Eddy current array sensor based on magnetoresistive element and crack quantitative monitoring method thereof

文档序号:733778 发布日期:2021-04-20 浏览:20次 中文

阅读说明:本技术 基于磁阻元件的涡流阵列传感器及其裂纹定量监测方法 (Eddy current array sensor based on magnetoresistive element and crack quantitative monitoring method thereof ) 是由 何宇廷 樊祥洪 陈涛 喻健 马斌麟 宋雨键 王悦 于 2020-12-10 设计创作,主要内容包括:本发明公开了基于磁阻元件的涡流阵列传感器及其裂纹定量监测方法,包括激励线圈、基底、磁阻元件;基底底面印刷激励线圈,基底顶面上方设置成阵列方式排布的磁阻元件,基底顶面与磁阻元件的导线连接;将基于磁阻元件的涡流阵列传感器贴在具有裂纹的结构件表面上,激励线圈内通电产生激励电流,裂纹处产生扰动涡流,影响磁阻元件的输出电压信号,根据输出电压信号判断是否有裂纹产生以及裂纹的长度。本发明基于磁阻元件的涡流阵列传感器裂纹定量监测方法在用于原位监测时,既可以适用于结构表面的裂纹监测,也可以适用于结构内部的裂纹监测,同时还可以扩大监测范围,提高裂纹的定量监测效果,进一步提高结构健康监控的技术水平。(The invention discloses an eddy current array sensor based on a magneto-resistive element and a crack quantitative monitoring method thereof, wherein the eddy current array sensor comprises an excitation coil, a substrate and the magneto-resistive element; the bottom surface of the substrate is printed with an exciting coil, the magnetoresistive elements arranged in an array mode are arranged above the top surface of the substrate, and the top surface of the substrate is connected with leads of the magnetoresistive elements; the eddy current array sensor based on the magneto-resistive element is attached to the surface of a structural part with cracks, excitation current is generated by electrifying in an excitation coil, disturbance eddy current is generated at the cracks, output voltage signals of the magneto-resistive element are influenced, and whether the cracks are generated or not and the length of the cracks are judged according to the output voltage signals. When the eddy current array sensor crack quantitative monitoring method based on the magneto-resistive element is used for in-situ monitoring, the method can be suitable for crack monitoring on the surface of the structure and crack monitoring in the structure, and can expand the monitoring range, improve the quantitative monitoring effect of the crack and further improve the technical level of structure health monitoring.)

1. The eddy current array sensor based on the magneto-resistive element is characterized by comprising an excitation coil, a substrate and the magneto-resistive element; the bottom surface of the substrate is printed with an exciting coil, the magnetoresistive elements arranged in an array mode are arranged above the top surface of the substrate, and the top surface of the substrate is connected with leads of the magnetoresistive elements; wherein the substrate comprises a flexible substrate or a bakelite plate; the magnetoresistive element includes any one of a hall sensor, a GMR sensor, and a TMR sensor.

2. A magnetoresistive element-based eddy current array sensor according to claim 1, where the array pattern comprises a rectangular matrix or an annular matrix.

3. A magnetoresistive element-based eddy current array sensor according to claim 2, where the substrate is a flexible substrate and the magnetoresistive element is a TMR sensor.

4. A magnetoresistive element-based eddy current array sensor according to claim 3, wherein when the array is a rectangular matrix, the flexible substrate is printed with excitation coils on a bottom surface thereof, the TMR sensor is arranged in a rectangular array on a top surface thereof, and the top surface of the flexible substrate is connected to the leads of the TMR sensor; the excitation coil is a circle of right-angle zigzag fold line and is divided into 6 excitation coil line segments along the y-axis direction, namely the excitation coils 1 to 6; three TMR sensor arrays in a row are uniformly arranged right above the exciting coil 4 along the y-axis direction.

5. A method for quantitatively measuring cracks using a magnetoresistive element-based eddy current array sensor according to any one of claims 1 to 4, comprising the steps of:

step S1, attaching the eddy current array sensor based on the magneto-resistive element on the surface of the structural part with cracks, and enabling the y axis of the excitation coil to be vertical to the crack propagation direction;

step S2, energizing the exciting coil to generate exciting current, generating eddy current on the surface or inside of the test piece in the direction opposite to the flowing direction of the exciting current, and respectively using ECiAnd (3) showing, wherein i is 1 and 2 … 6, a disturbance eddy current is generated at the crack, the disturbance eddy current generates a disturbance magnetic field, the magnetic induction intensity of the position of the magneto-resistive element is further influenced, the output voltage signal of the magneto-resistive element is further influenced, a transimpedance amplitude change rate curve and a phase change curve are calculated according to the output voltage signal, and whether the crack is generated and the length of the crack is judged.

6. The method for quantitatively measuring cracks in an eddy current array sensor based on magnetoresistive elements as claimed in claim 5, wherein in step S2, the method for determining the length of the crack is: judging the length of the crack according to the number of the characteristic points in the transimpedance amplitude change rate curve and the phase change curve by the following formula:

the crack length is equal to the excitation coil pitch x (number of characteristic points-1).

7. The method for quantitatively measuring cracks of an eddy current array sensor based on magnetoresistive elements as claimed in claim 5, wherein in step S2, the method for calculating the disturbing magnetic field comprises:

the flow direction of the disturbance vortex is taken as the + x-axis direction, the flow direction of the vortex is taken as the + y-axis direction, the intersection point of the x axis and the y axis is o, the direction vertical to the xoy plane is taken as the z-axis direction, and the starting point of the disturbance vortex flowing along the positive direction of the x axis in the space on the x axis is taken as the x axis1End point is x2The component on the y-axis is w, the magnetic induction produced by the test point P in spaceObtained according to the biot-savart law as follows:

in the formula, mu0The permeability in vacuum is 4 π × 10-7H/m; i represents the excitation current in amperes; x' represents the coordinates of the x-axis element in meters; r represents the distance from the x-axis unit to the test point P, and the unit is meter; z represents the z-axis coordinate of the test point P, and the unit is meter; y represents the y-axis coordinate of the test point P, and the unit is meter; w represents the distance of the perturbed vortex of length L from the x-axis in meters;a unit vector representing the y-axis direction;a unit vector representing a z-axis direction; r' represents the distance between the line unit of the disturbing vortex flowing along the negative direction of the x axis and the test point P, and the unit is meter;representing the magnetic induction intensity generated at the test point P by the disturbance vortex flowing along the positive direction of the x axis at the position of y-w;and the magnetic induction intensity generated at the test point P by the disturbance eddy current flowing along the negative direction of the x axis at the position of y-w is represented.

