阅读说明：本技术 金刚石研磨盘上风险金刚石的确定方法 (Method for determining risk diamond on diamond grinding disc ) 是由 王盼 蔡长益 于 2019-02-19 设计创作，主要内容包括：本发明提供了一种金刚石研磨盘上风险金刚石的确定方法,包括：建立数据库,所述数据库包括金刚石的第一尺寸数据和模拟图像；基于所述数据库确定出风险金刚石的判断条件；以及,基于所述风险金刚石的判断条件确定所述金刚石研磨盘上是否存在风险金刚石。本发明提供的金刚石研磨盘上风险金刚石的确定方法,可以提高金刚石研磨盘的工作良率。(The invention provides a method for determining risk diamonds on a diamond grinding disc, which comprises the following steps: establishing a database, wherein the database comprises first dimension data and a simulation image of the diamond; determining judgment conditions of the risk diamonds based on the database; and determining whether the diamond grinding disc has the risk diamond or not based on the judgment condition of the risk diamond. The method for determining the risk diamond on the diamond grinding disc can improve the working yield of the diamond grinding disc.)

1. A method of determining at-risk diamonds on a diamond abrasive disk, the method comprising:

establishing a database, wherein the database comprises first dimension data and a simulation image of the diamond;

determining judgment conditions of the risk diamonds based on the database; and the number of the first and second groups,

and determining whether the diamond grinding disc has the risk diamond or not based on the judgment condition of the risk diamond.

2. The method for determining a diamond risk on a diamond grinding disk according to claim 1, wherein the method for creating the database comprises:

for a plurality of diamond grinding disks, before a certain diamond grinding disk in the plurality of diamond grinding disks is used for cleaning the grinding pad, scanning each diamond on the certain diamond grinding disk by using a scanning device, simulating a first simulation image of each diamond, and calculating first size data of each diamond;

after the certain diamond grinding disc is adopted to clean the grinding pad, scanning each diamond on the certain diamond grinding disc by using the scanning device again, and simulating a second simulation image of each diamond;

the first simulated image and the second simulated image of each diamond abrasive disk in the plurality of diamond abrasive disks are used for forming a simulated image of the diamond, and a database is formed by the simulated image and the first size data of each diamond.

3. The method for determining a diamond risk on a diamond grinding disk according to claim 2, wherein the method for determining the judgment condition of the diamond risk based on the database comprises:

acquiring a second simulation image of each diamond from the database, and determining diamonds without the second simulation image and diamonds with cracks in the second simulation image as risky diamonds;

obtaining first dimensional data of each risky diamond;

determining a judgment condition of the risk diamond based on the first size data of each risk diamond.

4. The method for determining the risk diamond on a diamond abrasive disk according to claim 1, wherein the method for determining the risk diamond on the diamond abrasive disk based on the judgment condition of the risk diamond comprises:

scanning each diamond on the diamond grinding disc by using a scanning device before cleaning the grinding pad by using the diamond grinding disc, and calculating second size data of each diamond on the diamond grinding disc;

determining whether there is a risk diamond on the diamond abrasive disk based on the second size data and the determination condition.

5. The method of determining a risky diamond on a diamond abrasive disk according to claim 3, wherein the first size data comprises first length data, first height data, and first width data.

6. The method of determining a diamond risk on a diamond grinding disk according to claim 5, wherein the method of determining the judgment condition of the diamond risk based on the first size data of each diamond risk comprises:

comparing the first length data of each risk diamond to determine maximum length data;

comparing the first height data of each risk diamond to determine minimum height data;

comparing the first width data of each risk diamond to determine maximum width data;

the judgment conditions of the risk diamond are as follows: the length data is less than the maximum length data, the height data is greater than the minimum height data, and the width data is less than the diamond of the maximum width data.

7. The method for determining the risk diamond on a diamond abrasive disk according to claim 6, wherein the method for determining the risk diamond on the diamond abrasive disk based on the judgment condition of the risk diamond comprises:

scanning each diamond on the diamond grinding disc by using the scanning device before cleaning the grinding pad by using the diamond grinding disc, and calculating second size data of each diamond on the diamond grinding disc, wherein the second size data comprises second length data, second height data and second width data;

and when the second length data of a certain diamond on the diamond grinding disk is less than the maximum length data, the second height data is greater than the minimum height data, and the second width data is less than the maximum width data, determining the certain diamond as a risk diamond.

8. The method of determining a diamond risk on a diamond grinding disk as set forth in claim 1, wherein the method further comprises:

when it is determined that the diamond grinding disk has the risk diamonds, replacing the diamond grinding disk with another diamond grinding disk, and determining whether the risk diamonds exist in the another diamond grinding disk;

when not present, the polishing pad is cleaned using the further diamond polishing disk.

