阅读说明：本技术 一种用于真空环境下的外部加热装置及超高真空设备 (External heating device used in vacuum environment and ultrahigh vacuum equipment ) 是由 王璇 邱恒山 陆彬 于 2020-05-21 设计创作，主要内容包括：本发明涉及一种用于真空环境下的外部加热装置及超高真空设备,超高真空设备包括真空腔体和外部加热装置,外部加热装置包括加热单元,加热单元包括用于与真空腔体连通的供靶材放置的壳体管,壳体管的一端为盲端,壳体管的外壁上设置有加热结构。靶材放置于壳体管中,通过加热结构对壳体管中的靶材进行加热,在真空腔体外部对目标靶材加热,无需引入真空密封电极,大大简化了超高真空设备的结构,降低了成本,同时也简化了操作,使用方便。(The invention relates to an external heating device and ultrahigh vacuum equipment used in a vacuum environment, wherein the ultrahigh vacuum equipment comprises a vacuum cavity and the external heating device, the external heating device comprises a heating unit, the heating unit comprises a shell pipe which is used for being communicated with the vacuum cavity and used for placing a target material, one end of the shell pipe is a blind end, and a heating structure is arranged on the outer wall of the shell pipe. The target material is placed in the shell tube, the target material in the shell tube is heated through the heating structure, the target material is heated outside the vacuum cavity, a vacuum sealing electrode is not required to be introduced, the structure of the ultrahigh vacuum equipment is greatly simplified, the cost is reduced, meanwhile, the operation is simplified, and the use is convenient.)

1. An external heating device for use in a vacuum environment, comprising: the heating unit comprises a shell pipe which is used for being communicated with a vacuum cavity of the ultrahigh vacuum equipment and used for placing a target material, one end of the shell pipe is a blind end, and a heating structure is arranged on the outer wall of the shell pipe.

2. The external heating device for use under vacuum environment according to claim 1, wherein: the inner side of the shell body is sequentially provided with first quartz wool and second quartz wool at intervals along the axial direction, and the target is located between the first quartz wool and the second quartz wool when the shell body is used.

3. The external heating device for use under vacuum environment according to claim 1, wherein: the heating structure comprises a heating wire wound on the outer wall of the shell pipe and wound into a spiral pipe structure.

4. The external heating device for use under vacuum environment according to claim 1, wherein: the outer wall of the shell pipe is provided with a protective cover, and the heating wire is wound on the outer wall of the protective cover.

5. The external heating device for use in a vacuum environment according to claim 4, wherein: the heating wire is wrapped with an insulating material.

6. The external heating device for use under vacuum environment according to claim 5, wherein: the heating unit further comprises a shielding cover arranged on the outer side of the protective cover and used for isolating the heating wire from the external environment.

7. The external heating device for use in a vacuum environment according to claim 6, wherein: the protective cover and the shielding cover are both of metal sleeve structures with one ends being blind ends.

8. The external heating device for use in a vacuum environment according to claim 6, wherein: the heating unit further comprises a thermocouple, and the acquisition end of the thermocouple is located between the shielding case and the heating wire.

9. External heating device for use in a vacuum environment according to any of claims 1-8, characterized in that: the heating unit is connected with the vacuum cavity of the ultrahigh vacuum equipment through the vacuum cavity connecting unit, the vacuum cavity connecting unit comprises a communicating pipe, one end of the communicating pipe is provided with a first adapter flange which is used for being connected with a first flange of the vacuum cavity just opposite to a sample on the vacuum cavity, the other end of the communicating pipe is provided with a second adapter flange, the end part of the shell pipe is provided with a third adapter flange which is used for being connected with the second adapter flange, a micro-leakage valve is arranged on the communicating pipe, a vacuum pump station is connected on the communicating pipe, an adjusting valve is arranged between the communicating pipe and the vacuum pump station, and a vacuum gauge is further arranged.

10. An ultrahigh vacuum equipment, includes the vacuum cavity, its characterized in that: further comprising an external heating device according to any one of claims 1-9.

Technical Field

The invention relates to the field of ultrahigh vacuum equipment, in particular to an external heating device used in a vacuum environment and ultrahigh vacuum equipment.

