Micro pump
阅读说明:本技术 微型泵 (Micro pump ) 是由 莫皓然 高中伟 陈世昌 廖家淯 廖鸿信 黄启峰 韩永隆 蔡长谚 于 2019-03-15 设计创作,主要内容包括:一种微型泵,包括依序堆叠的设置的进气板、共振片、压电致动器、绝缘片及导电片。进气板具有进气孔、汇流排孔及汇流腔室。共振片具有中空孔。压电致动器与共振片之间定义腔室空间,压电致动器包含悬浮板、外框、连接部及压电元件,连接部连接于悬浮板及外框之间,并定义间隙以供气体流通。导电片具有多个接触导电端,用以电连接压电元件。当压电致动器受驱动时,气体由进气孔导入,流经汇流腔室、中空孔导入腔室空间内,再经由间隙排出,以实现气体的传输。(A micropump comprises an air inlet plate, a resonance sheet, a piezoelectric actuator, an insulation sheet and a conducting sheet which are sequentially stacked. The air inlet plate is provided with an air inlet hole, a bus bar hole and a bus chamber. The resonator plate has a hollow hole. The piezoelectric actuator and the resonance sheet define a cavity space, the piezoelectric actuator comprises a suspension plate, an outer frame, a connecting part and a piezoelectric element, and the connecting part is connected between the suspension plate and the outer frame and defines a gap for gas circulation. The conducting strip is provided with a plurality of contact conducting ends for electrically connecting the piezoelectric element. When the piezoelectric actuator is driven, gas is introduced from the gas inlet hole, flows through the confluence chamber and the hollow hole, is introduced into the chamber space, and is discharged through the gap, so that the gas is transmitted.)
1. A micropump, comprising:
the air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a confluence chamber, wherein at least one air inlet hole is used for introducing air, at least one air inlet hole corresponds to at least one bus bar hole, at least one bus bar hole is correspondingly communicated with the confluence chamber, and the air introduced into at least one air inlet hole is guided to converge into the confluence chamber;
a resonance sheet, which is jointed with the air inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the air inlet plate;
a piezoelectric actuator assembled and combined on the resonance sheet through a filling material, a cavity space is formed between the piezoelectric actuator and the resonance sheet, the piezoelectric actuator comprises a suspension plate, an outer frame, at least one connecting part, a piezoelectric element and at least one gap, the connecting part is connected between the suspension plate and the outer frame to provide elastic support, the gap is arranged between the suspension plate and the outer frame to provide air circulation, and the piezoelectric element is attached to one surface of the suspension plate;
an insulating sheet coupled to one side of the piezoelectric actuator;
a conducting strip, which is combined with the insulating sheet and is provided with a plurality of contact conducting ends and a plurality of ventilation openings, wherein the contact conducting ends are convexly arranged on the surface of the conducting strip, and the conducting strip is assembled on the piezoelectric actuator and forms close prestress contact with the surface of the piezoelectric element to be used as a driving electrode;
when the piezoelectric actuator is driven, the gas is led in from at least one air inlet of the air inlet plate, is collected to the collecting cavity through at least one collecting bar hole, flows through the hollow hole of the resonance sheet and is led into the cavity space, is transmitted through the resonance action of the piezoelectric actuator, is discharged from the gap and is discharged outside through the plurality of air-permeable openings, and gas transmission is formed.
2. The micropump of claim 1, wherein the surface of the suspension plate of the piezoelectric actuator includes a first surface and a second surface, the second surface is opposite to the first surface, the piezoelectric element is attached to the second surface of the suspension plate, and the outer frame of the piezoelectric actuator has a mating surface and a lower surface.
3. The micropump of claim 2, wherein the first surface of the suspension plate and the mating surface of the external frame both form a common plane.
4. The micropump of claim 2, wherein at least one connecting portion is formed by stamping between the suspension plate and the outer frame, the first surface of the suspension plate and the mating surface of the outer frame are formed to be non-coplanar, and a distance between the first surface of the suspension plate and the resonator plate is adjusted by stamping at least one connecting portion.
5. The micropump of claim 1, wherein the movable portion of the resonator plate is disposed around the hollow hole and in a region corresponding to the manifold chamber.
6. The micropump of claim 1, wherein the fixing portion of the resonator plate is disposed at an outer peripheral portion of the resonator plate and is attached to the intake plate.
7. The micropump of claim 1, wherein the filler material is a conductive adhesive.
8. The micro-pump as claimed in claim 1, wherein the outer frame has a first conductive pin, and the conductive sheet has a second conductive pin for electrical connection.
9. The micropump of claim 2, wherein the first surface of the suspension plate is provided with a protrusion corresponding to the movable portion of the resonator plate.
Technical Field
The present invention relates to a pneumatic power device, and more particularly to a miniature ultra-thin and silent micro pump.
Background
At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.
For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power are often powered by conventional motors and pneumatic valves for gas delivery. However, due to the volume limitations of the conventional motors and gas valves, it is difficult to reduce the overall size of the apparatus, i.e. to achieve the goal of thin-type apparatus, and further to achieve the purpose of portability. In addition, the conventional motor and gas valve also generate noise during operation, which causes inconvenience and discomfort in use.
Therefore, how to develop a micro pump that can maintain a certain operating characteristic and flow rate of the micro pump under long-term use is a problem that needs to be solved urgently.
