阅读说明：本技术 喷墨头、喷墨装置以及喷墨头的制造方法 (Ink jet head, ink jet device, and method of manufacturing ink jet head ) 是由 铃木伊左雄 兼古佳明 于 2019-10-24 设计创作，主要内容包括：本申请提供能够确保喷出性能以及耐压性的喷墨头、喷墨装置以及喷墨头的制造方法。一实施方式涉及的喷墨头具备喷嘴板和致动器基座。喷嘴板具有多个喷嘴。致动器基座具有多个壁部、多个第一槽和多个第二槽。壁部具有与所述喷嘴板接合的接合面。第一槽配置于所述壁部的一侧,并形成与多个所述喷嘴连通的压力室。第二槽配置于所述壁部的另一侧。在多个所述壁部的所述接合面和所述喷嘴板之间,所述喷嘴板和所述致动器基座经由粘接剂接合。在多个所述壁部中过半数的所述壁部中,所述粘接剂配置成相比所述第一槽侧更偏向所述第二槽侧。(The application provides an ink jet head, an ink jet device and a method for manufacturing the ink jet head, which can ensure ejection performance and pressure resistance. An inkjet head according to an embodiment includes a nozzle plate and an actuator base. The nozzle plate has a plurality of nozzles. The actuator base has a plurality of walls, a plurality of first slots, and a plurality of second slots. The wall portion has a joining surface joined to the nozzle plate. The first groove is disposed on one side of the wall portion, and forms a pressure chamber communicating with the plurality of nozzles. The second groove is disposed on the other side of the wall portion. The nozzle plate and the actuator base are bonded to each other via an adhesive between the bonding surface of the plurality of wall portions and the nozzle plate. In a majority of the wall portions, the adhesive is disposed closer to the second groove side than to the first groove side.)

1. An ink jet head, comprising:

a nozzle plate having a plurality of nozzles; and

an actuator base including a plurality of wall portions having a bonding surface to which the nozzle plate is bonded, a plurality of first grooves disposed on one side of the wall portions and forming pressure chambers communicating with the nozzles, and a plurality of second grooves disposed on the other side of the wall portions,

the nozzle plate and the actuator base are bonded via an adhesive between the bonding surfaces of the plurality of wall portions and the nozzle plate, and the adhesive is disposed on the second groove side with respect to the first groove side in a majority of the plurality of wall portions.

2. An ink jet head according to claim 1,

the ink jet head is further provided with a frame,

the actuator base is joined to the nozzle plate so as to face the nozzle plate with the frame interposed therebetween, and forms a common chamber between the actuator base and the nozzle plate.

3. An ink jet head according to claim 1 or 2,

the adhesive is disposed on the second groove side with respect to the first groove side, in the wall portions of the plurality of wall portions, the number of which is 80% or more.

4. An ink jet head according to claim 1 or 2,

the ink jet head is used for ejecting liquid containing conductive particles for forming a wiring pattern of a printed wiring board.

5. An inkjet apparatus, comprising:

an ink jet head as defined in any one of claims 1 to 4; and

and a transport device for transporting the recording medium along a predetermined transport path.

6. A method for manufacturing an ink jet head is provided,

the nozzle plate and the actuator base are bonded via an adhesive,

wherein the nozzle plate has a nozzle,

the actuator base includes a plurality of wall portions having a bonding surface to which the nozzle plate is bonded, a plurality of first grooves disposed on one side of the wall portions and communicating with the nozzles, and a plurality of second grooves disposed on the other side of the wall portions,

in the joining surface of the wall portion, the adhesive is disposed so as to be offset toward the second groove side with respect to the first groove side.

7. A method of manufacturing an ink jet head according to claim 6,

when the adhesive is applied to the wall portion or the nozzle plate, the adhesive is applied so that an application area or an application amount is biased toward the second groove side.

8. A method of manufacturing an ink jet head according to claim 6,

in a state where the adhesive is disposed between the wall portion and the nozzle plate is bonded to the actuator base, the adhesive is biased toward the second groove by increasing the pressure of the first groove to be higher than the pressure of the second groove.

