprising a base and a plurality of grooves formed in the surface of the base, the grooves extending in at least one direction and having a concave surface, wherein adjacent grooves are formed in the surface so as to be flat, and the distance between adjacent grooves is 0.05mm to 0.30mm, wherein,

one of the trenches has a width that becomes narrower as a depth increases, opens to one side in a depth direction of the one trench at a maximum width in a cross section orthogonal to the one direction, and has a ratio of the depth to the maximum width (aspect ratio) of 0.5 or more and 1.3 or less,

6. The ceramic member according to claim 5, wherein,

since the adjacent grooves on the surface are formed in a cloud shape with each other, and a part or all of the grooves on the surface are roughened with each other,

the ratio (aperture ratio) is 70% or more when the portion of the surface where the space is formed is the groove closing portion.

7. The ceramic member according to claim 5 or 6,

the grooves provided in plurality are formed in a linear, curved or circumferential processing pattern, or in a form intersecting each other.

8. A thermal spray treated ceramic component having:

the ceramic member of any one of claims 5 to 7, and

a thermal spray material filled in the grooves formed on the ceramic member and closely adhered to the ceramic member,

the void area ratio in one of the trenches is 20% or less,

the void area ratio is a ratio of a cavity volume in the one groove with respect to a volume of the one groove in a state where the thermal spray material is filled into the groove.

Technical Field

The present invention relates to a laser processing method of ceramic for processing a ceramic substrate with laser, a thermal spraying processing method of ceramic for performing thermal spraying processing on a ceramic member obtained by this method (laser processing), and a ceramic member and a thermal spraying processed ceramic member obtained by these methods (laser processing).

Background

Ceramics are solid materials composed of inorganic compounds (e.g., oxides, carbides, nitrides, borides, etc.). Ceramics have high hardness and excellent heat resistance, and are used for various products such as semiconductors, medical devices, information devices, electronic industry products, and the like. On the other hand, ceramics still have room for improvement in oxidation resistance, reaction resistance and corrosion resistance. Therefore, the ceramic coating material can be used after coating the ceramic surface with a material having oxidation resistance, reaction resistance and corrosion resistance (surface-treated material).

However, when a surface treatment material is coated on a ceramic, in order to make the ceramic and the surface treatment material adhere to each other with high strength, it is necessary to pretreat a ceramic base material (ceramic as a base material for pretreatment to coat the surface treatment material) as a ceramic member and to surface-treat the ceramic member. The pretreatment is usually a sand blast treatment, but when the hardness of the ceramic substrate is too high to perform the sand blast treatment, a laser treatment may be performed.

For example, patent document 1 describes that a ceramic base material (silicon carbide or the like) is irradiated with laser light in air to form grooves on the surface of the ceramic base material, and a thermal spray coating (thermal spray material) is adhered to the ceramic member with high strength by performing a thermal spray treatment (surface treatment) on the ceramic member obtained by performing such a laser treatment (laser treatment). Further, the document also describes that the grooves formed on the surface of the ceramic substrate are patterned in a desired shape by laser irradiation.

In the invention described in patent document 1, an oxide film is formed on a ceramic member by laser processing, and the oxide film improves the adhesion strength between the ceramic member and the thermal spray material. However, the ceramic member having the oxide film formed thereon has the following risk as compared with the ceramic member having no oxide film formed thereon: as the quality of the ceramic product is degraded, its use is limited.

On the other hand, in the invention described in patent document 1, since the shape of the grooves formed in the ceramic substrate is patterned, it is considered that it becomes easy to uniformly fill the entire grooves with the thermal spray material (surface treatment material), but there is a risk that factors other than the shape prevent the entire grooves from being uniformly filled with the thermal spray material.

Documents of the prior art

Patent document

Patent document 1: international publication No. 2016/170895

Disclosure of Invention

Technical problem to be solved by the invention

Therefore, an object of the present invention is to prepare a ceramic member capable of closely adhering with high strength a surface treatment material filled in a groove by forming the groove which can almost uniformly fill the surface treatment material on the surface of a ceramic substrate when the ceramic substrate is subjected to laser treatment as a pretreatment for the surface treatment.

Means for solving the problems

In order to solve the above problems, the present invention provides a method for laser processing a ceramic by irradiating a surface of a ceramic substrate with a laser, the surface being provided with a plurality of grooves formed with a concave surface extending in at least one direction, adjacent grooves on the surface being set to be flat, a pitch between the adjacent grooves being set to be 0.05mm or more and 0.30mm or less, the method having the following features: one of the grooves has a width that becomes narrower as a depth increases, and is open to one side in a depth direction of the one groove at a maximum width in a cross section orthogonal to the one direction, and a ratio (aspect ratio) of the depth to the maximum width is 0.5 or more and 1.3 or less, and when a burr that protrudes from the concave surface and/or the flat surface in a direction inclined to the depth direction is formed and a groove closing portion in which a space is formed between the burr and the concave surface in the depth direction is provided, a ratio (opening ratio) of a value obtained by subtracting a length of the groove closing portion in the width direction in the cross section from the maximum width to the maximum width is 70% or more.

