阅读说明：本技术 流体控制装置 (Fluid control device ) 是由 田口明広 于 2020-02-27 设计创作，主要内容包括：本发明提供一种流体控制装置,其包括：主体构件,是在内部具有流体流动的流道的块状构件,具有设置有用于控制在所述流道内流动的流体的各设备的设置面和与所述设置面相邻的侧面；加热器,对所述主体构件进行加热；加热器保持构件,具有与所述主体构件的所述设置面相对的对置面,在使所述对置面与所述设置面相对的状态下将所述加热器保持成沿着所述侧面；以及按压机构,将所述对置面向所述设置面按压。(The present invention provides a fluid control device, comprising: a body member that is a block-shaped member having a flow path through which a fluid flows, and that has a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted and a side surface adjacent to the mounting surface; a heater that heats the body member; a heater holding member having an opposing surface opposing the installation surface of the body member, the heater holding member holding the heater along the side surface in a state where the opposing surface is opposed to the installation surface; and a pressing mechanism that presses the opposing surface against the installation surface.)

1. A fluid control device, characterized by comprising:

a body member that is a block-shaped member having a flow path through which a fluid flows, and that has a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted and a side surface adjacent to the mounting surface;

a heater that heats the body member;

a heater holding member having an opposing surface opposing the installation surface of the body member, the heater holding member holding the heater along the side surface in a state where the opposing surface is opposed to the installation surface; and

and a pressing mechanism for pressing the opposed surface against the installation surface.

2. The fluid control device according to claim 1,

the setting surface includes a first contact portion that contacts the opposing surface,

the opposed surface includes a second contact portion that contacts the first contact portion,

at least one of the first contact portion and the second contact portion is formed in a planar shape inclined with respect to a pressing direction of the pressing mechanism.

3. The fluid control device according to claim 2,

the first contact portion and the second contact portion constitute a slide mechanism interposed between the installation surface and the facing surface,

the sliding mechanism slides the heater holding member with respect to the body member by pressing of the pressing mechanism so that the heater faces the side surface side.

4. The fluid control device according to claim 2, wherein the first contact portion and the second contact portion are configured to be in surface contact with each other.

5. The fluid control device according to claim 1,

the heater holding member includes:

a mounting portion having the opposed surface; and

a heater holding portion extending from the opposite surface side of the mounting portion along the side surface,

the heater is provided on at least one of a surface of the heater holding portion facing the side surface or another surface opposite to the one surface.

6. The fluid control device according to claim 5, wherein the one surface of the heater holding member is inclined from the opposing surface to the side surface side.

7. The fluid control device according to claim 5,

the pressing mechanism includes:

the threaded hole is arranged on the setting surface;

a long hole penetrating the mounting portion and extending in a direction away from the heater holding portion; and

and a screw member screwed into the screw hole in a state of being inserted into the elongated hole.

8. A fluid control device, characterized by comprising:

a body member that is a block-shaped member having a flow path through which a fluid flows, and that includes a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted, and a pair of side surfaces adjacent to the mounting surface;

a heater disposed along each of the side surfaces; and

a holding mechanism for holding the heater in close contact with the side surface,

the holding mechanism includes:

a pair of heater holding plates facing the respective side surfaces of the body member and holding the heaters therebetween;

a locking structure provided in the body member and locking one end portion of the pair of heater holding plates extending in a direction opposite to a direction in which the installation surface faces; and

a connecting mechanism for connecting the other end portions of the pair of heater holding plates extending in a direction toward the installation surface,

the heater is configured to be held in close contact with the side surface by locking one end portions of the pair of heater holding plates to the locking structure and connecting the other end portions by the connecting mechanism.

9. A fluid control device, characterized by comprising:

a body member that is a block-shaped member having a flow path through which a fluid flows, and that includes a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted, and a pair of side surfaces adjacent to the mounting surface;

a heater configured along the side; and

a holding mechanism for holding the heater in close contact with the side surface,

the holding mechanism includes:

a heater holding plate opposed to a side surface of the body member and holding the heater therebetween;

a locking structure provided in the body member and locking an end portion of the heater holding plate extending in a direction opposite to a direction in which the installation surface faces; and

a connecting mechanism for connecting the other end of the heater holding plate extending in a direction toward the installation surface to the main body member,

the heater is configured to be held in close contact with the side surface by locking one end portions of the pair of heater holding plates to the locking structures and connecting the other end portions to the installation surface by the connecting mechanism.