9. The method of determining a diamond risk on a diamond grinding disk as set forth in claim 1, wherein the method further comprises:

and manufacturing a diamond grinding disc not containing the risk diamonds based on the judgment conditions of the risk diamonds.

10. The method for determining a diamond risk on a diamond abrasive disk according to claim 2, wherein said scanning means is an optical microscope.

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a method for determining risk diamonds on a diamond grinding disc.

Background

In semiconductor manufacturing, a polishing pad having a rough surface is used to polish a wafer and planarize the wafer surface for further manufacturing semiconductor integrated circuits. However, in the process of polishing a wafer by using a polishing pad, reaction deposits are usually left on the surface of the polishing pad, which causes the surface of the polishing pad to be glazed, reduces the roughness of the surface of the polishing pad, and further affects the polishing effect of the polishing pad. Therefore, the diamond polishing disc is usually used to perform an activation treatment on the surface of the polishing pad (for example, to scrape off the reaction deposits on the surface of the polishing pad) to restore the roughness of the surface of the polishing pad, so as to ensure the polishing effect of the polishing pad.

However, in the related art, there may be risky diamonds on the diamond abrasive disk, which are generally irregular in shape or have cracks on the surface. Wherein when the diamond grinding disc with the risk diamonds is used for carrying out activation treatment on the grinding pad, the risk diamonds are easy to fall off on the surface of the grinding pad. Therefore, when the polishing pad is used for polishing a wafer subsequently, the risky diamond falling off the surface of the polishing pad can scratch the wafer, and the performance of a finally formed semiconductor integrated circuit is influenced.

Therefore, there is a need for a method for determining the risk diamond, so as to determine whether the risk diamond exists on the diamond grinding disc before the diamond grinding disc cleans the grinding pad, and when the risk diamond exists on the diamond grinding disc, perform corresponding operations (for example, replacing the diamond grinding disc without the risk diamond) to avoid the diamond falling off the grinding pad and scratching the wafer.

Disclosure of Invention

The invention aims to provide a method for determining risk diamonds on a diamond grinding disc so as to solve the problems in the related art.

The invention provides a method for determining risk diamonds on a diamond grinding disc, which comprises the following steps:

establishing a database, wherein the database comprises first dimension data and a simulation image of the diamond;

determining judgment conditions of the risk diamonds based on the database; and the number of the first and second groups,

and determining whether the diamond grinding disc has the risk diamond or not based on the judgment condition of the risk diamond.

Optionally, the method for establishing the database includes:

for a plurality of diamond grinding disks, before a certain diamond grinding disk in the plurality of diamond grinding disks is used for cleaning the grinding pad, scanning each diamond on the certain diamond grinding disk by using a scanning device, simulating a first simulation image of each diamond, and calculating first size data of each diamond;

after the certain diamond grinding disc is adopted to clean the grinding pad, scanning each diamond on the certain diamond grinding disc by using the scanning device again, and simulating a second simulation image of each diamond;

the first simulated image and the second simulated image of each diamond abrasive disk in the plurality of diamond abrasive disks are used for forming a simulated image of the diamond, and a database is formed by the simulated image and the first size data of each diamond.

Optionally, the method for determining the judgment condition of the risky diamond based on the database includes:

acquiring a second simulation image of each diamond from the database, and determining diamonds without the second simulation image and diamonds with cracks in the second simulation image as risky diamonds;

obtaining first dimensional data of each risky diamond;

determining a judgment condition of the risk diamond based on the first size data of each risk diamond.

Optionally, the method for determining the risk diamond on the diamond grinding disc based on the judgment condition of the risk diamond comprises the following steps:

scanning each diamond on the diamond grinding disc by using a scanning device before cleaning the grinding pad by using the diamond grinding disc, and calculating second size data of each diamond on the diamond grinding disc;

determining whether there is a risk diamond on the diamond abrasive disk based on the second size data and the determination condition.

Optionally, the first size data includes first length data, first height data, and first width data.

Optionally, the method for determining the judgment condition of the risky diamond based on the first size data of each risky diamond includes:

comparing the first length data of each risk diamond to determine maximum length data;

comparing the first height data of each risk diamond to determine minimum height data;

comparing the first width data of each risk diamond to determine maximum width data;

the judgment conditions of the risk diamond are as follows: the length data is less than the maximum length data, the height data is greater than the minimum height data, and the width data is less than the diamond of the maximum width data.

