阅读说明：本技术 成膜方法 (Film forming method ) 是由 长谷川昌孝 金沢勇人 于 2018-12-10 设计创作，主要内容包括：本发明的课题在于提供一种在通过气溶胶沉积法进行的成膜中,能够提高成膜速度的成膜方法。将包含成膜材料的原料液气溶胶化,向以10kHz以下的频率振动的基材提供所生成的气溶胶,将包含成膜材料的膜成膜于基材上,由此解决课题。(The invention provides a film forming method capable of improving film forming speed in film forming by an aerosol deposition method. The problem is solved by aerosolizing a raw material liquid containing a film-forming material, supplying the generated aerosol to a substrate vibrating at a frequency of 10kHz or less, and forming a film containing the film-forming material on the substrate.)

1. A film-forming method characterized in that,

a raw material liquid containing a film-forming material is aerosolized, and the aerosol is supplied to a substrate vibrating at a frequency of 10kHz or less, thereby forming the film-forming material on the substrate.

2. The film forming method according to claim 1,

starting the vibration of the substrate before supplying aerosol to the substrate.

3. The film forming method according to claim 1 or 2, wherein,

after the film-forming material is formed on the substrate, the formed film is irradiated with active radiation.

4. The film forming method according to any one of claims 1 to 3,

supplying the aerosol to the substrate while heating the substrate.

5. The film forming method according to claim 4,

heating the substrate to a surface temperature of 100 ℃ or higher.

6. The film forming method according to any one of claims 1 to 5,

the vibration speed of the base material is 0.1 mm/sec or more.

7. The film forming method according to any one of claims 1 to 6,

vibrating the substrate by one or more of:

sound wave irradiation to the base material, air blowing to the base material, and vibration of a support mechanism of the base material.

8. The film forming method according to any one of claims 1 to 7,

the film-formed surface of the substrate has: a region having lyophilic properties with respect to the raw material liquid and a region having lyophobic properties with respect to the raw material liquid.

9. The film forming method according to any one of claims 1 to 8,

before supplying the aerosol to the substrate, performing a surface treatment of the substrate.

10. The film forming method according to claim 9, wherein,

the surface treatment of the base material is one or more of rubbing treatment, lyophilic treatment, lyophobic treatment and formation of a basal layer.

11. The film forming method according to any one of claims 1 to 10,

the film forming material is a liquid crystal compound.

Technical Field

The present invention relates to a film forming method by an aerosol deposition method.

Background

As a technique for producing a thin film, a technique is known in which a raw material liquid containing a film-forming material is aerosolized, the generated aerosol is supplied to a substrate by being transported by a carrier gas, and a solvent in the aerosol adhering to the substrate is vaporized to form a film of the film-forming material. This film-forming technique is also known as aerosol deposition.

For example, patent document 1 describes a thin film forming method in which a sol-gel solution containing water, a film material, and an organic solvent for dissolving the film material is sprayed by ultrasonic vibration or the like to form an aerosol, and the aerosol is attached to a substrate vibrating at 15kHz to 2MHz to form a thin film layer.

Further, patent document 2 describes, as a method for producing an organic electroluminescent thin film, a method for forming a thin film of an organic material on a substrate (substrate) by aerosolizing a raw material liquid in which an organic material serving as a raw material of a light-emitting layer or a carrier transport layer of an organic electroluminescent element is dissolved or dispersed in a solvent, and attaching fine particles of the organic material generated by vaporizing the solvent in the aerosol onto the substrate.

Prior art documents

Patent document

Patent document 1: japanese laid-open patent publication No. 8-330303

Patent document 2: japanese laid-open patent publication No. 2002-075641

Disclosure of Invention

Technical problem to be solved by the invention

The aerosol deposition method forms a film by a very small aerosol as compared with droplets of ink jet, spray coating, or the like.

Therefore, according to the aerosol deposition method, a film having high followability (covering property) to the unevenness of the substrate and the like and a uniform thickness can be precisely formed.

On the other hand, the aerosol deposition method has a problem that the film formation rate is slow and it takes time to form a film having a target thickness even in a thin film.

The present invention has been made to solve the above problems of the prior art, and an object of the present invention is to provide a film forming method capable of increasing a film forming rate in film formation by an aerosol deposition method.

Means for solving the technical problem

To solve the problem, the present invention has the following configuration.

[1] A film forming method is characterized in that a raw material liquid containing a film forming material is aerosolized, and the aerosol is supplied to a substrate vibrating at a frequency of 10kHz or less, thereby forming the film forming material on the substrate.