Technical Field

The present invention relates to a fluid control device.

Background

As shown in patent document 1, a conventional fluid control device includes, for example: a block-shaped body member having a fluid flow passage therein; and each device provided on the installation surface of the body member and controlling the fluid flowing in the flow passage.

In addition, the conventional fluid control device is configured such that a heater for heating the body member is screwed and fixed to a side surface of the body member adjacent to the installation surface.

Also, such a fluid control device is generally provided in an integrated manner in plural, but in this case, adjacent fluid control devices are disposed so that the side surfaces of the body members are close to each other. Therefore, the heater is located between the adjacent body members and is difficult to access, so that maintenance of the heater is very troublesome.

Disclosure of Invention

Therefore, a main object of the present invention is to provide a fluid control device which is excellent in maintainability because a heater disposed on a side surface of a body member can be easily detached even if the fluid control device is integrally disposed.

That is, the fluid control device of the present invention includes: a body member that is a block-shaped member having a flow path through which a fluid flows, and that has a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted and a side surface adjacent to the mounting surface; a heater that heats the body member; a heater holding member having an opposing surface opposing the installation surface of the body member, the heater holding member holding the heater along the side surface in a state where the opposing surface is opposed to the installation surface; and a pressing mechanism that presses the opposing surface against the installation surface.

According to this configuration, since the heater holding member attached to the installation surface of the body member so as to be pressed by the pressing mechanism holds the heater along the side surface, the heater holding member can be detached from the installation surface side of the body member which is relatively easily accessible even after the integrated arrangement. This improves the maintainability of the heater. Further, since the opposed surface is pressed against the installation surface by the pressing mechanism, the heater holding member can be prevented from being displaced relative to the body member.

Further, the installation surface may include a first contact portion that contacts the facing surface, the facing surface may include a second contact portion that contacts the first contact portion, and at least one of the first contact portion and the second contact portion may be formed in a planar shape that is inclined with respect to a pressing direction of the pressing mechanism.

Further, the first contact portion and the second contact portion may constitute a slide mechanism interposed between the installation surface and the facing surface, and the slide mechanism may slide the heater holding member with respect to the body member by pressing of the pressing mechanism so that the heater faces the side surface.

According to this configuration, the heater holding member can be slid with respect to the body member between the installation surface and the facing surface by the pressing of the pressing mechanism so that the heater faces the side surface side, and therefore the heater can be reliably brought into close contact with the side surface of the body member. Thereby, the heat of the heater is efficiently transmitted to the body member.

The specific structure of the sliding mechanism may be as follows: the sliding mechanism includes a first contact portion provided on the installation surface and a second contact portion provided on the opposite surface and contacting the first contact portion, and at least one of the first contact portion and the second contact portion is formed in a planar shape inclined with respect to a pressing direction of the pressing mechanism. In this case, the first contact portion and the second contact portion may be configured to be in surface contact with each other.

According to this configuration, the sliding mechanism capable of sliding the heater holding member with respect to the main body member can be configured without adopting a complicated configuration.

Further, as specific structures of the heater holding member, the following structures can be cited: the heater holding member includes: a mounting portion having the opposed surface; and a heater holding portion extending from the opposite surface side of the mounting portion along the side surface, the heater being provided on at least one of a surface of the heater holding portion opposite to the side surface or another surface opposite to the one surface.

Further, the one surface of the heater holding member may be inclined from the opposing surface to the side surface side.

According to this configuration, when the opposed surface is pressed against the installation surface by the pressing mechanism, at least a part of the heater holding portion can be brought into close contact with the side surface in a state of being biased.

Further, as a specific configuration of the pressing mechanism, there can be cited one including: the threaded hole is arranged on the setting surface; a long hole penetrating the mounting portion and extending in a direction away from the heater holding portion; and a screw member screwed and fixed to the screw hole in a state of being inserted through the elongated hole.

The present invention also provides a fluid control device characterized by comprising: a body member that is a block-shaped member having a flow path through which a fluid flows, and that includes a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted, and a pair of side surfaces adjacent to the mounting surface; a heater disposed along each of the side surfaces; and a holding mechanism for holding the heater in close contact with the side surface, the holding mechanism including: a pair of heater holding plates facing the respective side surfaces of the body member and holding the heaters therebetween; a locking structure provided in the body member and locking one end portion of the pair of heater holding plates extending in a direction opposite to a direction in which the installation surface faces; and a connecting mechanism for connecting the other end portions of the pair of heater holding plates extending in a direction in which the pair of heater holding plates face the installation surface, wherein the heater is held in close contact with the side surface by locking the one end portions of the pair of heater holding plates to the locking structure and connecting the other end portions by the connecting mechanism.