9. A method of manufacturing an ink jet head according to claim 6 or 7,

the ink jet head is further provided with a frame,

the actuator base is joined to the nozzle plate so as to face the nozzle plate with the frame interposed therebetween, and forms a common chamber between the actuator base and the nozzle plate.

10. A method of manufacturing an ink jet head according to claim 6 or 7,

the ink jet head is used for ejecting liquid containing conductive particles for forming a wiring pattern of a printed wiring board.

Technical Field

Embodiments of the present invention relate to an inkjet head, an inkjet device, and a method of manufacturing an inkjet head.

Background

In a shared-mode wall-sharing inkjet head including a plurality of pressure chambers, a configuration is known in which a plurality of pressure chambers communicating with nozzles and a plurality of air chambers arranged between the plurality of pressure chambers are alternately provided in a predetermined parallel direction. In such a liquid ejection head, a nozzle plate is bonded to an actuator base having a plurality of grooves and constituting a pressure chamber and an air chamber, for example, with an adhesive.

Disclosure of Invention

In such an ink jet head, the control of the application position of the adhesive is difficult, and sometimes the adhesive may overflow into the pressure chamber. If the adhesive that has overflowed is applied to the nozzle, the ejection performance of the ink droplets is adversely affected, which causes a reduction in print quality. On the other hand, if the amount of adhesive applied is reduced in order to suppress the overflow of the adhesive, the pressure resistance is impaired due to the insufficient bonding strength.

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an ink jet head, an ink jet device, and a method of manufacturing the ink jet head, which can ensure ejection performance and pressure resistance.

One embodiment of the present invention relates to an inkjet head including a nozzle plate and an actuator base. The nozzle plate has a plurality of nozzles. The actuator base has a plurality of walls, a plurality of first slots, and a plurality of second slots. The wall portion has a joining surface joined to the nozzle plate. The first groove is disposed on one side of the wall portion, and forms a pressure chamber communicating with the nozzle. The second groove is disposed on the other side of the wall portion. The nozzle plate and the actuator base are bonded to each other via an adhesive between the bonding surface of the plurality of wall portions and the nozzle plate. In the majority of the wall portions, the adhesive is disposed closer to the second groove side than to the first groove side.

The present invention also relates to an inkjet apparatus including: the above-mentioned ink jet head; and a conveying device for conveying the recording medium along a predetermined conveying path.

The present invention also relates to a method of manufacturing an ink jet head in which a nozzle plate having a nozzle is bonded to an actuator base having a plurality of wall portions, a plurality of first grooves and a plurality of second grooves, the plurality of wall portions having a bonding surface to which the nozzle plate is bonded, the plurality of first grooves being disposed on one side of the wall portions and communicating with the nozzle, the plurality of second grooves being disposed on the other side of the wall portions, and the adhesive being disposed on the bonding surface of the wall portions so as to be closer to the second grooves than to the first grooves.

Drawings

Fig. 1 is an exploded perspective view showing the configuration of an ink jet head according to a first embodiment.

Fig. 2 is a perspective view showing a part of the configuration of the same ink jet head.

Fig. 3 is a sectional view showing a part of the constitution of the same ink jet head.

Fig. 4 is an explanatory view showing a method of manufacturing the same ink jet head.

Fig. 5 is an explanatory diagram showing a configuration of an ink jet printer using the same ink jet head.

Fig. 6 is an explanatory view showing a method of manufacturing an ink jet head according to another embodiment.

Description of the reference numerals

1(1C, 1M, 1Y, 1B) … inkjet head, 20 … actuator base, 21 … substrate, 21a … supply hole, 21B … recovery hole, 22 … laminated piezoelectric body, 23 … tank, 23a … tank row, 23a … first tank, 23B … second tank, 24 … electrode, 25 … partition wall portion (wall portion), 25a … first piezoelectric element, 25B … second piezoelectric element, 25C … joint surface, 26 …, 27 … cover wall, 30 … nozzle plate, 31 … nozzle, 40 … frame, 41 … frame member, 41a … opening portion, 50 … adhesive, 100 … inkjet printer, 111 …, 112 … medium supply portion, 112a … paper feed cassette, 113 … image forming portion, 114 … medium discharge portion, 114a … discharge tray, … discharge device, … transport device, … control device, 116a … transport belt, 120 a …, … support plate … roller, … support plate …, … support plate, Guide plate pairs 121a to 121h …, rollers 122a to 122h … for conveyance, 130 … head unit, 132 … ink cartridge, 133 … connection flow path, 133a … supply flow path, 133b … recovery flow path, 134 … circulation pump, a1 … conveyance path, C1 … pressure chamber, C2 … air chamber, and C3 … common chamber.

