阅读说明：本技术 切削装置、托盘以及搬送系统 (Cutting device, tray, and conveyance system ) 是由 关家一马 于 2021-04-06 设计创作，主要内容包括：本发明提供切削装置、托盘以及搬送系统,该切削装置能够高效地进行板相对于子卡盘工作台的装卸。切削装置包含：卡盘工作台,其具有对被加工物单元或托盘进行保持的保持面,该被加工物单元借助带将板状的被加工物支承于环状的框架,该托盘的形状与框架对应；载置区域,其载置有收纳被加工物单元或托盘的容器；搬送单元,其具有对被加工物单元或托盘进行保持的保持垫,并且该搬送单元在载置区域与卡盘工作台之间搬送被加工物单元或托盘；子卡盘工作台,其设置于卡盘工作台的侧方,具有对用于切削单元的调整的板进行保持的保持面；以及板搬送单元,其在卡盘工作台所保持的托盘与子卡盘工作台之间搬送板。(The invention provides a cutting device, a tray and a conveying system, wherein the cutting device can efficiently assemble and disassemble a plate relative to a daughter card tray worktable. The cutting device includes: a chuck table having a holding surface for holding a workpiece unit for supporting a plate-like workpiece on an annular frame via a belt or a tray having a shape corresponding to the frame; a placement area on which a container for storing a unit to be processed or a tray is placed; a conveying unit which has a holding pad for holding the object unit or the tray and conveys the object unit or the tray between the loading area and the chuck table; a sub chuck table provided on a side of the chuck table and having a holding surface for holding a plate for adjustment of the cutting unit; and a board conveying unit for conveying the board between the tray held by the chuck worktable and the daughter chuck worktable.)

1. A cutting device, comprising:

a cutting unit having a spindle to which a cutting tool is attached;

a chuck table having a holding surface for holding a workpiece unit obtained by supporting a plate-like workpiece on an annular frame via a belt or a tray having a shape corresponding to the frame;

a machining feed unit having a drive source and moving the chuck table in a machining feed direction;

an index feeding unit having a driving source and moving the cutting unit in an index feeding direction perpendicular to the machining feeding direction;

a placement area on which a container for storing the workpiece unit or the tray is placed;

a conveying unit which has a 1 st holding pad for holding the object unit or the tray and conveys the object unit or the tray between the loading area and the chuck table;

a sub chuck table provided on a side of the chuck table and having a holding surface for holding a plate used for adjustment of the cutting unit; and

a board carrying unit that carries the board between the tray held by the chuck table and the daughter chuck table,

the board conveying unit includes:

a 2 nd holding pad which holds the board; and

an actuator supported to the index feeding unit together with the cutting unit, and moving the 2 nd holding pad in a direction perpendicular to the machining feeding direction and the index feeding direction.

2. The cutting apparatus of claim 1,

the cutting device also comprises a tray receiving area which is arranged in the area below the carrying area and can receive the tray,

the carrying unit carries the tray between the tray receiving area and the chuck table.

3. A tray for use in a cutting device, wherein,

the cutting device includes:

a cutting unit having a spindle to which a cutting tool is attached;

a chuck table having a holding surface for holding a workpiece unit obtained by supporting a plate-like workpiece on an annular frame via a belt or the tray, the shape of the tray corresponding to the frame;

a machining feed unit having a drive source and moving the chuck table in a machining feed direction;

an index feeding unit having a driving source and moving the cutting unit in an index feeding direction perpendicular to the machining feeding direction;

a placement area on which a container for storing the workpiece unit or the tray is placed;

a conveying unit which has a 1 st holding pad for holding the object unit or the tray and conveys the object unit or the tray between the loading area and the chuck table;

a sub chuck table provided on a side of the chuck table and having a holding surface for holding a plate used for adjustment of the cutting unit; and

a board carrying unit that carries the board between the tray held by the chuck table and the daughter chuck table,

the board conveying unit includes:

a 2 nd holding pad which holds the board; and

an actuator that is supported to the index feed unit together with the cutting unit and moves the 2 nd holding pad in a direction perpendicular to the machining feed direction and the index feed direction,

the tray includes:

a plate-shaped main body portion having an outer edge of the same shape as the frame;

a 1 st board arrangement region provided on one surface of the main body and configured to arrange the board before the board is carried into the daughter card tray table; and

and a 2 nd board arrangement region provided on the one surface of the main body portion, for arranging the board after being carried out from the daughter card tray table.

4. The tray according to claim 3,

the cutting device also comprises a tray receiving area which is arranged in the area below the carrying area and can receive the tray,

the carrying unit carries the tray between the tray receiving area and the chuck table.

5. A conveying system for conveying a unit or a plate to be processed to a plurality of devices including a cutting device,

the cutting device includes:

a cutting unit having a spindle to which a cutting tool is attached;

a chuck table having a holding surface for holding the workpiece unit obtained by supporting a plate-like workpiece on an annular frame via a belt or a tray having a shape corresponding to the frame;

a machining feed unit having a drive source and moving the chuck table in a machining feed direction;

an index feeding unit having a driving source and moving the cutting unit in an index feeding direction perpendicular to the machining feeding direction;

a placement area on which a container for storing the workpiece unit or the tray is placed;

a conveying unit which has a 1 st holding pad for holding the object unit or the tray and conveys the object unit or the tray between the loading area and the chuck table;

a sub chuck table provided on a side of the chuck table and having a holding surface for holding the plate used for adjustment of the cutting unit; and

a board carrying unit that carries the board between the tray held by the chuck table and the daughter chuck table,

the board conveying unit includes:

a 2 nd holding pad which holds the board; and

an actuator that is supported to the index feed unit together with the cutting unit and moves the 2 nd holding pad in a direction perpendicular to the machining feed direction and the index feed direction,

the conveying system includes:

a conveying path provided above the apparatus;

a transport vehicle that travels on the transport path, and that includes a vehicle frame to which wheels for travel are attached, a drive source that drives the wheels, a container that houses the workpiece unit or the pallet, an elevating unit that is provided on the vehicle frame and suspends the container to elevate the container, a control unit that controls the drive source and the elevating unit, and a receiver that receives a control signal;

a loader/unloader having a 1 st loading area on which a cassette accommodating the unit to be processed or the tray is loaded, a 2 nd loading area on which the container lowered from the carrier vehicle is loaded, and a receiver that receives a control signal, the loader/unloader carrying the unit to be processed or the tray between the cassette loaded on the 1 st loading area and the container loaded on the 2 nd loading area; and

a control unit having a transmitter for transmitting control signals to the apparatus, the transport vehicle, and the loader/unloader, and a signal generating section for generating the control signals transmitted from the transmitter,

the transport vehicle transports the unit of the object to be processed or the pallet delivered from the loader/unloader to the apparatus in accordance with a signal from the control unit.

6. The handling system according to claim 5,

the cutting device also comprises a tray receiving area which is arranged in the area below the carrying area and can receive the tray,

the carrying unit carries the tray between the tray receiving area and the chuck table.

Technical Field

The present invention relates to a cutting device used for machining a plate-like workpiece, a tray used in the cutting device, and a conveying system used for conveying the workpiece to the cutting device.

Background

When dividing a plate-shaped workpiece, such as a semiconductor wafer, into a plurality of chips, a cutting apparatus having an annular cutting tool attached thereto is used, for example. The cutting tool rotating at a high speed is moved relative to the workpiece while being caused to cut into the workpiece, and the workpiece can be cut along the path of the movement.

However, immediately after the cutting tool is attached to a spindle as a rotating shaft, there is a possibility that the cutting tool is eccentric to the spindle or the cutting tool is not sharp enough. Therefore, before cutting the workpiece, a work called dressing is performed in which the cutting tool is rotated to cut into an adjustment plate (dressing plate), and the state of the cutting tool is adjusted.

In recent years, a cutting apparatus having a sub chuck table for holding a plate as described above separately from a chuck table for holding a workpiece has been put to practical use (for example, see patent document 1). According to this cutting device, the cutting tool can be dressed even in a state where the workpiece is held by the chuck table.

Patent document 1: japanese patent laid-open publication No. 2011-

In the cutting apparatus described above, although the degree of freedom of timing for trimming is improved, the attachment and detachment of the plate to and from the daughter board table is still performed by manual work by an operator. Therefore, there is a high possibility that time is wasted when the board is attached to and detached from the sub-chuck table.

Disclosure of Invention

The present invention has been made in view of the above-described problems, and an object thereof is to provide a cutting apparatus that efficiently attaches and detaches a plate to and from a daughter board table, a tray used in the cutting apparatus, and a conveyance system used when conveying a workpiece to the cutting apparatus.

According to an aspect of the present invention, there is provided a cutting apparatus comprising: a cutting unit having a spindle to which a cutting tool is attached; a chuck table having a holding surface for holding a workpiece unit for supporting a plate-like workpiece on an annular frame via a belt or a tray having a shape corresponding to the frame; a machining feed unit having a drive source and moving the chuck table in a machining feed direction; an index feeding unit having a driving source and moving the cutting unit in an index feeding direction perpendicular to the machining feeding direction; a placement area on which a container for storing the workpiece unit or the tray is placed; a conveying unit which has a 1 st holding pad for holding the object unit or the tray and conveys the object unit or the tray between the loading area and the chuck table; a sub chuck table provided on a side of the chuck table and having a holding surface for holding a plate used for adjustment of the cutting unit; and a board carrying unit that carries the board between the tray held by the chuck table and the daughter chuck table, the board carrying unit including: a 2 nd holding pad which holds the board; and an actuator that is supported to the index feeding unit together with the cutting unit, and that moves the 2 nd holding pad in a direction perpendicular to the machining feeding direction and the index feeding direction.

According to another aspect of the present invention, there is provided a tray used in the above cutting device, wherein the tray comprises: a plate-shaped main body portion having an outer edge of the same shape as the frame; a 1 st board arrangement region provided on one surface of the main body and in which the board is arranged before the daughter card tray table is carried; and a 2 nd board arrangement region provided on the one surface of the main body portion and in which the board carried out of the daughter card tray table is arranged.

According to still another aspect of the present invention, there is provided a conveying system for conveying the workpiece unit or the board to a plurality of devices including the cutting device, respectively, the conveying system including: a conveying path provided above the apparatus; a transport vehicle that travels on the transport path, and that includes a vehicle frame to which wheels for travel are attached, a drive source that drives the wheels, a container that houses the workpiece unit or the pallet, an elevating unit that is provided on the vehicle frame and suspends the container to elevate the container, a control unit that controls the drive source and the elevating unit, and a receiver that receives a control signal; a loader/unloader having a 1 st loading area on which a cassette accommodating the unit to be processed or the tray is loaded, a 2 nd loading area on which the container lowered from the carrier vehicle is loaded, and a receiver that receives a control signal, the loader/unloader carrying the unit to be processed or the tray between the cassette loaded on the 1 st loading area and the container loaded on the 2 nd loading area; and a control unit having a transmitter that transmits control signals to the apparatus, the transport vehicle, and the loader/unloader, and a signal generation unit that generates a control signal transmitted from the transmitter, and the transport vehicle transports the unit of the object to be processed or the tray delivered from the loader/unloader to the apparatus in accordance with the signal from the control unit.

By using the cutting device, the tray, and the conveying system of the present invention, the mounting and dismounting of the trimming plate to and from the daughter card tray table can be efficiently performed.

Drawings

Fig. 1 is a perspective view showing the internal structure of a machining apparatus (cutting apparatus).

Fig. 2 is a plan view schematically showing the configuration of the chuck table and its periphery.

Fig. 3 is a perspective view showing an external appearance and the like of the machining device (cutting device).

Fig. 4 is a side view showing a state in which a workpiece is machined.

Fig. 5 (a), 5 (B), and 5 (C) are side views showing the case where the plate of the sub-chuck table is replaced.

Fig. 6 (a) and 6 (B) are side views showing a case where a board of the daughter card tray table is replaced.

Fig. 7 is a plan view showing a configuration example of the conveyance system.

Fig. 8 is a functional block diagram showing an example of the connection relationship of the transport system.

Fig. 9 is a side view schematically showing a structural example of the loader/unloader.

Fig. 10 (a) is a partially sectional side view showing a state where the outer door is closed and the inner door is opened, and fig. 10 (B) is a partially sectional side view showing a state where the outer door is opened and the inner door is closed.

Fig. 11 (a) is a side view, partially in cross section, showing the cartridge mounting table and the like, and fig. 11 (B) is a bottom view showing the cartridge mounting table.

Fig. 12 (a) is a partial cross-sectional side view showing a case where the cartridge mounting table is pulled out from the inner storage area to the outside, fig. 12 (B) is a partial cross-sectional side view showing a case where the roller is detached from the support table, and fig. 12 (C) is a partial cross-sectional side view showing a case where the cartridge mounting table is returned to the inner storage area.

Fig. 13 (a) is a partially cross-sectional side view showing a case where the object unit is temporarily placed on the two upper-stage rails, and fig. 13 (B) is a partially cross-sectional side view showing a case where the object unit is temporarily placed on the two lower-stage rails.

Fig. 14 (a) is a plan view showing two upper rails and the like, and fig. 14 (B) is a plan view showing a case where the interval between the two upper rails is narrowed.

Fig. 15 (a) is a perspective view showing the upper surface side of the carrier vehicle, and fig. 15 (B) is a perspective view showing the bottom surface side of the carrier vehicle 10.

Fig. 16 is an enlarged perspective view showing a front end portion of the conveyance vehicle.

Fig. 17 (a) is a perspective view showing the container, and fig. 17 (B) is a front view showing the container.

Fig. 18 is a perspective view showing the transport vehicle in a state where the container is placed in the placement area.

Fig. 19 is a perspective view showing the conveyance vehicle in which the container is connected to the suspension member via the elastic member (expansion member).

Fig. 20 (a) is a plan view showing a configuration example of the lifting unit, and fig. 20 (B) is a side view showing a configuration example of the lifting unit.

Fig. 21 (a) is a plan view showing another configuration example of the lifting unit, and fig. 21 (B) is a side view showing another configuration example of the lifting unit.

Fig. 22 (a) is a plan view showing the reel, and fig. 22 (B) is a side view showing the reel.

Fig. 23 is an enlarged perspective view showing the cover.

Fig. 24 (a) is a side view of the cover showing a state where the container is not stored in the storage area, and fig. 24 (B) is a side view of the cover showing a state where the container is stored in the storage area.

Fig. 25 (a) is a side view showing the transport vehicle when the container stored in the storage area is placed in the placement area, and fig. 25 (B) is a graph showing the current value of the motor when the container is lowered.

Fig. 26 (a) is a side view showing the transport vehicle when the containers placed in the placement area are stored in the storage area, and fig. 26 (B) is a graph showing the current value of the motor when the containers are raised.

Fig. 27 is a perspective view showing a part of a conveyance path provided in a machining apparatus (cutting apparatus).

Fig. 28 (a) and 28 (B) are perspective views showing a lower frame unit constituting a lower frame.

Fig. 29 is a plan view showing the arrangement of the lower frame unit constituting the lower frame.

Fig. 30 (a) and 30 (B) are perspective views showing an upper frame unit constituting an upper frame.

Fig. 31 is a plan view showing the arrangement of upper frame units constituting an upper frame.

Fig. 32 is a plan view showing a conveyance path configured by arranging a plurality of road surface panels in parallel.

Fig. 33 is a functional block diagram showing a control unit of the transport vehicle.

Fig. 34 is a diagram for explaining an example of a control method of the conveying system.

Fig. 35 is a perspective view showing the internal structure of the machining apparatus (cutting apparatus) according to embodiment 2.

Description of the reference symbols

2: a conveyance system; 4: a machining device (cutting device); 4 a: a machining device (cutting device); 4 b: a machining device (cutting device); 6: a conveying path; 6 a: an opening; 8: a loader/unloader (conveying device); 10: a carrying vehicle; 10 a: a carrying vehicle; 10 b: a carrying vehicle; 12: a control unit; 21: piping; 22: a housing; 22 a: a ceiling; 22 b: an opening; 24: a cartridge storage mechanism; 24 a: a 1 st cartridge accommodating mechanism; 24 b: a 2 nd cartridge accommodating mechanism; 26: a support table; 26 a: an upper surface; 26 b: an outer side surface; 28: a cassette mounting table; 28 a: a lower surface; 28 b: an upper surface; 28 c: a through hole; 30: a cartridge; 30 a: a 1 st box; 30 b: a 2 nd cartridge; 32: a carry-in/carry-out port; 34: an outer door (2 nd door); 36: a rotation connecting member; 38 a: an external carrying-in/out area (external area); 38 b: an inner housing area (inner area); 40: an inner door (1 st door); 42: a lifting mechanism; 42 a: a cylinder barrel; 42 b: a piston rod; 42 c: a connecting member; 44: a 1 st sensor; 44 a: a magnet; 46: a control device; 48: a 2 nd sensor; 48 a: a magnet; 50: a stopper member; 50 a: a square bar; 50 b: a roller; 52: a shaft mechanism; 52 a: a rotating shaft; 52 b: a bearing; 54: a pin (pressing portion); 54 a: a ring; 54 b: a button; 56: a lifting mechanism; 56 a: a support column; 58: a lifting platform; 60: a temporary playing unit; 62: a housing; 62 a: an upper plate; 62 b: a lower plate; 62c, the ratio of: a side plate; 62c₁: a 1 st side plate; 62c₂: a 2 nd side plate; 62 d: an opening; 62e₁: 1 st opening; 62e₂: a 2 nd opening; 64: a conveying unit (conveying mechanism); 64 a: a 1 st conveying unit; 64 b: a 2 nd conveying unit; 66: a mounting table; 68: a receiver; 70: a transmitter; 72 a: an upper layer guide rail (1 st temporary placing part); 72 b: a lower-layer guide rail (No. 2 temporary placing part); 72 c: spacing; 74 a: 1 st air actuator; 74 b: 2 nd air actuator(ii) a 76 a: 1 st guide mechanism; 76 b: a 2 nd guide mechanism; 78: an interval adjusting mechanism; 82: a vehicle frame; 84: an axle; 86: wheels (front wheels); 88: wheels (rear wheels); 90: a drive unit; 92: a motor (driving source); 92 a: a rotating shaft (output shaft); 94: a pulley; 96: a battery (secondary battery); 98: wiring (charging wiring); 100: a terminal (power receiving terminal); 102: a container (cartridge); 102 a: a storage section (storage space); 102 b: an opening; 102 c: an upper wall; 102 d: a bottom wall; 104: a storage area; 106: 1, a first guide rail; 106 a: a holding surface; 106 b: a side surface; 108: a 2 nd guide rail; 108 a: a holding surface; 110: a lifting unit (lifting mechanism); 112: a suspension member; 114: a drive mechanism; 116: a contact member; 118: an elastic member (a telescopic member); 120: a cover; 122: a 1 st sensor; 124: a 2 nd sensor; 126: a 3 rd sensor; 128: a support table; 130: a control unit (control means); 130 a: a 1 st sensor control unit; 130 b: a travel instruction unit; 130 c: a 2 nd sensor control unit; 130 d: a steering indication unit; 130e, 130 e: entering a control part; 130 f: a parking control unit; 132: a receiver; 134: a transmitter; 142: an electric motor; 142 a: a rotating shaft (output shaft); 144 a: a 1 st rotation axis (1 st axis); 144 b: a 2 nd rotation axis (2 nd axis); 146: a pulley; 148: a connecting member; 150 a: a pulley; 150 b: a pulley; 152: a connecting member; 154 a: coiling; 154 b: coiling; 156 a: a roller; 156 b: a roller; 162: a drive mechanism; 164: an electric motor; 164 a: a rotating shaft (output shaft); 166 a: a 1 st rotation axis (1 st axis); 166 b: a 2 nd rotation axis (2 nd axis); 166 c: a 3 rd rotation axis (3 rd axis); 168: a pulley; 170: a connecting member; 172: coiling; 172 a: a groove (recess); 172 b: a protrusion (convex portion); 174: a fixing member; 176: a guide; 182: a cover portion; 182 a: a plate-like member; 182 b: a soft member; 184: a contact portion; 184 a: a fixing member; 184 b: a roller; 186: a fixed block; 188: a link block (L block); 188 a: a connecting portion; 188 b: a fixed part; 190: a connecting shaft; 202: a base station; 202 a: a recess; 202 b: a recess; 202 c: a piping connection section; 204: a lifting platform; 206: an X-axis moving mechanism (machining feed unit); 206 a: a table cover; 206 b: a dustproof drip-proof cover; 208: a chuck table; 208 a: a holding surface; 218 b: a clamp; 210: a daughter card tray workbench;210 a: a holding surface; 210 b: a groove; 212: a guide rail; 214: the 1 st support structure; 216: track 1; 218: the 1 st moving mechanism; 220: 1 st holding unit; 220 a: a holding pad (1 st holding pad); 220 b: a holding mechanism; 222: a 2 nd track; 224: a 2 nd moving mechanism; 226: a 2 nd holding unit; 228: a 2 nd support structure; 230: a Y-axis Z-axis moving mechanism (index feeding unit, plunge feeding unit); 232: a processing unit (cutting unit); 232 a: a main shaft; 232 b: a cutting tool; 234: a shooting unit (camera); 236: a board conveying unit; 236 a: an actuator; 236 b: a holding pad (2 nd holding pad); 238: a cleaning unit; 240: rotating the working table; 242: a spray nozzle; 244: a cover; 244 a: a ceiling; 244 b: a door; 246: a control device; 248: a receiver; 250: a transmitter; 262: a lower layer frame; 264: an upper frame; 266: a pavement panel; 268: a screw; 270: a lower frame unit; 270 a: a lower frame unit; 270 b: a lower frame unit; 270 c: a lower frame unit; 270 d: a lower frame unit; 272: an upper frame unit; 272 a: an upper frame unit; 272 b: an upper frame unit; 274 a: a bridge panel; 274 b: a bridge panel; 276: a guide section; 278: a driving area; 280: a parking area; 282: an opening; 284: a standby area; 286: marking; 286 a: 1, marking; 286 b: marking 2; 286 c: the 3 rd mark; 286 d: the 4 th mark; 288: a terminal (power supply terminal); 290: a terminal support portion; 292: wiring (power supply wiring); 302: a control unit (signal generation unit); 304: a receiver; 306: a transmitter; 402: a machining device (cutting device); 404: a lifting platform; 406: a cartridge storage mechanism; 406 a: a 1 st cartridge accommodating mechanism; 406 b: a 2 nd cartridge accommodating mechanism; 11: a workpiece; 13: a belt (dicing belt); 15: a frame; 17: a workpiece unit; 17 a: a workpiece unit; 17 b: a workpiece unit; 31: a plate; 33: a tray; 35: a main body portion; 37: a position defining component; 39 a: a 1 st plate arrangement area; 39 b: a 2 nd plate arrangement region; a: a placement area; a. the₁a: a 1 st placement area; a. the₁b: a 1 st placement area; a. the₂: a 2 nd placement area; b is₁a: a 1 st conveying area; b is₁b: a 1 st conveying area; b is₂: a 2 nd conveying area; c₁: an arrow; c₂: an arrow; c₃: an arrow; d₁: an arrow; d₂: an arrow; d₃: an arrow; e₁: an arrow; e₂: an arrow; f₁: an arrow; f₂: an arrow; g: arrows.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(embodiment 1)

Fig. 1 is a perspective view showing the internal structure of a machining apparatus (cutting apparatus) 4 for machining (cutting) a plate-shaped workpiece 11. In addition, X used in the following description₂Axial direction, Y₂Axial direction and Z₂The axial directions are substantially perpendicular to each other. As shown in fig. 1, the processing apparatus 4 includes a base 202 that supports each component.

