阅读说明：本技术 电动机及其制造方法 (Motor and method for manufacturing the same ) 是由 阿里夫·扎伊尼 元吉研太 伊藤一将 山口信一 于 2018-08-21 设计创作，主要内容包括：本发明得到不使推力特性降低的电动机。电动机具有：励磁；以及电枢,其隔着空隙而与励磁相对,相对于励磁而相对地移动,在将电枢相对于励磁而相对地移动的方向设为X方向,将从励磁朝向电枢的方向设为Z方向,将与X方向及Z方向垂直的方向设为Y方向时,励磁具有：基座部,其沿X方向延伸,由磁体构成；多个齿部,它们从基座部沿Z方向凸出,沿X方向隔开间隔地排列,由磁体构成；以及连结部,其在齿部的Y方向的端部,将沿X方向相对的2个齿部的端部彼此连结,由磁体构成,连结部中的X方向的磁阻大于通过连结部连结的齿部中的Y方向的磁阻。(The invention provides a motor without reducing thrust characteristics. The motor has: excitation; and an armature that is opposed to the field via a gap and that moves relative to the field, wherein the field has: a base portion extending in the X direction and formed of a magnet; a plurality of tooth parts protruding from the base part along the Z direction, arranged at intervals along the X direction, and composed of magnets; and a connecting portion which connects the end portions of 2 tooth portions facing each other in the X direction at the end portions of the tooth portions in the Y direction, and which is composed of a magnet, wherein the magnetic resistance in the X direction in the connecting portion is larger than the magnetic resistance in the Y direction in the tooth portions connected by the connecting portion.)

1. An electric motor, comprising:

excitation; and

an armature that faces the excitation via a gap and moves relative to the excitation,

when a direction in which the armature moves relative to the field is defined as an X direction, a direction from the field toward the armature is defined as a Z direction, and a direction perpendicular to the X direction and the Z direction is defined as a Y direction,

the excitation has:

a base portion extending in the X direction and formed of a magnet;

a plurality of tooth portions projecting from the base portion in the Z direction, arranged at intervals in the X direction, and formed of a magnet; and

a connecting portion which connects end portions of 2 tooth portions facing each other in the X direction at the end portions of the tooth portions in the Y direction and is formed of a magnet,

the magnetic resistance in the X direction in the coupling portion is larger than the magnetic resistance in the Y direction in the teeth portions coupled by the coupling portion.

2. The motor according to claim 1, wherein,

the base portion is formed by laminating a plurality of magnetic steel plates in the Z direction or the Y direction.

3. The motor according to claim 1, wherein,

the tooth portion and the connecting portion are formed by laminating a plurality of magnetic steel plates in the Z direction.

4. The motor according to claim 2 or 3,

the coupling portion has a magnetic resistance increasing portion,

the magnetic resistance in the X direction of the increased magnetic resistance section is greater in the connecting section than the magnetic resistance in the X direction of the section other than the increased magnetic resistance section.

5. The motor according to claim 4, wherein,

the increased magnetic resistance section is a hole that penetrates the connection section in the Z direction.

6. The motor according to claim 5, wherein,

the exciter further includes a bolt that passes through the hole and fastens the coupling portion and the base portion.

7. The motor according to claim 4, wherein,

the magnetic resistance increasing portion is a welded portion that fastens the connecting portion and the base portion by welding.

8. The motor according to claim 4, wherein,

the magnetic resistance increasing portion is a caulking portion that fastens the connecting portion and the base portion by caulking.