Detailed Description

Next, an ink jet head 1 as a liquid ejection head and an ink jet printer 100 as an ink jet apparatus according to a first embodiment will be described with reference to fig. 1 to 5. In the drawings, the structure is enlarged, reduced, or omitted as appropriate for convenience of explanation. Arrows X, Y, Z indicate three mutually orthogonal directions. In the present embodiment, an example is shown in which the inkjet heads 1 are arranged along the X axis in the first direction, along the Y axis in the second direction, and along the Z axis in the third direction.

Fig. 1 is an exploded perspective view showing a part of an ink jet head 1 according to a first embodiment, fig. 2 is a perspective view showing a part of a configuration of the ink jet head 1, and fig. 3 is a sectional view showing the above-described part of the configuration of the ink jet head 1.

The inkjet head 1 shown in fig. 1 to 6 is a liquid ejection head, and includes an actuator base 20, a nozzle plate 30, and a frame 40. The inkjet head 1 is a shared mode wall-sharing inkjet head.

The actuator base 20 includes a substrate 21 and a multilayer piezoelectric body 22. The actuator base 20 is joined to the nozzle plate 30 through the frame 40 so as to face the nozzle plate 30, and forms a common chamber C3 with the nozzle plate 30.

The substrate 21 is formed in a square plate shape. The substrate 21 is preferably made of PZT, ceramic, glass, free-cutting ceramic, or a material containing these. The substrate 21 has a plurality of supply holes 21a and recovery holes 21b as through holes penetrating in the thickness direction.

The piezoelectric laminate 22 is formed on the nozzle plate 30 side surface of the substrate 21. In the present embodiment, two piezoelectric laminates 22 extending in a predetermined first direction are arranged side by side on the main surface of the substrate 21. The piezoelectric multilayer body 22 is formed by laminating two piezoelectric members. The piezoelectric member is made of, for example, a PZT (lead zirconate titanate) based piezoelectric ceramic material. In addition, as the piezoelectric member, lead-free piezoelectric ceramics such as KNN (potassium sodium niobate) may be used in consideration of the environment. The two piezoelectric members are polarized so that the polarization directions thereof are opposite to each other, and are bonded to each other via an adhesive layer.

A groove array 23A is formed on an end surface of the piezoelectric multilayer body 22 facing the nozzle plate 30, and the groove array 23A has a plurality of grooves 23 arranged in the first direction. The cross-sectional shape of the multilayer piezoelectric body 22 along the first direction and the third direction is a comb-tooth shape. Pillar-like partition portions 25 made of piezoelectric elements are formed between adjacent grooves 23. The partition wall 25 serves as a driving element for changing the volume of the groove 23.

In the groove array 23A, the plurality of first grooves 23A and the plurality of second grooves 23b are alternately arranged in the first direction. The plurality of grooves 23 are arranged side by side in the first direction, extend in the second direction, and are arranged in parallel to each other. The grooves 23a and 23b are formed over the entire length of the multilayer piezoelectric body 22 in the second direction. That is, the grooves 23a and 23b are open to the nozzle plate 30 side. Electrodes 24 are formed on the bottom and both side surfaces of the inner surfaces of the grooves 23a and 23 b.

Both ends of the first groove 23a in the second direction open in the opening portion 41a of the frame member 41, and the first groove 23a communicates with the common chamber C3. The first grooves 23a are provided at positions facing the nozzles 31, respectively, and are equal in number to the nozzles 31. The first groove 23a constitutes a pressure chamber C1 communicating with the common chamber C3 and with the nozzle 31.

