阅读说明：本技术 具有传感器的用于引导流体的部件 (Component for guiding a fluid with a sensor ) 是由 M·费里切克 D·菲利普斯 O·彼得斯 V·贝科夫 F·扬科夫斯基 于 2019-05-27 设计创作，主要内容包括：本发明涉及一种具有传感器的用于引导流体的部件,其中,该部件包括内壁和外壁,其中,内壁被设计成引导流体,外壁将该部件相对于外部封闭,并且在内壁与外壁之间形成壁区域。根据本发明的部件的特征在于,传感器具有机电传感器元件,并且布置在内壁上的壁区域中,其中,传感器被配置为借助于传感器元件来测量传感器区域中的内壁的变形程度,并将该变形程度作为电信号输出,机电传感器元件的长度和/或宽度<50μm。(The invention relates to a component for guiding a fluid with a sensor, wherein the component comprises an inner wall and an outer wall, wherein the inner wall is designed to guide the fluid, the outer wall closes the component with respect to the outside, and a wall region is formed between the inner wall and the outer wall. The component according to the invention is characterized in that the sensor has an electromechanical sensor element and is arranged in a wall region on the inner wall, wherein the sensor is configured to measure a degree of deformation of the inner wall in the sensor region by means of the sensor element and to output the degree of deformation as an electrical signal, the length and/or width of the electromechanical sensor element being <50 μm.)

1. Component for guiding a fluid with a sensor (100), wherein the component comprises an inner wall (4) and an outer wall, wherein the inner wall (4) is designed to guide the fluid, the outer wall closes the component with respect to the outside and forms a wall region between the inner wall (4) and the outer wall,

wherein the content of the first and second substances,

the sensor (100) has an electromechanical sensor element (2) and is arranged in the wall region at the inner wall (4), wherein,

the sensor (100) is configured to measure a degree of deformation of the inner wall (4) in the region of the sensor (100) by means of the sensor element (2) and to output the degree of deformation as an electrical signal, wherein,

the length and/or width of the electromechanical sensor element (2) is preferably less than or equal to 50 μm,

wherein the sensor is arranged in a region of the inner wall having a minimum wall thickness, and a fluid region side in the region is concave.

2. Component according to the preceding claim, characterized in that the sensor has two electrical contacts and the sensor element is a nanostructured expansion element which is applied to the contacts in a material-integrated manner so that the contacts are in electrical contact with each other via the sensor element, wherein the electrical contacts are applied to the inner wall so that the sensor element deforms together with the inner wall as the inner wall deforms in the region of the sensor, so that the electrical signal can be measured between the electrical contacts.

3. A component according to the preceding claim, characterized in that a plurality of sensors (100) are arranged in the wall area at the inner wall (4); in particular, four sensors (100) are arranged, the four sensors (100) being connected to each other to form a full-bridge or half-bridge circuit to reduce the temperature dependence of the sensors (100).

4. Component according to one of the preceding claims, characterized in that an insulating layer (5) is arranged between the inner wall (4) and the electrical contact (1) of the sensor (100), which insulating layer (5) is connected to the inner wall (4) and the electrical contact (1) in a material-integrated manner.

5. Component according to one of the preceding claims, characterized in that the electrical signal comprises a change in the electrical resistance of the sensor (100).

6. Component according to one of the preceding claims, characterized in that the length and/or width of the sensor element (2) is/are < 15 μm, in particular < 10 μm, in particular < 3 μm, and/or the thickness is <50 μm, in particular < 15 μm, in particular < 10 μm, in particular < 3 μm.

7. Component according to one of claims 2 to 6, characterized in that the electrical contacts (1) are applied to the inner wall (4) such that a gap (3) exists between the contacts (1), which gap (3) is ≦ 50 μm, in particular ≦ 15 μm, in particular ≦ 10 μm, in particular ≦ 3 μm, the gap (3) being completely covered by the sensor element (2) in the lateral direction.

8. Component according to one of the preceding claims, characterized in that the sensor is arranged in a thinned region of the inner wall.

9. Component according to one of the preceding claims, characterized in that an electrical connection element is arranged in the wall region, via which electrical connection element the sensor is connected to a processing device.

10. Component according to the preceding claim, characterized in that the connection element comprises a printed circuit board (20), wherein one or more sensors (100) are directly connected to the printed circuit board (20) via the electrical contacts (1) or via bonding wires or separately insulated leads, in particular Teflon insulated leads.

11. Component according to the preceding claim, characterized in that an electronic component (22) is arranged on the printed circuit board (20), the electronic component (22) being used for pre-processing the electrical signal, in particular for pre-amplification.

12. A method of manufacturing a component for guiding a fluid having a sensor (100), the method comprising the steps of:

an inner wall (4) and an outer wall forming the component, wherein the inner wall (4) is designed to guide the fluid and the outer wall is designed to close the component with respect to the outside and to connect the inner wall (4) and the outer wall together such that a wall region is formed between the inner wall (4) and the outer wall;

arranging a sensor (100) having an electromechanical sensor element (2) in the wall region at the inner wall (4), wherein the sensor (100) is configured to measure a degree of deformation of the inner wall (4) in the region of the sensor (100) by means of the sensor element (2) and to output the degree of deformation as an electrical signal, wherein the length and/or width of the electromechanical sensor element (2) is preferably ≦ 50 μm; and

connecting the inner wall (4) and the outer wall together.

13. Method according to the preceding claim, characterized in that an insulating layer (5) is applied to the inner wall (4) in the wall region before the arrangement of the sensor (100).

14. The method according to one of the two preceding claims, characterized in that the step of arranging the sensor (100) comprises:

-applying two electrical contacts (1) on the inner wall (4) or on the insulating layer (5) in the wall region to pick up the electrical signals;

applying the sensor element (2) to the electrical contact (1).

15. Method according to the preceding claim, characterized in that the sensor element (2) is applied to the contact (1) by means of nano 3D printing, sputtering or by means of an etching process.

16. The component of one of claims 1 to 11, wherein the fluid region side of the inner wall is concave and the sensor is arranged on the wall region side in the region of minimum thickness of the inner wall.

17. The component of one of claims 1 to 11, wherein the fluid zone side of the inner wall is concave and the wall zone side has at least one groove in which the sensor is arranged.

18. The component of claim 17 wherein there are at least three grooves and the sensor is disposed in a middle groove.

19. The component of one of claims 1 to 11 or 15 to 17, wherein the sensor is configured such that the sensor detects a rise of the inner wall in the region of the sensor.

20. The component of one of claims 1 to 11 or 15 to 18, wherein the sensor is an optical sensor, a resistive sensor, or a capacitive sensor.