阅读说明：本技术 一种应用于全自动气动控制装置的真空源稳压系统 (Vacuum source pressure stabilizing system applied to full-automatic pneumatic control device ) 是由 崔利兴 邓永峰 黄森辰 于 2020-08-27 设计创作，主要内容包括：本发明涉及一种应用于全自动气动控制装置的真空源稳压系统,包括壳体、设置在壳体外部的真空管路接口及设置在壳体内部的空腔、连通真空管路接口及空腔的侧流道、顶部流道、第一内流道及第二内流道；所述侧流道内部分布有三个单向阀；所述第一内流道与第二内流道分别独立与顶部流道及空腔相连通；本发明充分利用了壳体周围的有限空间和体积,设计成腔室结构,并在腔室内设置了由单向阀构建的三级稳压结构,从而构成真空源稳压系统,实现了一体化的结构设计,在结构上更加紧凑,并充分降低了零部件的种类和数量,可靠性更高。(The invention relates to a vacuum source pressure stabilizing system applied to a full-automatic pneumatic control device, which comprises a shell, a vacuum pipeline interface arranged outside the shell, a cavity arranged inside the shell, a side runner, a top runner, a first inner runner and a second inner runner, wherein the side runner, the top runner, the first inner runner and the second inner runner are communicated with the vacuum pipeline interface and the cavity; three one-way valves are distributed in the side flow passage; the first inner flow passage and the second inner flow passage are respectively and independently communicated with the top flow passage and the cavity; the invention fully utilizes the limited space and volume around the shell, designs the shell into a cavity structure, and arranges a three-stage pressure stabilizing structure constructed by a one-way valve in the cavity, thereby forming a vacuum source pressure stabilizing system, realizing the integrated structural design, having more compact structure, fully reducing the types and the number of parts and having higher reliability.)

1. The utility model provides a be applied to vacuum source steady voltage system of full-automatic pneumatic control device which characterized in that: the device comprises a shell, a vacuum pipeline interface arranged outside the shell, a cavity arranged inside the shell, a side runner communicated with the vacuum pipeline interface and the cavity, a top runner, a first inner runner and a second inner runner; a one-way valve is arranged in the side flow passage; the first inner flow passage and the second inner flow passage are respectively and independently communicated with the top flow passage and the cavity.

2. The vacuum source pressure stabilizing system applied to the full-automatic pneumatic control device according to claim 1, characterized in that: the upper end face of the shell is covered with a sealing cover plate, and the vacuum pipeline interface is arranged on the lower end face of the shell; the side flow channels are distributed along the circumferential direction in the shell, circulate in an S shape and extend from one end of the vacuum pipeline interface to the upper end face of the shell; the top runner is arranged on the upper end surface of the shell in an arc shape and is communicated with the side runner through the first vacuum inlet and outlet; the first inner flow channel is arranged in the shell along the central axis direction of the shell, the upper end of the first inner flow channel is communicated with the top flow channel through a second vacuum inlet and outlet, a horizontal flow channel is arranged between the lower end of the first inner flow channel and the cavity, the horizontal flow channel is communicated with the first inner flow channel through a third vacuum inlet and outlet, and the horizontal flow channel is communicated with the cavity through a fourth vacuum inlet and outlet; the second inner flow channel is arranged inside the shell along the direction of the central axis of the shell, the upper end of the second inner flow channel is communicated with the top flow channel through a fifth vacuum inlet and outlet, and the lower end of the second inner flow channel is communicated with the cavity through a sixth vacuum inlet and outlet.

3. The vacuum source pressure stabilizing system applied to the full-automatic pneumatic control device according to claim 2, characterized in that: the side runner comprises a first cavity, a second cavity, a third cavity, a fourth cavity, a fifth cavity, a sixth cavity and a seventh cavity which are respectively arranged along the central axis direction of the shell, the lower end of the first cavity is communicated with the vacuum pipeline interface, and the communicated positions of the first cavity, the second cavity, the third cavity, the fourth cavity, the fifth cavity, the sixth cavity and the seventh cavity are sequentially staggered up and down; the check valves are respectively arranged in the first chamber, the third chamber and the fifth chamber.