Cover walls 27 made of a light-curable resin are provided at both ends of the second groove 23b in the second direction. The cover wall 27 closes both ends of the second groove 23b in the second direction. The second groove 23b is closed by the cover wall 27 covering both ends in the second direction, the nozzle plate 30 covering the third direction, and the partition wall portion 25 disposed on both sides in the first direction, and constitutes an air chamber C2 partitioned from the pressure chamber C1 and the common chamber C3.

The partition wall 25 is a wall-like member, for example, a rectangular parallelepiped shape, which is disposed between the plurality of grooves 23 and extends in the second direction. The partition 25 is formed of a piezoelectric element in which a first piezoelectric element 25a and a second piezoelectric element 25b laminated on the first piezoelectric element 25a are laminated. The nozzle plate 30-side end surface of the partition wall 25, i.e., the joint surface 25c, is joined to the nozzle plate 30 via the adhesive 50. The joint surface 25C of the partition wall 25 is bonded to the nozzle plate 30, and closes the air chamber C2 formed by the second groove 23 b.

The adhesive 50 is, for example, an epoxy adhesive effective for ink resistance. For example, in the present embodiment, an adhesive of a type that is heated to 80 ℃ during curing is used. The adhesive 50 is disposed closer to the second groove 23b disposed on the other side than the first groove 23a disposed on one side of the partition wall 25.

In the inkjet head 1, in the nozzle 31 in a number of a majority, for example, 80% or more, the position of the adhesive 50 between the opposing partition walls 25 is located closer to the second groove 23b than the center of the partition wall 25, and the end edge of the adhesive 50 on the first groove 23a side of the application region is retracted so as not to protrude from the end edge of the partition wall 25. In addition, the amount of the adhesive 50 applied is not uniform, and the amount of the adhesive applied to the second groove 23b side is large. The amount of the adhesive 50 protruding from the joining surface 25c of the partition wall 25 toward the groove side is larger on the second groove 23b side than on the first groove 23a side.

For example, in the present embodiment, in the partition wall portion 25 between the pressure chamber C1 and the air chamber C2 adjacent thereto, which face 80% or more of the nozzles 31, the center of the region where the adhesive 50 is applied is located closer to the second groove 23b than the center of the partition wall portion 25, and is in a positional relationship such that the adhesive does not protrude into the first groove 23 a.

Here, as an example of the manufacturing process of the inkjet head 1, a method of bonding the actuator base 20 and the nozzle plate 30 by deflecting the adhesive 50 toward the second groove 23b will be described. In the manufacturing process of the inkjet head 1, the joining process of joining the actuator base 20 and the nozzle plate 30 includes: a coating step of applying the adhesive 50 to the bonding surface 25c of the partition wall portion 25; a bonding step of bonding the nozzle plate 30 to the actuator base 20 after applying the adhesive 50; and a curing step of curing the adhesive 50.

In the present embodiment, as an example, as shown in fig. 4, in the coating process for applying the adhesive 50 to the bonding surface 25c, the adhesive 50 is applied to the bonding surface 25 of the partition wall portion 25 at a position on the second groove side. Specifically, for example, the center of the application region of the adhesive 50 is disposed closer to the second groove 23b than the center of the bonding surface 25 c. In the present embodiment, the coating is performed in a half area from the center toward the second groove side. As described above, the adhesive is applied by shifting the application position, and the inkjet head 1 in which the position of the adhesive 50 is shifted is formed.

The electrode 24 is a conductive film made of a conductive material such as nickel. The electrode 24 is formed at the bottom of the first groove 23a and connected to a wiring pattern on the substrate 21. The electrode 24 is formed by a method such as vacuum deposition or electroless nickel plating. The electrode 24 may be formed of, for example, gold, copper, or the like. Alternatively, two or more kinds of conductive films may be stacked.

The wiring pattern 26 (wiring electrode) is a conductive film formed of a conductive material such as nickel similar to the electrode 24 and having a predetermined pattern. The wiring pattern 26 is formed on the main surface of the substrate 21. The wiring pattern 26 is formed simultaneously when the electrodes 24 are formed by a method such as vacuum deposition or electroless nickel plating. The wiring pattern 26 is formed outside the frame member 41, and can connect the driver circuit to an external portion exposed to the frame member 41 through an FPC or the like.