8. The method for quantitatively measuring cracks of an eddy current array sensor based on magnetoresistive elements as claimed in claim 5, wherein in step S2, the excitation frequency of the excitation coil influences the magnetic field penetration depth δ of the eddy current array sensor based on magnetoresistive elements, and the magnetic field penetration depth δ is calculated according to the following formula:

where Re denotes a real part, k is 2 pi/λ, λ denotes a magnetoresistive element spatial wavelength, and λ is equal to 2 times the excitation coil pitch; j represents an imaginary number, ω represents the excitation current angular frequency, σ represents the electrical conductivity of the test piece, μ represents the magnetic permeability of the test piece, and f represents the excitation frequency.

9. The method of claim 8, wherein the excitation frequency is 1Hz to 5 Hz.

Technical Field

The invention belongs to the technical field of structural health monitoring and nondestructive monitoring, and relates to an eddy current array sensor based on a magnetoresistive element and a crack quantitative monitoring method thereof.

Background

Airplanes are important transportation vehicles, and play an extremely important role in the transportation industry and military fields. However, the aircraft is difficult to avoid the influence of extreme loads and environment during the use process, and the damage of the aircraft structure, such as corrosion, fatigue crack, impact damage and the like, is easy to cause, and all the damage can influence the safe service of the aircraft. The aircraft structure is complicated, and some positions monitor the degree of difficulty great, if monitor the aircraft comprehensively, can cost great manpower and material resources on the one hand, and on the other hand dismantles again and introduces new damage easily with the safety in-process. Structural Health Monitoring (SHM) techniques diagnose the health of a structure by arranging various types of sensors on the structure to sense the state of the structure (e.g., temperature, stress, defects, etc.) in real time, and then processing, identifying, and judging the sensor data.

The most basic and important of the whole Structure Health Monitoring (SHM) system is the sensor, and whether the sensor can correctly sense the health state of the structure or not is related to the precision of the whole health monitoring system. Common sensors at the present stage include strain sensors, optical fiber sensors, comparative vacuum sensors, lamb wave sensors, flexible eddy current array sensors, intelligent coating sensors and the like. However, when the strain sensor monitors the structure, the micro-cracks are not easy to determine; the optical fiber sensor and the comparative vacuum sensor are inconvenient to install, especially for complex structures, and can only monitor cracks on the surface of the structure; the lamb wave sensor needs to be provided with a piezoelectric sensor in the use process, is suitable for a large flat plate structure and is not suitable for a complex small structure; the intelligent coating sensor has a complex preparation process and is difficult to coat in an external field.

The eddy current sensor, especially the flexible eddy current array sensor, as a traditional nondestructive monitoring sensor, has the advantages of high sensitivity, convenient installation, low cost and the like, has wide application prospect in the technical field of structural health monitoring, and is favored by a plurality of researchers. When the conventional eddy current sensor is used for monitoring deep cracks, the excitation frequency is low, in order to improve the signal to noise ratio, the number of turns of the induction coil and the number of turns of the excitation coil are large, and therefore the size of the eddy current sensor is large. Although the flexible eddy current array sensor is provided with the plurality of induction channels, cracks can be quantitatively monitored, the excitation frequency generally adopted is high in order to improve the signal to noise ratio of the sensor because the number of turns of the excitation coil and the number of turns of the induction coil are small, the flexible eddy current array sensor is only suitable for monitoring the cracks on the surface of the structure, the number of the channels is large, the flexible eddy current array sensor is not beneficial to monitoring large-scale areas, and meanwhile, the cracks inside the structure cannot be monitored.

It is above-mentioned to synthesize, especially flexible eddy current array sensor is used for normal position monitoring to current eddy current sensor, only be applicable to the crack monitoring on structure surface, can't carry out the problem of monitoring to the inside crackle of structure, be unfavorable for simultaneously monitoring region on a large scale, and be unfavorable for the quantitative monitoring effect of crackle, need provide a novel eddy current array sensor, when being used for normal position monitoring, both can be applicable to the crack monitoring on structure surface, also can be applicable to the inside crack monitoring of structure, simultaneously can also enlarge monitoring range, improve the quantitative monitoring effect of crackle, further improve the technical level of structure health monitoring.

Disclosure of Invention

In order to achieve the above object, the invention provides a method for quantitatively monitoring cracks of an eddy current array sensor based on a magnetoresistive element, which is applicable to crack monitoring on the surface of a structure and crack monitoring inside the structure when used for in-situ monitoring, can expand the monitoring range, improve the quantitative monitoring effect of the cracks, further improve the technical level of structure health monitoring, and solve the problems that the existing eddy current sensor, especially a flexible eddy current array sensor, in the prior art is only applicable to crack monitoring on the surface of the structure and cannot monitor the cracks inside the structure when used for in-situ monitoring, is not beneficial to monitoring a large-scale area and is not beneficial to the quantitative monitoring effect of the cracks.

The invention adopts the technical scheme that the eddy current array sensor based on the magneto-resistive element comprises an exciting coil, a substrate and the magneto-resistive element; the bottom surface of the substrate is printed with an exciting coil, the magnetoresistive elements arranged in an array mode are arranged above the top surface of the substrate, and the top surface of the substrate is connected with leads of the magnetoresistive elements; wherein the substrate comprises a flexible substrate or a bakelite plate; the magnetoresistive element includes any one of a hall sensor, a GMR sensor, and a TMR sensor.

