阅读说明：本技术 划线装置以及控制方法 (Scribing device and control method ) 是由 井村淳史 于 2020-03-10 设计创作，主要内容包括：划线装置(100)具备：头部(3)、转动机构(35)、第一移动机构(11)及第二移动机构(5)、第一控制装置(6)及第二控制装置(7)。在头部(3)安装有切割部件(37)。切割部件(37)在作为加工对象的基板上形成划分线。转动机构(35)安装于头部(3),并使切割部件(37)转动。第一移动机构(11)及第二移动机构(5)使头部(3)相对于基板移动。第一控制装置(6)及第二控制装置(7)基于转动轴轨迹控制移动机构。第一控制装置(6)及第二控制装置(7)在形成划分线时的切割部件(37)的预定加工轨迹的基础上对头部(3)中的切割部件(37)的位置与转动机构(35)的驱动轴的偏移量加以考虑而计算转动轴轨迹。(A scribing device (100) is provided with: a head (3), a rotating mechanism (35), a first moving mechanism (11) and a second moving mechanism (5), a first control device (6) and a second control device (7). A cutting member (37) is attached to the head (3). The cutting member (37) forms a dividing line on the substrate as the processing object. The rotating mechanism (35) is attached to the head (3) and rotates the cutting member (37). The first moving mechanism (11) and the second moving mechanism (5) move the head (3) relative to the substrate. The first control device (6) and the second control device (7) control the moving mechanism based on the locus of the rotating shaft. The first control device (6) and the second control device (7) calculate the trajectory of the rotating shaft by considering the position of the cutting member (37) in the head (3) and the offset of the driving shaft of the rotating mechanism (35) on the basis of the predetermined processing trajectory of the cutting member (37) when forming the dividing line.)

1. A scribing device is provided with:

a head to which a cutting member for forming a dividing line on a substrate to be processed is attached;

a rotating mechanism which is mounted on the head and rotates the cutting member;

a moving mechanism that moves the head portion relative to the substrate; and

a control device that controls the moving mechanism based on a locus of a rotation axis indicating a locus of the rotation axis of the rotating mechanism when the dividing line is formed,

the control device calculates a predetermined processing trajectory of the cutting member when forming the dividing line, and calculates the turning shaft trajectory in consideration of an offset amount of the turning shaft from a position of the cutting member in the head on the basis of the predetermined processing trajectory.

2. The scribing arrangement according to claim 1,

the control device calculates an offset amount to be considered on the basis of the predetermined processing trajectory for calculating the turning axis trajectory based on the rotation angle of the cutting member.

3. Scribing installation according to claim 1 or 2,

the control device calculates the predetermined processing trajectory as a trajectory of the cutting member in imaginary coordinates having at least a first imaginary axis corresponding to a first direction of an actual space and a second imaginary axis corresponding to a second direction of the actual space.

4. A control method performed by a control device of a scribing device, the scribing device comprising: a head to which a cutting member for forming a dividing line on a substrate to be processed is attached; a rotating mechanism which is mounted on the head and rotates the cutting member; and a moving mechanism that moves the head portion relative to the substrate,

wherein the control method comprises the following steps:

calculating a predetermined processing locus of the cutting member when the dividing line is formed;

calculating a rotation axis locus indicating a locus of the rotation axis when the dividing line is formed, taking into account a deviation amount of a rotation axis of the rotation mechanism from a position of the cutting member in the head on the basis of the predetermined processing locus; and

Controlling the moving mechanism based on the rotating shaft trajectory.

Technical Field

The present invention relates to a scribing apparatus for processing a substrate such as a glass substrate and a method of controlling the scribing apparatus.

Background

Scribing apparatuses for cutting out glass substrates are currently known. For example, a device is known in which a fixed blade such as a diamond pen is moved relative to a substrate to form dividing lines on the substrate (for example, patent document 1).

Disclosure of Invention

Technical problem to be solved

In the conventional apparatus for moving the fixed blade relative to the substrate, no control is made as to the orientation of the fixed blade when the dividing line is formed. However, in recent years, in order to perform more advanced machining, a study has been made on controlling not only the movement of the fixed blade but also the orientation.

