阅读说明：本技术 一种主动式红外无损检测装置及其检测方法 (Active infrared nondestructive testing device and testing method thereof ) 是由 张健 周海峰 陈坚 吴周令 于 2020-11-30 设计创作，主要内容包括：本发明公开了一种主动式红外无损检测装置及其检测方法,主动式红外无损检测装置包括有激光诱导光源、样品扫描运动装置、红外滤光片、红外探测器、锁相放大器、连接有红外镜头的红外相机,样品扫描运动装置用于固定待测样品并带动待测样品进行平移,红外相机和激光诱导光源位于待测样品的同一侧且分别朝向待测样品的表面,红外探测器位于待测样品的另一侧并朝向待测样品的表面,红外滤光片位于红外探测器和待测样品之间,红外探测器的输出端与锁相放大器连接。本发明将激光诱导红外辐射检测法和锁相红外热成像法两种方法结合起来,解决无损检测中快速发现与高分辨测量的双重问题。(The invention discloses an active infrared nondestructive testing device and a testing method thereof, wherein the active infrared nondestructive testing device comprises a laser-induced light source, a sample scanning motion device, an infrared optical filter, an infrared detector, a lock-in amplifier and an infrared camera connected with an infrared lens, the sample scanning motion device is used for fixing a sample to be tested and driving the sample to be tested to translate, the infrared camera and the laser-induced light source are positioned on the same side of the sample to be tested and respectively face the surface of the sample to be tested, the infrared detector is positioned on the other side of the sample to be tested and faces the surface of the sample to be tested, the infrared optical filter is positioned between the infrared detector and the sample to be tested, and the output end. The invention combines the laser-induced infrared radiation detection method and the phase-locked infrared thermal imaging method, and solves the double problems of rapid discovery and high-resolution measurement in nondestructive detection.)

1. An active infrared nondestructive test device, its characterized in that: including laser induction light source, sample scanning telecontrol equipment, infrared filter, infrared detector, lock-in amplifier, infrared camera lens and infrared camera, infrared camera lens connect on infrared camera, sample scanning telecontrol equipment be used for fixed sample that awaits measuring and drive the sample that awaits measuring and carry out the translation, infrared camera and laser induction light source be located the sample that awaits measuring with one side and respectively towards the surface of the sample that awaits measuring, infrared detector be located the opposite side of the sample that awaits measuring and towards the surface of the sample that awaits measuring, infrared filter be located infrared detector and await measuring between the sample, infrared detector's output and lock-in amplifier be connected, when sample scanning telecontrol equipment drives the sample translation that awaits measuring, infrared detector carries out two-dimensional scanning to the sample surface that awaits measuring.

2. The active infrared nondestructive testing device of claim 1, wherein: and a focusing lens is arranged between the laser induction light source and the sample to be detected.

3. The active infrared nondestructive testing device of claim 2, wherein: and a laser modulation device is arranged between the laser induction light source and the focusing lens.

4. The active infrared nondestructive testing device of claim 3, wherein: the laser modulation device is a laser chopper.

5. The detection method of the active infrared nondestructive detection device according to claim 1, characterized in that: firstly, laser beams emitted by a laser induction light source are modulated and focused on a sample to be detected, after the sample to be detected absorbs laser energy, the temperature is raised to generate infrared radiation, an infrared radiation signal enters an infrared camera through an infrared lens, partial defects of the sample to be detected are quickly found through the infrared camera, then, aiming at the defects which are difficult to capture by the infrared camera, the sample to be detected is driven by a sample scanning motion device to translate, the infrared radiation signal enters an infrared detector for detection after passing through an infrared optical filter, the infrared detector carries out two-dimensional scanning detection on the surface of the sample to be detected, after the defect part of the sample absorbs the laser energy, the infrared radiation generated by temperature change has obvious difference compared with the defect-free part, and therefore, the defect information of the sample to be detected is obtained through scanning of the.

Technical Field

The invention relates to the field of optical nondestructive testing, in particular to an active infrared nondestructive testing device and a testing method thereof.

Background

The quality of the material directly influences the application of the material, certain materials are required to be free of contact and damage in the detection process, and the active laser infrared nondestructive detection technology can meet the detection conditions. The basic principle of the active laser infrared nondestructive testing technology is as follows: a modulated laser beam is incident to the surface of a sample, the sample absorbs the energy of the incident laser beam to cause the local temperature change of the sample, the temperature change can cause the sample to generate infrared radiation signals, an infrared device collects the infrared radiation signals, and the thermal performance parameters, defect information, material hardening depth and other material characteristics of the sample can be obtained by analyzing the infrared radiation signals.

The current common non-contact and non-destructive detection methods comprise a laser-induced infrared radiation detection method and a phase-locked infrared thermal imaging method. The laser-induced infrared radiation detection method utilizes a single-point infrared detector and adopts a scanning imaging mode to detect defects, so that an image with higher spatial resolution can be obtained, and the defect is that the detection time is longer, so that the efficiency is not high. The phase-locked infrared thermal imaging method utilizes an infrared thermal imager and adopts a shooting imaging mode to detect defects, so that the detection efficiency is high, and the defects are that the resolution is not high and the fine defects cannot be detected.

Disclosure of Invention

The invention aims to solve the technical problem of providing an active infrared nondestructive testing device and a testing method thereof, wherein a laser-induced infrared radiation testing method and a phase-locked infrared thermal imaging method are combined, and the double problems of quick discovery and high-resolution measurement in nondestructive testing are solved.