A recess 202a is formed at a corner of the base 202, and an elevating table 204 which is elevated by an elevating mechanism (not shown) is disposed in the recess 202 a. In the placement area a on the upper surface of the lift table 204, for example, a container (cassette) 102 of a transport vehicle 10 described later capable of storing the workpiece 11, the plate 31, and the like is placed. Further, a plurality of position regulating members (not shown) for regulating the horizontal position of the container 102 are provided on the upper surface of the lift table 204, and the container 102 lowered from the carrier vehicle 10 stopped above the processing device 4 is placed on the placement area a specified by the plurality of position regulating members.

Each position regulating member has, for example, a curved guide surface for guiding the container 102 lowered from the transport vehicle 10 toward the placement area a, and is fixed to a position corresponding to the side surface of the container 102 placed on the lifting/lowering base 204. When the container 102 is lowered toward the lift table 204, the container 102 is guided by the guide surfaces of the respective position restricting members. Therefore, even if the container 102 is swung in the horizontal direction, the container 102 can be placed on the placement area a.

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The front side of the workpiece 11 is divided into a plurality of small regions by a plurality of lines (streets) to be processed which intersect with each other, and devices such as ICs (Integrated circuits) and MEMS (Micro Electro Mechanical Systems) are formed in each of the small regions.

A tape (dicing tape) 13 having a larger diameter than the workpiece 11 is attached to the back surface side of the workpiece 11. The outer peripheral portion of the belt 13 is fixed to an annular frame 15 surrounding the workpiece 11. In this way, the workpiece 11 is carried into the processing apparatus 4 of the present embodiment in a state of being supported by the workpiece unit 17 of the frame 15 via the belt 13.

The workpiece 11 of the present embodiment is a disk-shaped wafer made of a semiconductor material such as silicon, but the material, shape, structure, size, and the like of the workpiece 11 are not limited. For example, a substrate made of other materials such as a semiconductor, a ceramic, a resin, and a metal may be used as the workpiece 11. Likewise, the kind, number, shape, configuration, size, arrangement, etc. of the devices are not limited. No device may be formed on the workpiece 11.

The size of the frame 15 is set according to the size of the workpiece 11 (the diameter of the workpiece 11, etc.). For example, the outer diameter of the frame 15 supporting the workpiece 11 having a diameter of about 300mm is larger than the outer diameter of the frame 15 supporting the workpiece 11 having a diameter of about 200 mm. That is, when a large workpiece 11 is used, the outer diameter of the workpiece unit 17 is also increased.

The plate 31 is a flat plate-like finishing plate in which abrasive grains such as white corundum (WA) or Green Corundum (GC) are fixed by a binder such as resin or ceramic. By cutting the rotating cutting tool 232b into such a plate 31, the state of the cutting tool 232b can be adjusted. However, the plate 31 may be any plate used for adjusting the machining unit 232 including the cutting tool 232 b.

Therefore, the material, shape, structure, and the like of the plate 31 are appropriately selected according to the application. For example, in an application where the cutting tool 232b is cut into the plate 31 from above to form a groove, and the height of the cutting tool 232b is adjusted (measured) in accordance with the groove, a substrate or the like formed of the same material as the workpiece 11 may be used as the plate 31.

The plate 31 is carried into the processing apparatus 4 of the present embodiment in a state of being supported on the tray 33 having a shape corresponding to the frame 15. The tray 33 has a plate-like main body 35, and the main body 35 has an outer edge having the same shape as the frame 15. A plurality of position regulating members 37 formed in an L shape in plan view, for example, are provided on the front surface (one surface) of the main body portion 35. By this position defining member 37, the 1 st plate disposition region 39a and the 2 nd plate disposition region 39b in which the plates 31 are disposed are defined. The details of the 1 st plate arrangement region 39a and the 2 nd plate arrangement region 39b will be described later.

A workpiece storage area capable of temporarily storing the processed workpiece unit 17 is formed in a lower area than the placement area a of the lift table 204. The workpiece unit 17 processed by the processing device 4 is stored in the workpiece storage area until the preparation for the conveyance of the container 102 by the conveyance vehicle 10 is completed.

In addition to the workpiece storage area, an irradiation unit that irradiates ultraviolet light, a detection unit that detects the position of a notch in the workpiece 11, a reading unit that reads an identification code attached to the workpiece 11, and the like may be disposed in an area below the placement area a of the lifting table 204. Further, a tray storage area capable of storing the tray in a state of supporting the board may be disposed in an area below the placement area a of the lift table 204. In this case, the workpiece storage area may be used as a tray storage area, or a tray storage area different from the workpiece storage area may be provided.

X is formed on the side of the concave portion 202a₂A recess 202b that is long in the axial direction (front-back direction, machining feed direction). A ball screw type X-axis moving mechanism (machining feed unit) 206 is disposed in the recess 202 b. The X-axis moving mechanism 206 includes a drive source such as a motor (pulse motor) connected to a ball screw, and moves an X-axis moving table (not shown) along X₂The axis direction moves. A table cover 206a is disposed above the X-axis moving table. In addition, corrugated dust-proof and drip-proof covers 206b are attached to the front and rear of the table cover 206 a.

A chuck table 208 for holding the workpiece unit 17 or the pallet 33 is disposed above the X-axis moving table so as to be exposed from the table cover 206 a. Fig. 2 is a plan view schematically showing the configuration of the chuck table 208 and its periphery. The chuck table 208 is connected to a drive source (not shown) such as a motor, and surrounds Z₂The rotation axis having an axis direction (vertical direction, cutting feed direction) substantially parallel thereto is rotated. Further, the chuck table 208 is moved along the X axis by the X axis moving mechanism 206₂The axial direction movement (machining feed).

The upper surface of the chuck table 208 is a holding surface 208a for holding the workpiece unit 17 or the pallet 33. The holding surface 208a is connected to a suction source (not shown) such as a vacuum pump via a suction passage (not shown) formed inside the chuck table 208. Further, around the chuck table 208, 4 jigs 208b for fixing the frame 15 of the workpiece unit 17 from the periphery are provided.

A daughter card table 210 for holding the board 31 carried out of the tray 33 is disposed obliquely rearward (lateral) of the chuck table 208 so as to be exposed from the table cover 206 a. The daughter card disk table 210 is also moved along the X axis by the X axis movement mechanism 206 as described above₂The axis direction moves.

The upper surface of the daughter card tray table 210 becomes a holding surface 210a for holding the board 31. A groove 210b is formed in the holding surface 210a, and the groove 210b is connected to a suction source (not shown) such as a vacuum pump via a suction passage (not shown) or the like formed inside the daughter card tray table 210.

As shown in fig. 1, a side support and Y are provided above the front side of the recess 202b₂A pair of guide rails 212 which are moved closer to and away from each other while being substantially parallel in the axial direction (the left-right direction and the indexing direction). The pair of guide rails 212 each have a support surface for supporting the frame 15 from below and a side surface substantially perpendicular to the support surface, and are disposed at X with respect to the unit 17 to be processed (frame 15) or the tray 33 drawn out from the container 102 in the placement area a₂The shaft is clamped and aligned at a predetermined position.

A door is disposed above the base 202 so as to straddle the recess 202bType 1 st support structure 214. The front surface (surface on the side of the guide rail 212) of the 1 st support structure 214 is fixed to the surface extending along the Y direction₂The 1 st rail 216 in the axial direction is connected to a 1 st holding unit (conveying unit) 220 via a 1 st moving mechanism 218 or the like to the 1 st rail 216.

The 1 st holding unit 220 has a holding pad (1 st holding pad) 220a for holding the workpiece unit 17 (frame 15) or the tray 33 from above at a lower portion thereof, and the 1 st holding unit 220 is moved up and down by the 1 st moving mechanism 218 and moved along the 1 st rail 216 at the Y direction₂Moving in the axial direction. The 1 st holding unit 220 has a gripping mechanism 220b for gripping the frame 15 or the tray 33 from the side on the elevating table 204 side. As the holding pad 220a of the 1 st holding unit 220, for example, a vacuum suction type holding pad connected to a suction source such as a vacuum pump, a bernoulli type holding pad using a negative pressure generated by air at a high flow rate, or the like is used.

If the holding mechanism 220b holds the frame 15 or the tray 33 and the 1 st holding unit 220 is set at Y₂When the workpiece unit 17 or the tray 33 is moved in the axial direction, the workpiece unit 17 or the tray 33 can be pulled out from the container 102 in the placement area a to the pair of rails 212, or the workpiece unit 17 or the tray 33 on the pair of rails 212 can be inserted into the container 102 in the placement area a.

Similarly, the 1 st holding unit 220 is held at Y by the holding mechanism 220b to hold the frame 15₂The workpiece unit 17 can be pulled out from the workpiece housing area disposed below the mounting area a to the pair of guide rails 212 or the workpiece unit 17 on the pair of guide rails 212 can be inserted into the workpiece housing area by moving in the axial direction.

When the tray storage area is disposed below the placement area a, the 1 st holding unit 220 is held at Y by the holding mechanism 220b, in the same manner as above, while the tray 33 is held by the holding mechanism 220b₂The tray 33 can be pulled out from the tray housing area disposed below the placement area a to the pair of guide rails 212 or the tray 33 on the pair of guide rails 212 can be inserted into the tray housing area by moving in the axial direction.

After the positions of the workpiece unit 17 or the pallet 33 are aligned by the pair of guide rails 212, the workpiece unit 17 or the pallet 33 is held by the holding pads 220a and carried into the chuck table 208. In this way, the 1 st holding unit 220 is configured to be able to convey the workpiece unit 17 or the tray 33 among the placement area a, the chuck table 208, and the workpiece storage area (four of the tray storage areas are added when the tray storage area exists).

Further, on the front surface of the 1 st support structure 214, a rail 216 along the Y direction is fixed above the 1 st rail 216₂The 2 nd track 222 in the axial direction. A 2 nd holding unit 226 is connected to the 2 nd rail 222 via a 2 nd moving mechanism 224 and the like. The 2 nd holding unit 226 has a holding pad 226a for holding the workpiece unit 17 (frame 15) or the tray 33 from above at a lower portion thereof, and the 2 nd holding unit 226 is moved up and down by the 2 nd moving mechanism 224 and moved along the 2 nd rail 222 in the Y direction₂Moving in the axial direction. As the holding pad 226a, a vacuum suction type holding pad, a bernoulli type holding pad, or the like is used.

A gate-type 2 nd support structure 228 is disposed behind the 1 st support structure 214. Two sets of machining units (cutting units) 232 are provided on the front surface (surface on the 1 st support structure 214 side) of the 2 nd support structure 228 via a ball screw type Y-axis Z-axis moving mechanism (index feed unit, plunge feed unit) 230.

Each Y-axis Z-axis moving mechanism 230 includes a drive source such as a motor (pulse motor) connected to a ball screw for driving the Y-axis, and causes each processing unit 232 to move along the Y-axis₂The shaft direction moves (index feed). Each Y-axis Z-axis moving mechanism 230 includes a drive source such as a motor (pulse motor) coupled to a ball screw for driving the Z-axis, and causes each processing unit 232 to move along the Z-axis₂The axial direction movement (plunge feed).

As shown in FIG. 2, each processing unit 232 has a Y-axis₂A main shaft 232a as a rotation axis having substantially parallel axial directions. An annular cutting tool 232b is attached to one end side of each spindle 232 a. A driving source (not shown) such as a motor is connected to the other end of each main shaft 232 a.

A nozzle for supplying a cutting fluid such as pure water to the workpiece 11 or the cutting tool 232b is disposed beside the cutting tool 232 b. The rotating cutting tool 232b is caused to cut into the workpiece 11 held by the chuck table 208 while supplying the cutting fluid from the nozzle, thereby machining (cutting) the workpiece 11.

An imaging unit (camera) 234 capable of imaging the workpiece 11 and the like held by the chuck table 208 is provided in front of the processing unit 232. Further, a board conveying unit 236 is provided in front of the processing unit 232, and the board conveying unit 236 can convey the board 31 between the tray 33 held by the chuck table 208 and the daughter board table 210.

The board conveying unit 236 includes, for example, an air-driven actuator 236a (see fig. 5 (B) and the like), and the actuator 236a includes an air cylinder and an actuator that is inserted into the air cylinder and can move along the Z-axis₂A piston rod sliding in the axial direction. A holding pad (2 nd holding pad) 236b connected to a suction source (not shown) such as a vacuum pump is fixed to a lower end portion of the actuator 236 a.

Therefore, by operating the actuator 236a, the holding pad 236b can be moved along Z₂The axis direction moves. In addition, the holding pad 236b is moved along Z by the actuator 236a₂After the plate 31 is moved in the axial direction and brought into contact with the plate, if a negative pressure from a suction source is applied, the plate 31 can be held by the holding pad 236 b.

The imaging unit 234 and the board conveying unit 236 are supported by the Y-axis Z-axis moving mechanisms 230 together with the processing unit 232. That is, the imaging unit 234 and the board conveying unit 236 are along Y together with the processing unit 232₂Moves in the axial direction and is moved in the Z direction together with the processing unit 232₂The axis direction moves.

A cleaning unit 238 is disposed at a position opposite to the lift table 204 with respect to the recess 202 b. The cleaning unit 238 has a rotary table 240 for holding the workpiece unit 17 in the cylindrical cleaning space. A driving source (not shown) for rotating the rotary table 240 at a predetermined speed is connected to a lower portion of the rotary table 240.

A spray nozzle 242 for spraying a cleaning fluid (typically, a mixed fluid obtained by mixing water and air) toward the workpiece unit 17 held by the rotary table 240 is disposed above the rotary table 240. The workpiece unit 17 can be cleaned by rotating the rotary table 240 holding the workpiece unit 17 and spraying a cleaning fluid from the spray nozzle 242.

After the workpiece unit 17 is processed by the processing unit 232, the workpiece unit 17 is carried into the cleaning unit 238 while the frame 15 is held by, for example, the 2 nd holding unit 226. After the workpiece unit 17 is cleaned by the cleaning unit 238, for example, the frame 15 is held by the 1 st holding unit 220 to place the workpiece unit 17 on the pair of guide rails 212, and then the frame 15 is held by the holding mechanism 220b to store the workpiece unit 17 in the container 102 in the placement area a.

Fig. 3 is a perspective view showing the appearance and the like of the processing device 4. In fig. 3, some components are shown in a functional block diagram. As shown in fig. 3, the upper surface side of the base 202 is covered with a cover 244, and the above-described components are housed inside the cover 244. An opening (not shown) that vertically penetrates the ceiling 244a of the cover 244 is provided in a region directly above the recess 202 a.

The container 102 of the carrier 10 moves from the outside to the inside of the cover 244 through the opening, and moves from the inside to the outside of the cover 244 through the opening. There is no limitation on the shape or size of the opening, but the opening needs to be configured to at least allow the container 102 to pass through.

The respective components of the processing apparatus 4 are connected to a control apparatus 246. The control device 246 is, for example, a computer, and includes a Processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash Memory. The functions of the control device 246 are realized by operating a processing device or the like in accordance with software stored in the auxiliary storage device.

The control device 246 is also connected to a receiver 248 and a transmitter 250, the receiver 248 receiving a signal (information) from the outside and transmitting the signal to the control device 246, and the transmitter 250 transmitting the signal (information) received from the control device 246 to the outside. The receiver 248 receives a signal (control signal) transmitted from the control unit 12 of the transport system 2 described later, for example, and transmits the signal to the control device 246.

The control device 246 controls the operations of the components of the processing device 4 based on, for example, a signal received from the receiver 248. The control device 246 generates a signal for notification, for example, and transmits the signal to the transmitter 250. The transmitter 250 transmits a signal received from the control device 246 to the control unit 12 of the conveyance system 2, for example.

A pipe connection portion 202c for connecting various pipes 21 is provided on a side wall of the base 202. A door 244b that opens and closes during maintenance or the like is provided on a side wall of the cover 244. An operation panel (not shown) for inputting instructions to the control device 246, a display (not shown) for displaying various information related to the processing device 4, and the like may be provided on the side wall of the cover 244.

Fig. 4 is a side view showing a state in which the workpiece 11 is processed by the processing apparatus 4. In fig. 4, a part of the components is shown in cross section. When processing the workpiece 11, first, the workpiece unit 17 is placed on the holding surface 208a by the 1 st holding unit 220 or the like so that the front surface of the workpiece 11 faces upward, and the negative pressure of the suction source is applied. At the same time, the frame 15 of the workpiece unit 17 is fixed by the jig 208 b. Thereby, the workpiece unit 17 is held by the chuck table 208.

Next, the orientation of the chuck table 208 is adjusted so that the arbitrary processing scheduled line and X of the workpiece 11 are aligned₂After the axial directions are substantially parallel to each other, the cutting tool 232b is positioned above the extension line of the machining scheduled line. Then, the machining unit 232 is lowered so that the lower end of the cutting tool 232b is lower than the front surface (upper surface) of the workpiece 11.

In this state, the cutting tool 232b is rotated, and the chuck table 208 is moved along X while supplying the cutting fluid as shown in fig. 4₂By moving in the axial direction, the cutting tool 232b can cut into the workpiece 11And (4) machining (cutting). The conditions such as the height of the lower end of the cutting tool 232b can be arbitrarily adjusted according to the purpose of machining or the like.

Fig. 5 (a), 5 (B), 5 (C), 6 (a) and 6 (B) are side views showing a state where the board 31 of the daughter card tray table 210 is replaced. In each drawing, a part of the components is shown in cross section. When the board 31 of the daughter card table 210 is replaced, first, as shown in fig. 5 (a), the tray 33 in a state of supporting the board 31 is placed on the holding surface 208a by the 1 st holding unit 220 or the like, and the negative pressure of the suction source is applied. Thereby, the tray 33 is held by the chuck table 208.

As shown in fig. 5 (a) and the like, the board 31 before being carried into the daughter card tray table 210 is arranged in the 1 st board arrangement region 39 a. On the other hand, in the state of fig. 5 (a), the plate 31 is not disposed in the 2 nd plate disposition region 39 b. The board 31 carried out from the daughter card tray table 210 is arranged in the 2 nd board arrangement region 39 b.

After the tray 33 is held by the chuck table 208, the plate 31 held by the daughter-card table 210 is carried out and placed on the 2 nd plate arrangement region 39b of the tray 33. Specifically, first, the daughter card tray table 210 and the board transfer unit 236 are relatively moved, and the board transfer unit 236 is positioned above the daughter card tray table 210 as shown in fig. 5 (B).

