阅读说明：本技术 一种电容式脉冲光探测器 (Capacitive pulse light detector ) 是由 不公告发明人 于 2020-07-01 设计创作，主要内容包括：本发明提供了一种电容式脉冲光探测器,底部极板置于衬底上,隔离部置于底部极板上,顶部极板置于隔离部上,顶部极板与底部极板相对,顶部极板与底部极板间形成空腔,光声材料部置于空腔上方的顶部极板上。应用时,待测脉冲光照射光声材料部,光声材料部产生声波。在声波作用下,顶部极板振动,改变了顶部极板与底部极板之间的距离,从而改变了顶部极板与底部极板之间的电容,通过测量该电容实现脉冲光辐照能量的探测。因为电容器的电容对两极板之间的距离非常敏感,所以本发明具有探测灵敏度高的优点。此外,本发明制备简单、测量电容的电路成熟,所以本发明还具有成本低的优点。(The invention provides a capacitance type pulse light detector, wherein a bottom polar plate is arranged on a substrate, an isolation part is arranged on the bottom polar plate, a top polar plate is arranged on the isolation part, the top polar plate is opposite to the bottom polar plate, a cavity is formed between the top polar plate and the bottom polar plate, and a photoacoustic material part is arranged on the top polar plate above the cavity. When the photoacoustic material is applied, the pulse light to be measured irradiates the photoacoustic material part, and the photoacoustic material part generates sound waves. Under the action of sound waves, the top polar plate vibrates, the distance between the top polar plate and the bottom polar plate is changed, and therefore the capacitance between the top polar plate and the bottom polar plate is changed, and the detection of the pulse light irradiation energy is achieved through measurement of the capacitance. The invention has the advantage of high detection sensitivity because the capacitance of the capacitor is very sensitive to the distance between the two plates. In addition, the invention has the advantages of simple preparation and mature circuit for measuring the capacitance, so the invention also has the advantage of low cost.)

1. A capacitive pulsed light detector, comprising: substrate, bottom polar plate, separator, top polar plate, optoacoustic material portion, the substrate with the separator is insulating material, the top polar plate with the bottom polar plate is conducting material, the bottom polar plate is arranged in on the substrate, the separator is arranged in on the bottom polar plate, the top polar plate is arranged in on the separator, the top polar plate with the bottom polar plate is relative, the top polar plate with vacuole formation between the bottom polar plate, optoacoustic material portion arrange in the cavity top on the top polar plate.

2. A capacitive pulsed light detector according to claim 1, characterized in that: the bottom polar plate is circular, the isolation part is annular, and the top polar plate is circular.

3. A capacitive pulsed light detector according to claim 2, characterized in that: the photoacoustic material part is circular and is arranged at the center of the top polar plate.

4. A capacitive pulsed light detector according to claim 3, characterized in that: and a protrusion part is arranged on one side of the cavity of the top polar plate and made of a conductive material.

5. The capacitive pulsed light detector according to claim 4, characterized in that: the protruding part is positioned in the center of the top polar plate.

6. The capacitive pulsed light detector according to claim 5, characterized in that: the top plate is smaller in size than the bottom plate.

7. The capacitive pulsed light detector according to any one of claims 1 to 6, characterized in that: and a sound absorption expansion part is arranged on one side of the bottom polar plate of the substrate.

8. The capacitive pulsed light detector according to claim 7, characterized in that: the sound absorption expansion part is arranged in a groove on the surface of the substrate, and the groove is positioned in the center of the bottom polar plate.

9. The capacitive pulsed light detector according to claim 8, characterized in that: the material of the photoacoustic material part is a mixture of carbon powder, graphene and a polymer.

10. A capacitive pulsed light detector according to claim 9, characterized in that: the bottom polar plate is made of metal, and the top polar plate is made of a metal film, a graphene layer or a carbon nanotube layer.

Technical Field

The invention relates to the field of pulse light detection, in particular to a capacitive pulse light detector.