The device for controlling both the movement and the orientation (rotation angle) of the fixed blade has the following structure: the rotating mechanism of the fixed blade is mounted on the head, and the fixed blade is mounted on the rotating mechanism. In addition, the movement of the fixed blade in the apparatus is achieved by moving the head relative to the substrate.

In the scribing apparatus having the above configuration, the scribe line may not be formed faithfully according to the specification. It is believed that the main cause of this shift is: the movement locus of the fixed blade is calculated assuming that the position of the rotation axis of the rotating mechanism and the position of the fixed blade coincide, while on the other hand, the rotation axis of the rotating mechanism in the head and the position of the fixed blade do not actually coincide, and therefore the calculated movement locus does not coincide with the actual movement locus.

The invention aims to provide a scribing device for controlling the movement and the direction of a fixed blade, which can form dividing lines on a substrate according to the specification faithfully.

(II) technical scheme

A plurality of ways are described below as means for solving the problem. These modes can be arbitrarily combined as required.

A scribing device according to one aspect of the present invention includes: head, slewing mechanism, moving mechanism, controlling means. The head is provided with a cutting member. The cutting member forms a dividing line on a substrate to be processed. The rotating mechanism is mounted on the head and rotates the cutting member. The moving mechanism moves the head portion relative to the substrate. The control device controls the moving mechanism based on the locus of the rotating shaft. The rotation axis locus indicates a locus of the rotation axis of the rotation mechanism when the dividing line is formed.

The control device calculates a predetermined processing trajectory of the cutting member when forming the dividing line, and calculates a rotation axis trajectory in consideration of an offset amount between the position of the cutting member in the head and the rotation axis on the basis of the predetermined processing trajectory.

In the scribing apparatus described above, the control device that controls the moving mechanism calculates the locus of the rotation axis in consideration of the offset amount between the position of the cutting member in the head and the rotation axis of the rotation mechanism with respect to the predetermined processing locus of the cutting member at the time of forming the dividing line. That is, the moving mechanism is controlled so that the rotating shaft moves on a trajectory that is offset from the predetermined processing trajectory by the offset amount.

Thus, the scribing device having the above configuration can faithfully move the cutting member in accordance with the predetermined processing trajectory, and thus can faithfully form the dividing line in accordance with the specification.

The control device may calculate an offset amount to be considered on the basis of a predetermined processing trajectory for calculating the turning axis trajectory based on the rotation angle of the cutting member. Thus, a more accurate track of the rotating shaft can be calculated. That is, the cutting member can be moved more faithfully in accordance with the predetermined processing trajectory.

The control device may calculate a predetermined processing trajectory as a trajectory of the cutting member in imaginary coordinates having at least a first imaginary axis corresponding to a first direction of the real space and a second imaginary axis corresponding to a second direction of the real space. This enables the trajectory of the rotating shaft to be calculated at a higher speed.

A control method according to another aspect of the present invention is a control method performed by a control device of a scribing device. The scribing device includes a head, a rotation mechanism, and a movement mechanism. The head is provided with a cutting member. The cutting member forms a dividing line on a substrate to be processed. The rotating mechanism is mounted on the head and rotates the cutting member. The moving mechanism moves the head portion relative to the substrate. The control method includes the following steps.

Calculating a predetermined processing locus of the cutting member when the dividing line is formed;

calculating a rotation axis locus representing a locus of the rotation axis when the dividing line is formed, taking into account an offset amount of the rotation axis of the rotation mechanism from the position of the cutting member in the head on the basis of the predetermined processing locus; and

c, controlling the moving mechanism based on the rotating shaft track.

In the above-described control method of the scribing apparatus, the trajectory of the rotation axis is calculated by taking into account the offset amount between the position of the cutting member in the head and the rotation axis of the rotation mechanism, with respect to the predetermined processing trajectory of the cutting member when the dividing line is formed. That is, the moving mechanism is controlled so that the rotating shaft moves on a trajectory that is offset from the predetermined processing trajectory by the offset amount.

Thus, in the scribing device having the above configuration, since the cutting member can be moved faithfully in accordance with the predetermined processing trajectory, the scribe line can be formed faithfully in accordance with the specification.