According to the present invention, by setting the aspect ratio to 0.5 or more and 1.3 or less and setting the aperture ratio to 70% or more, it is possible to form a groove in which a surface treatment material can be almost uniformly filled on the surface of a ceramic substrate, and to produce a ceramic member capable of adhering closely to the surface treatment material filled in the groove with high strength.

That is, when the aspect ratio is less than 0.5, the depth of the groove is too shallow so that the surface treatment material does not penetrate into the depth of the ceramic member (obtained by laser processing the ceramic substrate), and even if the surface treatment material is filled into the groove of the ceramic member, the close adhesion strength between the ceramic member and the surface treatment material does not increase (anchoring effect does not occur between the ceramic member and the surface treatment material). On the other hand, when the aspect ratio exceeds 1.3, the depth of the groove is so deep that the deep portion of the groove of the ceramic member is not filled with the surface treatment material, and the close adhesion strength between the ceramic member and the surface treatment material cannot be improved. However, when the aspect ratio is 0.5 or more and 1.3 or less, a groove having a shape capable of almost uniformly filling the surface treatment material can be formed on the surface of the ceramic substrate.

When the aperture ratio is less than 70%, in the case of the burrs protruding in the direction inclined to the groove depth direction on the surface of the ceramic member, a space is formed in the groove depth direction with the recessed surface as the surface of the groove, and a groove stopper portion that prevents the surface treatment material from flowing into the space is formed in a wide range. This makes it difficult for the surface treatment material to spread throughout the inside of the groove of the ceramic member. However, when the aperture ratio is 70% or more, the surface treatment material becomes dispersed almost in the entire inside of the groove without being hindered by the burrs. This makes it possible to fill the surface treatment material into a trench (trench having an aspect ratio of 0.5 to 1.3) having a shape that enables the surface treatment material to be filled almost uniformly without being hindered by the burrs.

Therefore, by setting the opening ratio of the trench having an aspect ratio of 0.5 or more and 1.3 or less to 70% or more, a trench (a trench having a shape that enables uniform filling of the surface treatment material and in which filling is not hindered by the burrs) that enables substantially uniform filling of the surface treatment material can be formed on the surface of the ceramic base material, and a ceramic member that can be tightly adhered to the surface treatment material filled in the trench with high strength can be produced.

In the laser processing method of ceramic, a part of the ceramic substrate is melted and/or evaporated along with the formation of the grooves, and is deposited in a cloud shape between the adjacent grooves on the surface, thereby roughening a part or all of the grooves on the surface, and the ratio (aperture ratio) is 70% or more when a part of the deposited cloud-shaped deposit forming the space is the groove closing part.

Thus, the fused and/or evaporated ceramic substrate deposited in a cloud form can effectively roughen the adjacent grooves on the surface of the ceramic substrate (between the grooves), and the grooves on the surface of the ceramic member can be strongly adhered to the surface treatment material. In addition, in the deposit deposited in a cloud shape, a portion forming a space between the concave surface and the groove depth direction is set as a groove closing portion, and the opening ratio is set to 70% or more under this condition, so that the deposit can be prevented from hindering the surface treatment material from filling the entire groove. As a result, it is possible to simultaneously achieve inter-groove roughening by cloud-like deposits and maintain a high opening ratio of the grooves, and it is possible to produce a ceramic member in which both the inter-groove and the inner portion of the grooves can be closely adhered with the surface treatment material with high strength.

In the laser processing method of ceramic, the plurality of grooves may be formed in a linear, curved, or circumferential processing pattern, or may intersect each other.

Further, the present invention relates to a ceramic thermal spray treatment method for performing thermal spray pretreatment of a ceramic substrate by the laser treatment method and thermal spray treatment of a laser-treated ceramic member obtained by the thermal spray pretreatment, the method having the following features: the thermal spraying treatment is a method of closely adhering a thermal spraying material to the laser-processed ceramic member by filling the thermal spraying material into the grooves formed on the laser-processed ceramic member, a void area ratio within one of the grooves is 20% or less, the void area ratio being a ratio of a volume of a cavity in the one groove to a volume of the one groove in a state where the thermal spraying material is filled into the groove.

According to the present invention, it is possible to fill the thermal spray material almost uniformly in the groove formed on the surface of the laser-processed ceramic member, and to cause the thermal spray material filled in the groove to adhere closely to the laser-processed ceramic member with high strength. That is, with the thermal spraying process, a thermal spray material (surface treatment material) in a molten or semi-molten state is sprayed in the depth direction of the grooves formed on the laser-treated ceramic member. Therefore, in the case where the opening ratio of the groove of the laser-processed ceramic member is low due to the groove closure portion, since the thermal spray material ejected in the groove depth direction cannot reach the end portion (concave surface) in the groove depth direction due to the groove closure portion, it is difficult to uniformly fill the thermal spray material into the groove. However, according to the present invention, since the aspect ratio and the aperture ratio are within the above ranges, the thermal spray material sprayed on the grooves of the laser-processed ceramic member is almost uniform throughout the inside of the grooves, enabling the laser-processed ceramic member and the thermal spray material to be closely adhered with high strength.

