阅读说明：本技术 储片盒吹扫组件和储片盒装置 (Storage box purging assembly and storage box device ) 是由 孙晋博 于 2020-07-15 设计创作，主要内容包括：本发明提供一种储片盒吹扫组件,用于对储片盒进行吹扫,储片盒吹扫组件包括壳体,该壳体上形成有用于输入吹扫气体的进气口和多个用于向储片盒输出吹扫气体的出气口,其中,每个出气口的出气面积可调。在本发明提供的储片盒吹扫组件中,多个出气口的出气面积可调,可通过调节各个出气口的出气面积,消除出气口所吹出气流流速之间的差异,使得储片盒各高度位置的气流流速相等,从而缓解晶片表面的颗粒污染,提高储片盒出气体的去除效率。本发明还提供一种储片盒装置。(The invention provides a storage box purging assembly which is used for purging a storage box. In the wafer storage box purging assembly provided by the invention, the air outlet areas of the air outlets are adjustable, and the difference between the flow rates of the air flows blown out from the air outlets can be eliminated by adjusting the air outlet areas of the air outlets, so that the flow rates of the air flows at all height positions of the wafer storage box are equal, the particle pollution on the surface of a wafer is relieved, and the removal efficiency of the air discharged from the wafer storage box is improved. The invention also provides a sheet storage box device.)

1. The utility model provides a storage film box sweeps subassembly for sweep storage film box, its characterized in that, storage film box sweeps subassembly includes the casing, be formed with on the casing be used for the input to sweep gaseous air inlet and a plurality of be used for to storage film box output sweep gaseous gas outlet, wherein, every the area of giving vent to anger of gas outlet is adjustable.

2. The cassette purging assembly of claim 1, further comprising a plurality of adjusting members disposed in one-to-one correspondence with the gas outlets, wherein the adjusting members are movably connected to the housing, and the gas outlet area of the gas outlets changes as the adjusting members corresponding thereto move relative to the housing.

3. The cassette purge assembly of claim 2, wherein the plurality of gas outlets are distributed along the length of the housing and the size of the openings of the gas outlets at the two ends of the housing are smaller than the size of the openings of the gas outlets between the two ends of the housing.

4. The cassette purging assembly of claim 2, wherein the adjustment member includes a cylindrical body and an adjustment hole extending through the cylindrical body, the adjustment hole is eccentrically disposed with respect to the cylindrical body, the cylindrical body is movably connected to the housing, and an overlapping area of the adjustment hole and the gas outlet changes as the cylindrical body moves relative to the housing.

5. A cassette purge assembly according to claim 4, wherein the housing has a plurality of rotary grooves formed therein, the plurality of rotary grooves corresponding one-to-one to the plurality of gas outlets, the regulating member being disposed in the rotary grooves, the regulating member being rotatable in the rotary grooves.

6. The cassette purging assembly of claim 5, further comprising a sealing ring positioned between the cylindrical body and an inner wall of the spin-trough.

7. The purging assembly for a storage cassette of claim 5, wherein a twisting groove is formed on a side of the cylindrical body facing away from the air outlet, and the twisting groove is used for inserting a twisting tool, so that the twisting tool can drive the cylindrical body to rotate through the twisting groove.

8. The cassette purge assembly of claim 7, wherein the twist groove is an internal hex groove and the twisting tool is an internal hex wrench.

9. The purge assembly of claim 1, wherein the number of the air inlets is two, and the two air inlets are respectively disposed at two ends of the housing.

10. A magazine device comprising a box body and a hatch, the box body being formed with an opening, the hatch being adapted to close the opening, characterized in that the magazine device further comprises a magazine purging assembly according to any of claims 1-9, the magazine purging assembly being disposed on an inner wall of the box body and adapted to blow a purging gas into the box body when the hatch is opened.

Technical Field

The invention relates to the field of semiconductor equipment, in particular to a wafer storage box purging assembly and a wafer storage box device.

Background

In a semiconductor process, in order to ensure that wafers are kept clean during transportation, the wafers are usually hermetically loaded in a wafer cassette, before a corresponding process is performed, a door opening mechanism opens a sealing cover of the wafer cassette, the wafers are taken out of the wafer cassette by a manipulator and placed on a wafer boat, and then the wafers are lifted into a reaction chamber along with the wafer boat. In order to prevent the gas in the storage box from influencing the reaction gas components in the reaction chamber, the door opening mechanism is generally provided with a gas inlet structure and a gas outlet structure, and the gas inlet structure and the gas outlet structure are used for replacing the gas in the storage box with the gas with less influence on the reaction gas components in the reaction chamber, such as nitrogen.