The present invention also provides a fluid control device characterized by comprising: a body member that is a block-shaped member having a flow path through which a fluid flows, and that includes a mounting surface on which devices for controlling the fluid flowing through the flow path are mounted, and a pair of side surfaces adjacent to the mounting surface; a heater configured along the side; and a holding mechanism for holding the heater in close contact with the side surface, the holding mechanism including: a heater holding plate opposed to a side surface of the body member and holding the heater therebetween; a locking structure provided in the body member and locking an end portion of the heater holding plate extending in a direction opposite to a direction in which the installation surface faces; and a connecting mechanism that connects the other end portion of the heater holding plate extending in a direction in which the heater holding plate faces the installation surface to the body member, wherein the heater is held in close contact with the side surface by locking one end portions of the pair of heater holding plates to the locking structure and connecting the other end portions to the installation surface by the connecting mechanism.

According to the fluid control device configured as described above, even if the fluid control device is integrally disposed, the heater disposed on the side surface of the main body member can be easily detached from the installation surface side, and thus the maintainability is improved.

Drawings

Fig. 1 is an exploded perspective view schematically showing a fluid control device according to a first embodiment.

Fig. 2 is a cross-sectional view schematically showing a state in which a body member of the fluid control device of the first embodiment is cut in a longitudinal direction.

Fig. 3 is an exploded cross-sectional view schematically showing a state in which a main body member of the fluid control device of the first embodiment is cut in a width direction.

Fig. 4 is a sectional view schematically showing a process of mounting a heater holding member on a body member of the fluid control device of the first embodiment.

Fig. 5 is a cross-sectional view schematically showing a state in which a main body member of a fluid control apparatus according to a second embodiment is cut in a width direction.

Fig. 6 is a sectional view schematically showing a process of mounting a heater holding member on a body member of a fluid control apparatus according to a second embodiment.

Fig. 7 is a cross-sectional view schematically showing a fluid control apparatus according to another embodiment of the first embodiment.

Fig. 8 is a sectional view schematically showing a fluid control apparatus according to another embodiment of the first embodiment.

Fig. 9 is a sectional view schematically showing a fluid control apparatus according to another embodiment of the second embodiment.

Description of the reference numerals

100 fluid control device

10 main body member

S1 setting surface

Side surface of S2

20 devices of each

30 heater

40 Heater holding Member

40a mounting part

40s opposite side

40b Heater holding portion

40x one side

40y another side

50 pressing mechanism

50a screw hole

50b long hole

50c screw member

60 sliding mechanism

60a first contact part

60b second contact part

M holding mechanism

70 heater holding plate

80 locking structure

90 connection structure

Detailed Description

Next, a fluid control device according to the present invention will be described with reference to the drawings.

The fluid control device of the present invention is incorporated in, for example, a semiconductor production line and used.

< first embodiment >

As shown in fig. 1 and 2, a fluid control apparatus 100 of the present embodiment includes: a body member 10 having a flow passage L through which a fluid flows; each device 20 provided in the body member 10 and controlling the fluid flowing in the flow path L; a heater 30 for heating the body member 10; and a heater holding member 40 attached to the body member 10 and holding the heater 30.

The body member 10 is block-shaped. Specifically, the body member 10 is rectangular parallelepiped. In addition, the body member 10 includes an inlet port 10a for introducing a fluid into the flow path L at one end surface in the longitudinal direction, and includes an outlet port 10b for discharging the fluid from the flow path L at the other end surface in the longitudinal direction.

The body member 10 is configured such that a predetermined surface extending in the longitudinal direction is defined as a mounting surface S1, and the heater holding member 40 is mounted on the mounting surface S1 on which the devices 20 are mounted. The main body member 10 includes a purge gas inlet 10c for introducing a purge gas into the flow path L on the installation surface S1.