Next, the holding pad 236b is lowered by the actuator 236a of the board conveying unit 236 and the like, and the holding pad 236b is brought into contact with the board 31 on the daughter card tray table 210. Then, the negative pressure of the suction source is applied to the holding pad 236 b. Thereby, the plate 31 is held by the holding pad 236 b.

Then, the negative pressure acting on the holding surface 210a of the daughter card tray table 210 is cut off, and as shown in fig. 5 (B), the holding pad 236B is raised by the actuator 236a or the like. Further, the chuck table 208 and the plate conveying unit 236 are relatively moved, and as shown in fig. 5 (C), the plate conveying unit 236 is positioned above the 2 nd plate arrangement region 39b of the tray 33 held by the chuck table 208.

Then, the holding pad 236b is lowered by the actuator 236a or the like, and the plate 31 is disposed in the 2 nd plate disposition region 39b of the tray 33. In this state, if the negative pressure of the suction source acting on the holding pad 236b is cut off, the board 31 carried out from the daughter card tray table 210 can be placed on the 2 nd board placement region 39 b. After the plate 31 is placed on the 2 nd plate arrangement region 39b, the holding pad 236b is raised by the actuator 236a or the like.

After the board 31 is carried out from the daughter card tray table 210 and placed in the 2 nd board placement area 39b of the tray 33, another board 31 placed in the 1 st board placement area 39a of the tray 33 is carried into the daughter card tray table 210. Specifically, first, as shown in fig. 6 (a), the chuck table 208 and the board conveying unit 236 are relatively moved, and the board conveying unit 236 is positioned above the 1 st board arrangement region 39a of the tray 33 held by the chuck table 208.

Then, the holding pad 236b is lowered by the actuator 236a or the like, and the holding pad 236b is brought into contact with the plate 31 arranged in the 1 st plate arrangement region 39a of the tray 33. Then, the negative pressure of the suction source is applied to the holding pad 236 b. Thereby, the plate 31 is held by the holding pad 236 b.

Then, as shown in fig. 6 (a), the holding pad 236b is raised by the actuator 236a or the like. Further, the daughter-chuck table 210 and the board transfer unit 236 are relatively moved, and the board transfer unit 236 is positioned above the daughter-chuck table 210 as shown in fig. 6 (B).

Then, the holding pad 236b is lowered by the actuator 236a or the like, and the plate 31 is placed on the holding surface 210a of the daughter card tray table 210. In this state, if negative pressure of the suction source is applied to the holding surface 210a, the board 31 can be held by the daughter card table 210. After the board 31 is held by the daughter card table 210, the negative pressure of the suction source applied to the holding pad 236b is cut off, and the holding pad 236b is raised by the actuator 236a or the like.

As described above, the machining apparatus (cutting apparatus) 4 of the present embodiment includes the board conveying unit 336, and the board conveying unit 336 conveys the board 31 between the tray 33 held by the chuck table 208 and the daughter board table 210. The board conveying unit 336 includes: a holding pad 236b that holds the plate 31; and an actuator 236a connected to the machining unit (cutting unit)Element) 232 is supported by the Y-axis Z-axis moving mechanism (index feed unit) 230, and the holding pad 236b is made to be along the machine feed direction (X)₂Axial direction) and indexing feed direction (Y)₂Axial direction) perpendicular to the cutting feed direction (Z)₂Axial direction).

Therefore, when the processing apparatus 4 is used, it is not necessary to attach and detach the board 31 to and from the daughter card tray table 210 by manual work of an operator. As a result, the board 31 can be efficiently attached to and detached from the daughter card tray table 210.

Next, a conveying system configured to be able to convey the workpiece 11 (workpiece unit 17) or the plate 31 (tray 33) to a plurality of apparatuses including the machining apparatus (cutting apparatus) 4 will be described. In the following, a case will be described where the plurality of devices to which the workpiece 11 or the plate 31 is transferred are all the machining devices (cutting devices) 4, but the transfer system may be configured to be able to transfer the workpiece 11 or the like to any type of device. That is, the destination of the workpiece 11 or the like may be an apparatus other than the machining apparatus (cutting apparatus) 4.

For example, the transport system may be configured to sequentially transport the workpiece 11 to a plurality of types of devices used for a series of processes. The conveyance system may be configured to convey the workpiece 11 to various devices used for any of the processes involved in the processing of the workpiece 11. That is, the transport destination of the workpiece 11 or the like may include a tape application device, an ultraviolet irradiation device, a cleaning device, and the like which are not intended for processing the workpiece 11.

Fig. 7 is a plan view showing a configuration example of the conveying system 2 according to the present embodiment, and fig. 8 is a functional block diagram showing an example of a connection relationship of the conveying system 2. As shown in fig. 7, the conveying system 2 of the present embodiment includes a conveying path 6 for conveying a workpiece 11 or the like processed by a processing apparatus (cutting apparatus) 4.

The processing device 4 is connected to the conveyance system 2 as a conveyance destination of the workpiece 11 or the like, but is not necessarily a component of the conveyance system 2. In addition, although only one processing device (cutting device) 4a is shown in fig. 7 for convenience of explanation and two processing devices (cutting devices) 4a and 4b are shown in fig. 8, in the present embodiment, two or more processing devices 4 are required as a destination for transporting the workpiece 11 and the like. That is, the number of processing devices 4 connected to the conveyance system 2 is two or more.

The conveyance path 6 is provided above each processing device 4 so as to connect the plurality of processing devices 4. The workpiece 11 or the plate 31 is conveyed to each processing apparatus 4 through the conveying path 6. Further, since the conveyance path 6 is provided above the processing devices 4, the conveyance path 6 does not interfere with the pipes 21 and the like connected to the side surfaces of the processing devices 4.

Below the conveyance path 6, in addition to the processing device 4, a loader/unloader (conveyance device) 8 that stores the workpiece 11 before processing, the workpiece 11 after processing, the plate 31 before use, the plate 31 after use, and the like is provided. The workpiece 11 before processing or the plate 31 before use stored in the loader/unloader 8 is carried into the conveyance vehicle 10 at an arbitrary timing.

The carrier 10 travels on the conveyance path 6 and carries the workpiece 11 before processing or the plate 31 before use, which is received from the loader/unloader 8, into each processing device 4. When the transport vehicle 10 receives the processed workpiece 11 or the used plate 31 from the processing device 4, it travels on the transport path 6 and transports the processed workpiece 11 to the loader/unloader 8.

However, when a plurality of types of devices (such as the processing device 4) are connected to the conveying system 2, when the conveying vehicle 10 receives a processed workpiece 11 from a certain processing device 4, the vehicle may travel on the conveying path 6 to convey the processed workpiece 11 to a device used in the next step. In fig. 7 and 8, two transport vehicles 10a and 10b are shown, but the number of transport vehicles 10 is not limited.

As shown in fig. 8, the processing apparatus 4, the loader/unloader 8, and the carrier vehicle 10 are wirelessly connected to a control unit 12 that controls the operations thereof. However, the control unit 12 may be connected to the processing device 4, the loader/unloader 8, the carrier vehicle 10, and the like by a wire as long as the control unit can control the operations thereof.

Fig. 9 is a side view schematically showing a structural example of the loader/unloader 8. In fig. 9, some of the components are illustrated as functional blocks. As shown in fig. 9, the loader/unloader 8 includes a case 22 that houses various components. In fig. 9, for convenience of explanation, only the case 22 is shown in outline.

Along the height direction (Z) in the housing 22₁Axial direction) are provided with cartridge housing mechanisms 24 at two different height positions, respectively. That is, the loader/unloader 8 of the present embodiment includes the 1 st cassette housing mechanism 24a and the 2 nd cassette housing mechanism 24b disposed above the 1 st cassette housing mechanism 24 a. However, there is no limitation on the number of cassette housing mechanisms 24 that the loader/unloader 8 has. The loader/unloader 8 may have more than one cassette housing mechanism 24.

Each cartridge accommodating mechanism 24 has a flat plate-like support base 26. A guide mechanism (not shown) is provided on the upper surface side of the support base 26, and the guide mechanism is configured to be capable of following the depth direction (Y) of the housing 22₁Axial direction) is slidably attached to the flat plate-like cassette mounting table 28.

A cassette 30 capable of accommodating a plurality of (for example, 10 or more) workpieces 11 and the like is placed on the upper surface of the cassette mounting table 28. The magazine 30 is used when collectively conveying a plurality of workpiece units 17 or plates 31. By using such a cassette 30, the operator can collectively carry a plurality of workpiece units 17 or plates 31 into the loader/unloader 8.

A carrying-in/out port 32 through which the cassette mounting table 28 on which the cassette 30 is mounted can pass is formed in the case 22 at a position corresponding to each cassette housing mechanism 24. When the cassette 30 is carried in and out, the cassette mounting table 28 on which the cassette 30 is mounted is slid, and the cassette 30 passes through the carrying in and out port 32.

An outer door (2 nd door) 34 capable of closing each of the loading/unloading ports 32 is disposed at a position corresponding to each of the loading/unloading ports 32 in the casing 22. The lower portion of the outer door 34 is connected to the outer end of the support base 26 via a rotation connecting member 36 such as a hinge having a horizontal rotation axis, for example, and the outer door 34 rotates about the rotation axis of the rotation connecting member 36 to be opened and closed.

In a state where the outer door 34 is opened, the cassette mounting table 28 can be pulled out to an outer carrying-in/out area (outer area) 38a located outside the carrying-in/out port 32 (see fig. 12 a and the like). Further, an air-driven lock mechanism (not shown) that is fixed so as not to open the outer door 34 in the closed state is provided at a position corresponding to each of the carry-in/out ports 32 of the casing 22.

For example, the operator places the cassette 30 being transported on the cassette mounting table 28 pulled out to the external carrying-in/out area 38 a. When the operator pushes the cassette mounting table 28 into the casing 22, the cassette mounting table 28 and the cassette 30 move to an internal storage area (internal area) 38b located inside the loading/unloading port 32 (see fig. 12 a and the like).

In this specification, the internal storage area 38b may be referred to as the 1 st placement area of the placement cassette 30. When the cartridge 30 is carried out from the cartridge housing mechanism 24, the outer door 34 is opened, and then the cartridge table 28 is pulled out from the inner housing area 38b to the outer carrying-in/out area 38 a.

An inner door (1 st door) 40 is provided at a position of each cassette housing mechanism 24 on the opposite side of the carrying in/out port 32 with respect to the inner housing area 38b so as to be movable in the height direction. The inner door 40 of the 1 st cassette housing mechanism 24a moves between an upper closed position and a lower open position adjacent to the inner housing area 38b of the 1 st cassette housing mechanism 24a, and the inner door 40 on the 2 nd cassette housing mechanism 24b side moves between an upper open position and a lower closed position adjacent to the inner housing area 38b of the 2 nd cassette housing mechanism 24 b. Thus, the two inner doors 40 do not interfere with each other.

Fig. 10 (a) is a side view, partially in section, showing the 1 st cartridge accommodation mechanism 24a in a state where the outer door 34 is closed and the inner door 40 is opened. In fig. 10 (a), a part of the components of the loader/unloader 8 is shown as functional blocks. The configuration and operation of the 2 nd cartridge accommodating mechanism 24b are the same as those of the 1 st cartridge accommodating mechanism 24a except for the operation of the movement of the inner door 40.

As shown in fig. 10 (a), a lifting mechanism 42 is connected to the inner door 40. The lifting mechanism 42 is, for example, an air actuator (air cylinder) that moves an object by using air pressure, and includes a cylinder tube 42a and a piston rod 42b that is movable relative to the cylinder tube 42 a.

A piston (not shown) is connected to a base end portion of the piston rod 42b accommodated in the cylinder 42 a. A coupling member 42c fixed to a surface of the inner door 40 on the side opposite to the inner storage area 38b is coupled to a distal end portion of the piston rod 42b exposed from the cylinder tube 42 a.

When the piston and the piston rod 42b are moved from the upper side to the lower side by controlling the intake and exhaust of the cylinder 42a, the inner door 40 of the 1 st cartridge accommodation mechanism 24a is moved from the closed position to the open position. When the piston and the piston rod 42b are moved upward from below, the inner door 40 of the 1 st cartridge accommodation mechanism 24a is moved from the open position to the closed position. The lifting mechanism 42 may be realized by another mechanism such as a rodless cylinder.

A 1 st sensor 44 for detecting whether the inner door 40 is open is provided at a position of the support base 26 facing the inner door 40. The 1 st sensor 44 is, for example, a magnetic sensor that detects the intensity of a magnetic field of a magnet 44a (see fig. 10B) attached to a predetermined position of the inner door 40.

For example, as shown in fig. 10 (a), when the inner door 40 is opened and the magnet 44a is separated from the 1 st sensor 44, the strength of the magnetic field of the magnet 44a becomes weak at the position of the 1 st sensor 44. Therefore, whether or not the inner door 40 is opened can be determined by the strength of the magnetic field detected by the 1 st sensor 44.

The 1 st sensor 44 is connected to a control device 46 that controls each component of the loader/unloader 8, and the 1 st sensor 44 transmits information on the strength of the detected magnetic field to the control device 46. The controller 46 determines that the inner door 40 is opened when the intensity of the magnetic field detected by the 1 st sensor 44 is lower than the reference, and determines that the inner door 40 is closed when the intensity of the magnetic field detected by the 1 st sensor 44 is higher than the reference. The 1 st sensor 44 may be wirelessly connected to the control device 46.

The control device 46 is constituted by a computer, for example, and includes a Processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash Memory. The function of the control device 46 is realized by operating a processing device or the like in accordance with software stored in the auxiliary storage device.

A 2 nd sensor 48 for detecting whether the outer door 34 is open is provided at a position corresponding to the carry-in/out port 32 of the casing 22. The 2 nd sensor 48 is, for example, a magnetic sensor that detects the intensity of the magnetic field of the magnet 48a attached to a predetermined position of the outer door 34. The 2 nd sensor 48 is connected to the control device 46. The 2 nd sensor 48 may be connected to the control device 46 wirelessly.

Fig. 10 (B) is a partially sectional side view showing a state where the outer door 34 is opened and the inner door 40 is closed. In fig. 10 (B), the control device 46 is shown as a functional block. As shown in fig. 10 (B), when the magnet 48a is separated from the 2 nd sensor 48 by opening the outer door 34, the strength of the magnetic field of the magnet 48a becomes weak at the position of the 2 nd sensor 48.

Therefore, whether the outer door 34 is open or not can be determined by the strength of the magnetic field detected by the 2 nd sensor 48. Specifically, the 2 nd sensor 48 transmits information on the strength of the detected magnetic field to the control device 46. The controller 46 determines that the outer door 34 is open when the intensity of the magnetic field detected by the 2 nd sensor 48 is lower than the reference, and determines that the outer door 34 is closed when the intensity of the magnetic field detected by the 2 nd sensor 48 is higher than the reference.

The control device 46 has a function as a 1 st safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The 1 st safety mechanism is realized by the control device 46 appropriately controlling an air-driven lock mechanism that is fixed so as not to open the outer door 34 in the closed state.

Specifically, when it is determined that the outer door 34 is closed and the inner door 40 is open, the controller 46 fixes the outer door 34 by the lock mechanism so as not to open the outer door 34. In this way, the control device 46 controls whether or not the outer door 34 can be opened or closed, and thus it is possible to prevent the operator from erroneously accessing the moving parts and the like that are in operation inside the loader/unloader 8.

The control device 46 also functions as a 2 nd safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The 2 nd safety mechanism is realized by appropriately managing the power supply of the loader/unloader 8 by the control device 46. Specifically, when it is determined that the outer door 34 is open and the inner door 40 is closed, the control device 46 cuts off the power of the loader/unloader 8 when the inner door 40 is opened for some reason.

With the 2 nd safety mechanism, the loader/unloader 8 is stopped in a state where the outer door 34 and the inner door 40 are opened simultaneously. By appropriately managing the power supply of the loader/unloader 8 by the control device 46 in this way, it is possible to prevent the operator from erroneously accessing the moving parts and the like that are in operation inside the loader/unloader 8.

Fig. 11 (a) is a partially sectional side view showing the cartridge mounting table 28 and the like, and fig. 11 (B) is a bottom view showing the cartridge mounting table 28. A stopper member 50 is disposed on the lower surface 28a side of the cassette mounting table 28. The stopper member 50 has, for example, a square bar 50a that is long in the depth direction. However, the length of the square bar 50a in the depth direction is shorter than the length of the cassette mounting table 28 in the depth direction. The square bar 50a is made of metal such as stainless steel. However, the material, shape, and the like of the square bar 50a are not particularly limited.

One end of the square bar 50a located on the inner side in the depth direction (i.e., the end on the inner door 40 side) is provided with a groove extending in the width direction (X) substantially perpendicular to the height direction and the depth direction₁Axial direction) on which the roller 50b is rotatably supported. The roller 50b has a diameter smaller than the distance between the lower surface 28a of the cassette stage 28 and the upper surface 26a of the support stage 26.

A shaft mechanism 52 for rotatably supporting the square bar 50a is provided between one end of the square bar 50a on the inner side and the other end of the square bar on the outer side. The shaft mechanism 52 has a rotation shaft 52a along the width direction. The rotary shaft 52a is connected to the other end side (outer side) of the center in the longitudinal direction (depth direction) of the square rod 50 a.

Both ends of the rotating shaft 52a in the width direction are inserted into bearing holes of a pair of bearings 52b fixed to the lower surface 28a side of the cassette mounting table 28. Thereby, the square bar 50a is supported by the bearing 52b so as to be rotatable about the rotation axis 52a in a plane parallel to the height direction and the depth direction (in a plane perpendicular to the width direction).

As described above, the rotation shaft 52a is connected to the other end side of the center of the square rod 50 a. Thus, the direction of the moment about the rotation axis 52a of the gravity acting on the stopper member 50 is a direction in which one end of the square rod 50a moves downward. That is, as long as a sufficient force is not applied to the square bar 50a, the position of one end of the square bar 50a is lower than the position of the other end of the square bar 50a due to the gravity.

Therefore, for example, in a state where the entire cassette stage 28 is positioned in the internal storage area 38b, the roller 50b contacts the upper surface 26a of the support base 26. When the cassette mounting table 28 is moved above the support table 26, the roller 50b rotates on the upper surface 26a of the support table 26.

A lower end portion of a pin (pressing portion) 54 that is long in the height direction is connected to the other end portion of the square rod 50 a. A through hole 28c that penetrates the cartridge mounting table 28 in the height direction is formed in the cartridge mounting table 28 at a position corresponding to the pin 54, and the pin 54 is inserted into the through hole 28 c. The through hole 28c is formed to have a size that does not prevent the inserted pin 54 from moving in the height direction.

The length of the pin 54 in the height direction is larger than the thickness of the cassette mounting table 28. Therefore, in a state where the roller 50b is in contact with the upper surface 26a of the support base 26, the upper portion of the pin 54 is exposed on the upper surface 28b side of the cassette mounting table 28. A disk-shaped button 54b is fixed to the exposed portion of the pin 54, and the button 54b has an outer diameter larger than the diameter of the pin 54.

When the button 54b fixed to the pin 54 is pressed from above, the other end of the square rod 50a moves downward, and one end of the square rod 50a moves upward. That is, the roller 50b moves upward. A ring 54a is fixed near the lower portion of the pin 54, and the ring 54a has an outer diameter larger than the diameter of the through hole 28 c.

Fig. 12 (a) is a partially sectional side view showing the case where the cartridge mounting table 28 is pulled out from the internal storage area 38b to the outside. The cassette mounting table 28 is attached to the support table 26 so as to be slidable by the guide mechanism (not shown), and is drawn out to the outside of the carrying in/out port 32.

When the cartridge table 28 slides outward and the roller 50b protrudes outward beyond the outer end of the upper surface 26a of the support table 26, one end of the square rod 50a moves downward due to a moment about the rotation shaft 52a of the gravity acting on the stopper member 50. That is, the roller 50b comes off the support base 26.

Fig. 12 (B) is a partially cross-sectional side view showing a case where the roller 50B is detached from the support base 26. When the roller 50b is detached from the support base 26, the roller 50b is positioned lower than the upper surface 26 a. As a result, the stopper member 50 comes into contact with the outer surface 26b of the support base 26, thereby restricting the movement of the cassette mounting base 28 inward. Further, as the roller 50b comes off, the pin 54 rises, and the ring 54a comes into contact with the lower surface 28a of the cassette mounting table 28.

In this way, when the cartridge mounting table 28 is pulled out, the stopper member 50 and the shaft mechanism 52 function as a movement limiting mechanism that limits the movement of the cartridge mounting table 28 inward. By providing the movement restricting mechanism, for example, the relatively heavy cassette 30 can be easily carried in and out, and therefore the risk of damage to the workpiece 11 or the like stored in the cassette 30 due to carrying in and out can be reduced.