Further, the array mode includes a rectangular matrix or a circular matrix.

Further, the substrate is a flexible substrate, and the magnetoresistive element is a TMR sensor.

Furthermore, when the array mode is a rectangular matrix, the bottom surface of the flexible substrate is printed with an excitation coil, the TMR sensors which are arranged in a rectangular array mode are arranged above the top surface of the flexible substrate, and the top surface of the flexible substrate is connected with a lead of the TMR sensors; the excitation coil is a circle of right-angle zigzag fold line and is divided into 6 excitation coil line segments along the y-axis direction, namely the excitation coils 1 to 6; three TMR sensor arrays in a row are uniformly arranged right above the exciting coil 4 along the y-axis direction.

Another object of the present invention is to provide a method for quantitatively measuring cracks using the above eddy current array sensor based on magnetoresistive elements, including the steps of:

step S1, attaching the eddy current array sensor based on the magneto-resistive element on the surface of the structural part with cracks, and enabling the y axis of the excitation coil to be vertical to the crack propagation direction;

step S2, energizing the exciting coil to generate exciting current, generating eddy current on the surface or inside of the test piece in the direction opposite to the flowing direction of the exciting current, and respectively using ECiWhich shows that i is 1,2 … 6, the turbulent eddy current is generated at the crack,the disturbance eddy current generates a disturbance magnetic field, so that the magnetic induction intensity of the position of the magnetic resistance element is influenced, the output voltage signal of the magnetic resistance element is further influenced, a transimpedance amplitude change rate curve and a phase change curve are calculated according to the output voltage signal, and whether cracks are generated or not and the length of the cracks are judged.

Further, in step S2, the method of determining the length of the crack is: judging the length of the crack according to the number of the characteristic points in the transimpedance amplitude change rate curve and the phase change curve by the following formula:

the crack length is equal to the excitation coil pitch x (number of characteristic points-1).

Further, in step S2, the method for calculating the disturbance magnetic field specifically includes:

the flow direction of the disturbance vortex is taken as the + x-axis direction, the flow direction of the vortex is taken as the + y-axis direction, the intersection point of the x axis and the y axis is o, the direction vertical to the xoy plane is taken as the z-axis direction, and the starting point of the disturbance vortex flowing along the positive direction of the x axis in the space on the x axis is taken as the x axis1End point is x2The component on the y-axis is w, the magnetic induction produced by the test point P in spaceObtained according to the biot-savart law as follows:

in the formula, mu0The permeability in vacuum is 4 π × 10-7H/m; i represents the excitation current in amperes; x' represents the coordinates of the x-axis element in meters; r represents the distance from the x-axis unit to the test point P, and the unit is meter; z represents the z-axis coordinate of the test point P, and the unit is meter; y represents the y-axis coordinate of the test point P, and the unit is meter; w represents the distance of the perturbed vortex of length L from the x-axis in meters;a unit vector representing the y-axis direction;a unit vector representing a z-axis direction; r' represents the distance between the line unit of the disturbing vortex flowing along the negative direction of the x axis and the test point P, and the unit is meter;representing the magnetic induction intensity generated at the test point P by the disturbance vortex flowing along the positive direction of the x axis at the position of y-w;and the magnetic induction intensity generated at the test point P by the disturbance eddy current flowing along the negative direction of the x axis at the position of y-w is represented.

Further, in step S2, the magnetic field penetration depth δ of the eddy current array sensor of the magnetoresistive element is affected by the excitation frequency of the excitation coil, and the magnetic field penetration depth δ is calculated according to the following equation:

where Re denotes a real part, k is 2 pi/λ, λ denotes a magnetoresistive element spatial wavelength, and λ is equal to 2 times the excitation coil pitch; j represents an imaginary number, ω represents the excitation current angular frequency, σ represents the electrical conductivity of the test piece, μ represents the magnetic permeability of the test piece, and f represents the excitation frequency.

Further, the excitation frequency is 1Hz to 5 Hz.

The invention has the beneficial effects that:

(1) the eddy current array sensor based on the magneto-resistive element preferably adopts a flexible printing technology, so that the sensor has the characteristics of flexibility and bendability and is suitable for crack monitoring on the surface of a complex structure; the invention adopts the magnetic resistance element to replace the induction coil of the original sensor, reduces the number of induction channels, enlarges the crack monitoring range of the sensor, and realizes the quantitative monitoring of the crack by measuring the y-axis component of the disturbance magnetic field formed by the disturbance eddy current; because the amplitude of the output signal of the magnetoresistive element is not influenced by the excitation frequency, the invention improves the monitoring depth of the crack by reducing the excitation frequency and increasing the space wavelength of the sensor, and improves the quantitative monitoring effect of the crack.

(2) The invention provides an eddy current array sensor based on magneto-resistive elements with two excitation layouts, which comprises a rectangular excitation layout and an annular excitation layout, wherein the rectangular excitation layout sensor is mainly applied to quantitative monitoring of cracks (including internal and surface cracks) of a general curved surface or plane structure, and the annular excitation layout sensor is mainly applied to quantitative monitoring of cracks (including external and internal surfaces of a bolt hole) at the hole edge of a bolt structure.

(3) When the method for monitoring the cracks is used for Structural Health Monitoring (SHM), the cracks generated by the airplane structure can be subjected to in-situ rapid nondestructive monitoring, whether and when maintenance is needed are determined according to the crack development condition, the maintenance cost is reduced, and the airplane maintenance efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a prior art flexible eddy current array sensor and a rectangular flexible eddy current array sensor based on a TMR sensor of the present invention; a in fig. 1 is a schematic structural diagram of a prior flexible eddy current array sensor; b in fig. 1 is a schematic structural diagram of the rectangular flexible eddy current array sensor based on the TMR sensor of the present invention.

FIG. 2 is a schematic view of the turbulent eddy current generated by the present invention as a crack passes beneath an excitation coil.

