阅读说明：本技术 液体处理装置 (Liquid treatment device ) 是由 大岛优也 砂永伸也 于 2019-02-25 设计创作，主要内容包括：本发明的液体处理装置具有：第一液体可流动的第一流路；第二液体可移动的第二流路；第二液体可移动的第三流路；以及液滴生成部,是所述第二流路及所述第三流路相对于所述第一流路的汇合部,构成为利用在所述第二流路及所述第三流路内流动的所述第二液体将在所述第一流路内流动的所述第一液体分割为液滴状。所述第二流路及所述第三流路分别在下游侧具有主流路及副流路。所述第二流路的所述主流路的开口部与所述第三流路的所述主流路的开口部彼此相对地配置。所述第二流路的所述副流路的开口部与所述第三流路的所述副流路的开口部彼此相对地配置。(The liquid treatment apparatus of the present invention includes: a first flow path in which a first liquid is flowable; a second flow path in which a second liquid is movable; a third flow path in which the second liquid is movable; and a droplet generating unit that is a junction of the second channel and the third channel with respect to the first channel, and is configured to divide the first liquid flowing through the first channel into droplets by the second liquid flowing through the second channel and the third channel. The second flow path and the third flow path have a main flow path and an auxiliary flow path on downstream sides, respectively. The opening of the main channel of the second channel and the opening of the main channel of the third channel are disposed to face each other. The opening of the secondary channel of the second channel and the opening of the secondary channel of the third channel are disposed opposite to each other.)

1. A liquid processing apparatus includes:

a first flow path in which a first liquid is flowable;

a second liquid-movable second flow path merging with the first flow path;

a second liquid-movable third flow path merging with the first flow path; and

a droplet generating section that is a junction of the second channel and the third channel with respect to the first channel, and that is configured to divide the first liquid flowing through the first channel into droplets by the second liquid flowing through the second channel and the third channel,

the second channel and the third channel each have a main channel and a sub-channel on the downstream side,

the main flow path of the second flow path and the main flow path of the third flow path are disposed so as to face each other with respect to an opening of the first flow path,

the sub-flow path of the second flow path is disposed so as to face the opening of the first flow path and the sub-flow path of the third flow path is disposed so as to face the opening of the first flow path.

2. The liquid treatment apparatus according to claim 1,

in the droplet generating section, the openings of the main channel of the second channel and the third channel are respectively disposed at positions upstream of the openings of the sub channel of the second channel and the third channel,

in the droplet generating unit, the width of the opening of the main channel of the second channel and the third channel is larger than the width of the opening of the sub channel of the second channel and the third channel, respectively.

3. The liquid treatment apparatus according to claim 1 or 2,

in the droplet generating section, the width of the opening of the sub channel of the second channel and the third channel is smaller than or equal to the width of the first channel.

4. The liquid treatment apparatus according to any one of claims 1 to 3,

the liquid treatment apparatus further has a second liquid inlet for introducing the second liquid,

the second channel and the third channel are connected to the same second liquid introduction port.

5. The liquid treatment apparatus according to any one of claims 1 to 4,

the maximum value of the difference between the width of the first channel at the junction where the first channel joins the main channels of the second and third channels and the width of the first channel at the junction where the first channel joins the sub-channels of the second and third channels is 100 [ mu ] m or less.

6. The liquid treatment apparatus according to any one of claims 1 to 5,

the second flow path and the third flow path each have a plurality of sub-flow paths,

the interval between the opening of the main channel of the second channel and the opening of the sub channel of the second channel and the interval between the openings of the sub channels of the second channel are both less than 100 μm,

the interval between the opening of the main channel of the third channel and the opening of the sub channel of the third channel and the interval between the openings of the sub channels of the third channel are both less than 100 μm.

Technical Field

The present invention relates to a liquid treatment apparatus.

Background

In clinical examinations, food examinations, and examinations such as environmental examinations, liquid processing apparatuses for analyzing a trace amount of analytes such as cells, proteins, and nucleic acids with high accuracy are known. For example, a liquid processing apparatus is known which processes fine droplets (hereinafter, also referred to as "droplets") having a diameter of 0.1 to 1000 μm generated from a liquid containing the analyte (see, for example, non-patent document 1). In this liquid processing apparatus, a flow path through which the second liquid flows and a flow path through which the first liquid containing the analyte flows are merged, and the first liquid containing the analyte is divided by the second liquid, thereby generating droplets.