A manifold forming a predetermined ink flow path is connected to a surface of the actuator base 20 opposite to the nozzle plate 30. The manifold includes a supply path, which is a flow path communicating with the common chamber C3 and communicating with the supply flow path 133a, and a recovery path communicating with the common chamber C3 and communicating with the recovery flow path 133 b. For example, a circuit board on which a driver IC is mounted is provided on an outer surface of the manifold, and the driver IC is electrically connected to the electrodes 24 via an FPC (Flexible Printed circuit) and a wiring pattern.

The nozzle plate 30 is formed in a rectangular plate shape from a resin material such as a polyimide film. The nozzle plate 30 is formed with a plurality of nozzles 31 penetrating in the thickness direction. The plurality of nozzles 31 communicate with the pressure chambers C1, respectively. In the present embodiment, the nozzles 31 are arranged in two rows, and 600 nozzles 31 are arranged in each row. The nozzle plate 30 is disposed to face the actuator base 20, and covers the groove row 23A on the substrate 21 to close the opening of the second groove 23b, and the pressure chamber C1 formed by the first groove 23A communicates with the nozzle 31.

The frame 40 is formed in a rectangular frame shape, and includes a frame member 41 having a rectangular opening 41a formed at the center. The frame member 41 has a predetermined thickness, and is disposed between the actuator base 20 and the nozzle plate 30, thereby forming a common chamber C3 communicating with the first groove 23a of the actuator base 20 disposed in the opening 41 a.

In the ink jet head 1 configured as described above, in a state where the actuator base 20, the nozzle plate 30, and the frame 40 are assembled, a plurality of pressure chambers C1 communicating with the nozzles 31, a plurality of air chambers C2 blocked by the nozzle plate 30 and the cap wall 27, and a common chamber C3 communicating with the plurality of pressure chambers C1 are formed in the opening portion 41a of the frame member 41. The pressure chambers C1 and the air chambers C2 are alternately arranged side by side in the first direction, and are partitioned by partition walls 25 made of piezoelectric elements.

Next, an inkjet printer 100 having the inkjet head 1 will be described with reference to fig. 5. Fig. 5 is an explanatory diagram showing the configuration of the inkjet printer 100. As shown in fig. 5, the inkjet printer 100 includes a housing 111, a medium supply unit 112, an image forming unit 113, a medium discharge unit 114, a conveying device 115, and a control unit 116.

The inkjet printer 100 is a liquid ejection device: a recording medium (for example, paper P) as an ejection target is conveyed along a predetermined conveyance path a1 from the medium supply unit 112 to the medium discharge unit 114 through the image forming unit 113, and a liquid such as ink is ejected to perform an image forming process on the paper P.

The medium supply unit 112 includes a plurality of paper feed cassettes 112 a. The medium discharge portion 114 includes a discharge tray 114 a. The image forming unit 113 includes a support 117 for supporting a sheet, and a plurality of head units 130 arranged above the support 117 to face each other.

The support 117 includes: the image forming apparatus includes a conveyor belt 118 formed in an endless shape in a predetermined region where an image is formed, a support plate 119 supporting the conveyor belt 118 from the back side, and a plurality of belt rollers 120 positioned on the back side of the conveyor belt 118.

The head unit 130 includes: the ink jet head includes a plurality of ink jet heads 1, a plurality of ink cartridges 132 each mounted on each ink jet head 1 as a liquid storage tank, a connection passage 133 connecting the ink jet head 1 and the ink cartridges 132, and a circulation pump 134 as a circulation unit. The head unit 130 is a circulation type head unit that circulates liquid.

In the present embodiment, the ink jet head 1 includes four color ink jet heads 1C, 1M, 1Y, and 1B of cyan, magenta, yellow, and black, and ink cartridges 132C, 132M, 132Y, and 132B as ink cartridges 132 for storing the inks of the respective colors. The ink cartridge 132 is connected to the inkjet head 1 through a connection flow path 133. The connection channel 133 includes a supply channel 133a connected to the supply port of the inkjet head 1 and a recovery channel 133b connected to the discharge port of the inkjet head 1.

