阅读说明：本技术 微全分析系统及其工作方法、制作方法 (Micro total analysis system and working method and manufacturing method thereof ) 是由 宋晓欣 张锋 刘文渠 吕志军 董立文 崔钊 孟德天 王利波 姚琪 于 2019-07-18 设计创作，主要内容包括：公开了一种微全分析系统及其工作方法、制作方法,微全分析系统包括至少一个微全分析单元,每一微全分析单元包括：微流控器件,包括相互连接的第一电极和介质层,所述介质层用于基于所述第一电极的电压驱动待测液滴移动；声波检测器件,包括与所述介质层连接的第二电极,所述介质层复用为所述声波检测器件的换能器,用于基于所述第二电极的电压产生射向所述待测液滴的声波,并基于接收到的声波产生与所述待测液滴对应的检测结果。本公开提供的微全分析系统及其工作方法、制作方法,能够使微流控器件与声波检测器件集成于同一个芯片。(A micro total analysis system is disclosed, and its working method and manufacturing method, the micro total analysis system includes at least one micro total analysis unit, each micro total analysis unit includes: the microfluidic device comprises a first electrode and a dielectric layer which are connected with each other, wherein the dielectric layer is used for driving the liquid drop to be detected to move based on the voltage of the first electrode; the medium layer is multiplexed as an energy converter of the acoustic wave detection device and is used for generating acoustic waves which are emitted to the liquid drop to be detected based on the voltage of the second electrode and generating a detection result corresponding to the liquid drop to be detected based on the received acoustic waves. The micro total analysis system, the working method and the manufacturing method thereof can enable the micro-fluidic device and the sound wave detection device to be integrated on the same chip.)

A micro-total analysis system comprising at least one micro-total analysis unit, each micro-total analysis unit comprising:

the microfluidic device comprises a first electrode and a dielectric layer which are connected with each other, wherein the dielectric layer is used for driving the liquid drop to be detected to move based on the voltage of the first electrode;

the medium layer is multiplexed as an energy converter of the acoustic wave detection device and is used for generating acoustic waves which are emitted to the liquid drop to be detected based on the voltage of the second electrode and generating a detection result corresponding to the liquid drop to be detected based on the received acoustic waves.

The micro total analysis system according to claim 1, wherein the micro total analysis unit further comprises a hydrophobic layer on a side of the medium layer facing the droplet to be detected, the hydrophobic layer being in contact with the droplet to be detected.

The micro total analysis system according to claim 2, wherein the hydrophobic layer comprises a through hole opened in the detection area, a third electrode connected to the medium layer is disposed in the through hole, and the third electrode is configured to emit the acoustic wave generated by the medium layer to the part of the droplet to be detected in the detection area.

The micro total analysis system according to claim 3, wherein the micro total analysis unit further comprises a deceleration layer, the deceleration layer is located on a surface of the third electrode facing the droplet to be detected, and the deceleration layer is configured to reduce a moving speed of the droplet to be detected on the deceleration layer.

The micro total analysis system according to claim 1, wherein the micro total analysis unit further comprises an organic layer and a passivation layer sequentially disposed on a side of the first electrode away from the droplet to be detected, a groove is formed in a position of the passivation layer corresponding to the detection region, and the organic layer is filled in the groove.

The micro total analysis system according to claim 5, wherein the width of the groove is 3-5 mm and the depth of the groove is 0.1-1 μm.

The micro total analysis system according to claim 5 or 6, wherein the number of the micro total analysis units is multiple, the multiple micro total analysis units are arranged in an array, and the distance between the centers of two adjacent grooves is less than or equal to half of the wavelength of the sound wave.

The micro total analysis system of claim 5, wherein the organic layer has a thickness greater than 10 microns.

The micro total analysis system according to claim 1, wherein the frequency of the sound wave is in the range of 25-40kHz, and the wavelength of the sound wave is in the range of 8.5-13.6 mm.

The micro total analysis system according to claim 1, wherein the number of the micro total analysis units is plural, a plurality of the micro total analysis units are arrayed, and the number of the transducers covered by a droplet to be measured is greater than or equal to 6.

The micro total analysis system of claim 1, wherein the dielectric layer has a dielectric constant greater than 9.

A method of operating a micro total analysis system according to any one of claims 1 to 11, the method comprising:

the first electrode controls the medium layer to drive the liquid drop to be detected to move;

in a first time period, the dielectric layer is controlled by the second electrode to generate sound waves which are emitted to the liquid drop to be detected;

and in a second time period, receiving the detection result corresponding to the liquid drop to be detected generated by the medium layer based on the received sound wave.

The method of claim 12, applied to the micro total analysis system of claim 3; the step of controlling the dielectric layer to drive the liquid drop to be detected to move through the first electrode comprises the following steps:

controlling the medium layer to drive the liquid drop to be detected on the hydrophobic layer to move to the area to be detected through the first electrode;

the step of controlling the dielectric layer to generate the acoustic wave emitted to the liquid drop to be detected through the second electrode comprises the following steps:

controlling the dielectric layer to generate sound waves through the second electrode;

and controlling the third electrode to emit the acoustic wave generated by the medium layer to the part of the liquid drop to be detected, which is positioned in the detection area.

A method of making a micro total analysis system, the method comprising:

forming a plurality of functional film layers on a substrate;

forming a first electrode and a second electrode which are arranged in the same layer on the plurality of functional film layers;

and forming a dielectric layer covering the first electrode and the second electrode, wherein the dielectric layer is respectively connected with the first electrode and the second electrode.

The method of claim 14, wherein after the step of forming a dielectric layer overlying the first and second electrodes, further comprising:

forming a third electrode in the detection area on the dielectric layer, wherein the third electrode is connected with the dielectric layer;

and forming a hydrophobic layer covering the dielectric layer and the third electrode, and removing the hydrophobic layer positioned in the detection area.

The method of claim 14, wherein after the step of forming a dielectric layer overlying the first and second electrodes, further comprising:

sequentially forming a third electrode and a deceleration layer which are arranged in a stacked mode in the detection area on the medium layer, wherein the third electrode is connected with the medium layer;

and forming a hydrophobic layer covering the medium layer and the deceleration layer, and removing the hydrophobic layer positioned in the detection area.

The method of claim 14, wherein the step of forming a plurality of functional film layers on a substrate base plate comprises:

forming a passivation layer on a substrate, and forming a groove on the passivation layer at a position corresponding to the detection region;

forming an organic layer covering the passivation layer and the groove;

the step of forming the first electrode and the second electrode on the same layer on the plurality of functional film layers includes:

and forming a first electrode and a second electrode which are arranged in the same layer on the organic layer.