Disclosure of Invention

Problems to be solved by the invention

In general, droplets are generated from a diluted liquid in such a manner that the number of analytes contained in each droplet is at most 1. At this time, the amount of the analyte contained in the droplet follows a probability distribution of poisson distribution (poissondstribution). Even when droplets are generated from a diluted liquid so that the number of analytes contained in each droplet is at most 1 as described above, depending on the size of the generated droplets, empty droplets containing no analytes and droplets containing a plurality of analytes may be generated. For example, in a liquid processing apparatus in which a flow path through which a second liquid flows and a flow path through which a first liquid containing an analyte flows merge, if the flow rate of the second liquid increases, the size of a droplet tends to decrease, and as a result, an empty droplet tends to be generated. Conversely, when the flow rate of the second liquid is decreased, the size of the droplets tends to increase, and as a result, droplets containing a plurality of analytes tend to be generated. Therefore, when the flow rate of the second liquid cannot be controlled with high accuracy, the size of the droplet changes, and thus an empty droplet or a droplet containing a plurality of analytes is easily generated. Such empty droplets and droplets containing a plurality of analytes are not preferable because they reduce the accuracy of the inspection and increase the time required for the inspection.

The present invention has been made in view of the above problems, and an object thereof is to provide a liquid processing apparatus capable of stably generating droplets of a desired size even if the flow rate of a liquid changes to some extent.

Means for solving the problems

The liquid treatment apparatus of the present invention includes: a first flow path in which a first liquid is flowable; a second liquid-movable second flow path merging with the first flow path; a second liquid-movable third flow path merging with the first flow path; and a droplet generating unit that is a junction of the second channel and the third channel with respect to the first channel, and is configured to divide the first liquid flowing in the first channel into droplets by the second liquid flowing in the second channel and the third channel, the second channel and the third channel each having a main channel and a sub-channel on a downstream side, the main channel of the second channel being disposed so as to face an opening of the first channel and the main channel of the third channel with respect to the opening of the first channel, and the sub-channel of the second channel being disposed so as to face an opening of the first channel and the sub-channel of the third channel with respect to the opening of the first channel.

Effects of the invention

According to the present invention, it is possible to provide a liquid processing apparatus capable of stably generating droplets of a desired size even if the flow rate of a liquid changes to some extent.

Drawings

Fig. 1A and 1B are diagrams showing a liquid treatment apparatus according to an embodiment of the present invention.

Fig. 2A and 2B are partially enlarged views showing an example of a droplet generating section of the liquid processing apparatus.

Fig. 3A and 3B are partially enlarged views showing an example of a droplet generating section of the liquid processing apparatus.

Fig. 4A is a graph showing changes in the size of droplets generated when the widths of the openings of the main channel of the second and third channels and the sub-channel of the second and third channels are changed. Fig. 4B is a graph showing changes in the size of droplets generated when the width of the first channel at the junction where the first channel joins the main channels of the second and third channels and the width of the first channel at the junction where the first channel joins the sub-channels of the second and third channels are changed.

Fig. 5A is a graph showing changes in the size of droplets generated when the number of sub-channels of the second channel and the third channel is changed. Fig. 5B is a graph showing changes in the size of droplets generated when the interval between the openings of the sub-channels of the second channel and the third channel is changed.

Fig. 6 is a graph showing changes in the size of droplets generated when a surfactant is added to the first liquid flowing through the first channel.

Detailed Description

An embodiment of the present invention will be described in detail below with reference to the drawings. In the following description, the term "cross-sectional area of a flow channel" refers to the area of a cross section perpendicular to the flow direction of the flow channel.

(Structure of liquid treatment apparatus)

Fig. 1A is a plan view showing a liquid treatment apparatus 100 according to an embodiment of the present invention, and fig. 1B is a perspective view showing the liquid treatment apparatus 100. In these figures, the thin film is omitted to show the structure of the flow path.