Optionally, the method for determining the risk diamond on the diamond grinding disc based on the judgment condition of the risk diamond comprises the following steps:

scanning each diamond on the diamond grinding disc by using the scanning device before cleaning the grinding pad by using the diamond grinding disc, and calculating second size data of each diamond on the diamond grinding disc, wherein the second size data comprises second length data, second height data and second width data;

and when the second length data of a certain diamond on the diamond grinding disk is less than the maximum length data, the second height data is greater than the minimum height data, and the second width data is less than the maximum width data, determining the certain diamond as a risk diamond.

Optionally, the method further includes:

when it is determined that the diamond grinding disk has the risk diamonds, replacing the diamond grinding disk with another diamond grinding disk, and determining whether the risk diamonds exist in the another diamond grinding disk;

when not present, the polishing pad is cleaned using the further diamond polishing disk.

Optionally, the method further includes:

and manufacturing a diamond grinding disc not containing the risk diamonds based on the judgment conditions of the risk diamonds.

Optionally, the scanning device is an optical microscope.

That is, in the determination method as described above, a database including diamond size data and diamond simulation images is created, determination conditions for risky diamonds are determined based on the database, and finally whether risky diamonds are on the diamond polishing disk is further determined based on the determination conditions for risky diamonds, so that when risky diamonds are present, corresponding operations (e.g., replacement of the diamond polishing disk) are performed so that risky diamonds are not present on the diamond polishing disk that is finally cleaned of the polishing pad. Therefore, the situation that the diamond falls off to the grinding pad when the grinding pad is cleaned by the diamond grinding disc is avoided, the working yield of the diamond grinding disc is improved, meanwhile, when the wafer is ground by the grinding pad in the follow-up process, the risk that the wafer is scratched is reduced, and the yield of the wafer is improved.

Drawings

Fig. 1 is a schematic flow chart of a method for determining a risk diamond on a diamond abrasive disk according to an embodiment of the present invention;

FIG. 2 is a schematic representation of a first simulated image of diamonds on a diamond lapping disk according to one embodiment of the present invention;

fig. 3 is a schematic view of a second simulated image of diamonds on a diamond abrasive disk in accordance with an embodiment of the present invention.

Detailed Description

The method for determining the risk diamond on the diamond grinding disk provided by the invention is further described in detail with reference to the attached drawings and specific examples. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

Fig. 1 is a schematic flow chart of a method for determining risk diamonds on a diamond grinding disk according to an embodiment of the present invention. As shown in fig. 1, the method for determining the risk diamond on the diamond grinding disk may include:

step 10a, establishing a database, wherein the database comprises first dimension data of the diamond and a simulation image of the diamond.

And 20a, determining judgment conditions of the risk diamonds based on the database.

And step 30a, determining whether the risk diamonds exist on the diamond grinding disc or not based on the judgment conditions of the risk diamonds.

Then, in the method as described above, a database containing diamond size data and diamond simulation images is created, a determination condition of the risky diamond is determined based on the database, and finally, whether the risky diamond exists on the diamond grinding disk is further determined according to the determination condition of the risky diamond, so that when the risky diamond exists, a corresponding operation (for example, replacing the diamond grinding disk) is performed, so that the risky diamond does not exist on the diamond grinding disk finally cleaned up the grinding pad. Therefore, the condition that the risk diamond falls off to the grinding pad when the grinding pad is cleaned by the diamond grinding disc is avoided, the working yield of the diamond grinding disc is improved, meanwhile, the risk that the wafer is scratched is reduced when the wafer is ground by the grinding pad in the follow-up process, and the yield of the wafer is improved.

The respective steps of determining the diamond risk in this embodiment will be described in detail below.

In step 10a, a database is built.

First, for a plurality of diamond grinding disks, before a certain diamond grinding disk in the plurality of diamond grinding disks is used for cleaning the grinding pad, each diamond on the certain diamond grinding disk is scanned through a scanning device, a first simulation image of each diamond is simulated based on the shape of each diamond, and first size data of each diamond on the certain diamond grinding disk is calculated based on the first simulation image. Wherein the scanning device may be an optical microscope, the simulated image may be a three-dimensional simulated image of the diamond, and the first dimensional data of the diamond may include first length data, first height data, and first width data of the diamond.