(III) advantageous effects

The dividing line can be formed faithfully as specified by moving the cutting member faithfully in accordance with the predetermined processing trajectory.

Drawings

Fig. 1 is a perspective view showing a scribing apparatus according to a first embodiment.

Fig. 2 is a diagram showing a detailed configuration of the head.

Fig. 3 is a diagram showing a control structure of the scribing apparatus.

Fig. 4 is a flowchart showing the overall operation of the scribing apparatus.

Fig. 5 is a flowchart showing a scribing line forming operation of the scribing apparatus.

Fig. 6 is a diagram illustrating an example of the positional displacement of the fixed blade from the drive shaft of the rotating mechanism.

Fig. 7 is a diagram illustrating an example of a method of calculating the trajectory of the rotation axis.

Fig. 8 is a diagram showing another embodiment of the scribing device.

Description of the reference numerals

100. 100' -a scoring device; 1-a workbench; 11-a first movement mechanism; 2-a base; 3-a head; 31-a body; 33-a third movement mechanism; 34-a stationary part; 35-a rotating mechanism; 36-a coupler portion; 37-a cutting member; 37 a-a holding member; 37 b-stationary blade; 4-a bridging member; 5-a second moving mechanism; 6-a first control device; 7-a second control device; 8-a switching hub; 9-upper computer; o, O' -origin; theta, theta' -rotation angle; 21-fourth movement mechanism.

Detailed Description

1. First embodiment

(1) Marking device

The scribing device 100 according to the first embodiment will be described below with reference to fig. 1. Fig. 1 is a perspective view showing a scribing apparatus according to a first embodiment. The scribing apparatus 100 is an apparatus for forming a dividing line on a substrate such as a glass substrate by using a fixed blade such as a diamond pen. The scribing device 100 mainly includes a table 1 and a head 3.

The table 1 is a member on which a substrate to be processed forming a dividing line is placed. The table 1 is movable in the Y direction (fig. 1) (an example of the first direction) by a first moving mechanism 11. The first moving mechanism 11 is, for example, a linear motor extending in the Y direction. Further, the first moving mechanism 11 is provided on the base 2.

The head 3 is provided on the bridging member 4 (fig. 1) so as to be slidable in the X direction (fig. 1) (an example of the second direction). The head 3 can be moved in the X direction by a second moving mechanism 5 provided in the bridge member 4. The second moving mechanism 5 is, for example, a linear motor extending in the X direction.

In the above configuration, the first moving mechanism 11 moves the table 1 in the Y direction, and the head 3 moves relative to the substrate placed on the table 1 in the Y direction. On the other hand, the head 3 is moved in the X direction relative to the substrate placed on the table 1 by the second moving mechanism 5. That is, the first moving mechanism 11 and the second moving mechanism 5 can move the head 3 relative to the substrate (table 1).

(2) Head part

The head 3 described above will be described more specifically below with reference to fig. 2. Fig. 2 is a diagram showing a detailed configuration of the head. The head 3 includes a main body 31, a third moving mechanism 33, a rotating mechanism 35, and a cutting member 37.

The main body 31 is a frame forming the main body of the head 3. The third moving mechanism 33 is a linear motor arranged in parallel along the width direction (X direction) of the main body 31 and extending in the Z direction. A fixing member 34 is fixed to the third moving mechanism 33. That is, the fixing member 34 can be moved in the Z direction (an example of the third direction) by the third moving mechanism 33.

The rotation mechanism 35 is a motor fixed to the upper portion of the coupling portion 36, and the drive shaft thereof is inserted into an angular bearing (fixed to the upper portion of the coupling portion 36). The coupling portion 36 couples a drive shaft of the turning mechanism 35 and a driven shaft of a holding member 37a (described later) via a coupling, and the holding member 37a is inserted into and fixed to a corner bearing at a lower portion of the coupling portion 36.

With the above configuration, the coupling portion 36 can firmly couple the rotating mechanism 35 and the driven shaft of the holding member 37 a. That is, the coupling portion 36 of the present embodiment can couple the drive shaft and the driven shaft without "play". This allows the rotation of the drive shaft of the turning mechanism 35 to be transmitted to the holding member 37a without loss or delay.