The present invention also relates to a ceramic member in which a plurality of grooves having a concave surface extending in at least one direction are provided on a surface of a base, adjacent grooves on the surface are flat surfaces, and a distance between adjacent grooves is 0.05mm or more and 0.30mm or less, the ceramic member having the following features: one of the grooves has a width that becomes narrower as a depth increases, and is open to one side in a depth direction of the one groove at a maximum width in a cross section orthogonal to the one direction, and a ratio (aspect ratio) of the depth to the maximum width is 0.5 or more and 1.3 or less, and when a burr that protrudes from the concave surface and/or the flat surface in a direction inclined to the depth direction is formed and a groove closing portion in which a space is formed between the burr and the concave surface in the depth direction is provided, a ratio (opening ratio) of a value obtained by subtracting a length of the groove closing portion in the width direction in the cross section from the maximum width to the maximum width is 70% or more.

According to the present invention, as in the above invention, when the aspect ratio is 0.5 or more and 1.3 or less and the opening ratio is 70% or more, the grooves capable of almost uniformly filling the surface treatment material can be formed on the surface, and the ceramic member capable of being closely adhered with the surface treatment material filled in the grooves with high strength can be obtained.

In the ceramic member, the ratio (aperture ratio) may be 70% or more when a portion of the surface where the space is formed in the cloud-shaped portion is the groove closed portion, since the adjacent grooves are formed in the cloud-shaped portion on the surface and a part or all of the grooves on the surface are roughened.

As a result, the adjacent grooves on the base surface can be roughened efficiently with respect to each other (between grooves), and a ceramic member can be produced in which the grooves on the base surface can be adhered closely with the surface treatment material with high strength. Further, since the opening ratio is 70% or more when the portion forming the space between the concave surface and the depth direction of the trench is the trench closed portion, in the portion configured in the cloud shape on the surface of the base portion, the ceramic member in which the portion configuring the cloud shape prevents the surface treatment material from being filled in the entire trench can be prepared. As a result, the roughening between the grooves by the portions constituting the cloud and the maintenance of the high opening ratio of the grooves can be simultaneously achieved, and the ceramic member can be produced in which both the portions between the grooves and the inside of the grooves can be closely adhered with the surface treatment material with high strength.

In the ceramic member, the plurality of grooves may be formed in a linear, curved, or circumferential pattern, or may intersect each other.

Further, the present invention relates to a thermal spray-treated ceramic member characterized in that: having the ceramic member (laser processed ceramic member) and a thermal spray material filled in the grooves formed on the ceramic member and closely adhered to the ceramic member, a void area ratio in one of the grooves is 20% or less, the void area ratio being a proportion of a cavity volume in the one groove with respect to a volume of the one groove in a state where the thermal spray material is filled in the groove.

As a result, it is possible to fill the thermal spray material almost uniformly in the grooves formed on the surface of the laser-processed ceramic member, and to obtain a thermal spray-processed ceramic member in which the thermal spray material filled in the grooves and the laser-processed ceramic member are closely adhered with high strength.

Effects of the invention

As described above, according to the present invention, when a ceramic substrate is subjected to laser processing as pretreatment for surface treatment, by forming grooves capable of almost uniformly filling a surface treatment material on the surface of the ceramic substrate, a ceramic member capable of closely adhering with high strength to the surface treatment material filled in the grooves can be produced. Further, based on the present invention, a thermal spray processed ceramic member in which the ceramic member is closely adhered to a thermal spray material with high strength can be prepared.

Drawings

FIG. 1 is a view for explaining a ceramic processing method to which a laser processing method and a thermal spraying processing method based on the ceramic of the present invention are applied.

FIG. 2 is a schematic view showing a laser processing apparatus used in the laser processing step shown in FIG. 1.

FIG. 3 is a view showing a ceramic member according to the present invention, (a) shows a cross section of the ceramic member treated by thermal spraying, and (b) shows a plane of the ceramic member treated by laser.

Fig. 4 is a structural view for explaining a groove formed in a ceramic member according to the present invention, wherein (a) is a view showing one example of the groove and a structure in the vicinity of the groove in the ceramic member, and (b) is a view showing another example of the groove and the structure in the vicinity of the groove in the ceramic member.

FIG. 5 is a table for explaining test examples of the laser processing method and the thermal spraying processing method of the ceramics according to the present invention.

FIG. 6-1 is a photograph showing the appearance of a groove formed on the surface of a ceramic substrate by the laser beam of the test example shown in FIG. 5 (all examples). The photograph of the appearance of the groove portion in example 4 is the same as that in fig. 3 (b).

FIG. 6-2 is a photograph showing the appearance of grooves formed on the surface of a ceramic substrate by the laser beam of the test example shown in FIG. 5 (all comparative examples).

Fig. 6 to 3 are photographs of cross sections of groove portions obtained by thermally spraying a ceramic member having grooves formed by a laser beam in the test example (only a representative example) shown in fig. 5. The photograph of the cross section of the groove portion in example 4 is the same as that in fig. 3 (a).

