阅读说明：本技术 一种圆筒型音圈电机磁性重力补偿器及音圈电机及其组件 (Cylindrical voice coil motor magnetic gravity compensator, voice coil motor and voice coil motor assembly ) 是由 印欣 孙亚雷 姚艺华 吴彩鸣 林浩元 于 2019-11-05 设计创作，主要内容包括：本发明公开了音圈电机相关技术领域的一种圆筒型音圈电机磁性重力补偿器及音圈电机及其组件,其中,磁性重力补偿器包括动子和定子；动子包括动子支架和动子永磁体,动子支架的纵截面为U字形,动子永磁体设置于U字形的开口处；定子包括定子铁芯、定子磁体组件和定子轴；定子的纵截面为E字形,定子铁芯设置于E字形外侧的两条相互平行的边上,定子轴设置于E字形中心的轴上,定子磁体组件包括相互重叠设置的定子永磁体与定子导磁块,定子磁体组件套接于定子轴的外围,定子永磁体位于定子导磁块与E字形底部之间；U字形的两条平行的边与E字形三条平行的边形成的两个间隙相适配；具有制造简单、易于与音圈电机结合、刚度特性好、温升低等特性。(The invention discloses a cylindrical voice coil motor magnetic gravity compensator, a voice coil motor and a voice coil motor assembly in the related technical field of voice coil motors, wherein the magnetic gravity compensator comprises a rotor and a stator; the rotor comprises a rotor support and a rotor permanent magnet, the longitudinal section of the rotor support is U-shaped, and the rotor permanent magnet is arranged at the U-shaped opening; the stator comprises a stator iron core, a stator magnet assembly and a stator shaft; the stator has an E-shaped longitudinal section, a stator iron core is arranged on two parallel edges on the outer side of the E-shaped longitudinal section, a stator shaft is arranged on a shaft at the center of the E-shaped longitudinal section, a stator magnet assembly comprises a stator permanent magnet and a stator magnetic conduction block which are arranged in an overlapped mode, the stator magnet assembly is sleeved on the periphery of the stator shaft, and the stator permanent magnet is positioned between the stator magnetic conduction block and the bottom of the E-shaped longitudinal section; two parallel sides of the U-shape are matched with two gaps formed by three parallel sides of the E-shape; the voice coil motor has the characteristics of simple manufacture, easy combination with the voice coil motor, good rigidity characteristic, low temperature rise and the like.)

1. The utility model provides a drum type voice coil motor magnetism gravity compensator which characterized in that: the rotor comprises a rotor and a stator; the rotor comprises a rotor support and a rotor permanent magnet, the longitudinal section of the rotor support is U-shaped, and the rotor permanent magnet is arranged at the opening of the U-shaped; the stator comprises a stator iron core, a stator magnet assembly and a stator shaft; the stator is characterized in that the longitudinal section of the stator is E-shaped, the stator iron core is arranged on two parallel edges on the outer side of the E-shaped stator, the stator shaft is arranged on a shaft at the center of the E-shaped stator, the stator magnet assembly comprises a stator permanent magnet and a stator magnetic conduction block which are arranged in an overlapped mode, the stator magnet assembly is sleeved on the periphery of the stator shaft, and the stator permanent magnet is located between the stator magnetic conduction block and the bottom of the E-shaped stator; the two parallel sides of the U-shape are matched with two gaps formed by the three parallel sides of the E-shape.

2. The cylindrical voice coil motor magnetic gravity compensator according to claim 1, characterized in that: the rotor permanent magnets are provided with a plurality of groups.

3. A voice coil motor, characterized in that: the magnetic gravity compensator comprising the cylindrical voice coil motor according to claim 1 or 2, wherein the rotor further comprises a cable and a coil winding, the coil winding is arranged on the outer wall between the rotor permanent magnet and the U-shaped bottom, and the coil winding is connected with the outside through the cable.

4. A voice coil motor as claimed in claim 3, wherein: the coil windings have a plurality of groups.

5. A voice coil motor as claimed in claim 3 or 4, wherein: the number of the stator magnet assemblies is equal to the sum of the number of the rotor permanent magnets and the number of the coil windings.

6. A voice coil motor as claimed in claim 5, wherein: the rotor permanent magnet and/or the stator permanent magnet are/is made of high-magnetic-level rare earth permanent magnets.

7. The voice coil motor of claim 6, wherein: the rare earth permanent magnet with high magnetic energy level is a neodymium iron boron permanent magnet, a samarium cobalt permanent magnet, an aluminum nickel cobalt permanent magnet or a ferrite permanent magnet.