[2] The film forming method according to [1], wherein the vibration of the substrate is started before the aerosol is supplied to the substrate.

[3] The film forming method according to [1] or [2], wherein after the film forming material is formed on the substrate, the formed film is irradiated with active radiation.

[4] The film forming method according to any one of [1] to [3], wherein the aerosol is supplied to the substrate while heating the substrate.

[5] The film forming method according to [4], wherein the substrate is heated to a surface temperature of 100 ℃ or higher.

[6] The film forming method according to any one of [1] to [5], wherein the vibration speed of the substrate is 0.1 mm/sec or more.

[7] The film forming method according to any one of [1] to [6], wherein the vibration of the substrate is performed by 1 or more of irradiation of the acoustic wave to the substrate, air blowing to the substrate, and vibration of a support mechanism of the substrate.

[8] The film forming method according to any one of [1] to [7], wherein the film formation surface of the substrate has a region having lyophilic property to the raw material liquid and a region having lyophobic property to the raw material liquid.

[9] The film forming method according to any one of [1] to [8], wherein a surface treatment of the substrate is performed before the aerosol is supplied to the substrate.

[10] The film forming method according to [9], wherein the surface treatment of the base material is 1 or more of a rubbing treatment, a lyophilic treatment, a lyophobic treatment, and formation of a foundation layer.

[11] The film forming method as described in any one of [1] to [10], wherein the film forming material is a liquid crystal compound.

Effects of the invention

According to the film formation method of the present invention, the film formation rate of film formation by the aerosol deposition method can be increased.

Drawings

FIG. 1 is a schematic view for explaining an example of the film forming method of the present invention.

FIG. 2 is a schematic view for explaining another example of the film forming method of the present invention.

FIG. 3 is a schematic view for explaining another example of the film forming method of the present invention.

Detailed Description

Hereinafter, the film forming method of the present invention will be described in detail based on preferred embodiments shown in the drawings.

The embodiments described below are merely examples of the present invention and do not limit the scope of the present invention. In addition, the dimensions of the respective constituent members in the drawings can be appropriately changed to clearly explain the respective constituent members. Therefore, the scale in the drawings is different from the actual scale.

In the present specification, the numerical range represented by "to" means a range including numerical values before and after "to" as a lower limit value and an upper limit value.

Fig. 1 schematically shows an example of a film deposition apparatus for carrying out the film deposition method of the present invention.

The film formation apparatus 10 shown in fig. 1 is an apparatus for forming a film on a substrate Z by the aerosol deposition method described above, and includes an aerosol generation unit 12 and a film formation unit 14. The aerosol-generating unit 12 and the film-forming unit 14 are connected by a guide pipe 16.

In addition, the film forming method of the present invention basically performs film formation by a known aerosol deposition method (mist deposition) except that the aerosol a is supplied to the substrate Z by vibrating the substrate Z at 10kHz or less.

That is, the film forming apparatus 10 for carrying out the film forming method of the present invention is such that the film forming section 14 has the exciting device 34 described later, and film formation by a known aerosol deposition method is basically carried out while the aerosol a is supplied, except that the substrate Z is vibrated at a frequency of 10kHz or less by the exciting device 34, and therefore, the film forming apparatus 10 may have various components included in a known apparatus for forming a film by an aerosol deposition method, such as a supply mechanism of the raw material liquid L, a recovery mechanism of the aerosol a (raw material liquid L) which is not supplied to the film formation, and a purification mechanism of the carrier gas, in addition to the components shown in the figure.

The aerosol-generating section 12 aerosolizes a raw material liquid L in which a film-forming material is dissolved or dispersed in a solvent or a dispersion medium, and supplies the generated aerosol a to the guide pipe 16. the aerosol a is sent to the film-forming section 14 through the guide pipe 16.

In the film forming apparatus 10, the aerosol generation unit 12 includes a raw material container 20 for containing a raw material liquid L, a container 24 for containing a part of the raw material container 20, an ultrasonic vibrator 26 disposed on the bottom surface of the container 24, and a gas supply mechanism 28 for supplying a carrier gas for feeding the aerosol a to the film forming unit 14.

The container 24 contains water W, and the water W is contained in the container 24 in order to transmit the ultrasonic waves generated by the ultrasonic transducer 26 to the raw material liquid L, and therefore, the ultrasonic transducer 26 is immersed in the water W, and at least a part of the container 24 containing the raw material container 20 is also immersed in the water W.