4. The vacuum source pressure stabilizing system applied to the full-automatic pneumatic control device according to claim 3, characterized in that: the first cavity, the third cavity and the fifth cavity are internally provided with a flow guide block which is arranged in an integrated structure with the shell, the upper end of the flow guide block is funnel-shaped, the middle part of the flow guide block is provided with a flow guide hole, the one-way valve is fixed at the lower end of the flow guide block and comprises a valve seat, a first corrugated diaphragm fixed between the flow guide block and the valve seat, and a plurality of screw rods which penetrate through the valve seat and the first corrugated diaphragm and are connected with the flow guide block; the section of the valve seat along the vertical direction is in a shape of Chinese character 'shan', and an annular cavity is formed in the middle of the valve seat; the middle part of the first corrugated diaphragm is horizontal and is positioned at the lower end of the flow guide hole, and is abutted against the lower end surface of the flow guide block, and the position of the side edge, which is opposite to the annular cavity, is concave along the annular shape; the screw rods are distributed annularly, penetrate through the lower end face of the annular cavity and the concave first corrugated diaphragm, penetrate through the screw rods and the first corrugated diaphragm in a non-contact mode, first through grooves are formed in the side edges of the screw rods, and second through grooves are formed in the two sides of the penetrating positions of the screw rods and the valve seat.

5. The vacuum source pressure stabilizing system applied to the full-automatic pneumatic control device according to claim 3, characterized in that: the cavity is internally provided with a second corrugated diaphragm and a valve rod connected with the second corrugated diaphragm, the second corrugated diaphragm divides the cavity into an upper cavity and a lower cavity, the fourth vacuum inlet and outlet is communicated with the lower cavity, and the sixth vacuum inlet and outlet is communicated with the upper cavity.

Technical Field

The invention relates to the technical field of pneumatic controllers applied to a vacuum sewage continuous collection, temporary storage and periodic conveying system, wherein a pneumatic controller is used for being connected with a vacuum blowoff valve and controlling the vacuum blowoff valve to work, and has the functions of ventilation, water collection, drainage, vacuum source pressure stabilization and the like.

Background

A vacuum sewage continuous collection, temporary storage and periodic conveying system (namely, a vacuum well) is a system for collecting and discharging domestic sewage for treatment, the main working principle is that the domestic sewage from a building is conveyed to a far sewage pool or a vacuum collection and conveying pipeline system by a pipeline based on a vacuum or negative pressure airflow conveying force principle that one end sucks air and the other end discharges air, a temporary sewage storage tank is adopted in the process, the sewage tank is provided with an inlet connected with a sewage port of the building, a sewage suction inlet connected with a vacuum sewage conveying pipeline, and a vacuum sewage valve connecting the sewage suction inlet and the vacuum sewage conveying pipeline; the vacuum blowoff valve is provided with a control device, the basic operation process of the control device is that when the sewage level in the liquid storage tank reaches a first preset value, the controller applies vacuum force to the vacuum blowoff valve to suck and empty the sewage until the sewage level in the sewage tank falls to another preset value, and the control system closes the vacuum blowoff valve, and the device is the full-automatic pneumatic control device related in the invention.

In the technical field of liquid or sewage collection, the technology of collecting liquid or sewage by using a vacuum technology is a known technology, the technology accumulation time in China is short, the technology is developed rapidly only in recent years, and compared with the long-term development in foreign countries, the technology has a wide development space, wherein the technology is more finely divided into various component systems in the field, including a full-automatic pneumatic control device.

