阅读说明：本技术 一种两相耦合电感单元和多相耦合电感 (Two-phase coupling inductance unit and multi-phase coupling inductance ) 是由 王宁宁 俞俊超 彭善峰 叶挺聪 张正民 刘磊 启荣·菲尼 于 2020-06-09 设计创作，主要内容包括：本发明涉及耦合电感领域,尤其涉及并公开了一种两相耦合电感单元和多相耦合电感。包括两个线圈、磁芯、磁芯衬体、衬底,所述的两个线圈和磁芯衬体均垂直放置于衬底之上,磁芯衬体以环状围绕两个线圈,在磁芯衬体上刻蚀有沟槽,磁芯设置于沟槽内,磁芯、第一线圈及第二线圈相互之间绝缘,通过两个线圈的电流方向相反。本发明还公开了一种多相耦合电感,由X=n×m个两相耦合电感单元组成,n表示相数,m为自然数,2m个线圈串联成一相,该相中每个线圈属于不同的两相耦合电感单元,通过相邻线圈的电流方向相反。本发明的一种两相耦合电感单元和多相耦合电感,在体积小型化的同时具有高电感密度、大电流密度、利于集成和叠装的优点。(The invention relates to the field of coupling inductors, and particularly relates to and discloses a two-phase coupling inductor unit and a multi-phase coupling inductor. The magnetic core comprises two coils, a magnetic core lining body and a substrate, wherein the two coils and the magnetic core lining body are vertically arranged on the substrate, the magnetic core lining body surrounds the two coils in an annular mode, a groove is etched in the magnetic core lining body, the magnetic core is arranged in the groove, the magnetic core, the first coil and the second coil are mutually insulated, and the current directions of the two coils are opposite. The invention also discloses a multiphase coupling inductor which is composed of X = n X m two-phase coupling inductor units, wherein n represents the number of phases, m is a natural number, 2m coils are connected in series to form one phase, each coil in the phase belongs to different two-phase coupling inductor units, and the directions of currents passing through adjacent coils are opposite. The two-phase coupling inductance unit and the multi-phase coupling inductance have the advantages of being high in inductance density and large in current density, and beneficial to integration and stacking while being small in size.)

1. The utility model provides a two-phase coupling inductance unit, includes first coil (1), second coil (2), magnetic core (3), magnetic core lining body (4), substrate (5), its characterized in that, first coil (1), second coil (2) all place on substrate (5) perpendicularly, magnetic core lining body (4) are with cyclic annular around first coil (1) and second coil (2), it has slot (6) to etch on magnetic core lining body (4), magnetic core (3) set up in slot (6), magnetic core (3), first coil (1) and second coil (2) are insulating each other, the direction of current through first coil (1) is opposite with the direction of current through second coil (2).

2. The two-phase coupled inductor unit according to claim 1, wherein the first coil (1) and the second coil (2) have the same height, the cross-sections of the two coils are approximately rectangular, and the shape of the coils is cylindrical.

3. Two-phase coupled inductive unit according to claim 1, characterized in that the magnetic core (3) fills the inside of the slot (6).

4. A two-phase coupled inductor unit according to claim 1, characterized in that the core (3) is made of soft magnetic thin film material and covers the inner walls of the trench (6).

5. The two-phase coupled inductor unit as claimed in claim 4, wherein at least one soft magnetic thin film is formed on each of both side inner walls of the trench (6), and the soft magnetic thin film is formed by electroless plating or electroplating.

6. Two-phase coupled inductive unit according to claim 1, characterized in that the magnetic core (3) is controlled by the shape of the slot (6) whether it is a closed core or not.

7. Two-phase coupled inductor unit according to claim 1, characterized in that the number of slots (6) is plural, and correspondingly, plural magnetic cores (3) are provided.

8. A two-phase coupled inductor unit according to any one of claims 1-7, characterized in that the core (3) is made of a soft magnetic material with a high saturation magnetic flux density, the core liner (4) and the substrate (5) are made of a silicon substrate, a ceramic substrate, a glass substrate and an organic insulating material, and the core (3), the first coil (1) and the second coil (2) are insulated from each other by silicon dioxide, silicon nitride and an organic insulating material.

9. A multi-phase coupled inductor comprising X = n × m two-phase coupled inductor units according to any one of claims 1 to 8, wherein n represents a number of phases, n is a natural number greater than or equal to 2, m is a natural number greater than or equal to 1, and 2m coils are connected in series to form one phase, each coil in the phase belongs to a different two-phase coupled inductor unit, and directions of currents passing through adjacent coils are opposite.