When the Ultrasonic vibrator 26 vibrates, the water W transmits Ultrasonic vibration to ultrasonically vibrate the raw material container 20, thereby ultrasonically vibrating the raw material liquid L contained in the raw material container 20, the raw material liquid L ultrasonically vibrates to aerosolize the raw material liquid L, thereby generating an aerosol a of the raw material liquid L, that is, the raw material container 20, the container 24, and the Ultrasonic vibrator 26 constitute a so-called Ultrasonic Atomizer (Ultrasonic Atomizer).

In the film forming method of the present invention, the method of ultrasonically vibrating the raw material liquid L is not limited to the method of ultrasonically vibrating the raw material liquid L by using water W, that is, an intermediate solution, and for example, a known method of ultrasonically vibrating the raw material liquid L in the aerosol deposition method can be used, for example, by a method of ultrasonically vibrating the raw material liquid L through the raw material container 20 by disposing the ultrasonic vibrator 26 on the lower surface of the raw material container 20, or a method of ultrasonically vibrating the raw material liquid L directly by disposing the ultrasonic vibrator 26 on the bottom surface of the raw material container 20.

In the film forming method of the present invention, the film forming material (film to be formed) is not particularly limited, and various materials capable of film formation by an aerosol deposition method can be used.

Examples of the organic electroluminescent material include liquid crystal compounds, organic electroluminescent materials, metal alkoxide compounds, silicon compounds such as silica (silica) and tetraethoxysilane, ceramic powders such as lead zirconate titanate (PZT) and alumina (alumina), metal oxides such as zinc-based, alumina-based, zirconia-based, silica-based and perovskite-based, transparent electrode materials such as Indium Tin Oxide (ITO), silver halides and metal nanoparticles, polysaccharides such as gelatin, polyvinyl alcohol, polyvinylpyrrolidone and starch, cellulose and derivatives thereof, water-soluble resins such as polyethylene oxide, polyvinylamine, chitosan, polylysine, polyacrylic acid, poly (acrylic acid), poly (hyaluronic acid) and carboxy cellulose, and solutions containing molecules which are oxide semiconductors or organic semiconductors or carbon nanotubes.

The solvent or dispersion medium used for preparing the raw material liquid L is not limited, and various liquids can be used as long as the film-forming material can be dissolved or dispersed in the solvent or dispersion medium depending on the film-forming material.

Examples thereof include amides such as methyl ethyl ketone and N, N-dimethylformamide, sulfoxides such as dimethyl sulfoxide, heterocyclic compounds such as pyridine, hydrocarbons such as benzene and hexane, alkyl halides such as chloroform and methylene chloride, esters such as methyl acetate and butyl acetate, ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone, ethers such as tetrahydrofuran and 1, 2-dimethoxyethane, and organic solvents such as alkyl alcohols such as methanol, ethanol and propanol. Further, water may be exemplified as the solvent or the dispersant. Preferably, the water is any of ion-exchanged water, distilled water and pure water.

The solvent and the dispersion medium may be used in combination of 2 or more.

The raw material liquid L may contain various binders, coupling agents, and the like as necessary for the purpose of improving the adhesion of the film after film formation, improving the film strength, and the like.

If necessary, the raw material liquid L may contain a polymerizable monomer in order to increase the film hardness of the formed film.

The ultrasonic vibrator 26 is not limited, and various ultrasonic vibrators (ultrasonic vibration generating means) used for aerosolizing (atomizing) the raw material liquid L can be used in the aerosol deposition method.

The ultrasonic vibration frequency generated by the ultrasonic vibrator 26 is not limited, and may be set as appropriate depending on the composition of the raw material liquid L, etc. the ultrasonic vibration frequency for the aerosolization raw material liquid L is about 15kHz to 3 MHz.

In the aerosol deposition method, the particle size of the aerosol a can be adjusted by adjusting the density (concentration) of the raw material liquid L, the surface tension of the raw material liquid L, and the ultrasonic vibration frequency.

Specifically, assuming that ρ is the density of the raw material liquid L, σ is the surface tension of the raw material liquid L, and f is the ultrasonic vibration frequency, the particle diameter d of the aerosol can be obtained by the following equation.

d＝0.68[(π*σ)/(ρ*f²)]^1/2

The formula is described in j.accousticaii sot.amer.34(1962)6.

The particle size of the aerosol a in the aerosol deposition method can also be measured as follows: at least a part of the guide pipe 16 is formed of a light transmitting material, and a laser sheet light is incident into the guide pipe 16 by a laser sheet light source for visualization, and an image is captured by a high-speed camera and analyzed.

Further, the particle diameter of the aerosol A can be measured by visualizing the aerosol A by a commercially available particle visualization system, for example, Shin Nippon Air Technologies Co., manufactured by ViEST L td., or the like.

