Cabin-penetrating heat-insulating pressing mechanism applied to ultrahigh vacuum low-temperature refrigerating system

文档序号:715072 发布日期:2021-04-16 浏览:27次 中文

阅读说明:本技术 一种应用于超高真空低温制冷系统的穿舱绝热压紧机构 (Cabin-penetrating heat-insulating pressing mechanism applied to ultrahigh vacuum low-temperature refrigerating system ) 是由 俞兵 袁林光 秦艳 范纪红 杨传森 卢耀文 周青枝 张灯 于 2020-12-23 设计创作,主要内容包括:本发明公开了一种应用于超高真空低温制冷系统的穿舱绝热压紧机构,包括操作手轮、螺杆、刀口法兰、波纹管、弹簧、隔热柱;螺杆前部安装操作手轮,中部通过螺纹连接安装在刀口法兰中心螺纹孔内,后部套设波纹管,螺杆后部端部连接波纹管的后接头II;波纹管的前端固定在刀口法兰上,后端设置弹簧,弹簧后端布置沿轴向可活动的隔热柱;转动操作手轮,带动螺杆前后移动,波纹管压缩或伸长。本发明可以使得操作人员可以通过旋转操作手轮,改变螺杆伸入真空舱室的长度使隔热组件获得不同压力,实现对超高真空舱室内活动的低温器件的压紧,而不使舱室内超高真空环境被破坏;选择低热导率的陶瓷材料制作隔热柱,达到一定绝热效果。(The invention discloses a cabin-penetrating heat-insulating pressing mechanism applied to an ultrahigh vacuum low-temperature refrigerating system, which comprises an operating hand wheel, a screw rod, a knife edge flange, a corrugated pipe, a spring and a heat-insulating column, wherein the operating hand wheel is connected with the screw rod through the operating hand wheel; an operating hand wheel is arranged at the front part of the screw rod, the middle part of the screw rod is arranged in a central threaded hole of the knife edge flange through threaded connection, a corrugated pipe is sleeved at the rear part of the screw rod, and the end part of the rear part of the screw rod is connected with a rear joint II of the corrugated pipe; the front end of the corrugated pipe is fixed on the knife edge flange, the rear end of the corrugated pipe is provided with a spring, and the rear end of the spring is provided with a heat insulation column which can move along the axial direction; the operating hand wheel is rotated to drive the screw rod to move back and forth, and the corrugated pipe is compressed or extended. The invention can lead an operator to change the length of the screw rod extending into the vacuum cabin by rotating the operating hand wheel so as to lead the heat insulation component to obtain different pressures, thus realizing the compaction of the movable low-temperature device in the ultrahigh vacuum cabin without damaging the ultrahigh vacuum environment in the cabin; the heat insulation column is made of ceramic materials with low heat conductivity, so that a certain heat insulation effect is achieved.)

1. A cabin-penetrating heat insulation pressing mechanism applied to an ultrahigh vacuum low-temperature refrigerating system is characterized by comprising an operating hand wheel (1), a screw rod (2), a knife edge flange (3), a corrugated pipe (5), a spring (9) and a heat insulation column (11); an operating hand wheel (1) is arranged at the front part of the screw rod (2), the middle part of the screw rod is arranged in a central threaded hole of the knife edge flange (3) through threaded connection, a corrugated pipe (5) is sleeved at the rear part of the screw rod, and the rear end part of the screw rod (2) is connected with a rear joint II (7) of the corrugated pipe (5); the front end of the corrugated pipe (5) is fixed on the knife edge flange (3), the rear end is provided with a spring (9), and the rear end of the spring (9) is provided with a heat insulation column (11) which can move along the axial direction; the hand wheel (1) is rotated to drive the screw rod (2) to move back and forth, and the corrugated pipe (5) is compressed or extended.

2. The cabin-penetrating heat-insulating compaction mechanism applied to the ultrahigh vacuum low-temperature refrigeration system is characterized in that a front joint I4 of the corrugated pipe (5) is sleeved on the screw rod (2) and the end face of the corrugated pipe is welded to a rear end face mounting step of the knife-edge flange (3).