The liquid treatment apparatus 100 includes a substrate 110 having a through hole and a groove formed therein, and a thin film (not shown) disposed on one surface of the substrate 110 so as to close an opening of the through hole and the groove. As described later, one opening of the through-hole formed in the substrate 110 is closed by a film, whereby a first liquid inlet 120, a second liquid inlet 140, and a droplet outlet 200 (all of which will be described later) are formed. Further, the openings of the grooves formed in the substrate 110 are closed by a thin film, thereby forming a first channel 130, a second common liquid channel 150, a second channel 160, a third channel 170, a droplet generating section 180, and a droplet channel 190 (all of which will be described later).

As shown in fig. 1A and 1B, the liquid processing apparatus 100 includes a first liquid inlet 120, a first channel 130, a second liquid inlet 140, a second common liquid channel 150, a second channel 160, a third channel 170, a droplet generator 180, a droplet channel 190, and a droplet outlet 200.

The first liquid inlet 120 is a bottomed recess for containing the first liquid to be droplets. As described above, the first liquid introduction port 120 is formed by closing one opening of the through hole formed in the substrate 110 with a film. First liquid inlet port 120 is connected to first flow path 130. The shape and size of first liquid introduction port 120 are not particularly limited as long as the first liquid can be introduced into first liquid introduction port 120 from the outside. Examples of the shape of first liquid introduction port 120 include a cylindrical shape and a truncated conical shape. In the present embodiment, the shape of first liquid introduction port 120 is a cylindrical shape.

The type of first liquid introduced from first liquid introduction port 120 is not particularly limited. The first liquid is, for example, a liquid containing an analyte such as a cell or nucleic acid (e.g., DNA or RNA), protein (e.g., enzyme), or the like. The dispersion medium or solvent for the analyte in the liquid is not particularly limited as long as it can disperse or dissolve the analyte, and examples thereof include water, a buffer solution, and physiological saline. The first liquid may be blood, plasma, serum, or a diluted solution thereof.

The first flow path 130 is a flow path for guiding the first liquid introduced from the first liquid introduction port 120 to the droplet generating unit 180. The upstream end of the first channel 130 is connected to the first liquid introduction port 120, and the downstream end of the first channel 130 is connected to the droplet generator 180. The downstream end of the first channel 130 may form a part of the droplet generator 180. The shape of the first flow path 130 is not particularly limited. In the present embodiment, the first flow path 130 is linear. The cross-sectional area of the first channel 130 is not particularly limited, and may be appropriately set according to the size of the droplet to be generated. The channel width of the first channel 130 is, for example, about 30 μm to 100 μm. The channel depth of the first channel 130 is, for example, about 30 μm to 100 μm.

The second liquid introduction port 140 is a recessed portion having a bottom for accommodating a second liquid for dividing the first liquid into droplets. As described above, the second liquid introduction port 140 is formed by closing one opening of the through hole formed in the substrate 110 with a film. The second flow path 160 and the third flow path 170 are connected to the second liquid introduction port 140 via the second common liquid flow path 150. That is, the second flow path 160 and the third flow path 170 are connected to the same second liquid introduction port 140. The shape and size of the second liquid introduction port 140 are not particularly limited as long as the second liquid can be introduced into the second liquid introduction port 140 from the outside. Examples of the shape of the second liquid introduction port 140 include a cylindrical shape and a truncated cone shape. In the present embodiment, the second liquid introduction port 140 has a cylindrical shape, similarly to the first liquid introduction port 120.

The type of the second liquid introduced from the second liquid introduction port 140 can be appropriately selected according to the type of the first liquid. The second liquid functions as a dispersion medium for droplets of the first liquid, and therefore, the second liquid is not compatible with the first liquid and does not denature the first liquid. For example, when the first liquid is blood, the second liquid is various oils in a liquid state at normal temperature such as mineral oil or silicone oil. The second liquid may be oil to which a surfactant is added.

The second common liquid channel 150 is a channel for guiding the second liquid introduced from the second liquid introduction port 140 to the second channel 160 and the third channel 170. When the second flow channel 160 and the third flow channel 170 are directly connected to the second liquid introduction port 140, the second common liquid flow channel 150 may be omitted. The upstream end of the second common liquid flow path 150 is connected to the second liquid introduction port 140, and the downstream end of the second common liquid flow path 150 is connected to the upstream ends of the second flow path 160 and the third flow path 170. The shape of the second liquid common flow path 150 is not particularly limited. In the present embodiment, the second common liquid flow path 150 is linear. The width and depth of the second common liquid flow path 150 are not particularly limited.

