阅读说明：本技术 具有惯性传感器的真空阀 (Vacuum valve with inertial sensor ) 是由 A·施恩莫塞尔 A·霍弗 于 2018-06-28 设计创作，主要内容包括：本发明涉及具有包括至少一个惯性传感器(11a,11b,11c,11d,11e)的传感器组件的真空阀,其中该传感器组件被设计成,其探测与作用于该阀的加速度相关的测量信号。(The invention relates to a vacuum valve having a sensor arrangement comprising at least one inertial sensor (11a,11b,11c,11d,11e), wherein the sensor arrangement is designed such that it detects a measurement signal which is dependent on an acceleration acting on the valve.)