阅读说明：本技术 一种化学机械研磨的水冷式研磨头 (Water-cooled grinding head for chemical mechanical grinding ) 是由 魏运秀 于 2020-07-30 设计创作，主要内容包括：本发明公开了一种化学机械研磨的水冷式研磨头,包括研磨部、连接部、进出水部和隔离管,研磨部内设有涡旋槽道,涡旋槽道连接有进水管和出水管,进水管和出水管与进出水部连接,隔离管将进水管和出水管隔开。本发明通过在研磨头内设置冷却水路,可快速、有效的对研磨头进行冷却,改善化学机械研磨的缺陷。(The invention discloses a water-cooled grinding head for chemical mechanical grinding, which comprises a grinding part, a connecting part, a water inlet and outlet part and an isolating pipe, wherein a vortex channel is arranged in the grinding part, the vortex channel is connected with a water inlet pipe and a water outlet pipe, the water inlet pipe and the water outlet pipe are connected with the water inlet and outlet part, and the isolating pipe separates the water inlet pipe from the water outlet pipe. The grinding head can be quickly and effectively cooled by arranging the cooling water path in the grinding head, so that the defects of chemical mechanical grinding are overcome.)

1. The utility model provides a chemical mechanical polishing's water-cooled grinding head, includes grinding portion (1), connecting portion (2), business turn over water portion (3) and spacer tube (4), its characterized in that: the grinding part (1) is in a circular truncated cone shape, a concave spigot (11) with an opening at the upper side is formed on the grinding part (1), a vortex channel (12) is formed on the bottom surface of the concave spigot (11), a water inlet pipe (13) is fixed in the middle of the bottom surface of the vortex channel (12), a water inlet channel (14) which is communicated with the water inlet pipe (13) and formed inside the grinding part (1) is formed on the lower side of the water inlet pipe (13), and a plurality of water inlet holes (15) which are communicated with the water inlet channel (14) are formed on the outer side of the bottom surface of the vortex channel (12);

the connecting part (2) is formed with a male spigot (21) matched with the female spigot (11), the male spigot (21) is inserted and fixed in the female spigot (11), and the lower bottom surface of the female spigot (21) is pressed against the upper end surface of the vortex channel (12); a water outlet pipe (22) communicated with the vortex channel (12) is formed in the middle of the male end (21), and the water outlet pipe (22) and the water inlet pipe (13) are coaxially arranged and are positioned on the outer side of the water inlet pipe (13);

the isolating pipe (4) is inserted between the water outlet pipe (22) and the water inlet pipe (13), and the lower end of the isolating pipe (4) is fixed on the bottom surface of the vortex channel (12);

the water inlet and outlet part (3) is formed with four-level step holes (31) with diameters decreasing from bottom to top, the side wall of the water inlet and outlet part (3) is formed with a water outlet interface (32) communicated with the second-level holes of the four-level step holes (31), and the upper bottom surface of the water inlet and outlet part (3) is formed with a water inlet interface (33) communicated with the fourth-level holes of the four-level step holes (31); the upper end of the water outlet pipe (22) is hinged to a first-stage hole of the four-stage step hole (31) through a first sealing bearing (51), and the upper end of the isolation pipe (4) is hinged to a third-stage hole of the four-stage step hole (31) through a second sealing bearing (52).

2. The water-cooled polishing head for chemical mechanical polishing according to claim 1, wherein: a pair of symmetrically arranged connecting blocks (23) is formed on the connecting part (2).

3. The water-cooled polishing head for chemical mechanical polishing according to claim 1, wherein: and a sealing ring (53) is sleeved on the outer wall of the upper end of the water inlet pipe (13), and the sealing ring (53) is pressed against the inner wall of the upper end of the isolation pipe (4).

4. The water-cooled polishing head for chemical mechanical polishing according to claim 1, wherein: the water inlet channel (14) comprises a plurality of water through holes (141) penetrating through the grinding part (1) and water through openings (142) communicated with the middles of the water through holes (141), and the water through holes (142) are communicated with the water inlet pipe (13); the water inlet hole (15) is communicated with the outer end of the water through hole (141); plugs (54) are fixed at openings at two ends of the water through hole (141).