Each of the devices 20 controls the fluid flowing in the flow passage L. Specifically, each apparatus 20 of the present embodiment includes: a first air valve 20a, a preheating container 20b, a first flow rate adjustment valve 20c, a heating container 20d, a pressure sensor 20e, a second air valve 20f, a third air valve 20g, a second flow rate adjustment valve 20h, and a flow rate sensor 20 i. Further, these respective devices 20 are provided on the installation surface S1 of the body member 10 in the above-described order from the upstream side to the downstream side of the flow path L.

Each of the apparatuses 20 of the present embodiment is configured as follows: the flow rate of the liquid material introduced from the introduction port 10a is adjusted by the first flow rate adjustment valve 20c, and the liquid material is heated by the preheating container 20b and the heating container 20d to become the material gas, and the flow rate of the material gas is feedback-controlled by the second flow rate adjustment valve 20h so that the measurement value of the flow rate sensor 20i approaches the set value, and is derived from the lead-out port 10 b.

The heater 30 is flat plate-shaped. As the heater 30, for example, a rubber heater can be used.

The heater holding member 40 is attached to the installation surface S1 of the body member 10, and holds the heater 30 along the side surface S2 of the body member 10 adjacent to the installation surface S1. Here, the side surface S2 is a surface of the body member 10 adjacent to the installation surface S1 in the longitudinal direction, and the side surface S2 of the present embodiment is perpendicular to the installation surface S1. In the present embodiment, the two heater holding members 40 are attached to the body member 10, but the two heater holding members 40 and the attachment structure thereof are symmetrical with respect to the center line α extending in the longitudinal direction of the body member 10, and therefore the structure will be described below only for one heater holding member 40.

Specifically, the heater holding member 40 includes: a pair of mounting portions 40a including an opposing surface 40S opposing the installation surface S1 of the body member 10; and heater holding portions 40b mounted on the mounting portions 40 a. As shown in fig. 3, the heater holding portion 40b extends along the side surface S2 of the body member 10 in a state where the facing surface 40S of the pair of mounting portions 40a faces the installation surface S1. The heater holding member 40 is configured such that the facing surface 40S of each mounting portion 40a is pressed against the installation surface S1 by the pressing mechanism 50. The heater holding member 40 of the present embodiment includes two mounting portions 40a, but may include one or three or more mounting portions 40 a.

The heater 30 is provided on the other surface 40y opposite to the one surface 40x of the heater holding portion 40b facing the side surface S2. The heater 30 may be provided on the one surface 40x of the heater holding portion 40b, or may be provided on both the one surface 40x and the other surface 40 y.

The pressing mechanism 50 presses the facing surface 40S against the installation surface S1. Specifically, the pressing mechanism 50 includes: a screw hole 50a provided in the installation surface S1 of the body member 10; an elongated hole 50b that penetrates the mounting portion 40a of the heater holding member 40 and extends in a direction away from the heater holding portion 40b (a direction intersecting the one surface 40 x); and a bolt-like screw member 50c screwed into the screw hole 50a while passing through the elongated hole 50 b. In addition, the screw member 50c has a shaft portion 50x passing through the elongated hole 50b and a head portion 50y not passing through the elongated hole 50 b.

The pressing mechanism 50 is configured such that the head portion 50y of the screw member 50c engaged with the elongated hole 50b presses the facing surface 40S of the attachment portion 40a against the installation surface S1 by screwing the screw member 50c into the screw hole 50 a.

Further, the slide mechanism 60 is interposed between the facing surface 40S and the installation surface S1. The slide mechanism 60 slides the heater holding member 40 relative to the body member 10 by pressing the pressing mechanism 50 so that the heater 30 held by the heater holding portion 40b faces the side surface S2 side.

Specifically, the slide mechanism 60 includes a first contact portion 60a provided on the installation surface S1 and a second contact portion 60b provided on the facing surface 40S. The first contact portion 60a is formed by a portion of the installation surface S1 that contacts the facing surface 40S, and has, for example, a surface shape or a protruding shape. The second contact portion 60b is formed by a portion of the facing surface 40S that is in contact with the installation surface S1, and has, for example, a surface shape or a protruding shape. The first contact portion 60a and the second contact portion 60b are configured to be in slidable contact with each other when the facing surface 40S is pressed against the installation surface S1 by the pressing mechanism 50.