Fig. 3 is a magnetic field generated by the line current of the present invention in two dimensions.

Fig. 4 is a magnetic field of the line current of the present invention in three dimensions.

FIG. 5 shows the connection mode of the experimental system of the present invention.

FIG. 6 is a typical plot of sensor output as a function of applied magnetic field strength (applied magnetic fields. + -. 30Oe,. + -. 200Oe, excitation power supply 1V) in accordance with the present invention.

FIG. 7 is a graph of the quantitative monitoring of surface cracks by each sensing channel at an excitation frequency of 1KHz in accordance with the present invention; a in fig. 7 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 7 represents the amount of phase change of the sense channel 1; c in fig. 7 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 7 represents the amount of phase change of the sense channel 2; e in fig. 7 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 7 represents the amount of phase change of the sense channel 3.

FIG. 8 is a graph of the quantitative monitoring of surface cracks by each sensing channel at an excitation frequency of 2KHz in accordance with the present invention; a in fig. 8 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 8 represents the amount of phase change of the sense channel 1; c in fig. 8 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 8 represents the amount of phase change of the sense channel 2; e in fig. 8 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 8 represents the amount of phase change of the sense channel 3.

FIG. 9 is a graph of the quantitative monitoring of surface cracks by each sensing channel at an excitation frequency of 3KHz in accordance with the present invention; a in fig. 9 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 9 represents the amount of phase change of the sense channel 1; c in fig. 9 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 9 represents the amount of phase change of the sense channel 2; e in fig. 9 represents the transimpedance amplitude rate of change of the sense channel 3; f in fig. 9 represents the amount of phase change of the sense channel 3.

FIG. 10 is a graph illustrating the quantitative monitoring of surface cracks by each sensing channel at 4KHz excitation frequency in accordance with the present invention; a in fig. 10 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 10 represents the amount of phase change of the sense channel 1; c in fig. 10 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 10 represents the amount of phase change of the sense channel 2; e in fig. 10 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 10 represents the amount of phase change of the sense channel 3.

FIG. 11 is a graph showing the quantitative monitoring of surface cracks by each sensing channel at an excitation frequency of 5KHz in accordance with the present invention; a in fig. 11 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 11 represents the amount of phase change of the sense channel 1; c in fig. 11 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 11 represents the amount of phase change of the sense channel 2; e in fig. 11 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 11 represents the amount of phase change of the sense channel 3.

FIG. 12 is a graph showing the quantitative monitoring of 2mm deep cracks by each sensing channel when the excitation frequency is 1 KHz; a in fig. 12 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 12 represents the amount of phase change of the sense channel 1; c in fig. 12 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 12 represents the amount of phase change of the sense channel 2; e in fig. 12 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 12 represents the amount of phase change of the sense channel 3.

FIG. 13 is a graph showing the quantitative monitoring of 2mm deep cracks by each sensing channel when the excitation frequency is 2 KHz; a in fig. 13 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 13 represents the amount of phase change of the sense channel 1; c in fig. 13 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 13 represents the amount of phase change of the sense channel 2; e in fig. 13 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 13 represents the amount of phase change of the sense channel 3.

FIG. 14 is a graph showing the quantitative monitoring of 2mm deep cracks by each sensing channel at an excitation frequency of 3KHz in accordance with the present invention; a in fig. 14 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 14 represents the amount of phase change of the sense channel 1; c in fig. 14 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 14 represents the amount of phase change of the sense channel 2; e in fig. 14 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 14 represents the amount of phase change of the sense channel 3.

FIG. 15 is a graph showing the quantitative monitoring of 2mm deep cracks by each sensing channel at 4KHz excitation frequency according to the present invention; a in fig. 15 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 15 represents the amount of phase change of the sense channel 1; c in fig. 15 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 15 represents the amount of phase change of the sense channel 2; e in fig. 15 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 15 represents the amount of phase change of the sense channel 3.

FIG. 16 is a graph showing the quantitative monitoring of 2mm deep cracks by each sensing channel when the excitation frequency is 5 KHz; a in fig. 16 represents the transimpedance amplitude change rate of the sensing channel 1; b in fig. 16 represents the amount of phase change of the sense channel 1; c in fig. 16 represents the transimpedance amplitude change rate of the sense channel 2; d in fig. 16 represents the amount of phase change of the sense channel 2; e in fig. 16 represents the transimpedance amplitude change rate of the sense channel 3; f in fig. 16 represents the amount of phase change of the sense channel 3.

Fig. 17 is a schematic diagram of an annular flexible eddy current array sensor based on a TMR sensor of the present invention.

FIG. 18 is a graph of the trend of skin depth as a function of excitation frequency and spatial wavelength for the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the aspects of the present invention, it should be understood that the terms "below," "left," "above," "inward," and the like, indicate an orientation or positional relationship based on that shown in the drawings, are merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore should not be construed as limiting the scope of the present invention.

The invention provides an eddy current array sensor based on a magneto-resistive element and a crack quantitative monitoring method thereof from the viewpoints of simplifying the number of sensor sensing units and improving the quantitative nondestructive monitoring level of cracks, and the eddy current array sensor comprises an excitation coil, a substrate and the magneto-resistive element; the bottom surface of the substrate is printed with an exciting coil, the magnetoresistive elements arranged in an array mode are arranged above the top surface of the substrate, and the top surface of the substrate is connected with leads of the magnetoresistive elements; wherein the substrate comprises a flexible substrate or a bakelite plate; the magnetoresistive element includes any one of a hall sensor, a GMR sensor, and a TMR sensor; the array mode comprises a rectangular matrix or a circular matrix, and is selected and constructed according to different application scenes. Particularly, the flexible eddy current array sensor based on the TMR sensor has good effect on quantitative and nondestructive monitoring of surface layers and internal cracks of conductive materials such as metal and the like.