Disclosure of Invention
An object of the present invention is to provide a micro pump, in which gas enters from an air inlet on the micro pump, and the actuation of a piezoelectric actuator is utilized to generate a pressure gradient in a designed flow channel and a designed confluence chamber, so as to enable the gas to flow at a high speed, thereby achieving a silent effect, further reducing the overall volume of the micro gas power device and thinning the micro gas power device, and further achieving the portable purpose of light and comfort of the micro gas power device.
Another object of the present invention is to provide a micro pump, which is different from the known way of using a welding conductive wire on an electrode of a piezoelectric element to achieve the electrical connection function of leading out the electrode, and the present invention uses a non-welding contact conductive terminal design on the electrode of the piezoelectric element to overcome the problem of leading out the electrode by a conductive wire, thereby greatly reducing the complex processes of assembly, and without using a welding spot welding method, the piezoelectric characteristic attenuation problem of the local or even the whole piezoelectric element is not affected by high temperature, and without using a welding spot welding method, the problem of unavoidable space limitation problem inside the micro pump and the problem of uneven actuation caused by the quality and volume of the welding spot and the welding colloid itself are not available.
To achieve the above object, a broad aspect of the present invention provides a micropump comprising: the air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a confluence chamber, wherein at least one air inlet hole is used for introducing air, at least one air inlet hole corresponds to at least one bus bar hole, at least one bus bar hole is correspondingly communicated with the confluence chamber, and the air introduced into at least one air inlet hole is guided to converge into the confluence chamber; a resonance sheet, which is jointed with the air inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the air inlet plate; a piezoelectric actuator assembled and combined on the resonance sheet through a filling material and having a cavity space, the piezoelectric actuator comprising a suspension plate, an outer frame, at least one connection part, a piezoelectric element and at least one gap, wherein the connection part is connected between the suspension plate and the outer frame to provide elastic support, the gap is arranged between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element is attached to one surface of the suspension plate; an insulating sheet coupled to one side of the piezoelectric actuator; the conducting strip is combined with the insulating sheet and is provided with a plurality of contact conducting ends and a plurality of ventilation openings, the contact conducting ends are convexly arranged on the surface of the conducting strip, and the conducting strip is assembled on the piezoelectric actuator and forms close prestress contact with the surface of the piezoelectric element to be used as a driving electrode; when the piezoelectric actuator is driven, the gas is led in from at least one air inlet of the air inlet plate, is collected to the collecting cavity through at least one collecting bar hole, flows through the hollow hole of the resonance sheet and is led into the cavity space, is transmitted through the resonance action of the piezoelectric actuator, is discharged from the gap and is discharged outside through the plurality of ventilation openings, and therefore gas transmission is formed.
Drawings
Fig. 1 is a schematic perspective view of the micropump of the present invention.
FIG. 2A is a schematic view of the micro-pump in a front view.
Fig. 2B is an exploded view of the micro pump in a back view.
Fig. 3A is a schematic cross-sectional view of the micropump of the present invention.
FIG. 3B is a schematic cross-sectional view of another preferred embodiment of the micropump of the present invention.
Fig. 4A to 4C are schematic views illustrating operation of the micro pump in fig. 3A.
Description of the reference numerals
1: micro pump
11: air inlet plate
11 a: air intake
11 b: bus bar hole
11 c: confluence chamber
12: resonance sheet
12 a: hollow hole
12 b: movable part
12 c: fixing part
13: piezoelectric actuator
13 a: suspension plate
131 a: first surface
132 a: second surface
13 b: outer frame
131 b: matched surface
132 b: lower surface
133 b: first conductive pin
13 c: connecting part
13 d: piezoelectric element
13 e: gap
13 f: convex part
131 f: surface of the convex part
14: insulating sheet
15: conductive sheet
15 a: second conductive pin
15 b: contact conductive terminal
15 c: ventilation opening
g: filling material
16: chamber space
h: distance between each other
Detailed Description
Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.
Referring to fig. 1, 2A, 2B and 3A, the
The
The above-mentioned
The
The
The insulating
Referring to fig. 4A to 4C, firstly, referring to fig. 4A, after the driving voltage is applied to the
In summary, the micro pump provided by the present disclosure is mainly characterized in that gas enters from a gas inlet on the micro pump, and the actuation of the piezoelectric actuator is utilized to generate a pressure gradient in the designed flow channel and the confluence chamber, so as to enable the gas to flow at a high speed, so that the micro pump can achieve a silent effect, further reduce the overall volume and thin the micro gas power device, and further enable the micro gas power device to achieve the portable purpose of light and comfort, and can be widely applied to medical devices and related equipment; and the design of using the non-welding contact conductive end on the electrode of the piezoelectric element overcomes the problems that the electrode is led out by a lead wire, which is different from the known method that the welding conductive wire is used on the electrode of the piezoelectric element to achieve the connection electrical function of leading out the electrode, the complex process of assembly is greatly simplified, the piezoelectric characteristic attenuation problem of local or even whole piezoelectric element is not influenced by high temperature without using a welding spot welding mode, and the unavoidable space limitation problem and the non-uniform actuation problem in the interior of the micro-pump caused by the mass and volume of the welding spot and the welding colloid are not used without using the welding spot welding mode, so the micro-pump has industrial applicability.
While the present invention has been described in detail with reference to the above embodiments, it will be apparent to one skilled in the art that various changes and modifications can be made therein without departing from the scope of the invention as defined in the appended claims.
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