阅读说明：本技术 一种匀胶显影设备使用的高精度胶泵 (High-precision glue pump for glue homogenizing and developing equipment ) 是由 施科科 王冲 于 2020-04-13 设计创作，主要内容包括：本发明公开了一种匀胶显影设备使用的高精度胶泵,半导体加工领域；匀胶显影设备使用的高精度胶泵包括：驱动气缸、连接杆、风囊、壳体、端盖、第一单向阀和第二单向阀；驱动气缸与连接杆的第一端固定连接,风囊与连接杆的第二端固定连接,壳体罩设于风囊外围,驱动气缸通过端盖与壳体固定连接；第一单向阀固定于壳体进料口,第二单向阀固定于壳体出料口；当驱动气缸驱动推动连接杆往复运动时,连接杆带动风囊在壳体运动；本发明的匀胶显影设备使用的高精度胶泵通过单向阀的设计,保证了胶水流动方向的准确性,使喷胶机每次喷胶都能达到一定了喷胶量,提高了喷胶量的精度,同时也避免了首次喷胶量不足需要二次喷胶的过程,减少了胶水的浪费。(The invention discloses a high-precision glue pump used for a glue homogenizing and developing device, belonging to the field of semiconductor processing; the high-precision glue pump used by the spin coating developing equipment comprises: the air conditioner comprises a driving cylinder, a connecting rod, an air bag, a shell, an end cover, a first one-way valve and a second one-way valve; the driving cylinder is fixedly connected with the first end of the connecting rod, the air sac is fixedly connected with the second end of the connecting rod, the shell is covered on the periphery of the air sac, and the driving cylinder is fixedly connected with the shell through an end cover; the first one-way valve is fixed at the feed inlet of the shell, and the second one-way valve is fixed at the discharge outlet of the shell; when the driving cylinder drives the connecting rod to reciprocate, the connecting rod drives the air sac to move in the shell; the high-precision glue pump used by the glue homogenizing and developing equipment ensures the accuracy of the glue flowing direction through the design of the one-way valve, so that the glue spraying amount of the glue spraying machine can reach a certain glue spraying amount each time, the precision of the glue spraying amount is improved, meanwhile, the process of spraying glue for the second time when the glue spraying amount is insufficient for the first time is avoided, and the waste of the glue is reduced.)

1. The utility model provides a high accuracy glue pump that spin coating developing apparatus used which characterized in that, the high accuracy glue pump that spin coating developing apparatus used includes: drive cylinder (1), connecting rod (2), air bag (3), shell (4), end cover (5), first check valve (6) and second check valve (7)

The driving cylinder (1) is fixedly connected with the first end of the connecting rod (2), the air bag (3) is fixedly connected with the second end of the connecting rod (2), the shell (4) is covered on the periphery of the air bag (3), and the driving cylinder (1) is fixedly connected with the shell (4) through the end cover (5);

the first one-way valve (6) is fixed at the feed inlet of the shell (4), and the second one-way valve (7) is fixed at the discharge outlet of the shell (4)

When the driving cylinder (1) drives and pushes the connecting rod (2) to reciprocate, the connecting rod (2) drives the air bag (3) to move in the shell (4).

2. The high precision glue pump for the track roller developer according to claim 1, wherein a first sealing ring (8) is arranged between the driving cylinder (1) and the end cap (5).

3. The high-precision glue pump for the spin coater according to claim 2, wherein a second sealing ring (9) is provided at the joint of the first one-way valve (6) or the second one-way valve (7) and the housing (4).

4. The high-precision glue pump for the track roller developing device according to claim 3, wherein the first one-way valve (6) and the second one-way valve (7) each comprise a valve body (101), a ball body (102), a ball seat (103) and a retainer ring (104);

the ball body (102), the ball seat (103) and the check ring (104) are all arranged in the valve body (101);

the ball seat (103) is provided with a spherical concave hole (106) with the same radian as the sphere (102); the sphere (102) is embedded in the spherical concave hole (106).

5. The high-precision glue pump for the spin coater according to claim 4, wherein the retainer ring (104) has a plurality of glue-spraying holes (1041).

6. The glue pump with high precision for the track roller developing device according to claim 5, wherein the valve body (101) comprises a connecting port (1011) and a delivery port (1012), the connecting port (1011) is connected with the housing (4), and the delivery port (1012) is connected with the delivery pipe (105).

7. The high precision glue pump for the track roller developing apparatus according to claim 6, wherein the spherical end (1061) of the spherical recess (106) of the ball seat (103) in the first one-way valve (6) faces the delivery port (1012) of the valve body (101).

8. The high precision glue pump for the track roller developer according to claim 7, wherein the open end (1062) of the spherical recess (106) of the ball seat (103) in the second one-way valve (7) faces the delivery port (1012) of the valve body (101).

9. The glue pump with high precision for the track roller developing device according to claim 8, wherein the first check valve (6) and the second check valve (7) are each provided with two balls (102) and two ball seats (103).

Technical Field

The invention belongs to the field of semiconductor processing, and particularly relates to a high-precision glue pump used for a glue homogenizing and developing device.

Background

In the semiconductor industry, photolithography processes are used in a wide variety of applications. The basic process of photolithography consists of steps of photoresist coating, exposure, development, etc. The photoresist itself can be present in liquid form. The apparatus is very important for the uniformity of the photoresist when coating the photoresist. The requirements on the performance and the precision of the rubber pump are very high.