8. A voice coil motor as claimed in claim 5, wherein: the stator core and/or the stator magnetic conduction block are made of high magnetic conduction materials.

9. A voice coil motor as claimed in claim 5, wherein: the rotor support and/or the stator shaft are made of high polymer materials or surface-insulated aluminum or non-magnetic stainless steel.

10. The utility model provides a magnetic gravity compensation formula drum type voice coil motor subassembly which characterized in that: the voice coil motor comprises a base, a linear guide rail, a spring and the voice coil motor according to any one of claims 3 to 9, wherein the stator is fixedly connected with the base, the rotor is connected with the linear guide rail through a sliding block, one end of the spring is fixedly connected with the rotor, and the other end of the spring is fixedly connected with the linear guide rail.

Technical Field

The invention relates to the technical field of voice coil motors, in particular to a cylindrical voice coil motor magnetic gravity compensator, a voice coil motor and a voice coil motor assembly.

Background

The cylindrical voice coil motor is a linear motion actuator which converts electric energy into mechanical energy. Different from the traditional servo motor and ball screw matched traditional system, the voice coil motor can directly drive the load. Therefore, the cylindrical voice coil motor has the advantages of simple structure, no maintenance, high response, high precision and the like, and is widely applied to occasions such as semiconductors and industrial automation.

However, the cylinder type voice coil motor in the prior art generally has a problem that when the motor is fixed, the motor needs to be powered on all the time to overcome the gravity of the motor and the load, which causes energy loss. This portion of the lost electrical energy is converted to heat that is dissipated to the surrounding environment. This additional heat generation can result in thermal expansion effects in the apparatus that can create technical drawbacks that are difficult to overcome for high precision apparatus, such as would be unacceptable in high precision applications such as lithography machines.

In order to solve the above problems, the industry proposes a technical solution of using a magnetic gravity compensator to counteract gravity. The gravity of the load is counteracted by utilizing the magnetic field force generated by the permanent magnetic material, and no additional power supply is needed. In addition, the magnetic coupling has lower rigidity than the mechanical coupling, and thus can be used as a vibration isolator.

HEIDENHAIN in WO2011/131462, a negative stiffness magnetic gravity compensator structure is proposed, the main part of which is composed of two sets of axially magnetized ring-shaped permanent magnets and one set of axially magnetized cone-shaped permanent magnets. ORACLE corporation in US6194796 proposes a classic cylindrical voice coil motor structure, but without gravity compensation. The patent US9172291 by ETEL corporation proposes a cylindrical voice coil motor with a magnetic gravity compensator function, the coil of which is wound on a conical iron core. ASML corporation in US6791443 proposes a voice coil motor with integrated magnetic gravity compensation, both planar and cylindrical. In a cylindrical configuration, there are several sets of radially magnetized permanent magnets. SMEE corporation in patents CN105281530 and CN103034065 proposed two cylindrical voice coil motors with compensation function of magnetic gravity compensator.

However, although this technical problem has been widely noticed by the prior art, the magnetic gravity compensator of the prior art still has a difficult stroke compact design in combination with the voice coil motor; the radial magnetizing permanent magnetic ring is needed, the structure is complex, the cost is high, and the like.

Disclosure of Invention

Aiming at the problem that the prior art is difficult to combine with a voice coil motor to realize a stroke compact design; the invention provides a cylindrical voice coil motor magnetic gravity compensator, a voice coil motor and a component thereof, and solves the technical problems that a permanent magnet ring needs to be magnetized radially, the structure is complex, and the cost is high.

In order to achieve the purpose, the technical scheme of the invention is as follows:

a cylindrical voice coil motor magnetic gravity compensator comprises a rotor and a stator; the rotor comprises a rotor support and a rotor permanent magnet, the longitudinal section of the rotor support is U-shaped, and the rotor permanent magnet is arranged at the opening of the U-shaped; the stator comprises a stator iron core, a stator magnet assembly and a stator shaft; the stator is characterized in that the longitudinal section of the stator is E-shaped, the stator iron core is arranged on two parallel edges on the outer side of the E-shaped stator, the stator shaft is arranged on a shaft at the center of the E-shaped stator, the stator magnet assembly comprises a stator permanent magnet and a stator magnetic conduction block which are arranged in an overlapped mode, the stator magnet assembly is sleeved on the periphery of the stator shaft, and the stator permanent magnet is located between the stator magnetic conduction block and the bottom of the E-shaped stator; the two parallel sides of the U-shape are matched with two gaps formed by the three parallel sides of the E-shape.

Furthermore, the rotor permanent magnets are provided with a plurality of groups.