3. The cabin-penetrating heat-insulating and compressing mechanism applied to the ultrahigh vacuum low-temperature refrigeration system as claimed in claim 2, wherein a containing groove is formed in the center of the rear joint II (7) of the corrugated pipe (5), a retainer ring (6) is arranged at the opening of the containing groove, the diameter of a central hole of the retainer ring (6) is smaller than that of the containing groove, the rear end part of the screw rod (2) is arranged in the groove, an annular groove is formed in the front part of the rear end part, and the retainer ring (6) is blocked at the annular groove, so that when the screw rod (2) moves back and forth, the rear joint II (7) of the corrugated pipe (5) is.

4. The cabin-penetrating heat-insulating compaction mechanism applied to the ultrahigh vacuum low-temperature refrigeration system is characterized in that a spring fixing piece (8) is arranged on the rear end face of the rear joint II (7) of the corrugated pipe (5), the spring fixing piece (8) is sleeve-shaped, and the spring (9) is coaxially arranged in the spring fixing piece (8); the heat insulation column (11) is arranged in the spring fixing piece (8) and can move along the axial direction of the spring fixing piece (8).

5. The cabin penetrating heat insulation and compression mechanism applied to the ultrahigh vacuum low temperature refrigeration system as claimed in claim 4, wherein the spring fixing piece (8) is welded on the rear end face of the rear joint II (7).

6. The cabin-penetrating heat-insulating and compressing mechanism applied to the ultrahigh vacuum low-temperature refrigerating system as claimed in claim 4, wherein a positioning protrusion is arranged at the center of the rear end face of the rear joint II (7), one end of the spring (9) is welded on the positioning protrusion, and the other end is connected with the front end face of the heat-insulating column (11).

7. The cabin penetrating heat insulation and compression mechanism applied to the ultrahigh vacuum low-temperature refrigeration system is characterized in that the heat insulation column (11) is axially provided with a long circular hole which is through in the radial direction, the rear end of the spring fixing piece (8) is radially provided with a split pin (10), and the split pin (10) penetrates through the long circular hole, so that a section of elastically telescopic space is formed between the screw rod (2) and the heat insulation column (11).

8. The cabin penetrating heat insulation and compaction mechanism applied to the ultrahigh vacuum low-temperature refrigeration system as recited in claim 1, characterized in that the rear end face of the knife-edge flange (3) is connected with the vacuum system cabin wall in a sealing way through a copper gasket, and the leakage rate of each sealing interface is less than 5 x 10-11Pam3/s。

9. The cabin penetrating heat insulation and compaction mechanism applied to the ultrahigh vacuum low-temperature refrigeration system is characterized in that one end of the screw rod (2) is connected with the operating hand wheel (1) through a pin structure.

10. The cabin-penetrating heat-insulating compaction mechanism applied to the ultrahigh vacuum low-temperature refrigeration system is characterized in that the heat-insulating columns (11) are made of ceramic materials with low thermal conductivity, and degassing is performed in a vacuum environment higher than 400 ℃ before assembly.

Technical Field

The invention belongs to the technical field of ultrahigh vacuum application, and relates to a cabin-penetrating heat-insulating pressing mechanism applied to an ultrahigh vacuum low-temperature refrigerating system.

Background

In the ultra-high vacuum low-temperature refrigeration system, it is often necessary to compress and fix low-temperature devices of different shapes and sizes, and it is usually necessary to give a certain pressure to the devices through a cabin-penetrating compression mechanism, but the conventional vacuum cabin-penetrating structure often has three problems: firstly, the vacuum degree of the system is damaged to a certain degree due to the additional leakage rate, the vacuum deflation of materials and other factors caused by the cabin penetrating structure, and the maintenance of an ultrahigh vacuum environment is influenced; secondly, the cabin penetrating structure can conduct a heat source outside the ultrahigh vacuum system to a low-temperature device, so that the temperature of the device is difficult to maintain at a target low temperature; and thirdly, the cabin penetrating mechanism can not be tightly attached to the low-temperature device due to expansion and contraction and vibration.