In the film forming method of the present invention, the particle size of the aerosol A is not limited, but is preferably 20 to 50 μm, more preferably 10 to 20 μm, and still more preferably 1 to 10 μm.

It is considered that the particle size of the aerosol a is basically the same until the aerosol a is generated and attached to the base material Z by movement in the guide pipe 16, except that the particle size is unexpectedly changed by collision of the aerosols a with each other or the like.

In the film forming method of the present invention, the aerosolization of the raw material liquid L is not limited to the ultrasonic vibration of the raw material liquid L, and various known aerosolization methods of the raw material liquid L used in the aerosol deposition method can be used.

As an example of the method of aerosolization, a pressurized type, a rotary disk type, an orifice plate vibration type, an electrostatic type, and the like can be given. The pressurized type is a method of aerosolizing a liquid by colliding a gas, which increases the flow rate by applying pressure, with the liquid. The rotating disk type is a method in which a liquid dropped on a disk rotating at a high speed is aerosolized at the end of the disk by centrifugal force. The orifice plate vibration type is a method of aerosol-forming by cutting a liquid droplet by applying vibration when the liquid droplet passes through an orifice plate having fine pores. The electrostatic type is a method of applying a direct current or alternating current voltage to a thin tube through which liquid droplets pass to aerosolize a liquid.

The gas supply mechanism 28 introduces a carrier gas into the raw material container 20 through a gas supply pipe 28 a. The aerosol a floating in the raw material container 20 is transported from the raw material container 20 by the carrier gas supplied from the gas supply mechanism 28, and is transported from the guide pipe 16 to the film forming section 14.

The gas supply mechanism 28 is not particularly limited, and known gas supply mechanisms for supplying carrier gas in the aerosol deposition method, such as various fans, blowers, gas cylinders, and compressed air, can be used. Alternatively, the carrier gas may be supplied to the raw material container 20 by suction from the discharge port 30a of the film forming section 14, which will be described later.

The amount of gas supplied by the gas supply mechanism 28 is also not particularly limited. Among them, the gas supply mechanism 28 preferably supplies the carrier gas so that the gas flow in the raw material container 20, the guide pipe 16, and the film forming section 14 (in the housing 30 described later) becomes laminar. By making the carrier gas-based gas laminar, a film having a uniform thickness can be formed on the surface of the base material Z.

The supply amount of the carrier gas supplied from the gas supply mechanism 28 was 3 × 10^-3～5×10^-3m³Per minute is preferred, 1 × 10^-3～3×10^-3m³More preferably,/minute.

In the film forming method of the present invention, the carrier gas is not particularly limited, and any known gas that is used as a carrier gas in the aerosol deposition method can be used, such as various inert gases such as argon and nitrogen, air, a gas obtained by aerosol forming a film forming material itself, and a gas obtained by aerosol forming another film forming material.

On the other hand, the film forming section 14 includes a housing 30, a support 32 for supporting the substrate Z, and a housing exciting device 34. The support 32 is disposed in the housing 30, and the exciting device 34 is fixed in contact with the lower surface of the housing 30.

In the film forming method of the present invention, the substrate Z is not particularly limited, and various substrates used as substrates can be used in film formation by the aerosol deposition method.

Examples of the resin film include resin films made of resin materials such as Polyethylene (PE), polyethylene naphthalate (PEN), Polyamide (PA), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polyvinyl alcohol (PVA), Polyacrylonitrile (PAN), Polyimide (PI), transparent polyimide, polymethyl methacrylate resin (PMMA), Polycarbonate (PC), polyacrylate, polymethyl acrylate, polypropylene (PP), Polystyrene (PS), acrylonitrile-butadiene-styrene copolymer (ABS), cycloolefin copolymer (COC), cycloolefin polymer (COP), triacetyl cellulose (TAC), and ethylene-vinyl alcohol copolymer (EVOH), and biodegradable films made of polylactic acid, polyglycolic acid, chitin, chitosan, and the like.

As the substrate Z, a micro flow channel wafer substrate such as μ TAS (micro-Total Analysis Systems), various circuit substrates on a silicon wafer, a biological template substrate, and the like can be used. That is, the film forming method of the present invention can also use various members having irregularities on the surface as the substrate Z.

In the film formation method of the present invention, before forming a film on the substrate Z, the surface of the substrate Z on which the film is to be formed may be subjected to surface treatment as necessary.

