阅读说明：本技术 一种基于液态金属的高Q值温度感知Anapole谐振结构 (high-Q-value temperature sensing Anapole resonance structure based on liquid metal ) 是由 文光俊 余华龙 李建 马亮 黄勇军 陈德旭 李贵 张东亮 于 2020-03-20 设计创作，主要内容包括：本发明公开了一种基于液态金属的高Q值温度感知Anapole谐振结构,用于感知探测、辐射控制等技术领域。本发明由具有n×n个高Q值谐振单元按周期排列构成。该种高Q值谐振单元根据静环向偶极矩(Anapole)理论,并结合液态金属的受热膨胀性、流动性等特性设计而成,使该谐振单元具有高Q值特性,能实现较高的温度感知分辨率。同时为了提高温度感知能力,在谐振结构中添加了一个储液结构,从而实现较高的感知灵敏度。(The invention discloses a high-Q-value temperature sensing Anapole resonance structure based on liquid metal, which is used for the technical fields of sensing detection, radiation control and the like. The invention is formed by arranging n multiplied by n high Q value resonance units according to period. The high-Q-value resonance unit is designed according to the static ring dipole moment (Anapole) theory and by combining the characteristics of thermal expansion, fluidity and the like of liquid metal, so that the resonance unit has the characteristic of high Q value and can realize higher temperature sensing resolution. Meanwhile, in order to improve the temperature sensing capability, a liquid storage structure is added in the resonance structure, so that higher sensing sensitivity is realized.)

1. A high-Q-value temperature sensing Anapole resonance structure based on liquid metal is characterized by comprising n multiplied by n unit structures (n is an integer larger than zero) which are arranged in a periodic array and are spaced from each other, wherein the unit structures are formed by injecting the liquid metal into a medium, the liquid metal is wrapped in the medium, the frequency range of the unit structures is 1-40GHz, and the sensing sensitivity of the high-Q-value temperature sensing Anapole resonance structure based on the liquid metal can be adjusted through the size, the shape and the spacing of the unit structures; the unit structure comprises a liquid storage structure, a transverse slender rod, a first longitudinal slender rod and a second longitudinal slender rod, wherein the liquid storage structure and the transverse slender rod are symmetrically arranged, the first longitudinal slender rod and the second longitudinal slender rod are located on the same plane, the first longitudinal slender rod is connected to the liquid storage structure, the two transverse slender rod is connected to two sides of the liquid storage structure respectively, the other end of the transverse slender rod is connected with the second longitudinal slender rod respectively, the second longitudinal slender rod deflects towards the middle part along the direction parallel to the first longitudinal slender rod, the deflection angle is a rotation angle, and the transverse slender rod, the second longitudinal slender rod and the liquid storage structure are connected and combined to form a notched annular structure.

2. The liquid metal-based high-Q temperature sensing Anapole resonant structure of claim 1, wherein the shape of the unit structure is adjustable by: adjusting the rotation angle, adjusting the lengths of the first longitudinal slender rod and the second longitudinal slender rod, adjusting the length of the transverse slender rod, adjusting the size of the liquid storage structure, adjusting the diameters of the transverse slender rod, the first longitudinal slender rod and the second longitudinal slender rod, and adjusting the offset distance of the liquid storage structure and the transverse slender rod.

3. The liquid metal-based high-Q temperature sensing Anapole resonant structure according to claim 2, wherein the arrangement of the unit structures in the array is a square array arrangement or a polygonal array arrangement.

4. The liquid metal-based high-Q temperature sensing Anapole resonant structure according to claim 3, wherein the liquid storage structure is in a regular shape including but not limited to a cube, a cuboid or a sphere, and the notched ring structure is in a shape including but not limited to a notched earth polygonal ring, a notched circular ring or a notched triangular ring.

5. The liquid metal based high-Q temperature sensing Anapole resonant structure of claim 3, wherein the size of the single unit structures in the array is 1-50 mm.

6. The liquid metal based high-Q temperature sensing Anapole resonant structure of claim 3, wherein the spacing between unit structures in the array is 0.5-30 mm.

7. The liquid metal-based high-Q temperature-sensing Anapole resonant structure of claim 3, wherein the rotation angle of the second longitudinal slender rod is-10 to 30 degrees.