Disclosure of Invention

Objects of the invention

Aiming at the problems existing in the design of the conventional vacuum cabin-penetrating pressing mechanism, the invention aims to provide the ultrahigh vacuum cabin-penetrating heat-insulating pressing mechanism which can reduce gas leakage, material gas outlet and heat leakage and avoid poor pressing effect caused by vibration or temperature change.

(II) technical scheme

In order to solve the technical problem, the invention provides a cabin-penetrating heat-insulating pressing mechanism applied to an ultrahigh vacuum low-temperature refrigerating system, which comprises an operating hand wheel 1, a screw rod 2, a knife edge flange 3, a corrugated pipe 5, a spring 9 and a heat-insulating column 11; the front part of the screw rod 2 is provided with an operating hand wheel 1, the middle part of the screw rod is arranged in a central threaded hole of the knife edge flange 3 through threaded connection, the rear part of the screw rod is sleeved with a corrugated pipe 5, and the rear end part of the screw rod 2 is connected with a rear joint II7 of the corrugated pipe 5; the front end of the corrugated pipe 5 is fixed on the knife edge flange 3, the rear end is provided with a spring 9, and the rear end of the spring 9 is provided with a heat insulation column 11 which can move along the axial direction; the hand wheel 1 is rotated to drive the screw rod 2 to move back and forth, and the corrugated pipe 5 is compressed or extended.

The front joint I4 of the corrugated pipe 5 is sleeved on the screw rod 2, and the end surface of the corrugated pipe is welded on the mounting step of the rear end surface of the knife edge flange 3.

The center of the rear joint II7 of the corrugated pipe 5 is provided with an accommodating groove, the opening of the accommodating groove is provided with a check ring 6, the diameter of the central hole of the check ring 6 is smaller than that of the accommodating groove, the rear end part of the screw rod 2 is arranged in the groove, the front part of the rear end part is provided with an annular groove, and the check ring 6 is blocked at the annular groove, so that the rear joint II7 of the corrugated pipe 5 is driven to synchronously move when the screw rod 2 moves back and forth.

A spring fixing piece 8 is arranged on the rear end face of the rear joint II7 of the corrugated pipe 5, the spring fixing piece 8 is in a sleeve shape, and a spring 9 is coaxially arranged in the spring fixing piece 8; the heat insulation column 11 is arranged in the spring fixing member 8 and can move along the axial direction of the spring fixing member 8. The spring mount 8 is welded to the rear end face of the rear tab II 7.

The center of the rear end surface of the rear joint II7 is provided with a positioning projection, one end of the spring 9 is welded on the positioning projection, and the other end is connected with the front end surface of the heat insulation column 11.

The heat insulation column 11 is axially provided with a long round hole which is through in the radial direction, the rear end of the spring fixing piece 8 is radially provided with a cotter pin 10, and the cotter pin 10 penetrates through the long round hole, so that a section of elastically telescopic space is formed between the screw rod 2 and the heat insulation column 11.

The rear end face of the knife edge flange 3 is hermetically connected with the vacuum system bulkhead through a copper gasket, and the leakage rate of each sealing interface is less than 5 multiplied by 10-11Pam3/s。

One end of the screw rod 2 is connected with the operating hand wheel 1 through a pin structure.

The insulating column 11 is made of a ceramic material with low thermal conductivity and is degassed in a vacuum environment at a temperature higher than 400 ℃ before assembly.

