阅读说明：本技术 新型二维光纤阵列及其制作方法 (Novel two-dimensional optical fiber array and manufacturing method thereof ) 是由 刘勇 张丽丹 陈一博 于 2020-07-16 设计创作，主要内容包括：本发明公开了新型二维光纤阵列及其制作方法。属于二维光纤阵列技术领域,光纤排列整齐；任意两根光纤都易于交换位置布置,包括单晶硅片的基板和夹具,在基板的上下两个表面上分别设有若干个V槽,在每个V槽内定位有光纤,在基板的上下两个表面上分别固定连接有压板,压板将光纤固定在V槽内；基板上下表面上的若干个V槽均为左右间隔均匀布置,并且基板上表面上的若干个V槽与基板下表面上的若干个V槽一对一上下正对布置；夹具固定夹在压板上。(The invention discloses a novel two-dimensional optical fiber array and a manufacturing method thereof. The optical fiber array belongs to the technical field of two-dimensional optical fiber arrays, and optical fibers are arranged neatly; any two optical fibers are easy to exchange position and are arranged, the optical fibers comprise a substrate of a monocrystalline silicon piece and a clamp, a plurality of V-shaped grooves are respectively arranged on the upper surface and the lower surface of the substrate, the optical fibers are positioned in each V-shaped groove, pressing plates are respectively and fixedly connected to the upper surface and the lower surface of the substrate, and the pressing plates fix the optical fibers in the V-shaped grooves; the V-shaped grooves on the upper surface and the lower surface of the substrate are uniformly arranged at left and right intervals, and the V-shaped grooves on the upper surface of the substrate and the V-shaped grooves on the lower surface of the substrate are oppositely arranged one by one up and down; the clamp is fixedly clamped on the pressure plate.)

1. The novel two-dimensional optical fiber array comprises a substrate of a monocrystalline silicon wafer and a clamp, and is characterized in that a plurality of V-shaped grooves are respectively formed in the upper surface and the lower surface of the substrate, an optical fiber is positioned in each V-shaped groove, pressing plates are respectively and fixedly connected to the upper surface and the lower surface of the substrate, and the optical fibers are fixed in the V-shaped grooves by the pressing plates; the V-shaped grooves on the upper surface and the lower surface of the substrate are uniformly arranged at left and right intervals, and the V-shaped grooves on the upper surface of the substrate and the V-shaped grooves on the lower surface of the substrate are oppositely arranged one by one up and down; the clamp is fixedly clamped on the pressure plate.

2. The novel two-dimensional optical fiber array of claim 1, wherein the number of the V-grooves on the upper surface of the substrate and the number of the V-grooves on the lower surface of the substrate are 4 respectively.

3. The novel two-dimensional optical fiber array according to claim 1, wherein the pressing plate comprises a groove on the pressing plate opposite to each V-shaped groove, the center line of the groove is parallel to the groove center line of the V-shaped groove, a vertical hole is arranged in the middle of the top surface of the groove, a horizontal half through hole is horizontally arranged on the right inner hole wall of the vertical hole towards the right, a threaded hole communicated with the outer surface of the pressing plate is further arranged at the right end of the horizontal half through hole, and the lower end of the threaded hole falls below the horizontal half through hole; a vertical chute is arranged on the left inner hole wall of the threaded hole;

a wedge-shaped block is vertically arranged in the vertical sliding groove in a sliding manner, and the right end of the wedge-shaped block is positioned in the threaded hole; a side bolt is spirally arranged in the threaded hole, the front end of the side bolt is rotatably connected to the wedge-shaped block, and the wedge-shaped block can slide up and down along the vertical sliding groove under the driving of the side bolt;

a left sliding block, an extrusion spring and a right sliding block are sequentially arranged in the horizontal half through hole from left to right, and the right end of the right sliding block is extruded on the wedge-shaped block;

a vertical sliding rod is arranged in the vertical hole in a vertical sliding manner, a pressing block is arranged in the groove in a vertical sliding manner, and the vertical sliding rod is fixedly connected to the upper surface of the pressing block; the left end of the left slider is extruded on the right side surface of the vertical sliding rod;

be equipped with the internal thread on the upper end pore wall in vertical hole, be equipped with the bolt No. one at the vertical downthehole screw fit that is equipped with internal thread department, rotate at the lower extreme of bolt and be connected with the rotation slider, the both ends difference fixed connection of a spring on the lower surface of turning block and the upper surface of vertical slide bar.

