阅读说明：本技术 具有声学传感器的真空阀 (Vacuum valve with acoustic sensor ) 是由 A·施恩莫塞尔 A·加勒 M·兹卡尔 于 2018-06-28 设计创作，主要内容包括：本发明涉及真空阀(1’),具有至少一个声学传感器(10),该声学传感器(10)设计成信息可以作为测量信号通过该声学传感器经由作用于真空阀(1’)的至少一个部件的结构固有声波来产生。(The invention relates to a vacuum valve (1') having at least one acoustic sensor (10), wherein the acoustic sensor (10) is designed such that information can be generated as a measurement signal by the acoustic sensor via a structure-specific sound wave acting on at least one component of the vacuum valve (1').)