阅读说明：本技术 一种基于手性微纳结构的气压传感器 (Atmospheric pressure sensor based on chirality is received a little and is constructed ) 是由 不公告发明人 于 2020-05-06 设计创作，主要内容包括：本发明涉及一种基于手性微纳结构的气压传感器,包括壳体,壳体内的中部设置有衬底,衬底的上方设置有第二金属层,第二金属层的上方设置有弹性层,弹性层的上方设置有第一金属层,金属层1的上方形成惰性气体腔,壳体的上表面内部设置有感压膜和线性激光器,衬底的下方形成真空腔,壳体的下表面内部设置有CCD；该基于手性微纳结构的气压传感器,能够将压力信号转换为两层金属微纳结构间距的变化,从而导致圆偏光入射时,其产生的圆二色性信号会发生变化,通过使用CCD接收此信号并进行分析,可以实现检测到外界气压的目的；该基于双层手性微纳结构的压力传感器具有结构简单、灵敏度高、精确度高的优点。(The invention relates to an air pressure sensor based on a chiral micro-nano structure, which comprises a shell, wherein a substrate is arranged in the middle of the shell, a second metal layer is arranged above the substrate, an elastic layer is arranged above the second metal layer, a first metal layer is arranged above the elastic layer, an inert gas cavity is formed above the metal layer 1, a pressure sensing film and a linear laser are arranged inside the upper surface of the shell, a vacuum cavity is formed below the substrate, and a CCD (charge coupled device) is arranged inside the lower surface of the shell; the pressure sensor based on the chiral micro-nano structure can convert a pressure signal into the change of the distance between two layers of metal micro-nano structures, so that a circular dichroism signal generated by circular polarized light can change when the circular polarized light is incident, and the aim of detecting the external air pressure can be fulfilled by receiving and analyzing the signal by using the CCD; the pressure sensor based on the double-layer chiral micro-nano structure has the advantages of simple structure, high sensitivity and high accuracy.)

1. A baroceptor based on chiral micro-nano structure is characterized in that: including casing (5), middle part in casing (5) is provided with substrate (8), the top of substrate (8) is provided with second metal level (2), the top of second metal level (2) is provided with elastic layer (7), the top of elastic layer (7) is provided with first metal level (1), inert gas chamber (6) is formed to the top of metal level 1, the upper surface inside of casing (5) is provided with pressure sensing membrane (3) and linear laser instrument (4), the below of substrate (8) forms vacuum chamber (10), the inside CCD (9) that is provided with of lower surface of casing (5).

2. The chiral micro-nano structure-based air pressure sensor according to claim 1, wherein: the first metal layer (1) is composed of a plurality of first metal micro-nano structure units (11) which are arranged periodically.

3. The chiral micro-nano structure based air pressure sensor according to claim 2, wherein: the first metal micro-nano structure unit (11) comprises a first metal rod (1-1), a second metal rod (1-2) and a third metal rod (1-3), one end of the first metal rod (1-1) is vertically connected with one end of the second metal rod (1-2), the other end of the second metal rod (1-2) is vertically connected with one end of the third metal rod (1-3), and the first metal rod (1-1) and the third metal rod (1-3) are located on the same side of the second metal rod (1-2).

4. The chiral micro-nano structure-based air pressure sensor according to claim 1, wherein: the second metal layer (2) is composed of a plurality of second metal micro-nano structure units (12) which are arranged periodically.

5. The chiral micro-nano structure based air pressure sensor according to claim 4, wherein: the second metal micro-nano structure unit (12) comprises a fourth metal rod (2-1), a fifth metal rod (2-2) and a sixth metal rod (2-3), one end of the fourth metal rod (2-1) is perpendicularly connected with one end of the fifth metal rod (2-2), the other end of the fifth metal rod (2-2) is perpendicularly connected with one end of the sixth metal rod (2-3), and the fourth metal rod (2-1) and the sixth metal rod (2-3) are located on the same side of the fifth metal rod (2-2).

6. The chiral micro-nano structure-based air pressure sensor according to claim 1, wherein: the thickness of the elastic layer (7) is 30 nm-40 nm.

7. The chiral micro-nano structure-based air pressure sensor according to claim 1, wherein: the elastic layer (7) is made of elastic plastic.

8. The chiral micro-nano structure-based air pressure sensor according to claim 1, wherein: the first metal layer (1) and the second metal layer (1) are both made of gold or silver.

Technical Field

The invention relates to the field of micro-nano optics and the field of air pressure detection, in particular to an air pressure sensor based on a chiral micro-nano structure.