FIG. 7 is a graph showing the test results of the test example shown in FIG. 5.

Detailed description of the invention

Next, modes for carrying out the present invention will be described in detail with reference to the accompanying drawings.

First, a laser processing method and a thermal spraying processing method based on the ceramic of the present invention, and a ceramic member and a thermal spraying processed ceramic member will be explained.

Fig. 1 is a view illustrating a ceramic processing method to which a laser processing method and a thermal spraying processing method based on the ceramic of the present invention are applied. As shown in the figure, the ceramic treatment method comprises the following steps: a laser processing process S1 of laser-processing the surface of the ceramic substrate C1 to form a laser-processed ceramic member C2, and a thermal spraying processing process S2 of thermally spraying the laser-processed ceramic member C2 with a thermal spraying material F to form a thermal spraying-processed ceramic member C3.

Here, the ceramic substrate C1 is a ceramic as a substrate to be pretreated for coating the thermal spray material F (surface treatment material). In addition, ceramics are solid materials composed of inorganic compounds such as oxides, carbides, nitrides, or borides. As the ceramic used for the ceramic substrate C1, silicon carbide, boron carbide, silicon nitride, boron nitride, aluminum oxide, yttrium oxide, zirconium oxide, or the like can be used.

As the thermal spray material F, a metal, an alloy containing a metal as a main component, a ceramic, a composite ceramic containing a ceramic as a main component, a cermet, or the like is used. Here, as the metal, tungsten, molybdenum, niobium, titanium, tantalum, or the like can be used. As the ceramic of the thermal spray material F, alumina, yttria, zirconia, or the like can be used. Further, as the thermal spraying method, a plasma thermal spraying method is preferably used, but other thermal spraying methods may also be used.

Fig. 2 is a schematic view showing the laser processing apparatus 1 used in the laser processing step S1 shown in fig. 1. As shown in the figure, the laser processing apparatus 1 includes: a laser oscillator 2 for oscillating a laser beam L; a direction changing mirror 3 that changes the direction of the laser light L oscillated from the laser oscillator 2; a focusing mirror 4 for focusing the laser light L reflected by the direction changing mirror 3; an X scanner 5 that reflects the laser light L focused by the focusing mirror 4 to adjust a laser light irradiation position in the X direction (the longitudinal direction of the ceramic substrate C1) on the ceramic substrate C1; a Y scanner 6 that reflects the laser light L reflected by the X scanner 5 to adjust a laser light irradiation position in the Y direction (width direction of the ceramic substrate C1) on the ceramic substrate C1; and a gas supply device 7 for supplying a non-oxidizing gas G to the surface of the ceramic substrate C1.

As the laser light L oscillated by the laser oscillator 2, either a continuously oscillated laser or a pulsed laser can be used. In addition, as the laser light L, a fiber laser or YVO can be used₄Laser, excimer laser, CO₂Laser, ultraviolet laser, YAG laser, semiconductor laser, and the like.

The gas supply device 7 supplies the non-oxidizing gas G to the surface of the ceramic substrate C1 when the ceramic substrate C1 is irradiated with the laser light L. Here, the non-oxidizing gas G is a gas for preventing (shielding) the surface of the ceramic substrate C1 from being oxidized when the ceramic substrate C1 is irradiated with a laser beam. As the non-oxidizing gas G, nitrogen, argon, helium, a mixed gas of these gases, or the like can be used.

Fig. 3 is a view showing a ceramic member according to the present invention, in which (a) is a view showing a cross section of a thermal spray-treated ceramic member 101, and (b) is a view showing a plane of a laser-treated ceramic member 102. The longitudinal direction, the width direction, and the depth direction shown in fig. 3(a) and (b) are the longitudinal direction, the width direction, and the depth direction of the groove f shown in the same drawing, respectively. Further, the thermal spray-treated ceramic member 101, the base 102 (laser-treated ceramic member 102), and the thermal spray material 103 shown in fig. 3(a) and (b) correspond to the thermal spray-treated ceramic member C3, the laser-treated ceramic member C2, and the thermal spray material F shown in fig. 1, respectively.

As shown in fig. 3, the thermal spray processed ceramic member 101 includes a base 102 as a base of the thermal spray processed ceramic member 101 and a thermal spray material 103 closely coated on the base 102. In the thermal spray-processed ceramic member 101, the grooves f extend in the length direction (one direction) shown in fig. 3(b) and are formed in a straight line, and a plurality thereof are provided at predetermined intervals in the width direction shown in fig. 3(a) and 3 (b). Then, in the thermal spray-treated ceramic member 101, the thermal spray material 103 and the base material 102 are closely attached to each other by filling the thermal spray material 103 in the grooves f formed on the base material 102 in the thermal spray treatment process S2 shown in fig. 1.

As shown in fig. 3B, a cloud-like deposit is continuously formed on the entire inter-groove portion (entire surface) of the substrate 102. These cloud-like deposits will be described in detail in the description part of fig. 4(b) described later.