8. The liquid metal-based high-Q temperature-sensing Anapole resonant structure of claim 3, wherein the first or second longitudinal filaments are 1-25 mm in length.

9. The liquid metal-based high-Q temperature sensing Anapole resonant structure of claim 3, wherein the length of the transverse slim rod is 0.5mm to 30 mm.

10. The liquid metal-based high-Q temperature sensing Anapole resonant structure of claim 3, wherein the liquid storage structure is a sphere with a radius of 0.1mm to 5 mm.

11. The liquid metal-based high-Q temperature sensing Anapole resonant structure of claim 3, wherein the diameter of the thin rods in the array unit is 0.005 mm-0.4 mm.

12. The liquid metal-based high-Q temperature-sensing Anapole resonant structure according to claim 3, wherein the offset distance between the spheres and the transverse thin rod in the array unit is-5 to +5 mm.

Technical Field

The invention relates to the technical field of sensing detection and radiation control, in particular to a high-Q-value temperature sensing Anapole resonance structure based on liquid metal for temperature sensing detection.

Background

Electromagnetic metamaterials (electromagnetic metamaterials) are artificially synthesized structural materials with singular electromagnetic characteristics, have wide application prospects in the fields of electromagnetism, optics, materials and the like, and provide an effective way for designing and preparing novel devices in the fields of information application such as perception, identification, positioning, communication and the like. The resonance frequency/strength and the like of the electromagnetic metamaterial have strong correlation with unit structure parameters, dielectric material characteristics and surrounding environment factors, so that a novel sensing technology and an implementation method based on the electromagnetic metamaterial can be developed, and the electromagnetic metamaterial can be widely used for sensing and detecting characteristics and changes of media, pressure, humidity, temperature, chemistry, biology and the like in the environment.

The working principle, the realization mechanism, the design method, the test technology, the noise reduction technology and the like of the novel sensing technology are researched, a high-performance wired/wireless temperature sensing device sample based on the mercury-based metamaterial is designed, performance parameters such as temperature sensing sensitivity, resolution and sensing range are verified/calibrated in an experiment, application approaches and technical schemes of the temperature sensing device sample in the technical fields of high-precision sensing, Internet of things, intelligent manufacturing and the like are explored, characteristics of higher sensitivity and resolution are realized, and the method has important application value and significance.

In the field of sensing application based on electromagnetic metamaterials, various novel high-performance sensing technologies and design methods have been developed. The perception principle is as follows: at the resonant working frequency of the electromagnetic metamaterial with the metal structure, a large number of electric field/magnetic field components are gathered inside the basic unit of the electromagnetic metamaterial, so that the macroscopic resonance frequency/intensity characteristic of the electromagnetic metamaterial can be correspondingly changed along with the change of the structural parameters, the characteristics of the dielectric material and the surrounding environment inside the unit, and the sensing monitoring of biology, chemistry, gas, pressure, humidity, temperature and the like can be flexibly realized through an external detection circuit and a processing algorithm.

High Q value, i.e. low energy consumption, from the theoretical formula Q ═ W_{General assembly}/W_{Loss of power}(where W refers to energy), calculated, engineering applications usually obtained by testing the S parameter and using Q ═ f₀/f_3dB(i.e., center frequency/half power bandwidth) to calculate the value of Q. The higher the Q value is at the same center operating frequency, meaning that the narrower the half power bandwidth of the resonance, the sharper the S-parameter curve, and the larger the power change at frequencies other than the center frequency. Therefore, when the S parameter output data of the resonant sensor is acquired, the greater the data discrimination obtained by sampling after the S parameter output data passes through the analog-to-digital converter (ADC), the easier the working center frequency is to be discriminated, and the smaller the error is, namely, the resonant sensor has higher frequency resolution, and can be converted into corresponding temperature resolution according to a formula.

Anapole, also known as static ring dipole moment, was first proposed in 1958 by Zel' dovich. Its importance is widely recognized in nuclear, molecular and atomic physics. The static ring-wise dipole moment can be expressed as a polar current flowing on the torus perpendicular to its axis, producing a static magnetic field that is completely concentrated on the torus. Zel' dovich explains that the weak interaction of atomic parity effects in nuclei is in contrast to the Anapole effect concept, and one can imagine a system with two currents, one j1, running along the ring and the other j2, running along a line perpendicular to the plane of the ring and passing through the center of the ring. The first current ji excites the polar magnetic field H1 along the meridian of the torus, and the magnetic field H2 generated by j2 excites the concentric circles of the torus. This means that the lines of the total magnetic field H form a spiral on the torus. It is clear that for a given torus cross-section, this helix will close at a certain proportion between the currents, achieving a good radiation cancellation between the currents, weakening the coupling effect of the structure and the free space, and thus achieving a high Q value.

