Magnetic sensor with wide range and high sensitivity, and preparation method and use method thereof
阅读说明：本技术 兼具宽量程与高灵敏度的磁传感器、其制备方法与使用方法 (Magnetic sensor with wide range and high sensitivity, and preparation method and use method thereof ) 是由 刘宜伟 李晟斌 李润伟 巫远招 于 2019-04-26 设计创作，主要内容包括：本发明提供了一种兼具宽量程与高灵敏度的磁传感器、其制备方法与使用方法。该磁传感器包括弹性基体,非晶丝,磁性材料与电极,非晶丝与磁性材料分别位于弹性基体上或者嵌入弹性基体中,工作状态时非晶丝与电极形成导电回路,当磁场较小时,利用非晶丝的巨磁阻抗效应使阻抗发生变化,当磁场较大,磁性材料与磁场相互作用,带动弹性基体发生形变,从而使非晶丝产生应力,利用非晶丝的巨应力抗效应使阻抗发生变化。该磁传感器结构简单,不仅能够实现高灵敏度的磁场探测,而且能够实现宽量程的磁场探测,因此在磁传感器技术领域中具有良好的应用前景。(The invention provides a magnetic sensor with wide range and high sensitivity, and a preparation method and a use method thereof. The magnetic sensor comprises an elastic matrix, an amorphous wire, a magnetic material and an electrode, wherein the amorphous wire and the magnetic material are respectively positioned on the elastic matrix or embedded in the elastic matrix, the amorphous wire and the electrode form a conductive loop in a working state, when a magnetic field is small, the impedance is changed by utilizing the giant magneto-impedance effect of the amorphous wire, when the magnetic field is large, the magnetic material and the magnetic field interact to drive the elastic matrix to deform, so that the amorphous wire generates stress, and the impedance is changed by utilizing the giant-stress impedance effect of the amorphous wire. The magnetic sensor has a simple structure, can realize high-sensitivity magnetic field detection and wide-range magnetic field detection, and has a good application prospect in the technical field of magnetic sensors.)
1. Have wide range and high sensitivity's magnetic sensor concurrently, characterized by: comprises an elastic matrix, amorphous wires, magnetic materials and electrodes;
the amorphous wire is positioned on the elastic matrix or embedded in the elastic matrix;
the magnetic material is positioned on the elastic matrix or embedded in the elastic matrix;
when the device is in a working state, the amorphous wire and the electrode form a conductive loop;
when a magnetic field is applied, the magnetic material interacts with the magnetic field to drive the elastic matrix to deform, so that the amorphous wire generates stress.
2. A magnetic sensor having both wide range and high sensitivity as defined in claim 1, wherein: when the magnetic field is small, the giant magneto-impedance effect of the amorphous wire is utilized to detect the magnetic field; when the magnetic field is larger, the magnetic material interacts with the magnetic field to drive the elastic matrix to deform, so that the amorphous wire generates stress, and the giant stress impedance effect of the amorphous wire is utilized to detect the magnetic field.
3. A magnetic sensor having both wide range and high sensitivity as defined in claim 1, wherein: the amorphous wire is a Co-based amorphous material, a Fe-based amorphous material or a Ni-based amorphous material;
preferably, the amorphous wire is provided with a plurality of sections, and the sections of amorphous wire are connected through the conductive connecting piece.
4. A magnetic sensor having both wide range and high sensitivity as defined in claim 1, wherein: the magnetic material comprises a neodymium-iron-boron-based magnetic material, a samarium-cobalt-based magnetic material, an aluminum-nickel-cobalt-based magnetic material and a ferrite permanent magnetic material.
5. A magnetic sensor having both wide range and high sensitivity as defined in claim 1, wherein: the elastic base material comprises silicon rubber and polyimide.
6. A magnetic sensor having both wide range and high sensitivity as defined in claim 1, wherein: the magnetic sensor is of a cantilever beam type structure and comprises a fixed side and a free side, and the magnetic material and the conductive loop are both positioned on the free side;
preferably, the magnetic material is located at an end portion of the free side;
preferably, the magnetic materials are positioned on two sides of the amorphous wire, and the magnetization directions are the same.