The surface treatment of the substrate Z may be carried out by various treatments depending on the kind of the solvent (dispersion medium) and the film forming material contained in the raw material liquid L, and examples of the surface treatment of the substrate Z include corona treatment and plasma treatment for improving the lyophilic property (coatability), and when water is used as the solvent of the raw material liquid L, the hydrophilization treatment of the substrate Z by UV (ultraviolet) irradiation, ozone irradiation, UV ozone cleaning, and the like is also effective.

General methods for rubbing treatment are described in, for example, "liquid crystal handbook" (issued by MARUZEN co., L td., 10 months and 30 days, respectively), which is equivalent to 12 years).

The surface treatment of the substrate Z can be performed by a known method.

Further, as the surface treatment of the substrate Z, formation of a foundation layer for the purpose of improvement of adhesion, improvement or provision of lyophilic property, improvement or provision of lyophobic property, securing of surface smoothness, or the like can be used. The formation of the base layer may be performed by a known method such as a coating method or a printing method, depending on the base layer to be formed.

In the film forming method of the present invention, the film formation surface of the substrate Z may have a region having lyophilic properties to the source liquid L and a region having lyophobic properties to the source liquid L.

In the present invention, lyophilic means that the contact angle between the film-formed surface of the substrate Z and the raw material liquid L is less than 90 °, and lyophobic means that the contact angle between the film-formed surface of the substrate Z and the raw material liquid L is 90 ° or more.

In the following description, a region of the film formation surface of the substrate Z having lyophilic property to the raw material liquid L is also referred to as a "lyophilic region", and a region of the film formation surface of the substrate Z having lyophobic property to the raw material liquid L is also referred to as a "lyophobic region".

In the aerosol deposition method, the aerosol a is supplied substantially uniformly over the entire surface of the substrate Z. That is, in the aerosol deposition method, local film formation cannot be selectively performed on the substrate Z.

In contrast, the aerosol a is removed from the lyophobic region by patterning the lyophilic region and the lyophobic region on the film formation surface of the substrate Z, and the aerosol a is selectively attached to the lyophilic region, thereby patterning the film by the aerosol deposition method to form a film on the substrate Z. For example, the target wiring pattern can be formed by forming a wiring pattern in a lyophilic region and forming a film by an aerosol deposition method using the other region as a lyophobic region.

In particular, in the film forming method of the present invention, since the aerosol is supplied to the substrate Z while vibrating the substrate Z, the aerosol a can be efficiently moved from the lyophobic region to the lyophilic region, and the film formation by patterning is preferably performed, which will be described later.

The lyophilic treatment, which is the formation of the lyophilic region and the lyophobic treatment, which is the formation of the lyophobic region, on the substrate Z can be performed by a known method depending on the composition of the source liquid L, particularly, depending on the solvent used for the source liquid L.

For example, when water is used as the solvent of the raw material liquid L, a method of forming a hydrophobic pattern by a method of applying a fluorine-based surfactant to a hydrophobic region after hydrophilization treatment by UV ozone treatment over the entire surface of the substrate Z by microcontact printing or the like can be exemplified.

The support 32 is a support mechanism that carries and supports the substrate Z.

In the film forming method of the present invention, the supporting mechanism for the substrate Z is not limited to the supporting body 32 on which the substrate Z is placed, and various known supporting mechanisms for sheet-like objects (plate-like objects, film-like objects) such as a supporting mechanism for sandwiching an end portion of the sheet-like object can be used.

In the roll-to-roll process described later, a roller for conveying the substrate Z in the supply portion of the aerosol a, a drum (can) for winding and conveying the substrate Z in the supply portion of the aerosol a, and the like function as a support mechanism for the substrate Z. The rollers for conveying the substrate Z are, for example, a conveying roller, and the like.

When the exciting device 34 supplies the aerosol a to the base material Z, the base material Z is vibrated at a frequency of 10kHz or less.

In the film forming section 14, the support 32 is provided in contact with the bottom surface (inner wall surface) of the case 30. The exciting device 34 is provided in contact with the lower surface of the housing 30. Therefore, the case 30 is vibrated by the exciting device 34 to vibrate the support 32, and the base material Z supported by the support 32 is vibrated. In the present invention, aerosol a is supplied to substrate Z while vibrating substrate Z at a frequency of 10kHz or less. The film forming method of the present invention has such a configuration, and thus the film forming speed by the aerosol deposition method is increased.

As described above, film formation by the aerosol deposition method can precisely form a film having high conformability (coverage) and a uniform thickness.

On the other hand, film formation by the aerosol deposition method has a problem of low productivity because the film formation rate, which is a film formation rate, is low and it takes time to form a film having a target thickness.

In contrast, in the film formation method of the present invention, in the film formation by the aerosol deposition method, the aerosol a is supplied to the substrate Z while vibrating the substrate Z at a frequency of 10kHz or less.

