阅读说明：本技术 隔膜构件 (Diaphragm member ) 是由 斋藤宪一 小久保树 于 2020-01-07 设计创作，主要内容包括：本发明提供一种轻量、容易处理且壳体、隔膜等的损伤较少的隔膜构件。隔膜构件具备：壳体,对电极进行收纳并具有可挠性；隔膜,具有收纳所述电极的收纳口,装卸自如地安装于所述壳体；和框体,将所述隔膜的收纳口侧以外的三边支承于所述壳体。(The invention provides a diaphragm member which is light in weight, easy to handle and less damaged such as a housing and a diaphragm. The diaphragm member is provided with: a case that accommodates the electrode and has flexibility; a diaphragm having a housing port for housing the electrode and detachably attached to the case; and a frame body that supports three sides of the diaphragm other than the receiving opening side thereof in the case.)

1. A diaphragm member is characterized by comprising:

a case that accommodates the electrode and has flexibility;

a diaphragm having a housing port for housing the electrode and detachably attached to the case; and

a frame body that supports three sides of the diaphragm other than the receiving opening side in the housing.

2. Diaphragm member according to claim 1,

a mounting portion of the case to which the diaphragm is mounted has a folded-back configuration in which a wall portion of the case is folded back,

the wall portion of the folded-back portion extends to an electrode housing space housing the electrode.

3. Diaphragm member according to claim 2,

a projection projecting in the direction of the electrode is provided on a wall portion extending to the electrode accommodating space.

4. Membrane element as claimed in claim 2 or 3,

at the end of the side face connecting the two side faces of the folded structure in the longitudinal direction, a recess in the shape of a dashed line is provided along the longitudinal direction of the side face.

Technical Field

The present invention relates to a diaphragm member used in an electroplating apparatus.

Background

As a technique for forming wiring and the like on the surface of a printed circuit board, a semiconductor wafer substrate, and the like, plating is known.

In these electroplating, for example, there is disclosed an electrodeposition-coating membrane unit in which a membrane is sandwiched between a case housing electrodes and a protective frame detachably attached to a front-side opening portion of the case, wherein the membrane is sandwiched between a flange portion protruding along a side edge of the front-side opening portion of the case and a flange frame single body detachably fixed to the flange portion in a superposed manner, and the protective frame is attached to the case via the flange frame single body (the scope of the utility model registration request of patent document 1).

Prior art documents

Patent document

Patent document 1: microfilm of Japanese patent application No. Sho 61-98876 (No. Sho 63-7170)

Disclosure of Invention

Problems to be solved by the invention

However, in the separator member described in patent document 1, "a strong structure is required to maintain the water tensile strength of the separator", and a large-weight separator member is often used (page 2, lines 8 to 10). Therefore, a recovery device such as a crane is required to recover the diaphragm member from the plating liquid.

The present invention has been made to solve the above-described problems, and an object thereof is to provide a diaphragm member which is lightweight and easy to handle, and in which damage to a case, a diaphragm, and the like is reduced.

Means for solving the problems

In order to achieve the above object, a separator member according to the present invention includes: a case that accommodates the electrode and has flexibility; a diaphragm having a housing port for housing the electrode and detachably attached to the case; and a frame body that supports three sides of the diaphragm other than the receiving opening side thereof in the case.

According to this configuration, since the case has flexibility, stress generated by water pressure applied at the time of lifting can be absorbed by deformation, and therefore, cracks are less likely to occur than in the conventional case. The plate thickness of the case can be reduced, and the weight can be reduced.

The mounting portion of the case to which the diaphragm is mounted may have a folded-back structure in which a wall portion of the case is folded back, and the wall portion of the folded-back portion may extend to a housing space in which the electrode is housed.

According to this configuration, even if a crack is generated from an end of a portion of the case continuous with the back surface (the upper side surface of the folded structure in fig. 3), the crack is less likely to be generated in a portion (the lower side surface of the folded structure in fig. 2) in contact with the diaphragm, and the case and the diaphragm are fixed by this portion, whereby the electrode housing space can be maintained.

A projection projecting in the direction of the electrode may be provided on a wall portion of the folded structure extending to the housing space.

According to this configuration, even if stress due to the difference between the inside and outside of the water pressure is generated, the protrusion absorbs the stress, and the movement of the tip end portion of the extended wall portion can be suppressed, so that the effect of preventing damage to the diaphragm is obtained.

An end of a side surface connecting both side surfaces of the folded structure in a longitudinal direction may be provided with a recess in a dotted line shape along the longitudinal direction of the side surface.

According to this structure, even if a crack occurs at the end portion on the side surface side continuous to the back surface, the crack can be suppressed from propagating to the end portion on the side surface side close to the separator by propagating the crack in the longitudinal direction along the broken line.

Effects of the invention

According to the present invention, a diaphragm member that is lightweight and easy to handle and that has less damage to a housing, a diaphragm, and the like can be provided.

Drawings

Fig. 1 is an exploded perspective view of a diaphragm member according to a first embodiment of the present invention.

Fig. 2 is an exploded perspective view of a diaphragm member according to a second embodiment of the present invention.

Fig. 3 is a cross-sectional view of a diaphragm member according to a second embodiment of the present invention.

Fig. 4 is a cross-sectional view of a diaphragm member according to a third embodiment of the present invention.