That is, when the cassette 30 is placed (carried) on the cassette mounting table 28, when the cassette mounting table 28 moves inward, the risk that the operator drops the cassette 30 and the risk that the operator collides the cassette 30 with the outer door 34 increase, but the inward movement of the cassette mounting table 28 is restricted by the movement restricting mechanism, and these risks are suppressed sufficiently low.

Further, when the operator carries the cartridge 30 out of the cartridge mounting table 28 and the cartridge mounting table 28 moves inward, the risk of collision between the cartridge 30 to be carried out and a part of the casing 22 located above the carrying-in/out port 32 is increased, but the movement of the cartridge mounting table 28 inward is restricted by the movement restricting mechanism, and this risk is also suppressed sufficiently low.

The movement restricting mechanism of the present embodiment is realized by the rotation of the square bar 50a in the plane parallel to the height direction and the depth direction, and therefore, the size of the cassette housing mechanism 24 in the width direction is not increased as in the case where the movement restricting mechanism is provided at the outer portion in the width direction of the cassette mounting table 28, for example. Therefore, as compared with a case where the movement restricting mechanism is provided at the outer portion in the width direction of the cartridge mounting table 28, the cartridge housing mechanism 24 which is compact in the width direction can be easily realized.

The conditions such as the length of the square bar 50a and the position of the shaft mechanism 52 are set so that the area of the cassette 30 on the cassette mounting table 28 is completely exposed from the case 22 in a state where the square bar 50a is detached from the support table 26. Therefore, the operator can place (carry in) the cartridge 30 on the cartridge placement table 28 in a state where the cartridge 30 is completely exposed from the housing 22.

Fig. 12 (C) is a side view, partially in cross section, showing the case where the cartridge mounting table 28 is returned to the internal storage area 38 b. When returning the cassette mounting table 28 to the internal storage area 38b, the operator presses the button 54 b. The operator presses the button 54b until the lower portion of the button 54b contacts the upper surface 28b of the cassette mounting table 28, for example. Thereby, the pin 54 is pressed downward, and the roller 50b moves upward from the upper surface 26a of the support base 26.

The roller 50b is raised to contact the lower surface 28a of the cassette stage 28, for example. As a result, the restriction of the inward movement of the cassette mounting table 28 is released, and the cassette mounting table 28 can be returned to the internal storage area 38 b. The operator may push the cassette mounting table 28 into the internal storage area 38b while pressing the button 54 b.

The cartridge housing mechanism 24 is not limited to the above example. For example, the stopper members 50 may be provided at two different positions in the width direction of the cassette mounting table 28. In this case, through holes 28c are formed at positions corresponding to the respective pins 54. In this case, the two square rods 50a constituting the two stopper members 50 may be coupled to each other at arbitrary positions. If the two square rods 50a are connected to each other, one of the pins 54 may be omitted.

The through hole 28c may be formed in a region of the cartridge mounting table 28 where the cartridge 30 is disposed. In this case, when the cartridge 30 is placed on the cartridge mounting table 28, the pin 54 is pushed down by the weight of the cartridge 30. That is, the operator does not need to press the pin 54 to release the restriction of the stopper member 50.

As shown in fig. 9, the loader/unloader 8 has a lift mechanism 56 disposed on the opposite side of the inner door 40 from the inner storage area 38 b. The lifting mechanism 56 has a support column 56a that is long in the height direction. A pair of guide rails (not shown) extending in the longitudinal direction (i.e., the height direction) of the support column 56a are provided on the inner door 40 side of the support column 56 a.

A plate-shaped elevating table 58 is attached to a pair of guide rails of the elevating mechanism 56 so as to be slidable in the height direction. The upper surface of the lift table 58 is formed substantially flat. The elevating platform 58 slides in the height direction along the pair of guide rails while keeping the upper surface thereof substantially perpendicular to the height direction.

A motor (not shown) and a drive pulley (not shown) coupled to a rotary shaft of the motor are provided at a lower portion of the support column 56 a. A driven pulley (not shown) is provided above the support column 56 a. A single toothed endless belt (not shown) is mounted on the drive pulley and the driven pulley, and a part of the toothed endless belt is fixed to the lift table 58. Therefore, when the rotational shaft of the motor is rotated in one direction, the elevating platform 58 is raised, and when the rotational shaft of the motor is rotated in the other direction, the elevating platform 58 is lowered.

On the upper surface side of the elevating table 58, a workpiece unit 17 that temporarily carries out the workpiece unit 17 from the cassette 30 in the cassette housing mechanism 24, a workpiece unit 17 that temporarily carries in the cassette 30 in the cassette housing mechanism 24, or a temporary storage unit 60 that temporarily stores the tray 33 on which the plate 31 is arranged is provided. The temporarily placing unit 60 has a square tubular housing 62 having an opening formed on the cartridge housing mechanism 24 side. A plurality of conveyance units (conveyance mechanisms) 64 capable of gripping the workpiece unit 17 and the tray 33 and moving in the depth direction are disposed inside the housing 62.

When placing the list temporarilyWhen the workpiece unit 17 or the tray 33 is transferred between the element 60 and the 1 st cassette 30a of the 1 st cassette housing mechanism 24a, the height of the temporary placement unit 60 is aligned with the height of the 1 st cassette housing mechanism 24 a. That is, the temporary placement unit 60 is disposed in the 1 st placement area a with respect to the 1 st cartridge accommodation mechanism 24a₁a 1 st conveyance zone B adjacent to the inner door 40 side in the depth direction₁a。

When the temporary placing unit 60 is disposed in the 1 st conveying area B₁a and the carrying unit 64 can access the 1 st placement area A when the inner door 40 of the 1 st cassette housing mechanism 24a is opened₁a 1 st cassette 30 a. For example, the conveyance unit 64 grips the object unit 17 or the tray 33 stored in the 1 st cassette 30a and pulls out the object unit 17 or the tray 33 to the temporary storage unit 60.

The conveyance unit 64 holds the workpiece unit 17 or the tray 33 placed temporarily in the temporary placement unit 60, and stores the workpiece unit 17 or the tray 33 in the 1 st cassette 30 a. Thus, the conveying unit 64 can be in the 1 st conveying area B₁a temporary placing unit 60 and the 1 st placing area A₁The object 11 or the tray 33 is conveyed between the 1 st cassettes 30a of a.

When the workpiece unit 17 or the tray 33 is transferred between the temporary placement unit 60 and the 2 nd cassette 30b of the 2 nd cassette housing mechanism 24b, the height of the temporary placement unit 60 is aligned with the height of the 2 nd cassette housing mechanism 24 b. That is, the temporarily placing unit 60 is disposed in the 1 st placement area a with respect to the 2 nd cartridge accommodating mechanism 24b₁B the 1 st conveying area B adjacent to the inner door 40 side in the depth direction₁b。

When the temporary placing unit 60 is disposed in the 1 st conveying area B₁b and the inner door 40 of the 2 nd cassette housing mechanism 24b is opened, the carrying unit 64 can access the 1 st placement area A₁b, 2 nd cassette 30 b. For example, the conveyance unit 64 grips the object unit 17 or the tray 33 stored in the 2 nd cassette 30b and pulls out the object unit 17 or the tray 33 to the temporary storage unit 60.

The conveyance unit 64 holds the object unit 17 or the tray 33 placed temporarily in the temporary placement unit 60, and stores the object unit 17 or the tray 33 in the 2 nd cassette 30 b. Thus, the conveying unit 64 can be in the 1 st conveying area B₁b temporary placing unit 60 and the 1 st placing area A₁b, the object 11 or the tray 33 is conveyed between the 2 nd cassettes 30 b.

A loading table 66 is provided further above the 2 nd cassette housing mechanism 24 b. An opening 22b that vertically penetrates the ceiling 22a of the housing 22 is provided in a region directly above the mounting table 66. An opening 6a penetrating the conveyance path 6 vertically is provided in a region directly above the mounting table 66 and the opening 22 b.

When the workpiece unit 17 or the pallet 33 is transported between the transport vehicle 10 and the temporary placement unit 60, first, the transport vehicle 10 having the container (cassette) 102 capable of storing the workpiece unit 17 or the pallet 33 is moved to above the opening 6 a. Then, the container 102 is lowered so as to be suspended by the suspending member 112, and the container 102 is placed on the upper surface of the mounting table 66 (the 2 nd placement area a)₂)。

In addition, the height of the placement unit 60 is aligned with the height of the container 102 placed on the placement table 66. That is, the placement unit 60 is disposed in the 2 nd conveyance area B adjacent to the mounting table 66 in the depth direction₂. Thus, the carrying unit 64 can access the placement area a 2 nd₂The container 102. For example, the conveyance unit 64 grips the workpiece unit 17 or the tray 33 accommodated in the container 102 and pulls out the workpiece unit 17 or the tray 33 to the temporary storage unit 60.

The conveyance unit 64 holds the workpiece unit 17 or the tray 33 placed temporarily in the temporary placement unit 60, and stores the workpiece unit 17 or the tray 33 in the container 102. Thus, the conveying unit 64 can be in the 2 nd conveying area B₂The workpiece 11 or the tray 33 is conveyed between the temporary placing unit 60 and the container 102 placed on the placing table 66. The controller 46 is connected to the lifting mechanism 56 for lifting the temporary placement unit 60 and the conveyance unit 64 in the temporary placement unit 60. The operations of the lifting mechanism 56 and the conveyance unit 64 are controlled by the control device 46.

The control device 46 is also connected to a receiver 68 and a transmitter 70, the receiver 68 receiving a signal (information) from the outside and transmitting the signal to the control device 46, and the transmitter 70 transmitting the signal (information) received from the control device 46 to the outside. The receiver 68 receives a signal transmitted from the control unit 12 of the transport system 2, for example, and transmits the signal to the control device 46.

The control device 46 controls the operations of the components of the loader/unloader 8 based on, for example, signals received from the receiver 68. The control device 46 generates a signal for notification, for example, and transmits the signal to the transmitter 70. The transmitter 70 transmits a signal received from the control device 46 to the control unit 12 of the conveyance system 2, for example.

The loader/unloader 8 of the present embodiment can transfer the object units 17 or the trays 33 between the cassettes 30 that store the object units 17 or the trays 33 and the containers 102 of the carrier vehicle 10 by the buffer unit 60. This enables the workpiece 11 or the plate 31 to be conveyed to each processing device 4 at a proper timing, and the workpiece 11 processed by each processing device 4 and the used plate 31 to be recovered and utilized at a proper timing.

Fig. 13 (a) is a partially cross-sectional side view showing a case where the workpiece unit 17 is temporarily placed on the upper layer of the temporary placement unit 60, and fig. 13 (B) is a partially cross-sectional side view showing a case where the workpiece unit 17 is temporarily placed on the upper layer of the temporary placement unit 60. The temporary placement of the tray 33 is also the same as in the case of the workpiece unit 17. The housing 62 of the placement unit 60 includes, for example, an upper plate 62a disposed on the upper portion and a lower plate 62b disposed on the lower portion.

Upper ends of columns (not shown) are connected to both ends of the upper plate 62a in the width direction. Further, lower ends of the columns are connected to both ends of the lower plate 62b in the width direction. That is, the upper plate 62a and the lower plate 62b are coupled to each other by two sets of posts. A pair of side plates 62c spaced apart in the width direction are disposed in a space between the upper plate 62a and the lower plate 62 b. Further, an opening 62d is formed in an end portion of the case 62 on the cartridge housing mechanism 24 side.

Upper rails (1 st temporarily placed section) 72a that are long in the depth direction are disposed at the same height positions inside the pair of side plates 62 c. Each upper-stage rail 72a has a support surface for supporting the workpiece unit 17 (frame 15) and the like from below and a side surface for defining the position of the workpiece unit 17 (frame 15) and the like in the width direction.

Lower-stage rails (No. 2 temporary placement portions) 72b that are longer in the depth direction are disposed below the upper-stage rails 72a on the inner sides of the pair of side plates 62 c. Each lower rail 72b has a support surface for supporting the workpiece unit 17 (frame 15) and the like from below and a side surface for defining the position of the workpiece unit 17 (frame 15) and the like in the width direction.

In this way, by providing the upper-stage rail 72a and the lower-stage rail 72b at different heights inside the housing 62, the temporary placement unit 60 can simultaneously store two workpiece units 17 and the like. Therefore, as compared with the case where only one workpiece unit 17 or the like can be accommodated in the temporary storage unit, the workpiece unit 17 or the like can be efficiently conveyed between the container 102 or the cassette 30 of the conveying vehicle 10 and the temporary storage unit 60.

For example, the upper-stage guide 72a is used for storing the workpiece unit 17 before machining, and the lower-stage guide 72b is used for storing the workpiece unit 17 after machining. However, the manner of housing the workpiece unit 17 and the like is not limited. The upper-stage guide 72a may be used to house the processed object unit 17 and the like after processing, and the lower-stage guide 72b may be used to house the processed object unit 17 and the like before processing.

The 1 st conveyance unit 64a is provided at a position corresponding to the height of the upper stage guide rail 72a, and the 2 nd conveyance unit 64b is provided at a position corresponding to the height of the lower stage guide rail 72 b. Each of the conveying units 64 has a grip portion including two plate members arranged vertically. The two plate members are arranged such that the lower surface of the upper plate member is substantially parallel to the upper surface of the lower plate member.

The grip portion of each of the conveying units 64 further includes an actuator (not shown) for adjusting the interval between the two plate members. The actuator narrows the gap between the two plate members, thereby gripping the frame 15 of the workpiece unit 17 and the like. Further, the frame 15 and the like of the workpiece unit 17 are released from the two plate members by expanding the interval between the two plate members.

Each of the conveying units 64 has a horizontal movement mechanism (not shown) for moving the grip in the depth direction. The horizontal movement mechanism includes a linear guide (not shown) provided along the depth direction. A conveyance unit 64 is slidably connected to the linear guide.

For example, a driven pulley (not shown) having a rotation axis substantially parallel to the width direction is provided on one end side of the linear guide. Further, at the other end side of the linear guide, there are provided: a drive pulley (not shown) having a rotation axis substantially parallel to the width direction; and a motor (not shown) having a rotary shaft coupled to the drive pulley.

A single toothed endless belt (not shown) is mounted on the driven pulley and the drive pulley, and a part of the toothed endless belt is fixed to the grip portion. Therefore, when the rotational shaft of the motor is rotated in one direction, the grip portion moves to one side in the depth direction, and when the rotational shaft of the motor is rotated in the other direction, the grip portion moves to the other side in the depth direction.

When the workpiece unit 17 and the like are temporarily placed on the upper-stage rail 72a, as shown in fig. 13 (a), first, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56 so that the height of the upper-stage rail 72a is aligned with the height of the container 102 or the cassette 30 in which the workpiece unit 17 and the like are stored.

Next, the grip portion of the 1 st conveyance unit 64a is moved into the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 or the like accommodated in the container 102 or the cassette 30 is gripped by the gripping portion of the 1 st conveyance unit 64 a. Then, the grip portion of the 1 st conveyance unit 64a is moved in a direction away from the container 102 or the cassette 30. Thereby, the workpiece unit 17 and the like are mounted on the upper-stage rail 72 a.

The same applies to the operation when the workpiece unit 17 or the like temporarily placed on the upper guide 72a is stored in the container 102 or the cassette 30. In this case, after the workpiece unit 17 or the like temporarily placed on the upper guide rail 72a is gripped by the grip portion of the 1 st conveyance unit 64a, the grip portion of the 1 st conveyance unit 64a may be moved into the container 102 or the cassette 30.

When the workpiece unit 17 and the like are temporarily placed on the lower guide rail 72B, as shown in fig. 13 (B), first, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56 so that the height of the lower guide rail 72B is aligned with the height of the container 102 or the cassette 30 in which the workpiece unit 17 and the like are stored.

Next, the grip portion of the 2 nd conveyance unit 64b is moved into the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 or the like accommodated in the container 102 or the cassette 30 is gripped by the gripping portion of the 2 nd conveyance unit 64 b. Then, the grip portion of the 2 nd conveyance unit 64b is moved in a direction away from the container 102 or the cassette 30. Thereby, the workpiece unit 17 and the like are placed on the lower rail 72 b.

The same applies to the operation when the workpiece unit 17 or the like placed on the lower guide 72b is stored in the container 102 or the cassette 30. In this case, after the workpiece unit 17 or the like temporarily placed on the lower guide rail 72b is gripped by the grip portion of the 2 nd conveyance unit 64b, the grip portion of the 2 nd conveyance unit 64b may be moved into the container 102 or the cassette 30.

The operation related to the conveyance of the workpiece unit 17 and the like between the magazine 30 and the container 102 is, for example, as follows. First, the height of the temporarily placing unit 60 is adjusted by the elevating mechanism 56, and the workpiece unit 17 and the like before processing stored in the magazine 30 are pulled out to the upper-stage guide rail 72 a. Next, the temporary placement unit 60 is raised by the raising and lowering mechanism 56, and the processed object unit 17 or the like of the container 102 stored on the mounting table 66 is pulled out to the lower guide rail 72 b.

Then, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the workpiece unit 17 to be processed temporarily placed on the upper guide rail 72a and the like is accommodated in the container 102 on the mounting table 66. This operation efficiently carries out the unloading (collection) of the processed workpiece unit 17 and the like from the container 102 and the loading (distribution) of the unprocessed workpiece unit 17 and the like into the container 102. However, the operation related to the conveyance of the workpiece unit 17 and the like is not limited to this. In addition, the relationship between the upper-stage rail 72a and the lower-stage rail 72b may be changed as necessary.

Fig. 14 (a) is a plan view of two upper rails 72a and the like. The upper-stage rail 72a and the lower-stage rail 72b positioned on one side in the width direction are fixed to the 1 st side plate 62c₁. Further, an upper-stage rail 72a and a lower-stage rail 72b positioned on the other side in the width direction are fixed to the 2 nd side plate 62c₂。

A1 st opening 62e vertically penetrating one side of the lower plate 62b in the width direction is formed at one end side of the lower plate 62b in the depth direction₁And a 2 nd opening 62e vertically penetrating the other side in the width direction of the lower plate 62b₂. At the 1 st opening 62e₁In which the 1 st side plate 62c is inserted₁At one end side in the depth direction of the substrate, at the 2 nd opening 62e₂In which a 2 nd side plate 62c is inserted₂A part of the one end side in the depth direction of (a).

1 st opening 62e on the lower surface of the lower plate 62b₁And the 2 nd opening 62e₂The adjacent areas are fixed with the base of the 1 st air actuator 74a and the base of the 2 nd air actuator 74 b. The movable part (e.g., piston rod) of the 1 st air actuator 74a and the 1 st opening 62e₁1 st side plate 62c₁Is connected. The movable part (e.g., piston rod) of the 2 nd air actuator 74b and the 2 nd opening 62e₂2 nd side plate 62c₂Is connected.

A 1 st guide mechanism 76a and a 2 nd guide mechanism 76b are provided on the other end side in the depth direction of the lower plate 62 b. The 1 st guide mechanism 76a includes: a guide rail fixed to an upper surface of the lower plate 62b and long in the width direction; and a slider fixed to the 1 st side plate 62c₁The lower portion side of the guide rail is attached to the guide rail in a state of being slidable in the width direction. In addition, the 2 nd guide mechanism 76b includes: a guide rail fixed to an upper surface of the lower plate 62 b; and a slider fixed to the 2 nd side plate 62c₂The lower portion side of the guide rail is attached to the guide rail in a state of being slidable in the width direction.

Thus, the 1 st side plate 62c is aligned with the 1 st air actuator 74a and the 2 nd air actuator 74b₁And the 2 nd side plate 62c₂By changing the interval between the upper rails 72a and the lower rails 72b, the interval between the upper rails 72a and the lower rails 72b can be changed while maintaining the parallel state.

Namely, the 1 st side plate 62c₁A 1 st air actuator 74a, a 1 st guide mechanism 76a, a 2 nd side plate 62c₂The 2 nd air actuator 74b and the 2 nd guide mechanism 76b function as an interval adjustment mechanism 78 that adjusts the interval between the two upper-stage guide rails 72a and the interval between the two lower-stage guide rails 72 b.

The operations of the 1 st air actuator 74a and the 2 nd air actuator 74b are controlled by the control device 46. That is, the controller 46 controls the operations of the 1 st air actuator 74a and the 2 nd air actuator 74b in accordance with the size of the workpiece unit 17 (workpiece 11) or the like, and adjusts the interval between the two upper-stage rails 72a and the interval between the two lower-stage rails 72 b.

For example, when the diameter of the workpiece 11 is 300mm, the frame 15 having a width of about 400mm is used. In this case, the controller 46 operates the 1 st air actuator 74a and the 2 nd air actuator 74b so that the distance 72c between the side surfaces of the two upper-stage rails 72a (the distance 72c between the side surfaces of the two lower-stage rails 72 b) is slightly larger than 400mm (for example, several mm).

For example, when the diameter of the workpiece 11 is 200mm, the frame 15 having a width of about 300mm is used. In this case, the controller 46 operates the 1 st air actuator 74a and the 2 nd air actuator 74b so that the distance 72c between the side surfaces of the two upper-stage rails 72a (the distance 72c between the side surfaces of the two lower-stage rails 72 b) is slightly larger than 300mm (for example, several mm).