Fig. 4 is a diagram for explaining the structure of the groove formed in the ceramic member based on the present invention, (a) is a diagram showing one example of the groove on the ceramic member and the structure in the vicinity of the groove, and (b) is a diagram showing another example of the groove on the ceramic member and the structure in the vicinity of the groove.

The surface of the laser-treated ceramic member 201 shown in fig. 4(a) (corresponding to the laser-treated ceramic member C2 shown in fig. 1) is composed of a concave surface (bottom surface) C, an inter-groove surface s, and a surface of a deposit (burr) b. The concave surface c extends in a straight direction { corresponding to the front-rear direction in fig. 4(a) }, and is formed so that the width becomes narrower as the depth increases. And the space formed by the concave surface c is the groove f. Further, the inter-groove surface s is a plane between adjacent grooves f on the surface of the laser ceramic member 201. The deposit (burr) b is a portion protruding from the concave surface c and/or the surface s between grooves in a direction inclined in the depth direction of the groove f. And the trench f is opened (opening a is formed) to one side in the depth direction at the maximum width W1 on the cross section CS orthogonal to the linear direction { corresponding to the front-rear direction in fig. 4(a) } of the extending direction of the trench f. The deposit (burr) b has a groove closing portion o that forms a space with the concave surface c in the depth direction of the groove f.

Here, the pitch P refers to a distance between center points of adjacent grooves f on the surface of the laser-processed ceramic member 201. And the pitch P is 0.05mm or more and 0.30mm or less. In addition, the aspect ratio is a ratio represented by depth D/maximum width W1. And an aspect ratio of 0.5 or more and 1.3 or less. Further, the aperture ratio is a ratio represented by (maximum width W1 — trench closing width W2) × 100/maximum width W1. And has an open porosity of 70% or more, preferably 80% or more. The depth D is the maximum depth of the groove f in the cross section CS. In addition, the maximum width W1 refers to the maximum width of the groove f in the cross section CS. Further, the trench closing width W2 is the length of the trench closing portion o on the cross section CS (the length in the width direction of the trench f).

By adjusting the aspect ratio and the aperture ratio within the above ranges, the area ratio of the voids in the thermal spray-treated ceramic member (not shown) prepared by filling the thermal spray material (not shown) in the groove f of the laser-treated ceramic member 201 can be set to 20% or less (preferably 15% or less) and the tensile adhesion strength can be set to 3MPa or more (preferably 5MPa or more), and a thermal spray-treated ceramic member (not shown) satisfying practical standards can be prepared. Here, the void area ratio is a proportion (percentage) of the volume of the cavity inside the groove f of the thermal spray processed ceramic member (the space inside the groove f not filled with the thermal spray material) to the internal volume of the groove f (the volume of the space defined by the concave surface c and the opening a). Further, the tensile adhesion strength refers to a tensile force per unit area when the thermal spray material filled in the grooves f is pulled from the laser-processed ceramic member 201 in the thermal spray-processed ceramic member, and the thermal spray material is peeled from the interface (extended surface of the inter-groove surface s) of the laser-processed ceramic member 201.

In the laser-processed ceramic member 301 shown in fig. 4(b), the deposits (burrs) b protruding from the surface s between grooves are formed of cloud-like deposits d1 and d2 (corresponding to the cloud-like deposits observed on the surface between grooves shown in fig. 3 b). Cloud-like accumulations d1 and d2 were formed as follows: in the laser processing process S1 shown in fig. 1, along with the formation of the grooves, a part of the ceramic substrate C1 is melted and/or evaporated and deposited in a cloud shape between the adjacent grooves f on the surface of the ceramic substrate C1, thereby roughening a part or all of the grooves f on the surface of the ceramic substrate C1. Here, when the cloud-like deposits d1 and d2 are deposits (burrs) b, the aperture ratio of the laser-treated ceramic member 301 is 70% or more, preferably 80% or more. Specifically, with respect to the aperture ratio of the laser-processed ceramic member 301, the trench closing width W2a in the trench closing portion o1 of the cloud-like deposit d1 and the trench closing width W2b in the trench closing portion o2 of the cloud-like deposit d2 were used, and are represented by (W1-W2a-W2b) × 100/W1.

Next, a test example based on the ceramic processing method and the ceramic member of the present invention will be explained.

First, test conditions will be explained with reference to fig. 1 and 2. For this test, the ceramic substrate C1 was subjected to laser treatment by the ceramic treatment apparatus 1, and then the laser-treated ceramic member C2 was subjected to thermal spraying treatment. In the laser processing apparatus 1, a continuous wave fiber laser is used as the laser oscillator 2, and a nitrogen gas is used as the non-oxidizing gas G supplied from the gas supply device 7. Further, in the thermal spraying treatment, Y is used₂O₃The plasma thermal spraying was performed as the thermal spraying material F.

Here, in the left column of fig. 5, the output means the output of the laser light, the wavelength means the wavelength of the laser light, the spot diameter means the diameter of the spot irradiated with the laser light L in the laser oscillator 2, the energy density means the laser output density, the laser irradiation speed means the speed at which the laser irradiation point moves on the ceramic substrate C1, and the number of repetitions means the number of times the laser light L is irradiated to the same position on the ceramic substrate C1. The treatment area is an area of the ceramic substrate C1 irradiated with the laser light L, and the treatment time is an irradiation time of the ceramic substrate C1 irradiated with the laser light L.