Referring to fig. 1 and 2, which are schematic diagrams illustrating an air intake scheme of a porous pipe 1 with an air intake structure in the prior art, the porous pipe 1 is provided with an air intake hole and a plurality of air outlet holes communicated with the air intake hole. When the door opening mechanism opens the sealing cover of the tablet storage box 20, the plurality of air outlet holes on the porous pipe 1 blow nitrogen gas into the tablet storage box 20 along the gap between the tablet storage box and the sealing cover (the direction indicated by the arrows in fig. 1 and 2 is the ideal nitrogen gas flowing direction). However, when the conventional porous tube 1 is used to purge the wafer storage box 20, the wafers are easily contaminated during the purging process, and the removal efficiency of the original gas (such as oxygen) in the wafer storage box 20 is low, which affects the overall operation efficiency of the machine.

Therefore, how to provide a purging assembly for a wafer cassette that is efficient and beneficial to keep wafers clean is a technical problem to be solved in the art.

Disclosure of Invention

The invention aims to provide a wafer storage box purging assembly and a wafer storage box opening mechanism.

In order to achieve the above object, according to one aspect of the present invention, there is provided a magazine purging assembly for purging a magazine, the magazine purging assembly including a housing, the housing having a gas inlet for inputting a purge gas and a plurality of gas outlets for outputting the purge gas to the magazine, wherein a gas outlet area of each of the gas outlets is adjustable.

Preferably, the storage box purging assembly further comprises a plurality of adjusting pieces, wherein the adjusting pieces are arranged in one-to-one correspondence with the gas outlets, the adjusting pieces are movably connected with the shell, and the gas outlet area of the gas outlets is changed along with the corresponding adjusting pieces relative to the shell in a moving manner.

Preferably, the plurality of air outlets are distributed on the housing along the length direction of the housing, and the opening sizes of the air outlets positioned at the two end portions of the housing are smaller than the opening size of the air outlet positioned between the two end portions of the housing.

Preferably, the adjusting part comprises a columnar body and an adjusting hole penetrating through the columnar body, the adjusting hole and the columnar body are eccentrically arranged, the columnar body is movably connected with the shell, and the overlapping area of the adjusting hole and the air outlet is changed along with the movement of the columnar body relative to the shell.

Preferably, a plurality of rotary grooves are formed in the housing, the rotary grooves correspond to the air outlets one by one, and the adjusting piece is arranged in the rotary grooves and can rotate in the rotary grooves.

Preferably, the storage box purging assembly further comprises a sealing ring, and the sealing ring is located between the cylindrical body and the inner wall of the rotary groove.

Preferably, a twisting groove is formed in one side, away from the air outlet, of the columnar body, and the twisting groove is used for inserting a twisting tool, so that the twisting tool can drive the columnar body to rotate through the twisting groove.

Preferably, the twisting groove is an inner hexagonal groove, and the twisting tool is an inner hexagonal wrench.

Preferably, the number of the air inlets is two, and the two air inlets are respectively arranged at two ends of the shell.

As a second aspect of the present invention, there is provided a magazine device, comprising a magazine body and a door, wherein an opening is formed on the magazine body, the door is used for closing the opening, the magazine device further comprises the magazine purging assembly, the magazine purging assembly is disposed on an inner wall of the magazine body, and is used for blowing a purging gas into the magazine body when the door is opened.

In the wafer storage box purging assembly and the wafer storage box device provided by the invention, the air outlet areas of the plurality of air outlets in the wafer storage box purging assembly are adjustable, when the wafer storage box is purged by using the wafer storage box purging assembly provided by the invention, the air outlet areas of the air outlets can be adjusted, the difference between the flow rates of air flows blown out from the air outlets is eliminated, and the flow rates of the air flows at all height positions of the wafer storage box are equal, so that the particle pollution on the surface of a wafer is relieved, the removal efficiency of the air discharged from the wafer storage box is improved, and the integral operation efficiency of a machine table is further improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of a prior art air inlet structure blowing air into a storage box;

FIG. 2 is a schematic perspective view of the arrangement shown in FIG. 1;