4. The method for manufacturing the novel two-dimensional optical fiber array according to claim 1, wherein the manufacturing method comprises the following steps:

step one, adopting an outsourced double-sided polished monocrystalline silicon piece as a substrate, cleaning the substrate by using a cleaning solution, and drying by using an oven;

step two, manufacturing a mask, selecting a material with a high etching selectivity ratio to a substrate material as the mask, and depositing mask layers on two surfaces of the substrate through a CVD (chemical vapor deposition) process or a PVD (physical vapor deposition) process, or using a specific photoresist as the mask;

step three, manufacturing a two-dimensional V-shaped groove, etching the V-shaped groove on both surfaces of the substrate by adopting photoetching and wet etching processes according to the design pattern, and removing the mask layer by adopting etching or wet etching technology;

scribing, namely cutting the substrate to a preset specification according to a design drawing by using a high-precision scribing machine.

Step five, detection, namely, high-precision detection equipment is adopted to carry out specification inspection on the scribed product, wherein the specification inspection comprises depth, diameter and angle; after the V-shaped groove reaching the qualified standard is measured, the V-shaped groove is used as an optical fiber array substrate, and the subsequent packaging step is continued;

sixthly, positioning and packaging the optical fiber, arranging the optical fiber into a V-shaped groove, and pressing and fixing the optical fiber by using a pressing plate;

step seven, grinding and polishing the cross section of the optical fiber array; loading the semi-finished product optical fiber array subjected to the sixth step into a clamp, and performing coarse grinding, fine grinding and polishing processes on grinding equipment;

and step eight, detecting the optical fiber array. And detecting the optical fiber array which completes the seventh step by adopting high-precision detection equipment, wherein the detection comprises scratch detection, incomplete detection and angle detection.

And step nine, warehousing the optical fiber array qualified for detection.

Technical Field

The invention relates to the technical field of two-dimensional optical fiber arrays, in particular to a novel two-dimensional optical fiber array and a manufacturing method thereof.

Background

Fiber arrays are a key component of critical devices in fiber optic communications. The current fiber array is a single-layer fiber array formed by arranging a row of fibers in parallel on a quartz or glass material and fixing the fibers with glue and a cover plate. Any two optical fibers of the manufactured optical fiber array cannot be arranged at the same position, and the optical fiber array is inconvenient to use.

Disclosure of Invention

The invention provides a fiber array which is orderly arranged in order to solve the defect that any two fibers of the manufactured fiber array can not be arranged at the same position in the existing fiber array; any two optical fibers are easy to exchange position arrangement, and the novel two-dimensional optical fiber array is convenient to use and good in reliability and the manufacturing method thereof.

In order to achieve the purpose, the invention adopts the following technical scheme:

the novel two-dimensional optical fiber array comprises a substrate of a monocrystalline silicon wafer and a clamp, wherein a plurality of V-shaped grooves are respectively formed in the upper surface and the lower surface of the substrate, an optical fiber is positioned in each V-shaped groove, pressing plates are respectively and fixedly connected to the upper surface and the lower surface of the substrate, and the optical fibers are fixed in the V-shaped grooves by the pressing plates; the V-shaped grooves on the upper surface and the lower surface of the substrate are uniformly arranged at left and right intervals, and the V-shaped grooves on the upper surface of the substrate and the V-shaped grooves on the lower surface of the substrate are oppositely arranged one by one up and down; the clamp is fixedly clamped on the pressure plate.

Because the V-shaped grooves are uniformly distributed, the optical fibers are arranged orderly; any two optical fibers are easy to exchange position arrangement, and the optical fiber connector is convenient to use and good in reliability. The optical fibers are arranged on the upper surface and the lower surface of the substrate, so that the number of the optical fibers is increased, the size of the packaged optical fiber array is small, and the integration level is high. The coupling loss is small, the production efficiency is high, the production cost is low, and the integration and miniaturization of the optical fiber array device product are facilitated.

Preferably, the number of the V-grooves on the upper surface of the substrate and the number of the V-grooves on the lower surface of the substrate are 4, respectively.

Preferably, the pressing plate comprises a groove arranged on the pressing plate opposite to each V groove, the central line of each groove is parallel to the groove center line of each V groove, a vertical hole is arranged in the middle of the top surface of each groove, a horizontal half through hole is horizontally arranged on the inner hole wall on the right side of each vertical hole towards the right, a threaded hole communicated with the outer surface of the pressing plate is further arranged at the right end of each horizontal half through hole, and the lower end of each threaded hole falls below the corresponding horizontal half through hole; a vertical chute is arranged on the left inner hole wall of the threaded hole;

a wedge-shaped block is vertically arranged in the vertical sliding groove in a sliding manner, and the right end of the wedge-shaped block is positioned in the threaded hole; a side bolt is spirally arranged in the threaded hole, the front end of the side bolt is rotatably connected to the wedge-shaped block, and the wedge-shaped block can slide up and down along the vertical sliding groove under the driving of the side bolt;

a left sliding block, an extrusion spring and a right sliding block are sequentially arranged in the horizontal half through hole from left to right, and the right end of the right sliding block is extruded on the wedge-shaped block;

a vertical sliding rod is arranged in the vertical hole in a vertical sliding manner, a pressing block is arranged in the groove in a vertical sliding manner, and the vertical sliding rod is fixedly connected to the upper surface of the pressing block; the left end of the left slider is extruded on the right side surface of the vertical sliding rod;

be equipped with the internal thread on the upper end pore wall in vertical hole, be equipped with the bolt No. one at the vertical downthehole screw fit that is equipped with internal thread department, rotate at the lower extreme of bolt and be connected with the rotation slider, the both ends difference fixed connection of a spring on the lower surface of turning block and the upper surface of vertical slide bar.

