阅读说明：本技术 一种Φ300mm以上大直径石英玻璃管的高温脱羟炉及工艺 (High-temperature dehydroxylation furnace and process for quartz glass tube with diameter of more than 300mm ) 是由 段玉伟 段其九 刘建军 段玉门 于 2020-03-31 设计创作，主要内容包括：本发明公开了一种Φ300mm以上大直径石英玻璃管的高温脱羟炉,其包括炉体,所述炉体的长度设置为12米以上,高度为2米以上；所述炉体内部预留空间高度为1.6米以上,所述炉体内设置有若干钨网,所述钨网通过设置在所述炉体顶部的电源入孔与电源连接；所述钨网中间设置有导轨及可连续循环运转并有变频控制的输送带。本发明通过设计可连续性生产的高温脱羟炉,能够实现Φ800mm以内、任意长度的大直径石英管脱羟,并通过360°对石英管高温脱羟,达到或优于真空炉脱羟炉工艺,石英管高温脱羟指标OH-含量≤10ppm。(The invention discloses a high-temperature dehydroxylation furnace of a quartz glass tube with a major diameter of phi more than 300mm, which comprises a furnace body, wherein the length of the furnace body is more than 12 meters, and the height of the furnace body is more than 2 meters; the height of a reserved space in the furnace body is more than 1.6 m, a plurality of tungsten nets are arranged in the furnace body, and the tungsten nets are connected with a power supply through power supply inlet holes formed in the top of the furnace body; the middle of the tungsten net is provided with a guide rail and a conveying belt which can continuously and circularly operate and is controlled by frequency conversion. The invention can realize the dehydroxylation of the large-diameter quartz tube with any length within phi 800mm by designing the high-temperature dehydroxylation furnace capable of continuous production, and achieves or is superior to the dehydroxylation furnace process of the vacuum furnace by carrying out the high-temperature dehydroxylation on the quartz tube at 360 degrees, wherein the content of OH < - > index of the quartz tube at high temperature is less than or equal to 10 ppm.)

1. The high-temperature dehydroxylation furnace of the quartz glass tube with the diameter of more than 300mm is characterized by comprising a furnace body, wherein the length of the furnace body is more than 12 meters, and the height of the furnace body is more than 2 meters; the height of a reserved space in the furnace body is more than 1.6 m, a plurality of tungsten nets are arranged in the furnace body, and the tungsten nets are connected with a power supply through power supply inlet holes formed in the top of the furnace body; the middle of the tungsten net is provided with a guide rail and a conveying belt which can continuously and circularly operate and is controlled by frequency conversion.

2. The high-temperature dehydroxylation furnace of the quartz glass tube with the large diameter of more than 300mm phi according to claim 1, wherein an insulating layer is arranged in the furnace body.

3. The high-temperature dehydroxylation furnace for large-diameter quartz glass tubes with a diameter of phi 300mm or more as claimed in claim 2, wherein the thickness of the insulating layer is 0.4 m.

4. The high-temperature dehydroxylation furnace of quartz glass tube with large diameter of phi 300mm or more as claimed in claim 1, wherein the heat-insulating layer is built by common refractory brick and high-temperature-resistant zircon-jade brick.

5. The high-temperature dehydroxylation furnace for quartz glass tubes with a large diameter of phi 300mm or more as claimed in claim 1, wherein 6 power supply inlets are provided.

6. The high-temperature dehydroxylation furnace of quartz glass tube with large diameter of phi 300mm or more as claimed in claim 1, wherein the tungsten mesh has a diameter of 800mm and a length of 2 m.

7. A dehydroxylation preparation process of a large-diameter quartz glass tube with the diameter of more than 300mm is characterized by comprising the following steps:

s1, designing a high-temperature dehydroxylation furnace capable of realizing continuous production;

s2, designing the dehydroxylation furnace to have a length of more than 12 meters and a height of more than 2 meters, and adopting a brick-laying structure of insulating bricks;

s3, setting the height of the reserved space in the dehydroxylation furnace to be more than 1.6 meters;

s4, designing a heat preservation layer in the furnace body to be 0.4-0.6 m thick, and building the heat preservation layer by using common refractory bricks and high-temperature-resistant zircon jade bricks;

s5, designing a plurality of power supply inlet holes at the top outside the furnace body, wherein the distance between the power supply inlet holes and the top outside the furnace body is 2 m;

s6, 6 groups of tungsten nets with the diameter of 800mm and the length of 2 meters are designed, the total length is 12 meters, and each group and a top power supply inlet hole are connected with a power supply;

s7, designing a guide rail with the length of 15 meters and a conveying belt capable of continuously circulating and having frequency conversion control in the middle of the tungsten mesh;

s8, starting a power supply, keeping the temperature to 1100 ℃ gradually and continuously rising at 50 ℃ per hour, and putting the large-diameter quartz glass tube with the diameter of more than 300mm into a conveying belt which continuously and circularly operates and is controlled by frequency conversion; setting the circulating running speed of the conveying belt controlled by frequency conversion to be the lowest; when the quartz tube enters the dehydroxylation furnace through the conveyer belt, continuous high-temperature dehydroxylation can be realized.

Technical Field

The invention relates to a dehydroxylation furnace and a process for a quartz glass tube with a diameter of over 300 mm.