The cutter member 37 includes a holding member 37a and a fixed blade 37 b. The holding member 37a holds the fixed blade 37 b. As described above, the holding member 37a is coupled to the drive shaft of the turning mechanism 35 via the coupling portion 36. The holding member 37a is rotated in accordance with the rotation of the drive shaft of the rotating mechanism 35, so that the fixed blade 37b can be rotated about the Z axis.

The fixed blade 37b is a blade for forming a dividing line on a substrate to be processed (a substrate on the table 1). The fixed blade 37b is a member having a diamond pen at the tip, for example.

In the head 3 having the above-described configuration, the third moving mechanism 33 can move the cutting member 37 (fixed blade 37b) in the Z direction (height direction) by moving the fixing member 34 in the Z direction. Further, the holding member 37a is coupled to the drive shaft of the rotating mechanism 35 via the coupling portion 36, so that the rotating mechanism 35 can rotate the fixed blade 37b held by the holding member 37a about the Z axis.

Due to errors in processing and/or assembly in the manufacturing process of the scribing apparatus 100 having the above-described configuration, a slight deviation occurs between the position on the X-Y plane (plane parallel to the substrate) of the driving shaft of the rotation mechanism 35 (an example of the rotation shaft of the rotation mechanism) in the head 3 and the position on the X-Y plane of the tip end of the fixed blade 37b in the head 3.

Thus, in the present embodiment, as described later, the following control is performed when forming dividing lines on a substrate: the movement locus of the table 1 by the first moving mechanism 11 and the movement locus of the head 3 by the second moving mechanism 5 are offset from the movement locus of the cutting member 37 (fixed blade 37b) at the time of forming the dividing line (referred to as a predetermined processing locus).

(3) Control structure

Next, a control structure of the scribing device 100 according to the first embodiment will be described with reference to fig. 3. Fig. 3 is a diagram showing a control structure of the scribing apparatus. The control structure of the scribing apparatus 100 includes a first control device 6, a second control device 7, and a switching hub 8.

The first control device 6 is a computer system having a CPU, a storage device (RAM, ROM, etc.), various input/output interfaces, and the like. The first control device 6 is a system including, for example, a PLC and a motor controller. The first control device 6 is connected to the first moving mechanism 11. That is, the first controller 6 can control the Y-direction movement of the table 1 (substrate) by controlling the first movement mechanism 11.

The second control device 7 is a computer system having a CPU, a storage device (RAM, ROM, etc.), various input/output interfaces, and the like. The second control device 7 is a system including, for example, a PLC and a motor controller. The second control device 7 is connected to the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35. That is, the second controller 7 can control the X-direction and Z-direction movements of the cutter 37 (fixed blade 37b) and the rotation of the cutter 37 (rotation angle of the fixed blade 37b) by controlling the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35.

The switching hub 8 connects the first control device 6 and the second control device 7, and relays (mediates) communication (transmission/reception data) between the first control device 6 and the second control device 7.

As shown in fig. 3, the switching hub 8 is connected to an upper computer 9. The upper computer 9 is a computer system having a CPU, a storage device (RAM, ROM, SSD, hard disk, etc.), various interfaces, and the like, and executes various settings of the scribing device 100, settings of a shape of a dividing line to be formed on a substrate as a processing object, and the like. The upper computer 9 is, for example, a personal computer operated by a user.

In the above-described control configuration, the first control device 6 executes not only the control of the first moving mechanism 11 but also various controls in the scribing device 100. Specifically, the first control device 6 calculates the position and rotation angle of the cutting member 37 on which the dividing line is being formed for each control cycle of the substrate, based on data (e.g., CAD data) indicating the shape of the dividing line to be formed. Hereinafter, the position and the rotation angle of the cutting member 37 per control cycle will be referred to as a "predetermined processing path". In addition, the first control device 6 is responsible for input and output of data from sensors and the like.

On the other hand, the second control device 7 performs only simple calculations related to the control of the second moving mechanism 5, the third moving mechanism 33, and the turning mechanism 35. This is because the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35 need to be controlled at high speed, and the second control device 7 needs to use a calculation load to perform these controls.