Fig. 14 (B) is a plan view showing a case where the interval between the two upper rails 72a is narrowed. In addition, when the interval between the two upper-stage rails 72a is narrowed, the interval between the two lower-stage rails 72b is also narrowed. In this way, by adjusting the interval between the two upper-stage rails 72a and the interval between the two lower-stage rails 72b according to the diameter of the workpiece 11, it is possible to temporarily store the workpieces 11 of different sizes in the temporary storage unit 60. That is, one temporary placement unit 60 can handle conveyance of a plurality of types of workpiece units 17 and the like.

Fig. 15 (a) is a perspective view showing the upper surface side of the carrier vehicle 10 that travels on the carrier path 6 and carries the workpiece unit 17 or the pallet 33, and fig. 15 (B) is a perspective view showing the bottom surface side of the carrier vehicle 10. As shown in fig. 15 (a) and 15 (B), the transport vehicle 10 includes a plate-shaped vehicle frame 82 on which various components are mounted. A pair of axles 84 are disposed at both front side end portions of the vehicle frame 82. The axle 84 is attached to the lower surface side of the vehicle frame 82 such that one end side thereof protrudes from the side surface of the vehicle frame 82.

Wheels (front wheels) 86 are fixed to one end sides of the pair of axles 84, respectively. That is, the pair of wheels 86 are disposed at two positions separated in the width direction (vehicle width direction) of the vehicle frame 82. Further, a pair of wheels (rear wheels) 88 are disposed at two positions spaced apart in the width direction at the rear end portion of the vehicle frame 82. The wheels 88 are, for example, caster wheels that can rotate 360 ° around a rotation axis along the height direction, and are attached to the lower surface side of the vehicle frame 82. The wheels 86 and 88 are wheels for traveling when the transport vehicle 10 travels on the transport path 6.

A drive unit 90 that drives the pair of wheels 86 is mounted on a front end portion of the vehicle frame 82. The drive unit 90 includes a pair of motors (drive sources) 92 coupled to the wheels 86 via the axles 84 and the like. The motor 92 has a rotary shaft (output shaft) 92a and generates power for rotating the wheel 86.

As shown in fig. 15 (B), a pulley 94 is provided on the other end side of the axle 84. An endless coupling member (not shown) such as a belt or a chain is stretched over the rotating shaft 92a of the motor 92 and the pulley 94. The power transmission mechanism is constituted by the rotary shaft 92a of the motor 92, the pulley 94, and the coupling member, and the axle 84 and the motor 92 are coupled. Thereby, the power (rotational force) generated by the motor 92 is transmitted to the wheel 86 to rotate the wheel 86.

The drive unit 90 independently controls the direction of rotation of the pair of wheels 86 by a pair of motors 92. The pair of wheels 86 are rotated in the same direction, and the carrier 10 moves forward or backward. Further, by rotating the pair of wheels 86 in opposite directions, the carrier vehicle 10 can be rotated about the rotation axis along the height direction, and the direction in which the carrier vehicle 10 travels can be controlled. In addition, there is no limitation on the configuration of the wheels 86 and 88. For example, as the wheels 86 and 88, so-called Mecanum wheels (Mecanum wheels) in which a plurality of inclined cylindrical rotating bodies are attached to the outer circumferential surface that contacts the conveyance path 6 may be used.

A battery (secondary battery) 96 for supplying electric power to the motor 92 and the like is connected to the driving unit 90 via a power supply wire (not shown). The battery 96 is attached to, for example, a front end portion of the vehicle frame 82, and supplies electric power for rotating the wheel 86 to the motor 92. As the battery 96, a lithium ion battery or the like is used.

Fig. 16 is an enlarged perspective view showing the front end portion of the conveyance cart 10. A pair of terminals (power receiving terminals) 100 connected to the battery 96 are provided on the lower surface side of the front end portion of the vehicle frame 82 via a charging wiring (charging wiring) 98. The pair of terminals 100 is connected to, for example, a terminal for power supply provided outside the transport vehicle 10, and receives supply of electric power for charging the battery 96. The charging of the battery 96 using the terminal 100 will be described in detail later.

As shown in fig. 15 a and 15B, a storage area 104 for storing a container (magazine) 102 for storing the workpiece unit 17 or the pallet 33 is provided below the vehicle frame 82. The storage area 104 is surrounded by the pair of wheels 86 and the pair of wheels 88 and is located above the lower ends of the wheels 86 and the wheels 88. A container 102 capable of accommodating one or more workpiece units 17 and the like is disposed in the storage area 104.

Fig. 17 (a) is a perspective view showing the container 102, and fig. 17 (B) is a front view showing the container 102. The container 102 is formed into a hexagonal prism shape in plan view, for example, and has a housing portion (housing space) 102a capable of housing the object unit 17 or the tray 33 therein. The housing 102a is connected to a space outside the container 102 through a slit-shaped opening 102b that opens on one side surface of the container 102. The workpiece unit 17 or the tray 33 is carried into the housing 102a through the opening 102b, and is carried out of the housing 102a through the opening 102 b.

As shown in fig. 17 (B), the container 102 is configured to be able to accommodate two types of workpiece units 17a and the like having different sizes, and a workpiece unit 17B and the like, for example. The storage section 102a of the container 102 is provided with a pair of 1 st rails 106 capable of holding the workpiece unit 17a and the like, and a pair of 2 nd rails 108 capable of holding the workpiece unit 17b and the like.

The pair of 1 st rails 106 are fixed to the upper wall 102c of the housing portion 102a at a predetermined interval, and the pair of 1 st rails 106 include: a holding surface 106a for holding the lower surface side of the workpiece unit 17a and the like from below; and a side surface 106b defining the horizontal position of the workpiece unit 17a and the like. The pair of 2 nd rails 108 are fixed to the bottom wall 102d of the housing portion 102a at a predetermined interval, and the pair of 2 nd rails 108 have holding surfaces 108a for holding the workpiece unit 17b and the like from below. The horizontal position of the workpiece unit 17b and the like is defined by the inner side surface of the container 102.

The spacing between the pair of 1 st rails 106 is narrower than the spacing between the pair of 2 nd rails 108. Therefore, the pair of 1 st rails 106 can hold the workpiece unit 17a and the like smaller than the workpiece unit 17b and the like held by the 2 nd rail 108. For example, the workpiece 11 having a diameter of about 200mm (8 inches) is held by the pair of 1 st rails 106, and the workpiece 11 having a diameter of about 300mm (12 inches) is held by the pair of 2 nd rails 108.

As described above, the container 102 is not configured to be able to accommodate a plurality of workpiece units 17 of the same kind (the same size) and the like. In this regard, the function and use of the container 102 are significantly different from those of the cassette 30 capable of accommodating a plurality of workpiece units 17 of the same kind and the like.

However, the structure of the container 102 and the housing 102a is not limited. For example, the housing portion 102a may be configured to be able to house one, three, or more workpiece units 17. The storage portion 102a may be configured to be capable of storing a plurality of workpiece units 17 of the same type.

When the workpiece unit 17 or the tray 33 is conveyed by the conveying vehicle 10, the container 102 is stored in the storage area 104 as shown in fig. 15 (a). At this time, the lower surface of the container 102 is positioned above the lower end of the wheel 86 or the lower end of the wheel 88. Therefore, the container 102 does not contact the conveyance path 6 during travel of the conveyance vehicle 10.

A lifting unit (lifting mechanism) 110 for suspending and lifting the container 102 is provided in a region on the upper surface side of the vehicle frame 82 above the storage region 104. The lifting unit 110 lowers the container 102 stored in the storage area 104 to place the container in a predetermined placement area. The lifting unit 110 lifts the container 102 placed in a predetermined placement area to store the container 102 in the storage area 104.

Fig. 18 is a perspective view showing the carrier vehicle 10 in a state where the container 102 is placed in the placement area a. The lifting unit 110 includes: a suspension member 112 having one end side (lower end side) connected to the container 102; and a drive mechanism 114 that winds and feeds out the suspension member 112. The mounting area a is, for example, the upper surface of the mounting table 66 of the loader/unloader 8 (the 2 nd mounting area a)₂See fig. 9).

As shown in fig. 18, the lifting unit 110 has four suspension members 112. As the suspension member 112, for example, a belt having a predetermined width is used. The front end portions (lower end portions) of the four suspension members 112 are connected to four positions on the upper surface side of the container 102.

When the suspension member 112 is fed out by the driving mechanism 114 in a state where the container 102 is stored in the storage area 104, the container 102 is lowered and placed on the placement area a. When the suspending member 112 is wound by the driving mechanism 114 in a state where the container 102 is placed in the placement area a, the container 102 is lifted and stored in the storage area 104.

When a belt is used as the suspension member 112, as shown in fig. 18, it is preferable to adjust the orientation of the belt with respect to the container 102 in advance so that the width direction of the belt is along the direction in which the workpiece unit 17 or the like passes through the opening 102b when the workpiece unit 17 or the like is carried out from the housing 102 a. Since the container 102 is less likely to swing in the width direction of the belt, in this embodiment, the possibility that the workpiece unit 17 and the like will fly out of the opening 102b during the lifting and lowering of the container 102 is suppressed to a low level.

The orientation of the belt with respect to the container 102 may be adjusted to be such that the belt passes through the opening 102b along the width direction of the belt along the workpiece unit 17 or the like carried into the housing 102 a. In the present embodiment, the belt and the container 102 are connected so that the width direction of the belt is arranged along a direction perpendicular to a plane including the opening 102b of the container 102. As the suspension member 112, a member other than a belt, such as a wire rope, which can be wound and unwound, may be used.

As shown in fig. 15 (B), a plurality of contact members 116 that contact the upper surface side of the container 102 are provided on the lower surface side of the vehicle frame 82. Each of the contact members 116 is formed in a columnar shape having substantially the same height, and is fixed to the vehicle frame 82 so as to protrude downward from the lower surface of the vehicle frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 contacts the lower end portions of the plurality of contact members 116 to push up the respective contact members 116.

The contact member 116 is formed of, for example, an elastic member that elastically deforms when pushed against the container 102. That is, the contact member 116 is formed of an elastic body that deforms along the shape of the upper surface side of the container 102 when pushed against the container 102 stored in the storage area 104, and generates a restoring force that pushes the container 102 downward.

When the elastic member is used as the contact member 116, for example, an impact at the time of contact between the container 102 and the contact member 116 is alleviated, and the container 102, the workpiece unit 17 in the container 102, and the like are not easily broken. Further, when the transport vehicle 10 travels on the transport path 6, the contact member 116 also serves as a buffer member, and thus vibration of the vehicle frame 82 is not easily transmitted to the container 102, the workpiece unit 17, and the like.

As the contact member 116, for example, a columnar member made of rubber (urethane rubber, silicone rubber, or the like), sponge, or the like can be used. In particular, by using the contact member 116 made of rubber having a large frictional force acting on the container 102, it is possible to suppress the positional displacement of the container 102 during conveyance. The contact member 116 does not necessarily need to be entirely made of an elastic member, and at least a region (lower end portion) of the contact member 116 in contact with the container 102 may be made of an elastic member.

Preferably, the contact member 116 contacts the upper surface side of the container 102 at three or more positions. In the present embodiment, as shown in fig. 15 (B), three columnar contact members 116 are provided on the vehicle frame 82. In this case, since the upper surface of the container 102 is arranged along a plane including the lower ends of the three contact members 116, the container 102 is less likely to be tilted. However, conditions such as the shape, number, and arrangement of the contact members 116 may be changed arbitrarily. For example, a pair of linear (belt-like) contact members 116 arranged substantially parallel to each other may be provided on the vehicle frame 82.

In addition, in order that the vibration of the vehicle frame 82 is not easily transmitted to the container 102, the container 102 may be connected to the suspension member 112 via an elastic member. Fig. 19 is a perspective view showing the conveyance vehicle 10 in which the container 102 is connected to the suspension member 112 via the elastic member (expansion member) 118. In this case, the contact member 116 may be omitted.

An elastic member 118 is provided between the front end side (lower end side) of the suspension member 112 and the container 102. The elastic member 118 is a member that expands and contracts along the longitudinal direction of the suspension member 112 when the suspension member 112 oscillates, and is an elastic body that can expand and contract, such as rubber or a spring. As the elastic member 118, a member that can expand and contract, such as a telescopic joint, may be used.

When the container 102 is stored in the storage area 104, the amount of winding of the suspension member 112 is adjusted so that the upper surface side of the container 102 does not contact the vehicle frame 82 or the contact member 116. Thus, for example, even if the vehicle frame 82 vibrates, the vibration is not directly transmitted to the container 102. Further, the vibration transmitted from the vehicle frame 82 via the lifting unit 110 and the suspension member 112 is relaxed by the expansion and contraction of the elastic member 118, and therefore is not easily transmitted to the container 102. In this way, the elastic member 118 functions as a vibration-proof member.

However, in the case where the contact member 116 is provided on the lower surface side of the vehicle frame 82, the winding amount of the suspension member 112 may be adjusted so that the container 102 is stored in the storage area 104 in a state of being in contact with the contact member 116. In this case, the transmission of vibration from the vehicle frame 82 to the container 102 is mitigated by the contact member 116, and the transmission of vibration from the suspension member 112 to the container 102 is mitigated by the elastic member 118.

A cover 120 is provided on the lower side of the rear end portion of the vehicle frame 82. The cover 120 covers the opening 102b (see fig. 17 a) of the container 102 when the container 102 is stored in the storage area 104. When the opening 102b is covered with the cover 120, foreign matter can be prevented from entering the housing portion 102a of the container 102 during travel of the carrier vehicle 10, and the foreign matter can be prevented from adhering to the workpiece unit 17 and the like.

Even if the container 102 tilts or vibrates during the travel of the carrier vehicle 10, the cover 120 prevents the workpiece unit 17 and the like from flying out of the opening 102 b. The structure and operation of the cover 120 will be described in detail later (see fig. 23, fig. 24a, and fig. 24B).

A pair of 1 st sensors 122 are provided at the front end portion and the rear end portion of the vehicle frame 82. That is, the pair of 1 st sensors 122 are provided at two positions separated in the longitudinal direction (vehicle length direction) of the vehicle frame 82. In addition, a pair of 2 nd sensors 124 are provided at both side end portions of the vehicle frame 82. That is, the pair of 2 nd sensors 124 are disposed at two positions apart in the width direction (vehicle width direction) of the vehicle frame 82.

The 1 st sensor 122 and the 2 nd sensor 124 are mounted so as to face the conveyance path 6 on which the conveyance vehicle 10 travels, and detect a mark provided on the conveyance path 6. The traveling, steering, parking, and the like of the conveyance vehicle 10 are controlled based on the detection results of the marks by the 1 st sensor 122 and the 2 nd sensor 124. The control of the transport vehicle 10 using the 1 st sensor 122 and the 2 nd sensor 124 will be described in detail later.

The specific positions where the 1 st sensor 122 and the 2 nd sensor 124 are provided are adjusted according to the specification of the conveyance path 6 on which the conveyance vehicle 10 travels, and the like. For example, the pair of 1 st sensors 122 are attached to the vicinity of the center in the width direction of the vehicle frame 82 in the front end portion and the rear end portion of the vehicle frame 82, respectively. The pair of second sensors 124 are attached to the vicinity of the center of the vehicle frame 82 in the longitudinal direction, of the end portions on both sides of the vehicle frame 82.

The pair of second sensors 124 may be fixed to the vehicle frame 82 so as to be aligned on a straight line passing through the pair of wheels 86. For example, the pair of 2 nd sensors 124 are provided outside the pair of wheels 86 so as to sandwich the pair of wheels 86 in the width direction of the vehicle frame 82. The pair of 2 nd sensors 124 may be provided inside the pair of wheels 86 so as to be sandwiched between the pair of wheels 86 in the width direction of the vehicle frame 82.

In this way, by arranging the pair of 2 nd sensors 124 on a straight line passing through the pair of wheels 86, the pair of 2 nd sensors 124 can detect the marker to be detected by the pair of 2 nd sensors 124 simultaneously with the passage of the wheel 86 through the marker. Therefore, when the transport vehicle 10 is steered or stopped at the timing when the mark is detected, the travel of the transport vehicle 10 can be appropriately controlled without performing any correction.

On the other hand, when the pair of 2 nd sensors 124 are separated from the straight line passing through the pair of wheels 86, the timing of turning and stopping the transport vehicle 10 may be controlled by using the distance between the pair of 2 nd sensors 124 and the pair of wheels 86 (the pair of axles 84), the speed at which the transport vehicle 10 travels, and the like, in addition to the timing at which the mark is detected.

As shown in fig. 16, a 3 rd sensor 126 for detecting the collision of the carrier vehicle 10 with an obstacle is provided at the front end portion of the vehicle frame 82. For example, a pair of 3 rd sensors 126 are attached to both end sides of the front end portion of the vehicle frame 82. As the 3 rd sensor 126, for example, a push button switch is used.

When the front end of the carrier vehicle 10 collides with an obstacle, the 3 rd sensor 126 operates to detect the collision of the carrier vehicle 10. When the 3 rd sensor 126 detects a collision of the carrier vehicle 10, the carrier vehicle 10 stops operating. The structure or type of the 3 rd sensor 126 is not limited as long as the collision of the carrier 10 can be detected.

The carrier vehicle 10 may be covered with a flexible exterior cover that can reduce the impact due to a collision or the like, for example. In this case, when the exterior cover covering the front end side of the carrier 10 collides with an obstacle, the exterior cover deforms and comes into contact with the 3 rd sensor 126, thereby detecting the collision of the carrier 10.

As shown in fig. 15 (a) and 15 (B), a plate-like support base 128 fixed to the vehicle frame 82 is provided above the lifting unit 110. A control unit (control means) 130 that controls the operation of the transport vehicle 10 is fixed to the upper surface of the support base 128. The control unit 130 is connected to the respective components (the driving unit 90, the lifting unit 110, the 1 st sensor 122, the 2 nd sensor 124, the 3 rd sensor 126, and the like) of the transport vehicle 10, and controls the operations of the respective components.

The control Unit 130 is constituted by a computer, for example, and includes a Processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash Memory. The function of the control unit 130 is realized by operating a processing device or the like in accordance with software stored in the auxiliary storage device.

Further, a receiver 132 and a transmitter 134 are fixed to the support base 128, the receiver 132 receives a signal (information) from the outside and transmits the signal to the control unit 130, and the transmitter 134 transmits the signal (information) received from the control unit 130 to the outside. The receiver 132 and the transmitter 134 are connected to the control unit 130.

The receiver 132 receives a signal transmitted from the control unit 12 of the transport system 2, for example, and transmits the signal to the control unit 130. The control unit 130 controls the operation of the carrier vehicle 10 based on a signal received from the receiver 132, for example. The control unit 130 generates a signal for notification, for example, and transmits the signal to the transmitter 134. The transmitter 134 transmits a signal received from the control unit 130 to the control unit 12 of the conveyance system 2 (see fig. 8), for example.

The components of the conveying vehicle 10 (the lifting unit 110, the 1 st sensor 122, the 2 nd sensor 124, the 3 rd sensor 126, the control unit 130, the receiver 132, the transmitter 134, and the like) are connected to the battery 96 via power supply wiring, and are operated by power supplied from the battery 96.

Fig. 20 (a) is a plan view showing a configuration example of the lifting unit 110, and fig. 20 (B) is a side view showing a configuration example of the lifting unit 110. As described above, the lifting unit 110 includes the driving mechanism 114 that winds and feeds the plurality of suspension members 112. The drive mechanism 114 includes a motor 142 having a rotary shaft (output shaft) 142 a.

The motor 142 rotates the rotary shaft 142a, thereby generating power for winding and unwinding the suspension member 112. A 1 st rotation shaft (1 st shaft) 144a and a 2 nd rotation shaft (2 nd shaft) 144b arranged substantially in parallel to each other are provided at two positions sandwiching the motor 142.

A pulley 146 is provided on one end side of the 1 st rotating shaft 144 a. An endless coupling member 148 such as a belt or a chain is stretched over the rotary shaft 142a of the motor 142 and the pulley 146. The power transmission mechanism is constituted by the rotating shaft 142a of the motor 142, the pulley 146, and the coupling member 148, and the motor 142 and the 1 st rotating shaft 144a are coupled to each other. On the other hand, a pulley or the like for coupling to the motor 142 is not provided on one end side of the 2 nd rotating shaft 144 b.

A pulley 150a is provided on the other end side of the 1 st rotating shaft 144a, and a pulley 150b having the same diameter as the pulley 150a is provided on the other end side of the 2 nd rotating shaft 144 b. An endless coupling member 152 such as a belt or a chain is provided over the pulleys 150a and 150 b. The pulley 150a, the pulley 150b, and the coupling member 152 constitute a power transmission mechanism, and couple the 1 st rotating shaft 144a and the 2 nd rotating shaft 144 b.