Background

The large-diameter quartz glass tube with the diameter of more than 300mm is generally 2000mm-3000mm in length and more than 100mm in wall thickness, a vacuum furnace high-temperature dehydroxylation method is adopted in the prior art, and for the large-diameter quartz glass tube, the quartz glass tube with the diameter of 300mm and the length of 2000mm-3000mm needs to be cut and put in due to the limitation that the space of the vacuum dehydroxylation furnace is less than 1800 mm. The method for removing hydroxyl comprises the following steps:

1. a vacuum dehydroxylation furnace: turning on a power supply and vacuumizing;

2. heating for dehydroxylation: continuously heating for 48-72 hours until the vacuum degree reaches 10^-3When the temperature in the vacuum furnace reaches 1120 ℃ under the condition of kPa, keeping the temperature for 4-6 hours; then, the temperature is reduced to normal temperature for 8 hours;

3. discharging the quartz tube, and detecting that the OH < - > content of the quartz tube is less than or equal to 20 ppm.

The above method has the following disadvantages and drawbacks:

1. the space design in the vacuum dehydroxylation furnace is that the length is 1800mm and the height is 1500mm, and 3-4 layers of furnace throwing is needed to cut and stack quartz tubes with the diameter of 300mm and the length of 2000mm-3000 mm;

2. heating a vacuum dehydroxylation furnace to dehydroxylate for 48-72 hours, wherein the OH-content of the quartz tube is difficult to completely discharge in a 48-72 hour heating interval because the wall thickness of the quartz tube with the diameter of 300mm is more than 100mm and the height is stacked between 3-4 layers;

3. the dehydroxylation treatment of the quartz tube by using the vacuum dehydroxylation furnace only can be carried out by a single furnace, continuous production cannot be realized, the yield is low, the cost is high, the time is long, and the requirement of continuous production cannot be met; meanwhile, 3-4 layers of quartz tubes with the diameter of 300mm and the length of 2000mm-3000mm need to be cut and stacked;

4. the OH < - > content of the hydroxyl of the vacuum dehydroxylation quartz tube is less than or equal to 20ppm, and the technical index requirement of less than or equal to 10ppm or higher cannot be met.

Disclosure of Invention

The invention aims to overcome the defects of low yield, high cost and long time of a vacuum dehydroxylation furnace in the prior art and provide a high-temperature dehydroxylation furnace and a process of a quartz glass tube with a diameter of over 300 mm.

In order to solve the technical problems, the invention provides the following technical scheme: a high-temperature dehydroxylation furnace of a quartz glass tube with a large diameter of more than 300mm comprises a furnace body, wherein the length of the furnace body is more than 12 meters, and the height of the furnace body is more than 2 meters; the height of a reserved space in the furnace body is more than 1.6 m, a plurality of tungsten nets are arranged in the furnace body, and the tungsten nets are connected with a power supply through power supply inlet holes formed in the top of the furnace body; the middle of the tungsten net is provided with a guide rail and a conveying belt which can continuously and circularly operate and is controlled by frequency conversion.

Preferably, a heat insulation layer is arranged in the furnace body.

Preferably, the thickness of the heat preservation layer is 0.4 m.

Preferably, the heat-insulating layer is built by common refractory bricks and high-temperature-resistant zircon jade bricks.

Preferably, the power supply inlet hole is provided with 6 power supply inlet holes.

Preferably, the tungsten mesh has a diameter of 800mm and a length of 2 m.

A dehydroxylation preparation process of a large-diameter quartz glass tube with the diameter of more than 300mm comprises the following steps:

s1, designing a high-temperature dehydroxylation furnace capable of realizing continuous production;

s2, designing the dehydroxylation furnace to have a length of more than 12 meters and a height of more than 2 meters, and adopting a brick-laying structure of insulating bricks;

s3, setting the height of the reserved space in the dehydroxylation furnace to be more than 1.6 meters;

s4, designing a heat preservation layer in the furnace body to be 0.4-0.6 m thick, and building the heat preservation layer by using common refractory bricks and high-temperature-resistant zircon jade bricks;

s5, designing a plurality of power supply inlet holes at the top outside the furnace body, wherein the distance between the power supply inlet holes and the top outside the furnace body is 2 m;

s6, 6 groups of tungsten nets with the diameter of 800mm and the length of 2 meters are designed, the total length is 12 meters, and each group and a top power supply inlet hole are connected with a power supply;

s7, designing a guide rail with the length of 15 meters and a conveying belt capable of continuously circulating and having frequency conversion control in the middle of the tungsten mesh;

s8, starting a power supply, keeping the temperature to 1100 ℃ gradually and continuously rising at 50 ℃ per hour, and putting the large-diameter quartz glass tube with the diameter of more than 300mm into a conveying belt which continuously and circularly operates and is controlled by frequency conversion; setting the circulating running speed of the conveying belt controlled by frequency conversion to be the lowest; when the quartz tube enters the dehydroxylation furnace through the conveyer belt, continuous high-temperature dehydroxylation can be realized.

The invention has the following beneficial effects:

the invention can realize the dehydroxylation of the large-diameter quartz tube with any length within phi 800mm by designing the high-temperature dehydroxylation furnace capable of continuous production, and achieves or is superior to the dehydroxylation furnace process of the vacuum furnace by carrying out the high-temperature dehydroxylation on the quartz tube at 360 degrees, wherein the content of OH < - > index of the quartz tube at high temperature is less than or equal to 10 ppm.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural view of the present invention.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.