In this way, by distributing the control of the scribing apparatus 100 to the plurality of control apparatuses (the first control apparatus 6 and the second control apparatus 7), the calculation load of each control apparatus can be reduced, and thus the scribing apparatus 100 can be controlled at high speed.

In the present embodiment, the first control device 6 calculates the Y-direction component of the trajectory of the rotational axis by taking into account (subtracting or adding) the offset in the Y-direction between the position of the driving axis of the rotational mechanism 35 and the position of the cutting member 37 (fixed blade 37b) in the head 3 on the basis of the coordinate value in the Y-direction of the predetermined processing trajectory, and controls the first movement mechanism 11 on the basis of the calculated Y-direction component.

On the other hand, the second control device 7 calculates the X-direction component of the pivot axis trajectory by taking into account the offset in the X-direction between the position of the drive axis of the pivot mechanism 35 and the position of the cutting member 37 in the head 3 on the basis of the coordinate value in the X-direction of the predetermined processing trajectory, and controls the second moving mechanism 5 on the basis of the calculated X-direction component.

(4) Operation of the scribing device

(4-1) Overall action

The operation of the scribing apparatus 100 according to the present embodiment will be described below with reference to fig. 4. Fig. 4 is a flowchart showing the overall operation of the scribing apparatus. The operation of the scribing apparatus 100 described below is realized by a program stored in a storage device of the first control device 6 and the second control device 7.

In order to form dividing lines on the substrate, first, in step S1, the substrate to be processed is fixed on the table 1. The fixing of the substrate on the table 1 can be achieved by, for example, suction fixing.

After the substrate is fixed to the table 1, in step S2, the first controller 6 and the second controller 7 control the first moving mechanism 11, the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35 to move the cutting member 37 to the original position of the cutting member 37.

Then, in step S3, the first controller 6 and the second controller 7 move the cutting member 37 to the origin position of the substrate. The fixed position of the substrate on the table 1 (that is, the origin position of the substrate on the table 1) is not fixed for the reason that the sizes of the substrates to be processed are different from each other. Therefore, in the present embodiment, the first controller 6 and the second controller 7 specify the origin position of the substrate based on whether or not the substrate is detected by a sensor (not shown). The first controller 6 and the second controller 7 preliminarily store the offset between the origin position of the cutting member 37 in step S2 and the origin position of the substrate determined in step S3.

Next, in step S4, forming dividing lines to the substrate is performed. In step S4, the first control device 6 controls the calculation of the movement amount and rotation angle (i.e., a predetermined processing trajectory) of the cutting member 37 when forming the dividing line to the substrate, and the movement of the table 1 in the Y direction by the first movement mechanism 11.

On the other hand, the second control device 7 controls the movement of the head 3 in the X direction by the second moving mechanism 5, the movement of the cutting member 37 in the Z direction (height direction) by the third moving mechanism 33, and the rotation of the cutting member 37 by the rotating mechanism 35. The operation of the first control device 6 and the second control device 7 in step S4 will be described in detail later.

After forming the dividing lines to the substrate, in step S5, the scribing apparatus 100 performs the end processing after forming the dividing lines. Specifically, as the end processing, the operation of returning the cutting member 37 to the original position thereof and the operation of releasing the fixation of the substrate to the table 1 are executed.

(4-2) operation of the control device in forming the dividing line

The control of the first control device 6 and the second control device 7 when forming the dividing lines performed in step S4 described above will be described below with reference to fig. 5. Fig. 5 is a flowchart showing a scribing line forming operation of the scribing apparatus.

For example, when receiving data indicating dividing lines to be formed to the substrate from the upper computer 9 or the like, the first control device 6 calculates a predetermined processing trajectory from the received data in step S11. Specifically, the first control device 6 calculates the position (X ', Y ') and the rotation angle θ ' of the cutting member 37 (fixed blade 37b) on the virtual coordinates based on the received data. The virtual coordinates are plane coordinates defined by a first virtual axis (referred to as Y 'axis) corresponding to the Y direction of the real space and a second virtual axis (referred to as X' axis) corresponding to the X direction of the real space. Further, in the virtual coordinates, a third virtual axis (Z' axis) corresponding to the Z direction (height direction) of the real space may be defined.