The full-automatic pneumatic control device relates to the circulation of a vacuum pipeline, and the pressure stabilizing effect of a vacuum source directly influences the controllability and stability of the whole equipment; at present, the known technical scheme for realizing the pressure stabilization of the vacuum source is a split type vacuum source pressure stabilization and drainage device, namely the device is three devices which are independently arranged with a vacuum blowoff valve and a pneumatic control controller device and are connected by an air pipe; referring to the working principle and the structural design in the invention patent with the U.S. Pat. No. US4171853 and the practical application in the invention patent with the U.S. Pat. No. US5570715, there is a major structural form in the prior art, namely, a duckbill valve type drainage solution independent from the lower housing of the vacuum sewer valve, which has the following defects:

(1) the design scheme of the independent structure is easy to damage in the installation process;

(2) the duckbill one-way valve has poor sealing effect and is easily influenced by sewage;

(3) the voltage stabilizing effect is not good; in the invention patent of US4171853, when the pneumatic controller and the vacuum blowoff valve are closed or stand-by STAT-OFF (closed state), the pressure in the 34 surge chamber of the small pipe communicating pipe 3 below 34 is equal to vacuum; when the pneumatic controller and the vacuum blowoff valve are opened (when the pneumatic controller and the vacuum blowoff valve are changed from closed to open), the sewage and air mixture in the pipeline 3 passes through the lower pipeline of the 34, at the moment, the pressure at the inlet of the opposite pipeline in the pipeline 3 connected with the 34 pressure stabilizing chamber increases the vacuum value due to the existence of the sewage and air mixture (offsetting partial vacuum), at the moment, the pressure difference exists between the 34 and the pipeline 3, and the vacuum value in the 34 is lower, so that the sewage and air rapidly enter the 34 pressure stabilizing chamber, and impurities in the sewage can cause the poor closure of the diaphragm 39 of the duckbill one-way valve assembly 38 in the process of entering impact, so that water vapor enters the interior of the valve body when the valve and the controller are closed; more importantly, the duck-beak type one-way valve can not be closed effectively, so that the voltage stabilizing effect of the voltage stabilizer is greatly reduced, and the effect is very little.

Therefore, the invention develops the vacuum source pressure stabilizing system applied to the full-automatic pneumatic control device. The method solves the problems in the prior art, and a technical scheme which is the same as or similar to the method is not found through retrieval.

Disclosure of Invention

The invention aims to: the utility model provides a vacuum source steady voltage system for full-automatic pneumatic control device to solve the problem that structural design is unreasonable among the prior art and lead to steady voltage reliability and stability poor.

The technical scheme of the invention is as follows: a vacuum source pressure stabilizing system applied to a full-automatic pneumatic control device comprises a shell, a vacuum pipeline interface arranged outside the shell, a cavity arranged inside the shell, a side runner, a top runner, a first inner runner and a second inner runner, wherein the side runner, the top runner, the first inner runner and the second inner runner are communicated with the vacuum pipeline interface and the cavity; a one-way valve is arranged in the side flow passage; the first inner flow passage and the second inner flow passage are respectively and independently communicated with the top flow passage and the cavity.

Preferably, the upper end face of the shell is covered with a sealing cover plate, and the vacuum pipeline interface is arranged on the lower end face of the shell; the side flow channels are distributed along the circumferential direction in the shell, circulate in an S shape and extend from one end of the vacuum pipeline interface to the upper end face of the shell; the top runner is arranged on the upper end surface of the shell in an arc shape and is communicated with the side runner through the first vacuum inlet and outlet; the first inner flow channel is arranged in the shell along the central axis direction of the shell, the upper end of the first inner flow channel is communicated with the top flow channel through a second vacuum inlet and outlet, a horizontal flow channel is arranged between the lower end of the first inner flow channel and the cavity, the horizontal flow channel is communicated with the first inner flow channel through a third vacuum inlet and outlet, and the horizontal flow channel is communicated with the cavity through a fourth vacuum inlet and outlet; the second inner flow channel is arranged inside the shell along the direction of the central axis of the shell, the upper end of the second inner flow channel is communicated with the top flow channel through a fifth vacuum inlet and outlet, and the lower end of the second inner flow channel is communicated with the cavity through a sixth vacuum inlet and outlet.