As shown in fig. 3, the first contact portion 60a and the second contact portion 60b of the present embodiment are formed in a planar shape (specifically, a planar shape) inclined with respect to the pressing direction X of the pressing mechanism 50. In addition, the first contact portion 60a and the second contact portion 60b are configured to be in surface contact with each other. The surface constituting the first contact portion 60a is inclined at an acute angle with respect to the angle θ 1 formed by the side surface S2. The surface constituting the second contact portion 60b is inclined at an acute angle θ 2 to the surface 40 x. The side surface S2 represents a surface of the installation surface S1 on which the heater 30 held by the heater holding member 40 is opposed, the surface being formed by bringing the first contact portion 60a and the second contact portion 60b into contact with each other. The surface constituting the first contact portion 60a is inclined to face the direction (the right direction in fig. 3) opposite to the direction (the left direction in fig. 3) faced by the side surface S2, and the surface constituting the second contact portion 60b is inclined to face the direction (the left direction in fig. 3) opposite to the direction (the right direction in fig. 3) faced by the surface 40 x. In other words, in a state where the first contact portion 60a and the second contact portion 60b are brought into contact, the surface constituting the second contact portion 60b is inclined so as to face the same direction side as the direction (the left direction in fig. 3) faced by the side surface S2. That is, at least one of the first contact portion 60a and the second contact portion 60b is formed in a planar shape inclined with respect to the pressing direction X of the pressing mechanism 50 in a state where they are in contact with each other, and in a case where the first contact portion 60a is formed in a planar shape, the surface may be inclined so as to face the direction opposite to the direction in which the side surface S2 faces, and in a case where the second contact portion 60b is formed in a planar shape, the surface may be inclined so as to face the same direction side as the direction in which the side surface S2 faces (the direction opposite to the direction in which the surface 40X faces).

In addition, at least one of the first contact portion 60a and the second contact portion 60b may be formed in a planar shape inclined with respect to the pressing direction X of the pressing mechanism 50, and the other may be in point contact or line contact with respect to the one. In this case, the first contact portion 60a and the second contact portion 60b are preferably configured to contact at two or more locations.

In a state where the first contact portion 60a is in contact with the second contact portion 60b, the one surface 40x of the heater holding portion 40b is parallel to the side surface S2, or the one surface 40x is inclined to incline from the facing surface 40S to the side surface S2.

In addition, the body member 10 of the present embodiment is provided with the first contact portions 60a between the pressure sensor 20e and the second air valve 20f and between the third air valve 20g and the second flow rate adjustment valve 20h in the installation surface S1.

Next, a method of attaching the heater holding member 40 to the body member 10 in the present embodiment will be described with reference to fig. 4.

First, as shown in fig. 4 (a), the heater holding member 40 is disposed so that the opposing surface 40S faces the mounting surface S1. The first contact portion 60a and the second contact portion 60b are brought into contact with each other.

Next, the shaft portion 50x of the screw member 50c is screwed and fixed to the screw hole 50a in a state of being inserted through the elongated hole 50 b. Then, the screw member 50c is screwed into the screw hole 50a, and the head 50y of the screw member 50c presses the mounting portion 40a, thereby pressing the second contact portion 60b against the first contact portion 60 a.

As a result, as shown in fig. 4 (b), sliding occurs between the first contact portion 60a and the second contact portion 60 b. As a result, the heater holding member 40 slides with respect to the body member 10. The heater 30 held by the heater holding portion 40b indirectly contacts the side surface S2 via the heater holding portion 40 b.

< second embodiment >

As shown in fig. 5 and 6, the fluid control apparatus 100 of the present embodiment includes: a body member 10 having a flow passage L through which a fluid flows; each device 20 provided in the body member 10 and controlling the fluid flowing in the flow path L; a heater 30 for heating the body member 10; and a holding mechanism M for holding the heater 30 in close contact with the body member 10.

The body member 10 is block-shaped. Specifically, the body member 10 is rectangular parallelepiped. The body member 10 includes an installation surface S1 extending in the longitudinal direction and a pair of side surfaces S2 adjacent to the installation surface S1 extending in the longitudinal direction. The body member 10 is configured such that each device 20 is disposed on the installation surface S1. Therefore, the pair of side surfaces S2 face in opposite directions to each other.

The holding mechanism M includes: a pair of heater retention plates 70, a catch structure 80, and a connecting structure 90.

The pair of heater holding plates 70 are opposed to the respective side surfaces S2 of the body member 10, and hold the heater 30 with the side surface S2 therebetween. For example, the heater holding plate 70 is formed by bending a plate material having elasticity.