In the left column of fig. 5, the groove width is the maximum width W1 shown in fig. 4, the groove depth is the depth D shown in fig. 4, and the inter-groove pitch is the pitch P shown in fig. 4. The aspect ratio means the trench depth/trench width, the opening ratio, the void area ratio, and the tensile close adhesion strength as described in the description of fig. 4. In addition, the area ratio of the cloud-like deposit is a percentage of the area of the surface area between the trenches in which the cloud-like deposit (burrs) is formed.

Here, "Elcomet er (registered trademark) 510, model S", manufactured by Elcometer co, is used as a measuring device for the tensile close adhesion strength.

Then, the problems to be solved by the present invention are (1) to form grooves capable of almost uniformly filling the surface treatment material on the surface of the ceramic substrate, (2) to prepare a ceramic member capable of closely adhering with high strength to the surface treatment material filled in the grooves. Here, the requirement (1) is satisfied if the void area ratio is 20% or less (a practical standard), and the requirement (2) is satisfied if the tensile close adhesion strength is 3MPa or more (a practical standard).

Fig. 5 shows that in comparative example 2, when the aspect ratio is not 0.5 or more and not more than 1.3 (when it exceeds 1.3), the opening ratio becomes high (70% or more), the tensile adhesion strength becomes high (3MPa or more), and the void area ratio also becomes high (more than 20%). That is, comparative example 2 merely increases the depth of the grooves to increase the tensile adhesion strength, and does not increase the tensile adhesion strength by almost uniformly filling the thermal spray material into the grooves. Therefore, comparative example 2 cannot solve the problem (1) of the present invention.

On the other hand, in examples 1 to 7 and comparative example 1, the aspect ratio was 0.5 or more and 1.3 or less, and the opening ratios were different from each other. In comparative example 1, the void area ratio was 35% (more than 20%), and the tensile close adhesion strength was 2.1MPa (less than 3MPa), and the two problems (1) and (2) of the present invention could not be solved. However, in examples 1 to 7, the void area ratio was 20% or less, and the tensile close adhesion strength was 3MPa or more, and the problems (1) and (2) of the present invention could be solved. In order that the relationships between the aperture ratio, the void area ratio and the tensile close adhesion strength of examples 1 to 7 and comparative example 1 can be more easily understood, these relationships are plotted in fig. 7. When the area ratio of the cloud-like deposit is 45% or more (preferably 65% or more), the tensile close adhesion strength can be effectively improved.

FIG. 6-1 is a photograph showing the appearance of a groove portion formed on the surface of a ceramic substrate by the laser beam of the test example shown in FIG. 5 (all examples). The photograph of the appearance of the groove portion in example 4 is the same as that in fig. 3 (b). Fig. 6-2 is a photograph showing the appearance of the groove portion formed on the surface of the ceramic substrate by the laser beam of the test example shown in fig. 5 (all comparative examples). Fig. 6-3 are photographs of the cross-sectional surface of the groove portion after the thermal spraying treatment of the ceramic member in which the groove was formed by the laser in the test example (only representative example) shown in fig. 5. The photograph of the cross section of the groove portion in example 4 is the same as that in fig. 3 (a). The trench width, trench depth, inter-trench spacing, aspect ratio, presence or absence of cloud-like deposits, area ratio of cloud-like deposits, aperture ratio, and void area ratio described in fig. 5 were obtained based on the external photograph and the cross-sectional photograph.

In fig. 6-1, e1 indicates the inter-trench portion not covered with the cloud-like deposit in example 1. e2 denotes the inter-groove portions not covered by cloud-like deposits in example 3. e3 denotes the inter-trench portions not covered by the cloud-like accumulation in example 7. In fig. 6-2, e4 denotes the groove in comparative example 1. e5 shows a state in which the trench is filled with a cloud-like deposit and the aperture ratio is reduced in comparative example 1. e6 denotes an inter-groove portion in comparative example 3. e7 represents the deposit in comparative example 3. e8 represents the cloud-like deposit in comparative example 3. e9 denotes the groove in comparative example 3. In fig. 6 to 3, e10 represents the cloud-like accumulation in example 3. e11 indicates the inter-groove portions where no cloud-like buildup was formed in example 3. e12 shows the thermal spray material in example 3. e13 shows the thermal spray material in example 4. e14 shows a state where the entire space between the grooves is covered with the cloud-like deposit in embodiment 4. e15 represents a void (generated due to a large aspect ratio) in comparative example 2. e16 represents the thermal spray material in comparative example 2.