The temperature sensing technology based on the thermal expansion coefficient difference is ingenious in structural design and novel, but the deformation caused by the thermal expansion coefficient difference of heterogeneous composite materials is weak, and the temperature sensing technology also has the mechanism defects of small temperature sensing resolution, low sensitivity, small dynamic range and the like, and is only in the theoretical analysis and feasibility research stage at present.

Disclosure of Invention

The invention aims to provide a high-Q-value temperature sensing Anapole resonance structure based on liquid metal, which can generate a resonance Q value of 100-400 and a sensitivity of 10-350 MHz/DEG C at 1-40GHz along with temperature change, and realizes higher sensing sensitivity.

The embodiment of the invention is realized by the following steps:

a high Q value temperature perception Anapole resonance structure based on liquid metal comprises n multiplied by n unit structures (n is an integer larger than zero) which are arranged in a periodic array and are mutually spaced, wherein the unit structures are formed by injecting the liquid metal into a medium, the liquid metal is wrapped in the medium, the medium adopted by the invention is a medium substrate, the frequency range of the unit structure application is 1-40GHz, and the perception sensitivity of the high Q value temperature perception Anapole resonance structure based on the liquid metal can be adjusted by the size, the shape and the spacing of the unit structures; the unit structure comprises a liquid storage structure, transverse thin rods, a first longitudinal thin rod and a second longitudinal thin rod, wherein the liquid storage structure and the transverse thin rods are symmetrically arranged, the first longitudinal thin rod and the second longitudinal thin rod are located on the same plane, the first longitudinal thin rod is connected to the liquid storage structure, the two transverse thin rods are connected to two sides of the liquid storage structure respectively, the other ends of the two transverse thin rods are connected with the second longitudinal thin rod respectively, the two second longitudinal thin rods deflect towards the middle part along the direction parallel to the first longitudinal thin rod, the deflection angle is a rotation angle, and the transverse thin rods, the second longitudinal thin rods and the liquid storage structure are connected and combined to form a notched annular.

In a preferred embodiment of the present invention, the shape of the unit structure can be adjusted by: adjusting the rotation angle, adjusting the lengths of the first longitudinal slender rod and the second longitudinal slender rod, adjusting the length of the transverse slender rod, adjusting the size of the liquid storage structure, adjusting the diameters of the transverse slender rod, the first longitudinal slender rod and the second longitudinal slender rod, and adjusting the offset distance of the liquid storage structure and the transverse slender rod.

In a preferred embodiment of the present invention, the arrangement of the unit structures in the array is a square array arrangement or a polygonal array arrangement.

In a preferred embodiment of the present invention, the liquid storage structure is in a regular shape including but not limited to a cube, a cuboid, or a sphere, and the annular structure of the gap is in a shape including but not limited to a polygonal ring, a circular ring, or a triangular ring; according to a preferred embodiment of the present invention, the array unit structure is in the shape of a combination of a thin cylinder, a sphere and a triangular ring of notches.

In a preferred embodiment of the present invention, the size of the single unit structure in the array is 1-50 mm; according to a preferred embodiment of the invention, the dimensions C of the individual cell structures of the array are 30mm (operating frequency: around 1.9 GHz), 6mm (operating frequency: around 10 GHz), 3mm (operating frequency: around 20 GHz), 1.5mm (operating frequency: around 40 GHz).

In a preferred embodiment of the present invention, the spacing between the unit structures in the array is 0.5-30 mm; according to a preferred embodiment of the invention, the spacing D between the cell structures of the array is D2, D is 5mm (operating frequency: about 1.9 GHz), 1mm (operating frequency: about 10 GHz), 0.5mm (operating frequency: about 20 GHz), 0.75mm (operating frequency: about 40 GHz).

In a preferred embodiment of the present invention, the rotation angle of the second longitudinal slender rod is-10 to 30 degrees; according to a preferred example of the present invention, the rotation angle θ of the second longitudinal thin rods in the unit structure of the array is 20 degrees.