9. The motor according to any one of claims 4 to 8,

when Wa is a width of the connecting portion in the Y direction and Wc is a width of the increased reluctance portion in the Y direction,

Wa＞Wc。

10. the motor according to claim 9, wherein,

when Wb is Wa-Wc, the thickness of the magnetic steel plate is T, and the width of the tooth portion in the X direction is T,

t/2≤Wb≤T/3。

11. the motor according to any one of claims 1 to 10,

when an angle formed by center lines in the Y direction in adjacent teeth is defined as θ,

0°＜θ≤90°。

12. a method of manufacturing a motor according to claim 3,

comprises the following steps:

a 1 st step of forming the tooth portion and the connection portion by laminating the magnetic steel sheets in the Z direction; and

and a 2 nd step of fixing the tooth portion and the connection portion to the base portion.

Technical Field

The present invention relates to a motor having a field and an armature, and a method of manufacturing the motor.

Background

In recent years, demands for higher speed and higher precision positioning have been increasing for actuators used in table feeding devices of machine tools and conveying facilities in semiconductor manufacturing apparatuses. Therefore, there are many examples of using a linear motor as an actuator for a machine tool, a semiconductor manufacturing apparatus, or the like.

The linear motor is driven by a direct drive system in which the device is directly driven without a transmission. Therefore, by combining the rotary servo motor and the ball screw, the linear motor can achieve a response in a short time without a decrease in rigidity due to a backlash of the ball screw, as compared with a drive system in which the rotary mechanism is converted into a linear motion. Therefore, the linear motor can perform a positioning operation of the apparatus at a high speed, a high acceleration, and a high accuracy.

The conventional linear motor includes: as an excited mount; and a movable element as an armature that faces the stator with a certain gap therebetween and moves relative to the stator. In the movable element, a coil is wound around each tooth of an iron core made of a magnet. The fixing member is composed of a convex iron core and a base for supporting the protrusion. Since the stator has the convex core, the magnet regions and the air regions are alternately arranged in the stator in the traveling direction of the movable element. With this structure of the fixing member, variation in magnetic permeability required for driving the motor is realized. Heretofore, a structural machine capable of realizing various magnetic permeability fluctuations has been reported (for example, see patent document 1).

Patent document 1: japanese examined patent publication (Kokoku) No. 5-57820

Disclosure of Invention

In patent document 1, slit-shaped holes are provided at regular intervals in a fixture by etching a long plate. With this structure, the core and the air region are alternately present in the moving direction of the movable element. Therefore, the core remaining with respect to the slit actually functions as a projection. By the structure of the fixed member, the magnetic conductivity is changed in the moving direction of the movable member. However, in patent document 1, the core serving as the projection is fixed to the base of the fixture by a diffusion bonding method. Therefore, the magnetic characteristics of the projection of the stator through which the main magnetic flux flowing from the coil of the movable element passes are degraded. Therefore, there is a problem that the thrust characteristics of the motor are degraded.

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a motor and a method of manufacturing the motor, in which thrust characteristics are not degraded.

An electric motor according to the present invention includes: excitation; and an armature that is opposed to the field via a gap and that moves relative to the field, wherein the field has: a base portion extending in the X direction and formed of a magnet; a plurality of tooth parts protruding from the base part along the Z direction, arranged at intervals along the X direction, and composed of magnets; and a connecting portion which connects the end portions of 2 tooth portions facing each other in the X direction at the end portions of the tooth portions in the Y direction, and which is composed of a magnet, wherein the magnetic resistance in the X direction in the connecting portion is larger than the magnetic resistance in the Y direction in the tooth portions connected by the connecting portion.

The manufacturing method according to the present invention includes the steps of: a step 1 of laminating magnetic steel sheets in a Z direction to form a tooth portion and a connecting portion; and a 2 nd step of fixing the tooth portion and the connection portion to the base portion.

ADVANTAGEOUS EFFECTS OF INVENTION

In the motor configured as described above, a motor without a reduction in thrust characteristics and a method of manufacturing the motor can be obtained.

Drawings

Fig. 1 is a perspective view showing a motor according to embodiment 1 of the present invention.

Fig. 2 is a cross-sectional view of the motor in embodiment 1 of the present invention, the cross-sectional view being perpendicular to the Y direction.