The excitation coil of the invention is preferably printed on a flexible substrate by means of a flexible printing technique, which is costly, and it is also possible to print the excitation coil on a relatively thin bakelite plate, from the point of view of increasing economy, if the surface of the structure is relatively smooth.

The rectangular eddy current array sensor based on the magneto-resistive element is suitable for in-situ monitoring of surface and internal cracks of a multi-layer flat plate structure, and can obtain a larger monitoring range than a common cylindrical sensor. The annular eddy current array sensor based on the magneto-resistive element adopts an annular excitation layout, so that not only can surface cracks be monitored, but also cracks in the bolt hole edge can be monitored.

In the Structure Health Monitoring (SHM) technology, data about airplane states, such as vibration, temperature, stress, whether defects exist and other relevant data are collected through a sensor installed on an airplane structure, the health state of the airplane structure is judged through a signal processing and damage recognition algorithm, then a finite element model of the structure is established, the part with the largest structural stress under the action of applied load is analyzed, whether the part is a dangerous part, namely a part which is easy to crack is judged according to the fatigue strength of a material of the part, and if the fatigue strength of the material of the part is larger than the maximum stress, the part is not the dangerous part; if the fatigue strength of the part is smaller than the maximum stress, the part is a dangerous part, the crack propagation direction is vertical to the maximum stress direction, the crack propagation direction generated by the aircraft structure is determined, then the eddy current array sensor based on the magneto-resistive element is applied to in-situ crack monitoring, when the sensor is installed, the y axis of the exciting coil is vertical to the crack propagation direction, and the crack propagation inevitably generates a y-axis disturbing magnetic field; the eddy current array sensor based on the magneto-resistive element has the advantages that the eddy current array sensor based on the magneto-resistive element can sense very weak magnetic fields, and if signals are not strong, the eddy current array sensor can be realized by a method of increasing excitation current.

Different from the traditional flexible eddy current array sensor, the eddy current array sensor based on the magneto-resistive element replaces the original induction coil by the magneto-resistive element, whether the crack is generated or not can be monitored in situ through the y-axis component of disturbance eddy current caused by the surface layer and the internal crack of conductive materials such as metal, the length of the crack can be monitored, the length of the surface crack can be monitored quantitatively, the length of the internal crack can be monitored, the method for monitoring the crack in situ can be used for carrying out in-situ rapid nondestructive monitoring on the crack generated by the airplane structure when being used for Structural Health Monitoring (SHM), whether maintenance is needed or not and when maintenance is needed is determined according to the crack development condition, the maintenance cost is reduced, and meanwhile, the maintenance efficiency of the airplane is improved.

The eddy current array sensor based on the magneto-resistance element directly induces the change of a magnetic field through the magneto-resistance element, converts the change of the magnetic field into the change of output voltage, and calculates the trans-impedance amplitude Z through the output voltageTAnd the phase theta are summed, and the change rate A of the transimpedance amplitude is calculatedRAnd the amount of change in phase Δ θ. Each magnetoresistive element has a respective output voltage signal. Among the magnetoresistive elements, TMR sensors in particular have a wide operating frequency, from DC to 1MHz, and therefore, replacing the induction coil with the magnetoresistive element does not affect the output characteristics of the sensor, relative to conventional flexible eddy current sensors.

In the upper section, the transimpedance amplitude ZTThe calculation formula of (2) is as follows:

in the formula (1), ViFor the output voltage amplitude of the sensor, IeIs the excitation current amplitude.

Rate of change of transimpedance amplitude ARThe calculation formula of (2) is as follows:

in the formula (2), ZT2Is the trans-impedance amplitude, Z, at different timesT1Is the transimpedance amplitude at the initial time.

The calculation formula of the phase variation Δ θ is: Δ θ ═ θ21 (3);

In the formula (3), θ2For the phase difference, θ, between the excitation current and the sensor output voltage at any time1Is the phase difference between the excitation current and the sensor output voltage at the initial time.

The invention relates to a crack quantitative measurement method of an eddy current array sensor based on a magnetoresistive element, which comprises the following steps:

step S1, attaching the eddy current array sensor based on the magneto-resistive element on the surface of the structural part with cracks, and enabling the y axis of the excitation coil to be vertical to the crack propagation direction;

step S2, energizing the exciting coil to generate exciting current, generating eddy current on the surface or inside of the test piece in the direction opposite to the flowing direction of the exciting current, and respectively using ECiThe method comprises the steps of representing, wherein i is 1,2 … 6, a disturbance eddy current is generated at a crack, the disturbance eddy current generates a disturbance magnetic field, the magnetic induction intensity of the position where a magnetic resistance element is located is further influenced, the output voltage signal of the magnetic resistance element is further influenced, a transimpedance amplitude change rate curve and a phase change curve are calculated according to the output voltage signal, and whether the crack is generated and the length of the crack is judged; the method for judging the length of the crack comprises the following steps: according to the number of the characteristic points in the transimpedance amplitude change rate curve and the phase change curve, the length of the crack is judged according to the following formula: the crack length is equal to the excitation coil pitch x (number of characteristic points-1).

Example 1

A TMR sensor-based rectangular flexible eddy current array sensor:

1.1, constructing a rectangular flexible eddy current array sensor based on a TMR sensor:

as shown in fig. 1, a rectangular flexible eddy current array sensor based on a TMR sensor includes an excitation coil, a flexible substrate, a TMR sensor; the bottom surface of the flexible substrate is printed with an excitation coil, a TMR sensor is arranged above the top surface of the flexible substrate, and the top surface of the flexible substrate is connected with a lead of the TMR sensor; the excitation coil is a circle of right-angle zigzag fold line and is divided into 6 excitation coil line segments along the y-axis direction, namely the excitation coils 1 to 6; the thickness of the exciting coil is 0.08 mm; the TMR sensor array is uniformly arranged right above the excitation coil along the y-axis direction, three TMR sensors in a row are uniformly arranged right above the excitation coil 4 along the y-axis direction, and in order to improve the crack monitoring range, the row number of the TMR sensors and the number of the TMR sensors in each row can be increased according to the situation; the TMR sensor in the middle is positioned right above the center position of the excitation coil 4 along the y-axis direction, and the other two TMR sensors are respectively positioned at the positions 15mm away from the two sides of the TMR sensor in the middle; the sensitive axis of the TMR sensor is the y-axis.

