阅读说明：本技术 一种便于调节的双工位直投式光刻机 (Double-station direct-projection photoetching machine convenient to adjust ) 是由 周杰 张琪 符友银 李俊毅 于 2020-12-01 设计创作，主要内容包括：本发明公开了一种便于调节的双工位直投式光刻机,包括底座,底座的顶端固定开设有凹槽,凹槽内设置有工作台,且工作台的顶端设置有传送台；传送台由输送带、主动轮和从动轮构成,且主动轮与从动轮通过输送带传送连接；传送台的顶部设置有第一固定架和第二固定架,且第一固定架设置在第二固定架的一侧；第一固定架一侧的顶端设置有对位相机,第二固定架一侧的顶端设置有镜筒。该种便于调节的双工位直投式光刻机的底座内设置有液压缸,液压缸的伸缩端与工作台的底端固定连接,可通过液压缸实现工作台的升降,对工作台的高度进行调节,当需要对第一固定架和第二固定架上的对位相机和镜筒进行调节时可通过液压缸降低工作台的高度。(The invention discloses a double-station direct-projection photoetching machine convenient to adjust, which comprises a base, wherein a groove is fixedly formed in the top end of the base, a workbench is arranged in the groove, and a conveying table is arranged at the top end of the workbench; the conveying table is composed of a conveying belt, a driving wheel and a driven wheel, and the driving wheel is in conveying connection with the driven wheel through the conveying belt; the top of the conveying table is provided with a first fixing frame and a second fixing frame, and the first fixing frame is arranged on one side of the second fixing frame; the top of one side of the first fixing frame is provided with an alignment camera, and the top of one side of the second fixing frame is provided with a lens cone. The base of the double-station direct-projection photoetching machine convenient to adjust is internally provided with a hydraulic cylinder, the telescopic end of the hydraulic cylinder is fixedly connected with the bottom end of a workbench, the workbench can be lifted through the hydraulic cylinder, the height of the workbench can be adjusted, and the height of the workbench can be reduced through the hydraulic cylinder when the alignment camera and the lens cone on the first fixing frame and the second fixing frame are required to be adjusted.)

1. A double-station direct-projection photoetching machine convenient to adjust comprises a base (1) and is characterized in that a groove (2) is fixedly formed in the top end of the base (1), a workbench (3) is fixedly arranged in the groove (2), and a conveying table (4) is fixedly arranged at the top end of the workbench (3); the conveying table (4) is composed of a conveying belt (5), a driving wheel (6) and a driven wheel (7), and the driving wheel (6) is in conveying connection with the driven wheel (7) through the conveying belt (5); a first fixing frame (8) and a second fixing frame (9) are fixedly arranged at the top of the conveying table (4), and the first fixing frame (8) is fixedly arranged on one side of the second fixing frame (9); an alignment camera (10) is fixedly arranged at the top end of one side of the first fixing frame (8), and a lens barrel (11) is fixedly arranged at the top end of one side of the second fixing frame (9); the front of the workbench (3) is fixedly provided with an operation opening (12), and two sides of the workbench (3) are fixedly provided with openings (13).

2. The double-station direct-projection lithography machine convenient to adjust according to claim 1, wherein two hydraulic cylinders (14) are fixedly arranged inside the base (1), and the telescopic ends of the two hydraulic cylinders (14) penetrate through the groove (2) and are fixedly connected with the bottom end of the workbench (3).

3. The double-station direct-projection lithography machine convenient to adjust according to claim 1, wherein the bottom ends of the first fixing frame (8) and the second fixing frame (9) are fixedly provided with mounting blocks (15), and the surfaces of the mounting blocks (15) are horizontally provided with first threaded holes (16).

4. The double-station direct-projection lithography machine convenient to adjust according to claim 3, wherein a square groove (17) is fixedly formed in the top end of the workbench (3) and on both sides of the conveying table (4), and the width of the square groove (17) is greater than that of the mounting block (15).

5. The double-station direct-projection lithography machine convenient to adjust according to claim 3, wherein a second threaded hole (18) is horizontally formed in both the front side and the back side of the workbench (3), a threaded column (19) is arranged in the second threaded hole (18) in a threaded manner, and the second threaded hole (18) and the first threaded hole (16) are the same in size.

6. The double-station direct-projection lithography machine convenient to adjust according to claim 1, wherein a driving motor (20) is fixedly arranged on one side of the driving wheel (6), and the driving wheel (6) is in transmission connection with an output end of the driving motor (20).

7. The double-station direct-projection lithography machine convenient to adjust according to claim 1, wherein a storage bin (21) is fixedly arranged inside the base (1), and a bin door (22) is fixedly arranged on the front surface of the storage bin (21).

8. The double-station direct-projection lithography machine convenient to adjust according to claim 6, wherein a control switch (23) is fixedly arranged on the front surface of the base (1) and on one side of the bin gate (22), and the driving motor (20) and the hydraulic cylinder (14) are electrically connected with the control switch (23).