10. The poly-phase coupled inductor according to claim 9, wherein when n is an even number, the poly-phase coupled inductor with symmetrical n-phase circuit arrangement can be formed.

Technical Field

The invention relates to the field of coupling inductors, in particular to a two-phase coupling inductor unit and a multi-phase coupling inductor.

Background

Portable high-performance electronic devices are now available in everyday life, and these portable electronic devices are being developed toward miniaturization and integration. Within the electronic device, a power management module is essential. And the power management module mainly comprises a power management chip and a passive device. With the rapid development of integrated circuit technology, the size of a power management chip is smaller and smaller, and a passive device occupies a larger volume of a power management module, so that the passive device is integrated on a material substrate such as silicon and the like through a micro-nano processing technology, and the integration and the miniaturization of the passive device are necessary.

The traditional plane banded integrated thin film inductor has the advantage of relatively simple process as a passive device, but has obvious defects, firstly, the inductor is manufactured by adopting a micro-nano process layer-by-layer deposition mode, and the thickness of a coil is limited by the structure and the process, so that the direct current resistance is relatively large, the conduction loss is high, and the efficiency of a power supply is not facilitated; secondly, the traditional magnetic core of the planar strip-shaped thin film inductor is also manufactured in a micro-nano process layer-by-layer deposition mode, so that the laminated magnetic core is difficult to realize, and the upper and lower connecting structures of the magnetic core are not ideal, so that larger local eddy current loss can be generated; meanwhile, the connecting point of the traditional planar integrated inductor and the coil layer are on the same metal layer, so that the traditional planar integrated inductor occupies larger chip area and is not beneficial to improving the inductor density and the current density.

Disclosure of Invention

Aiming at the defects in the prior art, the invention provides a laminated magnetic core which can realize integration of inductance through a micro-nano process so as to effectively improve the density of the inductance and the current density, realize smaller direct current resistance, reduce conduction loss and conveniently realize ideal lamination; and meanwhile, the flexible arrangement and connection mode of the upper and lower connection points are favorable for realizing multiphase coupling integrated inductance and are convenient for monolithic integration and stacking with a power supply control chip.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a two-phase coupling inductance unit, includes first coil, second coil, magnetic core liner, substrate, first coil, second coil and magnetic core liner all place perpendicularly on the substrate, the magnetic core liner surrounds first coil and second coil with the ring-type, the sculpture has the slot on the magnetic core liner, the magnetic core sets up in the slot, magnetic core, first coil) and second coil are insulating each other, the current direction through first coil and second coil is opposite, if the current direction through first coil is from the top down, then the current direction through the second coil is from bottom up. Compared with the traditional planar three-dimensional structure, the structure with the vertical coil and the magnetic core has the advantages of high inductance density and high current density; the coupling inductance coil is vertical to the substrate, and compared with a traditional planar coil, the sectional area of the coil is larger, and the inductance resistance value is smaller; if a plurality of two-phase coupling inductance units are connected through copper connecting wires, a multi-phase coupling inductance can be obtained; and when the upper and lower connection points of the vertical inductance coil are manufactured, the interconnection line can be manufactured on the same metal layer by the same process, so that the series connection of a plurality of two-phase coupling inductance units is realized, the total inductance value of each phase is improved, or the multi-phase parallel connection is realized, and the power supply load capacity is improved.

Preferably, the inductance coils are manufactured by a through hole process, the cross sections of the two inductance coils are approximately rectangular to reduce the direct current resistance value, namely, four corners of the rectangle are rounded corners to reduce stress, and the shape of the inductance coils is columnar. The magnetic core substrate and the inductance substrate are made of the same material, the etched grooves in the magnetic core substrate and the coil through holes are synchronously formed by the same through hole process, and under the same process, the etching speed is in direct proportion to the cross section area of the etched pattern, so that the etching speed is low due to the fact that the cross section area of the grooves in the magnetic core substrate is small, and the depth of the grooves in the magnetic core substrate is slightly lower than the height of the coil through holes.

Preferably, the magnetic core is filled in the groove, and the method for manufacturing the magnetic core is simple in process and low in cost.

Preferably, the magnetic core is made of a soft magnetic thin film material and is deposited through a micro-nano processing technology to cover the inner walls of the two sides of the groove, the magnetic core is manufactured through the method, the surface area and the volume of the magnetic material of the deposited magnetic core are greatly increased on the premise that the thickness of a single-layer magnetic core is not increased, and eddy current loss is reduced and inductance density is increased.