Specifically, the heater holding plate 70 includes: a holding portion 71 extending along a side surface S2 of the body member 10; a hook portion 72 formed at one end portion extending from the holding portion 71 in the direction opposite to the direction X (upward in fig. 5) toward which the installation surface S1 of the body member 10 faces; the opposing portion 73 is formed at the other end portion extending from the holding portion 71 in the direction X toward the installation surface S1. The heater holding plate 70 is configured to sandwich the heater 30 between the holding portion 71 and the side surface S2. In other words, the direction in which the installation surface S1 faces is also referred to as the standing direction of each device 20 installed on the installation surface S1.

Specifically, the holding portion 71 extends so as to face the body member 10 and the devices 20 provided on the installation surface S1 of the body member 10. The heater 30 is attached to the inner surface of the holding portion 71 facing the side surface S2. The hook portion 72 is formed by bending one end portion of the heater holding plate 70 into a downward L-shape. The other end of the heater holding plate 70 is bent at a right angle to form the facing portion 73, and faces the mounting surface S1. In addition, through-holes 73h constituting the connection structure 90 are formed in the facing portion 73.

The locking structure 80 is provided on the body member 10 and is locked to one end of the pair of heater holding plates 70. Specifically, the locking structure 80 includes: a plate 81 having an elongated rectangular shape extending along a surface S3 opposite to the installation surface S1 of the body member 10 and formed wider than the opposite surface S3; and a locking piece 82 standing from both sides extending in the longitudinal direction of the plate 81 and facing the side surface S2 of the body member 10.

The plate 81 is fixed to the opposite surface S3 of the body member 10. The locking piece 82 includes a locking surface 82S, and the locking surface 82S extends along the side surface S2 of the body member 10 and faces the side surface S2. The distance between the locking surface 82S and the side surface S2 is equal to or shorter than the thickness of the heater 30. The locking structure 80 may be formed of a member different from the body member 10 as in the present embodiment, or may be provided integrally with the body member 10.

The connecting structure 90 connects the other end portions of the pair of heater holding plates 70 extending in the direction in which the mounting surface S1 faces. Specifically, the connecting structure 90 includes: a through hole 73h formed in the opposing portion 73; a connecting plate 91 bridged between each pair of the facing portions 73; and a screw 92 screwed to the connection plate 91 while passing through the through hole 73 h. The connecting structure 90 connects the opposing portions 73 formed at the other end portions of the pair of heater holding plates 70 to each other at positions opposing the installation surface S1 through the devices 20 installed on the installation surface S1.

The pair of heater holding plates 70 are configured to be bent in directions facing each other in a state where the hook portion 72 (one end portion) is locked to the locking structure 80 and the opposing portion 73 (the other end portion) is connected by the connecting structure 90. Thereby, the heater 30 is pressed toward the side surface S2 by the elasticity of the bent heater holding plate 70.

The heater holding plate 70, the plate 81, and the connection plate 91 each have a length in the longitudinal direction equal to or longer than the length in the longitudinal direction of the body member 10. Thus, the holding mechanism M constitutes a case that houses the body member 10 and the devices 20 therein in a state where the heater 30 is held on the side surface S2 of the body member 10.

Next, an assembly procedure of the fluid control apparatus 100 according to the present embodiment will be described.

First, as shown in fig. 6 (a), the plate 81 constituting the locking structure 80 is fixed to the surface S3 opposite to the installation surface S1 of the body member 10. In this case, the locking piece 82 is disposed so as to be separated from the side surface S2 of the body member 10. Next, the hook portions 72 of the pair of heater holding plates 70 are inserted between the locking surfaces 82S and the side surfaces S2, and locked to the locking pieces 82. Next, as shown in fig. 6 (b), the pair of heater holding plates 70 are rotated about the locking position with the locking piece 82 as a fulcrum until the holding portion 71 is positioned substantially parallel to the side surface S2. Thus, the heater 30 is pressed against the side surface S2 by the elasticity of the heater holding plate 70 and is brought into close contact with the side surface S2 of the main body member 10. Finally, as shown in fig. 6 (c), the opposing portions 73 of the pair of heater holding plates 70 are connected to each other by the connecting structure 90. Specifically, the pair of heater holding plates 70 are connected by screwing and fixing the screws 92 inserted through the through holes 73h of the opposing portions 73 to the connecting plate 91. Thus, the heater 30 is held in close contact with the side surface S2 by being sandwiched between the holding portion 71 of the heater holding plate 70 and the side surface S2 of the main body member 10.