The second flow path 160 and the third flow path 170 are flow paths for guiding the second liquid introduced from the second liquid introduction port 140 to the droplet generating unit 180. In the present embodiment, the upstream ends of the second flow path 160 and the third flow path 170 are connected to the downstream end of the second common liquid flow path 150, and the downstream ends of the second flow path 160 and the third flow path 170 are connected to the droplet generator 180. The downstream ends of the second flow channel 160 and the third flow channel 170 may form a part of the droplet generating unit 180. As described later, the second flow path 160 and the third flow path 170 are merged with the first flow path 130 in the droplet generating unit 180. The shapes of the second flow path 160 and the third flow path 170 are not particularly limited. In the present embodiment, the second flow channel 160 and the third flow channel 170 are disposed so as to surround the first liquid introduction port 120 and the first flow channel 130, the second flow channel 160 is open on one side surface of the first flow channel 130, and the third flow channel 170 is open on the other side surface of the first flow channel 130.

As will be described later, the downstream portion of the second flow path 160 is branched into a main flow path 161 and 1 or 2 or more sub flow paths 162 to 164. Similarly, the downstream portion of the third flow path 170 is branched into a main flow path 171 and 1 or 2 or more sub flow paths 172 to 174. Therefore, the main flow path 161 and the sub-flow paths 162 to 164 of the second flow path 160 are open to one side surface of the first flow path 130, and the main flow path 171 and the sub-flow paths 172 to 174 of the third flow path 170 are open to the other side surface of the first flow path 130. The opening of the main channel 161 of the second channel 160 and the opening of the main channel 171 of the third channel 170 are disposed to face each other (see fig. 2A to 3B). Similarly, the openings of the sub-passages 162 to 164 of the second flow passage 160 and the openings of the sub-passages 172 to 174 of the third flow passage 170 are disposed to face each other (see fig. 2A to 3B).

In the present embodiment, the second flow path 160 and the third flow path 170 are connected to the second liquid introduction port 140 via the second common liquid flow path 150, but may be directly connected to the second liquid introduction port 140.

The droplet generator 180 is a junction where the first channel 130 joins the second channel 160 and the third channel 170, and is configured to divide the first liquid flowing through the first channel 130 into droplets by the second liquid flowing through the second channel 160 and the third channel 170. In the droplet generator 180, the first liquid flowing through the first channel 130 is divided by the second liquid flowing through the second channel 160 and the third channel 170, and droplets of the first liquid are generated in the second liquid. As described above, in the droplet generator 180, the opening of the main channel 161 of the second channel 160 and the opening of the main channel 171 of the third channel 170 are disposed to face each other. Similarly, the openings of the sub-passages 162 to 164 of the second flow passage 160 and the openings of the sub-passages 172 to 174 of the third flow passage 170 are disposed to face each other. The main feature of the liquid treatment apparatus 100 of the present embodiment is the structure of the droplet generating section 180. Therefore, the droplet generating unit 180 will be described in detail.

The droplet channel 190 is a channel for guiding the droplets generated in the droplet generating unit 180 to the droplet outlet 200. The upstream end of the droplet channel 190 is connected to the droplet generator 180, and the downstream end of the droplet channel 190 is connected to the droplet outlet 200. The shape of the droplet channel 190 is not particularly limited as long as the droplet can be appropriately moved. In the present embodiment, the droplet flow path 190 is linear and is arranged on the same straight line as the first flow path 130. Therefore, it is considered that the second channel 160 and the third channel 170 are merged in the boundary region between the first channel 130 and the droplet channel 190 of the straight channel constituted by the first channel 130 and the droplet channel 190. The cross-sectional area of the droplet channel 190 is not particularly limited as long as the droplet is not broken, and may be appropriately set according to the size of the droplet to be generated. The channel width of the droplet channel 190 is, for example, about 50 μm to 300 μm. The channel depth of the droplet channel 190 is, for example, about 30 μm to 100 μm.