5. The water-cooled polishing head for chemical mechanical polishing according to claim 1, wherein: gaps are reserved between the outer wall of the isolation pipe (4) and the inner wall of the water outlet pipe (22) and between the inner wall of the isolation pipe (4) and the outer wall of the water inlet pipe (13).

Technical Field

The invention relates to the technical field of semiconductor production, in particular to a water-cooled grinding head for chemical mechanical grinding.

Background

Chemical Mechanical Polishing (CMP) is a very important process in semiconductor manufacturing equipment. In a chemical mechanical polishing process, the temperature of the polishing region is very important to the process, and overheating may pose a potential defect risk. In order to overcome the heat generated by mechanical polishing in the chemical mechanical polishing process and achieve the purpose of controlling the surface temperature of the wafer, the prior art has a cooling water loop installed below the wafer polishing platform to control the temperature of the polishing platform. However, in this heavy proposal, the whole grinding platform is cooled, and the actual heat generation is mainly concentrated between the grinding head and the contacted silicon wafer, so the cooling effect is general. The problem that the existing chemical mechanical polishing equipment is poor in cooling effect when being cooled on a grinding platform and cannot realize quick and effective cooling of a grinding head with heat gathered is solved.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a water-cooled grinding head for chemical mechanical grinding, which can quickly and effectively cool the grinding head and improve the defects of the chemical mechanical grinding by arranging a cooling water path in the grinding head.

The scheme for solving the technical problems is as follows:

a water-cooled grinding head for chemical mechanical grinding comprises a grinding part, a connecting part, a water inlet and outlet part and an isolating pipe, wherein the grinding part is in a round table shape, a concave spigot with an opening at the upper side is formed on the grinding part, a vortex channel is formed on the bottom surface of the concave spigot, a water inlet pipe is fixed in the middle of the bottom surface of the vortex channel, a water inlet channel which is communicated with the water inlet pipe and formed inside the grinding part is formed on the lower side of the water inlet pipe, and a plurality of water inlet holes communicated with the water inlet channel are formed on the outer side of the bottom surface of the vortex channel;

the connecting part is provided with a convex spigot matched with the concave spigot, the convex spigot is inserted and fixed in the concave spigot, and the lower bottom surface of the concave spigot is pressed on the upper end surface of the vortex channel; a water outlet pipe communicated with the vortex channel is formed in the middle of the convex spigot, and the water outlet pipe and the water inlet pipe are coaxially arranged and are positioned on the outer side of the water inlet pipe;

the isolating pipe is inserted between the water outlet pipe and the water inlet pipe, and the lower end of the isolating pipe is fixed on the bottom surface of the vortex channel;

the water inlet and outlet part is formed with four-stage step holes with diameters decreasing from bottom to top, the side wall of the water inlet and outlet part is formed with a water outlet interface communicated with the second-stage holes of the four-stage step holes, and the upper bottom surface of the water inlet and outlet part is formed with a water inlet interface communicated with the fourth-stage holes of the four-stage step holes; the upper end of the water outlet pipe is hinged to a first-stage hole of the four-stage step hole through a first sealing bearing, and the upper end of the isolation pipe is hinged to a third-stage hole of the four-stage step hole through a second sealing bearing.

And a pair of symmetrically arranged connecting blocks is formed on the connecting part.

And the outer wall of the upper end of the water inlet pipe is sleeved with a sealing ring, and the sealing ring is pressed against the inner wall of the upper end of the isolation pipe.

The water inlet channel comprises a plurality of water through holes penetrating through the grinding part and a water through port communicated with the middle parts of the plurality of water through holes, and the water through holes are communicated with the water inlet pipe; the water inlet is communicated with the outer end of the limber hole; and plugs are fixed at openings at two ends of the limber hole.

Gaps are reserved between the outer wall of the isolation pipe and the inner wall of the water outlet pipe and between the inner wall of the isolation pipe and the outer wall of the water inlet pipe.

The invention has the following outstanding effects: compared with the prior art, the grinding head can be quickly and effectively cooled by arranging the cooling water path in the grinding head, and the defects of chemical mechanical grinding are overcome.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a cross-sectional view of FIG. 1 taken about A-A;

the arrows in the figure indicate the flow direction of the cooling water.

Detailed Description