Preferably, the side runner comprises a first cavity, a second cavity, a third cavity, a fourth cavity, a fifth cavity, a sixth cavity and a seventh cavity which are respectively arranged along the central axis direction of the shell, the lower end of the first cavity is communicated with the vacuum pipeline interface, and the communicated positions of the first cavity, the second cavity, the third cavity, the fourth cavity, the fifth cavity, the sixth cavity and the seventh cavity are sequentially staggered up and down; the check valves are respectively arranged in the first chamber, the third chamber and the fifth chamber.

Preferably, the first chamber, the third chamber and the fifth chamber are internally provided with a flow guide block which is integrally arranged with the shell, the upper end of the flow guide block is funnel-shaped, the middle part of the flow guide block is provided with a flow guide hole, the one-way valve is fixed at the lower end of the flow guide block and comprises a valve seat, a first corrugated membrane fixed between the flow guide block and the valve seat, and a plurality of screws which penetrate through the valve seat and the first corrugated membrane and are connected with the flow guide block; the section of the valve seat along the vertical direction is in a shape of Chinese character 'shan', and an annular cavity is formed in the middle of the valve seat; the middle part of the first corrugated diaphragm is horizontal and is positioned at the lower end of the flow guide hole, and is abutted against the lower end surface of the flow guide block, and the position of the side edge, which is opposite to the annular cavity, is concave along the annular shape; the screw rods are distributed annularly, penetrate through the lower end face of the annular cavity and the concave first corrugated diaphragm, penetrate through the screw rods and the first corrugated diaphragm in a non-contact mode, first through grooves are formed in the side edges of the screw rods, and second through grooves are formed in the two sides of the penetrating positions of the screw rods and the valve seat.

Preferably, a second corrugated diaphragm and a valve rod connected with the second corrugated diaphragm are arranged in the cavity, the cavity is divided into an upper cavity and a lower cavity by the second corrugated diaphragm, the fourth vacuum inlet and outlet is communicated with the lower cavity, and the sixth vacuum inlet and outlet is communicated with the upper cavity.

Compared with the prior art, the invention has the advantages that:

(1) the invention fully utilizes the limited space and volume around the shell, designs the shell into a cavity structure, and arranges a three-stage pressure stabilizing structure constructed by a one-way valve in the cavity, thereby forming a vacuum source pressure stabilizing system, realizing the integrated structural design, having more compact structure, fully reducing the types and the number of parts and having higher reliability.

(2) Inside intercommunication of vacuum source steady voltage system mainly is through the side runner, the first interior runner and the second interior runner realization that top runner and mutual independence set up, the side runner is the circulation of S type, the circulation route has been increased, and set up tertiary steady voltage cavity structure on this circulation route, wherein first cavity is first order steady voltage cavity structure, the third cavity is second level steady voltage cavity structure, the fifth cavity is third level steady voltage cavity structure, tertiary steady voltage cavity structure' S the advantage that sets up lies in: when pressure fluctuation in the first-stage pressure stabilizing cavity is subjected to opening action from the vacuum pipeline joint, pressure fluctuation in the third-stage pressure stabilizing cavity structure cannot be caused, and therefore the reliability and stability of pressure stabilization are achieved.

(3) The side runner, the top runner, the first inner runner and the second inner runner are mainly used for communicating vacuum to realize the circulation of a vacuum pipeline, and have certain water collecting and draining functions.