The droplet outlet 200 is a bottomed recess for accommodating droplets moving in the droplet passage 190. As described above, the droplet discharge port 200 is formed by sealing one opening of the through hole formed in the substrate 110 with a thin film. The shape and size of the droplet outlet 200 are not particularly limited as long as the droplet can be taken out from the outside. Examples of the shape of the droplet outlet 200 include a cylindrical shape and a truncated cone shape. In the present embodiment, the droplet outlet 200 has a cylindrical shape.

A method of using the liquid treatment apparatus 100 will be briefly described. After the first liquid and the second liquid are respectively contained in the first liquid introduction port 120 and the second liquid introduction port 140, the first liquid in the first liquid introduction port 120 and the second liquid in the second liquid introduction port 140 are moved to the droplet generating part 180 at a predetermined speed by an external force such as a pump. In the droplet generator 180, the first liquid flowing through the first channel 130 is divided by the second liquid flowing through the second channel 160 and the third channel 170, thereby generating droplets. The droplets are present in a dispersed state in the second liquid. The liquid containing the liquid droplets moves in the liquid droplet passage 190, is stored in the liquid droplet ejection port 200, and is in a removable state.

(Structure of droplet generating section)

Next, the structure of the droplet generating section 180 will be described. As described above, the droplet generating unit 180 is a junction where the first channel 130 joins the second channel 160 and the third channel 170.

Fig. 2A and 2B are partially enlarged views showing an example of the droplet generating section 180 of the liquid treatment apparatus 100. In fig. 2A, the widths of the openings of the main flow path 161 and the sub-flow paths 162 and 163 of the first and second flow paths 130 and 160 are represented as W0 to W3. In fig. 2B, the width of the first channel 130 at the junction where the second channel 160 and the third channel 170 join is represented as W4 to W6.

As shown in fig. 2A, the droplet generating unit 180 is a junction of the second channel 160 and the third channel 170 with respect to the first channel 130, and is configured to divide the first liquid flowing through the first channel 130 into droplets by the second liquid flowing through the second channel 160 and the third channel 170. In the droplet generator 180, the main channel 161 and the sub-channels 162 and 163 of the second channel 160 are disposed opposite to the opening of the first channel 130, and the main channel 171 and the sub-channels 172 and 173 of the third channel 170 are disposed opposite to the opening of the first channel 130. By disposing the opening of the main channel 161 of the second channel 160 and the opening of the main channel 171 of the third channel 170 so as to face each other with respect to the first channel 130 in this way, the size of the generated droplets is less likely to change even if the flow rate of the second liquid flowing through the second channel 160 and the third channel 170 changes. In the present embodiment, the second flow path 160 includes a main flow path 161, and first and second sub flow paths 162 and 163, and the third flow path 170 includes a main flow path 171, and first and second sub flow paths 172 and 173. The main channel 161 of the second channel is disposed upstream (upper side in fig. 2A and 2B) of the first channel 130 from the openings of the sub-channels 162 and 163 of the second channel 160 with respect to the first channel 130. Similarly, the main flow path 171 of the third flow path 170 is disposed on the upstream side (upper side in fig. 2A and 2B) of the first flow path 130 with respect to the opening of the first flow path 130 than the sub-flow paths 172 and 173 of the third flow path 170 with respect to the opening of the first flow path 130.

In the present embodiment, the second channel 160 opens to the side surface of one of the first channels 130 (the left side in fig. 2A and 2B), and the third channel 170 opens to the side surface of the other of the first channels 130 (the right side in fig. 2A and 2B). The opening of the main channel 161 of the second channel 160 and the opening of the main channel 171 of the third channel 170 are disposed to face each other. Similarly, the opening of the first sub-channel 162 of the second channel 160 and the opening of the first sub-channel 172 of the third channel 170 are disposed to face each other. The opening of the second sub-passage 163 of the second passage 160 and the opening of the second sub-passage 173 of the third passage 170 are also disposed to face each other. Here, the opening of the first sub-passage 162 of the second passage 160 is disposed upstream of the opening of the second sub-passage 163 of the second passage 160 with respect to the first passage 130. Similarly, the opening of the first sub-channel 172 of the third channel 170 is disposed upstream of the opening of the second sub-channel 173 of the third channel 170 in the first channel 130.