A voice coil motor is characterized in that on the basis of any one of the cylindrical voice coil motor magnetic gravity compensators, a rotor further comprises a cable and a coil winding, the coil winding is arranged on the outer wall between a rotor permanent magnet and the U-shaped bottom, and the coil winding is connected with the outside through the cable.

Further, the coil windings have a plurality of groups.

Further, the number of the stator magnet assemblies is equal to the sum of the number of the rotor permanent magnets and the number of the coil windings.

Furthermore, the rotor permanent magnet and/or the stator permanent magnet are/is made of high-magnetic-level rare earth permanent magnets.

Preferably, the high magnetic energy level rare earth permanent magnet is a neodymium iron boron permanent magnet, a samarium cobalt permanent magnet, an alnico permanent magnet or a ferrite permanent magnet.

Preferably, the stator core and/or the stator magnetic conduction block are made of high magnetic conduction materials.

Preferably, the material of the mover support and/or the stator shaft is a polymer material or surface-insulated aluminum or non-magnetic stainless steel.

The utility model provides a magnetic gravity compensation formula drum type voice coil motor subassembly, includes base, linear guide, spring and as aforementioned any one the magnetic gravity compensation formula drum type voice coil motor, the stator with base fixed connection, the active cell pass through the slider with linear guide connects, the one end of spring with the active cell fixed connection other end with linear guide fixed connection.

The invention has the following outstanding advantages and beneficial effects:

1. the manufacture is simple: compared with the prior art, the permanent magnet in the technical scheme of the invention is axially magnetized, so that a whole permanent magnet can be easily used, the structure and the assembly are simpler, and the production cost is reduced;

2. easy to combine with a voice coil motor: the gravity compensator structure disclosed by the invention can be in seamless connection with a cylindrical voice coil motor structure to form a voice coil motor with a gravity compensation module;

3. the rigidity characteristic is good: compared with a spring with the same volume, the rigidity coefficient of the gravity compensator is very low, and the gravity compensator is suitable for being used as a vibration isolator; in addition, the stiffness characteristic of the compensator is negative, and the compensator can be used in combination with a spring with the same absolute stiffness coefficient to realize gravity compensation of approximate zero stiffness.

4. The temperature rise is low: because the gravity compensation structure counteracts gravity, ampere force only needs to provide the force needed by dynamic adjustment, thereby greatly reducing current and heating, avoiding precision error caused by thermal expansion, and being very suitable for high-precision application occasions such as semiconductors.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic overall perspective view of a voice coil motor according to the present invention;

fig. 2 is a schematic longitudinal sectional view of a magnetic gravity compensator of a cylindrical voice coil motor according to embodiment 1;

fig. 3 is a schematic longitudinal sectional view of a magnetic gravity compensator of a cylindrical voice coil motor according to embodiment 2;

fig. 4 is a schematic longitudinal sectional structure of a voice coil motor according to embodiment 3;

fig. 5 is a schematic longitudinal sectional structure of a voice coil motor according to embodiments 4 and 5;

fig. 6 is a schematic perspective view of a mover of a voice coil motor according to embodiment 4;

fig. 7 is an exploded view of a stator of a voice coil motor in embodiment 5;

fig. 8 is a magnetic field distribution diagram of the mover of the voice coil motor in embodiment 4 at different positions;

fig. 9 is a relationship of levitation force and mover position of the magnetic gravity compensator in embodiment 4;

fig. 10 is a graph showing the relationship between the ampere force and the mover position of the voice coil motor portion in embodiment 4;

fig. 11 is a schematic structural view of a magnetic gravity compensated cylindrical voice coil motor assembly according to embodiment 7;

in the figure: 1-a mover; 2-a stator; 3-a cable; 4-a mover support; 5-a coil winding; 6-mover permanent magnets; 7-a stator core; 8-stator permanent magnets; 9-stator magnetic conduction block; 10-a stator shaft; 11-a linear guide rail; 12-a spring; 13-load; 14-base.

Detailed Description

The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

It should be noted that, in the description of the present invention, the terms "upper", "lower", etc. indicate the orientation or position relationship of the structure of the present invention based on the drawings, and are only for convenience of describing the present invention, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; in specific implementation, the up-down position relation of the structure in the drawing can be exchanged.

In addition, unless expressly stated or limited otherwise, the terms "mounted" and "connected" are to be construed broadly, e.g., the connection may be a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two structures can be directly connected or indirectly connected through an intermediate medium, and the two structures can be communicated with each other. To those skilled in the art, the specific meanings of the above terms in the present invention can be understood in light of the present general concepts, in connection with the specific context of the scheme.