In a preferred embodiment of the present invention, the length of the first longitudinal slender rod or the second longitudinal slender rod is 1mm to 25 mm; according to the preferred embodiment of the present invention, the length l of the first longitudinal thin rod or the second longitudinal thin rod in the unit structure of the array is 9-21 mm (operating frequency: about 1.9 GHz), 1.8-4.2 mm (operating frequency: about 10 GHz), 0.9-2.1 mm (operating frequency: about 20 GHz), 0.45-1.05 mm (operating frequency: about 40 GHz), that is, the length variation range of the first longitudinal thin rod and the second longitudinal thin rod with the temperature variation.

In a preferred embodiment of the present invention, the length of the transverse slender rod is 0.5mm to 30 mm; according to a preferred embodiment of the present invention, the length a of the transverse thin bar in the unit structure of the array is 20mm (operating frequency: about 1.9 GHz), 4mm (operating frequency: about 10 GHz), 2mm (operating frequency: about 20 GHz), 1mm (operating frequency: about 40 GHz).

In a preferred embodiment of the present invention, the liquid storage structure is a sphere, and the radius of the sphere is 0.1mm to 5 mm; according to the preferred embodiment of the present invention, the radius R of the liquid storage sphere in the unit structure of the array is 4mm (operating frequency: about 1.9 GHz), 0.8mm (operating frequency: about 10 GHz), 0.4mm (operating frequency: about 20 GHz), 0.2mm (operating frequency: about 40 GHz).

In a preferred embodiment of the present invention, the diameter of the transverse thin rod, the diameter of the first longitudinal thin rod and the diameter of the second longitudinal thin rod in the array unit are equal and are 0.005mm to 0.4 mm; according to a preferred embodiment of the present invention, the diameter r of the transverse filaments, the first longitudinal filaments and the second longitudinal filaments in the unit structure of the array is 0.2mm (operating frequency: about 1.9 GHz), 0.04mm (operating frequency: about 10 GHz), 0.02mm (operating frequency: about 20 GHz), 0.01mm (operating frequency: about 40 GHz).

In a preferred embodiment of the present invention, the offset distance between the sphere and the transverse thin rod in the array unit is-5 to +5 mm; according to a preferred embodiment of the present invention, the offset distance of the spheres from the rod-like bodies in the unit structure of the array is 0 mm.

The invention has the beneficial effects that:

the invention researches a high Q value and high sensitivity resonance structure based on liquid metal, and is designed by researching an Anapole theory and a design method and combining the characteristics of expansibility, flowability and the like of the liquid metal, so that the resonance unit has the characteristic of high Q value and can realize higher sensing resolution, and meanwhile, in order to improve the temperature sensing capability, a liquid storage structure is added in the structure, thereby realizing higher sensing sensitivity.

Drawings

To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, and it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope.

FIG. 1 is a schematic diagram of an Anapole resonant structure based on high Q-value temperature sensing of liquid metal provided by the present invention;

FIG. 2 is a three-dimensional view and dimensions of a single unit of a high Q-value temperature sensing Anapole resonant structure based on liquid metal provided by the present invention;

FIG. 3 is a data plot of the S parameter (Q value) of a high Q value temperature sensing Anapole resonant structure based on liquid metal provided by the present invention;

FIG. 4 is a graph of sensitivity data for a high Q temperature sensing Anapole resonant structure based on liquid metal provided by the present invention;

FIG. 5 is an electric field amplitude and electric field vector pattern of the high Q temperature sensing Anapole resonant structure provided by the present invention based on liquid metal;

FIG. 6 is a magnetic field amplitude and magnetic field vector pattern of a high Q temperature sensing Anapole resonant structure provided by the present invention based on liquid metal;

FIG. 7 is a current pattern of a high Q temperature sensing Anapole resonant structure based on liquid metal provided by the present invention;

FIG. 8 is a Q-value simulation data plot of a high Q-value temperature sensing Anapole resonant structure based on liquid metal provided by the present invention;

FIG. 9 is a comparison graph of frequency shift calculation and simulation data for a high Q temperature sensing Anapole resonant structure based on liquid metal provided by the present invention;

FIG. 10 is a graph comparing sensitivity calculations and simulation data for a high Q temperature sensing Anapole resonant structure based on liquid metal provided by the present invention.