FIG. 3 is a schematic structural diagram of a purge assembly of a cassette provided in an embodiment of the invention;

FIG. 4 is a left side view of the cassette purge assembly shown in FIG. 3;

FIG. 5 is a top view of the cassette purge assembly shown in FIG. 4;

FIG. 6 is a schematic structural diagram of a housing of a cassette purging assembly according to an embodiment of the present disclosure;

FIG. 7 is a right side view of the housing shown in FIG. 6;

FIG. 8 is a schematic structural view of an adjustment member in a purge assembly of a cassette provided in an embodiment of the invention;

FIG. 9 is a right side view of the adjustment member of FIG. 8;

FIG. 10 is a partial view of a cassette purge assembly provided by embodiments of the present invention;

FIG. 11 is a right side view of the cassette purge assembly shown in FIG. 20;

FIG. 12 is a schematic diagram of a purge assembly for a cassette according to another embodiment of the present disclosure;

FIG. 13 is a schematic view of the effect of blowing air flow in the cassette with each air outlet opening to the maximum air outlet area in the purge assembly of the cassette shown in FIG. 12;

FIG. 14 is a perspective view of the effect diagram of FIG. 13;

FIGS. 15 and 16 are schematic diagrams showing changes in the wind speed at each outlet when the flow rate of the purge gas is decreased;

FIGS. 17 to 19 are schematic views illustrating a process of adjusting the air outlet area by using an allen key according to an embodiment of the present invention;

FIG. 20 is a schematic view of the gas outlet surface area of the gas outlet of the purge assembly of the cassette varying with the rotation angle of the cylindrical body according to the embodiment of the present invention;

FIGS. 21 to 22 are schematic views illustrating the operation of the opening mechanism of the magazine according to the embodiment of the present invention;

FIGS. 23 to 24 are schematic views illustrating the operation of an opening mechanism of a magazine according to another embodiment of the present invention;

FIG. 25 is a schematic diagram of a cassette assembly in semiconductor processing equipment according to an embodiment of the present invention;

fig. 26 is a schematic structural diagram of semiconductor processing equipment according to an embodiment of the present invention.

Description of the reference numerals

100: storage tank purge assembly 110: shell body

111: air inlet 112: rotary trough

120: air outlet 130: adjusting part

131: the columnar body 132: adjusting hole

133: torsion groove 140: sealing ring

150: inner hexagonal wrench 20: storage box

21: the box body 22: cabin door

200: storage case opening assembly 210: cylinder

220: door opening mechanism 30: reaction chamber

40: the transport chamber 41: mechanical arm

42; crystal boat

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.

After experimental research, the inventor of the present invention finds that the apertures of the air outlets at various positions on the conventional multi-hole tube 1 are consistent, but the flow rates of the air blown out from the air outlets at different positions are different (as shown in fig. 1 and 2, which are typical conditions), and the difference changes with the change of the flow rate of the air, and the difference of the flow rates of the air flows between the air outlets easily causes the particles in the storage box 20 to fly upward, thereby causing the contamination of the wafer. And, in the position of air current velocity of flow undersize, gaseous efficiency of sweeping is less than other positions, and then has lengthened whole required time of sweeping, has influenced the whole operating efficiency of board then.

In order to solve the above technical problem, as an aspect of the present invention, there is provided a cassette purging assembly 100 for purging a cassette for storing wafers, as shown in fig. 3 to 5, the cassette purging assembly 100 includes a housing 110, the housing 110 is formed with a gas inlet 111 for inputting a purge gas, and a plurality of gas outlets 120 for outputting the purge gas to the cassette 20, wherein a gas outlet area of each gas outlet 120 is adjustable.

It should be noted that the air outlet area of the air outlet 120 refers to the size of the air outlet surface of the air outlet 120 which actually sprays air outwards in the use process, in the embodiment of the present invention, the air outlet area of the plurality of air outlets 120 on the magazine purging assembly 100 is adjustable, and when the magazine 20 is purged by using the magazine purging assembly 100 provided by the present invention, the air outlet area of each air outlet 120 can be adjusted to eliminate the difference between the flow rates of the air flows blown out by each air outlet 120, so that the flow rates of the air flows at each height position of the magazine 20 are equal, thereby alleviating the particle pollution on the wafer surface, improving the removal efficiency of the air discharged from the magazine, and further improving the overall operation efficiency of the machine.

The embodiment of the present invention does not specifically limit how the air outlet area of the air outlet 120 is adjustable, for example, the air outlet 120 may be partially covered by a movable member, specifically: as shown in fig. 8 to 11, the cassette purging assembly 100 further includes a plurality of adjusting members 130 corresponding to the plurality of air outlets 120, the adjusting members 130 are movably connected to the housing 110, and the air outlet area of the air outlet 120 changes as the corresponding adjusting member 130 moves relative to the housing 110. That is, as the regulating member 130 moves relative to the housing 110, the area of the portion of the air outlet 120 not covered by the regulating member 130 (i.e., the air outlet surface) changes.

After further experimental research, the inventor also finds that the difference between the flow rates of the gases blown out from the air outlets at the positions on the existing porous pipe 1 is particularly obvious when the flow rate of the gases is high. For example, when the total flow rate reaches 150L/min or more during the purging process, the nitrogen gas flow blown from each of the gas outlets has a large gradient difference in the height direction of the cassette 20, and as shown in fig. 1 and 2, among the plurality of gas outlets, the gas outlet located at the center position blows a flow rate much smaller than the gas outlets at both ends of the porous pipe 1.

In order to solve the above-mentioned technical problem and improve the adjustment accuracy of the cassette purging assembly 100, it is preferable that, as shown in fig. 12 to 14, a plurality of air outlets 120 are distributed on the housing 110 in the length direction of the housing 110, and among the plurality of air outlets 120, the opening size of the air outlet 120 located at both end portions of the housing 110 is smaller than the opening size of the air outlet 120 located between both end portions of the housing 110.

In the present invention, the opening size of the air outlet 120 refers to the opening size of the air outlet 120 on the outer surface of the housing 110, the opening of the air outlet 120 on the outer surface of the housing 110 can be partially covered by the adjusting member 130, and the portion of the opening that is not covered by the adjusting member 130 is the air outlet surface of the air outlet 120.

In the embodiment of the present invention, the plurality of air outlets 120 are regularly arranged on the housing 110, wherein the apertures of the air outlets 120 are small at two sides and large in the middle, so that when all the air outlets 120 are fully opened (i.e. all the air outlets 120 are not covered by the adjusting member 130), the difference between the flow rates of the air flows blown out from the air outlets 120 is initially eliminated, so that the flow rates of the air flows at different height positions of the magazine 20 are substantially equal (as shown in fig. 13 and 14, in the case that all the air outlets 120 are fully opened and the total flow rate reaches 150L/min, the schematic view of the air flow field in the magazine. When the air outlet area of the air outlet 120 is adjusted, the condition that the flow velocity of the air flow blown out from the air outlet 120 located at the central position is far less than the flow velocity of the air flow blown out from the air outlets 120 at the two ends of the perforated pipe 1 does not need to be considered, so that the area adjustment range required by the air outlet 120 is reduced, and the air flow velocity adjustment precision of the storage box purging assembly 100 is improved.

The shape and size of the air outlets 120 are not particularly limited in the embodiments of the present invention, for example, the shape of the air outlets 120 may be circular, and the diameter of the air outlets 120 may be 3mm to 6 mm. To facilitate understanding by those skilled in the art, a specific embodiment of the present invention is provided for reference: the shell is provided with 14 air outlets 120, and the diameters of the 14 air outlets 120 from top to bottom are respectively as follows: d 1-3.0 mm, d 2-3.2 mm, d 3-3.5 mm, d 4-4.0 mm, d 5-4.7 mm, d 6-5.3 mm, d 7-6.0 mm, d 8-6.0 mm, d 9-5.3 mm, d 10-4.7 mm, d 11-4.0 mm, d 12-3.5 mm, d 13-3.2 mm, d 14-3.0 mm.

The number of the air inlets 111 is not particularly limited in the embodiment of the present invention, for example, as a preferred embodiment of the present invention, the number of the air inlets 111 is two, and the two air inlets 111 are respectively disposed at both ends of the housing 110.

In order to improve the visibility of the size of the air outlet 120, as shown in fig. 8, preferably, the adjusting member 130 includes a cylindrical body 131 and an adjusting hole 132 penetrating through the cylindrical body 131, the cylindrical body 131 is movably connected to the housing 110, the adjusting hole 132 is eccentrically disposed with respect to the cylindrical body 131, and the overlapping area of the adjusting hole 132 and the air outlet 120 is changed as the cylindrical body 131 moves relative to the housing 110.