Fig. 7 is a graph showing the results of the test shown in fig. 5 (examples 1 to 7 and comparative example 1 shown in fig. 5). Specifically, in fig. 7, the horizontal axis represents the aperture ratio shown in fig. 5, the right vertical axis represents the tensile adhesion strength (adhesion strength) shown in fig. 5, and the left vertical axis represents the void area ratio shown in fig. 5. As shown in fig. 7, when the aperture ratio is 70% or more, particularly 80% or more, the close adhesion strength is significantly improved (3MPa or more when the aperture ratio is 70% or more, and 5MPa or more when the aperture ratio is 80% or more) and the void area ratio is significantly reduced (20% or less when the aperture ratio is 70% or more, and 15% or less when the aperture ratio is 80% or more) compared to the case where the aperture ratio is less than the above. Accordingly, fig. 7 shows that the problems (1) and (2) can be solved by adjusting the aspect ratio to 0.5 or more and 1.3 or less and adjusting the aperture ratio to 70% or more, preferably 80% or more.

As described above, according to the embodiment, by adjusting the aspect ratio to 0.5 or more and 1.3 or less and adjusting the aperture ratio to 70% or more, as shown in fig. 1 and 3, the grooves F capable of almost uniformly filling the thermal spray material F can be formed on the surface of the ceramic substrate C1, and the laser-treated ceramic member C2 capable of closely adhering with high strength to the thermal spray material F filled in the grooves F can be prepared.

That is, when the aspect ratio is less than 0.5, if the description is made with reference to the laser-processed ceramic member 201 shown in fig. 4(a) (in which the laser-processed ceramic member 201 does not represent a state in which the aspect ratio is less than 0.5), since the depth of the grooves f is too shallow, the thermal spray material does not penetrate into the depth of the laser-processed ceramic member 201, and even if the grooves f of the laser-processed ceramic member 201 are filled with the thermal spray material, the close adhesion strength between the laser-processed ceramic member 201 and the thermal spray material does not increase (the anchoring effect does not occur between the laser-processed ceramic member 201 and the thermal spray material). On the other hand, when the aspect ratio exceeds 1.3, the depth of the groove f is so deep that the deep portion of the groove f of the laser-processed ceramic member 201 is not filled with the thermal spray material. The close adhesion strength of the laser-processed ceramic member 201 to the thermal spray material is not increased. However, when the aspect ratio is 0.5 or more and 1.3 or less, as shown in fig. 3, the grooves f having a shape that can be filled with the thermal spray material 103 almost uniformly can be formed on the surface of the base material 102.

Further, when the aperture ratio is less than 70%, if the description is made with reference to the laser-treated ceramic member 201 shown in fig. 4(a) (in which the laser-treated ceramic member 201 does not show a state in which the aperture ratio is less than 70%), in the case of the deposit (burr) b protruding toward the direction inclined to the groove depth direction on the surface of the laser-treated ceramic member 201, a space is formed between the groove depth direction and the concave surface c as the surface of the groove f, and a groove closing portion o that prevents the thermal spray material from flowing into the space is formed over a wide range. This makes it difficult for the thermal spray material to spread throughout the inside of the groove f of the laser-processed ceramic member 201. However, if the aperture ratio is 70% or more, the thermal spray material spreads almost entirely inside the grooves f without being hindered by the deposits (burrs) b. As a result, the thermal spray material can be filled almost uniformly in the grooves f (grooves having an aspect ratio of 0.5 or more and 1.3 or less) having a shape that enables the thermal spray material to be filled almost uniformly without being hindered by the deposit (burr) b.

Therefore, by adjusting the aperture ratio of the grooves having an aspect ratio of 0.5 or more and 1.3 or less to 70% or more, as shown in fig. 1, the grooves capable of almost uniformly filling the thermal spray material F can be formed on the ceramic substrate C1, and the laser-treated ceramic member C2 capable of adhering closely to the thermal spray material F filled in the grooves with high strength can be produced.

In addition, in the embodiment, as shown in fig. 1 and 4(b), in the laser processing step S1, the cloud deposits d1 and d2 formed by deposition of the melted or/and evaporated portion of the ceramic base material C1 in a cloud form can effectively roughen the grooves (between grooves) adjacent to each other on the surface of the ceramic base material C1, and the grooves on the surface of the laser-processed ceramic member C2 can be made to adhere closely to the thermal spray material F with high strength. Further, in the cloud deposits d1 and d2 which are deposited in a cloud shape, the portions which form the spaces between the concave surfaces c and the depth direction of the grooves F are set as the groove closing portions o1 and o2, and the aperture ratio is set to 70% or more under this condition, so that the cloud deposits d1, d2 can be prevented from interfering with the filling of the thermal spray material F to the entire inside of the grooves F. As a result, it is possible to simultaneously achieve roughening between the grooves and maintain a high aperture ratio of the grooves F by the cloud-like deposits d1 and d2, and it is possible to prepare the laser-processed ceramic member C2 that can be closely adhered with the thermal spray material F at high strength both between the grooves and inside the grooves F.

Further, according to the embodiment, as shown in fig. 1 and 2, by having the gas supply device 7 that supplies the non-oxidizing gas G that prevents the surface of the ceramic substrate C1 from being oxidized during laser irradiation to the surface of the ceramic substrate C1, it is possible to prevent an oxide film from being formed on the ceramic substrate C1 at the time of laser irradiation, and it is possible to produce the laser-treated ceramic member C2 that is not adversely affected by the oxide film at the time of use.