Icon: c-the size of the single unit structure in the array; d-spacing between unit structures in the array, D ═ 2D; theta-the rotation angle of the second longitudinal slender rod; l-the length of the second longitudinal filament in the array unit; a-the length of the transverse filament in the array unit; r-radius of liquid storage sphere in array unit; r-the wire diameter of the thin rod in the array unit.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

First embodiment

Referring to fig. 1 and fig. 2, the present embodiment provides a liquid metal-based high-Q temperature sensing Anapole resonant structure, which includes n × n unit structures (n is an integer greater than zero) arranged in a periodic array and spaced from each other, the unit structures in the array of the present embodiment are arranged in a square array, the unit structures are formed by injecting liquid metal into a medium, wherein the liquid metal is wrapped in the medium, the medium adopted in the present embodiment is a medium substrate, the thickness of the medium substrate is 10.5mm, the dielectric constant is 3.2, the operating frequency of the unit structure application of the present embodiment is 1.9GHz, the spacing D between the unit structures of the array is D × 2, and D is 5 mm; the cell structure includes stock solution structure, horizontal slender pole that the symmetry set up, and the first vertical slender pole and the vertical slender pole of second that are located the coplanar, and wherein, the cell structure size of this embodiment is: 30mm by 30 mm; the liquid storage structure of this embodiment is a sphere, which is denoted as a liquid storage sphere, the radius R of the liquid storage sphere in the unit structure of the array is 4mm, the length a of the transverse slender rod in the unit structure is 20mm, in this embodiment, one end of the first longitudinal slender rod and one end of the two second longitudinal slender rods are located on the same straight line, that is, the length of the second longitudinal slender rod is determined to be the length of the first longitudinal slender rod, the length of the second longitudinal slender rod in the unit structure of this embodiment is 21mm, the diameters R of the transverse slender rod, the first longitudinal slender rod and the second longitudinal slender rod in the unit structure are equal to each other and are 0.2mm, the unit structure in the array of this embodiment is a combination of slender rods, spheres and triangular rings with gaps, that is, the combination of the transverse slender rod, the second longitudinal slender rod and the spheres is the triangular rings with gaps, in this embodiment, the transverse slender rod, the first longitudinal slender rod and the second longitudinal slender, the liquid storage ball is characterized in that the first longitudinal thin rod is connected to the liquid storage ball body, the two sections of transverse thin rods are connected to two sides of the liquid storage ball body respectively, the other ends of the two sections of transverse thin rods are connected with the second longitudinal thin rod respectively, the two sections of second longitudinal thin rods deflect towards the middle part along the direction parallel to the first longitudinal thin rod, the deflection angle is a rotation angle theta, the theta is 20 degrees, and the deflection distance between the liquid storage ball body and the transverse thin rods in the unit structure of the array is 0 mm.

The sensing sensitivity of the Anapole resonance structure is sensed based on the high-Q-value temperature of the liquid metal and can be adjusted through the size, the shape and the interval of the unit structure; wherein the shape of the cell structure can be adjusted by: adjusting the rotation angle, adjusting the length of the first longitudinal slender rod and the second longitudinal slender rod, adjusting the length of the transverse slender rod, adjusting the size of the liquid storage ball, adjusting the diameters of the transverse slender rod, the first longitudinal slender rod and the second longitudinal slender rod, and adjusting the offset distance of the liquid storage structure and the transverse slender rod.

Referring to fig. 3-7, the liquid metal used in this embodiment is mercury (Hg, commonly known as mercury), which is a well-known natural temperature-sensitive metal material, has a stable coefficient of thermal expansion (0.18 × 10 "3/° c), and is widely used in the fields of temperature sensing (e.g., mercury column thermometers, mercury switches, etc.). Meanwhile, the conductivity of the mercury is 1.04 multiplied by 106S/m, and the mercury is a good conductive metal material. The following is a calculation process for preferably improving the sensing sensitivity of the liquid metal-based high-Q temperature sensing Anapole resonant structure.

According to the theory of thermal expansion:

ΔV＝V₀·ΔT·γ (1)

wherein, Δ V: an expanded volume; v₀: an initial volume; Δ T: a temperature variation amount; γ: coefficient of expansion.