It should be noted that, the size and shape of the adjusting hole 132 are preferably the same as the corresponding air outlet 120, and in the embodiment of the present invention, the change degree of the size of the air outlet area of the air outlet 120 can be visually observed only by observing the staggering degree between the adjusting hole 132 and the air outlet 120, so as to improve the convenience of adjusting the flow rate of the air flow.

In order to improve the accuracy and stability of the adjustment of the flow rate of the gas flow, it is preferable that, as shown in fig. 6 and 7, a plurality of rotary grooves 112 are formed on the housing 110, and the plurality of rotary grooves 112 correspond to the plurality of gas outlets 120 one by one, and the adjusting member 130 is disposed in the rotary grooves 112, and the adjusting member 130 is capable of rotating in the rotary grooves 112.

In the embodiment of the present invention, the overlapping degree between the adjusting hole 132 and the air outlet 120 is changed by rotating the cylindrical body 131, so as to convert the control of the air outlet area into the control of the rotation angle, and when the rotation angle is adjusted, the accuracy and the stability of the angle control can be improved by increasing the length of the power arm (e.g. using a twisting tool such as a wrench).

For example, in order to achieve precise adjustment of the rotation angle of the cylindrical body 131, as a preferred embodiment of the present invention, as shown in fig. 8 to 10, a torsion groove 133 is formed on a side of the cylindrical body 131 facing away from the air outlet 120, the torsion groove 133 is used for inserting a torsion tool so that the torsion tool can drive the cylindrical body 131 to rotate through the torsion groove 133, and the shape of the torsion groove 133 is non-circular.

The shape of the torsion groove 133 is not particularly limited in the embodiment of the present invention, and for example, the torsion groove 133 may be an inner hexagonal groove. Accordingly, the twisting tool may be an allen wrench 150, and one end of the allen wrench 150 can be inserted into the twisting slot 133 and rotate around the axis of the cylindrical body 131 to rotate the cylindrical body 131, as shown in fig. 18 to 19. As shown in fig. 17, the other end of the allen key 150 can be bent to form the allen key 150 as an "L" shape, so as to increase the length of the power arm during the adjustment of the torsion, and improve the accuracy and the stability of the angle control.

It should be noted that, in the magazine purging assembly 100 provided in the embodiment of the present invention, the air outlet area of the air outlet 120 needs to be adjusted when the flow rate of the purge gas changes, that is, the adjusting members 130 need to be rotated each time the flow rate of the purge gas changes, because the air speed variation of the purge gas ejected from each air outlet 120 is different when the flow rate of the purge gas changes.

For example, when the air speed of each air outlet 120 is adjusted to be the same, and the flow rate of the purge gas is reduced from 80L/min to 50L/min, the air speed of the purge gas ejected from each air outlet 120 is as shown in fig. 15 and 16, and the air speed reduction range of the air outlet 120 located in the middle is greater than the air speed reduction range of the air outlets 120 located at both ends, and at this time, the plurality of adjusting members 130 need to be rotated again to adjust the air speed of each air outlet 120 to be the same.

In order to further improve the stability of the control of the gas outlet surface area of the gas outlet 120, it is preferable that the cassette purging assembly 100 further includes a sealing ring 140, as shown in fig. 9, and the sealing ring 140 is located between the cylindrical body 131 and the inner wall of the rotary groove 112. Accordingly, grooves may be formed on the surface of revolution of the cylindrical body 131 and on the inner wall of the revolution groove 112 to receive the sealing ring 140.

In the embodiment of the present invention, the sealing ring 140 can maintain the rotation angle of the cylindrical body 131 in the rotary groove 112 by friction, thereby improving the stability of the adjustment and control of the gas outlet surface area of the gas outlet 120.

As shown in fig. 20, which is a schematic view illustrating that the area of the air outlet surface of one air outlet 120 of the cassette purging assembly 100 changes with the rotation angle of the cylindrical body 131, as the cylindrical body 131 rotates, the area of the air outlet surface of the air outlet 120 changes from 100% of the area of the air outlet 120 (in the case shown in fig. 20 (a)) to 80% of the area of the air outlet 120 (in the case shown in fig. 20 (b)), and reaches a minimum value of 40% of the area of the air outlet 120 (in the case shown in fig. 20 (c)) after the cylindrical body 131 rotates 180 °.