Drawings

The invention is further described with reference to the following figures and examples:

FIG. 1 is a schematic structural diagram of a vacuum source pressure stabilizing system applied to a fully automatic pneumatic control device according to the present invention;

FIG. 2 is a partial cross-sectional structural view of a vacuum source regulator system for a fully automatic pneumatic control device according to the present invention, corresponding to a side flow passage;

FIG. 3 is a partial cross-sectional structural view of a vacuum source pressure stabilizing system applied to a fully automatic pneumatic control device according to the present invention, corresponding to a cavity;

FIG. 4 is a partial cross-sectional view of the present invention at the cavity;

FIG. 5 is a schematic view of the connection structure of the first chamber, the second chamber, the third chamber and the fourth chamber of the side channel according to the present invention;

FIG. 6 is a schematic view of a communication structure of a fourth chamber, a fifth chamber, a sixth chamber and a seventh chamber of the side channel according to the present invention;

FIG. 7 is a cross-sectional view of the check valve of the present invention;

FIG. 8 is a schematic structural view of a vacuum source regulator system for a fully automatic pneumatic control device according to the present invention with the sealing cover removed;

FIG. 9 is a top view of the top flow channel of the present invention;

FIG. 10 is a schematic view of a communication structure of the first inner fluid passage according to the present invention;

FIG. 11 is a schematic view of a communication structure between a horizontal flow channel and a cavity according to the present invention;

FIG. 12 is a schematic view of the horizontal flow channel of the present invention communicating with the lower end of the first inner flow channel;

FIG. 13 is a schematic view of the second inner flow passage and the first inner flow passage communicating with the top flow passage according to the present invention;

FIG. 14 is a schematic view of a communication structure of a seventh chamber of the first inner flow passage, the second inner flow passage, the top flow passage and the side flow passages according to the present invention;

FIG. 15 is an enlarged view of the upper chamber in communication with the sixth vacuum port and the lower chamber in communication with the fourth vacuum port in accordance with the present invention.

Wherein: 1. the device comprises a shell, 2, a sealing cover plate, 3, a vacuum pipeline interface, 4, a cavity, 5, an upper cavity, 6, a lower cavity, 7, a side flow channel, 8, a first cavity, 9, a second cavity, 10, a third cavity, 11, a fourth cavity, 12, a fifth cavity, 13, a sixth cavity, 14, a seventh cavity, 15, a one-way valve, 16, a flow guide block, 17, a flow guide hole, 18, a valve seat, 19, a first corrugated diaphragm, 20, a screw rod, 21, a first through groove, 22, a second through groove, 23, a top flow channel, 24, a first inner flow channel, 25, a horizontal flow channel, 26 and a second inner flow channel;

and (B) point A: first vacuum inlet and outlet, point B: second vacuum inlet/outlet, point C: third vacuum inlet and outlet, point D: fourth vacuum inlet and outlet, point E: fifth vacuum inlet and outlet, point F: and a sixth vacuum inlet and outlet.

Detailed Description

The present invention will be further described in detail with reference to the following specific examples:

as shown in fig. 1, 2 and 3, a vacuum source pressure stabilizing system applied to a full-automatic pneumatic control device comprises a housing 1, a vacuum pipeline interface 3 arranged outside the housing 1, a cavity 4 arranged inside the housing 1, a side runner 7 communicating the vacuum pipeline interface 3 and the cavity 4, a top runner 23, a first inner runner 24 and a second inner runner 26; wherein the first inner flow passage 24 and the second inner flow passage 26 are respectively and independently communicated with the top flow passage 23 and the cavity 4.

As shown in fig. 1, a sealing cover plate 2 is covered on the upper end face of a shell 1, and a vacuum pipeline interface 3 is arranged on the side edge of the lower end face of the shell 1; as shown in fig. 3, the middle of the housing 1 is provided with a cavity 4, and as the full-automatic pneumatic control device related to the present invention is applied, as shown in fig. 4, the cavity 4 is provided with a second bellow and a valve rod, the second bellow divides the cavity 4 into an upper chamber 5 and a lower chamber 6 which are not communicated with each other, and the working principle thereof is as follows: the upper chamber 5 is communicated with vacuum, and the lower chamber 6 is intermittently communicated with vacuum and air, so that the second corrugated diaphragm moves due to the difference between the upper pressure and the lower pressure, and then the valve rod drives a series of components to work (the second corrugated diaphragm and the valve rod are not required to be protected by the invention, so detailed description of the specific structure of the second corrugated diaphragm and the valve rod is not needed), at the moment, the upper chamber 5 and the lower chamber 6 are communicated with the vacuum pipeline interface 3, and therefore the vacuum source pressure stabilizing system applied to the full-automatic pneumatic control device is created.