Background

The catalytic reactions involved in industry are mostly heterogeneous catalysis. Surface spectroscopy has proven to be one of the most effective means for studying heterogeneous catalytic reactions, especially solid-gas reactions. Surface spectroscopy methods, which are mostly based on electrons as probes, are limited by the mean free path of the electrons and are usually performed under ultra-high vacuum (UHV) conditions. Most reactants in the heterogeneous catalytic reaction are gaseous and can be directly introduced into the ultrahigh vacuum cavity, so that the reactants are adsorbed on the surface of the solid catalyst for subsequent experiments. However, some reactants exist in a solid state at normal temperature, and a high-temperature evaporation source is needed to convert the solid reactants into a gas state for subsequent experiments.

The mode that current high temperature evaporation source adopted the heating generally, makes solid-state molecule become the gaseous state, and chinese utility model patent like the grant publication number is CN 204825031U discloses a high temperature evaporation source, including the resistance wire of winding on ceramic seat and the crucible of placing the sample, utilizes the sample heating of resistance wire radiant heating's mode in to the crucible to make solid-state sample be heated and become the gaseous state. In addition, a water cooling circulation unit is further included, so that excessive heat can be neutralized. However, when the high-temperature evaporation source is used for heating to generate gaseous molecules, the ultrahigh vacuum system needs to be closed to replace the solid molecules in the crucible. For low-melting-point solid molecules, i.e. low-melting-point targets, such as dotriacontane, paraformaldehyde and the like, the operation steps are too complicated. In addition, a vacuum sealing electrode needs to be introduced into the high-temperature evaporation source to realize conductive connection with the outside of the vacuum cavity, so that the problems of high production cost and complex structure are caused.

Disclosure of Invention

The invention aims to provide an external heating device used in a vacuum environment, which solves the problems of complex structure, complex operation and high cost caused by the need of a special high-temperature evaporation source when a low-melting-point target material is heated and the need of introducing a vacuum sealing electrode in the high-temperature evaporation source in the prior art; meanwhile, the invention also aims to provide the ultrahigh vacuum equipment using the external heating device.

In order to achieve the above purpose, the external heating device used in a vacuum environment of the present invention adopts the following technical scheme: the utility model provides an outside heating device for under vacuum environment, includes the heating unit, the heating unit including be used for with the casing pipe that supplies the target to place of the vacuum cavity intercommunication of ultra-high vacuum equipment, the one end of casing pipe is the cecum, is provided with heating structure on the outer wall of casing pipe.

The inner side of the shell body is sequentially provided with first quartz wool and second quartz wool at intervals along the axial direction, and the target is located between the first quartz wool and the second quartz wool when the shell body is used.

The heating structure comprises a heating wire wound on the outer wall of the shell pipe and wound into a spiral pipe structure.

The outer wall of the shell pipe is provided with a protective cover, and the heating wire is wound on the outer wall of the protective cover.

The heating wire is wrapped with an insulating material.

The heating unit further comprises a shielding cover arranged on the outer side of the protective cover and used for isolating the heating wire from the external environment.

The protective cover and the shielding cover are both of metal sleeve structures with one ends being blind ends.

The heating unit further comprises a thermocouple, and the acquisition end of the thermocouple is located between the shielding case and the heating wire.

The heating unit is connected with the vacuum cavity of the ultrahigh vacuum equipment through the vacuum cavity connecting unit, the vacuum cavity connecting unit comprises a communicating pipe, one end of the communicating pipe is provided with a first adapter flange which is used for being connected with a first flange of the vacuum cavity just opposite to a sample on the vacuum cavity, the other end of the communicating pipe is provided with a second adapter flange, the end part of the shell pipe is provided with a third adapter flange which is used for being connected with the second adapter flange, a micro-leakage valve is arranged on the communicating pipe, a vacuum pump station is connected on the communicating pipe, an adjusting valve is arranged between the communicating pipe and the vacuum pump station, and a vacuum gauge is further arranged.

The invention discloses an ultra-vacuum device, which adopts the following technical scheme: the utility model provides an ultrahigh vacuum equipment, includes vacuum cavity and external heating device, and external heating device includes heating element, and heating element is including being used for the casing pipe of placing with the confession target that the vacuum cavity of ultrahigh vacuum equipment communicates, and the one end of casing pipe is the cecum, is provided with heating structure on the outer wall of casing pipe.

The inner side of the shell body is sequentially provided with first quartz wool and second quartz wool at intervals along the axial direction, and the target is located between the first quartz wool and the second quartz wool when the shell body is used.