A columnar reel 154a around which the suspension member 112 is wound is fixed to each end of the 1 st rotating shaft 144 a. Further, cylindrical rollers 156a that support the suspension member 112 are rotatably disposed at two positions outside (on the opposite side of the motor 142) and below the reels 154a, respectively. The rotation axis of each roller 156a is substantially parallel to the 1 st rotation axis 144 a.

On the other hand, cylindrical reels 154b around which the suspension member 112 is wound are fixed to both end portions of the 2 nd rotating shaft 144 b. Further, cylindrical rollers 156b that support the suspension member 112 are rotatably disposed at two positions outside (on the opposite side of the motor 142) and below the reels 154b, respectively. The rotation axis of each roller 156b is substantially parallel to the 2 nd rotation axis 144 b.

The base end side of the suspension member 112 is fixed to each of the reel 154a and the reel 154 b. Hanging member 112 fixed to reel 154a hangs down while being in contact with the outer portion of roller 156 a. Further, hanging member 112 fixed to reel 154b hangs down while being in contact with the outer portion of roller 156 b.

As shown in fig. 20 (B), the suspending member 112 fixed to the reel 154a passes above the reel 154a and is supported by the roller 156 a. On the other hand, the suspension member 112 fixed to the reel 154b is supported by the roller 156b while passing under the reel 154 b.

When the rotation shaft 142a of the motor 142 is directed in the 1 st direction (arrow C in fig. 20 (B))₁Direction shown) is rotated, the reel 154a fixed to the 1 st rotating shaft 144a is fed in the direction of sending out the suspending member 112 (arrow C in fig. 20B)₂The direction shown) is rotated. Thereby, the hanging member 112 is fed from the reel 154a via the roller 156 a.

The torque of the 1 st rotating shaft 144a is transmitted to the 2 nd rotating shaft 144B through the coupling member 152, and the reel 154B fixed to the 2 nd rotating shaft 144B is fed in the direction of sending out the suspending member 112 (arrow C in fig. 14B)₃The direction shown) is rotated. Thereby, the hanging member 112 is fed from the reel 154b via the roller 156 b.

On the other hand, when the rotation shaft 142a of the motor 142 is directed in the 2 nd direction (arrow D in fig. 20B) opposite to the 1 st direction₁Direction shown) is rotated, reel 154a fixed to 1 st rotating shaft 144a is wound around suspension member 112 (arrow D in fig. 20B)₂The direction shown) is rotated. Thereby, the suspension member 112 is wound around the reel 154a via the roller 156 a.

The torque of the 1 st rotating shaft 144a is transmitted to the 2 nd rotating shaft 144B through the coupling member 152, and the reel 154B fixed to the 2 nd rotating shaft 144B is wound in the direction of winding the suspending member 112 (arrow D in fig. 20B)₃The direction shown) is rotated. Thereby, the suspension member 112 is wound around the reel 154b via the roller 156 b.

When each suspension member 112 is fed out from the driving mechanism 114, the container 102 connected to the tip end side of the suspension member 112 is lowered. This enables the container 102 to be placed in the placement area a (see fig. 18). When each suspension member 112 is wound by the drive mechanism 114, the container 102 connected to the tip end side of the suspension member 112 is lifted. This enables the container 102 to be stored in the storage area 104 of the conveyance vehicle 10 (see fig. 15 a).

The lifting unit 110 may be provided with a driving mechanism having a different structure from the driving mechanism 114. Fig. 21 (a) is a plan view showing another configuration example of the lifting unit 110, and fig. 21 (B) is a side view showing another configuration example of the lifting unit 110. The lifting unit 110 shown in fig. 21 (a) and 21 (B) is mounted with a driving mechanism 162 instead of the driving mechanism 114.

The drive mechanism 162 includes a motor 164 having a rotation shaft (output shaft) 164a, and a 1 st rotation shaft (1 st shaft) 166a, a 2 nd rotation shaft (2 nd shaft) 166b, and a 3 rd rotation shaft (3 rd shaft) 166c that are arranged substantially parallel to each other. The 1 st rotation shaft 166a is disposed between the 2 nd rotation shaft 166b and the 3 rd rotation shaft 166 c.

The motor 164 is disposed, for example, between the 1 st rotation shaft 166a and the 2 nd rotation shaft 166b, and rotates the rotation shaft 164a to generate power for winding and unwinding the suspension member 112. However, the motor 164 may be disposed between the 1 st rotation shaft 166a and the 3 rd rotation shaft 166 c.

A pulley 168 is provided on one end side of the 1 st rotating shaft 166 a. An endless coupling member 170 such as a belt or a chain is stretched over the rotating shaft 164a of the motor 164 and the pulley 168. The power transmission mechanism is constituted by the rotating shaft 164a of the motor 164, the pulley 168, and the coupling member 170, and the motor 164 and the 1 st rotating shaft 166a are coupled.

A plurality of columnar reels 172 around which the suspension member 112 is wound are fixed to the 1 st rotation shaft 166 a. Specifically, a pair of reels 172 are fixed to both end portions of the 1 st rotating shaft 166 a. Two suspension members 112 are fixed to each reel 172 and wound in the same direction.

Fig. 22 (a) is a plan view showing the reel 172, and fig. 22 (B) is a side view showing the reel 172. The lifting unit 110 includes a columnar fixing member 174 for fixing the suspension member 112 to the reel 172, and the two suspension members 112 are collectively fixed to the reel 172 by the fixing member 174.

As shown in fig. 22B, a groove (recess) 172a is provided along the rotation axis of the reel 172 (i.e., the 1 st rotation axis 166a) in a part of the outer peripheral portion of the reel 172. The inner surface of the groove 172a is formed in a curved surface shape. Both ends of the groove 172a reach both ends in the rotational axis direction of the reel 172. The two suspension members 112 are arranged in the same direction so that the base end portions thereof overlap the groove 172 a.

The fixing member 174 has a curved outer peripheral surface corresponding to the shape of the inner surface of the groove 172 a. The fixing member 174 is fitted into the groove 172a in a state where the base end portions of the two suspension members 112 are arranged to overlap the groove 172a so as to press the base end portions of the two suspension members 112 toward the inner surface of the groove 172 a. Thus, the base end portions of the two suspension members 112 are held between the inner surfaces of the grooves 172a and the outer peripheral surface of the fixing member 174 and fixed to the reel 172.

As shown in fig. 22a, a pair of projections (convex portions) 172b are provided on the outer peripheral portion of the reel 172 so as to sandwich the two suspension members 112 fixed to the reel 172 in the width direction thereof. The pair of projections 172b function as guides that prevent the position of the suspension member 112 from shifting in the width direction. By rotating the reel 172 configured as described above, it is possible to wind the two suspension members 112 or send out the two suspension members 112.

As shown in fig. 21 (a) and 21 (B), one of the two hanging members 112 fixed to the reel 172 hangs down while being in contact with the 2 nd rotating shaft 166B. The other of the two hanging members 112 fixed to the reel 172 hangs down while being in contact with the 3 rd rotating shaft 166 c.

The 2 nd rotation shaft 166b and the 3 rd rotation shaft 166c are supported so as to be easily rotatable in response to a force applied from the outside, and the outer peripheral surfaces thereof contact the suspension member 112. A pair of guides 176 for preventing the displacement of the position of the suspension member 112 in the width direction are provided on both sides of the region of the 2 nd rotation shaft 166b and the 3 rd rotation shaft 166c in contact with the suspension member 112.

When the rotation shaft 164a of the motor 164 is directed in the 1 st direction (arrow E in FIG. 21B)₁The direction shown) is rotated, the reel 172 is fed out in the direction of sending out the suspension member 112 (arrow E in fig. 21 (B) and 22 (B)₂The direction shown) is rotated. Thereby, the two suspension members 112 are fed out from the reel 172 via the 2 nd rotation shaft 166b and the 3 rd rotation shaft 166c, and as a result, the container 102 connected to the suspension members 112 is lowered.

On the other hand, when the rotation shaft 164a of the motor 164 is directed in the 2 nd direction (arrow F in fig. 21 (B)) opposite to the 1 st direction₁The direction shown) is rotated, the reel 172 is wound around the suspension member 112 (arrow F in fig. 21 (B) and 22 (B)₂The direction shown) is rotated. Thereby, the two suspension members 112 are wound around the reel 172 via the 2 nd rotation shaft 166b and the 3 rd rotation shaft 166c, and as a result, the container 102 connected to the suspension members 112 is lifted.

As described above, in the drive mechanism 162 shown in fig. 21 (a), the two reels 172 are fixed to the 1 st rotation shaft 166a, and the two suspension members 112 are fixed to the two reels 172, respectively. Therefore, the feeding and winding of the four suspension members 112 are controlled by the rotation of the 1 st rotation shaft 166 a. This reduces the number of components constituting the drive mechanism 114, thereby reducing the weight of the transport vehicle 10, reducing the possibility of failure, and reducing the cost.

By using the lifting/lowering unit 110 as described above, the container 102 accommodating the workpiece unit 17 or the tray 33 can be lifted and lowered between the storage area 104 and the placement area a below the storage area 104. The details of the lifting unit 110 may be changed within a range in which the container 102 can be appropriately lifted and lowered.

The 2 nd rotation shaft 166b and the 3 rd rotation shaft 166c may be fixed so as not to rotate. In this case, the hanging member 112 is fed from the reel 172 or wound around the reel 172 while moving to slide on the outer peripheral surface of the 2 nd rotating shaft 166b or the 3 rd rotating shaft 166 c.

Fig. 23 is an enlarged perspective view showing the cover 120. The cover 120 is disposed at a rear end portion on the lower surface side of the vehicle frame 82 so as to face one side surface (rear portion) of the container 102 stored in the storage area 104. The cover 120 includes a lid portion 182 coupled to the vehicle frame 82 so as to be rotatable with respect to the vehicle frame 82. The lid 182 is formed in a shape and a size capable of covering the opening 102B (see fig. 24B) of the container 102. Further, a plurality of contact portions 184 are fixed to the upper portion of the lid portion 182 so as to be in contact with the upper surface side of the container 102.

When the container 102 is raised toward the storage area 104, the upper surface side of the container 102 contacts the lower end portion of the contact portion 184 to push the contact portion 184 upward. Thereby, the lid 182 moves (rotates) in a direction to approach the container 102, and the opening 102b of the container 102 is covered by the lid 182.

Fig. 24 (a) is a side view of the cover 120 showing a state where the container 102 is not stored in the storage area 104, and fig. 24 (B) is a side view of the cover 120 showing a state where the container 102 is stored in the storage area 104. A fixing block 186 is fixed to the lower surface of the vehicle frame 82. A coupling block (L block) 188 having an L shape when viewed in the width direction (vehicle width direction) of the vehicle frame 82 is rotatably coupled to the fixed block 186.

The coupling block 188 includes a coupling portion 188a at an upper side (vehicle frame 82 side) and a fixing portion 188b below the coupling portion 188 a. The coupling portion 188a is provided with a through hole that penetrates in the width direction of the vehicle frame 82, and a coupling shaft 190 fixed to the fixing block 186 is inserted into the through hole. Thereby, the coupling block 188 is coupled to the fixed block 186 in a rotatable state about the coupling shaft 190.

The lid 182 is fixed to the fixing portion 188b on the storage area 104 side (front side). Further, since the coupling shaft 190 inserted into the through hole is substantially parallel to the width direction of the vehicle frame 82, the lid 182 rotates together with the coupling block 188 along a plane substantially perpendicular to the width direction of the vehicle frame 82.

The cover 182 has a plate-like member 182a fixed to a fixing portion 188b of the connecting block 188. A flexible member 182b is provided on the surface of the plate-like member 182a on the storage area 104 side (front side). The flexible member 182b is formed in a shape and a size capable of covering the entire opening 102b of the container 102.

Further, a contact portion 184 is disposed on the storage region 104 side (front side) of the plate-like member 182 a. The contact portion 184 includes, for example: a fixing member 184a fixed to the plate-like member 182a at a position above the flexible member 182 b; and a roller 184b supported by a portion of the fixing member 184a on the side (front side) of the storage area 104.

The roller 184b is formed of an elastic member such as rubber, for example, and is supported by the fixing member 184a so as to be rotatable about a rotation axis substantially parallel to the width direction of the vehicle frame 82. The lower end of the roller 184b is positioned below the lower end of the fixing member 184 a. Therefore, in a state where the upper surface side of container 102 is in contact with roller 184b, roller 184b also rotates in accordance with the rotation of lid 182.

For example, when the container 102 is raised toward the storage area 104, the upper surface side of the container 102 contacts the roller 184b of the contact portion 184, and pushes the contact portion 184 upward. Then, the lower end side of the cover 120 rotates in a direction approaching the container 102 (the direction indicated by the arrow G in fig. 24B) about the coupling shaft 190, and the surface of the plate-like member 182a on the storage region 104 side (front side) is substantially parallel to the lower surface of the vehicle frame 82. The flexible member 182b of the cover 182 contacts one side surface (rear portion) of the container 102 to seal the opening 102 b.

In addition, when the opening 102b of the container 102 stored in the storage area 104 is exposed, foreign matter such as dust may enter the housing portion 102a of the container 102. In particular, during travel of the conveyance vehicle 10, there is a high possibility that foreign matter, which is rarely present in a clean room in which the conveyance path 6 is installed, for example, is attracted by the conveyance vehicle 10 and enters the storage section 102a due to static electricity generated by friction between the conveyance path 6 and the wheels 88.

Therefore, in the present embodiment, when the container 102 is stored in the storage area 104, the cover 120 covers the opening 102b of the container 102, so that foreign matter does not enter the storage section 102a of the container 102 during travel of the carrier vehicle 10. Even if the container 102 tilts or vibrates during the travel of the carrier vehicle 10, the workpiece unit 17 or the pallet 33 does not fly out of the container 102.

On the other hand, while the container 102 is being lifted by the lifting means 110, static electricity is not generated due to friction between the conveyance path 6 and the wheels 88, and foreign matter is not wound up by movement of the conveyance vehicle 10. Therefore, even if the opening 102b of the container 102 is not covered during the lifting of the container 102, the possibility that foreign matter enters the housing portion 102a is low.

In addition, a flexible member 182b is provided in a region of the cover 120 corresponding to the opening 102 b. The flexible member 182b is deformed when it collides with the workpiece unit 17 or the like stored in the container 102, for example, and alleviates the impact applied to the workpiece unit 17 or the like. That is, the flexible member 182b functions as a buffer member. The workpiece 11 and the like included in the workpiece unit 17 are not easily broken by the flexible member 182 b.

The material, structure, and the like of the flexible member 182b are not limited. For example, the flexible member 182b may be used to relax the impact to such an extent that the workpiece 11 or the like of the workpiece unit 17 is not damaged. More specifically, as the flexible member 182b, a member made of sponge, rubber, cotton, cloth, or the like, foamed styrene, a bubble buffer, or the like can be used.

In particular, since the sponge is soft and easily deformable, when the sponge is used as the soft member 182b, the impact applied to the workpiece unit 17 and the like can be effectively relaxed. In addition, when a sponge is used as the soft member 182b, the soft member 182b is appropriately deformed along the shape of the side surface of the container 102 to reliably seal the opening 102 b.

When the container 102 is lowered from the storage area 104 as shown in fig. 24a, the weight of each part of the cover 120 is adjusted so that the lower end portion of the cover 120 is rotated in a direction away from the storage area 104 by its own weight (in a direction opposite to the direction indicated by the arrow G in fig. 24B). Thus, in a state where the container 102 is not stored in the storage area 104, the surface of the plate-like member 182a on the storage area 104 side (front side) is inclined with respect to the lower surface of the vehicle frame 82.

In addition, there is no limitation on the number and configuration of the covers 120. For example, a cover 120 that contacts the side surface of the container 102 may be provided at the front end portion of the vehicle frame 82 in addition to the rear end portion of the vehicle frame 82. In this case, when the container 102 is stored in the storage area 104, both side surfaces (front and rear) of the container 102 are sandwiched by the pair of covers 120. This suppresses shaking (vibration) of the container 102. In this case, in particular, the vibration (vibration) of the container 102 in the longitudinal direction (front-rear direction) of the vehicle frame 82 is easily suppressed.

Further, the cover 120 may be provided at each of the front end portion, the rear end portion, and both side end portions of the vehicle frame 82. In this case, four sides (front, rear, both sides) of the container 102 stored in the storage area 104 are in contact with the cover 120, respectively. This suppresses shaking (vibration) of the container 102. In this case, in particular, the shaking (vibration) of the container 102 in the longitudinal direction (front-rear direction) and the width direction of the vehicle frame 82 is easily suppressed.

When the container 102 is lifted, the rotation of the motor 142 of the lifting unit 110 and the like is controlled by the control unit 130. Fig. 25 (a) is a side view showing the conveyance vehicle 10 when the container 102 stored in the storage area 104 is placed in the placement area a. When the container 102 is placed in the placement area a, the rotation direction and the rotation speed of the motor 142 are controlled so that the suspension member 112 is sent out from the driving mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 so as to maintain the rotational speed of the motor 142.

Fig. 25 (B) is a graph showing the current value of the motor 142 when the container 102 is lowered. When the container 102 descends to reach the placement area a, the container 102 is supported from below in the placement area a. As a result, the load acting on the rotary shaft 142a of the motor 142 is reduced, and the current value of the motor 142 is reduced.

The control unit 130 stops the rotation of the motor 142 in accordance with a change in the current value of the motor 142 when the container 102 is placed in the placement area a. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares the threshold value with the current value of the motor 142. When the current value of the motor 142 is equal to or less than the threshold value (or smaller than the threshold value), the control unit 130 stops the rotation of the motor 142. This completes the placement of the container 102 on the placement area a.

Fig. 26 (a) is a side view showing the conveyance vehicle 10 when the container 102 placed in the placement area a is stored in the storage area 104. When the container 102 is stored in the storage area 104, the rotation direction and the rotation speed of the motor 142 are controlled so that the suspension member 112 is wound at an arbitrary speed by the drive mechanism 114. For example, the control unit 130 controls the current value of the motor 142 so as to maintain the rotational speed of the motor 142.

Fig. 26 (B) is a graph showing the current value of the motor 142 when the container 102 is lifted. When the container 102 rises to reach the storage area 104, the container 102 is pushed against a plurality of contact members 116 provided on the lower surface side of the vehicle frame 82. As a result, the load acting on the rotary shaft 142a of the motor 142 increases, and the current value of the motor 142 increases.

The control unit 130 stops the rotation of the motor 142 in accordance with a change in the current value of the motor 142 when the container 102 comes into contact with the contact member 116. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares the threshold value with the current value of the motor 142. When the current value of the motor 142 is equal to or greater than the threshold value (or exceeds the threshold value), the control unit 130 stops the rotation of the motor 142. Thereby, the storage of the container 102 into the storage area 104 is completed.

As described above, when the operation of the motor 142 when the container 102 is lifted and lowered is controlled based on the current value of the motor 142, it is not necessary to provide a sensor for detecting the container 102 in the storage area 104 or the placement area a. This simplifies the structure of the transport vehicle 10, the placement area a, and the like. In addition, the weight of the conveyance vehicle 10 is also reduced.

However, there is no limitation on the control method of the motor 142. For example, a sensor (e.g., a push button switch) for detecting that the container 102 is disposed may be provided on the lower surface side of the vehicle frame 82 or the upper surface side of the placement area a. In this case, when the container 102 is detected by the sensor, the control unit 130 stops the rotation of the motor 142. In addition, the detection by the sensor and the detection by the current value of the motor 142 may be used in combination.

When it is detected that the container 102 is placed in the placement area a only on the placement area a side (for example, the loader/unloader 8 side), the control unit 12 (see fig. 8) of the transport system 2 notifies the placement area a of the container 102, and then instructs the transport vehicle 10 to stop the rotation of the motor 142. Then, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142.

On the other hand, when the conveyance vehicle 10 detects that the container 102 is placed in the placement area a as described above, the control unit 130 of the conveyance vehicle 10 stops the rotation of the motor 142 by its own judgment without waiting for an instruction from the control unit 12 of the conveyance system 2. This can reduce the time interval after the container 102 is placed in the placement area a until the rotation of the motor 142 is stopped.

In addition, the lifting speed of the container 102 is not necessarily constant. For example, the rotation speed of the motor 142 may be reduced to decelerate the container 102 immediately before the container 102 is placed in the placement area a or before the container is stored in the storage area 104. This can alleviate the impact when the container 102 comes into contact with the placement area a or the contact member 116. In this case, the controller 130 may monitor the height of the container 102 based on, for example, the amount of rotation of the motor 142.

When the container 102 is placed in the placement area a, the control unit 130 generates a signal for notifying that the placement of the container 102 is completed, and transmits the signal from the transmitter 134 to the control unit 12 of the conveyance system 2. When the container 102 is stored in the storage area 104, the control unit 130 generates a signal for notifying that the storage of the container 102 is completed, and transmits the signal from the transmitter 134 to the control unit 12 of the conveyance system 2 (see fig. 8). These signals may be transmitted to the processing device 4.