Preferably, at least one soft magnetic film is formed on each of the inner walls of both sides of the trench, and the soft magnetic film is formed by electroless plating or electroplating. The method can make the thickness of the soft magnetic film uniform.

Preferably, the magnetic core is an ideal closed magnetic core, and the magnetic core controls whether the magnetic core is closed or not through the groove shape. The optimized closed magnetic core can effectively improve the inductance density, reduce magnetic leakage and avoid local eddy current loss caused by a non-ideal closed magnetic core in the integrated inductance with a planar three-dimensional structure.

Preferably, the groove can be provided in plurality, and correspondingly, the groove also has a plurality of magnetic cores. Increasing the number of slots is equivalent to increasing the number of layers of the magnetic core, thereby further increasing the inductance.

Preferably, the core material is a soft magnetic material with high saturation magnetic flux density, the core liner and the substrate are made of a silicon substrate, a ceramic substrate, a glass substrate and an organic insulating material substrate, and the materials for insulating the core, the first coil and the second coil are silicon dioxide, silicon nitride and an organic insulating material. The magnetic core is made of soft magnetic material with high saturation magnetic flux density, so that the inductance density and the current density can be effectively improved. The magnetic core, the magnetic core lining body, the substrate and the insulating layer are made of the materials, and the micro-nano processing technology can be adopted for manufacturing.

A multi-phase coupling inductor is composed of X = n × m two-phase coupling inductor units in series and parallel connection, n represents the number of phases, n is a natural number greater than or equal to 2, m is a natural number greater than or equal to 1, 2m coils are connected in series to form one phase, each coil in the phase belongs to different two-phase coupling inductor units, and the directions of currents passing through the two coils in each two-phase coupling unit are opposite. The multiphase coupling inductor manufactured by the technical scheme can effectively improve the inductor density and the current density.

Preferably, when n is an even number, n-phase circuit arrangement symmetrical multi-phase coupling inductors are formed, and the balance between the phases can be ensured by arranging symmetrical multi-phase coupling inductors.

The two-phase coupling inductance unit and the multi-phase coupling inductance have the advantages of high inductance density and high current density compared with the traditional planar three-dimensional structure; connecting a plurality of two-phase coupling inductance units through copper connecting wires to obtain a multi-phase coupling inductance; when the upper and lower connection points of the vertical inductance coil are manufactured, the interconnection line can be manufactured on the same metal layer by the same process, so that the series connection of a plurality of two-phase coupling inductance unit inductance units is realized, the total inductance value of each phase is improved, or the multi-phase parallel connection is realized, and the power supply load capacity is improved; two coils in the two-phase coupling unit can be connected in parallel to realize the function of the traditional single inductor, and a plurality of units can be connected in series to improve the inductance; the micro-nano processing technology is adopted for generation, and the micro-nano processing technology is easy to integrate into a switching power supply.

Drawings

Fig. 1 is a schematic structural diagram of a two-phase coupling inductance unit according to embodiment 1 of the present invention.

Fig. 2 is a perspective view in half section of fig. 1.

Fig. 3a, 3b, 3c, 3d, and 3e are process diagrams illustrating the cross-section of fig. 2.

Fig. 4 is a schematic perspective view of a two-phase coupling inductor unit according to embodiment 2 of the present invention.

FIG. 5 is a top view of a magnetic core according to example 3 of the present invention.

Fig. 6 is a top view of a trench structure according to embodiment 4 of the present invention.

Fig. 7 is a top view of a two-phase coupling inductor according to embodiment 5 of the present invention.

Fig. 8 is a top view of a three-phase coupling inductor according to embodiment 6 of the present invention.

Fig. 9 is a top view of a structure of a four-phase coupled inductor according to embodiment 7 of the present invention.

Fig. 10 is a top view of a symmetrical two-phase coupling inductor according to embodiment 8 of the present invention.

Fig. 11 is a schematic perspective view of embodiment 8 of the present invention.

Fig. 12 is a top view of a series three-phase coupling inductor according to embodiment 9 of the present invention.

Fig. 13 is a schematic perspective view of embodiment 9 of the present invention.

Fig. 14 is a top view of a symmetrical four-phase coupled inductor according to embodiment 10 of the present invention.

Fig. 15 is a schematic perspective view of embodiment 10 of the present invention.

Fig. 1, a first coil; 2. a second coil; 3. a magnetic core; 4. a magnetic core liner; 5. a substrate; 6. a trench; 7. an insulating layer; 8. a lower layer wire; 9. and an upper layer of wires.

Detailed Description

The invention is further described below with reference to fig. 1-15 and the specific embodiments.