In order to fully utilize the space around the casing 1, as shown in fig. 5 and 6, the side runners 7 are circumferentially distributed along the inside of the casing 1 and are in S-shaped circulation, and extend from one end of the vacuum pipeline interface 3 to the upper end surface of the casing 1, and include a first chamber 8, a second chamber 9, a third chamber 10, a fourth chamber 11, a fifth chamber 12, a sixth chamber 13 and a seventh chamber 14 which are respectively arranged along the central axis direction of the casing 1, wherein the lower end of the first chamber 8 is communicated with the vacuum pipeline interface 3, and the communicated positions of the first chamber 8, the second chamber 9, the third chamber 10, the fourth chamber 11, the fifth chamber 12, the sixth chamber 13 and the seventh chamber 14 are sequentially staggered up and down until the upper end of the seventh chamber 14 extends to the upper end surface of the casing 1; referring to fig. 2, check valves 15 are disposed in the first chamber 8, the third chamber 10, and the fifth chamber 12 (i.e., in the regions corresponding to the dashed oval lines in fig. 5 and 6), flow guide blocks 16 integrally disposed with the housing 1 are disposed in the first chamber 8, the third chamber 10, and the fifth chamber 12, the upper end of each flow guide block 16 is funnel-shaped, a flow guide hole 17 is disposed in the middle of each flow guide block, and the check valves 15 are fixed to the lower end of the flow guide blocks 16, as shown in fig. 7, each flow guide block includes a valve seat 18, a first corrugated membrane 19 fixed between the flow guide block 16 and the valve seat 18, and a plurality of screws 20 penetrating through the valve seat 18 and the first corrugated membrane 19 and connected to the flow guide block 16; the section of the valve seat 18 along the vertical direction is in a shape of Chinese character 'shan', and an annular cavity is formed in the middle of the valve seat; the middle part of the first corrugated diaphragm 19 is horizontal and is positioned at the lower end of the flow guide hole 17 and is propped against the lower end surface of the flow guide block 16, and the position of the side edge opposite to the annular cavity is concave along the annular shape; the plurality of screws 20 are distributed annularly, penetrate through the lower end face of the annular cavity and the concave first corrugated diaphragm 19, the screws 20 penetrate through the first corrugated diaphragm 19 in a non-contact mode, a first through groove 21 is formed in the side edge, and second through grooves 22 are formed in the two sides of the penetrating position of the screws 20 and the valve seat 18.

The check valve 15 is under the normality, and the terminal surface under water conservancy diversion hole 17 is sealed to the shutoff of first ripple diaphragm 19 middle part up end, and under operating condition, because the reason of the pressure difference of both ends, when water conservancy diversion hole 17 one side has gas or the ponding of condensing to pass through, pressure can promote first ripple diaphragm 19 middle part and valve seat 18 middle part and laminate mutually, and water conservancy diversion hole 17, first logical groove 21 and second logical groove 22 have realized the intercommunication promptly this moment, can circulate in the corresponding cavity.

As shown in fig. 8 and 9, the top flow passage 23 is disposed in an arc shape on the upper end surface of the housing 1, and is communicated with the upper end of the seventh chamber 14 in the side flow passage 7 through a first vacuum inlet and outlet, which is a point a in fig. 6 and 9.