Background

The chiral structure refers to the difference between the absorption degrees of left-handed circularly polarized Light (LCP) and right-handed circularly polarized light (RCP), and the relationship between the absorption degree and the wavelength is called Circular dichroism spectrum, which is a spectrum method for measuring the molecular asymmetric structure. It has been found that naturally occurring circular dichroism in chiral structures is relatively weak and metals have relatively strong interactions with light, so that experimenters have designed some metal nanostructures to obtain large circular dichroism.

The air pressure sensor has wide application, can be used for assisting navigation and reduces errors when the navigation is carried out on the viaduct; when no signal zone exists, the accurate positioning can be realized by matching with equipment such as an accelerometer, a gyroscope and the like according to the air pressure sensor, so that the air pressure sensor has wide application. The existing air pressure sensor structure is mostly composed of a plastic frame and an air pressure sensor chip, the material of the air pressure sensor chip material is different from that of the plastic frame, so that the air pressure sensor chip is easy to expand with heat and contract with cold at different temperatures, larger errors can be generated on the air pressure sensor chip, the detection precision of the air pressure sensor is greatly influenced, and the air pressure sensor of the type is easy to be applied and limited by the environment.

Disclosure of Invention

In view of the above problems, the present invention aims to provide an air pressure sensor based on a chiral micro-nano structure, which includes a housing, wherein a substrate is arranged in the middle of the housing, a second metal layer is arranged above the substrate, an elastic layer is arranged above the second metal layer, a first metal layer is arranged above the elastic layer, an inert gas cavity is formed above the metal layer 1, a pressure sensing film and a linear laser are arranged inside the upper surface of the housing, a vacuum cavity is formed below the substrate, and a CCD is arranged inside the lower surface of the housing.

The first metal layer is composed of a plurality of first metal micro-nano structure units which are arranged periodically.

The first metal micro-nano structure unit comprises a first metal rod, a second metal rod and a third metal rod, one end of the first metal rod is vertically connected with one end of the second metal rod, the other end of the second metal rod is vertically connected with one end of the third metal rod, and the first metal rod and the third metal rod are located on the same side of the second metal rod.

The second metal layer is composed of a plurality of second metal micro-nano structure units which are arranged periodically.

The second metal micro-nano structure unit comprises a fourth metal rod, a fifth metal rod and a sixth metal rod, one end of the fourth metal rod is perpendicularly connected with one end of the fifth metal rod, the other end of the fifth metal rod is perpendicularly connected with one end of the sixth metal rod, and the fourth metal rod and the sixth metal rod are located on the same side of the fifth metal rod.

The thickness of the elastic layer is 30 nm-40 nm.

The elastic layer is made of elastic plastic.

The first metal layer and the second metal layer are both made of gold or silver.

The invention has the beneficial effects that: the air pressure sensor based on the chiral micro-nano structure can convert a pressure signal into the change of the distance between two layers of metal micro-nano structures, so that a circular dichroism signal generated by circular polarized light can change when the circular polarized light is incident, and the purpose of detecting the external air pressure can be realized by receiving and analyzing the signal by using the CCD; the pressure sensor based on the double-layer chiral micro-nano structure has the advantages of simple structure, high sensitivity and high accuracy.

The pressure sensor based on the double-layer chiral micro-nano structure provided by the invention has a simple double-layer metal micro-nano structure, can generate a larger circular dichroism signal which can reach 20% to the maximum, and can effectively improve the measurement precision.

According to the pressure sensor based on the double-layer chiral micro-nano structure, the change of the distance between the double-layer metal micro-nano structure can be converted into obvious circular dichroism signal change at a nano level, and the pressure sensor has high sensitivity.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

FIG. 1 is a structural diagram of a pressure sensor based on a chiral micro-nano structure in the embodiment.

Fig. 2 is a schematic diagram of a two-layer metal micro-nano structure array in the embodiment.

Fig. 3 is a schematic diagram of a two-layer metal micro-nano structure in this embodiment.

Fig. 4 is a schematic diagram of a first metal micro-nano structure in this embodiment.

Fig. 5 is a schematic diagram of a second metal micro-nano structure in this embodiment.

Fig. 6 is an absorption spectrum of the two-layer metal micro-nano structure of the embodiment.

Fig. 7 is a circular dichroism spectrum of the two-layer metal micro-nano structure of the embodiment.

In the figure: 1. a first metal layer; 1-1, a first metal rod; 1-2, a second metal rod; 1-3, a third metal rod; 2. a second metal layer; 2-1, a fourth metal rod; 2-2, a fifth metal rod; 2-3, a sixth metal rod; 3. a pressure-sensitive film; 4. a linear laser; 5. a housing; 6. an inert gas chamber; 7. an elastic layer; 8. a substrate; 9. a CCD; 10. a vacuum chamber; 11. a first metal micro-nano structure unit; 12. and a second metal micro-nano structure unit.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.