The film forming method of the present invention can thereby increase the film forming speed in film formation by the aerosol deposition method.

The reason why the film forming rate is increased by supplying the aerosol a to the substrate Z while vibrating the substrate Z at a frequency of 10kHz or less is not clear, but can be estimated as follows.

In the film formation by the aerosol deposition method, the aerosol a adheres to the substrate Z, and the solvent evaporates, whereby the film formation is performed by the film-forming material contained in the aerosol a.

In the aerosol deposition method, the aerosol a is attached to the substrate Z and dried to form a film in the shape of a sea island. Wherein the aerosol a not fixed to the base material Z is directly discharged by being rolled off from the base material Z. Therefore, it is considered that most of the aerosol a is not efficiently supplied to the film formation by the conventional aerosol deposition method, and the film formation rate is slow.

In contrast, it is considered that, with the film forming method of the present invention in which the aerosol a is supplied while vibrating the substrate Z, the aerosol a is prevented from rolling off from the substrate by the reciprocating movement of the substrate Z, and the aerosol a moves on the substrate Z and the aerosols a collide with each other, whereby the droplets of the aerosol a become large and are easily fixed to the substrate Z, and as a result, the film forming speed is improved.

In the film forming method of the present invention, the vibration frequency of the substrate Z is 10kHz or less.

When the aerosol a adheres to the substrate Z, the aerosol a becomes a liquid close to the raw material liquid L in a state before the solvent is evaporated, and when the substrate Z is vibrated at a frequency of more than 10kHz, the liquid close to the raw material liquid L adhering to the substrate Z becomes a state of being ultrasonically vibrated, and is re-aerosolized and detached from the surface of the substrate Z.

In the film forming method of the present invention, the vibration frequency of the substrate Z is preferably 10kHz or less, more preferably 5kHz or less, and still more preferably 1kHz or less.

In the film forming method of the present invention, the lower limit of the vibration frequency of the substrate Z is not limited.

In order to more preferably obtain the effect of increasing the film formation rate, the vibration frequency of the substrate Z is preferably 50Hz or more, more preferably 100Hz or more, and still more preferably 200Hz or more.

In the film forming method of the present invention, the vibration speed of the substrate Z is also not limited.

However, in order to more preferably obtain the effect of increasing the film formation rate, it is preferable to vibrate the substrate Z at a rate of a certain degree or more. The vibration speed of the base material Z is preferably 0.1 mm/sec or more, more preferably 0.5 mm/sec or more, and still more preferably 1 mm/sec or more.

However, if the vibration speed of the base material Z is too high, there may be problems such as an increase in the load on the apparatus, an increase in the load on the base material Z, easy rolling off of the aerosol a from the base material Z, and drying of the aerosol a before movement. Therefore, the vibration amplitude of the base material Z is preferably 10 mm/sec or less, more preferably 8 mm/sec or less, and still more preferably 5 mm/sec or less.

The exciting device 34 is not limited, and various known exciting mechanisms capable of vibrating the support body 32 can be used for the support body 32 supporting the base material Z. In the present invention, the support (support mechanism) for supporting the base material Z includes the roll-to-roll and the like as described above.

Examples of the excitation device 34 include a vibration mechanism using a piezoelectric element, a vibration motor (eccentric motor), a vibration mechanism using a movable coil, and a vibration mechanism using an air actuator, a hydraulic actuator, and the like. Further, the exciting device 34 can also preferably use a commercially available exciter (exciting device).

In the film forming method of the present invention, the method of vibrating the support mechanism of the substrate Z in the method of vibrating the substrate Z is not limited to the above method.

For example, a mechanism for vibrating the substrate Z such as an air blowing mechanism for blowing air to the substrate Z to vibrate the substrate Z and a mechanism for radiating sound waves to the substrate Z such as a speaker to vibrate the substrate Z at a position where the aerosol a is supplied to the substrate Z, i.e., at a film forming position, when the substrate Z is supported by a support mechanism at a nip end, or when the substrate Z is transported by a transport roller pair in a roll-to-roll process described later, may be preferably used as the vibration mechanism for the substrate Z.

In the film forming method of the present invention, when the aerosol a is supplied to the substrate Z, the substrate Z is vibrated at a frequency of 10kHz or less.

The time for starting the vibration of the substrate Z is not limited, but it is preferable to start the vibration of the substrate Z before starting the supply of the aerosol a to the substrate Z, and for example, in the case of the film formation device 10 shown in fig. 1, it is preferable to start the driving of the ultrasonic vibrator 26 and start the aerosol formation of the raw material liquid L after starting the vibration of the substrate Z (the support 32) by the vibration device 34.