In the present embodiment, the first control device 6 outputs the position (X ', Y ') and the rotation angle θ ' for each control cycle when forming the dividing line as the predetermined processing trajectory. That is, the first control device 6 calculates a predetermined processing trajectory for linearly moving the cutting member 37 every control period (for example, 1 ms). As a result, the first control device 6 calculates a predetermined processing trajectory of the dividing line in the polygonal representation curve.

Therefore, the first control device 6 calculates the position (X ', Y ') and the rotation angle θ ' of the virtual coordinate of the cutting member 37 so that the movement amount and the rotation amount of the cutting member 37 per control cycle (per cycle performed by the control command) are as small as possible. For example, the positions (X ', Y ') and the rotation angle θ ' are calculated so that the movement amount per control cycle of the cutting member 37 is in the order of μm.

Thus, the first control device 6 can calculate the predetermined machining locus that can more faithfully reproduce the dividing line of an arbitrary shape. In particular, by reducing the amount of movement per control cycle and expressing the curve with polygons having more vertices, the dividing line of the curve shape can be reproduced more faithfully.

Further, by reducing the amount of movement and the amount of rotation per control cycle, the first controller 6 and the second controller 7 can easily perform feedback control of the first movement mechanism 11, the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35. In particular, if the first moving mechanism 11 excessively moves the table 1 having a weight during one control cycle, the position of the table 1 cannot be controlled with high accuracy even if the feedback control is performed. Therefore, by reducing the amount of movement of the table 1 or the like per control cycle, the effect of the feedback control can be increased, and the position of the table 1 or the like can be controlled with high accuracy.

The first control device 6 continues to calculate the predetermined machining trajectory in step S11 while executing the following operation to be described below with respect to the first movement mechanism 11, and outputs the predetermined machining trajectory (the X 'coordinate value and the rotation angle θ' of the predetermined machining trajectory) calculated at a predetermined timing to the second control device 7.

When the first control device 6 starts to calculate the predetermined machining locus and at least a part of the predetermined machining locus is calculated, the first control device 6 commands the second control device 7 to control the second moving mechanism 5, the third moving mechanism 33, and the rotating mechanism 35 to follow the position and the rotation angle of the cutting member 37 on the virtual coordinates in step S12. The operation in which the first movement mechanism 11, the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35 follow the position and the rotation angle of the cutting member 37 on the virtual coordinates is hereinafter referred to as "follow-up operation".

When the follow-up operation start instruction in step S12 is output, the first control device 6 transmits other setting conditions and the like to the second control device 7.

When the first control device 6 outputs the follow-up operation start instruction to the second control device 7 in step S12, the control of the position and the rotation angle of the cutting member 37 is started in step S13. Specifically, the first control device 6 and the second control device 7 execute the following control.

In steps S131 and S132, the first control device 6 and the second control device 7 calculate the movement locus of the drive shaft of the turning mechanism 35 on the virtual coordinate from the position (X ', Y ') and the rotation angle θ ' (predetermined processing locus) of the cutting member 37 on the virtual coordinate. Hereinafter, the movement locus of the drive shaft of the rotating mechanism 35 when the dividing line is formed is referred to as "rotating shaft locus".

The following describes the method of calculating the trajectory of the rotating shaft in detail with reference to fig. 6 and 7. Fig. 6 is a diagram illustrating an example of the positional displacement of the fixed blade from the drive shaft of the rotating mechanism. Fig. 7 is a diagram illustrating an example of a method of calculating the trajectory of the rotation axis.

In the following description, as shown in fig. 6, when the rotation angle θ is 0, it is assumed that the fixed blade 37b is shifted by X in the positive X direction and by Y in the positive Y direction from the drive shaft of the rotation mechanism 35. At this time, a calculation method of the start point (X3 ', Y3') and the end point (X4 ', Y4') of the trajectory of the rotation axis in the case where the circular arcs shown in fig. 7 are designated as the start point (X1 ', Y1') (rotation angle θ ': 0), the end point (X2', Y2 ') (rotation angle θ': Θ), and the center angle Θ as the predetermined processing trajectory of the fixed blade 37b will be described.