For example, fig. 2 is a schematic view of a first simulated image of diamonds on a diamond abrasive disk according to an embodiment of the present invention. As shown in fig. 2, the diamond abrasive disk includes diamond a, diamond B, diamond C, and diamonds D1, D2, D3, D4, D5, and D6, and the first size data of diamond a calculated based on the first simulation image is: the first length data L is 10 nanometers (nm), the first height data H is 25nm, and the first width data D is 8 nm; diamond B first size data was: the first length data is 20nm, the first height data is 22nm, and the first width data is 20 nm; diamond C first dimension data is: the first length data is 12nm, the first height data is 24nm, and the first width data is 10 nm; and diamonds D1, D2, D3, D4, D5, and D6 the first dimensional data is: the first length data is 18nm, the first height data is 19nm, and the first width data is 17 nm. The first simulation image of the certain diamond grinding disk and the first size data of the diamonds on the certain diamond grinding disk may be stored for subsequent database establishment.

And then cleaning the grinding pad by adopting the certain diamond grinding disc, scanning each diamond on the certain diamond grinding disc by using the scanning device again after the grinding pad is cleaned, and simulating and storing a second simulation image of each diamond based on the shape of each diamond so as to determine the risk diamond based on the subsequent second simulation image of each diamond.

In this embodiment, the second simulation image of the diamond may be simulated again when the certain diamond polishing disk is used to clean the polishing pad for a preset number of times. The preset value can be between 30 and 50, for example, the preset value can be 40 times.

Fig. 3 is a schematic view of a second simulation image of diamonds on one diamond abrasive disk according to an embodiment of the present invention.

Finally, a simulated image of the diamond is constructed using the first simulated image and the second simulated image of each diamond abrasive disk of the plurality of diamond abrasive disks, and a database is formed with the first size data of each diamond.

Further, in step 20a, a determination condition for the size of the diamond at risk is determined based on the database.

First, a second simulated image of each diamond on each of the plurality of diamond abrasive disks is obtained from the database, and a risk diamond is determined based on the second simulated image.

In particular, as can be seen from the foregoing, the risk diamonds are highly likely to fall off or to crack when the polishing pad is activated using the diamond polishing disk. Based on the determination, the diamonds without the second simulation image (namely, the diamonds falling off after cleaning the grinding pad) and the diamonds with cracks in the second simulation image (namely, the diamonds breaking after cleaning the grinding pad) can be determined as the risk diamonds, so that the purpose of determining the risk diamonds based on the second simulation image of the diamonds can be realized.

For example, as can be seen by comparing fig. 2 and 3, diamond a has a crack a in the second simulated image, diamond B has a crack B in the second simulated image, and diamond C does not have the second simulated image. It can be confirmed that there are three risky diamonds on the certain diamond abrasive disk, diamond a, diamond B, and diamond C, respectively.

Furthermore, it should be noted that, in the present embodiment, the determination of the risk diamond is determined substantially based on the second simulated image of the diamond, and based on this, only the second simulated image and the first size data of each diamond grinding disk in the plurality of diamond grinding disks may be stored in the database in step 10a, without storing the first simulated image of the diamond again, so that the memory of the database may be reduced, and the efficiency may be improved.

It should be noted that, in this embodiment, after the database is established and the risk diamond is determined based on the database, first size data of non-risk diamonds in the database can be screened out, the non-risk diamonds can be classified into different grades according to the first size data of the non-risk diamonds (for example, a non-risk diamond with larger first size data corresponds to a higher grade, a non-risk diamond with smaller first size data corresponds to a lower grade), thereby customizing diamond grinding disks with different grades based on non-risk diamonds with different grades, and the diamond grinding discs with different grades are used for respectively cleaning the grinding pads, the grade corresponding to the diamond grinding disc with the best cleaning effect is determined as the optimal grade, when the diamond grinding disc is manufactured subsequently, the diamond grinding disk can be manufactured based on the optimal grade, so that the working efficiency and yield of the diamond grinding disk can be further improved.

Next, first dimensional data for each risky diamond is acquired.

After the risky diamonds are determined, first size data of each risky diamond, namely first length data, first height data and first width data of each risky diamond, can be acquired, so that judgment conditions of the risky diamonds can be determined based on the first size data of each risky diamond.

For example, a first length data of 10nm, a first height data of 25nm, and a first width data of 8nm of the diamond a may be respectively acquired; first length data 20nm, first height data 22nm, and first width data 20nm of diamond B; the first length data of diamond C is 12nm, the first height data is 24nm, and the first width data is 10 nm.

Finally, determining judgment conditions of the risky diamonds based on the first size data of each risky diamond.

Specifically, the maximum length data can be determined by comparing the first length data of each risk diamond; determining minimum height data by comparing the first height data of each risk diamond; and determining the maximum width data by comparing the first width data of each risk diamond. Then, the judgment conditions for the risk diamond may be determined as: the length data is less than the maximum length data, and the height data is greater than the minimum height data, and the width data is less than the diamond of the maximum width data.