7. A magnetic sensor having both wide range and high sensitivity as defined in claim 1, wherein: the magnetic sensor is in a bridge structure, namely, two ends of the magnetic sensor are fixed, and the conductive loop is positioned between the two ends;
preferably, the magnetic material is located above or below the amorphous wire and is electrically insulated from the amorphous wire.
8. The method for manufacturing a magnetic sensor having both wide range and high sensitivity according to any one of claims 1 to 7, wherein: placing an amorphous wire and a magnetic material in a mould, wherein the amorphous wire and an electrode form a conductive loop; and pouring the liquid elastic matrix material into a mold, and curing.
9. The method of claim 8, wherein the magnetic sensor has both wide range and high sensitivity, and the method comprises: the magnetic material is a magnetic composite material formed by a magnetic material and an elastic material, wherein magnetic material particles are dispersed in the elastic material, or the magnetic material is positioned on the elastic material, or the magnetic material is embedded in the elastic material.
10. The use method of the magnetic sensor with both wide range and high sensitivity as claimed in any one of claims 1 to 7, wherein: the method comprises the following steps:
(1) introducing alternating current into a conductive loop of the magnetic sensor;
applying a fixed external magnetic field to the magnetic sensor, testing the impedance output by the magnetic sensor, and changing the size of the external magnetic field to obtain a series of reference impedance values under a certain fixed external magnetic field;
(2) keeping the same test conditions as those in the step (1), testing the actual impedance value by using the magnetic sensor, comparing the actual impedance value with the reference impedance value obtained in the step (1), wherein the external magnetic field corresponding to the reference impedance value which is the same as the actual impedance value is the actually measured magnetic field value.
Technical Field
The invention relates to a magnetic field detection technology, in particular to a magnetic sensor with wide range and high sensitivity, a preparation method and a use method thereof.
Background
The magnetic sensor is an important component of the sensor, and converts a magnetic signal or other physical quantity into an electric signal or other information output in a required form according to a certain rule. Through the development of the last century, magnetic field sensors play more and more important roles in various aspects of human social life, and billions of magnetic sensors are put into use every year around the world. Along with the increasingly perfect magnetic sensors, various industries have higher and higher requirements on the magnetic sensors, especially the detection precision of the magnetic sensors is higher and higher, and meanwhile, the application range of the magnetic sensors is required to be wider and wider, so that the application field is further widened to meet the requirements of practical application. Therefore, it is one of the new development directions of magnetic sensors to have high detection accuracy and wide use range, and the magnetic sensors are also receiving more and more attention from researchers.
Currently, the types of magnetic sensors that are more common are mainly: hall (Hall) sensors, fluxgates and current-induced magnetic sensors, magneto-resistive sensors, and the like. According to the current state of research, the detection accuracy and the measurement range of the magnetic sensor at room temperature generally suffer from each other. Therefore, it is still a challenge to produce a magnetic field sensor that satisfies both high detection accuracy and a wide detection range, and it is one of the directions of current efforts to find a novel magnetic sensor.
Disclosure of Invention
In view of the above-mentioned technical situation, the present invention aims to provide a magnetic sensor that can achieve both a wide magnetic field detection range and a high magnetic field detection sensitivity.
In order to achieve the technical purpose, the amorphous wire is adopted, the amorphous wire has a giant magneto-impedance effect and a giant stress impedance effect, when a magnetic field is small, the giant magneto-impedance effect of the amorphous wire is utilized to enable impedance to change greatly, so that a magnetic signal can be detected with high sensitivity, when the magnetic field is large, the giant magneto-impedance effect of the amorphous wire is considered to be saturated, impedance change is not obvious, therefore, the interaction of a magnetic material and the magnetic field is combined to apply stress to the amorphous wire, and the giant stress impedance effect of the amorphous wire is utilized to enable impedance to change greatly, so that the magnetic signal can be detected with high sensitivity and a wide range.