As shown in fig. 7, the starting points of the turning axis trajectory (X3 ', Y3') can be calculated as (X1 '-X, Y1' -Y). On the other hand, the X 'coordinate value (X4') of the end point of the pivot axis locus can be calculated as X2 '- (X × cos Θ -Y × sin Θ), and the Y' coordinate value (Y4 ') of the end point of the pivot axis locus can be calculated as Y2' - (X × sin Θ + Y × cos Θ). Thus, in the example shown in fig. 7, the rotational axis locus of the circular arc shape having a radius smaller than the circular arc radius of the predetermined machining locus is calculated.

The above-described method of calculating the trajectory of the rotation axis is an example, and is appropriately modified according to the definition of the virtual coordinates and the rotation angle θ.

In the present embodiment, since the first control device 6 controls the first movement mechanism 11, the Y' component of the trajectory of the rotation axis is calculated by the first control device 6 (step S131). On the other hand, since the second control device 7 controls the second moving mechanism 5, the X' component of the trajectory of the rotation axis is calculated by the second control device 7 (step S132).

After the locus of the rotation axis is calculated, the locus of the rotation axis calculated in the virtual coordinates is converted into a locus of a coordinate system of a real space. Specifically, in step S133, the first control device 6 can calculate the position of the drive shaft of the turning mechanism 35 in the Y direction in the real space as Y ' + Δ Y by adding the offset (set to Δ Y) between the origin O ' of the virtual coordinate in the Y direction and the origin O of the base plate to the Y ' coordinate value of the turning axis trajectory in the current control cycle.

On the other hand, in step S134, the second control device 7 can calculate the position of the drive shaft of the turning mechanism 35 in the X direction in the real space as X ' + Δ X by adding the offset (set to Δ X) between the origin O ' of the virtual coordinate in the X direction and the origin O of the substrate to the X ' coordinate value of the turning axis trajectory in the current control cycle.

The second control device 7 directly sets the rotation angle θ 'of the predetermined machining trajectory in the current control cycle as the rotation angle θ in the real space (that is, θ ═ θ'). The position of the cutting member 37 in the Z direction in the real space is set to a position slightly advanced downward from the origin in the Z direction determined in the above steps S2 and S3. This position can be determined more appropriately, for example, according to how much force the fixed blade 37b is brought into contact with the substrate surface.

Thereafter, in step S135, the first control device 6 outputs a control amount for setting the position of the drive shaft of the rotation mechanism 35 in the Y direction of the actual space with respect to the substrate to the position (Y' + Δ Y) calculated in step S133 described above to the first movement mechanism 11.

On the other hand, in step S136, the second control device 7 outputs a control amount for setting the position of the drive shaft of the rotation mechanism 35 in the X direction of the actual space with respect to the substrate to the position (X' + Δ X) calculated in step S134 described above, to the second movement mechanism 5. Further, a control amount is output to the turning mechanism 35, and the control amount is such that the rotation angle θ of the cutting member 37 becomes the rotation angle θ'. When the cutting member 37 moves in the Z direction, a corresponding control amount is output to the third movement mechanism 33.

After the control of the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35 in the current control cycle is completed, in step S137, the second control device 7 notifies the first control device 6 that the control of the mechanisms is completed.

The above-described step S13 is repeatedly executed for all the positions (X ', Y ') and the rotation angle θ ' calculated as the predetermined machining trajectory (steps S131 to S137).

In this way, in the scribing apparatus 100 of the present embodiment, the first control device 6 calculates the predetermined processing trajectory of the cutting member when forming the scribe line, and thereafter, the first control device 6 and the second control device 7 calculate the trajectory of the rotation axis in consideration of the offset amount between the position of the cutting member 37 (fixed blade 37b) in the head 3 and the drive axis of the rotation mechanism 35 in addition to the predetermined processing trajectory. That is, the first moving mechanism 11 and the second moving mechanism 5 are controlled so that the drive shaft of the turning mechanism 35 moves on a trajectory that is offset from the predetermined processing trajectory by the offset amount.