For example, by comparing the first length data of the diamond a, the diamond B, and the diamond C, it may be determined that the maximum length data is 20 nm; by comparing the first height data of diamond a, diamond B and diamond C, the minimum height data can be determined to be 22 nm; by comparing the first width data of the diamond a, the diamond B, and the diamond C, it can be determined that the maximum width data is 20 nm. The judgment conditions of the risk diamond are as follows: diamond with length data less than 20nm, height data greater than 22nm, and width data less than 20 nm.

In addition, in this embodiment, after determining the judgment condition of the risk diamond, when manufacturing a diamond grinding disc subsequently, the diamond grinding disc without the risk diamond may be manufactured based on the judgment condition of the risk diamond, so as to avoid the problem that the risk diamond falls off to the grinding pad from the source to cause wafer scratch, thereby ensuring the performance of the finally manufactured semiconductor integrated circuit.

For example, based on the judgment condition of the risky diamond, diamonds with length data of more than 20nm, height data of less than 22nm and width data of more than 20nm can be manufactured on the diamond abrasive disk, so that the diamond abrasive disk without risky diamonds is manufactured.

Further, in step 30a, it is determined whether a risk diamond exists on the diamond abrasive disk based on the judgment condition of the risk diamond.

Firstly, before the diamond grinding disc is used for cleaning the grinding pad, each diamond on the diamond grinding disc is scanned by the scanning device, and second size data of each diamond on the diamond grinding disc is calculated, wherein the second size data can comprise second length data, second height data and second width data.

As an example, assume that the diamond abrasive disk includes four diamonds, diamond E, diamond F, diamond G, and diamond H, respectively. Wherein the second dimensional data for diamond E is calculated as: the second length data is 20nm, the second height data is 23nm, and the second width data is 21 nm; the second dimensional data of diamond F is: the second length data is 21nm, the second height data is 20nm, and the second width data is 21 nm; the second dimensional data of diamond G is: the second length data is 19nm, the second height data is 25nm, and the second width data is 8 nm; the second dimensional data of diamond H is: the second length data is 25nm, the second height data is 20nm, and the second width data is 21nm, the second size data of the diamond E, the diamond F, the diamond G, and the diamond H may be stored, so that it is determined whether the corresponding diamond is a risk diamond based on the second size data.

And then, judging whether the second size data of each diamond on the diamond grinding disc meets the judgment condition of the risk diamond or not based on the second size data of each diamond on the diamond grinding disc and the judgment condition of the risk diamond. When the diamond grinding disk does not meet the requirements, determining that no risk diamond exists on the diamond grinding disk, otherwise, determining that the risk diamond exists on the diamond grinding disk.

And when the second length data of the certain diamond is smaller than the maximum length data, the second height data is larger than the minimum height data, and the second width data is smaller than the maximum width data, determining that the second size data of the certain diamond meets the judgment condition of the risky diamond, and determining that the certain diamond is the risky diamond. Otherwise, determining that the second size data of the certain diamond does not meet the judgment condition of the risky diamond, and the certain diamond is a non-risky diamond.

For example, the second length data of diamond G is 19nm, which is less than the maximum length data of 20 nm; the second height data is 25nm which is larger than the minimum height data by 22 nm; the second width data is 8nm, which is less than the maximum width data by 20 nm. The diamond G meets the judgment condition of the risk diamond, and the diamond G is a risk diamond, that is, the diamond abrasive disk has the risk diamond G.

Finally, after determining that the diamond grinding disc has the risk diamond, replacing the diamond grinding disc with another diamond grinding disc, further determining whether the diamond grinding disc has the risk diamond, and cleaning the grinding pad by using the another risk diamond when the diamond grinding disc does not have the risk diamond. Thereby can realize utilizing the diamond grinding disk that does not have the risk diamond to clear up the grinding pad, improve the work yield of diamond grinding disk.

In summary, in the method for determining the risk diamonds on the diamond grinding disk, provided by the invention, the database is established first, the judgment condition of the risk diamonds is determined based on the database, finally, the risk diamonds on the diamond grinding disk are further determined according to the judgment condition of the risk diamonds, and then corresponding operation (such as replacing the diamond grinding disk) is executed, so that the diamond grinding disk without the risk diamonds can be used for cleaning the grinding pad, the situation that the risk diamonds are remained on the grinding pad can be ensured not to occur when the grinding pad is cleaned by the diamond grinding disk, and the working yield of the diamond grinding disk is improved. Meanwhile, when the wafer is ground by the grinding pad in the follow-up process, the risk that the wafer is scratched can be reduced, and the yield of the wafer is improved.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.

The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.