As shown in fig. 10, the first inner flow passage 24 is disposed inside the casing 1 along the central axis direction of the casing 1, the upper end of the first inner flow passage communicates with the top flow passage 23 through a second vacuum inlet and outlet, which is the point B in the drawing, a horizontal flow passage 25 is disposed between the lower end of the first inner flow passage and the cavity 4, the horizontal flow passage 25 communicates with the first inner flow passage 24 through a third vacuum inlet and outlet, which is the point C in the drawing, and the horizontal flow passage 25 communicates with the cavity 4 through a fourth vacuum inlet and outlet, which is the point D in the drawing; as shown in fig. 11 and 12, the lower part of the cavity 4 is communicated with the horizontal flow passage 25 through the fourth vacuum inlet/outlet, and is communicated with the first inner flow passage 24 through the extension of the horizontal flow passage 25 and the third vacuum inlet/outlet; at this time, the communication path between the vacuum line port 3 and the cavity 4 is: the vacuum line interface 3-the first chamber 8-the second chamber 9-the third chamber 10-the fourth chamber 11-the fifth chamber 12-the sixth chamber 13-the seventh chamber 14-the first vacuum inlet-outlet (point a) -the top runner 23-the second vacuum inlet-outlet (point B) -the first inner runner 24-the third vacuum inlet-outlet (point C) -the horizontal runner 25-the fourth vacuum inlet-outlet (point D) -the cavity 4.

As shown in fig. 13, the second inner flow passage 26 is disposed inside the casing 1 along the central axis direction of the casing 1, the upper end of the second inner flow passage communicates with the top flow passage 23 through a fifth vacuum inlet and outlet, the fifth vacuum inlet and outlet is point E in the figure, the lower end of the second inner flow passage communicates with the cavity 4 through a sixth vacuum inlet and outlet, and the sixth cavity 4 is point F in the figure; at this time, the communication path between the vacuum line port 3 and the cavity 4 is: the vacuum line interface 3-the first chamber 8-the second chamber 9-the third chamber 10-the fourth chamber 11-the fifth chamber 12-the sixth chamber 13-the seventh chamber 14-the first vacuum inlet-outlet (point a) -the top runner 23-the fifth vacuum inlet-outlet (point E) -the second inner runner 26-the sixth vacuum inlet-outlet (point F) -the cavity 4.

Referring to fig. 13 and 14, the dotted lines in the figures are all communication paths inside the housing 1, and the upper ends of the first inner flow channel 24 and the second inner flow channel 26 are communicated with each other through the top flow channel 23 and the seventh chamber 14 of the side flow channel 7, and finally, the communication with the vacuum line interface 3 is realized; as shown in fig. 15, the communication path in the cavity 4 is a communication path, since the second bellows diaphragm divides the cavity 4 into the upper chamber 5 and the lower chamber 6, the upper end and the lower end are independent, the fourth vacuum inlet and the fourth vacuum outlet are communicated with the lower chamber 6, and the sixth vacuum inlet and the sixth vacuum outlet are communicated with the upper chamber 5, so that the first inner flow passage 24 and the second inner flow passage 26 are independent.

The working principle of the invention is as follows:

the vacuum pipeline interface 3 is used for connecting with a vacuum pipeline and communicating vacuum, communication lines of the lower chamber 6 and the vacuum pipeline interface 3 are shown by dotted lines in fig. 11, fig. 10, fig. 6 and fig. 5 in sequence, and the lower chamber 6 is communicated with vacuum at the moment; communication lines between the upper chamber 5 and the vacuum line port 3 are shown by broken lines in fig. 13, 6, and 5 in this order, and at this time, the upper chamber 5 is evacuated; meanwhile, a three-stage pressure stabilizing structure constructed by a check valve 15 is arranged in the first chamber 8, the third chamber 10 and the fifth chamber 12 in the side runner 7, so that first-stage pressure stabilization is formed in the first chamber 8, second-stage pressure stabilization is formed in the third chamber 10, and third-stage pressure stabilization is formed in the fifth chamber 12; meanwhile, condensed water in the shell 1 can be discharged through a communicated route, and the service life of the structure is effectively prolonged.

The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose of the embodiments is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it is therefore desired that the present embodiments be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, without any reference thereto being construed as limiting the claim concerned.