The conveying system 2 of the present embodiment operates in conjunction with the processing device 4. For example, the transport vehicle 10 stops in a parking area on the transport path 6, and the container 102 in which the workpiece unit 17 and the like are stored is placed on the upper surface (placement area a) of the lift table 204 of the processing device 4. When the container 102 is placed on the lift table 204, the controller 130 of the carrier vehicle 10 generates a signal for notifying that effect and transmits the signal to the transmitter 134. The signal is transmitted from the transmitter 134 to the control unit 12 of the conveying system 2.

The control unit 12 generates a signal for instructing the processing device 4 to carry out the pre-processed object unit 17 and the like from the container 102 and carry the post-processed object unit 17 and the like into the container 102, based on the signal transmitted from the transmitter 134 of the carrier vehicle 10. When the receiver 248 of the processing apparatus 4 receives a signal from the control unit 12 and the control device 246 receives an instruction based on the signal, the control device 246 carries the workpiece unit 17 before processing or the like out of the container 102 placed on the upper surface (placement area a) of the lift table 204 to the 1 st holding unit 220. Thereby, the workpiece unit 17 and the like are pulled out onto the pair of guide rails 212.

For example, when the processing of the workpiece 11 is started, the controller 246 adjusts the height of the lifter 204 to pull out the processed workpiece unit 17 and the like from the storage area provided below the placement area a onto the pair of guide rails 212. The processed workpiece unit 17 and the like on the pair of guide rails 212 are accommodated in the container 102 on the lift table 204.

When the processed object unit 17 and the like are stored in the container 102, the control device 246 of the processing apparatus 4 generates a signal for notifying that effect and transmits the signal from the transmitter 250 to the control unit 12 of the conveying system 2. The control unit 12 generates a signal for instructing the transport vehicle 10 to move to the next destination based on the signal transmitted from the transmitter 250 of the processing device 4.

When the receiver 132 of the carrier 10 receives a signal from the control unit 12 and the control unit 130 receives an instruction based on the signal, the control unit 130 causes the carrier 10 to travel to the next destination. By using the conveyance system 2 in this way, the processing apparatus 4 can receive the workpiece units 17 and the like before processing in a timely manner, and can collect the processed workpiece units 17 and the like in a timely manner.

As shown in fig. 2, 7, and the like, the conveyance path 6 constituting the conveyance system 2 is provided on the upper surface side of the ceiling 244a of the cover 244 included in each processing device 4, the upper surface side of the ceiling 22a of the casing 22 included in the loader/unloader 8, and the like. That is, the conveyance path 6 is disposed directly above the processing devices 4, the loader/unloader 8, and the like so as to connect the plurality of processing devices 4, the loader/unloader 8, and the like.

Therefore, the conveyance path 6 does not interfere with structures such as the pipe connection portion 202c and the door 244b provided on the side surface of the processing apparatus 4. That is, the side structure of the processing device 4 does not need to be considered when designing the conveyance path 6. This makes it possible to easily construct the conveyance system 2. Further, since the conveyance path 6 is disposed at a position lower than the ceiling of the factory or the like, the work related to the installation of the conveyance path 6 is also facilitated.

Further, for example, when the conveyance path 6 is constructed in an environment in which a plurality of processing devices 4 and the like are already installed, it is not necessary to move the processing devices 4 and the like to secure a working space, as in the case where a conveyance path is installed on a ceiling of a factory or the like. Further, since the already installed processing device 4 and the like serve as the base of the conveyance path 6, the number of steps for the operation is reduced as compared with a case where a new base is installed.

Fig. 27 is a perspective view showing a part of the conveyance path 6 provided in the processing apparatus 4. The structure and the like of the conveyance path 6 provided above the loader/unloader 8 are substantially the same as those of the conveyance path 6 provided above the processing device 4. The lower frame 262 is fixed to the ceiling 244a of the plurality of processing devices 4, the ceiling 22a of the loader/unloader 8, and the like by screws, bolts, and the like.

The lower frame 262 is a composite of rod-shaped frame members formed of a material containing a metal such as aluminum, for example, and is assembled into a shape that connects the processing devices 4 and the loader/unloader 8 adjacent to each other, for example. The lower frame 262 is fixed to the ceiling 244a of each processing device 4, the ceiling 22a of the loader/unloader 8, and the like, thereby forming a base of the conveyance path 6.

When the lower frame 262 is fixed to each of the processing devices 4, the loader/unloader 8, and the like, the height of the lower frame 262 with respect to each of the processing devices 4, the loader/unloader 8, and the like is adjusted so that the upper surface of the lower frame 262 is substantially horizontal and the height of the upper surface of the lower frame 262 is substantially equal.

Thus, even when the heights of the ceiling 244a of each processing device 4, the ceiling 22a of the loader/unloader 8, and the like are not completely equal to each other, the conveyance path 6 can be formed horizontally and at the same height. The method of adjusting the height of the lower frame 262 with respect to the processing device 4, the loader/unloader 8, and the like is not limited, and for example, a method of arranging a member for height adjustment between the ceiling 244a of each processing device 4, the ceiling 22a of the loader/unloader 8, and the like, and the lower surface of the lower frame 262 may be used.

Of course, the heights of the processing device 4 and the loader/unloader 8 may be adjusted. For example, a height adjustment mechanism is provided at the lower end (leg) of the processing device 4 or the loader/unloader 8. Thus, by adjusting the heights of the processing devices 4 and the loader/unloader 8 by using the adjustment mechanism and making the heights of the ceiling 244a of each processing device 4, the ceiling 22a of the loader/unloader 8, and the like equal, the lower frame 262 suitable for the base of the conveyance path 6 can be realized.

An upper frame 264 is fixed to the upper surface of the lower frame 262 by screws, bolts, or the like. The upper frame 264 is a composite of rod-like frame members made of a material containing a metal such as aluminum, for example, and is assembled into a shape corresponding to the arrangement of the conveyance path 6 so that the conveyance path 6 can be appropriately fixed.

A conveyance path 6 is provided above the upper frame 264. The conveyance path 6 is formed by, for example, arranging a plurality of flat road surface panels 266 in a horizontal direction. In this way, by forming the conveyance path 6 by combining a plurality of road surface panels 266, it is possible to easily realize various conveyance paths 6 corresponding to the arrangement of a plurality of processing devices 4 and loaders/unloaders 8.

The road surface plate 266 is formed in a rectangular shape in plan view using a lightweight and high-strength material such as polyamide, polycarbonate, CFRP (Carbon Fiber Reinforced Plastic), and the like, and the road surface plate 266 has a flat upper surface suitable for the travel of the carrier vehicle 10. Further, a through hole penetrating the road surface plate 266 vertically is formed at an end portion of the road surface plate 266.

On the other hand, on the upper surface side of the upper frame 264, screw holes (not shown) having a diameter corresponding to the diameter of the screws 268 are opened at positions corresponding to the through holes of the road surface panel 266. Thus, after the road surface panel 266 is disposed on the upper surface side of the upper frame 264, the road surface panel 266 can be fixed to the upper frame 264 by screwing the screws 268 into the screw holes of the upper frame 264 through the through holes (not shown).

The lower frame 262 is formed by combining a plurality of lower frame units 270 each including a plurality of rod-shaped frame members, for example. Similarly, the upper frame 264 is formed by combining a plurality of upper frame units 272 each including a plurality of rod-shaped frame members, for example.

When the lower frame 262 is formed by using the plurality of lower frame units 270 and the upper frame 264 is formed by using the plurality of upper frame units 272, the frame members are carried into the lower frame units 270 and the upper frame units 272 in a factory or the like where the processing apparatus 4 is installed.

That is, the high-quality lower and upper frames 262 and 264 are formed using the high-quality lower and upper frame units 270 and 272 produced in a stable environment. Further, such a complicated operation as in the case of connecting the rod-like frame member to the upper side of the processing device 4 does not occur. This enables formation of a high-quality conveyance path 6 in a short period of time.

Fig. 28 (a) is a perspective view showing a lower frame unit 270a constituting the lower frame 262, and fig. 28 (B) is a perspective view showing a lower frame unit 270B constituting the lower frame 262. The lower frame units 270a and 270b are selectively used according to the type of the conveyance path 6, for example.

Fig. 29 is a plan view showing the arrangement of the lower frame unit 270 constituting the lower frame 262. Fig. 29 shows a case where a conveyance path 6 capable of conveying the workpiece unit 17 or the pallet 33 between 8 devices (the processing device 4, the loader/unloader 8, and the like) in total is formed. For example, the lower frame unit 270a is used in a region of the conveying path 6 corresponding to a portion other than the corner (a linear region of the conveying path 6), and the lower frame unit 270b is used in a region of the conveying path 6 corresponding to the corner.

In the lower frame 262 of fig. 29, a lower frame unit 270c having a structure in which the lower frame unit 270a is turned over and a lower frame unit 270d having a structure in which the lower frame unit 270b is turned over are used together. That is, in the lower frame 262 of fig. 29, two lower frame units 270 are used for each of the four types. Each lower frame unit 270 is configured such that a rod-shaped frame member does not overlap an opening 282 (see fig. 32, corresponding to the opening 6a in fig. 9) formed in the conveying path 6.

In forming the lower frame 262, for example, after the lower frame units 270 are fixed to the processing apparatus 4, the loader/unloader 8, and the like, the adjacent lower frame units 270 may be coupled to each other. The adjacent lower frame units 270 are joined by, for example, joints. However, the lower frame unit 270 may be fixed to the processing device 4, the loader/unloader 8, or the like after being coupled.

Fig. 30 (a) is a perspective view showing an upper frame unit 272a constituting the upper frame 264, and fig. 30 (B) is a perspective view showing an upper frame unit 272B constituting the upper frame 264. The upper frame unit 272a and the upper frame unit 272b are selectively used according to the pattern of the conveyance path 6, for example.

Fig. 31 is a plan view showing the arrangement of the upper frame unit 272 constituting the upper frame 264. Fig. 31 shows a case where the conveyance path 6 is configured by using the lower frame 262 in fig. 29. For example, the upper frame unit 272a is used in a part of a region where the adjacent processing devices 4, the loader/unloader 8, and the like are connected, and the upper frame unit 272b is used in a region directly above the processing devices 4, the loader/unloader 8, and the like.

That is, two upper frame units 272a and eight upper frame units 272b are used in the upper frame 264 of fig. 31. Each upper frame unit 272 is configured such that a rod-shaped frame member does not overlap an opening 282 (see fig. 32) formed in the conveyance path 6.

In forming the upper frame 264, for example, the upper frame unit 272 is fixed to the lower frame 262. In addition, the adjacent two upper frame units 272 may not be coupled to each other but separated. If necessary, an upper frame unit 272 having a structure in which the upper frame unit 272a is turned over, or an upper frame unit 272 having a structure in which the upper frame unit 272b is turned over may be used.

Fig. 32 is a plan view schematically showing the conveyance path 6 configured by arranging a plurality of road surface panels 266 in parallel. Fig. 32 shows a case where the conveyance path 6 is configured by using the lower frame 262 in fig. 29 and the upper frame 264 in fig. 31. In fig. 32, the boundaries between adjacent road surface plates 266 are shown by broken lines.

When the conveyance path 6 is formed, for example, the road surface panel 266 is fixed to the upper frame 264. In the upper frame 264 of fig. 31, for example, a small gap is formed between the adjacent upper frame unit 272a and the upper frame unit 272b, and a large gap is formed between the adjacent two upper frame units 272 b. Thus, the conveyance path 6 cannot be formed only by the rectangular road surface panel 266 in a plan view at a portion corresponding to the gap. That is, a gap is also formed in the conveyance path 6.

Therefore, to fill these gaps, a flat bridge panel 274a and a flat bridge panel 274b are used. A small bridge panel 274a is disposed at a small gap between the adjacent upper frame unit 272a and upper frame unit 272 b. A larger bridge panel 274b is disposed at a larger gap between the adjacent two upper frame units 272 b.

The bridge panel 274a or the bridge panel 274b is fixed to the upper frame 264, for example, so that a gap or a step formed in the conveyance path 6 is sufficiently small. This can reduce the impact on the traveling carrier vehicle 10, and can prevent damage to the workpiece 11 and the like. When a small gap remains in the conveyance path 6, the gap may be closed using, for example, a tape having a core material running in the direction in which the conveyance vehicle 10 travels.

Instead of the bridge panel 274a or the bridge panel 274b, a bridge panel having inclined surfaces formed at both ends in the traveling direction of the carrier 10 may be used. In this case, for example, the bridge deck can be used to overlap the upper side of the road deck 266, and thus the requirement for the size of the bridge deck is relaxed. This makes the bridge panel highly versatile. Further, the adjacent road surface panels 266 may be connected by a flexible thin plate-like bridge panel.

When the carrier 10 travels on the conveyance path 6 configured as described above, static electricity may be generated due to friction between the wheels 86 of the carrier 10 and the conveyance path 6, for example, and the workpiece 11 stored in the container 102 of the carrier 10 may be adversely affected. For example, when a semiconductor device is formed on the workpiece 11, the semiconductor device may be damaged by static electricity.

Therefore, it is preferable to expose the conductive member in a portion where the wheels 86 and the like contact the upper surface of the road surface panel 266 of the conveying path 6. As the conductive member, for example, CFRP (carbon fiber reinforced plastic) or the like is used in addition to metal such as aluminum or copper. When the road surface plate 266 is made of CFRP, the CFRP is also exposed on the upper surface of the road surface plate 266. That is, the conductive member is exposed on the upper surface of the road surface plate 266.

By exposing the conductive member on the upper surface of the road surface plate 266 in this way, generation and accumulation of static electricity due to friction can be suppressed, and adverse effects on the workpiece 11 and the like can be prevented. The conductive member exposed on the upper surface of the road surface plate 266 may be grounded via a lead (not shown) or the like. In this case, static electricity generated by contact between wheels 86 and road surface plate 266 is discharged through the lead, and therefore does not accumulate on road surface plate 266. This allows the workpiece 11 and the like to be more safely transported by the transport vehicle 10.

In the conveying system 2 of the present embodiment, as a principle, the operation of the conveying vehicle 10 is controlled so that the conveying vehicle 10 does not reach the end of the conveying path 6. However, when any trouble occurs in the transport vehicle 10, the control unit 12, or the like, the transport vehicle 10 may reach the end of the transport path 6 and the transport vehicle 10 may fall from the end of the transport path 6.

Therefore, as shown in fig. 27, it is preferable to provide a guard 276 as a barrier for preventing the transport vehicle 10 from falling from the transport path 6 at the end of the transport path 6. The shield 276 is made of a material containing a metal such as aluminum, and is fixed to the upper frame 264 or the pavement surface 266. The height from the upper surface of the road surface plate 266 to the upper end of the guard 276 is, for example, larger than the radius of the wheel 86 of the carrier 10. Preferably larger than the diameter of the wheel 86.

The guard 276 may be formed to have a height that contacts the 3 rd sensor 126 or the exterior cover of the carrier vehicle 10. In this case, when the guard 276 comes into contact with the 3 rd sensor 126 or the exterior cover of the carrier 10, the carrier 10 stops upon detecting a collision with an obstacle. Therefore, the carrier vehicle 10 can be driven more safely.

As shown in fig. 32, the conveyance path 6 includes: a travel area 278 mainly used for traveling of the carrier vehicle 10; a parking area 280 mainly for parking the carrier vehicle 10; and a standby area 284 mainly used for standby of the conveyance vehicle 10. The workpiece unit 17 or the pallet 33 is transported between the transport vehicle 10 parked in the parking area 280, and the processing apparatus 4, the loader/unloader 8, and the like located below the parking area 280.

The travel area 278 is formed in an annular shape, for example, and is disposed along the processing device 4, the loader/unloader 8, and the like. The transport vehicle 10 travels in one direction along the annular travel region 278, for example, and does not travel in the other direction (i.e., one direction). This enables the transport vehicle 10 to travel safely with simple control.

However, the shape of the travel area 278, the manner of travel of the transport vehicle 10, and the like are not limited. For example, the travel area 278 may be configured to allow the carrier vehicle 10 to travel in both directions. In addition, the travel region 278 need not be formed in a ring shape without a terminal end, and may be formed in a linear shape with a terminal end, for example.

On the other hand, parking area 280 is provided with an opening 282 vertically penetrating road surface panel 266. The opening 282 is formed slightly larger than the upper and lower surfaces of the container 102, for example, to allow the container 102 to pass upward and downward. On the other hand, the width of the opening 282 in the direction perpendicular to the direction of entry of the vehicle 10 into the parking area 280 is narrower than the interval between the pair of wheels 86 of the vehicle 10. Thus, when the direction of entry of the carrier vehicle 10 into the parking area 280 is appropriate, the wheels 86 do not fall off the openings 282.

The standby area 284 is, for example, an area where the possibility of the conveyance vehicle 10 being in standby is high. When the transport vehicle 10 is in the standby area 284, the other transport vehicles 10 can overtake the transport vehicle 10 in standby. When the transport vehicle 10 is allowed to travel in both directions, the transport vehicle 10 can be temporarily made to stand by in the standby area 284, so that the two transport vehicles 10 can be shifted. The conveyance path 6 does not necessarily include the standby area 284.

The road surface panel 266, the bridge panel 274a, the bridge panel 274b, and the like constituting the conveyance path 6 are provided with a plurality of types of guide marks 286 (see fig. 27) that are detected by sensors provided in the conveyance vehicle 10. The transport vehicle 10 performs control such as traveling, steering, and stopping on the basis of the various markers 286 detected by the sensors.

As shown in fig. 27, the marker 286 is formed in a linear shape having a color different from that of the other region of the upper surface of the road surface plate 266 or the like, for example. In the present embodiment, as shown in fig. 32, 1 st, 2 nd, 3 rd, and 4 th marks 286a, 286b, 286c, and 286d are used as the marks 286.

However, there is no limitation on the manner of the marker 286. The marker 286 may include a curve, for example, or may be formed by a dotted line. Further, characters, numerals, patterns, and the like may be used as the marker 286. In addition, there is no limitation on the color or the like of the marker 286. For example, a plurality of markers 286 having different colors may be used, and the transport vehicle 10 may be configured to perform various controls according to the color of the marker 286.

The travel area 278 is provided with a 1 st mark 286a along the traveling direction of the conveyance cart 10. The 1 st mark 286a is formed in, for example, an area through which the transport vehicle 10 traveling in the travel area 278 passes. More specifically, the 1 st mark 286a is provided directly below the pair of 1 st sensors 122 of the carrier 10 traveling in the traveling region 278.

Fig. 33 is a functional block diagram showing the control unit 130 of the conveyance cart 10. As shown in fig. 33, the control unit 130 of the transport vehicle 10 includes: a 1 st sensor control unit 130a that detects the 1 st mark 286a by monitoring the upper surface of the travel area 278 or the like (conveyance path 6) with the pair of 1 st sensors 122, respectively; and a travel instruction unit 130b that specifies the direction indicated by the 1 st mark 286a detected by the 1 st sensor 122 and causes the transport vehicle 10 to travel in the direction.

The pair of 1 st sensors 122 detect the 1 st mark 286a in accordance with the control signal input from the 1 st sensor control unit 130 a. Information on the 1 st flag 286a detected by the 1 st sensor 122 is transmitted to the travel instruction unit 130b via the 1 st sensor control unit 130 a.

The travel instruction unit 130b determines the direction indicated by the 1 st mark 286a based on the information of the 1 st mark 286a transmitted from the 1 st sensor control unit 130 a. The travel instruction unit 130b controls the drive unit 90 to cause the carrier vehicle 10 to travel in the determined direction. That is, the transport vehicle 10 can travel on the transport path 6 along the 1 st mark 286a by detecting the 1 st mark 286a by the pair of 1 st sensors 122.

As shown in fig. 32, two straight 1 st marks 286a intersect at a predetermined portion of the travel region 278. While the carrier vehicle 10 is traveling along one of the 1 st marks 286a, the 2 nd sensor 124 detects the other 1 st mark 286a intersecting the one 1 st mark 286 a. When the second 1 st mark 286a is detected by the 2 nd sensor 124, the vehicle 10 is steered as necessary.

That is, the traveling direction of the carrier 10 is changed at an arbitrary intersection where the two straight 1 st marks 286a intersect. In this way, a part of the other 1 st mark 286a detected by the 2 nd sensor 124 functions as the 2 nd mark 286b indicating the turning position of the carrier vehicle 10. Further, the conveyance path 6 has 2 nd marks 286b corresponding to the number of intersections where two 1 st marks 286a intersect. That is, a plurality of 2 nd marks 286b are present on the conveyance path 6 in fig. 32.

As shown in fig. 33, the control unit 130 of the transport vehicle 10 includes: a 2 nd sensor control unit 130c that monitors the upper surface of the travel area 278 or the like (conveyance path 6) with the 2 nd sensor 124 and detects the 2 nd mark 286 b; and a steering instruction unit 130d that counts the number of the 2 nd marks 286b detected by the 2 nd sensor 124 and steers the vehicle 10 in accordance with the counted number of the 2 nd marks 286 b.

