阅读说明：本技术 微全分析系统及其工作方法、制作方法 (Micro total analysis system and working method and manufacturing method thereof ) 是由 宋晓欣 张锋 刘文渠 吕志军 董立文 崔钊 孟德天 王利波 姚琪 于 2019-07-18 设计创作，主要内容包括：公开了一种微全分析系统及其工作方法、制作方法,微全分析系统包括至少一个微全分析单元,每一微全分析单元包括：微流控器件,包括相互连接的第一电极和介质层,所述介质层用于基于所述第一电极的电压驱动待测液滴移动；声波检测器件,包括与所述介质层连接的第二电极,所述介质层复用为所述声波检测器件的换能器,用于基于所述第二电极的电压产生射向所述待测液滴的声波,并基于接收到的声波产生与所述待测液滴对应的检测结果。本公开提供的微全分析系统及其工作方法、制作方法,能够使微流控器件与声波检测器件集成于同一个芯片。(A micro total analysis system is disclosed, and its working method and manufacturing method, the micro total analysis system includes at least one micro total analysis unit, each micro total analysis unit includes: the microfluidic device comprises a first electrode and a dielectric layer which are connected with each other, wherein the dielectric layer is used for driving the liquid drop to be detected to move based on the voltage of the first electrode; the medium layer is multiplexed as an energy converter of the acoustic wave detection device and is used for generating acoustic waves which are emitted to the liquid drop to be detected based on the voltage of the second electrode and generating a detection result corresponding to the liquid drop to be detected based on the received acoustic waves. The micro total analysis system, the working method and the manufacturing method thereof can enable the micro-fluidic device and the sound wave detection device to be integrated on the same chip.)