A negative pressure control device such as a pump, not shown, is connected to the ink cartridge 132. Then, negative pressure control is performed in the ink cartridge 132 by a negative pressure control device in accordance with the hydraulic head pressure of the ink jet head 1 and the ink cartridge 132, so that the ink supplied to each nozzle of the ink jet head 1 forms a meniscus having a predetermined shape.

The circulation pump 134 is a liquid feeding pump formed of, for example, a piezoelectric pump. The circulation pump 134 is provided in the supply flow path 133 a. The circulation pump 134 is connected to a drive circuit of the control unit 116 through a wire. The CPU (Central Processing Unit) 116a is configured to control the circulation pump 134. The circulation pump 134 circulates the liquid through a circulation flow path including the inkjet head 1 and the ink cartridge 132.

The conveying device 115 conveys the sheet P along a conveying path a1 from the sheet feeding cassette 112a of the medium feeding unit 112, through the image forming unit 113, and to the discharge tray 114a of the medium discharging unit 114. The conveying device 115 includes a plurality of guide plate pairs 121a to 121h and a plurality of conveying rollers 122a to 122h arranged along a conveying path a 1.

The control unit 116 includes: the CPU116a as a controller, a ROM (Read only memory) storing various programs and the like, a RAM (Random access memory) temporarily storing various variable data, image data and the like, and an interface unit for inputting and outputting data from and to the outside.

In the inkjet head 1 and the inkjet printer 100, when driving is performed to eject liquid from the nozzles 31, the control section 116 applies a driving voltage via the wiring pattern 26 by a driving circuit. When a potential difference is applied between the electrode in the pressure chamber C1 driven by the application of a voltage and the electrodes in the air chambers C2 adjacent to the left and right sides of the pressure chamber C1, the first piezoelectric element 25a and the second piezoelectric element 25b deform in opposite directions to each other, and the drive element is bent by the deformation of the two piezoelectric elements. For example, first, the piezoelectric element is deformed in a direction in which the driven pressure chamber C1 opens to make the pressure chamber C1 negative, and ink is introduced into the pressure chamber C1. Then, the piezoelectric element is deformed in a direction in which the pressure chamber C1 closes, and the pressure inside the pressure chamber C1 is increased, whereby ink droplets are ejected from the nozzle 31.

The operation of the ink jet head 1 and the ink jet printer 100 configured as described above will be described. The control unit 116 detects a print instruction based on, for example, an operation input by a user or an external command. Then, if a print instruction is detected, the control section 116 drives the transport device 115 to transport the paper P, and outputs a print signal to the head unit 130 at a predetermined timing to drive the inkjet head 1. In the ejection operation, the inkjet head 1 selectively drives the piezoelectric elements by an image signal according to image data to eject ink from the nozzles 31, thereby forming an image on the paper P held on the conveyor belt 118.

As the liquid ejecting operation, the CPU116a applies a driving voltage to the electrodes 24 on the piezoelectric multilayer body 22 via the wiring pattern 26 by a driving circuit, thereby deforming the piezoelectric multilayer body 22. For example, the piezoelectric laminate 22 is deformed in a direction in which the volume of the driven pressure chamber C1 increases, and the pressure chamber C1 is brought into a negative pressure, whereby ink is introduced into the pressure chamber C1. On the other hand, the piezoelectric laminate 22 is deformed in a direction in which the volume of the pressure chamber C1 decreases, and the pressure inside the pressure chamber C1 is increased, whereby ink droplets are ejected from the nozzle 31. The liquid droplet Id is discharged from the pair of nozzles 31 disposed to face the pressure chamber C1 by the change in the volume of the pressure chamber C1. Then, the liquid droplets Id are ejected to the paper P disposed opposite to each other.

According to the ink jet head 1 and the ink jet printer 100 according to the present embodiment, an ink jet head, an ink jet device, and a method of manufacturing an ink jet head, which can ensure ejection performance and pressure resistance, can be provided. That is, by deflecting the adhesive 50 toward the dummy air chamber C2 not communicating with the nozzle 31, a desired amount of the adhesive 50 can be applied, pressure resistance can be ensured by ensuring high adhesive strength, and the adhesive 50 can be prevented from entering the pressure chamber C1 side, thereby avoiding an influence on the liquid ejection performance. In addition, since the above can be achieved only by changing the coating position, it is possible to utilize the existing manufacturing apparatus and manufacturing process.