The 2 nd sensor 124 detects the 2 nd mark 286b in accordance with the control signal input from the 2 nd sensor control unit 130 c. The 2 nd sensor control unit 130c notifies the steering instruction unit 130d of the control unit 130 of the fact that the 2 nd marker 286b is detected by the 2 nd sensor 124, for example, every time the 2 nd marker 286b is detected.

The turn instructing unit 130d counts the number of the 2 nd marks 286b detected by the 2 nd sensor 124 based on the notification from the 2 nd sensor control unit 130c, and compares the counted number with the number (predetermined number) of the 2 nd marks 286b corresponding to the instruction from the control unit 12 of the conveying system 2, for example. When the number of the 2 nd marks 286b detected by the 2 nd sensor 124 reaches the number of the 2 nd marks 286b corresponding to the instruction from the control unit 12, the steering instructing unit 130d controls the drive unit 90 to steer the vehicle 10.

That is, the turn instructing unit 130d changes the orientation of the carrier vehicle 10 in accordance with the number of detected 2 nd marks 286 b. In this way, the carrier 10 can detect the 2 nd mark 286b by the 2 nd sensor 124, and change the orientation as necessary. The 2 nd mark 286b is provided, for example, in a corner portion of the travel area 278 (a corner portion of the conveyance path 6), a portion of the travel area 278 adjacent to the parking area 280, a portion of the travel area 278 adjacent to the standby area 284, and the like.

In addition, when the pair of 2 nd sensors 124 are arranged on a straight line passing through the pair of wheels 86, the pair of 2 nd sensors 124 can detect the 2 nd mark 286b while the wheel 86 passes through the 2 nd mark 286 b. Therefore, the conveyance vehicle 10 is steered at the timing of detecting the 2 nd mark 286b, so that the pair of 1 st sensors 122 are not significantly deviated from the 1 st mark 286a to be detected after the steering. That is, the conveyance vehicle 10 can be appropriately steered without any correction.

As shown in fig. 32, the parking area 280 is provided with a 3 rd mark 286c along the direction in which the carrier vehicle 10 enters. That is, the 3 rd reference numeral 286c indicates the direction in which the carrier vehicle 10 enters the parking area 280. The 3 rd marks 286c are formed at two positions across the opening 282 in a direction perpendicular to the direction in which the carrier vehicle 10 enters, for example, and are detected by the 2 nd sensor 124 of the carrier vehicle 10.

As shown in fig. 33, the controller 130 of the transport vehicle 10 includes an entry controller 130e, and the entry controller 130e causes the transport vehicle 10 to enter the parking area 280 in the direction indicated by the 3 rd mark 286c detected by the 2 nd sensor 124. The entry control unit 130e is connected to the 2 nd sensor control unit 130 c.

The 2 nd sensor control unit 130c monitors the upper surface of the parking area 280 and the like (the conveyance path 6) by the 2 nd sensor 124 to detect the 3 rd mark 286 c. Information on the 3 rd flag 286c detected by the 2 nd sensor 124 is transmitted to the entry control unit 130e via the 2 nd sensor control unit 130 c.

The entry control unit 130e determines the direction indicated by the 3 rd marker 286c based on the information of the 3 rd marker 286c input from the 2 nd sensor control unit 130 c. The entry control unit 130e controls the drive unit 90 to cause the carrier vehicle 10 to enter the parking area 280 in the specified direction. The 3 rd reference numeral 286c is representatively provided in an area through which the wheels 86 of the carrier 10 are to pass. However, there is no limitation on the configuration and the like of the 3 rd mark 286 c.

As shown in fig. 32, the 4 th mark 286d intersecting the 1 st mark 286a or the 3 rd mark 286c is provided on the rear side (near side) of the parking area 280 (or the standby area 284) in the direction in which the carrier vehicle 10 enters the parking area 280 (or the standby area 284). The 4 th mark 286d shows the position of the parking area 280 (or the standby area 284).

As shown in fig. 33, the controller 130 of the transport vehicle 10 includes a parking controller 130f that stops the transport vehicle 10 when the 4 th mark 286d is detected by the 1 st sensor 122 (one of the pair of 1 st sensors 122) located on the rear side in the traveling direction of the transport vehicle 10. The parking control unit 130f is connected to the 1 st sensor control unit 130 a.

The 1 st sensor control unit 130a monitors the upper surface of the travel area 278, the parking area 280, and the like (the conveyance path 6) with the 1 st sensor 122, and detects the 4 th mark 286d with the 1 st sensor 122. When the 1 st sensor 122 detects the 4 th flag 286d, the 1 st sensor control unit 130a notifies the parking control unit 130f of the fact.

When the 1 st sensor control unit 130a notifies the parking control unit 130f that the 4 th flag 286d is detected, the parking control unit 130f controls the drive unit 90 to stop the transport vehicle 10 quickly. That is, when the transport vehicle 10 detects the 4 th mark 286d by the 1 st sensor 122 on the rear side, for example, the vehicle stops immediately.

The 4 th mark 286d may be provided on the front side (rear side) of the parking area 280 (or the standby area 284) in the direction in which the vehicle 10 enters the parking area 280 (or the standby area 284). In this case, when the conveyance vehicle 10 detects the 4 th flag 286d by the 1 st sensor 122 on the front side, the vehicle stops immediately.

In addition, the 4 th mark 286d may be provided at a position that can be detected by the 2 nd sensor 124. In this case, the parking control unit 130f shown in fig. 33 is connected to the 2 nd sensor control unit 130 c. When the 2 nd sensor 124 controlled by the 2 nd sensor control unit 130c detects the 4 th flag 286d, the parking control unit 130f controls the drive unit 90 to park the transport vehicle 10.

The parking control unit 130f may also stop the transport vehicle 10 after a predetermined time has elapsed since the 4 th mark 286d is detected by the 1 st sensor 122 or the 2 nd sensor 124. The time from the detection of the 4 th mark 286d until the stop of the transport vehicle 10 is detected is adjusted based on, for example, the distance between the 4 th mark 286d and the stop area 280, the speed at which the transport vehicle 10 travels, and the like.

As shown in fig. 32, a power supply terminal (power supply terminal) 288 connected to a power supply (not shown) is disposed at a position on the front side (rear side) of the parking area 280 and the standby area 284 in the direction in which the carrier vehicle 10 enters. For example, when the transport vehicle 10 is parked in the parking area 280 or the standby area 284 and the terminal (power receiving terminal) 100 of the transport vehicle 10 is brought into contact with the terminal 288, the electric power for charging is supplied to the battery (secondary battery) 96 via the terminal 100 and the wiring for charging (charging wiring) 98. That is, the battery 96 can be charged.

As shown in fig. 27, the terminal 288 is supported by a terminal support portion 290 fixed to the road surface plate 266 or the upper frame 264, and is connected to a power supply wiring (power supply wiring) 292. That is, the terminal 288 is connected to a power supply via a power supply wire 292.

The terminal support portion 290 has a biasing member (not shown) for biasing the terminal 288 toward the parking area 280 or the standby area 284, for example. By biasing the terminal 288 with the biasing member, the terminal 288 can be appropriately connected to the terminal 100. However, the structure and the like of the terminal 288 or the terminal support portion 290 are not limited.

For example, after the transport vehicle 10 stops in the parking area 280, the container 102 is lifted and lowered by the lifting unit 110. In the present embodiment, since the terminal 288 for power supply is disposed in the parking area 280, the battery 96 can be charged even when the container 102 is moved up and down. This makes it possible to sufficiently supply a large amount of power consumed by the lifting unit 110 when the container 102 is lifted and lowered.

In the present embodiment, a terminal 288 is also disposed in the standby region 284. Thus, for example, even when the transport vehicle 10 is caused to stand by in the standby area 284, the battery 96 can be charged. This can extend the time during which the transport vehicle 10 can be operated, thereby improving the efficiency of transporting the workpiece 11 or the pallet 33.

The operation when the transport vehicle 10 is moved from a certain position (departure point) to another position (destination point) on the transport path 6 is, for example, as follows. First, the control unit 12 of the transport system 2 transmits a signal corresponding to an instruction to move from the departure point to the destination to the transport vehicle 10 that is the target of movement.

The control unit 130 of the conveyance vehicle 10 that has received the instruction from the control unit 12 first specifies a route to the destination using its current position as a departure point, and obtains the number of the 2 nd marks 286b present between the departure point and the positions to which the conveyance vehicle 10 is to turn and the direction of turning at the positions to which the conveyance vehicle 10 is to turn along the route. The control unit 130 of the carrier vehicle 10 controls the drive unit 90 and the like based on the number of the 2 nd marks 286b and the steering direction determined by itself.

For example, the controller 130 of the transport vehicle 10 travels the transport vehicle 10 while monitoring the upper surface of the transport path 6 with the 1 st sensor 122 and the 2 nd sensor 124. That is, the control unit 130 detects the 2 nd mark 286b passed by the 2 nd sensor 124 while causing the carrier vehicle 10 to travel in the direction indicated by the 1 st mark 286a detected by the 1 st sensor 122.

When the number of the 2 nd marks 286b passed by the 2 nd sensor 124 reaches the number of the 2 nd marks 286b requested by the controller 130, the controller 130 steers the conveying vehicle 10 in the direction requested by the controller. Then, the control unit 130 causes the transport vehicle 10 to travel in the direction indicated by the 1 st reference numeral 286a again. When the conveyance vehicle 10 arrives at the destination, the control unit 130 transmits a signal for notifying that to the control unit 12.

When the transport vehicle 10 enters the parking area 280, the control unit 130 finely adjusts the traveling direction of the transport vehicle 10 by detecting the 3 rd mark 286c with the 2 nd sensor 124. This can prevent the wheels 86 of the carrier vehicle 10 from falling off the openings 282. In this case, the traveling speed can be kept low compared to when the carrier vehicle 10 is caused to travel in the direction indicated by the 1 st reference numeral 286 a. Then, the control unit 130 detects the 4 th flag 286d by the 1 st sensor 122 to stop the carrier vehicle 10 in the parking area 280.

The carrier 10 travels so that the wheels 86 are located forward in the traveling direction and the wheels 88 are located rearward in the traveling direction, as a principle. However, when the transport vehicle 10 moves from the parking area 280 or the standby area 284 to the travel area 278, the transport vehicle travels such that the wheels 86 are positioned rearward in the traveling direction and the wheels 88 are positioned forward in the traveling direction.

When the conveying vehicle 10 is parked in the parking area 280, the container 102 is positioned directly above the opening 282. The terminal 100 on the conveying vehicle 10 side is in contact with the terminal 288 on the conveying path 6 side. Thus, the transport vehicle 10 can lower the container 102 while charging the battery 96, and place the container 102 in the placement area a located below the opening 282.

In the above-described operation mode, the control unit 130 determines the number of the 2 nd marks 286b and the direction of turning, but the determination by the control unit 130 may be limited to the minimum. In this case, for example, the control unit 12 transmits a signal including information on the number of the 2 nd mark 286b present between the departure point and each position to which the transport vehicle 10 is to be steered and the direction of steering at each position to which the vehicle is to be steered. In this operation, the control unit 130 may not determine the number of the 2 nd markers 286b and the direction of turning, and therefore, the control unit 130 can be simplified.

Next, an example of a control method of the conveying system 2 according to the present embodiment will be described. Fig. 34 is a diagram for explaining an example of a control method of the conveying system 2. For example, when the controller 246 of the machining device 4 becomes in a state where the workpiece 11 before machining is required, a signal (a request signal for the workpiece or the like) for notifying that fact is generated. A signal (request signal such as a workpiece) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

As shown in fig. 34, the control unit 12 has a control unit (signal generation unit) 302 that generates signals for performing various controls. The control Unit 302 is configured by a computer, for example, and includes a Processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash Memory. The function of the control unit 302 is realized by operating a processing device or the like in accordance with software stored in the auxiliary storage device.

The control unit 302 is connected to a receiver 304 and a transmitter 306, the receiver 304 receives signals transmitted from the processing device 4, the loader/unloader 8, the carrier vehicle 10, and the like, and the transmitter 306 transmits signals to the processing device 4, the loader/unloader 8, the carrier vehicle 10, and the like.

When the receiver 304 of the control unit 12 receives a signal from the processing device 4The transmitter 250 of (a) transmits a signal for notification (a request signal for a workpiece or the like), the signal is transmitted to the control unit 302. When the control unit 302 confirms the signal for notification from the processing apparatus 4 (request signal for the workpiece or the like), it instructs any of the transport vehicles 10 to move the transport vehicle 10 to the parking area 280 directly above the loader/unloader 8 and place the container 102 on the upper surface of the placement table 66 of the loader/unloader 8 (placement area 2 a)₂). Specifically, the control unit 302 generates a control signal (1 st placement instruction signal) corresponding to the instruction and transmits the control signal from the transmitter 306 to the transport vehicle 10.

When the receiver 132 of the conveyance vehicle 10 receives a signal (1 st placement instruction signal) from the control unit 12, the signal is transmitted to the control unit 130. The control unit 130 controls the drive unit 90 and the like based on the signal (1 st placement instruction signal) to cause the transport vehicle 10 to travel along the transport path 6. When the carrier 10 is parked at the parking area 280 directly above the loader/unloader 8, the container 102 is positioned directly above the opening 282.

In a state where the carrier vehicle 10 is parked in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the suspension member 112. This allows the container 102 to be placed on the upper surface of the mounting table 66 by lowering the container 102 through the opening 282 and the like.

After the container 102 is placed on the upper surface of the mounting table 66, the control unit 130 generates a signal for notification (1 st placement completion signal) to notify that the placement of the container 102 on the upper surface of the mounting table 66 is completed. The signal (1 st placement completion signal) generated by the control unit 130 is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (1 st placement completion signal) transmitted from the transmitter 134 of the transport vehicle 10, the signal is transmitted to the control unit 302. When the control unit 302 confirms the signal (1 st placement completion signal) from the carrier 10, it notifies the loader/unloader 8 that the placement of the container 102 on the upper surface of the mounting table 66 has been completed. Specifically, the control unit 302 generates a notification signal (2 nd placement completion signal) for notifying that the placement of the container 102 on the upper surface of the mounting table 66 is completed, and transmits the signal from the transmitter 306 to the loader/unloader 8.

When the receiver 68 of the loader/unloader 8 receives a signal (2 nd placement completion signal) from the control unit 12, the signal is sent to the control device 46. Upon receiving the signal (the 2 nd placement completion signal), the control device 46 controls the operation of each component element to carry the workpiece 11 and the like before processing into the container 102. In addition, when the processed workpiece 11 and the like are stored in the container 102, the processed workpiece 11 and the like are carried out of the container 102, and then the workpiece 11 and the like before processing are carried into the container 102.

When the workpiece 11 or the like before processing is loaded into the container 102, the control device 46 generates a signal for notification (1 st conveyance completion signal) to notify that loading of the workpiece 11 or the like into the container 102 is completed. The signal (1 st conveyance completion signal) generated by the control device 46 is transmitted from the transmitter 70 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (1 st conveyance completion signal) transmitted from the transmitter 70 of the loader/unloader 8, the signal is transmitted to the control section 302. When the control unit 302 confirms the signal (1 st conveyance completion signal) from the loader/unloader 8, it instructs the conveyance vehicle 10 to move to the parking area 280 directly above the processing apparatus 4 and place the container 102 on the upper surface of the lift table 204 of the processing apparatus 4 (placement area a). Specifically, the control unit 302 generates a control signal (2 nd placement instruction signal) corresponding to the instruction and transmits the control signal from the transmitter 306 to the carrier 10.

When the receiver 132 of the conveyance vehicle 10 receives a signal (2 nd placement instruction signal) from the control unit 12, the signal is transmitted to the control unit 130. The control unit 130 controls the lifting unit 110 based on the signal (2 nd placement instruction signal) to wind the suspension member 112. This allows the container 102 to be raised through the opening 282 and the like and stored in the storage area 104. Then, the control unit 130 controls the drive unit 90 and the like to cause the transport vehicle 10 to travel along the transport path 6.

When the transport vehicle 10 stops in the parking area 280 directly above the processing device 4, the container 102 is positioned directly above the opening 282. In a state where the carrier vehicle 10 is parked in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the suspension member 112. This allows the container 102 to be lowered through the opening 282 and the like, and the container 102 can be placed on the upper surface of the lift table 204 of the processing apparatus 4.

After the container 102 is placed on the upper surface of the lift table 204, the control unit 130 generates a signal for notification (3 rd placement completion signal) to notify that the placement of the container 102 on the upper surface of the lift table 204 is completed. The signal (3 rd placement completion signal) generated by the control unit 130 is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (the 3 rd placement completion signal) transmitted from the transmitter 134 of the transport vehicle 10, the signal is transmitted to the control unit 302. When the control unit 302 confirms the signal (the 3 rd placement completion signal) from the carrier 10, it notifies the processing device 4 that the placement of the container 102 on the upper surface of the lift table 204 has been completed. Specifically, the control unit 302 generates a notification signal (4 th placement completion signal) for notifying that the placement of the container 102 on the upper surface of the mounting table 66 is completed, and transmits the signal from the transmitter 306 to the machining apparatus 4.

When the receiver 248 of the processing apparatus 4 receives a signal (4 th placement completion signal) from the control unit 12, the signal is transmitted to the control apparatus 246. Upon receiving the signal (4 th placement completion signal), the control device 246 controls the operation of each component element to carry out the workpiece 11 before machining and the like from the container 102. When the processed workpiece 11 or the like is present in the processing apparatus 4, the workpiece 11 or the like before processing is carried out of the container 102, and then the processed workpiece 11 or the like is carried into the container 102.

When the workpiece 11 or the like before being processed is carried out of the container 102, for example, the control device 246 generates a signal (2 nd conveyance completion signal) for notification that the removal of the workpiece 11 or the like from the container 102 is completed. The signal (2 nd conveyance completion signal) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

According to this procedure, the workpiece 11 before processing, etc., stored in the loader/unloader 8 can be conveyed to any of the processing apparatuses 4. Note that, although the description has been given mainly of the procedure when the workpiece 11 and the like are conveyed from the loader/unloader 8 to the processing apparatus 4, the procedure and the like when the workpiece 11 and the like are conveyed from the processing apparatus 4 to the loader/unloader 8 are also the same.

The above-described steps may be arbitrarily changed within a range in which the workpiece 11 and the like can be appropriately conveyed. For example, a plurality of steps included in the above-described steps may be performed simultaneously, or the order of the steps may be switched within a range that does not hinder the conveyance of the workpiece 11 or the like. Similarly, any steps may be added, changed, or omitted within a range not to hinder conveyance of the workpiece 11 or the like.

As described above, the conveyance path 6, the loader/unloader (conveyance device) 8, the conveyance vehicle 10, the cassette housing mechanism 24, and the lifting unit (lifting mechanism) 110 according to the present embodiment are configured to be able to efficiently and safely convey the workpiece 11 or the tray 33. Therefore, by using the conveying system 2 incorporating these components, the workpiece 11 or the pallet 33 can be conveyed efficiently and safely.

(embodiment 2)

In the present embodiment, a machining apparatus (cutting apparatus) of a different embodiment from the above-described embodiments will be described. Fig. 35 is a perspective view showing the internal structure of a machining device (cutting device) 402 according to the present embodiment. In the following description, the same reference numerals are used for the components common to the above-described embodiments, and detailed description thereof is omitted.

The container 102 of the conveyance vehicle 10 is not placed on the lift table 404 of the processing device 402. Instead, a two-stage cassette housing mechanism 406 (a 1 st cassette housing mechanism 406a and a 2 nd cassette housing mechanism 406b) similar to the two-stage cassette housing mechanism 24 (i.e., a 1 st cassette housing mechanism 24a and a 2 nd cassette housing mechanism 24b) of the loader/unloader 8 of the above embodiment is provided on the lift table 404 of the processing apparatus.

That is, the processing device 402 of the present embodiment carries the cassette 30 in. Further, a movement limiting mechanism including a stopper member 50 and a shaft mechanism 52 is mounted on the processing device 402. This facilitates carrying in and out of the relatively heavy cassette 30, and thus reduces the risk of damage to the workpiece 11 and the like stored in the cassette 30 as the workpiece is carried in and out. In addition, the cartridge housing mechanism 406 which is compact in the width direction is easily realized.

In addition, in the processing apparatus 402 of the present embodiment, a 1 st safety mechanism and a 2 nd safety mechanism for restricting entry from the outside to the inside of the processing apparatus 402 are realized. This can prevent the operator from erroneously accessing the moving part and the like in the operation inside the processing device 402.

The processing apparatus 402 of the present embodiment may be independent from the conveyance system 2. That is, the processing device 402 of the present embodiment is not necessarily connected to the conveyance system 2.

The cassette housing mechanism 406 according to the present embodiment is configured to be able to efficiently and safely convey the workpiece 11 and the like, as in the cassette housing mechanism 24 according to the above-described embodiment. Therefore, by using the processing apparatus 4 incorporating the magazine housing mechanism 406, the workpiece 11 and the like can be conveyed efficiently and safely.

In addition, the structures, methods, and the like of the above-described embodiments, modifications, and the like may be appropriately modified and implemented without departing from the scope of the object of the present invention.