Fig. 3 is a perspective view of a stator of a motor in embodiment 1 of the present invention.

Fig. 4 is an exploded view of a stator of a motor in embodiment 1 of the present invention.

Fig. 5 is a view of a motor mount according to embodiment 1 of the present invention as viewed from the gap side.

Fig. 6 is an enlarged view of a portion B of fig. 5 of a stator of the motor in embodiment 1 of the present invention as viewed from the gap side.

Fig. 7 is a perspective view of the motor of comparative example 1, which is compared with the motor in embodiment 1 of the present invention.

Fig. 8 is a cross-sectional view perpendicular to the Y direction of the motor of comparative example 1, which is compared with the motor in embodiment 1 of the present invention.

Fig. 9 is a view of a motor mount according to embodiment 1 of the present invention as viewed from the gap side.

Fig. 10 is a cross-sectional view perpendicular to the Y direction in the 1 st modification of the motor in embodiment 1 of the present invention.

Fig. 11 is a cross-sectional view perpendicular to the Y direction in a 2 nd modification of the motor in embodiment 1 of the present invention.

Fig. 12 is a perspective view of a stator according to a 3 rd modification of the motor in embodiment 1 of the present invention.

Fig. 13 is an exploded view of the fixture of fig. 12 in the Z direction.

Fig. 14 is a sectional view B-B of fig. 12.

Fig. 15 is a perspective view of a stator according to a 4 th modification of the motor in embodiment 1 of the present invention.

Fig. 16 is a cross-sectional view C-C of fig. 15.

Fig. 17 is a perspective view of a stator according to a 5 th modification of the motor in embodiment 2 of the present invention.

Fig. 18 is a view of a stator of a 5 th modification of the motor according to embodiment 2 of the present invention, as viewed from the gap side.

Fig. 19 is a perspective view of a stator of a motor of comparative example 2, which is compared with the motor in embodiment 2 of the present invention.

Fig. 20 is a perspective view of a stator of a 6 th comparative example of the motor in embodiment 3 of the present invention.

Fig. 21 is a view of the fixture of comparative example 6 of the motor in embodiment 3 of the present invention, as viewed from the gap side.

Fig. 22 is a cross-sectional view taken along line C-C in fig. 21 of a stator according to modification 6 of the motor in embodiment 3 of the present invention.

Fig. 23 is an exploded perspective view and a perspective view of a stator according to modification 7 of the motor in embodiment 4 of the present invention.

Fig. 24 is a D-D sectional view of fig. 23 of a stator of a 7 th modification of the motor in embodiment 4 of the present invention.

Fig. 25 is a view of a stator according to a 7 th modification of the motor according to embodiment 4 of the present invention, as viewed from the gap side.

Fig. 26 is a perspective view of a stator according to a modification 8 of the motor in embodiment 4 of the present invention.

Fig. 27 is an enlarged view of a portion E shown in fig. 26 when the stator of the 8 th modification of the motor according to embodiment 4 of the present invention is viewed from the gap side.

Fig. 28 is a perspective view of a stator according to a 9 th modification of the motor in embodiment 4 of the present invention.

Fig. 29 is an enlarged view of a portion F shown in fig. 28 when the stator of the 9 th modification of the motor according to embodiment 4 of the present invention is viewed from the gap side.

Fig. 30 is a perspective view of a stator according to a 10 th modification of the motor in embodiment 5 of the present invention.

Fig. 31 is a view of a stator of a 10 th modification of the motor according to embodiment 5 of the present invention, as viewed from the gap side.

Fig. 32 is a perspective view of a stator according to a 11 th modification of the motor in embodiment 6 of the present invention.

Fig. 33 is a view of a stator according to a 11 th modification of the motor according to embodiment 6 of the present invention, as viewed from the gap side.

Detailed Description

Hereinafter, preferred embodiments of the motor according to the present invention will be described with reference to the drawings.