Technical Field

The invention relates to the technical field of photoetching machines, in particular to a double-station direct-projection photoetching machine convenient to adjust.

Background

Lithography machine (Mask Aligner) also known as: a mask alignment exposure machine, an exposure system, a photolithography system, etc., are core equipment for manufacturing a chip. It uses the technology similar to photo printing to print the fine pattern on the mask plate on the silicon chip by the exposure of light. The existing double-station direct-projection photoetching machine separately performs CCD alignment and exposure, and forms assembly line operation by utilizing a conveying belt form. However, the height of the worktable of the conventional double-station direct-projection lithography machine is usually fixed, which is inconvenient for adjusting or replacing the alignment camera and the exposed lens barrel for alignment. Therefore, the double-station direct-projection photoetching machine which is convenient to adjust is provided.

Disclosure of Invention

In order to solve the technical problems, the invention provides the following technical scheme:

the invention relates to a double-station direct-projection photoetching machine convenient to adjust, which comprises a base, wherein a groove is fixedly formed in the top end of the base, a workbench is fixedly arranged in the groove, and a conveying table is fixedly arranged at the top end of the workbench; the conveying table is composed of a conveying belt, a driving wheel and a driven wheel, and the driving wheel is in conveying connection with the driven wheel through the conveying belt; a first fixing frame and a second fixing frame are fixedly arranged at the top of the conveying table, and the first fixing frame is fixedly arranged on one side of the second fixing frame; the top end of one side of the first fixing frame is fixedly provided with an alignment camera, and the top end of one side of the second fixing frame is fixedly provided with a lens cone; the front of workstation is fixed and is provided with the operation mouth, and the both sides of workstation are fixed and are provided with the opening.

As a preferable technical scheme of the invention, two hydraulic cylinders are fixedly arranged inside the base, and the telescopic ends of the two hydraulic cylinders penetrate through the groove and are fixedly connected with the bottom end of the workbench.

As a preferred technical solution of the present invention, the bottom ends of the first and second fixing frames are fixedly provided with mounting blocks, and the surfaces of the mounting blocks are horizontally provided with first threaded holes.

As a preferable technical scheme of the invention, square grooves are fixedly formed in the top end of the workbench and positioned on two sides of the conveying table, and the width of each square groove is larger than that of the mounting block.

As a preferable technical scheme of the invention, the front side and the back side of the workbench are both horizontally provided with second threaded holes, the second threaded holes are internally provided with threaded columns, and the second threaded holes and the first threaded holes are the same in size.

As a preferred technical scheme of the invention, one side of the driving wheel is fixedly provided with a driving motor, and the driving wheel is in transmission connection with the output end of the driving motor.

As a preferable technical scheme of the invention, a storage bin is fixedly arranged inside the base, and a bin door is fixedly arranged on the front surface of the storage bin.

As a preferable technical scheme of the invention, a control switch is fixedly arranged on the front surface of the base and on one side of the bin gate, and the driving motor and the hydraulic cylinder are both electrically connected with the control switch.

The invention has the beneficial effects that: this kind of double-station direct-projection lithography machine's convenient to adjust base internal fixation is provided with the pneumatic cylinder, and the flexible end of pneumatic cylinder and the bottom fixed connection of workstation, the lift of workstation is realized to the accessible pneumatic cylinder, adjusts the height of workstation, and accessible pneumatic cylinder reduces the height of workstation when needs adjust counterpoint camera and lens cone on first mount and the second mount.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a perspective view of a conveniently adjustable dual-station direct-projection lithography machine according to the present invention;

FIG. 2 is a first plan view of a conveniently adjustable dual-station direct-projection lithography machine according to the present invention;

FIG. 3 is a second plan view of a conveniently adjustable dual-station direct-projection lithography machine according to the present invention.

In the figure: 1. a base; 2. a groove; 3. a work table; 4. a transfer table; 5. a conveyor belt; 6. a driving wheel; 7. a driven wheel; 8. a first fixing frame; 9. a second fixing frame; 10. aligning a camera; 11. a lens barrel; 12. an operation port; 13. an opening; 14. a hydraulic cylinder; 15. mounting blocks; 16. a first threaded hole; 17. a square groove; 18. a second threaded hole; 19. a threaded post; 20. a drive motor; 21. a storage bin; 22. a bin gate; 23. and controlling the switch.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.