(III) advantageous effects

According to the cabin penetrating heat insulation pressing mechanism applied to the ultrahigh vacuum low-temperature refrigeration system, through a special process method and structural innovation, a flexible cabin penetrating sealing structure based on all-metal sealing and a heat insulation pressing elastic heat insulation pressing structure based on a spring structure and a ceramic heat insulation column are designed; the mechanism can ensure that an operator can change the length of the screw rod extending into the vacuum cabin by rotating the operating hand wheel to ensure that the heat insulation assembly obtains different pressures, thereby realizing the compaction of the movable low-temperature device in the ultrahigh vacuum cabin without damaging the ultrahigh vacuum environment in the cabin; the ceramic material with low thermal conductivity is selected to manufacture the heat insulation column, so that a certain heat insulation effect is achieved; meanwhile, a spring is installed between the screw rod and the heat insulation assembly, one end of the spring is connected with the spring fixing piece, the other end of the spring is connected with the heat insulation column through a split pin structure, a section of elastic telescopic space is formed between the screw rod and the heat insulation column, the heat insulation assembly is closely attached to a low-temperature device, and slight vibration or material expansion with heat and contraction with cold during the operation of the ultrahigh vacuum low-temperature refrigeration system is avoided to damage the compression effect.

Drawings

Fig. 1 is a schematic structural diagram of a cabin-penetrating heat-insulating compaction mechanism applied to an ultrahigh vacuum low-temperature refrigeration system.

Detailed Description

In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.

As shown in fig. 1, the cabin-penetrating heat-insulating pressing mechanism applied to the ultrahigh vacuum low-temperature refrigeration system comprises an operating hand wheel 1, a screw rod 2, a knife edge flange 3, a corrugated pipe 5, a spring 9 and a heat-insulating column 11; the front part of the screw rod 2 is provided with an operating hand wheel 1, the middle part of the screw rod is arranged in a central threaded hole of the knife edge flange 3 through threaded connection, the rear part of the screw rod is sleeved with a corrugated pipe 5, and the rear end part of the screw rod 2 is connected with a rear joint II7 of the corrugated pipe 5; the front end of the corrugated pipe 5 is fixed on the knife edge flange 3, the rear end is provided with a spring 9, and the rear end of the spring 9 is provided with a heat insulation column 11 which can move along the axial direction; the hand wheel 1 is rotated to drive the screw rod 2 to move back and forth, and the corrugated pipe 5 is compressed or extended.

The front joint I4 of the corrugated pipe 5 is sleeved on the screw rod 2, and the end surface of the corrugated pipe is welded on the mounting step of the rear end surface of the knife edge flange 3.

The center of the rear joint II7 of the corrugated pipe 5 is provided with an accommodating groove, the opening of the accommodating groove is provided with a check ring 6, the diameter of the central hole of the check ring 6 is smaller than that of the accommodating groove, the rear end part of the screw rod 2 is arranged in the groove, the front part of the rear end part is provided with an annular groove, and the check ring 6 is blocked at the annular groove, so that the rear joint II7 of the corrugated pipe 5 is driven to synchronously move when the screw rod 2 moves back and forth.

A spring fixing piece 8 is arranged on the rear end face of the rear joint II7 of the corrugated pipe 5, the spring fixing piece 8 is in a sleeve shape, and a spring 9 is coaxially arranged in the spring fixing piece 8; the heat insulation column 11 is arranged in the spring fixing member 8 and can move along the axial direction of the spring fixing member 8. The spring mount 8 is welded to the rear end face of the rear tab II 7.

The center of the rear end surface of the rear joint II7 is provided with a positioning projection, one end of the spring 9 is welded on the positioning projection, and the other end is connected with the front end surface of the heat insulation column 11.

The heat insulation column 11 is axially provided with a long round hole which is through in the radial direction, the rear end of the spring fixing piece 8 is radially provided with a cotter pin 10, and the cotter pin 10 penetrates through the long round hole, so that a section of elastically telescopic space is formed between the screw rod 2 and the heat insulation column 11.

The rear end face of the knife edge flange 3 is hermetically connected with the vacuum system bulkhead through a copper gasket, and the leakage rate of each sealing interface is less than 5 multiplied by 10-11Pam3/s。

One end of the screw rod 2 is connected with the operating hand wheel 1 through a pin structure.

The insulating column 11 is made of a ceramic material with low thermal conductivity and is degassed in a vacuum environment at a temperature higher than 400 ℃ before assembly.

The cabin-penetrating heat-insulating pressing mechanism of the embodiment performs integral baking degassing treatment before use, and the baking temperature is set to be 150 ℃.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

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