Further, as shown in fig. 1 and 4(a), according to the embodiment, the thermal spray material F can be almost uniformly filled into the groove F formed on the surface of the laser-processed ceramic member C2, and the thermal spray material F and the laser-processed ceramic member C2 filled into the groove F are closely adhered to each other with high strength. That is, in the thermal spraying process, the thermal spray material F in a molten or semi-molten state is sprayed in the depth direction of the grooves F formed in the laser-processed ceramic member C2. Therefore, if the opening ratio of the grooves F of the laser-processed ceramic member C2 is reduced by the groove closing portions o, the thermal spray material F sprayed in the depth direction of the grooves F cannot reach the end portions (concave surfaces C) in the depth direction of the grooves F by the groove closing portions o, and therefore it is difficult to uniformly fill the grooves F with the thermal spray material F. However, according to the present invention, since the aspect ratio and the aperture ratio are within the ranges, the thermal spray material F sprayed on the groove F of the laser-processed ceramic member C2 can fill almost the entire inside of the groove F, and the laser-processed ceramic member C2 and the thermal spray material F can be closely adhered to each other with high strength.

In the above embodiment, the plurality of grooves f provided on the surface of the ceramic substrate C1 are formed in a linear processing pattern, or may be formed in a curved or circumferential processing pattern. Further, these plural grooves f may be formed so as to intersect with each other.

In the above embodiment, the method of processing ceramics shown in fig. 1 may include the thermal spraying process step S2, or may include only the laser processing step S1.

Description of the symbols

1 laser processing apparatus

2 laser oscillator

3 Direction changing mirror

4 focusing mirror

5X scanner

6Y scanner

7 gas supply device

101 thermal spraying treatment of ceramic member

102 base material (laser processing ceramic member)

103 thermal spray material

201 laser processing ceramic component

301 laser processing of ceramic components

a opening

b accumulations (thorns)

c concave surface (bottom)

CS section

C1 ceramic substrate

C2 laser processing ceramic component

C3 thermally sprayed ceramic component

Depth of D

Cloud-shaped d1 and d2 deposits

F thermal spray material

f groove

G non-oxidizing gas

L laser

o, o1, o2 groove closure

P pitch

s surface between grooves

Maximum width of W1

W2, W2a, W2b groove closed width

The claims (modification according to treaty clause 19)

1. A laser processing method of a ceramic, which is a laser processing method of a ceramic in which a surface of a ceramic substrate is irradiated with a laser beam to form a plurality of grooves on the surface and roughening of the surface between the grooves in the ceramic substrate is simultaneously performed,

the inter-groove surface is located between adjacent ones of the grooves in the surface of the ceramic substrate,

the distance between adjacent grooves is more than 0.05mm and less than 0.30mm,

the width in one of the grooves becomes narrower in the one groove with increasing depth starting from the opening in the one groove,

a ratio (aspect ratio) of a depth of the one groove to the width in the opening portion is 0.5 or more and 1.3 or less,

roughening the inter-groove surface by forming a cloud-like deposit on the inter-groove surface,

the opening ratio in the one trench is defined as: non-closed width x 100/opening width,

the opening width is the width of a calculation portion of the opening portion at which the opening ratio is calculated,

the non-closed width is a value obtained by subtracting a closed width from the opening width,

the closed width is a length of the groove closing portion in the width direction of the calculation portion,

the trench closing portion is a portion of the cloud-like deposit located on one side and/or the other side in the depth direction with respect to the opening portion located at the calculation portion, and is a portion located in the depth direction with a gap with respect to a bottom surface of the one trench,

in the case where the one groove has the spike formed on the bottom surface thereof, the groove closing portion is a portion of the cloud-like deposit and the spike which is positioned on one side and/or the other side in the depth direction with respect to the opening portion positioned at the calculation portion, and which is positioned in the depth direction with a gap from the bottom surface of the one groove,

the aperture ratio is also 70% or more at a portion where the aperture ratio is lowest among the aperture portions in the one trench.

2. The method for laser processing of ceramics according to claim 1,

the cloud-like build-up is obtained by the melt and/or evaporant building up on the inter-channel surfaces,

the melt is obtained by melting a part of the ceramic substrate by the laser irradiation to solidify and accumulate on the remaining part of the ceramic substrate,

the evaporant is obtained by evaporating a part of the ceramic base material by the laser irradiation, condensing/solidifying the evaporated evaporant, and depositing the condensed/solidified evaporant on the remaining part of the ceramic base material.

3. A method for thermal spraying treatment of ceramics, comprising:

a thermal spraying pretreatment step of irradiating a ceramic base material with a laser beam to form a laser-treated ceramic member; and

a thermal spraying treatment process of closely adhering a thermal spraying material to the laser-treated ceramic member, wherein,

in the thermal spraying pretreatment step, the laser beam is irradiated onto the surface of the ceramic substrate to form a plurality of grooves on the surface, and the surface between the grooves in the ceramic substrate is roughened at the same time, thereby producing the laser-treated ceramic member,