Thus, the scribing device 100 can faithfully move the cutting member 37 (fixed blade 37b) according to the predetermined processing trajectory, and can faithfully form the dividing line according to the specification.

The first controller 6 and the second controller 7 calculate an offset amount to be considered in addition to a predetermined processing path for calculating the trajectory of the rotation axis, based on the rotation angle θ of the cutting member 37 (fixed blade 37 b). Further, the locus of the rotation axis is calculated for each control cycle of the first control device 6 and the second control device 7. Thus, a more accurate track of the rotating shaft can be calculated.

(5) Common matters of the embodiments

The first embodiment described above has the following configuration and functions in common.

The scribing apparatus (for example, the scribing apparatus 100) includes: a head (e.g., the head 3), a rotation mechanism (e.g., the rotation mechanism 35), a movement mechanism (e.g., the first movement mechanism 11 and the second movement mechanism 5), and a control device (e.g., the first control device 6 and the second control device 7). A cutting member (e.g., cutting member 37) is mounted on the head. The cutting member forms a dividing line on a substrate to be processed. The rotating mechanism is mounted on the head and rotates the cutting member. The moving mechanism moves the head portion relative to the substrate. The control device controls the moving mechanism based on the locus of the rotating shaft. The rotation axis locus indicates a locus of the rotation axis of the rotation mechanism when the dividing line is formed.

The control device calculates a predetermined processing trajectory of the cutting member when forming the dividing line, and calculates a rotation axis trajectory in consideration of an offset amount between the position of the cutting member in the head and the rotation axis on the basis of the predetermined processing trajectory.

In the scribing apparatus described above, the control device that controls the moving mechanism calculates the locus of the rotation axis in consideration of the offset amount between the position of the cutting member in the head and the rotation axis of the rotation mechanism with respect to the predetermined processing locus of the cutting member at the time of forming the dividing line. That is, the moving mechanism controls the rotating shaft to move on a trajectory that is offset from the predetermined processing trajectory by the offset amount.

Thus, the scribing device having the above configuration can faithfully move the cutting member in accordance with the predetermined processing trajectory, and thus can faithfully form the dividing line in accordance with the specification.

2. Other embodiments

While one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. In particular, the plurality of embodiments and modifications described in the present specification can be combined as desired.

The control operations shown in the flowcharts of fig. 4 and 5 may be performed in any manner as long as the contents of the processes in the steps and the order of execution of the steps are not deviated from the gist of the present invention. For example, steps S131 to S134 of the flowchart of fig. 5 may be changed in order. Specifically, the trajectory of the turning axis may be calculated after converting a predetermined machining trajectory on virtual coordinates into a trajectory of coordinates in real space.

(A) The scribing device 100 may include a plurality of heads 3 (cutting members 37). In this case, the second control means 7 is provided to each head 3. The predetermined processing trajectories calculated by the first control device 6 are output to all the second control devices 7, and each second control device 7 calculates the pivot axis trajectory based on the amount of displacement between the position of the drive axis of the self-controlled pivot mechanism 35 and the position of the cutting member 37 in the corresponding head 3 to which the self-controlled cutting member 37 is attached. This makes it possible to cut a plurality of small pieces having the same shape from one substrate, and to calculate a locus of the rotation axis in consideration of a processing variation of each head 3 (cutting member 37).

(B) As shown in fig. 8, the bridge member 4 that can slide the head 3 in the X direction can be moved in the Y direction by a fourth moving mechanism 21 provided on the table 1 (a scribing apparatus 100' of a gantry drive system). The fourth moving mechanism 21 is, for example, a linear motor extending in the Y direction. Fig. 8 is a diagram showing another embodiment of the scribing device.

(C) In the first embodiment described above, the first movement mechanism 11, the second movement mechanism 5, the third movement mechanism 33, and the rotation mechanism 35 are controlled by a plurality of control devices in consideration of the control load of each mechanism, but the present invention is not limited thereto, and all of these mechanisms may be controlled by one control device.

Industrial applicability

The present invention can be widely applied to a scribing apparatus for forming dividing lines on a substrate.