The reason why the three TMR sensors are arranged in a row is: when the rectangular flexible eddy current array sensor based on the TMR sensor monitors the surface of a test piece with the preformed crack in situ, the preformed crack penetrates through the exciting coil, the output signal of each TMR sensor draws a curve, and the longitudinal interval of the preformed crack is judged according to the change condition of the curve, for example: when a pre-crack is generated in the region between the first TMR sensor and the second TMR sensor, the signal output curves of the first TMR sensor and the second TMR sensor vary more than the signal output curve of the third TMR sensor. The distance between the three TMR sensors in a row is determined according to the longitudinal monitoring progress, and if the pre-crack locking position is required to be more accurate, the distance between the three rectangular TMR sensors is smaller, and the distance used in the present invention is preferably 15 mm.

1.2, the principle of the rectangular flexible eddy current array sensor based on the TMR sensor for crack monitoring is as follows:

when in use, the rectangular flexible eddy current array sensor based on the TMR sensor is attached to the plane of a test piece, and an excitation coil is arranged on the rectangular flexible eddy current array sensorThe y axis of the excitation coil is vertical to the propagation direction of the prefabricated crack, when excitation current is introduced into the excitation coil, eddy current opposite to the flowing direction of the excitation current is generated in a test piece below the excitation coil under the action of electromagnetic induction, and the eddy current below each excitation coil in the y axis direction is respectively processed by ECi(i ═ 1,2.. 6) indicates that since the flow directions of the excitation currents of the adjacent excitation coils are opposite at the same time, the flow directions of the adjacent eddy currents formed are also opposite, the intervals between the eddy currents are approximately equal and approximately equal to the intervals between the excitation coils, and the intervals between the eddy currents and the intervals between the excitation coils are closer as the excitation frequency is higher.

When the prefabricated crack passes through the lower part of the exciting coil, the eddy current flows along the surface of the prefabricated crack to form a disturbance eddy current due to the discontinuity of the medium, and then a disturbance magnetic field is generated, wherein the eddy current EC1Most of the eddy currents below the pre-crack will flow leftward along the pre-crack surface, merging into the EC2As disturbing eddy currents Id12According to conservation of charge, eddy currents EC2The part above the prefabricated crack has disturbance vortex Id12Equal-size and opposite-direction disturbance vortex flow back inflow vortex EC1Performing the following steps; when the pre-crack passes through the exciting coil 2, EC2Part I of (A) not involved in the formation of refluxd23Will flow into the EC along the pre-crack surface3And I isd23<Id12Presence of disturbed eddy current asymmetrical distribution, EC1And EC2Forming disturbing eddy current Id12And EC2And EC3Forming disturbing eddy current Id23The flow direction is reversed, thus disturbing the vortex Id12And disturbance vortex Id23The disturbing magnetic fields generated in space are opposite in direction.

When the crackle passes through exciting coil, can produce the disturbance vortex, and then produce the disturbance magnetic field, and then the magnetic induction intensity of TMR sensor position can take place corresponding change, and then the output voltage of TMR sensor can change, and the sensitivity orientation and the phase change volume curve of TMR sensor can change, and then can judge whether there is the length that the crackle produced and crackle through the change of magnetic induction intensity in the TMR sensor measuring space, specifically be: according to the variation trend graphs of the transimpedance amplitude change rate curve and the phase change curve of the TMR sensor, in the crack propagation process, the two curves have characteristic points (a peak valley point and an inflection point), and the crack length is equal to the excitation coil interval x (the number of the characteristic points is-1).

As shown in fig. 3, under the excitation of an energized excitation coil, the disturbance eddy current generated by the pre-crack on the surface or inside of the test piece is simplified into two line unit currents flowing along opposite directions, the flowing directions are set to be + x-axis and-x-axis directions, the eddy current direction is set to be + y-axis direction, a certain disturbance eddy current (the length of the line segment of the disturbance eddy current is L) flowing along the positive direction of the x-axis in the space, and the magnetic induction intensity generated by the test point P in the space is set to be L(the direction is perpendicular to the paper surface and inwards, namely the direction of the + z axis) can be known from the Biao-savart law,

in the formula (4), mu0The permeability in vacuum is 4 π × 10-7H/m; i represents the excitation current in amperes (A);a unit vector representing the x-axis direction;a unit vector representing the direction of the R axis; r represents the distance between the x-axis unit and the test point P and has the unit of meter (m); theta represents the angle of the interior angle of the test point P to the x-axis element from the positive x-axis direction in degrees.

Wherein the content of the first and second substances,z′=z-rcotθ,

in the formula (5), r represents the distance from the test point P to the x axis, and the unit is meter (m); z' represents a z-axis unit in meters (m); z represents the length in the positive z-axis direction in meters (m).

The formula (5) is brought into the formula (4),

integrating the current to obtain

In the formula (7), θ1The inner angle between the line segment of a certain disturbing vortex (the length of the line segment of the disturbing vortex is L) which shows that the test point P flows in the reverse direction of the x axis and the positive direction of the x axis is represented by an angle; theta 2 represents an angle between a line segment of a certain disturbing vortex flowing from the test point P to the positive direction of the x axis (the length of the line segment of the disturbing vortex is L) and the external angle of the positive direction of the x axis, and the unit is DEG;a unit vector representing the z-axis direction.

As can be seen from equation (7), the magnetic field at a certain point in the x-o-y plane passing through the origin of the disturbing magnetic field generated by the disturbing current is always only the magnetic induction intensity in the z-axis direction, while the TMR2901 sensor can only measure the magnetic field component in the y-axis direction, and thus cannot measure the magnetic field of the disturbing eddy current.