The extrusion force of the left end of the left sliding block on the right side surface of the vertical sliding rod can be adjusted through the side bolt, and the downward pressing distance and the pressing force of the pressing block are adjusted through the first bolt. The size of the force of pressing the pressing block on the optical fibers can be manually adjusted, and each optical fiber can be firmly pressed in the corresponding V-shaped groove. The optical fibers in each V-groove are not necessarily all equal in diameter, and the optical fibers with different diameters can be fixed in the grooves on the substrate through the structure. The limitation that the practical diameter of the optical fiber is completely equal in an optical fiber array is reduced, and the expansibility is good. One optical fiber can be taken out of the V groove by the spin and the spin of the side bolt, and the optical fiber can be installed in the required V groove. The scheme can install the optical fiber into the required V-shaped groove without glue, and can also realize that the optical fiber is placed in which V-shaped groove to be completely freely determined by a user, thereby greatly improving the flexibility of the optical fiber array.

According to the manufacturing method of the novel two-dimensional optical fiber array, the manufacturing method comprises the following steps:

step one, adopting an outsourced double-sided polished monocrystalline silicon piece as a substrate, cleaning the substrate by using a cleaning solution, and drying by using an oven;

in particular, the data of the thickness, crystal orientation, flatness and surface roughness of the silicon wafer are required to meet the design requirements.

Step two, manufacturing a mask, selecting a material with a high etching selectivity ratio to a substrate material as the mask, and depositing mask layers on two surfaces of the substrate through a CVD (chemical vapor deposition) process or a PVD (physical vapor deposition) process, or using a specific photoresist as the mask;

step three, manufacturing a two-dimensional V-shaped groove, etching the V-shaped groove on both surfaces of the substrate by adopting photoetching and wet etching processes according to the design pattern, and removing the mask layer by adopting etching or wet etching technology;

particularly, patterns on two sides of the silicon wafer are positioned by using a positioning edge, a positioning mark and an alignment method.

Scribing, namely cutting the substrate to a preset specification according to a design drawing by using a high-precision scribing machine.

Step five, detection, namely, high-precision detection equipment is adopted to carry out specification inspection on the scribed product, wherein the specification inspection comprises depth, diameter and angle; after the V-shaped groove reaching the qualified standard is measured, the V-shaped groove is used as an optical fiber array substrate, and the subsequent packaging step is continued;

sixthly, positioning and packaging the optical fiber, arranging the optical fiber into a V-shaped groove, and pressing and fixing the optical fiber by using a pressing plate;

during packaging, the steps of cleaning optical fibers, fixing substrates, fixing pressing plates, discharging the optical fibers, injecting glue, curing and baking are required, and the packaging process has some differences according to different packaging equipment.

Step seven, grinding and polishing the cross section of the optical fiber array; loading the semi-finished product optical fiber array subjected to the sixth step into a clamp, and performing coarse grinding, fine grinding and polishing processes on grinding equipment;

the end face of the optical fiber array is ground into an 8-degree inclined plane, and the inclined plane of the end face of the optical fiber array can be customized according to specific requirements.

And step eight, detecting the optical fiber array. And detecting the optical fiber array which completes the seventh step by adopting high-precision detection equipment, wherein the detection comprises scratch detection, incomplete detection and angle detection.

And step nine, warehousing the optical fiber array qualified for detection.

The invention can achieve the following effects:

the optical fibers of the invention are arranged neatly; any two optical fibers are easy to exchange position arrangement, and the optical fiber connector is convenient and flexible to use and good in reliability.

Drawings

FIG. 1 is a schematic diagram of the present invention for depositing masks on two surfaces of a substrate.

FIG. 2 is a schematic structural diagram of etching a V-groove on a substrate by photolithography and wet etching processes according to the present invention.

FIG. 3 is a schematic diagram of a completed optical fiber array substrate according to the present invention.

FIG. 4 is a schematic view of the fiber being discharged into a V-groove during packaging according to the present invention.

FIG. 5 is a schematic diagram of a packaged fiber array of the present invention.

FIG. 6 is a partial cross-sectional schematic view at the platen of the present invention.

Detailed Description

The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings.