Semiconductor process equipment and sealing door mechanism thereof
阅读说明:本技术 半导体工艺设备及其密封门机构 (Semiconductor process equipment and sealing door mechanism thereof ) 是由 陈志兵 王昭辉 李旭刚 于 2020-06-17 设计创作,主要内容包括:本申请实施例提供了一种半导体工艺设备及其密封门机构。该密封门机构用于密封隔离半导体工艺设备的花篮装卸载区与机械手工作区,其包括:导轨组件、驱动组件及密封组件;导轨组件包括框架,框架的两侧均设置有路径导轨;密封组件包括密封门及路径滚轮,密封门用于密封连通花篮装卸载区与机械手工作区的连通通道;密封门两侧均设置有路径滚轮,路径滚轮与路径导轨滑动配合;驱动组件与密封门连接,用于驱动密封门相对于框架沿路径导轨滑动,路径滚轮滑动至路径导轨的端部时,密封门在路径导轨的导向作用下密封连通通道。本申请实施例可有效提高密封效果,并延长使用寿命。(The embodiment of the application provides semiconductor process equipment and a sealing door mechanism thereof. The sealing door mechanism is used for sealing and isolating a basket loading and unloading area and a manipulator working area of semiconductor process equipment, and comprises: the device comprises a guide rail assembly, a driving assembly and a sealing assembly; the guide rail assembly comprises a frame, and path guide rails are arranged on two sides of the frame; the sealing assembly comprises a sealing door and a path roller, and the sealing door is used for sealing and communicating a communicating channel between the basket loading and unloading area and the manipulator working area; the two sides of the sealing door are provided with path rollers which are in sliding fit with the path guide rails; the driving assembly is connected with the sealing door and used for driving the sealing door to slide along the path guide rail relative to the frame, and when the path roller slides to the end part of the path guide rail, the sealing door seals the communication channel under the guiding action of the path guide rail. The embodiment of the application can effectively improve the sealing effect and prolong the service life.)
1. A sealing door mechanism in semiconductor process equipment is used for sealing and isolating a basket loading and unloading area and a manipulator working area of the semiconductor process equipment, and is characterized by comprising: the device comprises a guide rail assembly, a driving assembly and a sealing assembly;
the guide rail assembly comprises a frame, and path guide rails are arranged on two sides of the frame;
the sealing assembly comprises a sealing door and a path roller, and the sealing door is used for sealing and communicating a communication channel between the basket loading and unloading area and the manipulator working area; the two sides of the sealing door are provided with the path rollers, and the path rollers are in sliding fit with the path guide rails;
the driving assembly is connected with the sealing door and used for driving the sealing door to slide along the path guide rail relative to the frame, and when the path roller slides to the end part of the path guide rail, the sealing door seals the communication channel under the guiding action of the path guide rail.
2. The sealing door mechanism as claimed in claim 1, wherein said frame includes a frame top plate and frame side plates, said frame top plate is fixedly disposed between said basket loading area and said robot working area, said frame side plate is disposed on each of two sides of said frame top plate, said frame side plate is disposed with said path guide rail;
the path guide rail includes a linear portion extending in a length direction of the frame side plate and a curved portion having one end connected to the linear portion and the other end extending in a direction of the communication passage, and the sealing door seals the communication passage under a guiding action of the curved portion.
3. The sealing door mechanism of claim 2, wherein said sealing door comprises: the sealing door plate is used for sealing the communication channel, two sides of the sealing door plate are respectively provided with one sealing door side plate, and the path roller wheels are arranged on the sealing door side plates.
4. The seal door mechanism as claimed in claim 3, wherein said drive assembly includes a drive frame, a drive portion for driving said drive frame, said seal door being disposed on said drive frame;
the driving frame comprises a driving top plate, a driving bottom plate and two driving side plates, guide holes are formed in the two driving side plates, guide rollers are correspondingly arranged on the sealing door side plates and are in sliding fit with the guide holes, and when the path rollers slide to the bending portion, the guide rollers enable the sealing door to be sealed under the guide effect of the guide holes to communicate with the channel.
5. The seal door mechanism according to claim 4, wherein one end of the guide hole extends in a direction away from the communication passage and the other end extends in a length direction of the driving side plate, and when the path roller slides to the bent portion, the guide roller slides to the end of the guide hole extending in the length direction of the driving side plate.
6. The seal door mechanism as claimed in claim 4, wherein said drive side plate further includes a limiting roller slidably engaged with said frame side plate for limiting said drive rack.
7. The seal door mechanism as claimed in claim 4, wherein said frame side plate further has a linear guide rail thereon, and said driving side plate further has a linear roller thereon, said linear roller being slidably engaged with said linear guide rail for limiting said driving rack.
8. The seal door mechanism as claimed in claim 4, wherein said driving portion includes a driving source, a floating joint, said driving source being connected to said driving frame through said floating joint.
9. The seal door mechanism as claimed in claim 4, wherein said rail assembly further comprises a cover plate disposed on said frame for preventing impurities from passing through said rail assembly.
10. A semiconductor processing apparatus comprising a basket loading and unloading section, a robot working section, and a sealing door mechanism as claimed in any one of claims 1 to 9.
Technical Field
The application relates to the technical field of semiconductor processing, in particular to semiconductor process equipment and a sealing door mechanism thereof.
Background
At present, a material loading and unloading wafer conveying device of a silicon carbide (SiC) high-temperature furnace is divided into a basket (Cassette) loading and unloading area and a manipulator (Robot) working area, wherein the manipulator working area is communicated with a process chamber and needs to be always isolated from the outside so as to ensure cleanliness. The two areas are communicated in the normal loading and unloading process, and when the flower basket is taken away after being filled, the loading and unloading area of the flower basket needs to be communicated with the external environment. At the moment, in order to ensure that the manipulator working area is always isolated from the external environment, a sealing door needs to be arranged between the basket loading and unloading area and the manipulator working area, so that the sealing isolation can be realized by automatically closing, and the manipulator working area is ensured to meet the requirement on cleanliness all the time. The sealing door among the prior art is owing to adopt the side to push away and draw the structure, consequently leads to sealing door sealing washer on the sealing door to rub with the wall of basket loading and unloading district or manipulator workspace easily when removing to cause sealed inefficacy and reduce the sealing door life-span, thereby the sealing door leads to the fault rate higher owing to the structure is complicated among the prior art in addition.
Disclosure of Invention
The application aims at the defects of the prior art and provides a sealing door mechanism and semiconductor process equipment, and the sealing door mechanism and the semiconductor process equipment are used for solving the technical problems of sealing failure, short service life of the sealing door mechanism or high failure rate in the prior art.
In a first aspect, an embodiment of the present application provides a sealing door mechanism in a semiconductor processing apparatus, for sealing and isolating a basket loading and unloading area and a robot working area of the semiconductor processing apparatus, including: the device comprises a guide rail assembly, a driving assembly and a sealing assembly; the guide rail assembly comprises a frame, and path guide rails are arranged on two sides of the frame; the sealing assembly comprises a sealing door and a path roller, and the sealing door is used for sealing and communicating a communication channel between the basket loading and unloading area and the manipulator working area; the two sides of the sealing door are provided with the path rollers, and the path rollers are in sliding fit with the path guide rails; the driving assembly is connected with the sealing door and used for driving the sealing door to slide along the path guide rail relative to the frame, and when the path roller slides to the end part of the path guide rail, the sealing door seals the communication channel under the guiding action of the path guide rail.
In an embodiment of the present application, the frame includes a frame top plate and frame side plates, the frame top plate is fixedly disposed between the basket loading and unloading area and the manipulator working area, two sides of the frame top plate are respectively provided with one frame side plate, and the frame side plates are provided with the path guide rails; the path guide rail includes a linear portion extending in a length direction of the frame side plate and a curved portion having one end connected to the linear portion and the other end extending in a direction of the communication passage, and the sealing door seals the communication passage under a guiding action of the curved portion.
In an embodiment of the present application, the sealing door includes: the sealing door plate is used for sealing the communication channel, two sides of the sealing door plate are respectively provided with one sealing door side plate, and the path roller wheels are arranged on the sealing door side plates.
In an embodiment of the present application, the driving assembly includes a driving frame, and a driving portion, the driving portion is used for driving the driving frame, and the sealing door is disposed on the driving frame; the driving frame comprises a driving top plate, a driving bottom plate and two driving side plates, guide holes are formed in the two driving side plates, guide rollers are correspondingly arranged on the sealing door side plates and are in sliding fit with the guide holes, and when the path rollers slide to the bending portion, the guide rollers enable the sealing door to be sealed under the guide effect of the guide holes to communicate with the channel.
In an embodiment of the present application, one end of the guide hole extends in a direction away from the communication passage, and the other end extends in a length direction of the driving side plate, and when the path roller slides to the bending portion, the guide roller slides to one end of the guide hole extending in the length direction of the driving side plate.
In an embodiment of the application, still be provided with spacing gyro wheel on the drive curb plate, spacing gyro wheel with frame curb plate sliding fit is used for right the carriage carries on spacingly.
In an embodiment of the application, still be provided with linear guide on the frame curb plate, still be provided with the sharp gyro wheel on the drive curb plate correspondingly, the sharp gyro wheel with linear guide sliding fit is used for right the drive frame carries on spacingly.
In an embodiment of the present application, the driving portion includes a driving source and a floating joint, and the driving source is connected to the driving frame through the floating joint.
In an embodiment of the present application, the rail assembly further includes a cover plate disposed on the frame for preventing impurities from passing through the rail assembly.
In a second aspect, embodiments of the present application provide a semiconductor processing apparatus comprising a basket loading and unloading section, a robot work section, and a sealing door mechanism as provided in the first aspect.
The technical scheme provided by the embodiment of the application has the following beneficial technical effects:
this application embodiment drives seal assembly's sealing door relative frame through drive assembly and slides, and sealing door seals the intercommunication passageway under the guide effect of route guide rail to the realization is loaded and unloaded the sealed isolation between district and the manipulator workspace to the basket of flowers. Because the sealing door only receives the extrusion effect to turn to and make the sealing door, avoid simultaneously carrying the wall of district and manipulator workspace and taking place shear friction with basket of flowers loading and unloading, can not only effectively prolong the life of sealing door mechanism, can effectively improve sealed effect moreover. In addition, the embodiment of the application has a simple structure, and the failure rate can be effectively reduced, so that the application and maintenance cost of the embodiment of the application is greatly reduced.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1A is a schematic front view of a sealing door mechanism according to an embodiment of the present disclosure;
FIG. 1B is a schematic cross-sectional view of the seal door mechanism shown in FIG. 1A taken along line A-A;
fig. 2 is a schematic cross-sectional view of a guide rail assembly provided in an embodiment of the present application in a right-view state;
fig. 3A is a schematic front view of a driving assembly according to an embodiment of the present disclosure;
FIG. 3B is a schematic cross-sectional view of the drive assembly shown in FIG. 3A taken along line B-B;
FIG. 4A is a schematic rear view of a seal assembly according to an embodiment of the present disclosure;
FIG. 4B is a schematic cross-sectional view of the seal assembly shown in FIG. 4A taken along line C-C;
fig. 5A is a schematic view illustrating an opening state of a sealing door mechanism according to an embodiment of the present disclosure;
FIG. 5B is a schematic view of a closed state of a sealing door mechanism according to an embodiment of the present disclosure;
fig. 6 is a schematic view illustrating stress analysis of guide rollers located at different positions of a guide hole according to an embodiment of the present application.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.
As shown in fig. 1A, fig. 1B, fig. 5A and fig. 5B, an embodiment of the present application provides a sealing door mechanism 100 in a semiconductor processing apparatus, for sealing and isolating a basket loading and unloading area 200 and a robot working area 300 of the semiconductor processing apparatus, wherein a schematic structural diagram of the sealing door mechanism 100 is shown in fig. 1, and includes: the device comprises a guide rail assembly 1, a
the guide rail assembly 1 comprises a
As shown in fig. 1A, 1B, 5A and 5B, the sealing door mechanism 100 is specifically disposed between the basket loading and unloading area 200 and the robot working area 300 of the semiconductor processing apparatus, and can be used to seal a communication channel 400 between the basket loading and unloading area 200 and the robot working area 300, so as to achieve sealing isolation between the basket loading and unloading area 200 and the robot working area 300, and prevent impurities from entering the robot working area 300 during operation of the basket loading and unloading area 200, thereby ensuring cleanliness of the robot working area 300 and a process chamber (not shown in the figure) connected to the robot working area 300.