Namely, the technical scheme provided by the invention is as follows: the magnetic sensor with wide range and high sensitivity comprises an elastic matrix, amorphous wires, a magnetic material and electrodes;
the amorphous wire is positioned on the elastic matrix or embedded in the elastic matrix;
the magnetic material is positioned on the elastic matrix or embedded in the elastic matrix;
when the device is in a working state, the amorphous wire and the electrode form a conductive loop;
When a magnetic field is applied, the magnetic material interacts with the magnetic field to drive the elastic matrix to deform, so that the amorphous wire generates stress.
The amorphous wire material is not limited, and comprises Co, Fe and Ni-based amorphous materials, and preferably, Co-based amorphous wires with high magnetic permeability are adopted.
As an implementation manner, the amorphous wire in the conductive loop has a plurality of sections, and the conductive loop further includes a conductive connecting member for connecting the amorphous wires. The conductive connecting piece material is not limited and can be liquid metal or solid metal.
The magnetic material is not limited, and comprises neodymium iron boron, samarium cobalt, aluminum nickel cobalt, ferrite permanent magnet material and other magnetic materials, and preferably, neodymium iron boron material is adopted.
The elastic base material is not limited and includes elastic materials such as silicon rubber and polyimide.
In one implementation, the magnetic sensor has a cantilever beam structure, and includes a fixed side and a free side, and preferably, the magnetic material and the conductive loop are both located on the free side, and more preferably, the magnetic material is located at an end of the free side, and most preferably, the magnetic material is located on both sides of the amorphous wire, and the magnetization directions are the same.
As another implementation manner, the magnetic sensor is in a bridge structure, that is, two ends of the magnetic sensor are fixed, and the conductive loop is located between the two ends. Preferably, the magnetic material is located above or below the amorphous wire and is electrically insulated from the amorphous wire.
The invention also provides a method for preparing the magnetic sensor, which comprises the following steps: placing an amorphous wire and a magnetic material in a mould, wherein the amorphous wire and an electrode form a conductive loop; and pouring the liquid elastic matrix material into a mold, and curing.
In one implementation, the magnetic material is a magnetic composite material of a magnetic material and an elastic material, wherein particles of the magnetic material are dispersed in the elastic material, or the magnetic material is located on the elastic material, or the magnetic material is embedded in the elastic material. The elastic material is not limited and includes silicon rubber, polyimide, and the like.
As one implementation, a plurality of amorphous wires are placed in a mold and connected with a conductive material, so that the amorphous wires and the electrodes form a conductive loop. The conductive material is not limited and includes liquid metal, solid metal, and the like.
The use method of the magnetic sensor of the present invention comprises the steps of:
(1) introducing alternating current into a conductive loop of the magnetic sensor;
Applying a fixed external magnetic field to the magnetic sensor, testing the impedance output by the magnetic sensor, and changing the size of the external magnetic field to obtain a series of reference impedance values under the fixed external magnetic field;
(2) keeping the same test conditions as those in the step (1), testing the actual impedance value by using the magnetic sensor, comparing the actual impedance value with the reference impedance value obtained in the step (1), wherein the external magnetic field corresponding to the reference impedance value which is the same as the actual impedance value is the actually measured magnetic field value.
In summary, the present invention adopts the amorphous wire, combines the amorphous wire with the magnetic material through the structural design, when the external magnetic field is small, the giant magneto-impedance effect of the amorphous wire is utilized to realize the detection of the magnetic field by testing the impedance of the sensor, when the external magnetic field is large, the interaction between the magnetic material and the magnetic field is utilized to deform the elastic matrix, so as to drive the amorphous wire to generate stress, and the giant stress impedance effect of the amorphous wire is utilized to realize the detection of the magnetic field by testing the impedance of the sensor. Compared with the prior art, the magnetic sensor has a simple structure, can realize high-sensitivity magnetic field detection, can detect the external magnetic field in a range from nano-Tesla (nT) to Tesla (T) and can realize wide-range magnetic field detection, thereby having good application prospect in the technical field of magnetic sensors.
Drawings
Fig. 1 is a schematic configuration diagram of a magnetic sensor in
Fig. 2 is a schematic structural view of a magnetic sensor in
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, which are intended to facilitate the understanding of the present invention and are not intended to limit the present invention in any way.
The reference numerals in fig. 1 are:
The reference numerals in fig. 2 are:
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