In the film forming method of the present invention, in order to preferably increase the film forming speed, it is preferable that the substrate Z is vibrated at a frequency of 10kHz or less at all times in a state where the aerosol a is supplied to the substrate Z. By starting the vibration of the base material Z before starting the supply of the aerosol a to the base material Z, the base material Z can be reliably vibrated when the aerosol a is supplied.

In the film formation method of the present invention, the vibration of the substrate Z may be in the plane direction of the main surface of the substrate Z, or may be in the direction orthogonal to the main surface of the substrate Z, including both the plane direction of the main surface of the substrate Z and the direction orthogonal to the main surface of the substrate Z. The main surface refers to the largest surface of the sheet (film, plate).

The vibration of the base material Z may be linear reciprocating motion, or may be vibration that describes a trajectory having a shape such as a circle, an ellipse, or a polygon.

In the film forming method of the present invention, the substrate Z is preferably heated when the aerosol a is supplied.

By supplying the aerosol a to the substrate Z while heating the substrate Z, the aerosol a moves on the substrate Z due to the leidenfrost phenomenon (leidenfrost effect), and thus the film forming efficiency is improved, and the film forming speed can be further improved.

The heating temperature of the base material Z is not limited as long as the temperature at which the leidenfrost phenomenon occurs is appropriately set according to the solvent used for the raw material liquid L, and the heating of the base material Z is preferably performed so that the surface temperature of the base material Z becomes 100 ℃ or higher, and more preferably 150 ℃ or higher.

The upper limit of the heating temperature may be set to a temperature at which the base material Z is not damaged, depending on the material forming the base material Z.

The substrate Z can be heated by various known sheet heating methods such as a method using a heater or the like.

The operation of the film formation apparatus 10 shown in fig. 1 will be described below.

In the film forming apparatus 10 shown in fig. 1, when the ultrasonic vibrator 26 is ultrasonically vibrated in a state where the source liquid L is contained in the source container 20, ultrasonic waves are transmitted to the source liquid L via the water W, and the source liquid L is ultrasonically vibrated.

The raw material liquid L is ultrasonically vibrated to aerosolize the raw material liquid L, and thereby the inside of the raw material container 20 is in a state in which the aerosol a generated by aerosolization of the raw material liquid L floats upward.

As described above, it is preferable that the exciting device 34 be driven to start the vibration of the substrate Z before the start of the aerosolization of the raw material liquid L, that is, the driving of the ultrasonic vibrator 26.

Subsequently, the carrier gas is supplied from the gas supply mechanism 28 into the raw material container 20 through the gas supply pipe 28 a. The aerosol a floating in the material container 20 is carried from the material container 20 to the guide pipe 16 by the carrier gas, and is carried from the guide pipe 16 into the case 30 of the film forming section 14. Further, the aerosol a may be concentrated, for example, by heating the guide pipe 16 as necessary.

When the aerosol a is transferred into the case 30 of the film forming section 14, the aerosol a is supplied to the base material Z carried on the support 32, and further, the solvent is evaporated from the aerosol a supplied (adhered) to the base material Z, and the film forming material contained in the aerosol a (raw material liquid L) is formed into a film on the base material Z, and the aerosol a not supplied to the film formation is discharged from the discharge port 30a of the case 30.

In the film forming method of the present invention, the substrate Z is vibrated at a frequency of 10kHz or less by the exciting device 34, and therefore, the film forming rate can be increased, and a film having a target film thickness can be obtained more quickly than in the usual aerosol deposition method. Further, a thicker film can be obtained with the same film formation time.

In the film forming method of the present invention, after the film is formed on the substrate Z, active radiation such as ultraviolet rays, electron beams, and radiation such as α rays, β rays, and γ rays may be irradiated to the film, if necessary.

For example, when the film-forming material is a polymerizable liquid crystal compound, the film is formed on the substrate Z, and then the film is irradiated with ultraviolet rays to cure (polymerize) the polymerizable liquid crystal compound.

As described above, according to the film formation method of the present invention, the film formation rate of the aerosol deposition method can be increased. Therefore, the film forming method of the present invention can also utilize film formation from a roll to a roll which has been difficult to utilize in the conventional aerosol deposition method.

As is well known, roll-to-roll refers to a manufacturing method in which a long substrate Z is unwound from a roll of the substrate in which the long substrate Z is wound in a roll shape, and the long substrate Z is continuously subjected to a process such as film formation while being conveyed in the longitudinal direction, and the processed substrate Z is wound in a roll shape again. The productivity can be greatly improved by roll-to-roll.