The electric glue spraying device and the method disclosed in the Chinese invention patent CN 105834069A comprise a glue spraying nozzle, an electric glue spraying pump and a glue containing bottle, wherein the glue spraying nozzle is communicated with a glue spraying nozzle interface on the electric glue spraying pump, and the glue containing bottle is communicated with a glue conveying pipe interface on the electric glue spraying pump; the glue applying spray head comprises a spray head outer cover and a spray head inner cover which are connected with each other, a cavity is formed between the spray head outer cover and the spray head inner cover, and a glue spraying hole is formed in the spray head inner cover.

The glue sprayer structure in the prior art cannot accurately control the usage amount of the photoresist.

Disclosure of Invention

First, technical problem to be solved

The invention aims to solve the problems in the prior art, and particularly provides a high-precision glue pump used for a spin coater developer, which solves the problem that the conventional glue pump cannot accurately control the usage amount of photoresist.

Second, technical scheme

In order to solve the above technical problem, the present invention provides a high precision glue pump for a spin coater developer, comprising: the air conditioner comprises a driving cylinder, a connecting rod, an air bag, a shell, an end cover, a first one-way valve and a second one-way valve; the driving cylinder is fixedly connected with the first end of the connecting rod, the air sac is fixedly connected with the second end of the connecting rod, the shell is covered on the periphery of the air sac, and the driving cylinder is fixedly connected with the shell through an end cover; the first one-way valve is fixed at the feed inlet of the shell, and the second one-way valve is fixed at the discharge outlet of the shell; when the driving cylinder drives the connecting rod to move in a reciprocating mode, the connecting rod drives the air sac to move in the shell.

Wherein, be equipped with first sealing washer between actuating cylinder and the end cover.

And a second sealing ring is arranged at the joint of the first one-way valve or the second one-way valve and the shell.

The first check valve and the second check valve respectively comprise a valve body, a ball seat and a retainer ring; the ball body, the ball seat and the retainer ring are all arranged in the valve body; the ball seat is provided with a spherical concave hole with the same radian as the sphere; the ball is embedded in the spherical concave hole.

Wherein, a plurality of glue spraying holes are arranged on the retainer ring.

The valve body comprises a connecting port and a conveying port, the connecting port is connected with the shell, and the conveying port is connected with a conveying pipe.

The spherical end of the spherical concave hole of the ball seat in the first one-way valve faces the delivery port of the valve body.

And the opening end of the spherical concave hole of the ball seat in the second one-way valve faces to the delivery port of the valve body.

Wherein, first check valve and second check valve all are equipped with two spheroid and two ball seats.

Thirdly, the invention has the beneficial effects

Compared with the prior art, the high-precision glue pump used by the spin coating developing equipment has the following beneficial effects;

through the design of the one-way valve, the accuracy of the flowing direction of the glue is ensured, the glue spraying amount of the glue spraying machine can reach a certain glue spraying amount each time, the precision of the glue spraying amount is improved, meanwhile, the process that the glue spraying amount is insufficient for the first time and needs to be carried out for the second time is avoided, and the waste of the glue is reduced;

through the design of arranging the glue spraying holes on the retaining ring, the glue is uniformly thinned by the glue spraying holes when passing through the retaining ring, so that the uniformity is improved;

through the design of two spheroid and two ball seat cooperations, the reverse effect of damming that makes the check valve further improve has further improved the accuracy of glue flow direction.

Drawings

FIG. 1 is an overall view of a high precision glue pump used in the track developing apparatus of the present invention;

FIG. 2 is an exploded view of a high precision glue pump used in the track developing apparatus of the present invention;

FIG. 3 is an exploded view of the first check valve or the second check valve of the first embodiment of the high precision glue pump used in the track developing apparatus of the present invention;

FIG. 4 is a full sectional view of a first check valve of a first embodiment of a high precision glue pump for use in a track leveling development apparatus in accordance with the present invention;

FIG. 5 is a full sectional view of a second check valve of the first embodiment of the high precision glue pump used in the track leveling and developing apparatus of the present invention;

FIG. 6 is a schematic diagram of a retainer ring structure of a high-precision glue pump used in the spin coating and developing apparatus of the present invention;

FIG. 7 is a schematic view of a ball seat of a high precision glue pump for use in the track developing apparatus of the present invention;

FIG. 8 is a schematic view of a valve body of a high precision glue pump for use in the track developing apparatus of the present invention;

FIG. 9 is an exploded view of the first check valve or the second check valve of the second embodiment of the high precision glue pump used in the spin coater of the present invention;

FIG. 10 is a full sectional view of the first check valve of the second embodiment of the high precision glue pump for use in the track developing apparatus of the present invention;

FIG. 11 is a full sectional view of a second one-way valve of a second embodiment of a high precision glue pump for use in a track lithography apparatus according to the present invention;

in the figure: 1 is a driving cylinder; 2 is a connecting rod; 3 is a wind sac; 4 is a shell; 5 is an end cover; 6 is a first one-way valve; 7 is a second one-way valve; 8 is a first sealing ring; 9 is a second sealing ring; 101 is a valve body; 102 is a sphere; 103 is a ball seat; 104 is a retainer ring; 106 are spherical concave holes; 1041 is a glue spraying hole; 1011 is a connecting port; and 1012 is a delivery port.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.