Background

The pulse light is light emitted from a light source intermittently at a predetermined time interval. The pulse light has short time and high intensity, can penetrate through a substance, generates temperature gradient on the surface and inside the substance, and transfers heat from the surface to the inner layer in a conduction mode. In recent years, pulsed light has been applied more and more widely in fields such as cutting, welding, and medical treatment. In the application of pulsed light, it is important to measure the energy radiated by the pulsed light.

The existing technology for measuring the pulse light irradiation energy is mostly based on photothermal effect or photoelectric effect. The pulse light detector based on the photothermal effect has the defect of low response speed; pulsed light detectors based on the photoelectric effect have the disadvantage of a narrow response spectrum. The pulse light detection technology based on the photoacoustic effect provides a new way for pulse light detection. Exploring a high-sensitivity, low-cost detection scheme based on the photoacoustic effect will strongly promote the development in pulsed light applications.

Disclosure of Invention

In order to solve the above problems, the present invention provides a capacitive pulsed light detector, which includes a substrate, a bottom plate, a spacer, a top plate, and a photoacoustic material portion, wherein the substrate and the spacer are made of insulating materials, the top plate and the bottom plate are made of conductive materials, the bottom plate is disposed on the substrate, the spacer is disposed on the bottom plate, the top plate is disposed on the spacer, the top plate is opposite to the bottom plate, a cavity is formed between the top plate and the bottom plate, and the photoacoustic material portion is disposed on the top plate above the cavity.

Further, the bottom plate is circular, the separator is annular, and the top plate is circular.

Further, the photoacoustic material portion is circular, and the photoacoustic material portion is disposed at a central position of the top plate.

Furthermore, a protrusion part is arranged on one side of the cavity of the top polar plate, and the protrusion part is made of a conductive material.

Further, the protrusion is located at a central position of the top plate.

Further, the top plate is smaller in size than the bottom plate.

Furthermore, a sound absorption expansion part is arranged on one side of the bottom polar plate of the substrate.

Furthermore, the sound absorption expansion part is arranged in a groove on the surface of the substrate, and the groove is positioned in the center of the bottom polar plate.

Further, the material of the photoacoustic material portion is a mixture of carbon powder, graphene, and a polymer.

Furthermore, the bottom plate is made of metal, and the top plate is made of a metal film, a graphene layer or a carbon nanotube layer.

The invention has the beneficial effects that: the invention provides a capacitance type pulse light detector, wherein a bottom polar plate is arranged on a substrate, an isolation part is arranged on the bottom polar plate, a top polar plate is arranged on the isolation part, the top polar plate is opposite to the bottom polar plate, a cavity is formed between the top polar plate and the bottom polar plate, and a photoacoustic material part is arranged on the top polar plate above the cavity. When the photoacoustic material is applied, the pulse light to be measured irradiates the photoacoustic material part, and the photoacoustic material part generates sound waves. Under the action of sound waves, the top polar plate vibrates, the distance between the top polar plate and the bottom polar plate is changed, and therefore the capacitance between the top polar plate and the bottom polar plate is changed, and the detection of the pulse light irradiation energy is achieved through measurement of the capacitance. The invention has the advantage of high detection sensitivity because the capacitance of the capacitor is very sensitive to the distance between the two plates. In addition, the invention has the advantages of simple preparation and mature circuit for measuring the capacitance, so the invention also has the advantage of low cost.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic view of a capacitive pulsed light detector.

Fig. 2 is a schematic view of yet another capacitive pulsed light detector.

Fig. 3 is a schematic diagram of yet another capacitive pulsed light detector.

Fig. 4 is a schematic diagram of yet another capacitive pulsed light detector.

In the figure: 1. a substrate; 2. a bottom plate; 3. an isolation section; 4. a top plate; 5. a cavity; 6. A photoacoustic material portion; 7. the sound absorption inflation portion.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.