In the following description, a roll-to-roll will also be referred to as "RtoR".

Fig. 2 schematically shows an example of using the film forming method of the present invention for RtoR. In addition, since the same components as those of the film deposition apparatus 10 shown in fig. 1 are often used in the film deposition apparatus shown in fig. 2, the same components are denoted by the same reference numerals, and different portions will be mainly described.

In the film forming apparatus 40 shown in fig. 2, a long substrate Z is conveyed in the longitudinal direction (the direction of arrow x in the figure) by a conveying roller 42 and a conveying roller 46. In addition, a conveying roller pair may be used instead of the conveying roller.

The case 30A of the film forming section 14A is a rectangular frame having an open lower surface. The exciting device 34 is disposed below the substrate Z so as to sandwich the substrate Z together with the housing 30A. The case 30A is disposed between the conveying rollers 42 and 46 in the conveying direction of the base material Z. Therefore, in the film forming apparatus 40, the transport rollers 42 and 46 serve as a support mechanism for the substrate Z.

In the film forming apparatus 40, the aerosol a is supplied to the substrate Z while passing through the lower side of the housing 30A while the substrate Z is conveyed in the longitudinal direction by the conveying rollers 42 and 46, thereby forming a film.

Here, the base material Z is vibrated at a frequency of 10kHz or less by the exciting device 34 disposed below the housing 30A. Therefore, as described above, the film formation rate by the aerosol deposition method can be increased, and the film formation by RtoR can also be preferably dealt with.

As described above, in RtoR, as the exciting device 34, it is possible to preferably use a mechanism for vibrating the base material Z by radiating sound waves to the base material Z, such as an air blowing mechanism for blowing air to the base material Z and a speaker. Further, the base material Z may be vibrated by vibrating the conveying roller 42 and/or the conveying roller 46 as the supporting mechanism.

As described above, in the present invention, it is preferable that the vibration of the substrate Z is started before the aerosol a starts to be supplied.

Therefore, in the film forming apparatus 40 illustrated in the figure using RtoR, it is preferable that the exciting device 34 start vibrating the substrate Z from the upstream side of the housing 30A, specifically, from the immediately downstream side of the conveying roller 42 on the upstream side.

As described above, in the film forming method of the present invention, before the aerosol a is supplied to the substrate Z, surface treatment, lyophilic treatment, lyophobic treatment, and the like of the substrate can be performed.

When the present invention is used for RtoR, a device (processing member) for performing such a process may be disposed upstream of the case 30A, and the film formation according to the present invention may be performed on the substrate Z subjected to the surface treatment, the lyophilic treatment, the lyophobic treatment, and the lyophobic treatment.

For example, as schematically shown in fig. 3, a water repellent pattern transfer device 54 is provided upstream of the film forming device 40 (housing 30A), a UV ozone treatment device 52 is further provided upstream of the water repellent pattern transfer device 54, and water is used as a solvent of the raw material liquid L.

At this time, while the substrate Z is conveyed in the longitudinal direction (arrow x direction), the entire surface of the substrate Z is first hydrophilized by performing UV ozone treatment on the entire surface of the substrate Z by the UV ozone treatment device 52. Next, the hydrophobic pattern formed by the micro-contact printing or the like is transferred from the transfer roller 54a to the surface of the base material Z whose entire surface is hydrophilized by the hydrophobic pattern transfer device 54. This forms a pattern of hydrophilic regions and hydrophobic regions on the surface of the substrate Z.

Thereafter, while the substrate Z is conveyed, the film forming apparatus 40 that performs the film forming method of the present invention forms a film on the substrate Z on which the pattern of the hydrophilic region and the hydrophobic region is formed. This makes it possible to pattern only the hydrophilic region to deposit the aerosol a, and to pattern the film formation material to form a film.

The manufacturing method shown in fig. 3 can also be used in a manufacturing method in which film formation is performed by the film formation apparatus 40: while a plurality of single-piece (cut-sheet-like) substrates Z shown in fig. 1 are arranged in the conveyance direction by a conveyance mechanism such as a conveyor belt or a roller conveyor and conveyed by the conveyance mechanism, the hydrophilic treatment by the UV ozone treatment device 52 and the transfer of the hydrophobic pattern by the hydrophobic pattern transfer device 54 are sequentially performed on the conveyed substrates Z, thereby performing the film formation method of the present invention.

Although the film forming method of the present invention has been described in detail above, the present invention is not limited to the above-described examples, and various improvements and modifications may be made without departing from the technical spirit of the present invention.