In practice, however, the distribution of disturbance eddy currents and the installation position of the TMR sensor are not on the same plane, on one hand, the distribution of disturbance eddy currents exists at each depth along the crack surface, on the other hand, the installation position of the sensor is higher than the surface of the test piece, so that the disturbance magnetic field has a y-axis component at the position of the test point of the TMR sensor, and it is necessary to establish a three-dimensional space coordinate system of the line unit current, and the starting position of a certain disturbance eddy current flowing in the x-axis positive direction in the space is the x-axis direction, the eddy current direction is the + y-axis direction, the direction perpendicular to the xoy plane is the z-axis direction, and the starting position of thePoint is x1End point is x2The component on the y-axis is w, as shown in FIG. 4, and the magnetic induction intensity generated at the test point P in spaceAccording to the biot-savart law,

in the formula (8), the reaction mixture is,

in the formula (8), the reaction mixture is,representing a vector from the test point P to an x-axis unit, x' representing a coordinate of the x-axis unit, y representing a y-axis coordinate of the test point P, w representing a distance from a disturbance vortex with the length of L to the x-axis, and z representing a z-axis coordinate of the test point P; r represents the distance from the test point P to the x-axis unit; the units are all meters (m).

So the formula (8) can be written as,

in the formula (9), the reaction mixture is,a unit vector representing the x-axis direction,a unit vector representing the y-axis direction,a unit vector representing the z-axis direction. In the formula (9)And in formula (4)Both refer to the same meaning, only the way of expression is different.

Therefore, the magnetic induction intensity generated by the disturbance eddy current at the test point P is:

similarly, if there is a disturbance eddy current flowing along the negative direction of the x axis at the negative direction y-w of the y axis, the magnetic induction intensity generated at the test point P is:

in equation (11), R' represents the distance between the line element of the disturbing eddy current flowing in the negative x-axis direction and the test point P, and is expressed in meters (m).

In the formula (I), the compound is shown in the specification,

thus, in combination with two line segments symmetrical to the x-axis disturbing the eddy currents, the vector sum of the magnetic induction intensities generated at the test point P is

Since the z-axis coordinate of the test point P is not equal to 0, the component of the magnetic induction intensity on the y-axis is not 0, and therefore, the TMR sensor can monitor the crack propagation in situ by sensing the magnetic field component on the y-axis.

1.3, the experimental system of the rectangular flexible eddy current array sensor based on the TMR sensor is as follows:

as shown in fig. 5, the experimental system of the rectangular flexible eddy current array sensor based on the TMR sensor of the present invention mainly includes the rectangular flexible eddy current array sensor based on the TMR sensor, a signal source, a power amplifier, a signal amplification module, a three-axis displacement platform, and a signal acquisition and processing system.

An alternating current signal with a certain frequency is generated by a signal source, the alternating current signal is amplified by a power amplifier and then applied to an excitation coil of a rectangular flexible eddy current array sensor based on a TMR sensor to generate an alternating magnetic field, further an eddy current is generated on the surface of a test piece with a prefabricated crack, further a disturbance eddy current is generated at the prefabricated crack, further a disturbance magnetic field is generated by the disturbance eddy current, a superposed magnetic field of the excitation magnetic field and the disturbance magnetic field is induced by the TMR sensor, the longitudinal position of crack extension is conveniently measured when three TMR sensors in a line are in action, the more the prefabricated crack is close to the longitudinal position of the TMR sensor, the more obvious the phase variation and the change rate of the trans-impedance amplitude are, a magnetic field signal sensed by the TMR sensor is converted into a voltage signal, the output voltage signal is amplified by a signal amplification module, and extracting the transimpedance amplitude and the phase through a phase-locked amplification algorithm.

Since the lock-in amplification algorithm is a very common algorithm, the present invention need not be described herein. Due to the hysteresis effect of the TMR sensor at zero point, as shown in fig. 6. The reason for applying a dc bias to a rectangular flexible eddy current array sensor based on a TMR sensor is to generate a bias magnetic field by a direct current so that the TMR sensing active region is in a linear range.

1.4, results of the experiment

By changing the excitation frequency and the crack depth, the quantitative crack monitoring experiment for the surface crack and the crack depth of 2mm under the five different excitation frequencies of 1KHz, 2KHz, 3KHz, 4KHz and 5KHz is developed.

1.4.1, surface crack quantitative monitoring (the sensing channel corresponds to the TMR sensor), and for the surface crack, under five different excitation frequencies, the identification of the surface crack by the three sensing channels of the sensor is shown in fig. 7 to fig. 11.

(1) When the excitation frequency f is 1KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 7.

A in fig. 7 represents the transimpedance amplitude change rate of the sensing channel 1, b in fig. 7 represents the phase change amount of the sensing channel 1, both of which have obvious characteristic points (peak-valley value and inflection point), and the monitoring effect is good; c in fig. 7 represents the transimpedance amplitude change rate of the sensing channel 2, d in fig. 7 represents the phase change amount of the sensing channel 2, both of which have obvious characteristic points (peak-valley value and inflection point), and the monitoring effect is good; e in fig. 7 represents the transimpedance amplitude change rate of the sensing channel 3, f in fig. 7 represents the phase change amount of the sensing channel 3, and both have no obvious characteristic point (peak-valley value, inflection point) and have poor monitoring effect; the crack is generated between the first TMR sensor and the second TMR sensor and is close to the two sensors, so that the monitoring effect is good, and the monitoring effect is not good due to the fact that the third sensor is far away.

(2) When the excitation frequency f is 2KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 8.

(3) When the excitation frequency f is 3KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 9.

(4) When the excitation frequency f is 4KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 10.

(5) When the excitation frequency f is 5KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 11.

Quantitative monitoring of 1.4.2 and 2mm deep cracks, wherein the quantitative monitoring of cracks by three induction channels of the sensor under five different excitation frequencies is shown in fig. 12-16.

(1) When the excitation frequency f is 1KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 12.

(2) When the excitation frequency f is 2KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 13.