Fig. 1A shows a front view of the sealing door mechanism 100, and for convenience of describing the embodiments of the present application, descriptions in all the following embodiments are described in a view direction in the figure, in which a front face is front, a back face is back, a left side is left, and a right side is right. The
This application embodiment drives the relative frame slip of sealing door through drive assembly, and the sealing door seals the intercommunication passageway under the guide effect of route guide rail to the realization is loaded and unloaded the sealed isolation between district and the manipulator workspace to the basket of flowers. Because the sealing door only receives the extrusion effect to turn to and make the sealing door, avoid simultaneously carrying the wall of district and manipulator workspace and taking place shear friction with basket of flowers loading and unloading, can not only effectively prolong the life of sealing door mechanism, can effectively improve sealed effect moreover. In addition, the embodiment of the application has a simple structure, and the failure rate can be effectively reduced, so that the application and maintenance cost of the embodiment of the application is greatly reduced.
It should be noted that, the embodiments of the present application do not limit the specific materials and shapes of the
In an embodiment of the present application, as shown in fig. 1A to fig. 2, the
As shown in fig. 1A to 2, the
The embodiment of the present application is not limited to the specific structure of the
In an embodiment of the present application, the sealing
As shown in fig. 4A and 4B, the sealing
In an embodiment of the present application, as shown in fig. 1A to 4B, the driving assembly includes a driving
As shown in fig. 1A to 4B, the
In an embodiment of the present application, one end of the guide hole 23 extends in a direction away from the communication channel 400, and the other end extends in a length direction of the driving
As shown in fig. 3A, 3B, 5A and 5B, the guide hole 23 is disposed close to the front side of the driving
It should be noted that the embodiment of the present application is not limited to the specific shape of the guide hole 23, and for example, the guide hole 23 may also be a straight hole shape to achieve the above function. Therefore, the implementation of the present application is not limited thereto, and those skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, the driving
As shown in fig. 1A to 3B, specifically, two limiting
In an embodiment of the present application, the frame side plate 112 is further provided with a linear guide rail 12, the driving
As shown in fig. 1A to 3B, the frame side plate 112 is further provided with a linear guide rail 12, specifically, the linear guide rail 12 is also provided extending in the longitudinal direction of the
In an embodiment of the present application, as shown in fig. 3A and 3B, the driving
In an embodiment of the present application, as shown in fig. 3A and 3B, the driving
In an embodiment of the present application, as shown in fig. 1A and 1B, the rail assembly 1 further includes a
In one embodiment of the present application, as shown in fig. 1A and 4B, the
In an embodiment of the present application, the sealing
As shown in fig. 1A, 1B, 5A and 5B, the sealing ring 35 may be made of silicone or rubber, but the embodiment of the present invention is not limited thereto, as long as the sealing ring has the characteristics of high temperature resistance and corrosion resistance, and the sealing effect of the sealing
For further explanation of the embodiments of the present application, the operation principle of the present application will be described below with reference to fig. 1A to 5B. Fig. 5A shows an open state of the sealing door mechanism 100 of the embodiment of the present application; fig. 5B shows a closed state of the sealing mechanism of the embodiment of the present application. Referring to fig. 5A and 5B, the sealing door mechanism 100 is disposed between the basket attachment/detachment region 200 and the robot working region 300, the front side of the sealing door mechanism 100 is disposed toward the basket attachment/detachment region 200, and a communication passage 400 is provided between the basket attachment/detachment region 200 and the robot working region 300. When the sealing door mechanism 100 is in the open state, the
When the sealing door mechanism 100 starts to be closed, the telescopic rod of the driving
When the
Fig. 6 shows a force analysis diagram of the
When the sealing
Based on the same inventive concept, the embodiment of the application provides semiconductor process equipment which comprises a basket loading and unloading area, a manipulator working area and a sealing door mechanism provided by the above embodiments.
By applying the embodiment of the application, at least the following beneficial effects can be realized:
this application embodiment drives the relative frame slip of sealing door through drive assembly, and the sealing door seals the intercommunication passageway under the guide effect of route guide rail to the realization is loaded and unloaded the sealed isolation between district and the manipulator workspace to the basket of flowers. Because the sealing door only receives the extrusion effect to turn to and make the sealing door, avoid simultaneously carrying the wall of district and manipulator workspace and taking place shear friction with basket of flowers loading and unloading, can not only effectively prolong the life of sealing door mechanism, can effectively improve sealed effect moreover. In addition, the embodiment of the application has a simple structure, and the failure rate can be effectively reduced, so that the application and maintenance cost of the embodiment of the application is greatly reduced.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
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