As shown in fig. 2A, the width of the main channel 161 of the second channel 160 with respect to the opening of the first channel 130 (in fig. 2A, the width of the opening of the main channel 161 of the second channel 160 is denoted by W1) is preferably larger than the widths of the first sub channel 162 and the second sub channel 163 of the second channel 160 with respect to the opening of the first channel 130 (in fig. 2A, the width of the opening of the first sub channel 162 is denoted by W2, and the width of the opening of the second sub channel 163 is denoted by W3). More specifically, the difference between the width W1 of the opening of the main channel 161 of the second channel, the width W2 of the opening of the first sub-channel 162, and the width W3 of the opening of the second sub-channel 163 is preferably in the range of 25 to 50 μm. The same applies to the third flow path 170. By setting the width of the opening of the main channel 161 of the second channel 160 and the width of the opening of the main channel 171 of the third channel 170 to be larger than the widths of the openings of the first sub-channel 162 and the second sub-channel 163 of the second channel 160 and the widths of the openings of the first sub-channel 172 and the second sub-channel 173 of the third channel 170, it is possible to suppress the occurrence of small droplets (see experiment 1 of the example). The small droplets are droplets having a size completely different from that of the droplets that are normally generated, and do not particularly affect the inspection accuracy. In the present embodiment, the width W1 of the opening of the main channel 161 of the second channel 160 is the same as the width of the opening of the main channel 171 of the third channel 170. The width W2 of the opening of the first sub-passage 162 and the width W3 of the opening of the second sub-passage 163 in the second passage 160 are the same as the width of the opening of the first sub-passage 172 and the width of the opening of the second sub-passage 173 in the third passage 170, respectively.

Further, the width W2 of the opening of the first sub-channel 162 and the width W3 of the opening of the second sub-channel 163 in the second channel 160 with respect to the first channel 130 are preferably equal to or less than the width W0 of the first channel 130 in the droplet generating unit 180. More specifically, the difference between the width W2 of the opening of the first sub-channel 162 and the width W3 of the opening of the second sub-channel 163 in the second channel 160 and the width W0 of the first channel 130 is preferably in the range of 0 to 50 μm. The same applies to the third flow path 170. By setting the width W2 and the width W3 of the opening of the first sub-channel 162 and the width W3 of the second sub-channel 163 in the second channel 160 and the width of the opening of the first sub-channel 172 and the width of the opening of the second sub-channel 173 in the third channel 170 to be smaller than or equal to the width W0 of the first channel 130, the size of the generated droplets is less likely to change even if the flow rate of the second liquid flowing through the second channel 160 and the third channel 170 changes (see experiment 1 in the example).

In addition, as in the present embodiment, when the second channel 160 has a plurality of sub channels (in fig. 2A, the sub channels of the second channel 160 are denoted by 162 and 163), the sub channels 162 and 163 of the second channel 160 are preferably substantially the same width as the opening of the first channel 130. More specifically, the maximum difference in width between the openings of the secondary flow path 162 and the secondary flow path 163 of the second flow path 160 is preferably in the range of 0 to 25 μm. The same applies to the third flow path 170. By setting the widths of the sub-passages 162 and 163 of the second flow passage 160 to be substantially the same and the widths of the openings of the sub-passages 172 and 173 of the third flow passage 170 to be substantially the same, it is possible to suppress the occurrence of small droplets (see experiment 1 of the example).

As shown in fig. 2B, the width W4 of the first channel at the junction where the first channel 130 joins the main channel 161 of the second channel 160 and the main channel 171 of the third channel 170, the width W5 of the first channel 130 at the junction where the first channel 130 joins the first sub-channel 162 of the second channel 160 and the first sub-channel 172 of the third channel 170, and the width W6 of the first channel 130 at the junction where the first channel 130 joins the second sub-channel 163 of the second channel 160 and the second sub-channel 173 of the third channel 170 are preferably substantially the same. More specifically, the maximum difference between the widths W4, W5, and W6 of the first flow channel 130 is preferably in the range of 0 to 50 μm. In the droplet generating unit 180, the widths (W4 to W6) of the first channel 130 at the junction where the first channel and the second channel join each other are set to be substantially the same, whereby the occurrence of small droplets can be suppressed (see experiment 2 of the example).