(3) When the excitation frequency f is 3KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 14.

(4) When the excitation frequency f is 4KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 15.

(5) When the excitation frequency f is 5KHz, the transimpedance amplitude change rate and the phase change amount of the three sensing channels of the sensor for quantitative crack monitoring are shown in fig. 16.

1.4.3, experimental conclusion:

the experiment researches the crack quantitative monitoring capability of the surface crack and the internal crack with the depth of 2mm under 5 different excitation frequencies. According to the experimental results, for the surface crack, as shown in fig. 7 to 11, quantitative monitoring of the surface crack is obvious (having obvious characteristic points such as peak-valley value and inflection point) by using the change of the phase under 5 different excitation frequencies, and the quantitative monitoring effect of the crack is not obvious by using the change of the transimpedance amplitude under the conditions that the excitation frequency is 1KHz and 2KHz, and the quantitative monitoring effect is obvious along with the increase of the excitation frequency, the crack monitoring precision is about 5mm, and the distance between the crack monitoring precision and the excitation coil is consistent. When carrying out quantitative monitoring to 2mm deep crackle, as shown in fig. 12-16, when excitation frequency is 1KHz, it is all unsatisfactory to adopt phase variation and transimpedance amplitude rate of change to carry out quantitative monitoring effect to 2mm deep crackle, when excitation frequency is greater than 2KHz, it is comparatively obvious to adopt phase variation to carry out quantitative monitoring to the crackle, the change that adopts transimpedance amplitude is little, and TMR sensor 2's effect is obviously superior to TMR sensor 1 and TMR sensor 3. This is mainly due to the TMR sensor 2 being at a longitudinal distance of 5mm from the crack, whereas the TMR sensor 1 is at a longitudinal distance of 10mm from the crack. However, as the excitation frequency increases, the depth of the eddy current is too shallow, the disturbance effect of the internal crack on the eddy current is reduced, so that the phase variation is gradually smaller, the disturbance effect of the crack on the transimpedance amplitude is too small, and the crack cannot be quantitatively monitored through the variation rate of the transimpedance amplitude.

For the quantitative monitoring of the surface cracks, along with the increase of the excitation frequency, the peak-to-valley value of the transimpedance amplitude change rate and the phase change curve is more obvious, and the quantitative monitoring is more facilitated. For quantitative monitoring of 2mm deep internal cracks, the rate of change of the transimpedance amplitude and the amount of phase change gradually decrease with increasing excitation frequency. If the transimpedance amplitude change rate is adopted for quantitative monitoring, the effect is optimal when the excitation frequency is 2KHz, if the phase change amount is adopted for quantitative monitoring, the effect is optimal when the excitation frequency is 3KHz, 4KHz and 5KHz, the crack monitoring precision is about 5mm, and the crack monitoring precision is consistent with the distance between the excitation coils.

The invention can judge whether cracks are generated according to the transimpedance change rate and the phase change amount, judge which two TMR sensors the cracks are positioned between according to the change amount, and obtain the length of the cracks along the x-axis direction and the longitudinal section of the cracks, wherein the length of the cracks is X (the number of characteristic points is-1).

Example 2

Annular flexible eddy current array sensor based on TMR sensor:

annular flexible eddy current array sensor based on TMR sensor adopts annular excitation overall arrangement, is mainly applicable to overlap joint structure bolt hole limit and carries out normal position crack monitoring, and traditional flexible eddy current array sensor can only monitor surface crack because excitation frequency is higher, and the adoption is based on annular flexible eddy current array sensor of TMR sensor not only can monitor surface crack, also can monitor overlap joint structure bolt hole limit inboard crack.

The annular flexible eddy current array sensor based on the TMR sensor mainly comprises an annular excitation coil and TMR sensors, as shown in FIG. 17, the directions of excitation currents on adjacent excitation coils are opposite, small black rectangles are the TMR sensors, the TMR sensors are installed in the radial direction of the annular excitation coil, four TMR sensors in the annular flexible eddy current array sensor based on the TMR sensor shown in FIG. 17 are uniformly distributed along the radial direction of the annular excitation coil, the y axis of the sensitive axis of each TMR sensor is perpendicular to the radial direction of the excitation coil, and the installation number of the TMR sensors is selected according to requirements.

The invention discloses a method for improving crack monitoring depth, which comprises the following steps:

the skin depth of the test piece eddy current can be improved by reducing the excitation frequency, and the in-situ monitoring depth of the crack is further improved. However, when the excitation frequency is low to a certain extent, the distance between the excitation coils, that is, the spatial wavelength of the TMR sensor needs to be considered, and the magnetic field penetration depth δ of the TMR sensor is expressed by equation (13) at different excitation frequencies and sensor spatial wavelengths:

in equation (13), Re represents the real part, k is 2 pi/λ, λ represents the TMR sensor spatial wavelength, and λ is 2 times the spacing between the excitation coils; j represents an imaginary number, ω represents the excitation current angular frequency, σ represents the electrical conductivity of the test piece, μ represents the magnetic permeability of the test piece, and f represents the excitation frequency.

By describing the magnetic field penetration depth curve at different spatial wavelengths and excitation frequencies by equation (13), as shown in fig. 18, it can be seen that the magnetic field penetration depth δ gradually increases with the decrease of the excitation frequency f at a certain spatial wavelength λ of the TMR sensor, but when the excitation frequency f continues to decrease to a certain extent, the magnetic field penetration depth δ does not increase any more. Therefore, when designing the sensor, in order to improve the crack quantitative monitoring effect in monitoring the deep cracks, the excitation frequency f needs to be reduced and the sensor spatial wavelength λ needs to be considered. However, increasing the sensor spatial wavelength λ necessarily results in a decrease in the accuracy of crack quantitative monitoring.

It is noted that, in the present application, relational terms such as first, second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

All the embodiments in the present specification are described in a related manner, and the same and similar parts among the embodiments may be referred to each other, and each embodiment focuses on the differences from the other embodiments.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.

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