The heating structure comprises a heating wire wound on the outer wall of the shell pipe and wound into a spiral pipe structure.

The outer wall of the shell pipe is provided with a protective cover, and the heating wire is wound on the outer wall of the protective cover.

The heating wire is wrapped with an insulating material.

The heating unit further comprises a shielding cover arranged on the outer side of the protective cover and used for isolating the heating wire from the external environment.

The protective cover and the shielding cover are both of metal sleeve structures with one ends being blind ends.

The heating unit further comprises a thermocouple, and the acquisition end of the thermocouple is located between the shielding case and the heating wire.

The heating unit is connected with the vacuum cavity of the ultrahigh vacuum equipment through the vacuum cavity connecting unit, the vacuum cavity connecting unit comprises a communicating pipe, one end of the communicating pipe is provided with a first adapter flange which is used for being connected with a first flange of the vacuum cavity just opposite to a sample on the vacuum cavity, the other end of the communicating pipe is provided with a second adapter flange, the end part of the shell pipe is provided with a third adapter flange which is used for being connected with the second adapter flange, a micro-leakage valve is arranged on the communicating pipe, a vacuum pump station is connected on the communicating pipe, an adjusting valve is arranged between the communicating pipe and the vacuum pump station, and a vacuum gauge is further arranged.

The invention has the beneficial effects that: the target material is placed in the shell tube, the target material in the shell tube is heated through the heating structure, the target material is heated outside the vacuum cavity, a vacuum sealing electrode is not required to be introduced, the structure of the ultrahigh vacuum equipment is greatly simplified, the cost is reduced, meanwhile, the operation is simplified, and the use is convenient.

Drawings

FIG. 1 is a schematic structural diagram of a first embodiment of an ultra-high vacuum apparatus according to the present invention;

FIG. 2 is a schematic view of the heating unit of FIG. 1;

FIG. 3 is a schematic view of the mounting arrangement between the components of FIG. 2;

FIG. 4 is a schematic structural diagram of a protective cover in a second embodiment of the ultra-high vacuum apparatus according to the present invention;

fig. 5 is a schematic structural diagram of a shield case in a third embodiment of the ultrahigh vacuum apparatus of the present invention.

Detailed Description

The first embodiment of the ultrahigh vacuum equipment of the invention, as shown in fig. 1-3, comprises a vacuum cavity 1, an external heating device is arranged outside the vacuum cavity 1, the external heating device comprises a heating unit and a vacuum cavity connecting unit, and the heating unit is connected with the vacuum cavity of the ultrahigh vacuum equipment through the vacuum cavity connecting unit. The sample 2 is arranged in the vacuum cavity 1, and the vacuum cavity 1 is provided with a vacuum cavity first flange 13 just opposite to the sample 2 and used for connecting and installing the vacuum cavity connecting unit. The vacuum cavity 1 is also provided with a second vacuum cavity flange 3 for connecting and installing a vacuum gauge pipe so as to detect the vacuum degree in the vacuum cavity.

The heating unit comprises a shell tube 4 for placing the target 26, the shell tube 4 is a quartz tube, one end of the shell tube 4 is a blind end, and a heating structure is arranged on the outer wall of the shell tube 4. The heating structure includes a heating wire 5 wound around the outer wall of the casing pipe and wound into a spiral pipe structure. The heating wire with the solenoid structure can increase the heating area of the heating wire. The inside of the shell tube 4 is sequentially provided with a first quartz wool 24 and a second quartz wool 25 at intervals along the axial direction, and the target 26 is positioned between the first quartz wool 24 and the second quartz wool 25 in use. The first quartz wool has the function of supporting the target material, the problem that the heating of the blind end part of the shell pipe is uneven due to uneven winding of the heating wire can be avoided, and the target material can be prevented from splashing in the process of vacuumizing the shell pipe through the second quartz wool. The protective cover 8 is sleeved on the outer wall of the shell pipe, the protective cover is a metal cover, the heating wire is wound on the outer wall of the protective cover, and the protective cover can guarantee uniform heating of the shell pipe. The heating wire 5 is wrapped with an insulating material to realize the electric insulation between the heating wire and other components and the electric insulation between the coils of the heating wire, and the insulating material is made of glass fiber materials or glass fiber composite flexible materials.