According to this configuration, the heater holding plate 70 presses and holds the heater 30 against the side surface S2 by the elastic restoring force, and the heater 30 can be brought into close contact with the body member 10. This allows the heat of the heater 30 to be efficiently transferred to the body member 10. Further, the holding mechanism M can be used as a case for housing the main body member 10 and the devices 20, and it is not necessary to separately prepare a dedicated component for holding the heater 30 to the main body member 10, and the number of components can be reduced. Further, since the opposed portions 73 of the pair of heater holding plates 70 facing the installation surface S1 are connected by the connecting structure 90, the connection between the connecting structure 90 and the two heater holding plates 70 can be released from the installation surface S1 side of the body member 10.

The locking structure 80 may have another structure, for example, a structure fixed to the side surface S2 of the body member 10. In the present embodiment, the heater holding plate 70 is locked to the locking piece 82 provided on the plate 81, but the heater holding plate 70 may be locked to a locking hole provided on the plate 81, for example. The connecting structure 90 may be another structure, for example, a structure in which hooks that engage with each other are provided at the other end portions of the pair of heater holding plates 70.

< other embodiment >

As another embodiment of the first embodiment, as shown in fig. 7 (a), the heater holding member 40 may be configured such that one surface 40x of the heater holding portion 40b is inclined from the facing surface 40S to the side surface S2 side. According to this configuration, when the pressing mechanism 50 presses the facing surface 40S against the mounting surface S1, at least a part of the heater holding portion 40b biases the side surface S2, and the adhesion force to the side surface S2 increases.

Further, in the first embodiment, the heater holding member 40 is constituted by one member, but as shown in fig. 7 (b), the heater holding member 40 may be constituted by a plurality of members (two members in fig. 7 (b)). In the above embodiment as well, the main body member 10 is constituted by one member, but may be constituted by a plurality of members.

In the first embodiment, the first contact portion 60a and the second contact portion 60b are formed in parallel planar shapes, but may be formed in parallel curved shapes as shown in fig. 8 (a).

As shown in fig. 8 (b), contact surfaces CS1 and CS2 perpendicular to the pressing direction X are provided on at least one of the installation surface S1 and the facing surface 40S in addition to the first contact portion 60a and the second contact portion 60 b. With this configuration, the pressing mechanism 50 can be restricted from pressing by the contact of the contact surfaces CS1 and CS2, and the facing surface 40S can be positioned with respect to the installation surface S1.

In the first embodiment, the heater holding member 40 is attached to the installation surface S1 of the body member 10, but may be attached to a surface opposite to the installation surface S1 (the lower surface when the installation surface S1 is the upper surface of the body member 10).

In the first embodiment, the heater 30 is provided on the other surface 40y of the heater holding portion 40b, but the heater 30 may be provided on the one surface 40x of the heater holding portion 40b and the heat insulating material may be provided on the other surface 40 y. According to this structure, the heat of the heater 30 is efficiently transmitted to the body member 10.

In addition, as another embodiment of the first embodiment, a washer member having a lower frictional resistance than the first contact portion 60a and the second contact portion 60b may be interposed between the first contact portion 60a and the second contact portion 60 b. Further, a material having a lower frictional resistance than the first contact portion 60a may be laminated on the surface of the first contact portion 60a, or a material having a lower frictional resistance than the second contact portion 60b may be laminated on the surface of the second contact portion 60 b. With this configuration, the heater holding member 40 is easily slid with respect to the body member 10, and workability is improved. In addition, the adhesion of the material to the first contact portion 60a and the second contact portion 60b can also be prevented.

Further, in the second embodiment, the other end portions of the pair of heater holding plates 70 are connected by the connecting structure 90, but as shown in fig. 9, the other end portions (the opposing portions 73) of the heater holding plates 70 may be connected to the main body member 10 (specifically, the installation surface S1 of the main body member 10) by the connecting structure 90. In this case, the connection structure 90 may be configured as follows, for example: the fixing member includes a through hole 73h formed in the facing portion 73, a screw hole 10h provided in the installation surface S1 of the body member 10, and a screw 92 screwed and fixed to the screw hole 10h in a state of being inserted through the through hole 73 h.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the present invention.