The technical scheme of the invention is as follows:

the utility model provides an active infrared nondestructive test device, is including laser induction light source, sample scanning telecontrol equipment, infrared filter, infrared detector, lock-in amplifier, infrared camera and infrared camera, infrared camera connect on infrared camera, sample scanning telecontrol equipment be used for fixed sample and drive the sample that awaits measuring and carry out the translation, infrared camera and laser induction light source be located the sample that awaits measuring with one side and respectively towards the surface of the sample that awaits measuring, infrared detector be located the opposite side of the sample that awaits measuring and towards the surface of the sample that awaits measuring, infrared filter be located between infrared detector and the sample that awaits measuring, infrared detector's output and lock-in amplifier be connected, when sample scanning telecontrol equipment drives the sample that awaits measuring translation, infrared detector carries out the two-dimensional scanning to the sample surface that awaits measuring.

And a focusing lens is arranged between the laser induction light source and the sample to be detected.

And a laser modulation device is arranged between the laser induction light source and the focusing lens.

The laser modulation device is a laser chopper.

An active infrared nondestructive test method includes modulating the laser beam emitted from laser-induced light source, focusing it on the sample to be tested, absorbing the laser energy, causing the temperature to rise to generate infrared radiation, the infrared radiation signal enters the infrared camera through the infrared lens, and the defect position of the sample to be detected is quickly found by the infrared camera, aiming at the defect that the infrared camera is difficult to capture and analyze, the sample to be detected can be driven to move horizontally by the sample scanning motion device, an infrared radiation signal passes through the infrared filter and then enters the infrared detector for detection, the infrared detector performs two-dimensional scanning detection on the surface of the sample to be detected, and after the defect part of the sample absorbs laser energy, the infrared radiation generated by temperature change is obviously different from that generated by the defect-free part, and scanning by an infrared detector and performing phase-locked analysis by a phase-locked amplifier to obtain the defect information of the sample to be detected.

The invention has the advantages that:

the invention adopts a transmission type scattering measurement method, a laser induction light source and an infrared detector of the transmission type scattering measurement are respectively positioned at two sides of a sample to be measured, the basic principle is that a laser beam after being focused irradiates the surface of the sample, the sample absorbs laser energy and causes temperature rise to generate infrared radiation, the infrared detector is directly adopted at the other side of the sample to collect infrared signals, and when the laser induction light spot focused on the surface of the sample is smaller, the scanning resolution of the infrared detector is higher.

The invention adopts an infrared thermal imaging technology to rapidly acquire the infrared image of the sample by utilizing an infrared lens and an infrared camera for rapidly finding the defects, and the technology can rapidly find and analyze the micron-level defects.

The invention combines the laser-induced infrared radiation measurement technology and the phase-locked infrared thermal imaging technology, can quickly position, detect and analyze the tiny defects on the surface and the subsurface of the optical material, and overcomes the problem that the quick discovery and the high resolution requirement of the common nondestructive detection method can not be realized at the same time.

Drawings

Fig. 1 is a schematic structural diagram of an active infrared nondestructive testing apparatus according to an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1, an active infrared nondestructive testing device comprises a laser-induced light source 1, a sample scanning movement device 5, an infrared filter 6, an infrared detector 7, a lock-in amplifier 8, an infrared lens 9 and an infrared camera 10, wherein the infrared lens 9 is connected to the infrared camera 10, the sample scanning movement device 5 is used for fixing a sample 4 to be tested and driving the sample 4 to be tested to translate, the infrared camera 10 and the laser-induced light source 1 are positioned at the same side of the sample 4 to be tested and respectively face the surface of the sample 4 to be tested, a laser chopper 2 and a focusing lens 3 are sequentially arranged between the laser-induced light source 1 and the sample 4 to be tested, the infrared detector 7 is positioned at the other side of the sample 4 to be tested and faces the surface of the sample 4 to be tested, the infrared filter 6 is positioned between the infrared detector 7 and the sample 4 to be tested, the, when the sample scanning movement device 5 drives the sample 4 to be detected to move horizontally, the infrared detector 7 performs two-dimensional scanning on the surface of the sample 4 to be detected.

An active infrared nondestructive testing method, firstly a laser beam emitted by a laser induction light source 1 is modulated by a laser chopper 2 and then focused on a sample 4 to be tested by a focusing lens 3, after the sample 4 to be tested absorbs laser energy, the temperature rise is caused to generate infrared radiation, because the infrared image range collected by an infrared camera 10 is large, the time is short, the efficiency is high, an infrared radiation signal enters the infrared camera 10 through an infrared lens 9, and partial defects of the sample 4 to be tested are rapidly found by the infrared camera 10, then aiming at the defects which are difficult to capture by the infrared camera 10, a sample scanning motion device 5 drives the sample 4 to be tested to translate, the infrared radiation signal enters an infrared detector 7 for detection after passing through an infrared filter 6, the infrared detector 7 performs two-dimensional scanning detection on the surface of the sample 4 to be tested, because the defects of the sample partially absorb laser energy, the infrared radiation generated by the temperature change has obvious difference compared with the defect-free part, so that the defect information of the sample to be detected is obtained by scanning through the infrared detector 7 and performing phase-locked analysis through the phase-locked amplifier 8. When the laser spot focused on the surface of the sample 4 to be measured is small enough, the scanning resolution of the infrared detector 7 can be higher.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.