The heating unit further comprises a shielding cover 9 sleeved outside the protective cover and used for isolating the heating wire from the external environment so as to improve the heating efficiency. The protective cover 8 and the shielding cover 9 are both formed by winding aluminum foil, and the thickness of the aluminum foil of the shielding cover 9 is larger than that of the protective cover 8. Two ends of the heating wire are respectively connected with the positive electrode and the negative electrode of the programmable power supply through leads to form a conductive loop of the heating wire. The heating unit further comprises a thermocouple 10, the acquisition end of the thermocouple 10 is located between the shielding case and the heating wire, the thermocouple is connected with a temperature controller 11, the temperature controller 11 is connected with the programmable power supply 7, the voltage/current of the programmable power supply can be adjusted to control the heating power, and the linear change of the heating temperature is realized.

The heating unit is connected with the ultrahigh vacuum cavity through a vacuum cavity connecting unit, the vacuum cavity connecting unit comprises a communicating pipe, one end of the communicating pipe is provided with a first adapter flange 21 used for being connected with a first flange 13 of the vacuum cavity, which is just opposite to the sample, on the vacuum cavity, the other end of the communicating pipe is provided with a second adapter flange 23, and the end part of the shell pipe 4 is provided with a third adapter flange 12 used for being connected with the second adapter flange 23. A micro-leakage valve 22 is arranged on the communicating pipe, a vacuum pump station 18 is connected on the communicating pipe, an adjusting valve 19 is arranged between the communicating pipe and the vacuum pump station, and a vacuum gauge is also arranged on the communicating pipe. Specifically, the communication pipe comprises a first communication pipe part 14 and a second communication pipe part 15, a four-way joint 16 is connected between the first communication pipe part and the second communication pipe part, and the first communication pipe part and the second communication pipe part are respectively connected with two joints of the four-way joint. The vacuum pump station 18 is connected with the other interface 17 of the four-way joint through an air suction pipeline, and the regulating valve 19 is arranged on the air suction pipeline. The last port 20 of the four-way junction is connected to a vacuum gauge. A microleak valve 22 is disposed on the second portion 15 of the communication tube. The setting of the microleakage valve 22 can adjust the gas partial pressure, thereby regulating the deposition amount.

Before the experiment begins, the regulating valve on the air exhaust pipeline is opened, the vacuum pump station vacuumizes the vacuum connecting cavity unit and the heating unit until the vacuum is higher than 2 × 10^-7After mbar, the target is heated. After the heating temperature and the heating rate are set by the temperature controller, the range is adjusted by the temperature controllerThe voltage/current applied to the heating wire by the power supply is controlled, the heating temperature is collected by the thermocouple, and after the temperature of the heating wire reaches the set temperature and is stabilized for a period of time, the period of time can be adjusted according to actual conditions, for example, 15 min. The heating temperature is slightly higher than the actual working temperature, and is used for removing impurity gas molecules in the target material. After the degassing is finished, a temperature controller is set to control the heating temperature to be stable for a period of time, and the period of time can be adjusted according to actual conditions and can also be 5 min. And closing the regulating valve, regulating the regulating knob of the microleakage valve, introducing the required gas molecules into the vacuum cavity from the vacuum cavity connecting unit, and efficiently reaching the surface of the sample due to the fact that the sample is over against the gas molecule introducing port.

The external heating device has the characteristics of linear change of program control temperature, external heating of the vacuum cavity, no need of introducing a vacuum sealing electrode, no need of closing the whole vacuum system to replace the target material, simple structure and simple and easy operation.

As shown in fig. 4, the second embodiment of the ultra-high vacuum equipment of the present invention is different from the first embodiment only in the structure of the protective cover 8, and in this embodiment, the protective cover 8 is a metal pipe structure with a blind end at one end.

As shown in fig. 5, the third embodiment of the ultrahigh vacuum equipment of the present invention is different from the first embodiment only in the structure of the shielding cover 9, in which the shielding cover 9 is a metal tube structure with a blind end at one end, and at this time, the shielding cover is provided with a first threading hole 26 and a second threading hole 27 for two ends of the heating wire to pass through.

An embodiment of the external heating device used in a vacuum environment of the present invention has the same structure as the external heating device in each embodiment of the above-mentioned ultra-high vacuum apparatus, and will not be described herein again.