From the above formula, V can be obtained₀Is greater than the initial volume, the greater the expansion volume generated by the temperature change of each unit, the greater the deformation of the corresponding unit structure, and when adopting proper structure, such as linear shape, annular shape and the like, the length of the thin rod in the unit structure is increased, namely V is greater₀∝ΔV，ΔV∝l。

In this example, the initial volume V₀Can be calculated according to the following formula:

and calculating to obtain: v₀＝275.43mm。

Wherein, V0: an initial volume; r: the radius of the liquid storage sphere; r: the diameter of the pin; a: the length of the transverse thin rod;

l: the length of the second longitudinal filament.

From the change in length with temperature, the length change Δ l is calculated:

wherein, Δ V: an expanded volume; Δ T: a temperature variation amount; γ: a coefficient of expansion; r: the radius of the liquid storage sphere;

r: the diameter of the pin; a: the length of the transverse thin rod; l: the length of the second longitudinal filament.

Then according to the classical dipole (encapsulated by a medium) resonance theory:

wherein f is₀: a dipole resonance frequency; c: 3 · 108 m/s; l: dollPole length, i.e. the length of the second longitudinal filament;

_r: dielectric plate relative dielectric constant.

The more the length of the unit structure is increased, the larger the corresponding shift of the resonant frequency is, and the higher the sensitivity of the unit structure is.

From the above equations (1) and (4), we can derive the Sensitivity (i.e. the amount of resonant frequency shift per degree centigrade change, in Hz/deg.c) as follows:

wherein l₀In order to have the initial length of the structure,_rr is the radius of the thin rod of the unit structure, which is the dielectric constant of the dielectric plate.

According to the Sensitivity formula (5), since c, γ, and pi are constants, we know that in order to improve the sensing Sensitivity of the resonant structure (i.e. the Sensitivity value is increased), there are 4 methods:

the method comprises the following steps: increase the initial stock solution volume V of the structure₀；

The method 2 comprises the following steps: reducing the diameter of the thin rods of the unit structure;

the method 3 comprises the following steps: reducing the initial length of the thin rod of the unit structure;

the method 4 comprises the following steps: using low dielectric constants_rThe dielectric substrate of (1).

According to the four methods, the sensing sensitivity of the resonant structure can be improved by properly optimizing the structure.

Meanwhile, the size of the resonance structure is limited and cannot be amplified infinitely, so that the sensitivity is greatly improved under a certain size, namely the temperature change of every degree centigrade brings about larger length change of the slender rod, but the part of the structure which can be filled for mercury-based expansion is limited, and then the sensing temperature range of the resonance structure is reduced along with the improvement of the sensing sensitivity.

The resolution, i.e. the minimum temperature variation accuracy that can be obtained by the resonant structure, is calculated according to the following basic formula:

wherein t is_measIs the integration time, Ω_mIs the minimum frequency offset that the instrument can resolve during the corresponding integration time. Omega_mThe calculation of (c) can be obtained by directly testing the frequency stability of the mechanical resonance frequency signal.

If a good vector network analyzer or detector chip is used, we can use the resonant structure to distinguish if the minimum frequency resolution of the vector network analyzer is 100HzIn theory the temperature resolution of the resonant structure is usually achieved

The formula of delta l and the structural parameters around 1.9GHz are compared (_r＝3.2、l₀＝80mm、l＝9mm、V₀275.43mm) into a theoretical Sensitivity formula, the Sensitivity at this time is calculated to be 11.0563 MHz/DEG C, which is similar to 13.6885 MHz/DEG C obtained by simulation results, and the two basically accord with each other. If a 100Hz frequency resolution vector network analyzer is adopted, the resonance structure can be realized

Minimum temperature resolution.

Please refer to fig. 8, 9 and 10, which are simulation data graphs of operating frequencies of 2GHz, 10GHz, 20GHz and 40GHz respectively under different parameters according to another embodiment of the present invention.

In summary, the embodiment of the invention is designed by studying Anapole theory and design method, combining the characteristics of expansibility, flowability and the like of liquid metal, and is adjusted by the size, shape, interval and medium substrate of the unit structure, so that the resonance structure of the invention has high Q value characteristic, and can realize higher sensing resolution, and meanwhile, in order to improve temperature sensing capability, a liquid storage structure is added in the structure, thereby realizing higher sensing sensitivity.

This description describes examples of embodiments of the invention, and is not intended to illustrate and describe all possible forms of the invention. It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.