Fig. 5 is a diagram showing an end portion of a side surface of a folded structure according to a fourth embodiment of the present invention.

Fig. 6 is a cross-sectional view of a diaphragm member according to another embodiment of the present invention.

Fig. 7 is an explanatory diagram of stress application of a conventional diaphragm member.

Detailed Description

Fig. 1 shows a diaphragm member according to a first embodiment of the present invention.

A diaphragm member according to a first embodiment includes: a housing having flexibility; a diaphragm having a housing port for housing the electrode and detachably attached to the case; and a frame body that supports three sides of the diaphragm other than the housing opening side in the case, and forms an electrode housing space in which the housing opening is open.

The diaphragm can be attached to the attachment portion by fastening with a bolt using a frame.

In the present invention, the "flexible case" refers to a case made of an elastically deformable material other than metal such as iron. More preferably a flexible resin case.

In the conventional diaphragm member, the material used for the housing is a metal having high rigidity, a hard plastic, or the like in order to improve mechanical strength. When such a material is used, when the diaphragm member is recovered from the electrolytic cell, water pressure is applied in the direction of the arrow shown in fig. 7, and cracks are likely to occur from the end of the portion of the case where the diaphragm is attached. When the cracks reach the bolt holes, the case is detached from the diaphragm, and the case may fall into the plating solution together with the electrodes therein. Therefore, in order to increase the strength of the case, the thickness of the case becomes large, which results in a heavy weight and is difficult to handle.

In contrast, in the diaphragm member according to the first embodiment of the present invention shown in fig. 1, since the case is flexible, the stress generated by the water pressure can be absorbed by deformation, and therefore, cracks are less likely to occur than in the conventional case. Therefore, the plate thickness of the case can be reduced, and the weight can be reduced.

Fig. 2 is an exploded perspective view of a diaphragm member according to a second embodiment of the present invention.

In this embodiment, the mounting portion of the case to which the separator is mounted has a folded-back structure in which a wall portion of the case is folded back, and the wall portion of the folded-back portion extends to the electrode housing space. Preferably, the folding structure includes two side surfaces and an end portion of the side surface connecting the two side surfaces in the longitudinal direction.

According to the second embodiment, since the mounting portion of the case has a double structure due to the folded structure, even if a crack is generated from an end portion of a portion continuous with the back surface (an upper side surface of the folded structure in fig. 3), the crack is not easily generated in a portion close to the diaphragm (a lower side surface of the folded structure in fig. 3), and the case and the diaphragm are fixed by the portion, whereby the electrode housing space can be maintained. Therefore, it is possible to prevent an accident that the case is detached from the separator and the case and the electrode therein fall into the plating solution.

Further, since the portion of the folded structure extending to the wall portion of the electrode housing space also functions as a support portion for the electrode, the risk of falling can be further suppressed.

Fig. 4 shows a cross-sectional view of a diaphragm member according to a third embodiment of the present invention.

In this embodiment, a projection projecting in the electrode direction is provided on a wall portion of the folded structure extending to the electrode housing space.

Since the distal end portion of the extended wall portion is not fixed but flexible, the wall portion may move frictionally with the diaphragm due to stress caused by the difference between the inside and outside of the water pressure, and damage the diaphragm.

The protrusion in this embodiment absorbs the stress, and can suppress the movement of the front end portion of the extended wall portion, thereby having an effect of preventing the damage of the diaphragm.

Fig. 5 is a view of an end portion of a side surface of a folded structure of a case in a diaphragm member according to a fourth embodiment of the present invention, as viewed from a' -a direction in fig. 3. The upper side is a side surface side connected to the back surface, and the lower side is a side surface side close to the diaphragm. As described above, since cracks are likely to occur in the end portion on the side surface side continuous with the back surface of the case, the cracks may continue from the end portion on the side surface side continuous with the back surface to the end portion on the side surface side close to the diaphragm with long-term use.

Therefore, in this embodiment, a dotted concave portion is provided in the longitudinal direction at the end of the side surface of the folded structure.

Even if a crack is generated at the end portion on the side surface side continuous with the back surface by the concave portion in the dotted line shape, the crack can be propagated in the longitudinal direction along the dotted line, and the crack can be suppressed from propagating to the end portion on the side surface side close to the separator. Therefore, the reliability of the diaphragm mounting can be further improved.

The present invention is not limited to the above embodiments, and naturally includes embodiments modified or added based on a known technique.

For example, the attachment portion between the case and the diaphragm may be fastened by bolts through 1 frame as shown in fig. 3, or may be fastened by bolts through two frames as shown in fig. 4. Further, as shown in fig. 6, 3 frames may be used and fastened by bolts.

Although not shown, by setting the height of the separator to a position lower than the height of the case, the plating is performed in a state where the entire separator is immersed in the plating solution, and thus the generation of the precipitate on the surface of the plating solution can be prevented.

Examples of the flexible resin used for the case include polyvinyl chloride (PVC), polyethylene terephthalate (PET), polypropylene (PP), and acrylonitrile-butadiene-styrene copolymer (ABS).

The housing is preferably formed by vacuum forming or compressed air forming. More preferably, the foam molding is performed in accordance with the structure of the electrode to be housed. The thickness of the molded article is preferably 0.3mm to 2.0mm, more preferably 0.4mm to 1.0mm, and the weight and thickness of the separator member can be reduced, so-called soft-shell formation can be achieved.