Fig. 3A and 3B are partially enlarged views showing an example of the droplet generating section 180 of the liquid treatment apparatus 100. Fig. 3A shows a configuration in which the number of sub-channels is larger than the configurations shown in fig. 2A, 2B, and 3B. In fig. 3A, the widths of the openings of the main channel 161 and the sub-channels 162 to 164 of the second channel 160 are denoted by W1 to W3 and W7, and the widths of the first channel 130 at the junction with the main channel 161 of the second channel 160 and the main channel 171 of the third channel 170 and the junction with the sub-channels 162 to 164 of the second channel 160 and the sub-channels 172 to 174 of the third channel 170 are denoted by W4 to W6 and W8. In fig. 3B, the widths of the openings of the main channel 161 and the sub-channels 162 and 163 of the second channel 160 are represented by W1 to W3, the width of the first channel 130 at the junction where the main channel 161 and the sub-channels 162 and 163 of the second channel 160 meet is represented by W4 to W6, the interval between the opening of the main channel 161 and the opening of the first sub-channel 162 of the second channel 160 is represented by LS1, and the interval between the opening of the first sub-channel 162 and the opening of the second sub-channel 163 is represented by LS 2.

The number of the sub-channels merging with the first channel 130 is not particularly limited to the second channel 160 and the third channel 170, but is preferably 1 to 3, and more preferably 1 or 2. By setting the number of the sub-channels in which the second channel 160 and the third channel 170 join the first channel 130 to 2 or more, the size of the generated droplets is less likely to change even if the flow rate of the second liquid flowing through the second channel 160 and the third channel 170 changes (see experiment 3 in example). In fig. 3A, the number of the sub-passages 162 to 164 of the second flow passage 160 and the number of the sub-passages 172 to 174 of the third flow passage 170 are 3, respectively, and in fig. 3B, the number of the sub-passages 162 and 163 of the second flow passage 160 and the number of the sub-passages 172 and 173 of the third flow passage 170 are 2, respectively.

When the second flow path 160 and the third flow path 170 each have a plurality of sub-flow paths, the interval between the opening of the main flow path 161 of the second flow path 160 and the opening of the first sub-flow path 162 disposed on the most upstream side and the interval between the openings of the sub-flow paths 162 to 164 are preferably small to some extent. More specifically, the interval between the opening of the main channel 161 of the second channel 160 and the opening of the first sub-channel 162 disposed on the most upstream side and the interval between the openings of the sub-channels 162 to 164 are preferably less than 100 μm. The same applies to the third flow path 170. For example, as shown in fig. 3B, when the number of the sub-passages of the second flow passage 160 is 2 (in fig. 3B, the sub-passages of the second flow passage 160 are denoted by 162 and 163), it is preferable that the interval LS1 between the opening of the main flow passage 161 of the second flow passage 160 and the opening of the first sub-passage 162 and the interval LS2 between the opening of the first sub-passage 162 of the second flow passage 160 and the opening of the second sub-passage 163 are both smaller than 100 μm. Similarly, when the number of the sub-channels of the third channel 170 is 2 (in fig. 3B, the sub-channels of the third channel 170 are denoted by 172 and 173), it is preferable that the interval between the opening of the main channel 171 and the opening of the first sub-channel 172 of the third channel 170 and the interval between the opening of the first sub-channel 172 and the opening of the second sub-channel 173 of the third channel 170 be less than 100 μm. By setting these intervals to less than 100 μm, it is possible to suppress the occurrence of small droplets (see experiment 4 of the example).

(Effect)

As described above, in the liquid processing apparatus 100 according to the present invention, since the second flow path 160 and the third flow path 170 have the main flow path and the sub-flow path on the downstream side, respectively, it is possible to stably generate liquid droplets of a desired size even if the flow rate of the second liquid flowing through the second flow path 160 and the third flow path 170 changes.

In the present embodiment, the second flow path 160 and the third flow path 170 are connected to the same second liquid introduction port 140, but the present invention is not limited thereto. For example, the liquid treatment apparatus 100 may have two second liquid introduction ports 140, and the second flow channel 160 and the third flow channel 170 may be connected to different second liquid introduction ports 140.

The present invention will be described in detail with reference to examples, but the present invention is not limited to these examples.