Example (b): as shown in fig. 1-3, the double-station direct-projection lithography machine convenient to adjust comprises a base 1, wherein a groove 2 is fixedly formed in the top end of the base 1, a workbench 3 is fixedly arranged in the groove 2, and a conveying table 4 is fixedly arranged at the top end of the workbench 3; the conveying table 4 is composed of a conveying belt 5, a driving wheel 6 and a driven wheel 7, the driving wheel 6 is in conveying connection with the driven wheel 7 through the conveying belt 5, when the driving wheel 6 works, the conveying belt 5 is driven to rotate, when the conveying belt 5 rotates, the driven wheel 7 can be driven to rotate, and then conveying of the conveying belt 5 to products is achieved; a first fixing frame 8 and a second fixing frame 9 are fixedly arranged at the top of the conveying table 4, and the first fixing frame 8 is fixedly arranged on one side of the second fixing frame 9; the top end of one side of the first fixing frame 8 is fixedly provided with an alignment camera 10, the top end of one side of the second fixing frame 9 is fixedly provided with a lens cone 11, the alignment camera 10 can perform alignment operation on a product, the lens cone 11 can perform scanning alignment on the product and then adjust the focal length and perform exposure, and the alignment camera 10 and the lens cone 11 are both electrically connected with an external controller and transmit related data to the controller; the front of workstation 3 is fixed and is provided with operation mouth 12, and the fixed opening 13 that is provided with in both sides of workstation 3, and operation mouth 12 can be used to the position of adjustment counterpoint camera 10 and lens-barrel 11, and opening 13 can be linked together with external conveying equipment for the transport of product. The fixed two pneumatic cylinders 14 that are provided with in inside of base 1, and the bottom fixed connection of recess 2 and workstation 3 is run through to the flexible end of two pneumatic cylinders 14, and the adjustment of 3 heights of workstation is realized to the flexible of accessible pneumatic cylinder 14, is convenient for to counterpoint camera 10 and lens cone 11's regulation.

Wherein, the bottom end of first mount 8 and second mount 9 is fixed and is provided with installation piece 15, and the surface level of installation piece 15 is equipped with first screw hole 16. The top of workstation 3 and the both sides that are located conveying platform 4 are all fixed and have been seted up square groove 17, and the width in square groove 17 is greater than the width of installation piece 15 and is less than the bottom surface width of first mount 8 and second mount 9. Second screw hole 18 has been seted up to the equal level in front and the back of workstation 3, and second screw hole 18 internal thread is provided with screw thread post 19 and second screw hole 18 is the same with first screw hole 16's size, and accessible screw thread post 19 is with the fixed setting of first mount 8 and second mount 9 and workstation 3, prevents that the lens cone 11 on counterpoint camera 10 on the first mount 8 and the second mount 9 from taking place to become flexible at the during operation, influences operating mass with the camera.

Wherein, the fixed driving motor 20 that is provided with in one side of action wheel 6, and action wheel 6 is connected with driving motor 20's output transmission, can drive action wheel 6 when driving motor 20 during operation and rotate, can drive conveyer belt 5 when action wheel 6 rotates and rotate, and conveyer belt 5 rotates and drives from the rotation of driving wheel 7, and then realizes the normal operation of whole conveying platform 4. The interior of the base 1 is fixedly provided with a storage bin 21, the front of the storage bin 21 is fixedly provided with a bin door 22, and the storage bin 21 can be used for placing articles related to work. The front surface of the base 1 and one side of the bin gate 22 are fixedly provided with a control switch 23, the driving motor 20 and the hydraulic cylinder 14 are both electrically connected with the control switch 23, and the normal operation of the driving motor 20 and the hydraulic cylinder 14 can be controlled through the control switch 23.

The working principle is as follows: the first fixing frame 8 and the second fixing frame 9 are arranged at fixed positions, the mounting blocks 15 at the bottom ends of the first fixing frame 8 and the second fixing frame 9 are fixedly arranged in the square grooves 17, and the first fixing frame 8 and the second fixing frame 9 are fixedly arranged with the workbench 3 through threaded columns 19; the driving motor 20 is started through the control switch 23, the driving motor 20 drives the driving wheel 6 to rotate when working, the driving wheel 6 drives the conveying belt 5 to rotate when rotating, the conveying belt 5 drives the driven wheel 7 to rotate so as to realize the normal operation of the conveying table 4, a product is placed on the conveying belt 5 and conveyed to the bottom of the alignment camera 10 on the side surface of the first fixing frame 8 through the conveying belt 5 for alignment operation, and the conveying belt 5 continues to convey the product to the bottom of the lens barrel 11 on the side surface of the second fixing frame 9 for exposure operation after the alignment operation is finished; when the alignment camera 10 on the side of the first fixing frame 8 and the lens cone 11 on the side of the second fixing frame 9 need to be adjusted, the hydraulic cylinder 14 can be started through the control switch 23, the workbench 3 is driven to move downwards when the hydraulic cylinder 14 works, and the hydraulic cylinder 14 is suspended to descend when the workbench 3 descends to a proper height so as to be convenient for a worker to operate; after the adjustment is completed, the hydraulic cylinder 14 can be started again through the control switch 23 to push the workbench 3 to move to the original position.

Finally, it should be noted that: in the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.