The present invention is not limited to the above-described embodiments, and can be embodied by modifying the components in the implementation stage without departing from the scope of the invention.

In the first embodiment, the example in which the application area is adjusted in the application process in which the adhesive 50 is applied to the bonding surface 25c is shown as an example, but the present invention is not limited to this. For example, as another embodiment, as shown in fig. 6, the position of the adhesive may be controlled by providing a pressure difference between the first groove 23a and the second groove 23b in the curing step after the bonding process. Specifically, in the manufacturing process of the inkjet head 1, the joining process of joining the actuator base 20 and the nozzle plate 30 includes: a coating step of applying an adhesive to the bonding surface 25c of the partition wall portion 25; a bonding step of bonding the nozzle plate 30 to the actuator base 20 after applying an adhesive; and a curing step of curing the adhesive.

In the present embodiment, as the adhesive 50, an epoxy adhesive effective for ink resistance is used, and the adhesive is heated to 80 ℃ during curing. In the present embodiment, the adhesive 50 is applied to the bonding surface 25c, and after the nozzle plate 30 is bonded to and assembled with the partition wall portion 25, the assembled member is placed in a pressure heating chamber when heated and cured. That is, by exposing the entire assembly member to a high-pressure environment, the pressure in the blocked air chamber C2 is made lower than the pressure in the pressure chamber C1 communicating with the outside. Therefore, until the adhesive 50 is completely cured, the adhesive 50 flows toward the air chamber C2 with a low pressure, and the position of the adhesive 50 is displaced. For example, even when the coating is performed on the center of the bonding surface 25c of the partition wall 25 in the coating process, the adhesive can be displaced by the pressure difference. In this embodiment, as in the first embodiment, the adhesive can be prevented from entering the pressure chamber C1 side which is the first groove 23a, and pressure resistance and discharge performance can be ensured. Further, a pressure difference can be generated between the pressure chamber C1 and the air chamber C2 only by placing the assembly member in the pressurizing chamber, and the area of the adhesive can be easily controlled.

In the above embodiment, the actuator base 20 provided with the piezoelectric multilayer body 22 made of a piezoelectric member on the substrate 21 is illustrated by way of example, but the present invention is not limited to this. For example, the actuator base 20 may be formed by only a piezoelectric member without using the substrate 21. In addition, instead of using two piezoelectric members, one piezoelectric member may be used.

The liquid to be discharged is not limited to ink, and a liquid other than ink may be discharged. As the liquid ejecting apparatus that ejects a liquid other than ink, for example, an apparatus that ejects a liquid containing conductive particles for forming a wiring pattern of a printed wiring board or the like may be used.

In addition to the above, the inkjet head 1 may be configured to eject ink droplets by deforming a vibrating plate, or may be configured to eject ink droplets from nozzles by using thermal energy of a heater or the like, for example.

The ink jet head 1 is configured to be disposed in every other pressure chamber C1 as an example, but is not limited thereto. For example, two or more dummy air chambers C2 may be disposed between the pair of pressure chambers C1, C1, and in this case, the adhesive strength and pressure resistance can be ensured and the liquid ejection performance of the nozzle can be maintained by positioning the adhesive 50 of the partition wall portion 25 between the pressure chamber C1 and the air chamber C2 closer to the air chamber C2 side.

In the above-described embodiments, the liquid discharge apparatus is used in the inkjet recording apparatus, but the present invention is not limited to this. For example, the present invention can be used in 3D printers, industrial manufacturing machines, and medical applications, and can achieve reduction in size, weight, and cost.

According to at least one embodiment described above, an inkjet head, an inkjet device, and a method of manufacturing an inkjet head, which can ensure ejection performance and pressure resistance, can be provided.

While several embodiments have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the invention. These new embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. These embodiments and modifications are included in the scope and spirit of the invention, and are also included in the invention described in the claims and the equivalent scope thereof.