As a second aspect of the present invention, there is provided a magazine opening mechanism 10, as shown in fig. 21 to 24, the magazine opening mechanism 10 includes a magazine opening assembly 200 and a magazine purging assembly 100, the magazine 20 includes a magazine body 21 and a door 22, an opening is formed on the magazine body 21, the door 22 is used for closing the opening, and the magazine purging assembly is used for introducing a purging gas into the magazine body 21 through a gap between the door 22 and the opening of the magazine body 21 when the magazine opening assembly 200 opens the door 22 of the magazine 20, wherein the magazine purging assembly is the magazine purging assembly 100 provided in the previous embodiment.

In the magazine opening mechanism 10 provided by the present invention, the gas outlet areas of the plurality of gas outlets 120 on the magazine purging assembly 100 are adjustable, and when the magazine 20 is purged by using the magazine purging assembly 100, the gas outlet areas of the gas outlets 120 are adjustable, so as to eliminate the difference between the flow rates of the gas flows blown out from the gas outlets 120, so that the flow rates of the gas flows at the height positions of the magazine 20 are equal, thereby alleviating particle contamination on the wafer surface, improving the removal efficiency of gas (such as oxygen) in the magazine 20, and further improving the overall operation efficiency of the machine.

The structure of the magazine opening assembly 200 according to the embodiment of the present invention is not particularly limited, for example, as shown in fig. 21 and 22, the magazine opening assembly 200 may include a cylinder 210 and a door opening mechanism 220, after the door opening mechanism 220 is connected to the door 22 of the magazine 20, the cylinder 210 pulls the door opening mechanism 220 to open the door, and the magazine purging assembly 100 introduces a purging gas into the magazine body 21 through a gap between the door 22 and the opening of the magazine body 21.

As a third aspect of the present invention, there is provided a magazine apparatus comprising a magazine body 21 and a hatch 22, the magazine body 21 having an opening formed therein, the hatch 22 being adapted to close the opening. The magazine apparatus further includes a magazine purging assembly 100 provided in the previous embodiment, the magazine purging assembly 100 being disposed on an inner wall of the case body 21 and configured to blow a purge gas into the case body 21 when the door 22 is opened.

In the wafer storage box device provided by the invention, the air outlet areas of the plurality of air outlets 120 on the wafer storage box purging assembly 100 are adjustable, when the wafer storage box 20 is purged by the wafer storage box purging assembly 100, the air outlet areas of the air outlets 120 can be adjusted, and the difference between the flow rates of the air flows blown out from the air outlets 120 is eliminated, so that the flow rates of the air flows at all height positions of the wafer storage box 20 are equal, thereby alleviating the particle pollution on the surface of a wafer, improving the removal efficiency of gas (such as oxygen) in the wafer storage box 20, and further improving the overall operation efficiency of a machine.

The embodiment of the present invention does not specifically limit how the hatch 22 is opened and closed, and for example, the magazine opening mechanism 10 provided in the previous embodiment may be provided in the magazine apparatus provided in the present invention, that is, the magazine apparatus further includes a magazine opening assembly 200.

As a fourth aspect of the present invention, there is provided a semiconductor process apparatus, as shown in fig. 25, 26, comprising a cassette opening mechanism 10, a cassette device, a reaction chamber 30, and a transport chamber 40, the cassette device being the one provided in the previous embodiment, the transport chamber 40 being provided therein with a robot 41 for unloading wafers 2 from the cassette 21 of the cassette device, and a wafer boat 42 for carrying and transporting the wafers 2 into the reaction chamber 30.

In the semiconductor process equipment provided by the invention, the gas outlet areas of the plurality of gas outlets 120 on the wafer storage box purging assembly 100 in the wafer storage box opening mechanism 10 are adjustable, when the wafer storage box 20 is purged by using the wafer storage box purging assembly 100, the gas outlet areas of the gas outlets 120 can be adjusted, the difference between the flow rates of the gas flows blown out from the gas outlets 120 is eliminated, so that the flow rates of the gas flows at all height positions of the wafer storage box 20 are equal, the particle pollution on the surface of a wafer is relieved, the removal efficiency of the gas discharged from the wafer storage box is improved, and the integral operation efficiency of a machine is further improved.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.